Precision high-voltage power supply device with dual feedback loop

Abstract

A high-voltage (HV) power supply device outputs an output voltage based on a control signal generated by dual analog / digital feedback loops. The control signal is determined at least in part by an error amplifier that receives a measurement signal attenuated proportionally to the output voltage and an output signal from a digital-to-analog converter (DAC). The ADC also receives the measurement signal and transmits it in digitized form to a digital processor. The digital processor calculates a digital DAC data signal based on the measurement signal and a digital setpoint input signal corresponding to a setpoint voltage value desired to be output from the high-voltage source. The DAC receives the DAC data signal and converts it into a DAC output signal that is transmitted to the error amplifier.

Description

[0001] Related applications

[0002] This application claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 038588, filed June 12, 2020, entitled “DUALFEEDBACK LOOP FOR PRECISION HIGH VOLTAGE POWER SUPPLY”, pursuant to 35 U.SC §119(e), the entire contents of which are incorporated herein by reference. Technical Field

[0003] This invention generally relates to a high-voltage power supply device for use in instruments requiring precise high-voltage power (e.g., mass spectrometers and electron microscopes). Specifically, the invention relates to a high-voltage power supply device characterized by a dual feedback loop for controlling the power output from said power supply device. Background Technology

[0004] High-voltage (HV) power supplies (e.g., DC voltages output in the range of 1 kV or greater) require feedback control loops to enable the power supply to output high voltages with a desired level of accuracy, i.e., an output voltage whose amplitude is within the acceptable tolerance range of the desired setpoint voltage. In a typical configuration, the HV power supply senses the output voltage and feeds it back via an analog or digital loop to control the operation of the HV power supply, thereby achieving low-frequency noise and drift in the order of parts per million (ppm).

[0005] Typical HV power supplies use various components in their feedback control loops that introduce noise and drift into the output voltage. The need for many such components in a power supply makes it difficult to keep their overall degrading effect on the output voltage low enough to achieve the desired level of accuracy. The performance of some instruments, such as time-of-flight (TOF) mass spectrometers and electron microscopes, is degraded by the noise and drift of their internal HV power supplies.

[0006] There is a current need for an HV power supply device that can reliably supply output voltage at the desired high level of accuracy. Summary of the Invention

[0007] In order to address all or part of the problems described above and / or other problems that may have been observed by those skilled in the art, this disclosure provides methods, processes, systems, apparatuses, instruments and / or devices as described by way of example in the following enumerated implementations.

[0008] This document discloses a high-voltage (HV) power supply device that outputs a highly accurate output voltage. The output voltage is determined or controlled by a control signal provided to the high-voltage source via a dual analog / digital feedback loop. The control signal is determined at least in part by an error amplifier that receives a measurement signal attenuated proportionally to the output voltage and a digital-to-analog converter (DAC) output signal. The analog-to-digital converter (ADC) also receives the measurement signal and transmits it in digitized form to a digital processor. The digital processor calculates a digital DAC data signal based on the measurement signal and a digital setpoint input signal corresponding to a setpoint voltage value desired to be output from the high-voltage source. The DAC receives the DAC data signal and converts it into a DAC output signal that is transmitted to the error amplifier. In this embodiment, adding an ADC to implement the digital feedback loop improves the accuracy of the HV power supply device without introducing significant additional errors (e.g., noise, drift, etc.).

[0009] According to one embodiment, a high-voltage (HV) power supply device includes: a high-voltage output terminal; a high-voltage source including a control signal input terminal and configured to output an output voltage at the high-voltage output terminal based on a control signal received at the control signal input terminal; a voltage divider configured to generate a proportionally attenuated measurement signal according to the output voltage; an error amplifier including a feedback input terminal, a setting input terminal, and an amplifier output terminal, wherein the error amplifier is configured to receive the measurement signal from the voltage divider at the feedback input terminal, receive a digital-to-analog converter (DAC) output signal at the setting input terminal, generate the control signal based on the measurement voltage signal and the DAC output signal, and output the control signal from the amplifier output terminal to the control signal input terminal; and an analog-to-digital converter (ADC) configured to receive the measurement signal from the voltage divider and convert the measurement signal... The system comprises: an ADC data signal and an output ADC data signal; a digital processor configured to receive the ADC data signal from the ADC, receive a digital setpoint input signal, and generate a digital DAC data signal based on the ADC data signal and the digital setpoint input signal, wherein the digital setpoint input signal corresponds to a setpoint voltage value of the output voltage to be output at the high voltage output terminal; and a digital-to-analog converter (DAC) configured to receive the digital DAC data signal from the digital processor, convert the digital DAC data signal into an analog DAC output signal, and output the DAC output signal to the setpoint input terminal, wherein the digital processor is configured to calculate a value of the digital DAC data signal that effectively sets the control signal output by the error amplifier to effectively adjust the output voltage output by the high voltage source to the setpoint voltage value.

[0010] According to another embodiment, a high-voltage (HV) power supply device includes: a high-voltage output terminal; a high-voltage source including a control signal input terminal and a return side connected to the high-voltage output terminal, wherein the high-voltage source is configured to output an output voltage, as measured from the return side, to the high-voltage output terminal based on a control signal received at the control signal input terminal and an amplifier output signal received at the return side; a voltage divider configured to generate a proportionally attenuated measurement signal according to the output voltage; and an error amplifier including a feedback input terminal, a setting input terminal, and an amplifier output terminal, wherein the... An error amplifier is configured to receive the measurement signal from the voltage divider at the feedback input, receive a digital-to-analog converter (DAC) output signal at the setting input, generate the amplifier output signal based on the measurement signal and the DAC output signal, and output the amplifier output signal from the amplifier output to the return side; an analog-to-digital converter (ADC) is configured to receive the measurement signal from the voltage divider, convert the measurement signal into an ADC data signal, and output the ADC data signal; a digital processor is configured to receive the ADC data signal from the ADC. The system includes: receiving an amplifier output signal from the error amplifier; receiving a digital setpoint input signal; and generating a first digital DAC data signal and a second digital DAC data signal based on the ADC data signal, the amplifier output signal, and the digital setpoint input signal, wherein the digital setpoint input signal corresponds to a setpoint voltage value for the output voltage expected to be output at the high-voltage output terminal; a first digital-to-analog converter (DAC) configured to receive the first digital DAC data signal from the digital processor, convert the first digital DAC data signal into an analog DAC output signal, and output the DAC output signal to the setpoint input terminal; and a second DAC configured to receive the second digital DAC data signal from the digital processor, convert the second digital DAC data signal into the control signal, and output the control signal to the control signal input terminal, wherein the digital processor is configured to calculate corresponding values ​​of the first digital DAC data signal and the second digital DAC data signal, the corresponding values ​​effectively setting the amplifier output signal to effectively adjust the output voltage output by the high-voltage source to the digital voltage setpoint input to the setpoint voltage value.

[0011] According to another embodiment, a charged particle processing apparatus includes: an HV power supply device according to any embodiment disclosed herein; and a charged particle processing device including electrodes and a chamber for containing charged particles, wherein the charged particle processing device is configured to apply a high voltage output by the HV power supply device to the electrodes to generate an electric field, and the charged particles in the chamber are exposed to the electric field.

[0012] According to another embodiment, a method for supplying a high voltage includes: outputting an output voltage from the high voltage source based on a control signal received from the high voltage source; generating a proportionally attenuated measurement signal based on the output voltage; transmitting the measurement signal to a feedback input of an error amplifier and to an analog-to-digital converter (ADC); and in the ADC, converting the measurement signal into an ADC data signal and transmitting the ADC data signal to a digital processor. The method further includes: in the digital processor, receiving a digital setpoint input signal corresponding to a setpoint voltage value of the output voltage expected to be output from the high voltage source; generating a digital DAC data signal based on the ADC data signal and the digital setpoint input signal; and transmitting the digital DAC data signal to a digital-to-analog converter (DAC). The method further includes: in the DAC, converting the digital DAC data signal into an analog DAC output signal and transmitting the DAC output signal to a setpoint input of the error amplifier; and in the error amplifier, generating the control signal based on the measurement signal and the analog DAC output signal, and transmitting the control signal to the high voltage source. According to the method, the digital processor calculates the value of the digital DAC data signal, which effectively sets the control signal generated by the error amplifier to effectively adjust the output voltage output by the high voltage source to the setpoint voltage value.

[0013] According to another embodiment, a method for supplying a high voltage includes: outputting an output voltage from the high voltage source based on a control signal received from the high voltage source; generating a proportionally attenuated measurement signal based on the output voltage; transmitting the measurement signal to a feedback input of an error amplifier and to an analog-to-digital converter (ADC); and in the ADC, converting the measurement signal into an ADC data signal and transmitting the ADC data signal to a digital processor. The method further includes: in the digital processor, receiving a digital setpoint input signal corresponding to a setpoint voltage value of the output voltage expected to be output from the high voltage source; receiving an amplifier output signal from the error amplifier; generating a first digital DAC data signal and a second digital DAC data signal based on the ADC data signal, the digital setpoint input signal, and the amplifier output signal; transmitting the first digital DAC data signal to a first digital-to-analog converter (DAC); and transmitting the second digital DAC data signal to a second digital-to-analog converter (DAC). The method further includes: in the first DAC, converting the first digital DAC data signal into an analog DAC output signal and transmitting the DAC output signal to a setting input terminal of the error amplifier; in the error amplifier, generating the amplifier output signal based on the measurement signal and the analog DAC output signal; and in the second DAC, converting the second digital DAC data signal into the control signal and transmitting the control signal to the high voltage source. According to the method, the digital processor calculates corresponding values ​​of the first digital DAC data signal and the second digital DAC data signal, the corresponding values ​​effectively setting the amplifier output signal to effectively adjust the output voltage output from the high voltage source to the value of the digital voltage setpoint input to the setpoint voltage value.

[0014] Other devices, apparatuses, systems, methods, features, and advantages of the present invention will be apparent to those skilled in the art upon review of the following accompanying drawings and detailed description. All such additional systems, methods, features, and advantages are intended to be included within this specification, fall within the scope of the invention, and are protected by the appended claims. Attached Figure Description

[0015] The invention can be better understood by referring to the following accompanying drawings. The components in the drawings are not necessarily drawn to scale, but rather to emphasize the principles of the invention. In the drawings, similar reference numerals designate corresponding parts in different views.

[0016] Figure 1 is a schematic diagram of a typical precision high-voltage (HV) power supply unit with a known configuration.

[0017] Figure 2 is a schematic diagram of an embodiment of an HV power supply device according to the implementation of this disclosure.

[0018] Figure 3 is a schematic diagram of an embodiment of an HV power supply device according to another embodiment of this disclosure.

[0019] Figure 4 is a schematic diagram of an embodiment of a DC-DC converter that can be provided as an HV power supply device or as part thereof, according to an embodiment of this disclosure.

[0020] Figure 5 is a schematic diagram of an embodiment in which a charged particle treatment apparatus (or device, instrument, system, etc.) that can provide an HV power supply device as disclosed herein can be provided. Detailed Implementation

[0021] As used in this article, the term "high voltage" generally refers to voltages in the range of 1 kV or greater.

[0022] Figure 1 is a schematic diagram of a typical precision high-voltage (HV) power supply device 100 with a known configuration. The HV power supply device 100 includes an HV source 104 that provides a high voltage (e.g., a high-amplitude DC output voltage of 1 kV or greater) to a terminal of an HV output 108, which can be connected to instruments requiring HV power for their operation. The HV power supply device 100 has a control signal input (“setting”) and is configured (i.e., via its circuitry and hardware) to output an output voltage whose level is set by a control signal 112 received at the control signal input. Depending on the configuration, the control signal 112 may be obtained directly from a user-operated setting or from other circuitry (not shown) connected to the control signal input.

[0023] To help maintain the output voltage at a desired setpoint level (and ideally with the desired level of accuracy or tolerance), the HV power supply 100 also includes a single analog feedback loop 116 connected between the HV source 104 and the HV output 108. The feedback loop 116 includes a voltage divider 120 (represented by two resistors R1 and R2), an error amplifier 124, a digital-to-analog converter (DAC) 128, and a voltage reference 132. The voltage divider 120 is configured to reduce the output voltage seen at the HV output 108 to a proportionally attenuated level (e.g., several orders of magnitude lower than the output voltage) that can be safely used by the feedback circuitry system as a low-voltage measurement signal 136. The measurement signal 136, representing the output voltage, is fed to the inverting input (-) of the error amplifier 124. As those skilled in the art will understand, the voltage reference 132 (typically a small integrated circuit (IC) connected to the power supply (not shown)) is configured to output a stable DC reference voltage (e.g., 5V DC). Voltage reference 132 can be coupled (optionally via resistor R3) to the inverting input of error amplifier 124 and to DAC 128. In the illustrated embodiment, the setpoint corresponding to the desired level of the output voltage supplied by HV power supply 100 is a digital setpoint signal or DAC data signal fed to the input of DAC 128. DAC 128 converts the digital setpoint signal into an analog setpoint signal 140 and outputs the analog setpoint signal 140 to the non-inverting input (+) of error amplifier 124. Error amplifier 124 compares the measurement signal 136 received from voltage divider 120 with the setpoint signal 140 and outputs an error signal based on the difference between the measurement signal 136 and the setpoint signal 140. In the illustrated embodiment, this error signal is used as control signal 112 provided to the control signal input of HV source 104. The internal control circuit system of HV source 104 uses control signal 112 to determine the amount by which the output voltage of HV source 104 needs to be adjusted, so that the output voltage supplied to HV output terminal 108 closely matches (i.e., approximates with a certain accuracy) the desired setpoint value represented by the digital setpoint signal.

[0024] As will become apparent from the following description, the embodiments disclosed herein provide a low-speed, high-precision digital feedback loop that, when added to an HV power supply, improves the accuracy of the output voltage at both DC and low frequencies. The digital feedback loop reduces low-frequency noise and drift in the HV power supply, thereby improving the performance of instruments utilizing the supplied power, such as improving the mass accuracy of a time-of-flight (TOF) mass spectrometer. Analog feedback loops (such as those described above and shown in Figure 1) are still retained to maintain transient response and mid-frequency noise reduction, while the added digital feedback loop corrects for low-frequency errors. One aspect of the currently disclosed subject matter involves adding an analog-to-digital converter (ADC) to the HV power supply, which essentially does not introduce its own additional errors to sense DC and low-frequency deviations of the output voltage from the desired setpoint value. The sensed errors are used to adjust a control signal that will output a voltage that returns to or restores the desired voltage.

[0025] Figure 2 is a schematic diagram of an embodiment of a high-voltage (HV) power supply device 200 according to an embodiment of this disclosure. The HV power supply device 200 can be characterized as having a dual-loop (digital feedback loop plus analog feedback loop) HV power supply architecture. As will be understood by those skilled in the art, some or all of the components schematically depicted in Figure 2 can be embodied, for example, in a suitable physical structure (such as a printed circuit board (PCB)).

[0026] HV power supply device 200 includes a high-voltage (HV) source 204 configured to supply a high voltage (typically, for example, a high-amplitude DC output voltage of 1 kV or greater) to a terminal of a high-voltage (HV) output 208, which can be connected to instruments requiring HV power for their operation. HV power supply device 200 has an HV source control signal input (“set”) and is configured (i.e., via its circuitry and hardware) to output an output voltage whose level is set by a control signal 212 received at the control signal input. HV source 204 can typically have any configuration suitable for outputting a high-level output voltage, which usually requires amplifying or boosting the low-level voltage supplied to HV source 204. In a non-exclusive embodiment, HV source 204 is or includes a DC-to-DC converter, an embodiment of which is described below with reference to FIG4.

[0027] The HV power supply device 200 also includes an analog feedback loop 216 connected between the HV source 204 and the HV output terminal 208. The analog feedback loop 216 includes a voltage divider 220 (represented by two resistors R4 and R5), an error amplifier 224, a digital-to-analog converter (DAC) 228, and a voltage reference 232. As noted above, the voltage divider 220 is configured to divide the output voltage seen at the HV output terminal 208 into a proportionally attenuated measurement signal 236, which is at a low voltage level compatible with the feedback circuitry system. Generally, the voltage divider 220 can have any configuration suitable for the circuitry system of the HV power supply device 200, such as, for example, a thick-film configuration, a thin-film configuration, a bulk metal configuration, etc. Because the voltage divider 220 is typically canned to withstand high voltages, it can be easily configured for individual temperature regulation. The measurement signal 236, representing the output voltage, is fed to the feedback input (or the first amplifier input) of the error amplifier 224 for feedback. In the illustrated embodiment, the feedback input of error amplifier 224 is functionally a negative feedback input in the sense that this input is negative relative to the high-voltage output, and is compared to another input of error amplifier 224, referred to herein as the setting input (or second amplifier input) of error amplifier 224. Voltage reference 232 is configured to output a stable DC reference voltage (e.g., 5V DC) and is coupled (optionally via resistor R6) to the feedback input of error amplifier 224 and to DAC 228. Voltage reference 232 is typically a small IC as indicated above, which can be thermally isolated from the rest of the circuitry of HV power supply 200 (e.g., from the body of the PCB) to enable precise temperature control with minimal power. Due to the stabilizing effect of digital feedback loop 244, which will now be described, providing temperature control only for voltage divider 220 and voltage reference 232 may be sufficient to achieve high stability of HV power supply 200, without the need for temperature control of the entire circuitry of HV power supply 200.

[0028] In addition to analog feedback loop 216, HV power supply device 200 also includes digital feedback loop 244 connected between voltage divider 220 and DAC 228. Digital feedback loop 244 includes ADC 248 and digital (signal) processor 252 (e.g., an electronics-based controller, such as a microcontroller). In this embodiment, ADC 248 exhibits at least 20-bit resolution. Voltage reference 232 may be coupled to ADC 248. ADC 248 is configured to receive measurement signal 236 output from voltage divider 220, convert measurement signal 236 into a digital ADC data signal, and output the ADC data signal to digital processor 252. In this embodiment, a digital setpoint input signal (or digital voltage setpoint input) corresponding to the desired level of the output voltage supplied by HV power supply device 200 is input to digital processor 252. The digital setpoint signal may be input, for example, by user operation or directly through other circuitry (not shown) connected to digital processor 252.

[0029] Digital processor 252 is configured to calculate the digital DAC data signal required to achieve the desired output voltage based on the digital setpoint input signal and the ADC data signal. This DAC data signal is transmitted to DAC 228. DAC 228 converts the DAC data signal into an analog DAC output signal 240 and outputs the DAC output signal 240 to the setpoint input (or second amplifier input) of error amplifier 224. In the illustrated embodiment, the setpoint input of error amplifier 224 is depicted as a non-inverting input (+), but in other embodiments, the setpoint input may be an inverting input (-). Error amplifier 224 compares the measurement signal 236 received from voltage divider 220 with the DAC output signal 240 and outputs an error signal based on the difference between the measurement signal 236 and the DAC output signal 240. In this embodiment, this error signal is used as a control signal 212 provided to the control signal input of HV source 204. The internal control circuitry of the HV source 204 uses control signal 212 to determine the amount by which the output voltage of the HV source 204 needs to be regulated, so that the output voltage supplied to the HV output terminal 208 closely matches the desired setpoint value represented by the digital setpoint signal with high precision. In other words, in this embodiment, the digital processor 252 is configured to calculate the value of the digital DAC data signal, which effectively sets the analog control signal 212 output from the error amplifier 224 to effectively regulate the high voltage output from the HV source 204 to the value of the digital voltage setpoint input to the digital processor 252.

[0030] In one implementation, DAC 228 is a precision DAC comprising multiple discrete DAC units exhibiting different scaling factors to improve accuracy. In the illustrated implementation, for example, DAC 228 includes a coarse-tuning (resolution) DAC 256 and a fine-tuning (resolution) DAC 260 connected between the digital processor 252 and the setting input of the error amplifier 224. With this configuration, the DAC output signal 240 transmitted to the setting input is the sum of the coarse-tuning DAC output signal from the coarse-tuning DAC 256 and the fine-tuning DAC output signal from the fine-tuning DAC 260, respectively, through resistors R7 and R8 of corresponding different values. In this implementation, the coarse-tuning DAC 256 covers the entire output range of the HV source 204 with limited resolution, while the fine-tuning DAC 260 provides high resolution to adjust the output to values ​​between the steps of the coarse-tuning DAC 256. In this implementation, a precision DAC 228 (comprising a pair of DACs 256 and 260) is used in conjunction with an ADC 248, which has a stability and noise level comparable to or better than that of the precision DAC 228. For example, a 24-bit ADC using Σ-Δ conversion technology can now interleave calibration cycles between input conversion cycles, thereby substantially eliminating internal drift and low-frequency noise. The conversion rate of these ADCs is currently limited to approximately 10 conversions per second. Within the bandwidth of the digital feedback loop 244, noise and drift generated in the DACs 256 and 260, error amplifier 224, and other control circuitry are detected by the ADC 248 and suppressed by adjusting the DAC settings. Therefore, in this implementation, the ADC 248 is configured to interleave calibration cycles between input conversion cycles (or HV input readings) to correct for variations in offset and scaling factor. As will be understood by those skilled in the art, the calibration cycle consists of a measurement of the offset voltage combined with a measurement of a known reference voltage, which is performed by shorting the input terminals. The ADC 248 adjusts its offset and scaling factor to make the two readings equal to their known values.

[0031] In the implementation, DAC 228 exhibits at least 20 bits of resolution. Even with a stable 24-bit DAC, in some implementations, using a pair of DACs 256 and 260 in this application remains advantageous. For example, the high-voltage power supply in a time-of-flight (TOF) mass spectrometer is typically maintained at a constant voltage for extended periods. This allows the coarse-tuning resolution DAC (e.g., coarse-tuning DAC 256) to remain at a fixed setting, while the high-resolution fine-tuning DAC (e.g., fine-tuning DAC 260) can be adjusted as needed to maintain a constant output. In the implementation, fine-tuning DAC 260 may have a full-range output range overlapping the least significant bit (LSB) of the output of coarse-tuning DAC 256. The least significant bit (LSB) of fine-tuning DAC 260 is small enough that a step size of one LSB will not cause discrepancies during normal operation, while its total range is large enough to compensate for any drift that may occur at a fixed voltage setting. Provided there is sufficient overlap between the LSBs of the fine-tuning DAC 260 and the coarse-tuning DAC 256 across their full range, each DAC 256 and 260 only requires sufficient linearity to ensure its own monotonicity. This is much easier to achieve than monotonicity across the entire range of DACs with 20-bit or higher resolution. All DACs also exhibit some transient noise feedthrough to the analog output when their digital setpoints are changed. This is not a problem for the coarse-tuning DAC 256, which remains constant during operation, and the output of the fine-tuning DAC 260 attenuates sufficiently to make this noise feedthrough negligible.

[0032] The high DC loop gain resulting from the high resolution of the ADC 248 also minimizes errors from other sources. If the input voltage to the HV source 204 changes, any corresponding change in its output voltage will be corrected down to the resolution of the ADC 248. Similarly, if the load current drawn from the HV output 208 changes (e.g., through an instrument being powered), the output voltage will remain constant. It would be very difficult, if possible, to obtain sufficient loop gain from existing power supplies (such as the configuration shown in Figure 1) to achieve this level of performance.

[0033] In some implementations, the ADC 248 has a resolution of 20 bits or higher. In various implementations, the ADC 248 has a resolution of 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, or 32 bits. In some implementations, the DAC 228 has a resolution of 20 bits or higher. In various implementations, the DAC 228 has a resolution of 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, or 32 bits.

[0034] Figure 3 is a schematic diagram of an embodiment of an HV power supply device 300 according to another embodiment of this disclosure. The HV power supply device 300 complementarily combines the DC and low-frequency performance advantages provided by the dual-loop HV power supply architecture of the embodiments described herein (e.g., HV power supply device 200 shown in Figure 2) with the high-frequency advantages provided by a fast low-side analog feedback architecture. An embodiment of the low-side analog feedback configuration is described in U.S. Patent No. 10,872,753, which is incorporated herein by reference in its entirety. By combining features from both the dual-loop HV power supply architecture and the low-side analog feedback architecture, the HV power supply device 300 can generate high-performance high-voltage power supplies over a wide bandwidth, from, for example, DC to 100 kHz or greater.

[0035] The HV power supply device 300 includes an HV source 304 configured to supply a high-level output voltage at an HV output terminal 308 as described above, the high-level output voltage being set by a control signal 312 received at an HV source control signal input terminal (“set”) of the HV source 304. The HV power supply device 300 also includes an analog feedback loop 316 connected between the HV source 304 and the HV output terminal 308. The analog feedback loop 316 includes a voltage divider 320 (represented by two resistors R9 and R10), an error amplifier 324, a first DAC 328, and a voltage reference 332 as described above. The HV power supply device 300 also includes a digital feedback loop 344 connected between the voltage divider 320 and the first DAC 328. The digital feedback loop 344 includes an ADC 348 and a digital (signal) processor 352 as described above. Voltage reference 332 can be (optionally via resistor R11) coupled to the feedback input (or first amplifier input) of error amplifier 324 and ADC 348, and is also coupled to first DAC 328. In the illustrated embodiment, the feedback input of error amplifier 324 is depicted as an inverting input (-), but in other embodiments, the feedback input may be a non-inverting input (+). Furthermore, error amplifier 324 includes a setting input (or second amplifier input), which is depicted as a non-inverting input (+) in the illustrated embodiment, but may be an inverting input (-) in other embodiments. Voltage divider 320 divides the output voltage received at HV output 308 to a proportionally attenuated measurement signal 336, which is transmitted as described above to both the feedback input of error amplifier 324 and to ADC 348. The ADC 348 is configured to receive the measurement signal 336 output from the voltage divider 320, convert the measurement signal 336 into a digital ADC data signal, and output the ADC data signal to the digital processor 352. A digital setpoint signal corresponding to the desired level of the output voltage supplied by the HV power supply device 300 is input to the digital processor 352.

[0036] Error amplifier 324 is configured to generate an amplifier output signal (or error signal) 368 based on signals received at its feedback input and setpoint input. However, unlike the embodiment described above in conjunction with FIG2, the amplifier output signal 368 output from error amplifier 324 is not directly used as the control signal 312 for the setpoint of the primary drive output voltage. Instead, the output of error amplifier 324 is coupled to the return side 364 of the output of HV source 304, and amplifier output signal 368 is transmitted to an input of digital processor 352 that communicates with the internal (e.g., 12-bit) ADC of digital processor 352. Therefore, in this embodiment, digital processor 352 is configured to calculate a first digital DAC data signal based on the ADC data signal received from ADC 348, the amplifier output signal 368 received from error amplifier 324 (and digitized by the internal ADC of digital processor 352), and the digital voltage setpoint input. This first DAC data signal is transmitted to first DAC 328. The first DAC 328 converts the first DAC data signal into an analog DAC output signal 340 and outputs the DAC output signal 340 to the setting input of the error amplifier 324. As in the embodiment described above in conjunction with FIG2, the first DAC 328 may be a precision DAC comprising two or more DAC units providing different resolutions (such as a coarse-tuning (resolution) DAC 356 and a fine-tuning (resolution) DAC 360 connected to the setting input of the error amplifier 324 via different resistors R12 and R13, respectively). The error amplifier 324 compares the measurement signal 336 received from the voltage divider 320 with the DAC output signal 340 and outputs an amplifier output signal 368 based on the difference or variation between the measurement signal 336 and the DAC output signal 340.

[0037] Unlike the embodiment described above in conjunction with Figure 2, the HV power supply device 300 also includes a second DAC 372, referred to herein as the original DAC. In addition to the first digital DAC data signal mentioned above, the digital processor 352 is configured to calculate a second digital DAC data signal based on the ADC data signal received from the ADC 348, the amplifier output signal 368 received from the error amplifier 324 (and digitized by the internal ADC of the digital processor 352), and the digital voltage setpoint input. This second DAC data signal is transmitted to the second DAC 372. Therefore, the second DAC 372 is configured to receive the second digital DAC data signal from the digital processor 352. In this embodiment, the second DAC 372 converts the second digital DAC data signal into a control signal 312 and outputs the control signal 312 to the HV source control input of the HV source 304. Therefore, in this embodiment, the amplitude of the differential output voltage between the + and - output terminals of the HV source 304 is set by the control signal 312 output by the second DAC 372. The final output voltage at the HV output terminal 308 is the sum of the differential output voltage of the HV source 304 and the amplifier output signal 368 seen at the return side 364 of the HV source 304.

[0038] The first DAC data signal and the second DAC data signal generated by the digital processor 352 can be transmitted to the respective first DAC 328 and second DAC 372 in any suitable manner (e.g., by any suitable structure). As a non-exclusive embodiment, the "DAC data" line shown in FIG3 represents a data bus configured to carry the first DAC data signal and the second DAC data signal differently. Such a data bus is suitably coupled to the first DAC 328 and the second DAC 372 such that the first DAC 328 is selected to receive the first DAC data signal, and independently, the second DAC 372 is selected to receive the second DAC data signal, as understood by those skilled in the art.

[0039] In the embodiment shown in FIG3, the digital processor 352 is described as including an internal ADC that converts the analog amplifier output signal 368 received from the error amplifier 324 into a digital signal for further processing by the digital processor 352. In this case, the ADC 348 configured to receive the measurement signal 336 from the voltage divider 320 may be referred to as the first ADC, and the internal ADC configured to receive the amplifier output control signal 368 from the error amplifier 324 may be referred to as the second ADC. However, it will be understood that the second ADC may be an internal ADC (i.e., internal to the digital processor 352) as shown in the embodiment of FIG3, or alternatively an external ADC (i.e., external to the digital processor 352, similar to the ADC 348 shown). That is, in one embodiment (as shown), the digital processor 352 is configured to digitize the amplifier output control signal 368 received from the error amplifier 324 by means of an internal second ADC integrated with the digital processor 352. In another embodiment, the HV power supply device 300 includes an external second ADC configured to receive an amplifier output control signal 368 from an error amplifier 324, convert the amplifier output control signal 368 into a digital amplifier output control signal 368, and transmit the digital amplifier output control signal 368 to a digital processor 352.

[0040] Figure 4 is a schematic diagram of an embodiment of a DC-to-DC converter 400 according to an embodiment of this disclosure, which may be provided as an HV power supply device (e.g., HV power supply device 200 or 300, respectively, in Figures 2 or 3) or as part thereof. Typically, the DC-to-DC converter 400 is configured to receive a low DC voltage from a low DC voltage input and boost the low DC voltage to a high DC voltage provided at an HV output (e.g., HV output 208 or 308, respectively, in Figures 2 or 3). Furthermore, the DC-to-DC converter 400 may be configured to maintain DC isolation between the high voltage output and the low DC voltage input.

[0041] For these purposes, the DC-to-DC converter 400 may include: a switching circuit 402 configured to convert a low DC voltage to an alternating current (AC) voltage; a boost circuit 406 configured to boost the AC voltage to a boosted AC voltage; and a rectifier circuit 410 configured to convert the boosted AC voltage to a high DC voltage. The switching circuit 402 may include: a switching network 414 configured to receive a low DC voltage input; and a control circuit 418 configured to receive a control signal (e.g., control signal 212 or 312 in Figures 2 or 3, respectively) at a control signal input (“set”). The switching network 414 may include a network of switches (typically transistors) configured to perform DC-to-AC conversion. The control circuit 418 is configured to control the operation of the switches based on the received control signal. For example, as those skilled in the art will understand, the control circuit 418 may change the timing of the switches or the voltage or current applied to the switches. The boost circuit 406, schematically represented by a single transformer T1 having primary and secondary windings, may include one or more transformers and / or inductors for boosting the AC voltage received from the switching network 414. The rectifier circuit 410, schematically represented by a single diode D1 and capacitor C1, may include a network of diodes and capacitors configured to perform AC-to-DC conversion (rectification). Optionally, the DC-to-DC converter 400 may also include (or be connected to) an output filter circuit 422. The output filter circuit 422, schematically represented by a single resistor R14 and capacitor C2, may include a network of resistors and capacitors configured to reduce ripple voltage in the output voltage.

[0042] An embodiment of a DC-to-DC converter is further described in U.S. Patent No. 10,872,753, which is referenced above.

[0043] Figure 5 is a schematic diagram of an embodiment of a charged particle processing device (or apparatus, instrument, system, etc.) 500 in which an HV power supply device 526 as disclosed herein can be provided. The HV power supply device 526 may, for example, correspond to the HV power supply devices 200 or 300 of Figures 2 or 3, respectively. Generally, the charged particle processing device 500 can be any device that requires high-precision, high-amplitude (typically DC) power to operate. As a non-exclusive embodiment, the charged particle processing device 500 can be a mass spectrometer, particularly in which the HV power supply device 526 can be used to provide power to accelerate, deflect, and / or focus ions in the flight tube of a TOF mass spectrometer. Instead of a TOF analyzer, the mass spectrometer can include a quadrupole mass analyzer or any other type of ion analyzer. As another non-exclusive embodiment, the charged particle processing device 500 can be an electron microscope, such as a transmission electron microscope (TEM) or a scanning electron microscope (SEM). As used herein, the term “charged particle” refers to ions or electrons, depending on the type of charged particle processing device 500 as understood by those skilled in the art.

[0044] In addition to the HV power supply device 526, the charged particle processing device 500 may include a charged particle source 530, a charged particle processing device 534, and a charged particle receiver 538. The charged particle source 530 may, for example, include components configured to (e.g., via ionization of matter, emission from material, etc.) generate (e.g., ionize, emit, etc.) charged particles and / or focus charged particles into a beam and / or transport charged particles (beams) to the charged particle processing device 534. Embodiments of the charged particle source 530 include, but are not limited to, ion sources, ion analyzers or other types of ion processing devices (e.g., mass filters, mass analyzers, ion migration cells, etc.), electron sources (e.g., electron emitters such as thermionic cathodes or filaments, electron guns, etc.). The charged particle processing device 534 may, for example, be configured to transport or guide charged particles, and / or to perform other types of processing on the charged particles, such as, for example, charged particle beam generation, beam steering, acceleration, cooling, filtering, analysis, detection, measurement, imaging, etc. For this purpose, in some embodiments, the charged particle processing device 534 may include a chamber 542 for receiving or containing charged particles, and one or more electrodes 546 configured to receive power from an HV power supply 526. In this case, the charged particle processing device 534 may typically be configured to apply a high voltage output from the HV power supply 526 to the electrodes(s)546(s) to generate an electric field, exposing the charged particles in the chamber 542 to said electric field. Embodiments of the charged particle receiver 538 include, but are not limited to, ion analyzers (e.g., mass filters, mass analyzers, TOF analyzers, ion migration cells, etc.), samples to be irradiated or imaged, sample holders or stages, charged particle detectors (e.g., ion detectors, electron detectors, imaging devices, etc.), electron collectors, traps, or anodes, etc. As will be understood by those skilled in the art, depending on the implementation, the charged particle processing apparatus 500 may also include one or more intermediate components (not shown), such as charged ion optics, disposed between the charged particle source 530 and the charged particle processing device 534, and / or between the charged particle processing device 534 and the charged particle receiver 538, as they are required for processing or transporting charged particles.

[0045] This disclosure also includes methods for mass analysis and microscopy using the charged particle processing device 500 as described herein.

[0046] Exemplary Implementation

[0047] Exemplary implementations provided based on the currently disclosed subject matter include, but are not limited to, the following:

[0048] 1. A high-voltage (HV) power supply device comprising: a high-voltage output terminal; a high-voltage source including a control signal input terminal and configured to output an output voltage at the high-voltage output terminal based on a control signal received at the control signal input terminal; a voltage divider configured to generate a proportionally attenuated measurement signal according to the output voltage; an error amplifier including a feedback input terminal, a setting input terminal, and an amplifier output terminal, wherein the error amplifier is configured to receive the measurement signal from the voltage divider at the feedback input terminal, receive a digital-to-analog converter (DAC) output signal at the setting input terminal, generate the control signal based on the measurement voltage signal and the DAC output signal, and output the control signal from the amplifier output terminal to the control signal input terminal; and an analog-to-digital converter (ADC) configured to receive the measurement signal from the voltage divider and convert the measurement signal into an ADC. The data signal and the output of the ADC data signal; a digital processor configured to receive the ADC data signal from the ADC, receive a digital setpoint input signal, and generate a digital DAC data signal based on the ADC data signal and the digital setpoint input signal, wherein the digital setpoint input signal corresponds to a setpoint voltage value of the output voltage to be output at the high voltage output terminal; and a digital-to-analog converter (DAC) configured to receive the digital DAC data signal from the digital processor, convert the digital DAC data signal into an analog DAC output signal, and output the DAC output signal to the setpoint input terminal, wherein the digital processor is configured to calculate a value of the digital DAC data signal that effectively sets the control signal output by the error amplifier to effectively adjust the output voltage output by the high voltage source to the setpoint voltage value.

[0049] 2. The HV power supply device according to embodiment 1, wherein the high voltage source is configured to output the high voltage with an amplitude ranging from 1kV or greater.

[0050] 3. The HV power supply device according to any one of the foregoing embodiments, wherein the output voltage is a direct current (DC) output voltage, and the high voltage source includes a DC-to-DC converter configured to receive a low DC voltage from a low DC voltage input and boost the low DC voltage to the output DC voltage having a higher amplitude than the low DC voltage.

[0051] 4. The HV power supply device according to embodiment 3, wherein the DC-to-DC converter includes a switching circuit configured to convert the low DC voltage into an alternating current (AC) voltage, a boost circuit configured to boost the AC voltage into a boosted AC voltage, and a rectifier circuit configured to convert the boosted AC voltage into the output DC voltage.

[0052] 5. The HV power supply device according to embodiment 4, wherein the switching circuit includes a transistor network.

[0053] 6. The HV power supply device according to embodiment 4 or 5, wherein the boost circuit includes a transformer.

[0054] 7. The HV power supply device according to any one of embodiments 4 to 6, wherein the rectifier circuit includes a diode and a capacitor network.

[0055] 8. The HV power supply device according to any one of embodiments 3 to 7, wherein the DC-to-DC converter is configured to maintain the high-voltage output terminal and the low-DC voltage input terminal as DC isolated from each other.

[0056] 9. The HV power supply device according to any one of the foregoing embodiments, wherein the ADC has a resolution of 20 bits or higher.

[0057] 10. The HV power supply device according to any one of the foregoing embodiments, wherein the ADC is configured to interleave calibration cycles between input conversion cycles to correct for variations in offset and scaling factor.

[0058] 11. The HV power supply device according to any one of the foregoing embodiments, wherein the DAC has a resolution of 20 bits or higher.

[0059] 12. The HV power supply device according to any one of the foregoing embodiments, wherein: the DAC includes a coarse-tuning DAC and a fine-tuning DAC connected between the digital processor and the setting input terminal; and the DAC output signal output to the setting input terminal is the sum of the coarse-tuning DAC output signal output by the coarse-tuning DAC and the fine-tuning DAC output signal output by the fine-tuning DAC.

[0060] 13. The HV power supply device according to embodiment 12, wherein the fine-tuning DAC has a full-range output range that overlaps with the least significant bit (LSB) of the output of the coarse-tuning DAC.

[0061] 14. A high-voltage (HV) power supply device comprising: a high-voltage output terminal; a high-voltage source including a control signal input terminal and a return side in communication with the high-voltage output terminal, wherein the high-voltage source is configured to output an output voltage, as measured from the return side, to the high-voltage output terminal based on a control signal received at the control signal input terminal and an amplifier output signal received at the return side; a voltage divider configured to generate a measurement signal attenuated proportionally according to the output voltage; and an error amplifier including a feedback input terminal, a setting input terminal, and an amplifier output terminal, wherein the error amplifier is... The system is configured to receive the measurement signal from the voltage divider at the feedback input terminal, receive the digital-to-analog converter (DAC) output signal at the setting input terminal, generate the amplifier output signal based on the measurement signal and the DAC output signal, and output the amplifier output signal from the amplifier output terminal to the return side; an analog-to-digital converter (ADC) configured to receive the measurement signal from the voltage divider, convert the measurement signal into an ADC data signal, and output the ADC data signal; and a digital processor configured to receive the ADC data signal from the ADC and receive data from the voltage divider. The error amplifier includes an amplifier output signal, a digital setpoint input signal, and generates a first digital DAC data signal and a second digital DAC data signal based on the ADC data signal, the amplifier output signal, and the digital setpoint input signal, wherein the digital setpoint input signal corresponds to a setpoint voltage value of the output voltage expected to be output at the high-voltage output terminal; a first digital-to-analog converter (DAC) configured to receive the first digital DAC data signal from the digital processor, convert the first digital DAC data signal into an analog DAC output signal, and output the DAC output signal to the setpoint input terminal; and a second digital-to-analog converter (DAC) configured to receive the second digital DAC data signal from the digital processor, convert the second digital DAC data signal into the control signal, and output the control signal to the control signal input terminal, wherein the digital processor is configured to calculate corresponding values ​​of the first digital DAC data signal and the second digital DAC data signal, the corresponding values ​​effectively setting the amplifier output signal to effectively adjust the output voltage output by the high-voltage source to the digital voltage setpoint input to the setpoint voltage value.

[0062] 15. The HV power supply device according to embodiment 14, wherein the digital processor is configured to digitize the amplifier output control signal received from the error amplifier.

[0063] 16. The HV power supply device according to embodiment 14, wherein the ADC configured to receive the measurement signal from the voltage divider is a first ADC, and the HV power supply device further includes a second ADC, wherein the second ADC is configured to receive the amplifier output control signal from the error amplifier, convert the amplifier output control signal into a digital amplifier output control signal, and transmit the digital amplifier output control signal to the digital processor.

[0064] 17. The HV power supply device according to any one of embodiments 14 to 16, wherein: the first DAC includes a coarse adjustment DAC and a fine adjustment DAC connected between the digital processor and the setting input terminal; and the DAC output signal output to the setting input terminal is the sum of the coarse adjustment DAC output signal output by the coarse adjustment DAC and the fine adjustment DAC output signal output by the fine adjustment DAC.

[0065] 18. The HV power supply device according to embodiment 17, wherein the fine-tuning DAC has a full-range output range that overlaps with the least significant bit (LSB) of the output of the coarse-tuning DAC.

[0066] 19. The HV power supply device according to any one of embodiments 14 to 18, comprising one or more features of any one of embodiments 2 to 11.

[0067] 20. A charged particle processing apparatus comprising: an HV power supply device according to any one of embodiments 1 to 19; and a charged particle processing device including electrodes and a chamber for containing charged particles, wherein the charged particle processing device is configured to apply a high voltage output from the HV power supply device to the electrodes to generate an electric field, and the charged particles in the chamber are exposed to the electric field.

[0068] 21. The charged particle processing apparatus according to embodiment 20 is configured in one of the following ways: the charged particle processing apparatus is part of a mass spectrometer; the charged particle processing apparatus is part of an electron microscope.

[0069] 22. The charged particle processing apparatus according to embodiment 20 or 21, comprising at least one of the following: a charged particle source configured to supply charged particles to the charged particle processing apparatus; and a charged particle receiver configured to receive charged particles from the charged particle processing apparatus.

[0070] 23. A method for supplying a high voltage, the method comprising: outputting an output voltage from the high voltage source based on a control signal received from the high voltage source; generating a proportionally attenuated measurement signal according to the output voltage; transmitting the measurement signal to a feedback input of an error amplifier and to an analog-to-digital converter (ADC); converting the measurement signal into an ADC data signal in the ADC and transmitting the ADC data signal to a digital processor; and in the digital processor receiving a digital setpoint input signal corresponding to a setpoint voltage value of the output voltage expected to be output from the high voltage source, and generating a digital DAC based on the ADC data signal and the digital setpoint input signal. The data signal is transmitted to a digital-to-analog converter (DAC); in the DAC, the digital DAC data signal is converted into an analog DAC output signal, and the DAC output signal is transmitted to the set input of the error amplifier; and in the error amplifier, the control signal is generated based on the measurement signal and the analog DAC output signal, and the control signal is transmitted to the high voltage source, wherein the digital processor calculates the value of the digital DAC data signal, the value of which effectively sets the control signal generated by the error amplifier to effectively adjust the output voltage output by the high voltage source to the set point voltage value.

[0071] 24. The method according to embodiment 23, wherein the output voltage is a direct current (DC) output voltage, and the method further includes operating the high voltage source to convert the low DC voltage into an alternating current (AC) voltage, boosting the AC voltage into a boosted AC voltage, and converting the boosted AC voltage into the DC output voltage having a higher amplitude than the low DC voltage.

[0072] 25. The method according to embodiment 23 or 24, comprising one or more features of any one of embodiments 1 to 22.

[0073] 26. A method for supplying a high voltage, the method comprising: outputting an output voltage from the high voltage source based on a control signal received from the high voltage source; generating a proportionally attenuated measurement signal according to the output voltage; transmitting the measurement signal to a feedback input of an error amplifier and to an analog-to-digital converter (ADC); in the ADC, converting the measurement signal into an ADC data signal and transmitting the ADC data signal to a digital processor;

[0074] In the digital processor, a digital setpoint input signal corresponding to a setpoint voltage value of the output voltage expected to be output from the high-voltage source is received; an amplifier output signal from the error amplifier is received; a first digital DAC data signal and a second digital DAC data signal are generated based on the ADC data signal, the digital setpoint input signal, and the amplifier output signal; the first digital DAC data signal is transmitted to a first digital-to-analog converter (DAC); and the second digital DAC data signal is transmitted to a second digital-to-analog converter (DAC).

[0075] In the first DAC, the first digital DAC data signal is converted into an analog DAC output signal, and the DAC output signal is transmitted to the setting input terminal of the error amplifier; in the error amplifier, the amplifier output signal is generated based on the measurement signal and the analog DAC output signal; and in the second DAC, the second digital DAC data signal is converted into the control signal, and the control signal is transmitted to the high voltage source, wherein the digital processor calculates corresponding values ​​of the first digital DAC data signal and the second digital DAC data signal, the corresponding values ​​effectively setting the amplifier output signal to effectively adjust the output voltage output by the high voltage source to the value of the digital voltage setpoint input to the setpoint voltage value.

[0076] 27. The method according to embodiment 26, wherein the output voltage is a direct current (DC) output voltage, and the method further includes operating the high voltage source to convert the low DC voltage into an alternating current (AC) voltage, boosting the AC voltage into a boosted AC voltage, and converting the boosted AC voltage into the DC output voltage having a higher amplitude than the low DC voltage.

[0077] 28. The method according to embodiment 26 or 27, comprising one or more features of any one of embodiments 1 to 22.

[0078] It should be understood that terms such as “connected” and “connected with” (e.g., the first component is “connected” with the second component) are used herein to indicate structural, functional, mechanical, electrical, signaling, optical, magnetic, electromagnetic, ionic, or fluid relationships between two or more components or elements. Therefore, the fact that a component is described as being connected with the second component is not intended to exclude the possibility that there are other components and / or other parts operatively associated with or engaged with the first and second components.

[0079] It should be understood that various aspects or details of the invention may be changed without departing from the scope of the invention. Furthermore, the foregoing description is for illustrative purposes only and not for limiting purposes; the invention is defined by the claims.

Claims

1. A high-voltage power supply device, comprising: High voltage output terminal; A high voltage source, the high voltage source including a control signal input terminal and configured to output an output voltage at a high voltage output terminal based on a control signal received at the control signal input terminal; A voltage divider configured to generate a proportionally attenuated measurement signal based on the output voltage; An error amplifier includes a feedback input, a setting input, and an amplifier output. The error amplifier is configured to receive a measurement signal from the voltage divider at the feedback input, receive a digital-to-analog converter output signal at the setting input, generate a control signal based on the measurement signal and the digital-to-analog converter output signal, and output the control signal from the amplifier output to the control signal input. An analog-to-digital converter (ADC) configured to receive the measurement signal from the voltage divider, convert the measurement signal into an ADC data signal, and output the ADC data signal; A digital processor configured to receive an analog-to-digital converter (ADC) data signal from the ADC, receive a digital setpoint input signal, and generate a digital-to-analog converter (DAC) data signal based on the ADC data signal and the digital setpoint input signal, wherein the digital setpoint input signal corresponds to a setpoint voltage value at which the output voltage is expected to be output at the high-voltage output terminal; and A digital-to-analog converter (DAC), configured to receive digital-to-analog converter data signals from the digital processor, convert the digital-to-analog converter data signals into analog-to-analog converter output signals, and output the analog-to-analog converter output signals to the designated input terminal. The digital processor is configured to calculate the value of the digital-to-analog converter data signal, which effectively sets the control signal output by the error amplifier to effectively adjust the output voltage output by the high voltage source to the setpoint voltage value.

2. The high voltage power supply device of claim 1, wherein, The high voltage source is configured to output a high voltage with an amplitude ranging from 1 kV or greater.

3. The high-voltage power supply device according to claim 1, wherein, The output voltage is a DC output voltage, and the high voltage source includes a DC-to-DC converter configured to receive a low DC voltage from a low DC voltage input and boost the low DC voltage to the output DC voltage having a higher amplitude than the low DC voltage.

4. The high-voltage power supply device according to claim 3, wherein, The DC-to-DC converter includes a switching circuit configured to convert the low DC voltage into an AC voltage, a boost circuit configured to boost the AC voltage into a boosted AC voltage, and a rectifier circuit configured to convert the boosted AC voltage into the output DC voltage.

5. The high-voltage power supply device according to claim 4, comprising at least one of the following: in, The switching circuit includes a transistor network; The boost circuit includes a transformer; The rectifier circuit includes a diode and a capacitor network.

6. The high-voltage power supply device according to claim 3, wherein, The DC-to-DC converter is configured to maintain DC isolation between the high-voltage output terminal and the low-DC voltage input terminal.

7. The high-voltage power supply device according to claim 1, wherein, The analog-to-digital converter has a resolution of 20 bits or higher.

8. The high-voltage power supply device according to claim 1, wherein, The analog-to-digital converter is configured to interleave calibration cycles between input conversion cycles to correct for variations in offset and scaling factor.

9. The high-voltage power supply device according to claim 1, wherein, The digital-to-analog converter has a resolution of 20 bits or higher.

10. The high-voltage power supply device according to claim 1, wherein: The digital-to-analog converter includes a coarse-tuning digital-to-analog converter and a fine-tuning digital-to-analog converter connected between the digital processor and the setting input terminal; and The digital-to-analog converter output signal output to the set input terminal is the sum of the coarse-tuning digital-to-analog converter output signal output by the coarse-tuning digital-to-analog converter and the fine-tuning digital-to-analog converter output signal output by the fine-tuning digital-to-analog converter.

11. The high-voltage power supply device according to claim 10, wherein, The fine-tuning digital-to-analog converter has a full-range output range that overlaps with the least significant bit (LSB) of the output of the coarse-tuning digital-to-analog converter.

12. A high-voltage power supply device, comprising: High voltage output terminal; A high voltage source, the high voltage source including a control signal input terminal and a return side connected to the high voltage output terminal, wherein the high voltage source is configured to output an output voltage, as measured from the return side, to the high voltage output terminal based on a control signal received at the control signal input terminal and an amplifier output signal received at the return side; A voltage divider configured to generate a proportionally attenuated measurement signal based on the output voltage; An error amplifier includes a feedback input, a setting input, and an amplifier output, wherein the error amplifier is configured to receive a measurement signal from the voltage divider at the feedback input, receive a digital-to-analog converter output signal at the setting input, generate the amplifier output signal based on the measurement signal and the digital-to-analog converter output signal, and output the amplifier output signal from the amplifier output to the return side; An analog-to-digital converter (ADC) configured to receive the measurement signal from the voltage divider, convert the measurement signal into an ADC data signal, and output the ADC data signal; A digital processor configured to receive an analog-to-digital converter (ADC) data signal from the ADC, receive an amplifier output signal from the error amplifier, receive a digital setpoint input signal, and generate a first digital-to-analog converter (DAC) data signal and a second DAC data signal based on the ADC data signal, the amplifier output signal, and the digital setpoint input signal, wherein the digital setpoint input signal corresponds to a setpoint voltage value for the output voltage to be output at the high-voltage output terminal; A first digital-to-analog converter (DAC), configured to receive a first digital-to-analog converter data signal from the digital processor, convert the first digital-to-analog converter data signal into an analog-to-analog converter output signal, and output the DAC output signal to the set input terminal; and A second digital-to-analog converter (DAC) is configured to receive a second digital-to-analog converter data signal from the digital processor, convert the second digital-to-analog converter data signal into the control signal, and output the control signal to the control signal input terminal. The digital processor is configured to calculate corresponding values ​​of the first digital-to-analog converter data signal and the second digital-to-analog converter data signal, the corresponding values ​​effectively setting the amplifier output signal to effectively adjust the output voltage output by the high voltage source to the value of the digital voltage setpoint input to the setpoint voltage value.

13. The high-voltage power supply device according to claim 12, wherein, The digital processor is configured to digitize the amplifier output control signal received from the error amplifier.

14. The high-voltage power supply device according to claim 12, wherein, The analog-to-digital converter configured to receive the measurement signal from the voltage divider is a first analog-to-digital converter, and the high-voltage power supply device further includes a second analog-to-digital converter. The second analog-to-digital converter is configured to receive the amplifier output control signal from the error amplifier, convert the amplifier output control signal into a digital amplifier output control signal, and transmit the digital amplifier output control signal to the digital processor.

15. The high-voltage power supply device according to claim 12, wherein: The first digital-to-analog converter includes a coarse-tuning digital-to-analog converter and a fine-tuning digital-to-analog converter connected between the digital processor and the setting input terminal; and The digital-to-analog converter output signal output to the set input terminal is the sum of the coarse-tuning digital-to-analog converter output signal output by the coarse-tuning digital-to-analog converter and the fine-tuning digital-to-analog converter output signal output by the fine-tuning digital-to-analog converter.

16. The high-voltage power supply device according to claim 15, wherein, The fine-tuning digital-to-analog converter has a full-range output range that overlaps with the least significant bit (LSB) of the output of the coarse-tuning digital-to-analog converter.

17. A charged particle processing device, comprising: The high-voltage power supply device according to claim 1; and A charged particle processing device, comprising electrodes and a chamber for containing charged particles. The charged particle processing device is configured to apply the high voltage output from the high-voltage power supply device to the electrodes to generate an electric field, and the charged particles in the chamber are exposed to the electric field.

18. A method for supplying high voltage, the method comprising: The output voltage is output from the high voltage source based on the control signal received from the high voltage source; A measurement signal attenuated proportionally is generated based on the output voltage; The measurement signal is transmitted to the feedback input of the error amplifier and then to the analog-to-digital converter. In the analog-to-digital converter, the measurement signal is converted into an analog-to-digital converter data signal, and the analog-to-digital converter data signal is transmitted to the digital processor; In the digital processor, a digital setpoint input signal corresponding to a setpoint voltage value of the output voltage expected to be output from the high voltage source is received; a digital-to-analog converter data signal is generated based on the analog-to-digital converter data signal and the digital setpoint input signal; and the digital-to-analog converter data signal is transmitted to the digital-to-analog converter. In the digital-to-analog converter, the digital-to-analog converter data signal is converted into an analog-to-analog converter output signal, and the digital-to-analog converter output signal is transmitted to the setting input terminal of the error amplifier; as well as In the error amplifier, the control signal is generated based on the measurement signal and the output signal of the analog-to-digital converter, and the control signal is transmitted to the high-voltage source. The digital processor calculates the value of the digital-to-analog converter data signal, which effectively sets the control signal generated by the error amplifier to effectively adjust the output voltage output by the high voltage source to the setpoint voltage value.

19. The method according to claim 18, wherein, The output voltage is a DC output voltage, and the method further includes operating the high voltage source to convert the low DC voltage into an AC voltage, boosting the AC voltage into a boosted AC voltage, and converting the boosted AC voltage into the DC output voltage having a higher amplitude than the low DC voltage.

20. The method according to claim 18, wherein, The digital-to-analog converter includes a coarse-tuning digital-to-analog converter and a fine-tuning digital-to-analog converter, and the output signal of the digital-to-analog converter transmitted to the setting input terminal is the sum of the coarse-tuning digital-to-analog converter output signal output by the coarse-tuning digital-to-analog converter and the fine-tuning digital-to-analog converter output signal output by the fine-tuning digital-to-analog converter.

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