A folding display device and manufacturing method

Abstract

The application discloses a folding display device and a manufacturing method. The folding display device of one embodiment comprises a glass substrate, a light-emitting display device and a cover plate which are stacked on the glass substrate. The glass substrate comprises a folding area in a display area and non-folding areas on both sides of the folding area. The folding area comprises a plurality of columnar open pattern groups which are perpendicular to the folding direction. Each open pattern group comprises a plurality of spaced open holes. The open holes of adjacent two columnar open pattern groups are staggered. Each open hole comprises a first open end face away from the light-emitting display device and a second open end face close to the light-emitting display device. The orthographic projection of the second open end face on the glass substrate falls into the orthographic projection of the first open end face on the glass substrate. Each open hole is trumpet-shaped on the side away from the light-emitting display device. The embodiment provided by the application realizes the folding performance by arranging the honeycomb-shaped open holes in the folding area of the glass substrate, and forms the folding display device with the glass as the substrate.

Description

Technical Field

[0001] This invention relates to the field of display technology, and in particular to a foldable display device and a manufacturing method. Background Technology

[0002] With the rapid development of display technology, foldable display products have gradually become a market hotspot. However, currently, foldable display products usually use flexible materials with flexible and bendable properties as the substrate of the display product, such as polyimide as a flexible substrate.

[0003] However, the fabrication process of display devices on rigid substrates such as glass for display products, and whether and how to use glass substrates to achieve folding functionality, has become a technical problem that urgently needs to be solved by technicians in the display technology field. Summary of the Invention

[0004] To address at least one of the aforementioned problems, a first embodiment of the present invention provides a foldable display device, comprising a display area and a non-display area, and including a glass substrate, a light-emitting display device stacked on the glass substrate, and a cover plate, wherein...

[0005] The glass substrate includes a folded area located in the display area and non-folded areas located on both sides of the folded area. The folded area includes multiple rows of opening pattern groups perpendicular to the folding direction. Each opening pattern group includes multiple openings spaced apart, and the openings of adjacent rows of opening pattern groups are arranged alternately.

[0006] Each opening includes a first opening end face away from the light-emitting display device and a second opening end face near the light-emitting display device. The orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate. Furthermore, each opening is horn-shaped on the side away from the light-emitting display device.

[0007] For example, in some embodiments of the folding display device provided in this application, the angle between the sidewall of the opening and the vertical line perpendicular to the glass substrate is less than or equal to 10 degrees;

[0008] The depth of the opening is greater than or equal to 75% of the thickness of the glass substrate.

[0009] For example, in some embodiments of the folding display device provided in this application, the diameter of the opening gradually increases in the direction from near to far from the light-emitting display device.

[0010] For example, in some embodiments of the folding display device provided in this application, the opening extends through the glass substrate, the glass substrate includes a glass pillar between two adjacent openings, and the glass pillar includes a first drum surface on the side away from the light-emitting display device and a second drum surface on the side close to the light-emitting display device;

[0011] In a longitudinal section perpendicular to the glass substrate, the glass pillar has a drum-shaped structure, the width of the first drum surface is smaller than the width of the second drum surface, and the width of the second drum surface is smaller than the maximum cross-sectional width of the glass pillar.

[0012] For example, in some embodiments of the folding display device provided in this application, the opening satisfies at least one of the following:

[0013] The sidewall surface of the opening is an uneven surface;

[0014] The angle between the first opening end face of the opening and the side wall of the opening is less than or equal to 90 degrees;

[0015] The edge of the first opening end face of the opening also includes a notch.

[0016] For example, in some embodiments of the folding display device provided in this application, the angle between the sidewall of the opening and the end face of the second opening is greater than or equal to 120 degrees.

[0017] In a longitudinal section perpendicular to the glass substrate, the width of the glass between two adjacent openings is greater than the width of the first opening end face of the opening.

[0018] For example, in some embodiments of the folding display device provided in this application, a filler layer is further included that covers the plurality of openings, and the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0019] For example, in some embodiments of the folding display device provided in this application, the shape of the opening is one of a circle, an ellipse, a rounded rectangle, and a dumbbell shape.

[0020] A second embodiment of the present invention provides a method for manufacturing a foldable display device, comprising:

[0021] The glass substrate of the foldable display motherboard is thinned to form a glass substrate with a preset thickness. The foldable display motherboard includes a plurality of foldable display substrates, each of which includes a light-emitting display device formed on the glass substrate.

[0022] An etching pattern is formed for etching the glass substrate, the etching pattern including: a cutting channel pattern between each folded display substrate, and an opening etching pattern in the folded area of ​​the display area of ​​each folded display substrate;

[0023] The glass substrate is etched using a pre-set etching solution, including: cutting each folded display substrate according to the cutting channel pattern; forming multiple rows of opening pattern groups perpendicular to the folding direction according to the opening etching pattern; each opening pattern group includes multiple openings spaced apart; the openings of adjacent rows of opening pattern groups are staggered; each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device; the orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate; and each opening is trumpet-shaped on the side away from the light-emitting display device.

[0024] A cover plate is formed to cover the folded display substrate.

[0025] For example, in some embodiments of the manufacturing method provided in this application, the formation of the etching pattern for etching the glass substrate further includes:

[0026] Using a laser with a preset laser energy threshold, an etching pattern with cracks of a preset depth is formed on the surface of the glass substrate on the side away from the light-emitting display device.

[0027] For example, in some embodiments of the manufacturing method provided in this application, the formation of the etching pattern for etching the glass substrate further includes:

[0028] A photoresist layer is formed on the side of the glass substrate away from the light-emitting display device, and the photoresist layer is patterned to form the etching pattern.

[0029] For example, in some embodiments of this application, the manufacturing method further includes:

[0030] A filler layer is formed to cover the plurality of openings, the orthographic projection of the filler layer on the glass substrate covering the orthographic projection of the display area on the glass substrate.

[0031] For example, in some embodiments of the present application, the thinning operation reduces the thickness of the glass substrate to greater than or equal to 0.065 mm and less than or equal to 0.5 mm.

[0032] For example, in the manufacturing method provided in some embodiments of this application, the laser energy threshold is less than or equal to 0.65W.

[0033] For example, in some embodiments of the present application, the etching solution includes HF, and at least one of HNO3 and H2SO4.

[0034] A third embodiment of the present invention provides a method for manufacturing a foldable display device, comprising:

[0035] A glass substrate is thinned to form a glass substrate with a predetermined thickness;

[0036] An etching pattern is formed on one side surface of the glass substrate at the folding area position of the display area of ​​each folded display substrate to be formed;

[0037] The glass substrate is etched with a pre-set etching solution to form multiple rows of opening patterns perpendicular to the folding direction. Each opening pattern group includes multiple openings spaced apart. The openings of adjacent rows of opening pattern groups are staggered. Each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device. The orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate. Furthermore, each opening is trumpet-shaped on the side away from the light-emitting display device.

[0038] A filler layer covering the plurality of openings is formed on both sides of the glass substrate, and the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0039] Light-emitting display devices are formed on the glass substrate to form each foldable display substrate to form the foldable display substrate;

[0040] A cover plate is formed to cover the folded display substrate.

[0041] For example, in some embodiments of the manufacturing method provided in this application, forming an etching pattern on one side surface of the glass substrate at the folding region position corresponding to the display area of ​​each folded display substrate to be formed further includes:

[0042] Using a laser with a preset laser energy threshold, an etching pattern with cracks of a preset depth is formed on one side surface of the glass substrate.

[0043] The beneficial effects of this invention are as follows:

[0044] This invention addresses the existing problems by providing a foldable display device and manufacturing method. By setting honeycomb-shaped openings in the folding area of ​​the glass substrate, the bendability is achieved, forming a foldable display device with glass as the substrate. This overcomes the problems existing in the prior art, effectively improves the manufacturing efficiency of foldable display devices, and has broad application prospects. Attached Figure Description

[0045] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0046] Figure 1 A schematic diagram of the structure of a folding display device according to an embodiment of the present invention is shown;

[0047] Figure 2 A top view of a folding display device according to an embodiment of the present invention is shown;

[0048] Figures 3a-3b A schematic diagram of a glass substrate according to an embodiment of the present invention is shown;

[0049] Figures 4a-4b This diagram illustrates the stages of glass substrate fabrication according to an embodiment of the present invention.

[0050] Figure 5 An optical microscope image of microcracks formed on a glass substrate after laser modulation according to an embodiment of the present invention is shown.

[0051] Figure 6 An optical microscope image showing an embodiment of the present invention is shown, illustrating the formation of an opening in a glass substrate by etching with a chemical solution.

[0052] Figure 7 An optical microscope image showing an opening formed by etching a glass substrate with a pharmaceutical solution according to an embodiment of the present invention is shown.

[0053] Figure 8 A partially enlarged optical microscope image showing an embodiment of the present invention of forming an opening in a glass substrate by etching with a chemical solution;

[0054] Figure 9 A schematic diagram of a glass substrate according to another embodiment of the present invention is shown;

[0055] Figures 10a-10b This diagram illustrates the stages of glass substrate fabrication according to another embodiment of the present invention;

[0056] Figure 11 An optical microscope image showing an opening formed by etching a glass substrate with a chemical solution, according to another embodiment of the present invention;

[0057] Figure 12 A partially enlarged optical microscope image showing an opening formed by etching a glass substrate with a chemical solution, according to another embodiment of the present invention;

[0058] Figure 13A partially enlarged optical microscope image showing an opening formed by etching a glass substrate with a chemical solution, according to another embodiment of the present invention;

[0059] Figure 14 A schematic diagram of a glass substrate according to another embodiment of the present invention is shown;

[0060] Figure 15 A flowchart illustrating a manufacturing method according to an embodiment of the present invention is shown;

[0061] Figure 16 A flowchart illustrating the manufacturing method according to another embodiment of the present invention is shown. Detailed Implementation

[0062] To more clearly illustrate the present invention, the following description, in conjunction with preferred embodiments and accompanying drawings, further explains the invention. Similar components in the drawings are indicated by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of the present invention.

[0063] It should be noted that the terms "on," "formed on," and "set on" used in this document can indicate that one layer is directly formed or set on another layer, or that one layer is indirectly formed or set on another layer, meaning that there are other layers between the two layers. In this document, unless otherwise stated, the term "located on the same layer" means that two layers, components, elements, or parts can be formed through the same patterning process, and that these two layers, components, elements, or parts are generally formed of the same material. In this document, unless otherwise stated, the description of "patterning process" generally includes steps such as photoresist coating, exposure, development, etching, and photoresist stripping. The description of "one-time patterning process" refers to a process that uses a single photomask to form patterned layers, components, elements, etc.

[0064] To address the above situation, the inventors, through extensive research and experimentation, proposed forming honeycomb-shaped openings in the bending region of the glass substrate. This weakens the glass strength in the bending region, enabling the glass substrate to achieve a folding radius of 1.5mm, thus achieving the folding performance of a foldable display device formed from a flexible substrate. Specifically, for example... Figure 1 and Figure 2 As shown, one embodiment of the present invention provides a foldable display device, including a display area and a non-display area, comprising a glass substrate 10, a light-emitting display device 20 stacked on the glass substrate 10, and a cover plate 30, wherein,

[0065] The glass substrate 10 includes a folded area 102 located in the display area and non-folded areas 101 located on both sides of the folded area 102. The folded area 102 includes multiple rows of open pattern groups 110 perpendicular to the folding direction. Each open pattern group 110 includes multiple openings 11 spaced apart. The openings of adjacent rows of open pattern groups 110 are staggered.

[0066] Each opening 11 includes a first opening end face 111 away from the light-emitting display device 20 and a second opening end face 112 close to the light-emitting display device 20. The orthographic projection of the second opening end face 112 on the glass substrate falls into the orthographic projection of the first opening end face 111 on the glass substrate. Furthermore, each opening 11 is horn-shaped on the side away from the light-emitting display device 20.

[0067] In this embodiment, as Figure 1 and Figure 2 As shown, the bendability of the glass substrate is achieved by setting honeycomb-shaped openings in the folding area of ​​the glass substrate. For example, setting an array of honeycomb-shaped opening areas can achieve a folding performance with a bending radius R = 1.5 mm, thereby achieving the folding performance of a folding display device formed on a flexible substrate, thus forming a folding display device with glass as the substrate.

[0068] In an optional embodiment, the angle between the sidewall of the opening and a vertical line perpendicular to the glass substrate is less than or equal to 10 degrees; the depth of the opening is greater than or equal to 75% of the thickness of the glass substrate.

[0069] In this embodiment, microcracks are first formed on the glass substrate using laser etching, for example, by using a low-energy laser to etch the glass substrate. Then, a chemical etching method is used to etch the glass substrate. Specifically, selective laser etching (SLE) with a pre-set energy is first used to modify the folded areas of the glass substrate to a certain depth, weakening the acid resistance of the folded areas and reducing the glass strength in the bending areas. Then, an acidic solution is used to etch the glass substrate along the microcracks formed by the laser etching. Because the modified glass substrate corrodes faster than the unmodified glass substrate, a glass substrate with honeycomb-like openings is formed based on the microcracks obtained by laser etching. Specifically, because lasers have linear characteristics, the microcracks formed by modulating the glass substrate with a laser in this embodiment retain the linear characteristics of the laser to a certain extent. Similarly, the etching of openings based on the microcracks with an acidic solution also retains the linear characteristics of the laser. Figure 3a and 3bAs shown, the angle θ between the sidewall of the formed opening 11 and the vertical line perpendicular to the glass substrate is less than or equal to 10 degrees. That is, after laser modulation and chemical etching, the opening 11 formed on the glass substrate is approximately perpendicular to the glass substrate at the second opening end face 112. Meanwhile, to ensure that the formed opening can meet the bending performance requirements, the opening depth is greater than or equal to 75% of the glass substrate thickness. That is, the opening is a through-hole penetrating the glass substrate or a blind hole with a certain depth, thereby achieving the bending performance of the glass substrate.

[0070] To further illustrate the foldable display device of this embodiment, the following explanation will be given using the manufacture of a foldable display device as an example:

[0071] The first step is to thin the glass substrate of the foldable display motherboard to form a glass substrate with a preset thickness. The foldable display motherboard includes a plurality of foldable display substrates, and each foldable display substrate includes a light-emitting display device formed on the glass substrate.

[0072] In this embodiment, as Figure 4a As shown, for the mother plate on which the foldable display substrate is formed on the glass substrate 10, that is, the mother plate on which the light-emitting display device 20 is formed on the glass substrate 10, the mother plate includes multiple foldable display substrates. A thinning operation is performed on the glass substrate to remove glass 104 with a certain thickness. Specifically, the thinning operation reduces the thickness of the glass substrate to greater than or equal to 0.065 mm and less than or equal to 0.5 mm.

[0073] The second step is to form an etching pattern for etching the glass substrate, the etching pattern including: a cutting channel pattern between each folded display substrate, and an opening etching pattern in the folded area of ​​the display area of ​​each folded display substrate.

[0074] In this embodiment, based on a thinned glass substrate, the glass substrate is modulated using a laser to modify the substrate at the folded region positions, such as... Figure 4b As shown, a laser is emitted from a laser source located on the side of the glass substrate away from the light-emitting display device and incident on the glass substrate 10, forming an etching pattern on the surface of the glass substrate 10 away from the light-emitting display device. The etching pattern includes a cutting channel pattern 120 between each folded display substrate and an opening etching pattern 110 located in the folded area of ​​the display area of ​​each folded display substrate.

[0075] Specifically, in this embodiment, a laser with a preset energy threshold is used to form an etching pattern with cracks of a predetermined depth on the surface of the glass substrate away from the light-emitting display device. The laser energy threshold is less than or equal to 0.65W, which enables the formation of microcracks on the glass substrate. These microcracks serve as the etching pattern for subsequent chemical etching; that is, during chemical etching, the glass substrate is etched according to the microcracks to quickly form openings, thereby achieving the foldable performance of the glass substrate. Figure 5 The image shown is an optical microscope image of microcracks formed after laser modulation of a glass substrate, including a closed pattern 110 formed by laser etching on the glass substrate using a laser with a laser energy threshold. The closed pattern 110 is an etching pattern formed by laser etching on the side of the glass substrate away from the light-emitting display device. The closed pattern includes the start point and end point 1101 of the laser etching.

[0076] It is worth noting that in this embodiment, a laser-modulated glass substrate is used, and the microcracks in the formed cutting channel pattern 120 and opening etching pattern 110 do not penetrate the glass substrate, thereby effectively protecting the light-emitting display device 20 located on the glass substrate.

[0077] The third step involves etching the glass substrate using a pre-set etching solution, including: cutting each folded display substrate according to the cutting channel pattern; forming multiple rows of opening pattern groups perpendicular to the folding direction according to the opening etching pattern; each opening pattern group includes multiple openings spaced apart; the openings of adjacent rows of opening pattern groups are staggered; each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device; the orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate; and each opening is trumpet-shaped on the side away from the light-emitting display device.

[0078] In this embodiment, after the laser-modulated glass substrate is modified, the acid resistance of the folded area of ​​the glass substrate is effectively reduced and the glass strength of the bending area is weakened. The glass substrate is then acid-etched by an acidic solution. The acidic solution etches the glass substrate along the microcracks formed by laser etching. Since the modified glass substrate has a faster corrosion rate than the unmodified glass substrate, a glass substrate with honeycomb openings is formed on the basis of the microcracks obtained by laser etching.

[0079] Specifically, the etching solution used in this embodiment includes HF, and at least one of HNO3 and H2SO4, for example, an etching solution including HF and other acids. That is, the etching solution can be HF and HNO3, HF and H2SO4, or HF, HNO3, and H2SO4. The ratio range of the etching solution is related to the thickness of the glass substrate. Those skilled in the art should select an appropriate ratio of etching solution according to actual application requirements, with the design principle of etching the glass substrate and forming foldable properties. Further details are omitted here. In this embodiment, the etching solution is used to etch the glass substrate from the side away from the light-emitting display device. Figure 3a and Figure 3b As shown, the diameter of the opening gradually increases from near to far from the light-emitting display device, and the shape of the opening is one of a circle, an ellipse, a rounded rectangle, and a dumbbell shape. Figure 3a As shown, the etching solution etches the glass substrate from the side away from the light-emitting display device, forming an opening 11 through the glass substrate, i.e., a through-hole 11. Due to the linear characteristics of laser light, the sidewall of the formed opening 11 is approximately perpendicular to the second opening end face, i.e., the angle θ between the sidewall of the opening 11 and the perpendicular line to the glass substrate is less than or equal to 10 degrees. Furthermore, because the etching solution is used to etch from one side of the glass substrate, which is the laser incident side, the diameter of the first opening end face 111 is larger than the diameter of the second opening end face 112. That is, the orthographic projection of the second opening end face onto the glass substrate falls within the orthographic projection of the first opening end face onto the glass substrate. Additionally, each opening is trumpet-shaped on the side away from the light-emitting display device, achieving the bending performance of the glass substrate. Similarly, as... Figure 3b As shown, the etching solution etches the glass substrate from the side away from the light-emitting display device to form a blind hole 11. The depth of the blind hole is greater than or equal to 75% of the thickness of the glass substrate. Due to the linear characteristics of laser light, the angle θ between the sidewall of the opening 11 and the vertical line perpendicular to the glass substrate is less than or equal to 10 degrees, that is, the sidewall of the opening 11 is approximately perpendicular to the second opening end face 112. At the same time, since the etching solution starts etching from the first opening end face 111, the angle between the first opening end face 111 and the sidewall of the opening 11 is less than or equal to 90 degrees. Furthermore, the diameter of the first opening end face 111 is larger than the diameter of the second opening end face 112, thereby achieving the bending performance of the glass substrate.

[0080] Considering the morphological characteristics formed by etching glass substrates with chemical solutions, such as Figure 6 The image shown is an optical microscope image of an opening 11 formed by etching a glass substrate with a chemical solution. The opening 11 is based on... Figure 5 The closed figure 110 shown is formed; as Figure 7The image shown is an optical microscope image of an opening 11 formed by etching a glass substrate with a chemical solution. The edge of the first opening face of the opening 11 also includes a notch 1102. Figure 5 The starting and ending points 1101 of the laser etching are formed after etching with a chemical solution. The notch can be a through-hole penetrating the glass substrate or a blind hole with a certain depth. Those skilled in the art should understand that the morphology of the notch formed by laser etching after chemical etching matches the opening depth formed by chemical etching of the glass substrate; for example... Figure 8 The image shown is a partial magnified optical microscope image of the opening 11 formed by etching a glass substrate with a chemical solution. The sidewall of the opening 11 formed by the chemical solution etching, that is, the sidewall surface at the junction with the glass substrate 10, is an uneven surface.

[0081] The fourth step is to form a cover plate that covers the folded display substrate.

[0082] In this embodiment, a cover plate is placed over a glass substrate with foldable properties and a light-emitting display device located thereon to form a foldable display device. The foldable display device of this embodiment first forms a microcrack pattern on the glass substrate using laser etching, and then uses an acidic solution to etch the glass substrate according to the etching pattern, thereby forming a honeycomb-shaped opening on the side of the glass substrate away from the light-emitting display device to achieve the foldable properties of the glass substrate, thus realizing a foldable display device with glass as the substrate.

[0083] Considering the actual usage requirements of foldable display devices, in an optional embodiment, the foldable display device further includes a filler layer forming a layer covering the plurality of openings, wherein the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0084] In this embodiment, considering the exposed honeycomb openings on the glass substrate of the foldable display device, a filler layer, such as a polyimide film layer, is covered on the first opening end face of the opening. This serves to flatten one side of the foldable display device and improves the display effect and performance of the foldable display device. The filler layer covers multiple openings in one layer, that is, the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0085] To further improve the foldability of the glass substrate, in another optional embodiment, such as Figure 9 As shown, the opening 11 extends through the glass substrate, and the glass substrate includes a glass pillar 115 between two adjacent openings 11. The glass pillar 115 includes a first drum surface 151 on the side away from the light-emitting display device and a second drum surface 152 on the side close to the light-emitting display device.

[0086] In a longitudinal section perpendicular to the glass substrate, the glass pillar 115 has a drum-shaped structure, the width L1 of the first drum surface 151 is smaller than the width L2 of the second drum surface 152, and the width L2 of the second drum surface 152 is smaller than the maximum cross-sectional width L3 of the glass pillar 115.

[0087] In this embodiment, the foldable display device uses an acidic solution to simultaneously etch both sides of a glass substrate using an acidic solution, based on the laser-modulated etching pattern forming microcracks, to form an opening 11 penetrating the glass substrate. Since the microcracks formed during laser etching do not penetrate the glass substrate, when the acidic solution is used to simultaneously etch both sides of the glass substrate, the width of the first opening end face 111 near the laser input side of the opening 11 is greater than the width of the second opening end face 112. This is described by the widths of the two drum-shaped surfaces of the glass pillar 115 formed after etching; that is, the width L1 of the first drum-shaped surface 151 is less than the width L2 of the second drum-shaped surface 152. It is also worth noting that this embodiment first uses a laser to modulate microcracks on the glass substrate, and then uses an acidic solution to simultaneously etch both sides of the glass substrate, resulting in a glass pillar with a drum-like morphology. Compared to related technologies where additional fixtures are required to form a drum-like morphology, this embodiment uses the linear characteristics of the laser combined with double-sided acid etching to form a drum-shaped glass pillar 115, which has the advantages of simple manufacturing process and reduced production costs.

[0088] To further illustrate the foldable display device of this embodiment, the following explanation will be given using the manufacture of a foldable display device as an example:

[0089] The first step is to thin the glass substrate to form a glass substrate with a preset thickness.

[0090] In this embodiment, the glass is thinned, such as... Figure 10a As shown, a glass thinning operation is performed to remove a glass layer 105 of a certain thickness to form a glass substrate 10. Specifically, the thinning operation reduces the thickness of the glass to greater than or equal to 0.065 mm and less than or equal to 0.5 mm.

[0091] The second step is to form an etching pattern on one side surface of the glass substrate corresponding to the folding area of ​​the display area of ​​each folded display substrate to be formed.

[0092] In this embodiment, based on a thinned glass substrate, the glass substrate is modulated using a laser to modify the substrate at the folded region positions, such as... Figure 10bAs shown, a laser is emitted from a laser source located on one side of the glass substrate and incident on the glass substrate 10, forming an etching pattern on the surface of the glass substrate 10. The etching pattern includes a cutting channel pattern 120 between each folded display substrate to be formed, and an opening etching pattern 110 located in the folded area of ​​the display area of ​​each folded display substrate to be formed.

[0093] The third step involves using a pre-set etching solution to etch the two sides of the glass substrate to form multiple rows of opening patterns perpendicular to the folding direction. Each opening pattern group includes multiple openings spaced apart, with the openings of adjacent rows of opening patterns arranged alternately. Each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device. The orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate. Furthermore, each opening is trumpet-shaped on the side away from the light-emitting display device.

[0094] In this embodiment, after the laser-modulated glass substrate is modified, the acid resistance of the folded area of ​​the glass substrate is effectively reduced and the glass strength of the bending area is weakened. The acid solution simultaneously etches both sides of the glass substrate. The acid solution etches the glass substrate along the microcracks formed by laser etching. Since the modified glass substrate has a faster corrosion rate than the unmodified glass substrate, a glass substrate with honeycomb openings is formed on the basis of the microcracks obtained by laser etching.

[0095] Specifically, the etching solution used in this embodiment includes HF, and at least one of HNO3 and H2SO4, for example, an etching solution including HF and other acids. That is, the etching solution can be HF and HNO3, HF and H2SO4, or HF, HNO3, and H2SO4. The ratio range of the etching solution is related to the thickness of the glass substrate. Those skilled in the art should select an appropriate ratio of etching solution according to actual application requirements, with the design principle of etching the glass substrate and forming foldable properties. Further details are omitted here. This embodiment uses the etching solution to simultaneously etch the glass substrate from both sides. Figure 9 As shown, Figure 11The image shown is an optical microscope image of an opening 11 formed by etching a glass substrate with a chemical solution. The opening 11 is a through-hole penetrating the glass substrate. The glass substrate includes a glass pillar 115 between two adjacent openings 11. The glass pillar 115 includes a first drum-shaped surface 151 away from the light-emitting display device and a second drum-shaped surface 152 closer to the light-emitting display device. In a longitudinal section perpendicular to the glass substrate, the glass pillar 115 has a drum-shaped structure. The width L1 of the first drum-shaped surface 151 is smaller than the width L2 of the second drum-shaped surface 152, and the width L2 of the second drum-shaped surface 152 is smaller than the maximum cross-sectional width L3 of the glass pillar 115. The shape of the opening can be one of a circle, an ellipse, a rounded rectangle, or a dumbbell shape. Figure 9 As shown, because the microcracks in the laser-modulated glass substrate do not penetrate the entire substrate, and due to the linear characteristics of the laser and the simultaneous etching from both sides of the glass substrate using an etching solution, the opening width of the formed opening 11 on the first opening end face 111 is greater than the opening width on the second opening end face 112. From the perspective of the formed glass pillar 115, the width L1 of the first drum surface 151 is less than the width L2 of the second drum surface 152. This means the orthographic projection of the second opening end face onto the glass substrate falls within the orthographic projection of the first opening end face onto the glass substrate. Furthermore, the angle β between the second opening end face 112 and the opening sidewall is less than 90 degrees, meaning each opening is trumpet-shaped on both the first and second opening end faces. In this embodiment, the honeycomb-shaped openings formed on the glass substrate enable the bending performance of the glass substrate.

[0096] It is worth noting that, such as Figure 12 The image shown is a partial magnified optical microscope image of the opening 11 formed by etching a glass substrate with a chemical solution. In this embodiment, the glass substrate is etched on both sides by the chemical solution, and the resulting opening sidewall, i.e. the glass surface at the junction with the glass column, is an uneven surface. Similarly, the opening formed by etching both sides of the glass substrate with the chemical solution in this embodiment also has the same morphology as that formed by etching one side of the glass substrate with the chemical solution. Those skilled in the art can refer to the foregoing embodiments, which will not be repeated here.

[0097] The fourth step is to form a filler layer covering the plurality of openings on both sides of the glass substrate, wherein the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0098] In this embodiment, considering the exposed honeycomb openings on the glass substrate of the foldable display device, a filler layer, such as a polyimide film layer, is covered on both sides of the glass substrate. This serves to flatten one side of the foldable display device and improves the display effect and performance of the foldable display device. The filler layer covers multiple openings, meaning that the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0099] The fifth step is to form the light-emitting display devices of each foldable display substrate to be formed on the glass substrate to form the foldable display substrate.

[0100] In this embodiment, a light-emitting display device is fabricated on a glass substrate with honeycomb openings as described above.

[0101] Step 6: Form a cover plate to cover the folded display substrate.

[0102] In this embodiment, a cover plate is placed over a glass substrate that has been formed to have foldable properties and a light-emitting display device located thereon, thereby forming a foldable display device.

[0103] In this embodiment, a glass pillar with a drum-shaped morphology is formed by first using a laser to modulate microcracks on a glass substrate, and then simultaneously etching both sides of the glass substrate with an acidic solution. Compared with related technologies where additional fixtures are required to form a drum-shaped morphology, this embodiment forms a drum-shaped glass pillar by superimposing the linear characteristics of the laser with the etching of the two sides with the acidic solution, which has the advantages of simple process and reduced production cost.

[0104] In an optional embodiment, the angle between the sidewall of the opening and the second opening end face is greater than or equal to 120 degrees, and in a longitudinal section perpendicular to the glass substrate, the glass width between two adjacent openings is greater than the width of the first opening end face of the opening.

[0105] In this embodiment, a photoresist is formed on a glass substrate, an etching pattern is formed on the photoresist, and then a chemical solution is used to etch the glass substrate according to the etching pattern to form a honeycomb-shaped opening.

[0106] To further illustrate the foldable display device of this embodiment, the following explanation will be given using the manufacture of a foldable display device as an example:

[0107] The first step is to thin the glass substrate of the foldable display motherboard to form a glass substrate with a preset thickness. The foldable display motherboard includes a plurality of foldable display substrates, and each foldable display substrate includes a light-emitting display device formed on the glass substrate.

[0108] In this embodiment, a motherboard for forming a foldable display substrate on a glass substrate, i.e., a motherboard for forming a light-emitting display device on a glass substrate, is used. The motherboard includes multiple foldable display substrates. A thinning operation is performed on the glass substrate to remove glass of a certain thickness. Specifically, the thinning operation reduces the thickness of the glass substrate to greater than or equal to 0.065 mm and less than or equal to 0.5 mm.

[0109] The second step is to form an etching pattern for etching the glass substrate, the etching pattern including: a cutting channel pattern between each folded display substrate, and an opening etching pattern in the folded area of ​​the display area of ​​each folded display substrate.

[0110] In this embodiment, a photoresist layer is formed on the side of the glass substrate away from the light-emitting display device. The photoresist layer is patterned to form the etching pattern, that is, an etching pattern, such as a U-shaped groove, is formed by patterning the photoresist. This application does not limit the specific content of the photoresist and patterning. Those skilled in the art should select appropriate photoresist and patterning methods according to actual application requirements, with the formation of an etching pattern as the design criterion, which will not be elaborated further here.

[0111] The third step involves etching the glass substrate using a pre-set etching solution, including: cutting each folded display substrate according to the cutting channel pattern; forming multiple rows of opening pattern groups perpendicular to the folding direction according to the opening etching pattern; each opening pattern group includes multiple openings spaced apart; the openings of adjacent rows of opening pattern groups are staggered; each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device; the orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate; and each opening is trumpet-shaped on the side away from the light-emitting display device.

[0112] In this embodiment, as Figure 13 The image shown is a partial magnified optical microscope image of an opening 11 formed by etching a glass substrate with a chemical solution. Based on the etching pattern formed by the photoresist, the opening 11 formed by acid etching of the glass substrate with an acidic chemical solution is a U-shaped groove. The angle between the sidewall of the opening and the end face of the second opening is greater than or equal to 120 degrees, that is, the angle between the sidewall and the bottom wall of the opening is greater than or equal to 120 degrees. In the longitudinal section perpendicular to the glass substrate, the glass width between two adjacent openings is greater than the width of the first end face of the opening.

[0113] Specifically, the etching solution used in this embodiment includes HF, and at least one of HNO3 and H2SO4, for example, an etching solution including HF and other acids. That is, the etching solution can be HF and HNO3, HF and H2SO4, or HF, HNO3, and H2SO4. The ratio range of the etching solution is related to the thickness of the glass substrate. Those skilled in the art should select an appropriate ratio of etching solution according to actual application requirements, with the design principle of etching the glass substrate and forming foldable properties. Further details are omitted here. In this embodiment, the etching solution is used to etch the glass substrate from the side away from the light-emitting display device. Figure 14 As shown, the diameter of the opening gradually increases from near to far from the light-emitting display device. The shape of the opening is one of a circle, an ellipse, a rounded rectangle, and a dumbbell shape. Each opening is horn-shaped on the side away from the light-emitting display device to achieve the bending performance of the glass substrate.

[0114] The fourth step is to form a cover plate that covers the folded display substrate.

[0115] In this embodiment, a cover plate is placed over a glass substrate with foldable properties and a light-emitting display device located thereon to form a foldable display device. The foldable display device of this embodiment first obtains a photoresist layer with an etched pattern through patterning, and then uses an acidic solution to etch the glass substrate according to the etched pattern, thereby forming a honeycomb-shaped opening on the side of the glass substrate away from the light-emitting display device to achieve the foldable properties of the glass substrate, thus realizing a foldable display device with glass as the substrate.

[0116] Considering the actual usage requirements of foldable display devices, in an optional embodiment, a filler layer is formed covering the plurality of openings, the orthographic projection of the filler layer on the glass substrate covering the orthographic projection of the display area on the glass substrate.

[0117] In this embodiment, considering the exposed honeycomb openings on the glass substrate of the foldable display device, a filler layer, such as a polyimide film layer, is covered on the first opening end face of the opening. This serves to flatten one side of the foldable display device and improves the display effect and performance of the foldable display device. The filler layer covers multiple openings in one layer, that is, the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0118] Based on the above-described foldable display device, one embodiment of the present invention provides a method for manufacturing the foldable display device, such as... Figure 15 As shown, it includes:

[0119] The glass substrate of the foldable display motherboard is thinned to form a glass substrate with a preset thickness. The foldable display motherboard includes a plurality of foldable display substrates, each of which includes a light-emitting display device formed on the glass substrate.

[0120] An etching pattern is formed for etching the glass substrate, the etching pattern including: a cutting channel pattern between each folded display substrate, and an opening etching pattern in the folded area of ​​the display area of ​​each folded display substrate;

[0121] The glass substrate is etched using a pre-set etching solution, including: cutting each folded display substrate according to the cutting channel pattern; forming multiple rows of opening pattern groups perpendicular to the folding direction according to the opening etching pattern; each opening pattern group includes multiple openings spaced apart; the openings of adjacent rows of opening pattern groups are staggered; each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device; the orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate; and each opening is trumpet-shaped on the side away from the light-emitting display device.

[0122] A cover plate is formed to cover the folded display substrate.

[0123] In this embodiment, the bendability of the glass substrate is achieved by setting honeycomb-shaped openings in the folding region. For example, setting an array of honeycomb-shaped openings can achieve a folding performance with a bending radius R = 1.5 mm, thus achieving the folding performance of a foldable display device formed on a flexible substrate, thereby forming a foldable display device with glass as the substrate. Specific implementation details of this embodiment are found in the foregoing embodiments and will not be repeated here.

[0124] In an optional embodiment, forming an etching pattern for etching the glass substrate further includes: forming an etching pattern with a preset depth of cracks on one side surface of the glass substrate using a laser with a preset laser energy threshold.

[0125] In this embodiment, laser modulation of the glass substrate effectively weakens the acid resistance of the folded region and reduces the glass strength of the bending region, forming microcracks with etched patterns. This facilitates subsequent acid etching of the glass substrate using an acidic solution. The acidic solution etches the glass substrate along the etched pattern formed by the laser. Because the laser-modulated glass substrate corrodes faster than the unmodified glass substrate, a glass substrate with honeycomb-like openings is formed based on the microcracks obtained by laser etching. Specific implementation details of this embodiment are found in the foregoing embodiments and will not be repeated here.

[0126] In another alternative embodiment, forming the etching pattern for etching the glass substrate further includes: forming a photoresist layer on the side of the glass substrate away from the light-emitting display device, and patterning the photoresist layer to form the etching pattern.

[0127] In this embodiment, a photoresist material layer is formed on the side of the glass substrate away from the light-emitting display device. The photoresist material layer is patterned to form the etching pattern, that is, an etching pattern such as a U-shaped groove is formed by patterning the photoresist material. Specific implementation details of this embodiment are found in the foregoing embodiments and will not be repeated here.

[0128] In an optional embodiment, the manufacturing method further includes:

[0129] A filler layer is formed to cover the plurality of openings, the orthographic projection of the filler layer on the glass substrate covering the orthographic projection of the display area on the glass substrate.

[0130] In this embodiment, considering the exposed honeycomb openings on the glass substrate of the foldable display device, a filler layer, such as a polyimide film layer, is covered on both sides of the glass substrate. This serves to flatten one side of the foldable display device and improves the display effect and performance of the foldable display device. The filler layer covers multiple openings, meaning that the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0131] Based on the above-mentioned foldable display device, such as Figure 16 As shown, another embodiment of the present invention provides a method for manufacturing a foldable display device, comprising:

[0132] A glass substrate is thinned to form a glass substrate with a predetermined thickness;

[0133] An etching pattern is formed on one side surface of the glass substrate at the folding area position of the display area of ​​each folded display substrate to be formed;

[0134] The glass substrate is etched with a pre-set etching solution to form multiple rows of opening patterns perpendicular to the folding direction. Each opening pattern group includes multiple openings spaced apart. The openings of adjacent rows of opening pattern groups are staggered. Each opening includes a first opening end face away from the light-emitting display device and a second opening end face close to the light-emitting display device. The orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate. Furthermore, each opening is trumpet-shaped on the side away from the light-emitting display device.

[0135] A filler layer covering the plurality of openings is formed on both sides of the glass substrate, and the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

[0136] Light-emitting display devices are formed on the glass substrate to form each foldable display substrate to form the foldable display substrate;

[0137] A cover plate is formed to cover the folded display substrate.

[0138] In this embodiment, the foldable display device uses an acidic solution to simultaneously etch both sides of a glass substrate using an acidic solution, based on the laser-modulated microcrack etching pattern. This forms an opening penetrating the glass substrate. Since the microcracks formed during laser etching do not penetrate the entire substrate, when the acidic solution is used to simultaneously etch both sides, the width of the first opening face near the laser input side is greater than the width of the second opening face. This is described by the widths of the two drum-shaped surfaces of the resulting glass pillar; specifically, the width of the first drum-shaped surface is less than the width of the second drum-shaped surface. It is also worth noting that this embodiment, by first using a laser to modulate the glass substrate to form microcracks and then simultaneously etching both sides with an acidic solution, creates a drum-shaped glass pillar. Compared to related technologies where additional fixtures are required to form a drum-shaped shape, this embodiment utilizes the linear characteristics of the laser combined with double-sided etching to form the drum-shaped glass pillar, resulting in a simpler manufacturing process and reduced production costs.

[0139] In an optional embodiment, forming an etching pattern on one side surface of the glass substrate at the folding area position corresponding to the display area of ​​each folded display substrate to be formed further includes: forming an etching pattern with a preset depth of cracks on one side surface of the glass substrate using a laser with a preset laser energy threshold.

[0140] In this embodiment, the laser energy threshold is less than or equal to 0.65W, which can form microcracks on the glass substrate. The formed microcracks are used as the etching pattern for subsequent chemical etching, so that the glass substrate can be etched according to the microcracks and openings can be quickly formed when using chemical etching in subsequent process steps, thereby realizing the foldable performance of the glass substrate.

[0141] This invention addresses the existing problems by providing a foldable display device and manufacturing method. By setting honeycomb-shaped openings in the folding area of ​​the glass substrate, the bendability is achieved, forming a foldable display device with glass as the substrate. This overcomes the problems existing in the prior art, effectively improves the manufacturing efficiency of foldable display devices, and has broad application prospects.

[0142] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of the present invention are still within the protection scope of the present invention.

Claims

1. A foldable display device, comprising a display area and a non-display area, characterized in that, Includes a glass substrate, a light-emitting display device stacked on the glass substrate, and a cover plate, wherein, The glass substrate includes a folded area located in the display area and non-folded areas located on both sides of the folded area. The folded area includes multiple rows of opening pattern groups perpendicular to the folding direction. Each opening pattern group includes multiple openings spaced apart, and the openings of adjacent rows of opening pattern groups are arranged alternately. Each opening includes a first opening end face away from the light-emitting display device and a second opening end face near the light-emitting display device. The orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate. Furthermore, each opening is horn-shaped on the side away from the light-emitting display device. The opening extends through the glass substrate, and the glass substrate includes a glass pillar between two adjacent openings. The glass pillar includes a first drum surface on the side away from the light-emitting display device and a second drum surface on the side closer to the light-emitting display device. In a longitudinal section perpendicular to the glass substrate, the glass pillar has a drum-shaped structure, the width of the first drum surface is smaller than the width of the second drum surface, and the width of the second drum surface is smaller than the maximum cross-sectional width of the glass pillar.

2. The folding display device according to claim 1, characterized in that, The angle between the sidewall of the opening and the vertical line perpendicular to the glass substrate is less than or equal to 10 degrees. The depth of the opening is greater than or equal to 75% of the thickness of the glass substrate.

3. The folding display device according to claim 2, characterized in that, The diameter of the opening gradually increases from near to far from the light-emitting display device.

4. The folding display device according to any one of claims 2-3, characterized in that, The opening satisfies at least one of the following: The sidewall surface of the opening is an uneven surface; The angle between the first opening end face of the opening and the side wall of the opening is less than or equal to 90 degrees; The edge of the first opening end face of the opening also includes a notch.

5. The folding display device according to claim 1, characterized in that, The angle between the sidewall of the opening and the end face of the second opening is greater than or equal to 120 degrees. In a longitudinal section perpendicular to the glass substrate, the width of the glass between two adjacent openings is greater than the width of the first opening end face of the opening.

6. The folding display device according to claim 1, characterized in that, It also includes a filler layer covering the plurality of openings, wherein the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate.

7. The folding display device according to claim 1, characterized in that, The opening can be one of the following shapes: circular, elliptical, rounded rectangle, or dumbbell.

8. A method for manufacturing a foldable display device, characterized in that, include: The glass substrate of the foldable display motherboard is thinned to form a glass substrate with a preset thickness. The foldable display motherboard includes a plurality of foldable display substrates, each of which includes a light-emitting display device formed on the glass substrate. An etching pattern is formed for etching the glass substrate, the etching pattern including: a cutting channel pattern between each folded display substrate, and an opening etching pattern in the folded area of ​​the display area of ​​each folded display substrate; The glass substrate is etched using a pre-set etching solution, including: cutting each folded display substrate according to the cutting channel pattern; forming multiple rows of opening pattern groups perpendicular to the folding direction according to the opening etching pattern; each opening pattern group includes multiple openings spaced apart; the openings of adjacent rows of opening pattern groups are staggered; each opening includes a first opening end face away from the light-emitting display device and a second opening end face near the light-emitting display device; the orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate; and each opening is trumpet-shaped on the side away from the light-emitting display device; the opening penetrates the glass substrate; the glass substrate includes a glass pillar between two adjacent openings; the glass pillar includes a first drum surface on the side away from the light-emitting display device and a second drum surface on the side near the light-emitting display device; in a longitudinal section perpendicular to the glass substrate, the glass pillar has a drum-shaped structure; the width of the first drum surface is smaller than the width of the second drum surface; and the width of the second drum surface is smaller than the maximum cross-sectional width of the glass pillar. A cover plate is formed to cover the folded display substrate.

9. The manufacturing method according to claim 8, characterized in that, The process of forming an etching pattern for etching the glass substrate further includes: Using a laser with a preset laser energy threshold, an etching pattern with cracks of a preset depth is formed on the surface of the glass substrate on the side away from the light-emitting display device. or A photoresist layer is formed on the side of the glass substrate away from the light-emitting display device, and the photoresist layer is patterned to form the etching pattern.

10. The manufacturing method according to claim 8, characterized in that, The manufacturing method further includes: A filler layer is formed to cover the plurality of openings, the orthographic projection of the filler layer on the glass substrate covering the orthographic projection of the display area on the glass substrate.

11. The manufacturing method according to claim 9, characterized in that, The thinning operation reduces the thickness of the glass substrate to a value greater than or equal to 0.065 mm and less than or equal to 0.5 mm. and / or The laser energy threshold is less than or equal to 0.65W; and / or The etching solution includes HF, and at least one of HNO3 and H2SO4.

12. A method for manufacturing a foldable display device, characterized in that, include: A glass substrate is thinned to form a glass substrate with a predetermined thickness; An etching pattern is formed on one side surface of the glass substrate at the folding area position of the display area of ​​each folded display substrate to be formed; The glass substrate is etched using a pre-set etching solution to form multiple rows of opening patterns perpendicular to the folding direction. Each opening pattern group includes multiple openings spaced apart, with the openings of adjacent rows of opening patterns staggered. Each opening includes a first opening end face away from the light-emitting display device to be formed and a second opening end face near the light-emitting display device. The orthographic projection of the second opening end face on the glass substrate falls into the orthographic projection of the first opening end face on the glass substrate. Furthermore, each opening is trumpet-shaped on the side away from the light-emitting display device. The openings penetrate the glass substrate, which includes a glass pillar between adjacent openings. The glass pillar includes a first drum-shaped surface on the side away from the light-emitting display device and a second drum-shaped surface on the side near the light-emitting display device. In a longitudinal section perpendicular to the glass substrate, the glass pillar has a drum-shaped structure, with the width of the first drum-shaped surface being smaller than the width of the second drum-shaped surface, and the width of the second drum-shaped surface being smaller than the maximum cross-sectional width of the glass pillar. A filler layer covering the plurality of openings is formed on both sides of the glass substrate, and the orthographic projection of the filler layer on the glass substrate covers the orthographic projection of the display area on the glass substrate. Light-emitting display devices are formed on the glass substrate to form each foldable display substrate to form the foldable display substrate; A cover plate is formed to cover the folded display substrate.

13. The manufacturing method according to claim 12, characterized in that, The step of forming an etching pattern on one side surface of the glass substrate corresponding to the folded area position of the display area of ​​each folded display substrate to be formed further includes: Using a laser with a preset laser energy threshold, an etching pattern with cracks of a preset depth is formed on one side surface of the glass substrate.

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