Test apparatus, test method, and computer readable medium

Abstract

The present application is to solve the problem that the optical characteristics of a plurality of LEDs cannot be inspected at the same time by a method of causing one of a pair of LEDs to emit light and causing the other to receive light, and using the current value of the current output by the photoelectric effect to inspect the optical characteristics of the LEDs. To solve the above problem, the present application proposes a test device provided with: an electrical connection portion electrically connected to the terminals of each of a plurality of LEDs that are test subjects; a light source portion that irradiates light to the plurality of LEDs at the same time; a measurement portion that measures a photoelectric signal that is photoelectrically converted by each of the plurality of LEDs with respect to the light irradiated by the light source portion and output via the electrical connection portion; and a determination portion that determines the good or bad of each of the plurality of LEDs based on the measurement result of the measurement portion.

Description

[0001] This invention patent application is a divisional application of the invention patent application with application number 202010290804.5 and title "Test Apparatus, Test Method and Computer-Readable Media", and the original application was filed on April 14, 2020. Technical Field

[0002] This invention relates to a test apparatus, a test method, and a computer-readable medium. Background Technology

[0003] A method is known in which one of a pair of LEDs (light-emitting diodes) to be inspected emits light while the other receives light, and the optical characteristics of the LEDs are inspected using the current value of the current output through the photoelectric effect (see, for example, Patent Documents 1 and 2).

[0004] [Existing technical documents]

[0005] (Patent Documents)

[0006] Patent Document 1: Japanese Patent Publication No. 2019-507953

[0007] Patent Document 2: Japanese Patent Application Publication No. 2010-230568 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] However, the above method requires each LED to light up sequentially for inspection, making it impossible to inspect the optical characteristics of multiple LEDs at the same time.

[0010] Technical means to solve the problem

[0011] In one embodiment of the present invention, a testing apparatus is provided. The testing apparatus includes: an electrical connection portion electrically connected to the terminals of a plurality of LEDs that are test objects; a light source portion that illuminates the plurality of LEDs together; a measuring portion that measures photoelectric signals, which are generated by the plurality of LEDs converting the light illuminated by the light source portion into photoelectric signals and outputting them via the electrical connection portion; and a judgment portion that determines the quality of each of the plurality of LEDs based on the measurement results of the measuring portion.

[0012] An electrical connection may also be disposed between the light source and the plurality of LEDs. The electrical connection may also have a substrate with an opening that allows light from the light source to pass through the plurality of LEDs. The electrical connection may also have a plurality of probes that extend from the substrate toward the plurality of LEDs exposed into the opening and contact the terminals of the plurality of LEDs respectively.

[0013] The test apparatus may further include a mounting section on which a group of LEDs is mounted. The electrical connection section can also be moved via the mounting section in a state where the group of LEDs is mounted, and can sequentially switch from the group of LEDs to a group of multiple LEDs at the connection point of the test object. The measuring section can also measure photoelectric signals, which originate from the group of multiple LEDs sequentially connected by the electrical connection section.

[0014] The judgment unit may also determine that at least one LED among a plurality of LEDs whose measured photoelectric signal is outside the normal range is defective.

[0015] As a normal range, the following range can also be used, which is the range based on the statistics corresponding to the photoelectric signals output by the plurality of LEDs respectively.

[0016] As a normal range, the following range can also be used, which is the range of statistics corresponding to the photoelectric signals output by LEDs arranged in the same position among the groups of LEDs in the group of LEDs, obtained by performing multiple measurements while changing the groups of multiple LEDs into groups of multiple LEDs in turn.

[0017] The light source can also emit white light.

[0018] The light source can also switch between multiple types of light with different color components.

[0019] The light source may also have multiple color filters, and multiple types of light are emitted by passing light through multiple color filters respectively.

[0020] The light source unit may also have multiple light sources with different wavelengths. The light source unit can also emit multiple types of light with different color components by switching between multiple light sources.

[0021] The test apparatus may further include a shielding section that shields light other than that from the light source.

[0022] In one embodiment of the present invention, a testing method is provided. The testing method includes: a connection stage in which an electrical connection portion is electrically connected to the terminals of a plurality of LEDs that are test objects; an illumination stage in which light is simultaneously irradiated onto the plurality of LEDs; a measurement stage in which a photoelectric signal is measured, wherein the photoelectric signal is generated by the plurality of LEDs converting the irradiated light into photoelectric signals and outputting them via the electrical connection portion; and a judgment stage in which the quality of each of the plurality of LEDs is determined based on the measurement results of the measurement stage.

[0023] In one embodiment of the present invention, a computer-readable medium is provided, which stores a program that is executed by a testing apparatus for testing a plurality of LEDs and is used to cause the testing apparatus to perform the above-described testing method.

[0024] Furthermore, the above-described invention does not list all the essential features of the invention. Moreover, sub-combinations of these feature groups can also constitute an invention. Attached Figure Description

[0025] Figure 1 This is an example of an overall view showing the general layout of a test apparatus 100 for testing a plurality of LEDs 10.

[0026] Figure 2 The following are examples of side views (A) and plan views (B) of an electrical connection portion 110 in which the mounting portion 150, the LED group mounted on the mounting portion 150, and the plurality of probes 113 contact a specific plurality of LEDs 10 in the LED group.

[0027] Figure 3 This is an example of a flowchart illustrating the process of a test method implemented by the test apparatus 100.

[0028] Figure 4 This is an example of an overall view showing the general layout of a test apparatus 200 for testing a plurality of LEDs 20.

[0029] Figure 5 This is an example of an overall view showing the general layout of a test apparatus 300 for testing a plurality of LEDs 30.

[0030] Figure 6 This is a diagram illustrating one example of a computer 1200 that can be wholly or partially embodied in a plurality of embodiments of the present invention.

[0031] The annotations in the attached figures are explained as follows:

[0032] 10, 20, 30: LED

[0033] 11, 21, 31: Terminal

[0034] 15, 25, 35: Wafer

[0035] 100, 200, 300: Test apparatus

[0036] 110, 210: Electrical connection parts

[0037] 111, 211: Substrate

[0038] 112: Opening

[0039] 113, 213: Probes

[0040] 120: Light Source Department

[0041] 121: Light Source

[0042] 122: Parallel light

[0043] 123: Lens Unit

[0044] 124: Filter switching unit

[0045] 125: Color Filter

[0046] 130: Measurement Department

[0047] 140: Control Department

[0048] 145: Storage Department

[0049] 150: Loading section

[0050] 160: Shelter

[0051] 1200: Computer

[0052] 1201: DVD-ROM

[0053] 1210: Host Controller

[0054] 1212: CPU

[0055] 1214: RAM

[0056] 1216: Graphics Controller

[0057] 1218: Display device

[0058] 1220: Input / Output Controller

[0059] 1222: Communication Interface

[0060] 1224: Hard Drive

[0061] 1226: DVD-ROM drive

[0062] 1230: ROM

[0063] 1240: Input / Output Chip

[0064] 1242: Keyboard Detailed Implementation

[0065] The present invention will now be described through embodiments thereof, which are not intended to limit the scope of the claims. Furthermore, not all combinations of features described in the embodiments are necessary for the solutions provided by the invention. Additionally, in the drawings, identical or similar parts may sometimes be labeled with the same reference numerals and repeated descriptions may be omitted.

[0066] Figure 1This is an example of an overall view showing a test apparatus 100 for testing a plurality of LEDs 10. Figure 1 In the diagram, the X-axis, Z-axis, and Y-axis are shown in a mutually orthogonal manner. The X-axis is the axis pointing to the right when facing the paper, defined as the +X direction; the Z-axis is the axis pointing upwards when facing the paper, defined as the +Z direction; and the Y-axis is the axis pointing in the depth direction when facing the paper, defined as the +Y direction. These three axes will sometimes be used in the following explanations.

[0067] The test apparatus 100 utilizes the photoelectric effect of LEDs 10 and tests the optical characteristics of a plurality of LEDs 10 simultaneously based on the photoelectric signal output from the illuminated LEDs 10. The test apparatus 100 includes an electrical connection unit 110, a light source unit 120, a measuring unit 130, and a control unit 140. In this embodiment, the test apparatus 100 may further include a storage unit 145, a mounting unit 150, and a shielding unit 160.

[0068] In this embodiment, the test apparatus 100, for example, places an LED group on a mounting section 150 in which a plurality of LEDs 10 are formed on a wafer 15, wherein the wafer 15 is a bare silicon wafer without electrical wiring. In this state, the optical characteristics of a specific group of a plurality of LEDs 10 in the LED group are tested simultaneously. In this embodiment, the LED 10 is a micro LED with a size of 100 μm or less. Furthermore, in addition to micro LEDs, the LED 10 may also be a mini LED with a size greater than 100 μm and less than 200 μm, or an LED with a size greater than 200 μm.

[0069] Furthermore, in this embodiment, the plurality of LEDs 10 are not electrically connected to each other on the wafer 15, and are monochromatic. Alternatively, the plurality of LEDs 10 may be formed on a wafer with electrical wiring or on a panel level packaging (PLP) with a generally square glass substrate, and electrically connected to each other and cell-based. In this case, the various colors of RGB can be doped using techniques such as laser stripping and transfer from individual RGB (red, green, blue) monochromatic wafers, or techniques such as dyeing or coating fluorescent paint on any of the RGB monochromatic wafers.

[0070] The electrical connection portion 110 is, for example, a probe card (probe substrate), electrically connected to the terminals 11 of each of the plurality of LEDs 10 that are the test objects. In this embodiment, the electrical connection portion 110 further allows the mounting portion 150 to move while the LED group is mounted, thereby sequentially switching from the LED group mounted on the mounting portion 150 to the group of the plurality of LEDs at the connection point that are the test objects. In this embodiment, the electrical connection portion 110 is disposed between the light source portion 120 and the plurality of LEDs 10, and includes a substrate 111 and a plurality of probes 113.

[0071] The substrate 111 has an opening 112 that allows light from the light source section 120 to pass through the plurality of LEDs 10. Figure 1 In the middle, opening 112 is shown with a dashed line.

[0072] A plurality of probes 113 extend from the substrate 111 toward a plurality of LEDs 10 exposed into the opening 112, and contact the terminals 11 of each of the plurality of LEDs 10. The other end of the contact terminal 11 of each probe 113 is electrically connected to an electrical wiring disposed on the substrate 111. A plurality of electrical wirings of the plurality of probes 113 extend from the side of the substrate 111 and are electrically connected to the measuring unit 130.

[0073] Furthermore, the plurality of probes 113 are preferably of the same shape and size, and the distances between them and the contacting LEDs 10 are equal, so that the amount of light received by each of the plurality of LEDs 10 is equal. Also, the plurality of probes 113 are preferably plated or coated separately so that light does not diffusely reflect off the surface of the probes 113.

[0074] The light source unit 120 illuminates a plurality of LEDs 10 simultaneously. In this embodiment, the light source unit 120 is capable of switching between a plurality of light sources with different color compositions. The light source unit 120 in this embodiment includes a light source 121, a lens unit 123, a color filter 125, and a filter switching unit 124.

[0075] Light source 121 is, for example, a halogen lamp, emitting uniform white light of all wavelengths in the RGB spectrum. Lens unit 123 includes one or more lenses, disposed adjacent to the illumination portion of light source 121, so that the diffused light emanating from light source 121 becomes parallel light 122. Figure 1 In the diagram, parallel light 122 is shown in diagonal lines. The projection surface of this parallel light 122 on the XY plane at least covers the opening 112 of the substrate 111.

[0076] The color filter 125 can be any one of a plurality of color filters 125, such as a red filter, a green filter, and a blue filter. It absorbs light of a specific wavelength band contained in the incident white light and allows the remaining light to pass through. In this embodiment, by using the light source unit 120 having these plurality of color filters 125, light with different color components can be emitted by passing light through the plurality of color filters 125 respectively.

[0077] The filter switching unit 124 is disposed adjacent to the lens unit 123 and holds a plurality of color filters 125, switching the color filters 125 that allow parallel light 122 from the lens unit 123 to enter. Furthermore, the filter switching unit 124 can also be switched so that the parallel light 122 from the lens unit 123 does not enter any of the color filters 125; in this case, white light from the light source 121 directly illuminates the plurality of LEDs 10.

[0078] The measuring unit 130 measures photoelectric signals, which are generated by a plurality of LEDs 10 converting light irradiated by the light source unit 120 into photoelectric signals and outputting them via the electrical connection unit 110. In this embodiment, the measuring unit 130 measures photoelectric signals from a group of a plurality of LEDs 10 sequentially connected to the electrical connection unit 110.

[0079] More specifically, in this embodiment, the measuring unit 130 is connected to an electrical wiring that is electrically connected to each probe 113 of the electrical connection unit 110. The measuring unit 130 measures the current value output by a group of LEDs 10 that are switched to contact a plurality of probes 113 in a group of LEDs placed on the mounting unit 150. Alternatively, the measuring unit 130 may measure the voltage value corresponding to the current value instead of the current value.

[0080] The control unit 140 controls each component of the test apparatus 100. In this embodiment, the control unit 140 controls the irradiation time, wavelength, and intensity of the parallel light 122 that simultaneously irradiates the plurality of LEDs 10 by controlling the light source 121 of the light source unit 120 and the filter switching unit 124. Furthermore, the control unit 140 controls the mounting unit 150 to sequentially switch the plurality of LEDs 10 placed on the mounting unit 150 to become the test object. More specifically, the control unit 140 drives the mounting unit 150 so that the probes 113 contact the terminals 11 of each LED 10 in the group. Moreover, the control unit 140 can also obtain the spatial coordinates of the plurality of probes 113 and the relative positions of the plurality of probes 113 to each LED 10 on the mounting unit 150 by referring to reference data in the storage unit 145.

[0081] The control unit 140 then determines the quality of each of the plurality of LEDs 10 based on the measurement results of the measurement unit 130. In this embodiment, the control unit 140 determines at least one LED among the plurality of LEDs 10 whose measured photoelectric signal is outside the normal range as defective. The control unit 140 performs sequential control on these configurations via the reference storage unit 145. Furthermore, the control unit 140 functions as an example of a determination unit.

[0082] The storage unit 145 stores reference data for determining the quality of each of the plurality of LEDs 10, determination results, reference data for moving the mounting unit 150, and sequences and programs for controlling each structure in the test apparatus 100. The storage unit 145 is referenced by the control unit 140.

[0083] The mounting section 150 has a generally circular shape and mounts an LED array. The mounting section 150 has holding functions such as a vacuum chuck or an electrostatic chuck to hold the mounted wafer 15 on which the LED array is formed. Furthermore, the mounting section 150 is driven and controlled by the control section 140, moving two-dimensionally in the XY plane and rising and falling in the Z-axis direction. Moreover, in Figure 1 The negative Z-axis direction of the mounting section 150 is omitted from the illustration. Furthermore, in... Figure 1 In the diagram, a hollow arrow indicates the direction of movement of the mounting section 150. The same applies to the following figures.

[0084] The shielding portion 160 shields light other than that from the light source portion 120. In this embodiment, the entire surface of the shielding portion 160 is coated with black to prevent diffuse reflection of light on the surface. Furthermore, as... Figure 1 As shown, the shielding portion 160 in this embodiment is configured to be closely connected to the outer periphery of the light source 121 and the outer periphery of the substrate 111, respectively. With this configuration, light other than light from the light source portion 120 is shielded.

[0085] Figure 2 The following are examples of side views (A) and plan views (B) of the electrical connection portion 110 in a state where the mounting portion 150, the LED group mounted on the mounting portion 150, and the plurality of probes 113 are in contact with a specific plurality of LEDs 10 in the LED group. Figure 2 (A) only extracts Figure 1 The mounting portion 150, the LED array, and the electrical connection portion 110 are shown and illustrated. Figure 2 In (B), a plurality of LEDs 10 in the LED group on the mounting portion 150 that are not visible due to the substrate 111 are shown in dashed lines.

[0086] like Figure 2As shown in (B), on each LED 10, two terminals 11 are formed separately from each other in the Y-axis direction. Furthermore, a plurality of LEDs 10 are arranged in a matrix on the mounting portion 150. In one example shown, they are arranged in a matrix with 6 columns in the X-axis direction and 6 rows in the Y-axis direction.

[0087] The opening 112 of the substrate 111 has a rectangular outline that is longer in the Y-axis direction. In one example shown, as a group of a plurality of LEDs 10 whose optical properties are measured together, 12 LEDs 10 arranged in 2 columns in the X-axis direction and 6 rows in the Y-axis direction are exposed in the opening 112. The substrate 111 is configured such that a probe 113 of the electrical connection portion 110 contacts a plurality of terminals 11 located in the opening 112 of the substrate 111.

[0088] Figure 3 This is an example of a flowchart illustrating the process of a test method implemented by the test apparatus 100. The process begins with the LED group being placed on the mounting section 150, and the user makes input, for example, to start a test on the LED group using the test apparatus 100.

[0089] The test apparatus 100 performs a connection phase by electrically connecting the electrical connection part 110 to the terminals 11 of each of the plurality of LEDs 10 that are the test objects (step S101). As a specific example, the control unit 140 outputs a command to the mounting unit 150 to move the mounting unit 150 so that the group of the plurality of LEDs 10 that are initially the test objects in the LED group on the mounting unit 150 contacts the plurality of probes 113.

[0090] The test apparatus 100 performs the illumination phase, simultaneously illuminating a plurality of LEDs 10 (step S103). As a specific example, the control unit 140 outputs a command to the light source unit 120, causing the parallel white light 122 to illuminate the group of a plurality of LEDs 10 exposed within the opening 112. The control unit 140 may also additionally output a command to the light source unit 120, causing the filter switching unit 124 of the light source unit 120 to switch the color filter 125 that allows the parallel light 122 from the lens unit 123 to enter, thereby sequentially switching multiple types of light with different color components and illuminating the group of a plurality of LEDs 10.

[0091] The test apparatus 100 performs a measurement phase, which measures photoelectric signals. These photoelectric signals are generated by a plurality of LEDs 10 converting the irradiated light into photoelectric signals, which are then output via an electrical connection unit 110 (step S105). As a specific example, the control unit 140 issues a command to the measurement unit 130 and measures the current value of the group of LEDs 10 that automatically switch to contact with a plurality of probes 113, which are mounted on the mounting unit 150. The measurement result is then output to the control unit 140. The control unit 140 stores the measurement results of each group of LEDs 10 in the storage unit 145.

[0092] The test apparatus 100 determines whether the measurement of all LEDs 10 placed on the mounting section 150 is completed (step S107). If not (step S107: No), a group switching phase is executed, that is, the group of the plurality of LEDs 10 that are the test objects is switched (step S109), and the process returns to step S101. As a specific example, the control unit 140 refers to the reference data in the storage unit 145 to determine whether the measurement results of all LEDs 10 placed on the mounting section 150 are stored. If not, a command is issued to the mounting section 150 to move the mounting section 150 to switch to the next group of the plurality of LEDs 10 that are the test objects.

[0093] In step S107, when the measurement of all LEDs 10 placed on the mounting section 150 is completed (step S107: Yes), the testing apparatus 100 performs a determination phase, that is, based on the measurement results of the above-mentioned measurement phase, it determines whether each of the plurality of LEDs 10 is good or bad (step S111), and the process is completed. As a specific example, the control unit 140 refers to the reference data in the storage unit 145, and when the measurement results of all LEDs 10 placed on the mounting section 150 are stored, it determines whether each of the plurality of LEDs 10 is good or bad based on the measurement results.

[0094] In this embodiment, the control unit 140 determines at least one LED 10 whose measured photoelectric signal is outside the normal range as defective. As an example of the so-called normal range, a range based on statistics corresponding to the photoelectric signals output by each of the plurality of LEDs 10 can also be used. More specifically, as an example of the normal range, a range within ±1σ, ±2σ, or ±3σ of the average current value of each of the plurality of LEDs 10 output from the self-mounted unit 150 can also be used. In this case, the control unit 140 calculates the average value and standard deviation σ based on the current value of each of the plurality of LEDs 10 output from the self-mounted unit 150 stored in the storage unit 145.

[0095] Furthermore, as another example of the aforementioned normal range, the following range can also be used: a range based on the statistical quantity corresponding to the photoelectric signal output by an LED 10 positioned at the same location within a group of LEDs, obtained by performing multiple measurements while sequentially changing groups of LEDs 10 from one group of LEDs to the test object. More specifically, as another example of the normal range, the following range can also be used: for example, in... Figure 2 In the LED array arranged in a matrix of 6 columns in the X-axis direction and 6 rows in the Y-axis direction on the mounting unit 150 shown, LEDs 10 arranged in the same row and column are designated as target LEDs. The average current value output from each of the target LEDs in the plurality of LED arrays on the plurality of mounting units 150 is within ±1σ, ±2σ, or ±3σ. At this time, the control unit 140 calculates the average value and standard deviation σ based on the current values ​​output from the plurality of target LEDs stored in the storage unit 145.

[0096] Furthermore, as another example of the aforementioned normal range, the following range can also be used: a range obtained by adding the margin value specified based on the LED10's specifications to the base value specified based on the LED10's specifications. In this case, the control unit 140 can also refer to and display information about this range that is pre-stored in the storage unit 145.

[0097] As a comparative example to compare with the test method implemented by the test apparatus 100 of this embodiment, the following test method for the optical characteristics of LEDs can be considered, for example, by lighting up a plurality of LEDs arranged on a wafer one by one in sequence, and using an image sensor, spectrometer or the like to receive the light and determine whether the light is emitted accurately.

[0098] When the optical characteristics of a plurality of LEDs are measured together using the comparative example test method, the light emitted by the adjacent plurality of LEDs interferes with each other, making it impossible to accurately identify defective LEDs with relatively deteriorated optical characteristics. Furthermore, image sensors and the like are very expensive for high-precision image recognition over a large area. This problem is particularly pronounced when testing a plurality of miniature LEDs.

[0099] In this embodiment, the test apparatus 100 electrically connects the electrical connection portion 110 to the terminals 11 of each of the plurality of LEDs 10 that are the test objects, and simultaneously irradiates the plurality of LEDs 10. Each of the plurality of LEDs 10 performs photoelectric conversion on the irradiated light and outputs a photoelectric signal via the electrical connection portion 110 to measure the photoelectric signal. Based on the measurement results of the plurality of LEDs 100, the quality of each of the plurality of LEDs 10 is determined. Therefore, the test apparatus 100 can not only shorten the processing time by simultaneously measuring the photoelectric signals of the plurality of LEDs 10, but also accurately identify defective LEDs 10 with deteriorated optical characteristics by using photoelectric signals measured without being affected by the measurement of the optical characteristics of other LEDs 10. Furthermore, the number of LEDs 10 that can be measured simultaneously can be easily expanded according to the test apparatus 100.

[0100] LED10 has the following characteristics: depending on the combination of the wavelength of the irradiated light and the color of the LED10, the photoelectric effect varies. For example, when LED10 is red, the current is greater when irradiated with red wavelength light compared to when irradiated with light of wavelengths other than red. According to the test apparatus 100 of this embodiment, since multiple types of light with different color components can be switched between simultaneously irradiated onto a plurality of LEDs10, the characteristics of the emission color of each LED10 can be checked by adjusting the wavelength of the irradiated light, allowing for a more accurate and detailed determination of its performance.

[0101] For example, according to the test apparatus 100 of this embodiment, for a red LED 10, the photoelectric signal output when white light is irradiated onto it is measured, and the photoelectric signal output when light of a red wavelength is irradiated onto it is also measured. Thus, not only can the LED 10 be relatively evaluated by a statistical measure obtained as a result of irradiating a plurality of LEDs 10 with white light, but also the LED 10 can be relatively evaluated as red by a statistical measure obtained as a result of irradiating a plurality of red LEDs 10 with red wavelength light, in addition to the above-mentioned relative evaluation.

[0102] Furthermore, when there is incorrect information, such as LED10 actually being green but mistakenly being red, if only white light is shone on the LED10 to measure its characteristics, it cannot be seen that the LED10 is green. However, according to the test apparatus 100, the above-mentioned method can be used to see the error in this information and make a correct judgment.

[0103] Furthermore, according to the test apparatus 100 of this embodiment, for example, the measurement of the electrical characteristics of a plurality of LEDs 10 using an LED tester (VI test) can also share the plurality of probes 113 and substrate 111 used to measure the optical characteristics of the plurality of LEDs 10. Also, according to the test apparatus 100 of this embodiment, the components other than the light source unit 120 and the shielding unit 160—that is, the electrical connection unit 110, the measuring unit 130, the control unit 140, the storage unit 145, and the mounting unit 150—can be used by users testing components other than optical devices such as LED arrays.

[0104] In the above embodiments, the configuration is described with a plurality of LEDs 10 having terminals 11 on the light-emitting side. Alternatively, the plurality of LEDs 10 may also have terminals 11 on the opposite side of the light-emitting surface. The plurality of probes 113 may have different lengths depending on whether the terminals 11 of the plurality of LEDs 10 are located on the light-emitting side or on the opposite side of the light-emitting surface.

[0105] In the above embodiment, the following configuration will be described: In the XY plane, the mounting portion 150 on which the LED group is mounted is moved so that the position coordinates of the plurality of probes 113 of the electrical connection portion 110 are aligned with the position coordinates of the plurality of LEDs 10 in the LED group. Then, the mounting portion 150 is raised or lowered, thereby causing the plurality of terminals 11 of the plurality of LEDs 10 to contact the plurality of probes 113. Alternatively, after the movement in the XY plane described above, the plurality of terminals 11 of the plurality of LEDs 10 can be raised or lowered to contact the plurality of probes 113.

[0106] In the above embodiments, the mounting portion 150 is described as having a generally circular shape. Alternatively, the mounting portion 150 may also have a generally square shape, corresponding to the shape of the LED group, for example, when it mounts an LED group, and the LED group is formed on a panel (PLP) with electrical wiring and a generally square shape, where a plurality of LEDs 10 are formed.

[0107] Figure 4 This is an example of an overall diagram showing the general layout of a test apparatus 200 for testing a plurality of LEDs 20. Furthermore, Figure 5 This is an example of an overall diagram showing the general layout of a test apparatus 300 for testing a plurality of LEDs 30. Figure 4 and Figure 5 In the description of the illustrated embodiments, for use Figures 1 to 3 The embodiments described herein have the same construction, use the same reference numerals, and omit repeated descriptions. Specifically, in... Figure 4 and Figure 5In this text, only for the purpose of clarity, the term "in Chinese" will be used. Figures 1 to 3 The diagrams of the measuring unit 130, control unit 140, storage unit 145, and placement unit 150 of the experimental apparatus 100 are omitted.

[0108] In use Figures 1 to 3 In the described embodiment, the electrical connection portion 110 is disposed between the light source portion 120 and the plurality of LEDs 10, and includes: a substrate 111; and a plurality of probes 113 disposed in an opening 112 of the substrate 111. Figure 4 and Figure 5 In the embodiment shown, instead, the electrical connection portion 210 is configured such that a plurality of LEDs 20, 30 are located between the light source portion 120 and the electrical connection portion 210, and has: a substrate 211; and a plurality of probes 213, which extend from the substrate 211 toward the plurality of LEDs 20, 30 and contact the terminals 21, 31 of the plurality of LEDs 20, 30 respectively.

[0109] exist Figure 4 In the illustrated embodiment, the LED group is a surface-emitting type in which the light-emitting surfaces of a plurality of LEDs 20 are not facing the wafer 25. Each terminal 21 of the plurality of LEDs 20 faces the wafer 25. On the wafer 25, a plurality of through holes 26 extending in the Z-axis direction are formed at the position of each terminal 21. In this case, the electrical connection portion 210 can also allow a plurality of probes 213 to contact each terminal 21 of the plurality of LEDs 20 from the negative Z-axis direction side of the wafer 25 through the plurality of through holes 26 formed on the wafer 25.

[0110] exist Figure 5 In the illustrated embodiment, the LED group is a plurality of LEDs 30 whose light-emitting surfaces face the back of the wafer 35, through which light passes, and the terminals 31 of the plurality of LEDs 30 are not facing the wafer 35. In this case, the electrical connection portion 210 can also allow the plurality of probes 213 to contact the terminals 31 of the plurality of LEDs 30 from the negative Z-axis direction side of the wafer 35.

[0111] exist Figure 4 and Figure 5 In the electrical connection portion 210 of the illustrated embodiment, the substrate 211 may not have a component that uses... Figures 1 to 3 In the described embodiment, the opening 112 of the electrical connection portion 110 and the plurality of probes 213 may not extend in the XY plane. For example... Figure 4 and Figure 5 As shown, the plurality of probes 213 can also be formed together with the substrate 211 into the shape of a pinholder and extend toward the terminals 21, 31 of each LED 20, 30 in the Z-axis direction.

[0112] in accordance with Figure 4 and Figure 5 The test apparatus 200 and 300 of the embodiments shown are used with Figures 1 to 3 The test apparatus 100 described in the embodiment has the same effect. Furthermore, the test apparatuses 200 and 300 include an electrical connection portion 210, which is configured such that a plurality of probes 213 extend in the Z-axis direction from one side of the substrate 211 without openings toward the terminals 21 and 31 of each LED 20 and 30. Therefore, compared to using… Figures 1 to 3 In the described embodiment, that is, in the case of using the electrical connection portion 110, the number of probes 213 can be increased, and the number of LEDs 20 and 30 measured simultaneously can be increased. The electrical connection portion 110 has a plurality of probes 113 extending toward the terminals 11 of the LEDs 10 exposed in the opening 112 of the substrate 111.

[0113] Furthermore, in Figure 4 and Figure 5 In the illustrated embodiment, the mounting portion 150 carrying the LED group is moved in the XY plane so that the position coordinates of the plurality of probes 113 of the electrical connection portion 110 are aligned with the position coordinates of the plurality of LEDs 10 in the LED group. Then, as shown by the hollow arrows in each figure, the substrate 211 of the electrical connection portion 210 can be raised and lowered, thereby causing the plurality of terminals 21, 31 of the plurality of LEDs 20, 30 to contact the plurality of probes 213. Furthermore, in Figure 5 In the embodiment shown, the mounting portion is preferably configured not to contact the plurality of LEDs 30, so as to avoid damaging the plurality of LEDs 30 already formed on the wafer 35.

[0114] Also, in Figure 4 and Figure 5 In the embodiments shown, it is also possible to make them respectively in Figure 4 and Figure 5 The structure shown in the figure is such that it is flipped in the Z-axis direction, so that the parallel light 122 from the light source 120 is irradiated from the negative Z-axis direction to the plurality of LEDs 20, 30.

[0115] Also, in Figure 4 and Figure 5 In the illustrated embodiment, a support plate, such as glass, can also be sandwiched between the wafers 25 and 35 and the shielding portion 160 to allow light to pass through, in order to prevent deformation of the wafers 25 and 35 caused by the pressure applied by the plurality of probes 213 of the electrical connection portion 210. Figure 4 Similarly, in the embodiment shown, when the plurality of LEDs 20 are located on the light source section 120 side, the support plate is preferably configured not to contact the plurality of LEDs 20, so as not to damage the plurality of LEDs 20 already formed on the wafer 25.

[0116] In the above-described plurality of embodiments, the light source unit 120 is described with the following structure: it has a light source 121 that emits white light, a plurality of color filters 125 with different color components, and a filter switching unit 124, which switches the color filter 125 through which parallel light 122 from the lens unit 123 enters, thereby enabling the switching of a plurality of light with different color components. Alternatively, the light source unit 120 may also have a plurality of light sources with different wavelengths, such as the full wavelength of visible light, red wavelength, green wavelength, and blue wavelength, and emit a plurality of light with different color components, such as white, red, green, and blue, by switching the plurality of light sources or by combining the plurality of light sources.

[0117] In the above plurality of embodiments, when the LED group is constructed such that a plurality of LEDs are formed on a panel (PLP) with an electrical wiring and a generally square shape, the electrical connection portion may also be constructed such that the probe contacts each wiring in the row direction and column direction disposed on two sides of the panel.

[0118] Various embodiments of the present invention can be described with reference to flowcharts and block diagrams, where blocks may represent: (1) a stage of the process being performed, or (2) a component of a device having the function of performing the operation. Specific stages and components may be constructed by dedicated circuits, programmable circuits supplied together with computer-readable instructions stored on a computer-readable medium, and / or processors supplied together with computer-readable instructions stored on a computer-readable medium. Dedicated circuits may include digital and / or analog hardware circuits, and may include integrated circuits (ICs) and / or discrete circuits. Programmable circuits may include reconfigurable hardware circuits, including: logic AND, logic OR, logic XOR, logic NAND, logic NOR, and other logic operations; and memory elements such as flip-flops, resistors, field programmable gate arrays (FPGAs), and programmable logic arrays (PLAs).

[0119] Computer-readable media may include any tangible device capable of storing instructions executable by a suitable device. As a result, a computer-readable medium having instructions stored therein comprises a product including the instructions configured to perform and execute operations specified in a flowchart or block diagram. Examples of computer-readable media include electronic memory media, magnetic memory media, optical memory media, electromagnetic memory media, and semiconductor memory media. More specific examples of computer-readable media may include: floppy disks, hard disks, random-access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), electrically erasable programmable read-only memory (EEPROM), static random-access memory (SRAM), compact disc read-only memory (CD-ROM), digital video disc (DVD), Blu-ray (RTM) disks, memory sticks, integrated circuit cards, etc.

[0120] Computer-readable instructions may contain any one of the source or object code described in any combination of one or more programming languages, including assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microinstructions, firmware instructions, status setting data, or object-oriented programming languages ​​such as Smalltalk, JAVA (registered trademark), C++, and conventional programming languages ​​such as the "C" programming language or similar programming languages.

[0121] Computer-readable instructions are provided locally or via a local area network (LAN), wide area network (WAN), or other programmable data processing device, to the processor or programmable circuitry of a general-purpose computer, a special-purpose computer, or other programmable data processing apparatus, to execute computer-readable instructions to create means for performing operations specified in a flowchart or block diagram. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, and microcontrollers.

[0122] Figure 6 An example of a computer 1200, which may be wholly or partially embodied in a plurality of embodiments of the present invention, is shown. Programs installed on the computer 1200 may cause the computer 1200 to function as an operation associated with an apparatus of an embodiment of the present invention, or to perform one or more “parts” of that apparatus, and / or to perform a process or stage of an embodiment of the present invention. These programs may be executed by the CPU 1212 to cause the computer 1200 to perform specific operations associated with some or all of the blocks in the flowcharts and block diagrams described herein.

[0123] The computer 1200 according to this embodiment includes a CPU 1212, RAM 1214, a graphics controller 1216, and a display device 1218, which are interconnected via a host controller 1210. The computer 1200 further includes a communication interface 1222, a hard disk drive 1224, a DVD-ROM drive 1226, and an input / output unit such as an IC card drive, which are connected to the host controller 1210 via an input / output controller 1220. The computer further includes conventional input / output units such as a ROM 1230 and a keyboard 1242, which are connected to the input / output controller 1220 via these input / output chips 1240.

[0124] The CPU 1212 operates according to the program stored in the ROM 1230 and RAM 1214, thereby controlling each unit. The graphics controller 1216 obtains the image data generated by the CPU 1212 from the code frame buffer provided to the RAM 1214 or from the graphics controller 1216 itself, and displays the image data on the display device 1218.

[0125] Communication interface 1222 communicates with other electronic devices via a network. Hard disk drive 1224 stores programs and data used by CPU 1212 within computer 1200. DVD-ROM drive 1226 reads programs or data from DVD-ROM 1201 and provides programs or data to hard disk drive 1224 via RAM 1214. IC card drive reads programs and data from IC card and / or writes programs and data to IC card.

[0126] ROM1230 internally stores the boot program executed by computer 1200 during startup, and / or programs related to the hardware of computer 1200. Input / output chip 1240 can then connect various input / output units to input / output controller 1220 via parallel ports, serial ports, keyboard ports, and mouse ports.

[0127] The program is provided via a computer-readable memory medium such as a DVD-ROM 1201 or an IC card. The program is read from the computer-readable memory medium, installed in an example of a hard disk drive 1224, RAM 1214, or ROM 1230, which is also a computer-readable memory medium, and executed by the CPU 1212. The information processing described within these programs is read into the computer 1200, enabling the program to cooperate with the aforementioned hardware resources of various types. The apparatus or method can be configured to perform information manipulation or processing in conjunction with the use of the computer 1200.

[0128] For example, when communication is performed between the computer 1200 and external devices, the CPU 1212 can execute a communication program loaded into the RAM 1214 and perform communication processing on the communication interface 1222 based on the processing described in the communication program. Under the control of the CPU 1212, the communication interface 1222 reads transmission data stored in the transmission buffer area provided in the RAM 1214, hard disk drive 1224, DVD-ROM 1201, or IC card-like recording medium, and sends the read transmission data to the network, or writes received data received from the network to the receive buffer area provided on the recording medium, etc.

[0129] Furthermore, the CPU 1212 can perform various types of processing on the data in the RAM 1214 to read all or a required portion of files or databases stored in external recording media such as the hard disk drive 1224, DVD-ROM drive 1226 (DVD-ROM 1201), and IC card into the RAM 1214. The CPU 1212 can then write the processed data back to the external recording media.

[0130] Various types of information, such as programs, data, tables, and databases, can be stored in the recording medium for information processing. The CPU 1212 can perform various types of processing described throughout this invention on data read from the RAM 1214, including various types of operations specified by the program's instruction sequence, information processing, conditional judgment, conditional divergence, unconditional divergence, information retrieval / replacement, etc., and write the results back to the RAM 1214. Furthermore, the CPU 1212 can retrieve information from files, databases, etc., within the recording medium. For example, when a plurality of entries, each having an attribute value of a first attribute associated with an attribute value of a second attribute, are stored in the recording medium, the CPU 1212 can retrieve from these plurality of entries an entry that matches the condition specifying the attribute value of the first attribute, and read the attribute value of the second attribute stored in that entry, thereby obtaining the attribute value of the second attribute associated with the first attribute that satisfies a predetermined condition.

[0131] The programs or software modules described above can be stored on computer 1200 or on computer-readable memory media near computer 1200. Furthermore, recording media such as hard disks or RAM provided in a server system connected to a dedicated communication network or the Internet can be used as computer-readable memory media, thereby providing the program to computer 1200 via the network.

[0132] The present invention has been described above using embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments. Those skilled in the art will understand that various modifications or improvements can be made to the above embodiments. Furthermore, to the extent that there is no technical contradiction, matters described for a particular embodiment can be applied to other embodiments. Also, each structural element may have the same features as other structural elements with the same name but different reference numerals. As will be understood from the claims, the manner in which these modifications or improvements are made may also be included within the scope of protection of the present invention.

[0133] It should be noted that the execution order of actions, sequences, steps, and stages in the apparatus, systems, programs, and methods shown in the claims, specification, and drawings can be implemented in any order, unless specifically stated as "before" or "beforehand," and unless the output of the previous process is used for the subsequent process. Even if the flow of actions in the claims, specification, and drawings is described using terms such as "firstly," "then," etc., for convenience, it does not imply that they must be performed in that specific order.

Claims

1. A testing apparatus, characterized in that, have: An electrical connection part is electrically connected to the terminals of each of the plurality of LEDs that are the test objects; The light source unit illuminates the plurality of LEDs simultaneously; The measuring unit measures photoelectric signals, which are generated by the plurality of LEDs converting light irradiated by the light source unit into photoelectric signals and outputting them through the electrical connection unit. and, The determination unit determines the quality of each of the plurality of LEDs based on the measurement results of the measurement unit. The determination unit determines at least one LED among the plurality of LEDs whose measured photoelectric signal is outside the normal range as defective; As the normal range, the following range is used, that is, the range based on statistics corresponding to the photoelectric signals output by some of the plurality of LEDs.

2. The experimental apparatus according to claim 1, characterized in that, in, The electrical connection portion is arranged such that the plurality of LEDs are located between the light source portion and the electrical connection portion, and has: Substrate; and, A plurality of probes extend from the substrate toward the plurality of LEDs and contact the terminals of each of the plurality of LEDs.

3. The experimental apparatus according to claim 1, characterized in that, The electrical connection portion is disposed between the light source portion and the plurality of LEDs, and has: A substrate having an opening that allows light from the light source to pass through a group of a plurality of LEDs, wherein the group of a plurality of LEDs is switchably exposed to the opening; and, A plurality of probes extend from the substrate toward the plurality of LEDs exposed into the opening and contact the respective terminals of the plurality of LEDs in the plurality of LEDs.

4. The experimental apparatus according to claim 3, characterized in that, It also has: A mounting section containing a group of LEDs; wherein The electrical connection portion moves via the mounting portion in a state where the LED group is mounted, and sequentially switches from the LED group mounted on the mounting portion to the group of multiple LEDs at the connection point of the test object; The measuring unit measures photoelectric signals, which originate from a group of a plurality of LEDs sequentially connected by the electrical connection unit.

5. The experimental apparatus according to claim 1, characterized in that, The light source can switch between multiple types of light with different color components, thereby adjusting the wavelength of the irradiated light to examine the emission color characteristics of each of the multiple LEDs.

6. The experimental apparatus according to claim 1, characterized in that, The light source has a plurality of light sources with different wavelengths. By switching or combining the plurality of light sources, a plurality of light with different color components are emitted. The characteristics of the emission color of each LED in the plurality of LEDs can be checked by adjusting the wavelength of the irradiated light.

7. The test apparatus according to any one of claims 1-6, characterized in that, As the normal range, the following range is used, which is the range of statistics corresponding to the photoelectric signals output by LEDs arranged in the same position among the groups of LEDs in the group of LEDs, obtained by performing multiple measurements while changing the groups of LEDs that are the test objects in sequence from the group of LEDs, as a reference.

8. The testing apparatus as described in any one of claims 1 to 5, characterized in that, The light source emits white light.

9. The test apparatus as described in claim 5, characterized in that, The light source has a plurality of color filters, and by passing light through the plurality of color filters respectively, the plurality of light is emitted respectively.

10. The testing apparatus according to any one of claims 1 to 6, characterized in that, It further includes a shielding portion that shields light other than light from the light source portion.

11. A test method, characterized in that, have: During the connection phase, the electrical connection part is electrically connected to the terminals of the plurality of LEDs that are the test objects; During the illumination phase, light is simultaneously irradiated onto the plurality of LEDs; During the measurement phase, the photoelectric signal is measured. The photoelectric signal is generated by the plurality of LEDs converting the irradiated light into photoelectric signals and outputting them through the electrical connection. and, In the determination stage, the quality of each of the plurality of LEDs is determined based on the measurement results of the measurement stage. In the determination stage, at least one LED among the plurality of LEDs whose measured photoelectric signal is outside the normal range is determined to be defective; As the normal range, the following range is used, that is, the range based on statistics corresponding to the photoelectric signals output by some of the plurality of LEDs.

12. A computer-readable medium, characterized in that, Its memory contains a program, which is executed by a test apparatus that tests a plurality of LEDs and is used to cause the test apparatus to perform the test method of claim 11.

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