An electrostatic dust removal device and an excimer laser

Abstract

The electrostatic dust removal device of the present application includes: at least one dust charging chamber and at least one dust removal chamber communicating therewith; wherein, the dust charging chamber includes a chamber wall and a high-voltage electrode disposed in the chamber; the chamber wall of the dust removal chamber is provided with opposite flat electrodes, and when the flat electrodes are energized, an electric field intersecting the direction of air flow is formed, and the chamber of the dust removal chamber is a looped and bent structure, and the opposite flat electrodes are disposed along the inner wall of the looped and bent structure. In the above device, a multi-zone electrostatic dust removal structure is provided. Charge is carried by gas dust in the dust charging chamber; opposite flat electrodes are provided on both the chamber wall of the dust removal chamber and the inner wall of the looped and bent structure in the chamber. An electric field is formed between the opposite flat electrodes. When the gas flows along the air flow channel formed by the inner side of the chamber wall and the looped and bent structure, the dust particles carrying charge in the gas migrate to the surface of the flat electrodes, thereby improving the efficiency of the electrostatic dust removal device in removing gas dust.

Description

Technical Field

[0001] This application relates to the technical field of excimer lasers, and specifically relates to an electrostatic dust removal device and an excimer laser. Background Art

[0002] In the field of high-end lithography, the laser of an excimer laser has the characteristics of high repetition rate, narrow line width, and large energy. Therefore, the laser of an excimer laser is a dominant light source in the application of semiconductor lithography.

[0003] In practical applications, the gas inside the discharge cavity of an excimer laser has the following problems. One is that the gas is corrosive. The other is that there is a high-repetition-rate high-voltage discharge and high-temperature environment, resulting in a large amount of discharge dust in the gas inside the discharge cavity. However, the discharge dust will contaminate the lens, leading to problems such as thermal stress concentration and degradation of optical performance in the lens.

[0004] In the prior art, to solve the above technical problems, usually an electrostatic dust collector is used to clean the gas, and then the clean gas is refluxed into the discharge cavity. The dust removal tube structure diagram of the electrostatic dust collector in the prior art is as Figure 1 and Figure 2 shown. It adopts a wire-tube structure. By applying a negative high voltage to the thin wire in the pipeline, the dust in the gas is charged and the dust drifts on the pipe wall to remove the dust in the gas.

[0005] However, in the above method of removing dust from gas in the prior art, the dust charging and the dust drifting are in the same time and space. In order to maintain a stable corona discharge and electric field strength in the pipeline, an excessive voltage cannot be applied to the high-voltage wire in the pipeline, otherwise an arc discharge will be generated. Therefore, the dust removal method in the prior art results in a low efficiency of removing dust from gas.

[0006] Therefore, how to improve the low efficiency of the electrostatic dust collector in removing dust from gas in the prior art is a problem to be solved. Summary of the Invention

[0007] This application provides an electrostatic dust removal device to solve the problem of low efficiency of the electrostatic dust collector in removing dust from gas in the prior art.

[0008] This application provides an electrostatic dust removal device, including: at least one dust charging cavity and at least one dust removal cavity communicated therewith; wherein, the dust charging cavity includes a cavity wall and a high-voltage electrode arranged in the cavity; the cavity wall of the dust removal cavity is provided with opposite flat electrodes, and when the flat electrodes are energized, an electric field intersecting with the air flow direction is formed, and the cavity of the dust removal cavity is a looped and bent structure, and the opposite flat electrodes are arranged along the inner wall of the looped and bent structure.

[0009] Optionally, the high-voltage electrode is a conductive rod, strip or conductive wire extending from the chamber wall into the chamber; at least one inner wall of the chamber wall is made of metal; during operation, a positive high voltage or a negative high voltage is applied to the high-voltage electrode, and the inner wall made of metal is connected to zero potential.

[0010] Optionally, there are multiple high-voltage electrodes in a single dust charging chamber, and they are arranged along the air flow direction or perpendicular to the gas flow direction.

[0011] Optionally, the dust charging chamber includes a multi-layer partition structure, and the chambers between adjacent partitions form separate charging chambers, and the high-voltage electrodes are arranged in each charging chamber.

[0012] Optionally, the chamber wall of the dust removal chamber is provided with opposite flat electrodes. Specifically, the dust removal chamber includes a straight-through structure of side chamber walls, upper chamber walls and lower chamber walls. Among them, the flat electrodes are arranged on the inner sides of the upper and lower chamber walls, or the upper and lower chamber walls are made of metal and serve as the opposite flat electrodes.

[0013] Optionally, the loop bending structure includes two sets of flat electrodes arranged in an alternating manner, and an air flow channel is formed between adjacent two flat electrodes. The air flow channels of the two flat electrodes in the middle are respectively connected to the upper-side air flow channel and the lower-side air flow channel at both ends.

[0014] Optionally, there are multiple dust charging chambers and multiple dust removal chambers respectively; multiple dust charging chambers are arranged in parallel; multiple dust removal chambers are arranged in parallel; each of the multiple parallel dust charging chambers is connected to a corresponding dust removal chamber at the corresponding position in the multiple dust removal chambers, or one of the multiple parallel dust charging chambers is connected to at least two of the multiple dust removal chambers; or at least two of the multiple parallel dust charging chambers are connected to one of the multiple dust removal chambers.

[0015] The present application also provides an electrostatic dust removal device, including multiple stages of the above-mentioned electrostatic dust removal devices connected in series.

[0016] The present application also provides an excimer laser using the above-mentioned electrostatic dust removal device.

[0017] Compared with the prior art, the electrostatic dust removal device of the present application includes: at least one dust charging chamber and at least one dust removal chamber communicated therewith; wherein, the dust charging chamber includes a chamber wall and a high-voltage electrode arranged in the chamber; the chamber wall of the dust removal chamber is provided with opposite flat electrodes, and the flat electrodes form an electric field intersecting with the air flow direction when energized, the chamber of the dust removal chamber is a loop bending structure, and the opposite flat electrodes are arranged along the inner wall of the loop bending structure.

[0018] In the above device, a multi-zone electrostatic dust removal structure is provided. Charge is carried on the gas dust in the dust charging chamber. Opposite flat electrodes are provided on the inner wall of the chamber wall in the dust removal chamber and the inner wall of the looped and bent structure in the chamber. An electric field is formed between the opposite flat electrodes. When the gas flows along the air flow channel formed by the inner side of the chamber wall and the looped and bent structure, the charged dust particles in the gas migrate to the surface of the flat electrodes, thereby improving the efficiency of the electrostatic dust removal device in removing gas dust. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 FIG. is a schematic structural diagram of an electrostatic dust removal structure provided by the prior art.

[0020] Figure 2 is Figure 1 a schematic structural diagram of the electrostatic dust removal tube in

[0021] Figure 3 FIG. is a first schematic structural diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0022] Figure 4 is Figure 3 a schematic diagram of an electric field direction and an air flow direction in the dust removal chamber in

[0023] Figure 5 is Figure 3 a second schematic structural diagram of the dust charging chamber of

[0024] Figure 6 is Figure 3 a second schematic structural diagram of the dust removal chamber of

[0025] Figure 7 FIG. is a second schematic structural diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0026] Figure 8 FIG. is a third schematic structural diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0027] Figure 9 FIG. is a fourth schematic structural diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0028] Figure 10 FIG. is a fifth schematic structural diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0029] Among them, there are a dust charging chamber 101, a chamber side wall 101-1, a high-voltage electrode 101-2, a chamber upper wall 101-3, and a chamber lower wall 101-4; a dust removal chamber 102, a side chamber wall 102-1, a first loop bending structure 102-2, a first flat electrode 102-21, a second flat electrode 102-22, a second loop bending structure 102-3, a third flat electrode 102-31, and a fourth flat electrode 102-32. Specific embodiments

[0030] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0031] The present application provides an electrostatic dust removal device to solve the problem of low efficiency of removing gas dust by electrostatic precipitators in the prior art. The present application also provides an excimer laser.

[0032] The electrostatic dust removal device adopted in the prior art is as Figure 1 shown. Figure 1 FIG. is a schematic structural diagram of an electrostatic dust removal structure provided by the prior art. The electrostatic dust removal device of the prior art includes a plurality of electrostatic dust removal tubes 10. Figure 2 For Figure 1 is a schematic structural diagram of one of the electrostatic dust removal tubes. As Figure 1 and Figure 2 shown, a plurality of electrostatic dust removal tubes 10 are included on a high-voltage metal plate 12. Each electrostatic dust removal tube 10 is provided with a thin wire 11 passing through the electrostatic dust removal tube. Among them, the thin wire 11 is connected to the high-voltage metal plate 12. During operation, a high-voltage electrode is applied to the high-voltage metal plate 12, and the high-voltage metal plate 12 transmits the high-voltage electrode to each thin wire, so that the thin wires in each electrostatic dust removal tube are at the same potential.

[0033] As Figure 2 shown, each electrostatic dust removal tube 10 is internally provided with a thin wire 11 passing through the electrostatic dust removal tube. During operation, voltages with opposite polarities are applied to the electrostatic dust removal tube and the thin wire. On the one hand, a stable corona region is formed near the thin wire for discharging, so that the dust particles in the gas 13 entering the electrostatic dust removal tube carry charges; on the other hand, the charged dust particles will migrate to the surface of the thin wire or the wall of the electrostatic dust removal tube under the action of the electric field formed between the thin wire and the wall of the electrostatic dust removal tube to remove the dust particles in the gas.

[0034] Among them, Figure 1The electrostatic dust removal structure shown is a structure disclosed in the prior art. The electrostatic dust removal structure provided by the prior art can also be that high-voltage thin wires are arranged along the electrostatic dust removal tube, which will not be elaborated here.

[0035] In the above prior art, the charging process and the dust removal process of dust particles occur at the same time and in the same space. Generally, a negative voltage is applied to the thin wire, and a zero voltage or a positive voltage is applied to the wall of the electrostatic dust removal tube. In order to form a stable corona region near the thin wire, an excessive voltage cannot be applied to the thin wire, otherwise an arc discharge phenomenon will occur. However, in order to have a strong electric field effect between the thin wire and the wall of the electrostatic dust removal tube, an excessive voltage needs to be applied to the thin wire. Therefore, the electrostatic dust removal device in the prior art has a stable corona region, but will not form a strong electric field intensity. When the gas flow rate is large, the dust particle removal efficiency in the gas will decrease.

[0036] In order to solve the problem that the efficiency of the electrostatic dust removal device in the above prior art in removing dust particles in the gas is relatively low, this application proposes an electrostatic dust removal device.

[0037] The following provides a detailed introduction and description of the electrostatic dust removal device provided by the embodiments of this application.

[0038] Please refer to Figure 3 , Figure 3 , which is a schematic structural diagram of an electrostatic dust removal device provided by an embodiment of this application.

[0039] In Figure 3 , the electrostatic dust removal device includes: a dust charging chamber 101 and a dust removal chamber 102.

[0040] The dust charging chamber 101 is used to form a stable corona region and charge the dust particles in the gas. Among them, as Figure 3 shown, the dust charging chamber 101 includes a chamber side wall 101-1, a high-voltage electrode 101-2, a chamber upper wall 101-3 and a chamber lower wall 101-4. Specifically, the chamber side wall 101-1, the chamber upper wall 101-3 and the chamber lower wall 101-4 form the chamber outer shell of the dust charging chamber 101, and the high-voltage electrode 101-2 is located inside the dust charging chamber 101.

[0041] Specifically, the high-voltage electrode is a conductive rod, strip or conductive wire extending from the chamber wall into the chamber. As Figure 3 shown, the high-voltage electrode 101-2 is a conductive wire, which extends from the chamber side wall 101-1 into the chamber. The conductive wire is perpendicular to the chamber side wall 101-1 and parallel to the chamber upper wall 101-3 and the chamber lower wall 101-4.

[0042] At least one inner wall of the chamber is made of metal. For example, the upper chamber wall 101-3 and / or the lower chamber wall 101-4 of the chamber are made of metal.

[0043] During operation, a positive high voltage or a negative high voltage is applied to the high-voltage electrode, and the inner wall made of metal is connected to the zero potential. In this application, a conductive rod, bar, or wire is selected as the high-voltage electrode to generate a corona region in a local area around the high-voltage electrode during operation.

[0044] Specifically, the energized conductive wire generates a partial discharge phenomenon in the gas flow, forming a corona region. The partial discharge in the corona region causes the dust particles in the gas to carry charges. Usually, the corona region occurs in a region with a very high electric field strength in an inhomogeneous electric field, such as around a high-voltage wire.

[0045] Among them, as Figure 3 shown, the high-voltage electrode in a single dust charging chamber is multiple conductive wires and is arranged along the gas flow direction. During the gas flow, the corona regions of multiple conductive wires are passed through, increasing the probability of the dust particles in the gas carrying charges.

[0046] In addition, the high-voltage electrode in the dust charging chamber can also be arranged perpendicular to the gas flow direction. For example, multiple high-voltage electrodes are arranged along the vertical direction of the side wall of the dust charging chamber. When the gas flows through the dust charging chamber, the gas dust is divided into multiple small airflows in the dust charging chamber and passed through the corresponding high-voltage electrodes respectively, so that the dust in the gas can carry charges, increasing the probability of the dust in the gas carrying charges.

[0047] The above introduces the structural schematic diagram of a single dust charging chamber. In addition, the dust charging chamber can also include a multi-layer partition structure, as Figure 5 shown, multiple dust charging chambers are arranged side by side. Among them, the chamber between adjacent partitions constitutes a separate charging chamber, and a high-voltage electrode is arranged in each charging chamber.

[0048] During operation, when the gas flow is large, the multi-layer partition structure as Figure 5 shown can be used to charge the dust particles in the gas.

[0049] The above is the process of the dust charging chamber charging the dust particles in the gas, preparing for the dust removal chamber to remove the charged dust particles in the gas under the action of an electric field.

[0050] The dust removal chamber 102 is used to remove the charged dust particles in the gas, and the dust particles are migrated to the flat electrode in the dust removal chamber to achieve the effect of removing the dust particles in the gas.

[0051] The chamber wall of the dust removal chamber is provided with opposite flat electrodes, and when the flat electrodes are energized, an electric field is formed that intersects the direction of air flow. In order to improve the removal efficiency of dust particles in the gas, the chamber of the dust removal chamber can be set as a looped and bent structure, and the opposite flat electrodes are arranged along the inner wall of the looped and bent structure.

[0052] As Figure 3 shown, the dust removal chamber 102 includes a side chamber wall 102-1 and a looped and bent structure. The looped and bent structure includes two sets of flat electrodes arranged in an alternating manner, including a first looped and bent structure 102-2 and a second looped and bent structure 102-3. Among them, the first looped and bent structure 102-2 includes a first flat electrode 102-21 and a second flat electrode 102-22, and the second looped and bent structure 102-3 includes a third flat electrode 102-31 and a fourth flat electrode 102-32.

[0053] Among them, an air flow channel is formed between adjacent two flat electrodes, and the air flow channels of the two flat electrodes in the middle are respectively connected to the upper air flow channel and the lower air flow channel at both ends. As Figure 3 shown, a first air flow channel is formed between the first flat electrode 102-21 and the fourth flat electrode 102-32, a second air flow channel is formed between the fourth flat electrode 102-32 and the second flat electrode 102-22, and a third air flow channel is formed between the second flat electrode 102-22 and the third flat electrode 102-31, and the first air flow channel, the second air flow channel, and the third air flow channel are communicated with each other.

[0054] During operation, opposite voltages with opposite polarities are applied to the first flat electrode 102-21 and the fourth flat electrode 102-32 respectively to form a first electric field, opposite voltages with opposite polarities are applied to the fourth flat electrode 102-32 and the second flat electrode 102-22 respectively to form a second electric field, and opposite voltages with opposite polarities are applied to the second flat electrode 102-22 and the third flat electrode 102-31 respectively to form a third electric field. The gas flow passes through the first air flow channel, the second air flow channel and the third air flow channel in sequence, and respectively passes through the electric field actions of the first electric field, the second electric field and the third electric field, and migrates the charged dust particles in the gas to the surface of the flat electrode, separating from the gas, thereby removing the dust particles in the gas.

[0055] Among them, taking the first electric field as an example to introduce the direction of the electric field intensity of the first electric field, the direction of the electric field intensity is the direction from the first flat electrode 102-21 to the fourth flat electrode 102-32 or from the fourth flat electrode 102-32 to the first flat electrode 102-21, and the gas flow direction is along the length direction of the first flat electrode 102-21 and the fourth flat electrode 102-32. As Figure 4As shown, it is a schematic diagram of the electric field direction and air flow direction in the dust removal chamber.

[0056] Figure 4 It is the gas flow direction and electric field direction shown in the front view of the dust removal chamber. The gas flow direction is Figure 4 the first direction 40 in Figure 4 and the electric field direction is the second direction 20 in

[0057] Therefore, the gas flow direction intersects with the electric field direction. For example, when the first flat electrode 102-21 has a positive voltage and the electrode of the fourth flat electrode 102-32 has a negative voltage, the electric field direction is from the positive charge to the negative charge, that is, from the first flat electrode 102-21 to the fourth flat electrode 102-32.

[0058] According to Figure 4 it can be known that the electric field direction and the gas flow direction are in a mutually intersecting relationship.

[0059] Regarding the relationship between the electric field direction and the gas flow direction, there is also a preferred embodiment in this application. The electric field direction and the gas flow direction are perpendicular to each other. Specifically, as Figure 4 shown, the electric field direction is the vertical direction from the first flat electrode 102-21 to the fourth flat electrode 102-32, and the gas flow direction is from one end of the first air flow channel to the other end in the horizontal direction. Then the electric field direction and the gas flow direction are perpendicular to each other.

[0060] During operation, when the gas flow passes through the flat electrodes along the first air flow channel, the dust particles carrying charges migrate to the surface of the first flat electrode 102-21 or the surface of the fourth flat electrode 102-32 under the action of the electric field. Specifically, the positive charges migrate to the electrode plate where the negative charges are located under the action of the electric field force, and the negative charges migrate to the electrode plate where the positive charges are located under the action of the electric field force, so as to remove the dust particles in the gas.

[0061] The above introduces a schematic diagram of the structure of a single dust removal chamber. In addition, the dust removal chamber can also include a multi-layer partition structure, as Figure 6 shown, it is Figure 3 the second schematic diagram of the structure of the dust removal chamber. Multiple dust removal chambers are arranged in parallel. Among them, the chamber between adjacent partitions forms a separate dust removal chamber, and the adjacent two flat electrodes of each dust removal chamber form an electric field intersecting with the gas flow direction when energized.

[0062] During operation, when the gas flow is large, the multi-layer partition structure shown in Figure 6 can be used to remove the dust particles carrying charges in the gas.

[0063] The above is the process of the dust removal chamber removing the dust particles in the gas under the action of the electric field.

[0064] In addition, the electrostatic dust removal device includes a plurality of dust charging chambers and a plurality of dust removal chambers. Among them, each of the plurality of juxtaposed dust charging chambers is in one-to-one communication with the dust removal chamber at the corresponding position in the plurality of dust removal chambers, as Figure 7 shown, which is the second structural schematic diagram of an electrostatic dust removal device provided by an embodiment of the present application. For example, the first dust charging chamber 103 among the plurality of juxtaposed dust charging chambers is connected to the first dust removal chamber 104 among the plurality of juxtaposed dust removal chambers, the second dust charging chamber 105 among the plurality of juxtaposed dust charging chambers is connected to the second dust removal chamber 106 among the plurality of juxtaposed dust removal chambers, and so on. The Nth charging chamber among the plurality of juxtaposed dust charging chambers is connected to the Nth dust removal chamber among the plurality of juxtaposed dust removal chambers.

[0065] Alternatively, the electrostatic dust removal device includes one of the plurality of juxtaposed dust charging chambers in communication with at least two of the plurality of dust removal chambers, as Figure 8 shown, which is the third structural schematic diagram of an electrostatic dust removal device provided by an embodiment of the present application. Each dust charging chamber among the plurality of juxtaposed dust charging chambers is in communication with the plurality of juxtaposed dust removal chambers, and the plurality of juxtaposed dust removal chambers include a plurality of dust removal chambers.

[0066] Alternatively, the electrostatic dust removal device includes at least two of the plurality of juxtaposed dust charging chambers in communication with one of the plurality of dust removal chambers, as Figure 9 shown, which is the fourth structural schematic diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0067] Each dust removal chamber among the plurality of juxtaposed dust removal chambers is in communication with the plurality of juxtaposed dust charging chambers, and the plurality of juxtaposed dust charging chambers include a plurality of dust charging chambers.

[0068] When the gas flow rate is large, a plurality of juxtaposed dust charging chambers and juxtaposed dust removal chambers are used to split the gas into multiple small airflows, which pass through the plurality of dust charging chambers and the plurality of dust removal chambers respectively. One portion of the split airflow passes through each dust charging chamber, which can increase the quantity and efficiency of the dust particles in the gas carrying charges. Correspondingly, when the charged dust particles pass through the dust removal chamber, they can fully migrate to the surface of the flat electrode under the action of the electric field. The gas with a large gas flow rate is cleared by the plurality of juxtaposed dust charging chambers and the plurality of dust removal chambers, improving the removal efficiency of the dust particles in the gas.

[0069] The above is the structural explanation of an electrostatic dust removal device including a plurality of dust charging chambers and a plurality of dust removal chambers connected thereto.

[0070] The present application also provides an electrostatic dust removal device, which adopts a multi-stage dust charging chamber and a dust removal chamber connected in series, as Figure 10 shown, which is the fifth structural schematic diagram of an electrostatic dust removal device provided by an embodiment of the present application.

[0071] During operation, the gas sequentially passes through the first-stage dust charging chamber and the dust removal chamber, the second-stage dust charging chamber and the dust removal chamber, etc. After multiple times of charging the dust particles in the gas and migrating the dust particles in the gas to the electrode plate through the action of the electric field, the dust particles are removed through multiple stages, improving the removal efficiency of the dust particles in the gas.

[0072] The present application also provides an excimer laser that employs the above electrostatic dust removal device.

[0073] In practical applications, the gas containing dust particles in the discharge chamber of the excimer laser enters the electrostatic dust removal device from the discharge chamber through a pipeline. The electrostatic dust removal device first charges the dust particles in the gas through the dust charging chamber, and then migrates the charged dust particles to the surface of the flat electrode in the dust removal area under the action of the electric field to remove the dust particles in the gas. With the multi-zone electrostatic dust removal area of the above electrostatic dust removal device, on the one hand, it ensures that the dust charging chamber provides a constant corona area to charge the dust particles in the gas, and on the other hand, the dust removal area migrates the charged dust particles to the flat electrode under the action of the electric field. By using a flat electrode with a looped and bent structure, the migration area of the dust particles is increased, improving the removal efficiency of the dust particles.

[0074] Although the present application is disclosed above with preferred embodiments, it is not intended to limit the present application. Any person skilled in the art can make possible changes and modifications without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application shall be subject to the scope defined by the claims of the present application.

Claims

1. An electrostatic precipitator, characterized in that, Comprising: At least one dust charging chamber and at least one dust removing chamber communicating therewith; Wherein, the dust charging chamber comprises a chamber wall and a high-voltage electrode disposed in the chamber; the chamber wall of the dust removing chamber is provided with opposing flat electrodes, and when the flat electrodes are energized, an electric field intersecting the airflow direction is formed, and the chamber of the dust removing chamber is a looped and bent structure, and the opposing flat electrodes are disposed along the inner wall of the looped and bent structure.

2. The device according to claim 1, characterized in that, The high-voltage electrode is a conductive rod, strip or wire extending from the chamber wall into the chamber; at least one inner wall of the chamber wall is made of a metal material; during operation, a positive high voltage or a negative high voltage is applied to the high-voltage electrode, and the inner wall of the metal material is connected to zero potential.

3. The device according to claim 2, characterized in that, In a single dust charging chamber, there are multiple high-voltage electrodes, which are arranged along the airflow direction or perpendicular to the gas flow direction.

4. The device according to claim 1, characterized in that, The dust charging chamber comprises a multi-layer partition structure, and the chambers between adjacent partitions form separate charging chambers, and the high-voltage electrodes are provided in each charging chamber.

5. The device according to claim 1, characterized in that, The looped and bent structure comprises two sets of flat electrodes arranged in an alternating manner, and an airflow channel is formed between adjacent two flat electrodes, and the airflow channels of the two flat electrodes in the middle are respectively connected to the airflow channel above and the airflow channel below at both ends.

6. The device according to claim 1, characterized in that, The dust charging chambers and the dust removing chambers are respectively multiple; Multiple dust charging chambers are arranged in parallel; multiple dust removing chambers are arranged in parallel; Each of the multiple parallel dust charging chambers is in one-to-one communication with the corresponding dust removing chamber in the multiple dust removing chambers, or one of the multiple parallel dust charging chambers is connected to at least two of the multiple dust removing chambers; or at least two of the multiple parallel dust charging chambers are connected to one of the multiple dust removing chambers.

7. An electrostatic precipitator, characterized in that, Comprising a multi-stage electrostatic dust removal device connected in series as described in any one of claims 1 to 6.

8. An excimer laser, characterized in that, Using the electrostatic dust removal device as described in any one of claims 1 to 6.

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