Micro material irradiation device and micro material irradiation self-feedback control method

Abstract

The invention discloses a micro material irradiation device and a micro material irradiation self-feedback control method, and mainly provides a vacuum environment, a driving assembly and a rotating shaft assembly which are matched to drive a to-be-irradiated object to move, so that rapid batch irradiation is realized, the size is small, the installation is easy, a detector is strong in detection flow, and the moving speed of the to-be-irradiated object is controlled according to the flow intensity. And self-feedback control is realized. According to the main technical scheme, the micro material irradiation device comprises a device body, the device body comprises a vacuum cavity and a beam inlet, and the vacuum cavity is used for containing an object to be irradiated; the vacuum extraction device is communicated with the vacuum cavity; the rotating shaft assembly is located in the vacuum cavity and used for being connected with an object to be irradiated, and the driving assembly is connected with the rotating shaft assembly; the detector is located in the vacuum cavity and located on one side, opposite to the beam inlet, of the to-be-irradiated object, and the detector is used for detecting the intensity of the beam. The film irradiation device is mainly used for film irradiation.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-material irradiation, and in particular to a micro-material irradiation device and a micro-material irradiation self-feedback control method. Background Art

[0002] Heavy ion microporous membrane is known as the most sophisticated microporous membrane in the world. Compared with traditional mesh filter membrane, the biggest feature of microporous membrane is its extremely small pore size. The pore size can be strictly controlled between 0.01 micron and 15 micron, and the pore size is almost uniform. Heavy ion microporous membrane has unique technical advantages and broad application prospects in sewage treatment, household water purification, biomedicine, and chemical testing.

[0003] Heavy ion microporous membranes can be punched with heavy ions provided by an accelerator. In the prior art, there is no device that can quickly produce batches of heavy ion microporous membranes, resulting in low output of heavy ion microporous membranes, and no feedback during the production process. The finished product needs to be tested after production, resulting in low production efficiency and reduced yield. Summary of the invention

[0004] In view of this, in order to solve at least one of the above technical problems, an embodiment of the present invention provides a micro-material irradiation device and a micro-material irradiation self-feedback control method.

[0005] In order to achieve the above object, the present invention mainly provides the following technical solutions:

[0006] In one aspect, the present invention provides a micro material irradiation device, comprising:

[0007] The device body includes a vacuum cavity and a beam inlet, the beam inlet is connected to the vacuum cavity, and the vacuum cavity is used to accommodate the object to be irradiated;

[0008] A vacuum extraction device, the vacuum extraction device is connected to the vacuum cavity;

[0009] A material transmission device, the material transmission device comprises a driving assembly and a rotating shaft assembly, the rotating shaft assembly is located in the vacuum chamber, the rotating shaft assembly is used to connect the object to be irradiated, and the driving assembly is connected to the rotating shaft assembly;

[0010] The beam detector assembly comprises at least one detector, which is located in the vacuum chamber and on the side of the object to be irradiated opposite to the beam inlet, and is used to detect the intensity of the beam.

[0011] Among them, the rotating shaft assembly includes at least a discharge shaft and a receiving shaft, the driving assembly includes a first driving member and a second driving member, the first driving member is connected to the discharge shaft, and the second driving member is connected to the receiving shaft, and the discharge shaft and the receiving shaft are respectively used to wind the irradiated object from both ends of the object.

[0012] Wherein, the rotating shaft assembly further includes a first end steering shaft and a second end steering shaft;

[0013] The discharge shaft and the receiving shaft are located on the side of the beam detector assembly opposite to the beam inlet. The first end steering shaft and the second end steering shaft are arranged at intervals and are located between the beam detector assembly and the beam inlet. The first end steering shaft and the second end steering shaft are used to slide or roll against the irradiated object in front of the discharge shaft and the receiving shaft.

[0014] The beam detector assembly further includes a beam isolation plate, which is located on a side of the detector opposite to the beam inlet and is used to block the beam.

[0015] Among them, the micro material irradiation device also includes:

[0016] A beam blocking device, the beam blocking device at least comprises a third driving member and a blocking body, the position of the blocking body comprises a blocking position and a yielding position, when in the blocking position, the blocking body blocks the beam inlet, when in the yielding position, the blocking body opens the beam inlet;

[0017] The third driving member is connected to the blocking body and is used for driving the blocking body to move between the blocking position and the yielding position.

[0018] Among them, the micro material irradiation device also includes

[0019] An image acquisition device is disposed toward the vacuum chamber and is at least used to acquire an image of an object to be irradiated.

[0020] The image acquisition device comprises a top image acquisition component and a side image acquisition component, and the top image acquisition component and the side image acquisition component are located on different sides of the object to be irradiated.

[0021] Among them, the micro material irradiation device also includes:

[0022] The lighting device is opposite to the vacuum cavity and is used to provide light to the vacuum cavity.

[0023] On the other hand, the present application also provides a micro-material irradiation self-feedback control method, which is implemented by using any of the micro-material irradiation devices described above, and the method includes:

[0024] Control the driving assembly to drive the object to be irradiated to move via the rotating shaft assembly;

[0025] A heavy ion beam is provided to the object to be irradiated, and a detector acquires the beam current intensity passing through the object to be irradiated;

[0026] The drive assembly is regulated according to the beam intensity to adjust the moving speed of the object to be irradiated.

[0027] Before the step of controlling the driving assembly to drive the object to be irradiated to move via the rotating shaft assembly, the method further comprises:

[0028] Simulate the irradiation process of the object to be irradiated and determine the corresponding relationship between the beam intensity and the moving speed of the object to be irradiated;

[0029] The micro material irradiation device also includes an interactive interface, and the method also includes generating a monitoring screen in real time according to the beam current intensity and the moving speed of the object to be irradiated, and displaying it through the interactive interface.

[0030] The micro-material irradiation device and the self-feedback control method of micro-material irradiation proposed in the present invention mainly provide a vacuum environment for irradiation by setting a vacuum chamber, provide a beam for the object to be irradiated through the beam inlet, and drive the object to be irradiated to move by the cooperation of the drive assembly and the shaft assembly, so as to realize rapid batch irradiation. The device is compact and can be conveniently installed on various beam terminals. A detector is used to detect the current intensity of the heavy ion beam, and then the moving speed of the object to be irradiated is controlled according to the detection result to realize self-feedback control. In addition, the control software can simulate the on-site irradiation process and irradiation status in real time, and give irradiation suggestions. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A schematic structural diagram of a micro material irradiation device provided by an embodiment of the present invention at a first viewing angle;

[0032] Figure 2 A schematic structural diagram of a micro material irradiation device provided by an embodiment of the present invention at a second viewing angle;

[0033] Figure 3 A schematic diagram of the partial structure of a micro material irradiation device provided in an embodiment of the present invention;

[0034] Figure 4 A schematic diagram of an interactive interface in a micro material irradiation device provided by an embodiment of the present invention;

[0035] Figure 5 A flow chart of a micro-material irradiation self-feedback control method provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0036] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the specific implementation method, structure, characteristics and effects of a micro-material irradiation device proposed according to the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0037] On the one hand, if Figure 1-4 As shown, an embodiment of the present invention provides a micro material irradiation device, comprising:

[0038] The device body 100 includes a vacuum cavity and a beam inlet, the beam inlet is connected to the vacuum cavity, and the vacuum cavity is used to accommodate the object 10 to be irradiated;

[0039] A vacuum extraction device 200, the vacuum extraction device 200 is connected to the vacuum chamber;

[0040] The material transmission device 300 includes a driving assembly and a rotating shaft assembly. The rotating shaft assembly is located in the vacuum chamber. The rotating shaft assembly is used to connect the object to be irradiated 10. The driving assembly is connected to the rotating shaft assembly.

[0041] The beam detector assembly 400 includes at least one detector 401 . The detector 401 is located in the vacuum chamber and on the side of the object to be irradiated 10 opposite to the beam inlet. The detector 401 is used to detect the intensity of the beam.

[0042] The device body 100 is a cavity structure, and the interior is at least used to accommodate the object to be irradiated 10 and at least part of the structure of the material transmission device 300. The device body 100 is connected to an accelerator, and the accelerator is used to generate the ion beam required for irradiation. The beam inlet can be located on the side wall of the device body 100, and the ion beam outlet of the accelerator is opposite to the beam inlet, and then the object to be irradiated 10 is irradiated through the beam inlet. The object to be irradiated 10 can be a variety of materials, and any basic material that needs to be irradiated by beam irradiation to become a finished product can be used. For example, the object to be irradiated 10 can be a base film material for the production of heavy ion microporous membranes. The device body 100 can be provided with an observation window, so that the staff can check the status of the vacuum chamber in real time, such as whether the object to be irradiated 10 is normally transmitted and the remaining amount.

[0043] The number of vacuum extraction devices 200 may be one or more. The vacuum extraction device 200 may further include a guide tube 210 and a vacuum pump 220. The vacuum pump 220 is connected to the vacuum chamber through the guide tube 210. The vacuum chamber can be evacuated by starting the vacuum pump 220, so that the irradiation process is carried out in a vacuum environment, avoiding environmental factors such as pressure and air flow factors affecting the accuracy of irradiation.

[0044] The material transmission device 300 is used to drive the object to be irradiated 10 to move, or to make different areas of the object to be irradiated 10 pass through the beam inlet in sequence to be irradiated, thereby realizing batch rapid irradiation production of the object to be irradiated 10. The material transmission device 300 can drive the object to be irradiated 10 in a variety of ways, such as using a reel to release and wind up the object to be irradiated 10. For example, the material transmission device 300 includes a driving component and a rotating shaft component, the rotating shaft component is located in the vacuum chamber, and the rotating shaft component is used to connect the object to be irradiated 10, such as for winding the object to be irradiated 10. The driving component is connected to the rotating shaft component, and is used to drive part of the structure of the rotating shaft component to rotate, and then gradually release the wound object to be irradiated 10. The material transmission device 300 will be described in conjunction with more specific embodiments hereinafter.

[0045] The detector 401 is located on the side of the object to be irradiated 10 opposite to the beam inlet, and the detection end of the detector 401 faces the beam inlet or the object to be irradiated 10. After the beam generated by the accelerator punches a hole on the object to be irradiated 10, it will pass through the object to be irradiated 10 and be received by the detector 401. The detector 401 detects the intensity of the heavy ion beam. If the intensity decreases, the speed at which the material transmission device 300 drives the object to be irradiated 10 to move can be reduced, thereby increasing the irradiation time of the current corresponding beam inlet area of ​​the object to be irradiated 10, thereby avoiding the impact on product accuracy and consistency caused by intensity fluctuations. There can be multiple detectors 401, such as four or more. The four detectors 401 can be arranged at intervals in the longitudinal direction, so that the beam intensity at different positions can be obtained, and then the beam can be monitored more comprehensively.

[0046] The micro-material irradiation device and the self-feedback control method of micro-material irradiation proposed in the present invention mainly provide a vacuum environment for irradiation by setting a vacuum chamber, provide a beam for the object to be irradiated through the beam inlet, and drive the object to be irradiated to move by the driving assembly and the rotating shaft assembly, so as to realize rapid batch irradiation. The device is compact and can be easily installed on various beam terminals. A beam detector is used to detect the current intensity of the heavy ion beam, and then the moving speed of the object to be irradiated is controlled according to the detection result to realize self-feedback control. In addition, the control software can simulate the on-site irradiation process and irradiation status in real time, and give irradiation suggestions.

[0047] In one embodiment, the rotating shaft assembly includes at least a discharge shaft 301 and a receiving shaft 302, and the driving assembly includes a first driving member 306 and a second driving member 307, the first driving member 306 is connected to the discharge shaft 301, and the second driving member 307 is connected to the receiving shaft 302, and the discharge shaft 301 and the receiving shaft 302 are respectively used to wind the object to be irradiated 10 from both ends of the object to be irradiated 10.

[0048] The discharge shaft 301 and the receiving shaft 302 are both roller-shaped and located in the vacuum chamber. The discharge shaft 301 and the receiving shaft 302 are arranged in parallel and spaced apart, and can be arranged up and down in the vertical direction. The first driving member 306 and the second driving member 307 can be motors, which can be arranged outside the vacuum chamber to avoid the heavy ion beam in the vacuum chamber from affecting the operation of the motor. The object to be irradiated 10 is a flexible film, one end of the object to be irradiated 10 is wound around the discharge shaft 301, and the other end is wound around the receiving shaft 302. The area of ​​the object to be irradiated 10 between the discharge shaft 301 and the receiving shaft 302 is located between the detector 401 and the beam inlet. During production, the unloading shaft 301 and the receiving shaft 302 rotate in the same direction, the receiving shaft 302 gradually winds the object to be irradiated 10, and the object to be irradiated 10 on the unloading shaft 301 is gradually released, so that different areas to be irradiated on the object to be irradiated 10 are opposite to the beam inlet in turn, and automatic sustainable production is achieved without manual movement and installation of the object to be irradiated 10.

[0049] In one embodiment, the beam detector assembly 400 further includes a beam isolation plate 402. The beam isolation plate 402 is located on a side of the detector 401 opposite to the beam inlet. The beam isolation plate 402 is used to block the beam.

[0050] The detector 401 can be connected to the beam isolation plate 402, which is vertically arranged and has an extended area that can be adapted to or slightly larger than the beam inlet. The beam isolation plate 402 serves to block the heavy ion beam from splashing backward after passing through the object to be irradiated 10, thereby protecting the rear components.

[0051] In one embodiment, if Figure 3 As shown, the rotating shaft assembly also includes a first end steering shaft 303 and a second end steering shaft 304. The unloading shaft 301 and the receiving shaft 302 are located on the side of the beam detector assembly 400 opposite to the beam inlet, the first end steering shaft 303 and the second end steering shaft 304 are arranged at intervals and located between the beam detector assembly 400 and the beam inlet, and the first end steering shaft 303 and the second end steering shaft 304 are used to slide or roll against the irradiated object 10 before the unloading shaft 301 and the receiving shaft 302.

[0052] The discharge shaft 301 and the receiving shaft 302 are located on the side of the beam detector assembly 400 opposite to the beam inlet, so that on the one hand, the components in the vacuum chamber are compactly distributed and the space of the vacuum chamber is reasonably utilized; on the other hand, the beam isolation plate 402 blocks the beam from hitting the residual irradiated object 10 on the discharge shaft 301 and the receiving shaft 302, so as to prevent the irradiated object 10 from being irradiated in advance or again. The first end steering shaft 303 and the second end steering shaft 304 are used to allow a part of the irradiated object 10 to pass between the beam detector assembly 400 and the beam inlet.

[0053] In some embodiments, the rotating shaft assembly further includes a plurality of intermediate steering shafts 305, such as two intermediate steering shafts 305 are arranged between the first end steering shaft 303 and the material discharging shaft 301, and two intermediate steering shafts 305 are arranged between the second end steering shaft 304 and the material receiving shaft 302, which play a role in supporting and guiding the object to be irradiated 10, so that the object to be irradiated 10 can be extended relatively smoothly from the material discharging shaft 301 to the material receiving shaft 302. The first end steering shaft 303, the second end steering shaft 304 and the intermediate steering shaft 305 can all be polished rods, or rollers or wheels.

[0054] In one embodiment, the micro-material irradiation device further includes a beam blocking device 500, which includes at least a third driving member and a blocking body, wherein the position of the blocking body includes a blocking position and a yielding position, wherein the blocking body blocks the beam inlet when in the blocking position, and opens the beam inlet when in the yielding position. The third driving member is connected to the blocking body, and is used to drive the blocking body to move between the blocking position and the yielding position.

[0055] The third driving member may be a driving motor, the blocking body may be a plate-shaped structure, the blocking body and the device body 100 may be slidably connected, the driving motor and the blocking body may be connected through a gear and rack transmission, and then the blocking body is driven to slide linearly relative to the device body 100 and move between the blocking position and the yielding position. During production, the blocking body opens the beam inlet, and then the beam can irradiate the object to be irradiated 10 through the beam inlet. When changing materials or in an emergency, the blocking body blocks the beam inlet, temporarily blocks the beam, and then prevents the beam from leaking.

[0056] In one embodiment, the micro material irradiation device further includes: an image acquisition device 600 , the image acquisition device 600 faces the vacuum chamber, and the image acquisition device 600 is at least used to acquire an image of the object 10 to be irradiated.

[0057] The image acquisition device 600 can be a camera, which can acquire videos or photos. The image acquisition device 600 is used to monitor the motion state of the object to be irradiated 10 during irradiation. According to the monitored data, the motion state of the object to be irradiated 10 is determined by an image recognition method. When the object to be irradiated 10 moves abnormally, it can be automatically identified and a prompt message can be issued, such as timely shutdown processing. For example, an alarm can be issued when the unwinding shaft 301 and the receiving shaft 302 are not synchronized, causing the object to be irradiated 10 to sag loosely, or when the object to be irradiated 10 is entangled between the unwinding shaft 301 and the receiving shaft 302, or when the object to be irradiated 10 is broken in the middle. In addition, combined with the image analysis of the image acquisition device 600, the actual moving speed of the object to be irradiated 10 can also be further determined, such as setting detection marks on the object to be irradiated 10 at a preset distance, and the actual speed of the object to be irradiated 10 can be obtained by acquiring the detection marks by the image acquisition device 600.

[0058] In one embodiment, the image acquisition device 600 includes a top image acquisition component 601 and a side image acquisition component 602 , and the top image acquisition component 601 and the side image acquisition component 602 are located on different sides of the object 10 to be irradiated.

[0059] The top image acquisition component 601 and the side image acquisition component 602 can be the same camera or different cameras, such as one can record video and the other can be used to obtain photos. The top image acquisition component 601 and the side image acquisition component 602 are located on different sides of the object to be irradiated 10 to achieve image acquisition of the object to be irradiated 10 at different positions, which can increase the accuracy of determining abnormal movement of the object to be irradiated 10.

[0060] In one embodiment, the micro material irradiation device further includes: an illumination device 700, which is opposite to the vacuum cavity and is used to provide light to the vacuum cavity.

[0061] The lighting device 700 may be an LED lamp, which is used for lighting during material change.

[0062] The micro material irradiation device also includes a control box 800, in which are placed related control modules and devices for controlling the transmission of the object to be irradiated 10. As in the above-mentioned embodiment, the material transmission device 300, the detector 401 of the beam detector assembly 400, the beam blocking device 500, the image acquisition device 600 and the lighting device 700 are all electrically connected to the controller in the control box 800. A human-computer interaction screen can also be provided on the control box 800 to display the implementation and operation data of the micro material irradiation device and to issue commands, such as stopping the micro material irradiation device, turning on the lighting device 700, etc.

[0063] On the other hand, Figure 5As shown, the present application also provides a micro-material irradiation self-feedback control method, which is implemented by using any of the micro-material irradiation devices described above, and the method includes:

[0064] S1. Control the driving assembly to drive the object to be irradiated 10 to move via the rotating shaft assembly.

[0065] Before step S1, the irradiation process of the object to be irradiated is simulated to determine the corresponding relationship between the beam current intensity and the moving speed of the object to be irradiated 10. According to the density of holes in the object to be irradiated 10 that need to be punched in theory and the current intensity generated by the accelerator, the moving speed of the object to be irradiated 10 corresponding to different current intensities is calculated. For example, a current intensity of 1uA corresponds to a speed of 10m / min.

[0066] Before step S1, the device is also powered on, the beam blocking device 500 is moved to the yield position, the vacuum extraction device 200 evacuates the vacuum chamber, and then the first driving member 306 and the second driving member 307 respectively drive the discharge shaft 301 and the receiving shaft 302 to rotate, thereby making different areas of the object 10 to be irradiated face the beam inlet in turn.

[0067] S2. A heavy ion beam is provided to the object to be irradiated, and the detector 401 acquires the beam current intensity passing through the object to be irradiated 10 .

[0068] The accelerator generates a heavy ion beam, and different regions of the object to be irradiated 10 are irradiated in sequence. The detector 401 acquires the flux passing through the object to be irradiated 10 in real time, and then sends it to the controller.

[0069] S3. Regulating the driving assembly according to the beam current intensity to adjust the moving speed of the object 10 to be irradiated.

[0070] When the beam current intensity corresponds to the moving speed of the object to be irradiated 10, the object to be irradiated 10 continues to be driven to move at the current speed. When the beam current intensity does not correspond to the moving speed of the object to be irradiated 10, the speed corresponding to the beam current intensity is adjusted to drive the object to be irradiated 10 to move. The movement of the object to be irradiated 10 is adjusted by the first driving member 306 and the second driving member 307. The moving speed of the object to be irradiated 10 can be converted into the rotation speed of the first driving member 306 and the second driving member 307 for corresponding adjustment.

[0071] In some embodiments, the micro-material irradiation device further includes an interactive interface, such as a touch screen, and the method further includes:

[0072] The monitoring screen is generated in real time according to the beam intensity and the moving speed of the object to be irradiated, and displayed through the interactive interface. Figure 4The figure shows a display image of the interactive interface, wherein the display image simulates the shapes and positional relationships of the various components in the vacuum chamber, and a speed display box 01 is set on the interface to display the real-time speed of the object to be irradiated 10, a flux display box 02 is set on the interface to display the beam flux obtained by the detector 401, and a progress display box 03 is set on the interface to display the length of the object to be irradiated 10 that has been irradiated.

[0073] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A micro material irradiation device, characterized in that: include: A device body, the device body comprising a vacuum cavity and a beam inlet, the beam inlet being connected to the vacuum cavity, and the vacuum cavity being used to accommodate an object to be irradiated; A vacuum extraction device, the vacuum extraction device being in communication with the vacuum chamber; A material transmission device, the material transmission device comprises a driving assembly and a rotating shaft assembly, the rotating shaft assembly is located in the vacuum chamber, the rotating shaft assembly is used to connect the object to be irradiated, and the driving assembly is connected to the rotating shaft assembly; A beam detector assembly, the beam detector assembly comprises at least one detector, the detector is located in the vacuum chamber and on the side of the object to be irradiated opposite to the beam inlet, and the detector is used to detect the intensity of the beam.

2. The micro material irradiation device according to claim 1, characterized in that: The rotating shaft assembly at least includes a discharge shaft and a receiving shaft, and the driving assembly includes a first driving member and a second driving member, the first driving member is connected to the discharge shaft, and the second driving member is connected to the receiving shaft, and the discharge shaft and the receiving shaft are respectively used to wind the object to be irradiated from both ends of the object to be irradiated.

3. The micro material irradiation device according to claim 2, characterized in that: The shaft assembly also includes a first end steering shaft and a second end steering shaft; The unloading shaft and the collecting shaft are located on the side of the beam detector assembly opposite to the beam inlet, the first end steering shaft and the second end steering shaft are arranged at intervals and are located between the beam detector assembly and the beam inlet, and the first end steering shaft and the second end steering shaft are used to slide or roll against the object to be irradiated in front of the unloading shaft and the collecting shaft.

4. The micro material irradiation device according to claim 1, characterized in that: The beam detector assembly further comprises a beam isolation plate, which is located on a side of the detector opposite to the beam inlet and is used to block the beam.

5. The micro material irradiation device according to claim 1, characterized in that: The micro material irradiation device also includes: A beam blocking device, the beam blocking device at least comprising a third driving member and a blocking body, the position of the blocking body comprising a blocking position and a yielding position, in the blocking position, the blocking body blocks the beam inlet, in the yielding position, the blocking body opens the beam inlet; The third driving member is connected to the blocking body and is used to drive the blocking body to move between the blocking position and the yielding position.

6. The micro material irradiation device according to claim 1, characterized in that: The micro material irradiation device also includes The image acquisition device is directed toward the vacuum chamber and is at least used to acquire an image of the object to be irradiated.

7. The micro material irradiation device according to claim 1, characterized in that: The image acquisition device comprises a top image acquisition component and a side image acquisition component, and the top image acquisition component and the side image acquisition component are located on different sides of the object to be irradiated.

8. The micro material irradiation device according to claim 1, characterized in that: The micro material irradiation device also includes: An illumination device is opposite to the vacuum cavity and is used to provide light to the vacuum cavity.

9. A micro-material irradiation self-feedback control method, characterized in that: The method is implemented by using the micro-material irradiation device described in any one of claims 1 to 8, and comprises: Control the driving assembly to drive the object to be irradiated to move via the rotating shaft assembly; Providing a heavy ion beam to the object to be irradiated, and a detector acquiring a flow intensity of the beam passing through the object to be irradiated; The driving assembly is adjusted according to the flow intensity to adjust the moving speed of the object to be irradiated.

10. The micro-material irradiation self-feedback control method according to claim 9, characterized in that: Before the step of controlling the driving assembly to drive the object to be irradiated to move via the rotating shaft assembly, the method further includes: Simulating the irradiation process of the object to be irradiated, and determining the corresponding relationship between the beam current intensity and the moving speed of the object to be irradiated; The micro material irradiation device also includes an interactive interface. The method also includes generating a monitoring screen in real time according to the beam current intensity and the moving speed of the object to be irradiated, and displaying it through the interactive interface.

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