Laser profile detection device and detection method

Abstract

The embodiment of the present invention discloses a laser profile detection device and detection method. The laser profile detection device includes a rectangular aperture module, an energy detector, a moving module, and a processing module; the rectangular aperture module is arranged at the light output end of the light beam generating module, and the rectangular aperture module includes a rectangular light-through hole; the energy detector is arranged on the light-outlet side of the rectangular light-through hole, and is used to detect the light intensity of the light transmitted by the rectangular light-through hole; the moving module is connected to the light beam generating module and / or the rectangular aperture module, and is used to drive the light beam generating module and / or the rectangular aperture module to move, so that the rectangular light-through hole sequentially passes the light at each position of the laser beam; the processing module is electrically connected to the energy detector, and is used to obtain the two-dimensional profile distribution of the laser beam according to the signal received by the energy detector. The technical solution of the embodiment of the present invention can realize the spot profile measurement compatible with large size, mid-to-far infrared, and large aspect ratio.

Description

Technical Field

[0001] The embodiments of the present invention relate to optical detection technology, and more particularly to a laser profile detection device and a detection method. Background Art

[0002] In the spectrum, light with wavelengths between 0.75μm and 1000μm is called infrared, and is typically divided into three parts: near-infrared, mid-infrared, and far-infrared, corresponding to wavelengths of 0.75μm to 3.0μm, 3μm to 20μm, and 20μm to 1000μm, respectively. The mid-infrared and far-infrared bands have important applications in remote sensing, detection, medicine, and bioimaging. Due to their high brightness, good coherence, and extremely high spatial resolution, they have been widely used in fields such as laser directional infrared jamming, laser communications, infrared ranging, atmospheric wind speed and temperature measurement, and bioimaging.

[0003] Laser beam characteristics are important indicators of lasers. For the analysis of mid- and far-infrared laser beams, the spot profile is generally measured by two-dimensional slit scanning. However, existing detection devices have common problems: low power cannot be measured, small-scale and high-precision slits are difficult to produce, and the two-dimensional freedom of movement and the large space occupied by the slits make commercial production difficult. Summary of the Invention

[0004] The embodiments of the present invention provide a laser profile detection device and a detection method to achieve spot profile measurement that is compatible with large size, mid-to-far infrared, and large aspect ratio.

[0005] In a first aspect, an embodiment of the present invention provides a laser profile detection device for detecting a two-dimensional profile distribution of a laser beam output by a beam generating module, the laser profile detection device comprising a rectangular aperture module, an energy detector, a moving module, and a processing module;

[0006] The rectangular hole module is arranged at the light output end of the light beam generating module, and the rectangular hole module includes a rectangular light hole;

[0007] The energy detector is arranged on the light-emitting side of the rectangular light hole, and is used to detect the light intensity of the light transmitted by the rectangular light hole;

[0008] The moving module is connected to the beam generating module and / or the rectangular aperture module, and is used to drive the beam generating module and / or the rectangular aperture module to move, so that the rectangular light-through hole sequentially transmits light at various positions of the laser beam;

[0009] The processing module is electrically connected to the energy detector and is used to obtain the two-dimensional profile distribution of the laser beam according to the signal received by the energy detector.

[0010] Optionally, the rectangular aperture module includes a light-shielding plate, and the rectangular light-through hole is located at the center of the light-shielding plate;

[0011] The moving module is used to drive the light beam generating module and / or the rectangular hole module to sequentially translate along a first direction by a first distance s1, or to drive the light beam generating module and / or the rectangular hole module to sequentially translate along a second direction by a second distance s2;

[0012] The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the plane where the light shielding plate is located.

[0013] Optional, s1≠s2.

[0014] Optionally, the long side of the rectangular light-through hole is parallel to the first direction, and the length of the long side of the rectangular light-through hole is l1, where l1=n×s1;

[0015] When the relative movement direction of the beam generating module and the rectangular aperture module is along the first direction, and the overlapping length of the long side of the rectangular light hole and the laser beam is less than or equal to l1, the light intensity obtained by the energy detector during the kth movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k ;

[0016] When the overlapping length of the long side of the rectangular light hole and the laser beam is greater than l1, the light intensity of the corresponding light spot of the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ;or,

[0017] The long side of the rectangular light-through hole is parallel to the second direction, and the length of the long side of the rectangular light-through hole is l2, where l2=n×s2;

[0018] When the relative movement direction of the beam generating module and the rectangular aperture module is along the second direction, and the overlapping length of the long side of the rectangular light hole and the laser beam is less than or equal to l2, the light intensity obtained by the energy detector during the kth movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k ;

[0019] When the overlapping length of the long side of the rectangular light hole and the laser beam is greater than l2, the light intensity of the corresponding light spot of the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ;

[0020] Wherein, n is an integer greater than 1, k is a positive integer, and m is an integer greater than n.

[0021] Optionally, the short side of the rectangular light-through hole is parallel to the first direction, and the length of the short side of the rectangular light-through hole is s1;

[0022] When the relative movement direction of the beam generating module and the rectangular aperture module is along the first direction, the light intensity obtained by the energy detector during the k-th movement is I k =I_PD k ;or,

[0023] The short side of the rectangular light-through hole is parallel to the second direction, and the length of the short side of the rectangular light-through hole is s2;

[0024] When the relative movement direction of the beam generating module and the rectangular aperture module is along the second direction, the light intensity obtained by the energy detector during the k-th movement is I k =I_PD k ;

[0025] Wherein, k is a positive integer.

[0026] Optionally, the moving module is used to drive the light beam generating module and / or the rectangular aperture module to translate along a first direction at a first speed, or to drive the light beam generating module and / or the rectangular aperture module to translate along a second direction at a second speed;

[0027] The energy detector detects the intensity of light transmitted through the rectangular light hole at a first sampling frequency;

[0028] The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the plane where the light shielding plate is located.

[0029] Optionally, the rectangular aperture module includes a cylindrical light-shielding structure, the rectangular light-through hole is located on a side wall of the cylindrical light-shielding structure, and the energy detector is located inside the cylindrical light-shielding structure;

[0030] The moving module is used to drive the cylindrical light-shielding structure to rotate around the central axis.

[0031] Optionally, the laser beam output by the beam generating module is an infrared beam.

[0032] Optionally, the energy detector includes a photoelectric detector or a pyroelectric detector.

[0033] Optionally, the area of ​​the rectangular light hole is larger than the spot area of ​​the laser beam.

[0034] In a second aspect, an embodiment of the present invention further provides a laser profile detection method, which is performed using the above-mentioned laser profile detection device, comprising:

[0035] The beam generating module outputs the laser beam to be measured;

[0036] The energy detector detects the intensity of light transmitted through the rectangular light hole;

[0037] The moving module drives the beam generating module and / or the rectangular aperture module to move, so that the rectangular light-through hole sequentially transmits light at various positions of the laser beam;

[0038] The processing module obtains the two-dimensional profile distribution of the laser beam according to the signal received by the energy detector.

[0039] The laser profile detection device provided by an embodiment of the present invention includes a rectangular aperture module, an energy detector, a moving module and a processing module; a rectangular light-through hole is set on the rectangular aperture module, so that the rectangular light-through hole transmits at least a part of the light beam; the light intensity of the light transmitted by the rectangular light-through hole is detected by the energy detector; the beam generating module and / or the rectangular aperture module are driven to move by the moving module, so that the beam generating module and the rectangular aperture module move relative to each other, so as to realize the scanning of the entire light spot by the rectangular light-through hole, so that the rectangular light-through hole passes the light at each position of the laser beam in turn; the signal received by the energy detector is processed by the processing module to obtain the two-dimensional profile distribution of the laser beam, so as to realize the measurement of the light spot profile that is compatible with large size, mid-to-far infrared, and large aspect ratio. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 A schematic structural diagram of a laser profile detection device provided by an embodiment of the present invention;

[0041] Figure 2 and Figure 3 They are respectively schematic diagrams of a data processing algorithm in a spot sampling process provided by an embodiment of the present invention;

[0042] Figure 4 and Figure 5 They are schematic diagrams of another data processing algorithm in the spot sampling process provided by an embodiment of the present invention;

[0043] Figure 6 and Figure 7They are schematic diagrams of another data processing algorithm in the spot sampling process provided by an embodiment of the present invention;

[0044] Figure 8 A schematic diagram of a light spot sampling and splicing restoration simulation result provided by an embodiment of the present invention;

[0045] Figure 9 A schematic structural diagram of another laser profile detection device provided by an embodiment of the present invention;

[0046] Figure 10 A schematic flow chart of a laser profile detection method provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0047] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It will be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all structures.

[0048] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. It should be noted that the directional words such as "upper", "lower", "left", and "right" described in the embodiments of the present invention are described based on the angles shown in the accompanying drawings and should not be understood as limitations on the embodiments of the present invention. In addition, in the context, it is also necessary to understand that when it is mentioned that an element is formed "on" or "under" another element, it can not only be formed directly "on" or "under" another element, but can also be formed indirectly "on" or "under" another element through an intermediate element. The terms "first", "second", etc. are only used for descriptive purposes and do not indicate any order, quantity or importance, but are only used to distinguish different components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0049] Figure 1Schematic diagram of the structure of a laser profile detection device provided by an embodiment of the present invention. The laser profile detection device provided in this embodiment is used to detect the two-dimensional profile distribution of the laser beam output by the beam generating module 1. The laser profile detection device includes a rectangular aperture module 10, an energy detector 20, a moving module 30 and a processing module 40; the rectangular aperture module 10 is arranged at the light output end of the beam generating module 1, and the rectangular aperture module 10 includes a rectangular light-through hole 101; the energy detector 20 is arranged on the light-outlet side of the rectangular light-through hole 101, and is used to detect the light intensity of the light transmitted by the rectangular light-through hole 101; the moving module 30 is connected to the beam generating module 1 and / or the rectangular aperture module 10, and is used to drive the beam generating module 1 and / or the rectangular aperture module 10 to move, so that the rectangular light-through hole 101 sequentially passes light at each position of the laser beam ( Figure 1 The illustration that the moving module 30 is connected to both the beam generating module 1 and the rectangular hole module 10, driving the beam generating module 1 to move in the x-direction and the rectangular hole module 10 to move in the y-direction is merely illustrative and does not limit the embodiments of the present invention. In other embodiments, the moving module 30 may be connected to only one module, driving the module to move in two directions); the processing module 40 is electrically connected to the energy detector 20, and is used to derive a two-dimensional profile distribution of the laser beam based on the signal received by the energy detector 20.

[0050] Among them, the beam generating module 1 can be used in various types of equipment using high-energy lasers in the semiconductor field, such as laser annealing equipment, etc. For example, since high-energy laser equipment generally uses infrared lasers, the laser beam output by the beam generating module 1 is optionally an infrared beam. In other embodiments, the laser beam output by the beam generating module 1 can be a beam of other wavelengths, and only a matching energy detector 20 needs to be provided. The rectangular aperture module 10 is provided with a rectangular light-through hole 101. Compared with the prior art in which a light-transmitting slit is required, the processing difficulty can be reduced. By controlling the relative movement of the beam generating module 1 and the rectangular aperture module 10 in two degrees of freedom (x direction and y direction), the rectangular light-through hole 101 can perform a two-dimensional traversal scanning of the laser beam to be measured, so that the light intensity of each point corresponding to the x coordinate and the y coordinate can be measured. By integrating all the data, the two-dimensional profile distribution of the light spot can be obtained, and its repeatability can reach the micron or even nanometer level, with high detection accuracy. The light at each sampling position passes through the rectangular light hole 101 and is received by the energy detector 20. Depending on the energy and wavelength of the light beam to be measured, the energy detector 20 may optionally include a photoelectric detector or a pyroelectric detector, which can be selected according to actual conditions during implementation. After the moving module 30 drives the light beam generating module 1 and / or the rectangular hole module 10 to move to achieve a two-dimensional traversal of the laser beam and the rectangular light hole 101, the energy of each sampling position point can be obtained through data processing, and after splicing, the two-dimensional profile distribution of the light spot to be measured can be obtained. Figure 1The area of ​​the rectangular light hole 101 shown in the figure is smaller than the spot area of ​​the laser beam for schematic purposes only. In a specific implementation, the area of ​​the rectangular light hole 101 may be smaller than, equal to, or larger than the spot area of ​​the laser beam. In a certain embodiment, optionally, the area of ​​the rectangular light hole 101 is larger than the spot area of ​​the laser beam. A rectangular light hole 101 with a larger area is easier to manufacture, which can avoid preparing a slit with a very small width, thereby reducing the process difficulty and reducing the cost of the laser profile detection device.

[0051] The technical solution of this embodiment is to set a rectangular light-through hole on the rectangular hole module so that the rectangular light-through hole transmits at least a part of the light beam; detect the light intensity of the light transmitted by the rectangular light-through hole by the detection module; drive the beam generating module and / or the rectangular hole module to move by the moving module, so that the beam generating module and the rectangular hole module move relative to each other, so as to realize the scanning of the entire light spot by the rectangular light-through hole, so that the rectangular light-through hole transmits the light at each position of the laser beam in turn; process the signal received by the energy detector by the processing module to obtain the two-dimensional profile distribution of the laser beam, so as to realize the measurement of the light spot profile that is compatible with large size, mid-to-far infrared, and large aspect ratio.

[0052] On the basis of the above technical solutions, optional, continue to refer to Figure 1 The rectangular aperture module 10 includes a light shielding plate 102, and the rectangular light hole 101 is located at the center of the light shielding plate 102; the moving module 30 is used to drive the light beam generating module 1 and / or the rectangular aperture module 10 to sequentially translate along the first direction x by a first distance s1, or to drive the light beam generating module 1 and / or the rectangular aperture module 10 to sequentially translate along the second direction y by a second distance s2 ( Figure 1 the first direction x and the second direction y are perpendicular to each other, and both the first direction x and the second direction y are parallel to the plane where the light shielding plate 102 is located.

[0053] It is understandable that Figure 1In the embodiment, the moving module 30 drives the light beam generating module 1 to move along the first direction x and drives the rectangular aperture module 10 to move along the second direction y, wherein each time the light beam generating module 1 moves a distance s1 in the first direction x, the rectangular aperture module 10 moves a distance s2 in the second direction y, i.e., s1 and s2 represent the relative movement distances of the rectangular light hole 101 and the light spot during each movement. For example, when the light beam generating module 1 and the rectangular aperture module 10 move simultaneously along the first direction x, one can be set to move s1 / 2 in the positive x direction and the other to move s1 / 2 in the negative x direction, rather than each component moving a distance s1. By setting the light beam generating module 1 and the rectangular aperture module 10 to move relative to each other in the first direction x and the second direction y, a two-dimensional traversal of the light spot by the rectangular light hole 101 is achieved. In specific implementation, the moving module 30 can only drive the light beam generating module 1 to move, or only drive the rectangular aperture module 10 to move, or can drive both the light beam generating module 1 and the rectangular aperture module 10 to move. The specific implementation can be designed according to actual conditions. In other embodiments, the mobile module can also drive the energy detector 20 to move when necessary, so as to avoid using a large-area detector and reduce costs.

[0054] Optional, s1≠s2.

[0055] It can be understood that in a specific implementation, the displacements of the two degrees of freedom do not interfere with each other, so the motion resolutions in the two directions can be the same or different. In a certain embodiment, the spot shape of the laser beam can be a long strip, and s1≠s2 can be set at this time to ensure the measurement accuracy in both directions.

[0056] Optionally, the long side of the rectangular light hole is parallel to the first direction, and the length of the long side of the rectangular light hole is l1, l1 = n × s1; when the relative movement direction of the beam generating module and the rectangular hole module is along the first direction, and the overlapping length of the long side of the rectangular light hole and the laser beam is less than or equal to l1, the light intensity obtained by the energy detector during the kth movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k When the overlap length of the long side of the rectangular aperture and the laser beam is greater than l1, the light intensity of the corresponding spot of the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1; Or, the long side of the rectangular light hole is parallel to the second direction, and the length of the long side of the rectangular light hole is l2, l2 = n × s2; when the relative movement direction of the beam generating module and the rectangular hole module is along the second direction, and the overlapping length of the long side of the rectangular light hole and the laser beam is less than or equal to l2, the light intensity obtained by the energy detector during the kth movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k When the overlap length of the long side of the rectangular aperture and the laser beam is greater than l2, the light intensity of the corresponding spot of the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ; Wherein, n is an integer greater than 1, k is a positive integer, and m is an integer greater than n.

[0057] For example, Figure 2 and Figure 3 are schematic diagrams of a data processing algorithm in a spot sampling process provided by an embodiment of the present invention, and refer to Figure 2 , the long side of the rectangular light hole 101 is parallel to the first direction x, and the long side length of the rectangular light hole 101 is l1, l1 = n × s1 ( Figure 2 ( n = 4 is schematically shown in the figure, which is not a limitation of the embodiments of the present invention); when the relative movement direction of the beam generating module and the rectangular aperture module is along the first direction x, the overlapping length of the long side of the rectangular light hole 101 and the laser beam is less than or equal to l1, that is, when the rectangular light hole 101 does not completely enter the light spot, the light intensity obtained by the energy detector during the k-th movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k ;refer to Figure 3 When the overlapping length of the long side of the rectangular light hole 101 and the laser beam is greater than l1, that is, when the rectangular light hole 101 completely enters the light spot, the energy before the mth movement I1~I m-1 are all known, and the light intensity of the light spot corresponding to the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ; Figure 4 and Figure 5are schematic diagrams of another data processing algorithm in the spot sampling process provided by an embodiment of the present invention, with reference to Figure 4 , the long side of the rectangular light hole 101 is parallel to the second direction y, and the long side length of the rectangular light hole 101 is l2, l2 = n × s2 ( Figure 4 ( n = 4 is schematically shown in the figure, which is not a limitation of the embodiments of the present invention); when the relative movement direction of the beam generating module and the rectangular aperture module is along the second direction y, the overlapping length of the long side of the rectangular light hole 101 and the laser beam is less than or equal to l2, that is, when the rectangular light hole 101 does not completely enter the light spot, the light intensity obtained by the energy detector during the k-th movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k ;refer to Figure 5 When the overlapping length of the long side of the rectangular light hole 101 and the laser beam is greater than l2, that is, when the rectangular light hole 101 completely enters the light spot, the energy I1~I before the mth movement m-1 are all known, and the light intensity of the light spot corresponding to the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ; Wherein, n is an integer greater than 1, k is a positive integer, and m is an integer greater than n.

[0058] In another embodiment, the relative movement direction of the beam generating module and the rectangular aperture module can be parallel to the short side of the rectangular light-through hole. For simplicity, the distance of each movement can be equal to the distance of the short side. Figure 6 and Figure 7 are schematic diagrams of another data processing algorithm in the spot sampling process provided by an embodiment of the present invention, with reference to Figure 6 Optionally, the short side of the rectangular light hole 101 is parallel to the first direction x, and the length of the short side of the rectangular light hole 101 is s1; when the relative movement direction of the beam generating module and the rectangular aperture module is along the first direction, the rectangular light hole 101 becomes a slit, and the energy received by the detector at a single sampling position can represent the energy at that position. The light intensity obtained by the energy detector during the kth movement is I k =I_PD k ; or, refer to Figure 7 , the short side of the rectangular light hole 101 is parallel to the second direction, and the length of the short side of the rectangular light hole 101 is s2; when the relative movement direction of the beam generating module and the rectangular hole module is along the second direction, the light intensity obtained by the energy detector during the kth movement is I k =I_PD k; where k is a positive integer.

[0059] Figure 8 A schematic diagram of a light spot sampling and splicing restoration simulation result provided by an embodiment of the present invention, wherein the sampling interval Δx is 37.5 μm. Figure 8 It can be seen that only the high-frequency signal is lost in the restored profile, and the size and position restoration accuracy is very high. The actual long side full width at half maximum FWHM of the light spot is 11.141 mm, and the short side FWHM is 75 μm. After restoration, the long side FWHM of the light spot is 11.175 mm, and the short side FWHM is 75 μm.

[0060] In the above embodiment, the light beam generating module and the rectangular aperture module are scanned in a step-by-step manner, and the spatial sampling resolution thereof is determined by the moving step length. In another embodiment, it can also be determined by the moving speed and the sampling frequency. Optionally, the moving module is used to drive the light beam generating module and / or the rectangular aperture module to translate along a first direction at a first speed, or to drive the light beam generating module and / or the rectangular aperture module to translate along a second direction at a second speed; the energy detector detects the intensity of the light transmitted through the rectangular light hole at a first sampling frequency; the first direction and the second direction are perpendicular, and the first direction and the second direction are both parallel to the plane where the light-shielding plate is located. In specific implementation, the moving speed of the light beam generating module and / or the rectangular aperture module and the sampling frequency of the energy detector can be flexibly selected according to actual conditions.

[0061] Figure 9 A schematic diagram of another laser profile detection device provided by an embodiment of the present invention, referring to Figure 9 Optionally, the rectangular hole module 10 includes a cylindrical shading structure 103, the rectangular light-through hole 101 is located on the side wall of the cylindrical shading structure 103, and the energy detector 20 is located inside the cylindrical shading structure 103; the moving module 30 is used to drive the cylindrical shading structure 103 to rotate around the central axis.

[0062] The torque reduction hole module 10 is designed in a rotation scanning form, which is beneficial to reducing the volume of the detection device.

[0063] Figure 10 This is a flow chart of a laser contour detection method provided by an embodiment of the present invention. The laser contour detection method provided by this embodiment is performed using any of the laser contour detection devices provided by the above embodiments, and includes:

[0064] Step S110: the beam generating module outputs the laser beam to be measured;

[0065] Step S120: The energy detector detects the intensity of the light transmitted through the rectangular light hole;

[0066] Step S130: The moving module drives the beam generating module and / or the rectangular aperture module to move so that the rectangular aperture sequentially transmits light at each position of the laser beam;

[0067] Step S140: The processing module obtains a two-dimensional profile distribution of the laser beam according to the signal received by the energy detector.

[0068] The technical solution of this embodiment is to output the laser beam to be measured through the beam generating module, and detect the light intensity of the light transmitted through the rectangular light hole through the detection module; the moving module drives the beam generating module and / or the rectangular hole module to move, so that the beam generating module and the rectangular hole module move relative to each other, so as to realize the scanning of the entire light spot by the rectangular light hole, so that the rectangular light hole sequentially transmits the light at each position of the laser beam; the processing module processes the signal received by the energy detector to obtain the two-dimensional profile distribution of the laser beam, so as to realize the measurement of the light spot profile that is compatible with large size, mid-to-far infrared, and large aspect ratio.

[0069] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A laser profile detection device, characterized in that: Used to detect the two-dimensional profile distribution of the laser beam output by the beam generating module, the laser profile detecting device includes a rectangular hole module, an energy detector, a moving module and a processing module; The rectangular hole module is arranged at the light output end of the light beam generating module, and the rectangular hole module includes a rectangular light hole; The energy detector is arranged on the light-emitting side of the rectangular light hole, and is used to detect the light intensity of the light transmitted by the rectangular light hole; The moving module is connected to the beam generating module and / or the rectangular aperture module, and is used to drive the beam generating module and / or the rectangular aperture module to move, so that the rectangular light-through hole sequentially transmits light at various positions of the laser beam; The processing module is electrically connected to the energy detector and is used to obtain the two-dimensional profile distribution of the laser beam according to the signal received by the energy detector; The rectangular aperture module includes a light shielding plate, and the rectangular light hole is located at the center of the light shielding plate; The moving module is used to drive the light beam generating module and / or the rectangular hole module to sequentially translate along a first direction by a first distance s1, or to drive the light beam generating module and / or the rectangular hole module to sequentially translate along a second direction by a second distance s2; The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the plane where the light shielding plate is located.

2. The laser contour detection device according to claim 1, characterized in that: s1≠s2.

3. The laser contour detection device according to claim 1, characterized in that: The long side of the rectangular light-through hole is parallel to the first direction, and the length of the long side of the rectangular light-through hole is l1, where l1=n×s1; When the relative movement direction of the beam generating module and the rectangular aperture module is along the first direction, and the overlapping length of the long side of the rectangular light hole and the laser beam is less than or equal to l1, the light intensity obtained by the energy detector during the kth movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k ; When the overlapping length of the long side of the rectangular light hole and the laser beam is greater than l1, the light intensity of the corresponding light spot of the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ;or, The long side of the rectangular light-through hole is parallel to the second direction, and the length of the long side of the rectangular light-through hole is l2, where l2=n×s2; When the relative movement direction of the beam generating module and the rectangular aperture module is along the second direction, and the overlapping length of the long side of the rectangular light hole and the laser beam is less than or equal to l2, the light intensity obtained by the energy detector during the kth movement is I_PD k , the light intensity obtained by the energy detector during the k+1th movement is I_PD k+1 , then the light intensity of the spot corresponding to the k+1th movement is I k+1 =I_PD k+1 -I_PD k ; When the overlapping length of the long side of the rectangular light hole and the laser beam is greater than l2, the light intensity of the corresponding light spot of the mth movement is I m =I_PD m -I_PD m-1 +I m-n+1 ; Wherein, n is an integer greater than 1, k is a positive integer, and m is an integer greater than n.

4. The laser contour detection device according to claim 1, characterized in that: The short side of the rectangular light-through hole is parallel to the first direction, and the length of the short side of the rectangular light-through hole is s1; When the relative movement direction of the beam generating module and the rectangular aperture module is along the first direction, the light intensity obtained by the energy detector during the k-th movement is I k =I_PD k ;or, The short side of the rectangular light-through hole is parallel to the second direction, and the length of the short side of the rectangular light-through hole is s2; When the relative movement direction of the beam generating module and the rectangular aperture module is along the second direction, the light intensity obtained by the energy detector during the k-th movement is I k =I_PD k ; Wherein, k is a positive integer.

5. The laser contour detection device according to claim 1, characterized in that: The moving module is used to drive the light beam generating module and / or the rectangular aperture module to translate along a first direction at a first speed, or to drive the light beam generating module and / or the rectangular aperture module to translate along a second direction at a second speed; The energy detector detects the intensity of light transmitted through the rectangular light hole at a first sampling frequency; The first direction and the second direction are perpendicular to each other, and both the first direction and the second direction are parallel to the plane where the light shielding plate is located.

6. The laser contour detection device according to claim 1, characterized in that: The rectangular aperture module includes a cylindrical light-shielding structure, the rectangular light-through hole is located on the side wall of the cylindrical light-shielding structure, and the energy detector is located inside the cylindrical light-shielding structure; The moving module is used to drive the cylindrical light-shielding structure to rotate around the central axis.

7. The laser contour detection device according to claim 1, characterized in that: The laser beam output by the beam generating module is an infrared beam.

8. The laser contour detection device according to claim 1, characterized in that: The energy detector includes a photoelectric detector or a pyroelectric detector.

9. The laser contour detection device according to claim 1, characterized in that: The area of ​​the rectangular light hole is larger than the spot area of ​​the laser beam.

10. A laser contour detection method, performed using the laser contour detection device according to any one of claims 1 to 9, characterized in that: include: The beam generating module outputs the laser beam to be measured; The energy detector detects the intensity of light transmitted through the rectangular light hole; The moving module drives the beam generating module and / or the rectangular aperture module to move, so that the rectangular light-through hole sequentially transmits light at various positions of the laser beam; The processing module obtains the two-dimensional profile distribution of the laser beam according to the signal received by the energy detector.

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