Bent discharge capillary tube and clamping device thereof

Abstract

The invention provides a bent discharge capillary tube and a clamping device thereof, the bent discharge capillary tube comprises an upper piece and a lower piece, the upper piece is provided with a first groove and two first air inlet grooves, the first groove is arranged along the length direction of the upper piece, and the first air inlet grooves intersect and are communicated with the first groove; a second groove and a second air inlet groove are formed in the positions, corresponding to the upper piece, of the lower piece; the first air inlet groove and the second air inlet groove are combined to form a capillary air inlet, the first groove and the second groove are combined to form a bent capillary channel, the cross section of the bent capillary channel is circular, and the curvature of the bent capillary channel gradually changes in the longitudinal direction. According to the invention, the bent capillary can be generated and the bent discharge capillary can be tightly clamped, so that the device has important application value in discharge plasma application, especially in laser wake field electron acceleration and relativistic light guidance experiments based on the high-voltage discharge bent capillary; and meanwhile, the method has potential important application value in the physics fields such as particle beam focusing and laser wake field-based synchronous radiation sources.

Description

Technical Field

[0001] The invention relates to the technical field of discharge plasma physics, and in particular to a bent discharge capillary and a clamping device thereof. Technical Background

[0002] With the rapid development of laser wakefield acceleration to produce high-energy electron beams and the field of laser-plasma interaction derived from the development of laser technology, the plasma channel generated in the capillary plays an important role in guiding the laser pulse, and its stability has become a key influencing factor in relativistic laser guidance, electron acceleration synchrotron radiation sources of laser wakefields, and electron cascade acceleration experiments.

[0003] After searching, the Chinese invention patent with application publication number CN106163075A discloses a clamping device for an inflatable discharge capillary, including a support base, a support frame, a copper electrode, a clamping sleeve, a sealing ring, an extrusion sleeve, a sealing sleeve, a threaded steel sleeve, wires, rubber pads, and screws. The invention is characterized by simple and compact structure, convenient operation, good clamping stability, stable inflated discharge, multiple uses and convenient replacement of capillaries, and good sealing. The device is mainly for straight capillaries and cannot achieve the clamping of curved discharge capillaries.

[0004] At present, there is no reliable curved discharge capillary and clamping device, so the existing research work on the curvature gradient curved plasma channel wake field cascade acceleration of electrons remains at the theoretical research stage. In order to realize the curvature gradient curved plasma channel light guidance technology, and then realize the experimental research of laser wake field cascade acceleration of electrons based on curved discharge capillary light guidance, it is necessary to propose a curved discharge capillary and a clamping device. Summary of the invention

[0005] In view of the defects in the prior art, the purpose of the present invention is to provide a curved discharge capillary and a clamping device thereof, which can realize the curved plasma channel light guiding technology based on gradual curvature change, and further realize the experimental research on laser wake field cascade acceleration of electrons based on curved discharge capillary light guidance.

[0006] According to one aspect of the present invention, there is provided a curved discharge capillary, comprising an upper sheet and a lower sheet, wherein the upper sheet is provided with a first groove and two first air inlet grooves, wherein the first groove is arranged along the length direction of the upper sheet, the two first air inlet grooves are respectively located at two ends of the upper sheet, and the first air inlet groove intersects and interpenetrates with the first groove; and the lower sheet is provided with a second groove and a second air inlet groove at a position corresponding to the upper sheet;

[0007] After the upper piece and the lower piece are assembled, the first air inlet groove and the second air inlet groove are combined to form a capillary air inlet, and the first groove and the second groove are combined to form a curved capillary channel, the cross-section of the curved capillary channel is circular, and the curvature of the curved capillary channel changes gradually in the longitudinal direction.

[0008] Furthermore, the curved discharge capillary is obtained by etching a sapphire substrate using a femtosecond laser precision processing technique.

[0009] According to another aspect of the present invention, there is provided a clamping device for a curved discharge capillary, the device being used to clamp the curved discharge capillary, the device comprising:

[0010] A bracket base is fixed on the translation table;

[0011] A capillary support, fixed on the support base;

[0012] A capillary positioning groove is provided in the middle of the upper surface of the capillary support and is used to fix the bent discharge capillary on the capillary support;

[0013] Four gas-filling channel positioning grooves are provided on the upper surface of the capillary support, and the gas-filling channel positioning grooves are respectively located on both sides of the end of the capillary positioning groove;

[0014] Four inflation channels, respectively assembled in the inflation channel positioning grooves;

[0015] Copper electrodes are mounted on the sides of the capillary support at both ends of the curved discharge capillary;

[0016] An air filling channel cover plate, which is arranged on the surface of the air filling channel;

[0017] A copper electrode cover plate, covering the surface of the copper electrode;

[0018] The capillary cover plate covers the curved discharge capillary and presses the curved discharge capillary tightly.

[0019] Optionally, four countersunk holes arranged in a rectangular shape are provided in the middle portion of the support base, and the device is fixed on the translation stage through the countersunk holes.

[0020] Optionally, capillary support positioning holes are provided at four corners of the upper surface of the support base, and the capillary support is provided with a positioning through hole, and a fastener passes through the positioning through hole and the capillary support positioning hole to fix the capillary support on the support base;

[0021] The capillary support upper surface is provided with capillary cover plate positioning grooves located on both sides of the capillary positioning groove, and the capillary cover plate is fixed in the capillary cover plate positioning grooves;

[0022] On the side surfaces of the capillary support at both sides of the curved discharge capillary, there are provided first positioning holes of the gas filling channel cover plate for fixing the gas filling channel cover plate;

[0023] Copper electrode cover plate first positioning holes for fixing the copper electrode cover plate are provided on the side surfaces of the capillary support at both ends of the curved discharge capillary.

[0024] Optionally, the inflation channel comprises:

[0025] A cylindrical end portion, provided at one end of the inflation passage, serving as an air inlet;

[0026] A rectangular end portion is provided at the other end of the inflation channel, the center of the rectangular end portion is provided with an inflation port of the inflation channel as a capillary inflation hole, and the rectangular end portion is fixed in the positioning groove of the inflation channel;

[0027] The cylindrical end and the rectangular end are hollow structures that penetrate and are concentric.

[0028] Optionally, the inflation channel cover plate includes two surfaces perpendicular to each other, one of which blocks the inflation channel, and the other surface is provided with a second positioning hole of the inflation channel cover plate, and a fastener passes through the second positioning hole of the inflation channel cover plate and the first positioning hole of the inflation channel cover plate to fix the inflation channel cover plate to the capillary bracket; the upper end of the other surface of the inflation channel cover plate is provided with a supporting groove matching the cylindrical end.

[0029] Optionally, the copper electrode is L-shaped, and the upper end of the copper electrode is provided with a first through hole concentrically assembled with the port of the bent discharge capillary, and the first through hole serves as a discharge hole to ionize the gas in the bent discharge capillary; the lower end of the copper electrode is provided with a second through hole at the end, and the second through hole is used to connect to an external high voltage source.

[0030] Optionally, an L-shaped groove matching the shape of the copper electrode is provided on the inner side of the copper electrode cover plate, and a second copper electrode cover plate positioning hole is provided on the copper electrode cover plate. After the discharge hole of the copper electrode is concentrically assembled with the port of the bent discharge capillary, a fastener passes through the second positioning hole of the copper electrode cover plate and the first positioning hole of the copper electrode cover plate to fix the copper electrode on the capillary bracket.

[0031] Optionally, the capillary cover plate has a first protrusion and a second protrusion at both ends thereof that match the shape of the capillary cover plate positioning groove, and the first protrusion and the second protrusion are respectively provided with capillary cover plate positioning holes, and fasteners pass through the capillary cover plate positioning holes to fix the capillary cover plate in the capillary cover plate positioning groove and press the curved discharge capillary.

[0032] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0033] 1. The present invention forms a capillary air inlet and a curved capillary channel by assembling the upper and lower pieces of the capillary. The capillary air inlet adopts a design of two-side filling, so that the longitudinal gas density distribution in the capillary is more uniform. By utilizing the curved capillary channel, the curved capillary can generate a curved plasma channel by high-voltage ionization of the internal gas, which can guide high-intensity pulsed lasers and accelerate electrons to higher energy.

[0034] 2. The curved discharge capillary clamping device provided by the present invention can achieve effective fixation of the gas filling channel, copper electrode, curved discharge capillary, etc. through the mutual cooperation of accessories such as the gas filling channel cover plate, copper electrode cover plate and capillary cover plate, thereby achieving tight clamping of the curved discharge capillary.

[0035] 3. The clamping device for the curved discharge capillary provided by the present invention has a capillary positioning groove in the middle of the capillary bracket for assembling the capillary, and four inflation channel positioning grooves are etched on both sides for assembling the inflation channel. The capillary bracket is used in combination with other components to realize the inflation and discharge of the curved discharge capillary.

[0036] 4. The gas-filling channel, gas-filling channel cover plate and capillary support provided by the present invention are closely matched, and the gas can be stably filled into the capillary, and the gas-filling position can ensure a relatively stable fluid state in the curved capillary. The present invention has important application value in discharge plasma applications, especially in laser wakefield electron acceleration and relativistic light guidance experiments based on high-voltage discharge curved capillaries. In addition, the present invention also has potential important application value in physics fields such as particle beam focusing and synchrotron radiation sources based on laser wakefields. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Other advantages and features of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0038] Figure 1 It is a schematic structural diagram of a bent discharge capillary before assembly in one embodiment of the present invention;

[0039] Figure 2 1 is a diagram showing the gas density distribution in a curved discharge capillary according to an embodiment of the present invention, wherein: (a) represents a single-side gas filling mode, and (b) represents a double-side gas filling mode;

[0040] Figure 3 1 is a longitudinal plasma density distribution in a curved discharge capillary according to an embodiment of the present invention, wherein: (a) represents a single-side filling mode, and (b) represents a double-side filling mode;

[0041] Figure 4 It is a structural schematic diagram of a clamping device for a bent discharge capillary in one embodiment of the present invention;

[0042] Figure 5 It is a structural schematic diagram of a support base in one embodiment of the present invention;

[0043] Figure 6 It is a schematic structural diagram of a capillary support in one embodiment of the present invention;

[0044] Figure 7 It is a structural schematic diagram of a capillary cover plate in one embodiment of the present invention;

[0045] Figure 8 It is a structural schematic diagram of an inflation channel in one embodiment of the present invention;

[0046] Fig. 9 This is a schematic structural diagram of an air filling channel cover plate in one embodiment of the present invention;

[0047] Fig.10 This is a schematic diagram of the structure of a copper electrode in one embodiment of the present invention;

[0048] Fig.11 Schematic diagram of the structure of a copper electrode cover plate in one embodiment of the present invention.

[0049] The reference numerals in the figure correspond to: 1-support base, 2-capillary support, 3-bent discharge capillary, 4-filling channel, 5-copper electrode, 6-filling channel cover, 7-copper electrode cover, 8-capillary cover, 11-counterbore, 12-capillary support positioning hole, 21-positioning through hole, 22-capillary cover positioning groove, 23-filling channel positioning groove, 24-capillary positioning groove, 25-filling channel cover first positioning hole, 26-copper The first positioning hole of the electrode cover plate, 31-capillary air inlet, 32-curved capillary channel, 41-cylindrical end, 42-rectangular end, 43-inflating channel inflating port, 51-support groove, 52-inflating channel cover plate second positioning hole, 61-first through hole, 62-second through hole, 71-copper electrode positioning groove, 72-copper electrode cover plate second positioning hole, 81-capillary cover plate positioning hole, 82-first protrusion, 83-second protrusion. DETAILED DESCRIPTION

[0050] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several variations and improvements may be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0051] It should be noted that the terms "first", "second", etc. are used only for descriptive purposes and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. Moreover, the terms "first", "second", etc. are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein. In addition, in this article, the directional words such as front, back, upper, and lower involved are defined by the positions of the parts in the drawings and the parts relative to each other, just for the clarity and convenience of expressing the technical solution. It should be understood that the use of the directional words should not limit the scope of protection requested in this application.

[0052] Reference Figure 1 An embodiment of the present invention provides a curved discharge capillary, which includes an upper sheet and a lower sheet. The upper sheet is provided with a first groove and two first air inlet grooves. The first groove is arranged along the length direction of the upper sheet. The two first air inlet grooves are respectively located at two ends of the upper sheet. The first air inlet groove intersects and penetrates the first groove. The lower sheet is provided with a second groove and a second air inlet groove at a position corresponding to the upper sheet. After the upper sheet and the lower sheet are assembled, the first air inlet groove and the second air inlet groove are combined to form a capillary air inlet 31, and the first groove and the second groove are combined to form a curved capillary channel 32. The cross section of the curved capillary channel 32 is circular, and the curvature of the curved capillary channel 32 changes gradually in the longitudinal direction.

[0053] In the embodiment of the present invention, a femtosecond laser precision processing technology is used to etch a sapphire substrate to obtain a curved discharge capillary. Sapphire material is resistant to ablation and has good optical properties. When a low-density gas is injected into the interior of the capillary through the inflation channel, the gas in the capillary is ionized by high voltage. Under the action of the ohmic heating effect, a radially gradually decreasing electron density distribution is formed in the capillary in the transverse direction, and a curved plasma channel is formed in the longitudinal direction. Since the plasma itself is already in a highly ionized state, compared with traditional optical focusing elements, this plasma channel can keep the high-intensity laser in a focused state over a longer distance, and can also achieve biased transmission of high-intensity lasers. Figure 2 (a) and (b) simulate the gas density distribution along the long side of the capillary tube under the two-sided inflation method and the two-sided inflation method, respectively. In the figure, y represents the distance from the short side of the capillary tube to the center of the capillary tube, and the different color curves represent the gas density distribution along the long side of the capillary tube at different transverse positions of the capillary tube. Comparing the two sets of results, it can be seen that under the two-sided inflation method, the gas density distribution in the capillary tube has no obvious jump phenomenon, and the gas density distribution is more stable. Figure 3The plasma density distribution after high-voltage ionization of the gas inside the capillary under two inflation methods is given. From the results, it can be seen that when the inflation back pressure is low, the longitudinal gas density distribution in the capillary is more uniform under the inflation method of two-side inflation. Therefore, the curved discharge capillary inflation port adopts a two-side inflation design that has a better inflation effect than single-side inflation.

[0054] Reference Figure 4 An embodiment of the present invention provides a clamping device for a curved discharge capillary, which is used to clamp the above-mentioned curved discharge capillary. The device includes a bracket base 1, a capillary bracket 2, an air filling channel 4, a copper electrode 5, an air filling channel cover 6, a copper electrode cover 7 and a capillary cover 8, wherein: the bracket base 1 is fixed on a translation stage; the capillary bracket 2 is used as a basic bracket for installing the curved discharge capillary, the capillary bracket 2 is fixed on the bracket base 1, and the capillary positioning groove 24 is provided in the middle of the upper surface of the capillary bracket 2, which is used to fix the curved discharge capillary 3 with a gradually changing curvature on the capillary bracket 2; four air filling channel positioning grooves 24 are provided on the capillary bracket 2; The positioning grooves 23 are arranged on the upper surface of the capillary support 2, and the gas filling channel positioning grooves 23 are respectively located on both sides of the end of the capillary positioning groove 24; the four gas filling channels 4 are respectively assembled in the gas filling channel positioning grooves 23; the copper electrodes 5 are assembled on the side surfaces of the capillary support 2 at both ends of the curved discharge capillary 3; the gas filling channel cover plate 6 is covered on the surface of the gas filling channel 4; the copper electrode cover plate 7 is covered on the surface of the copper electrode 5, and the copper electrode 5 is assembled on the inner side of the copper electrode cover plate 7. After the copper electrode 5 is connected to the high-voltage power supply, it is used to ionize the gas in the curved discharge capillary 3; the capillary cover plate 8 covers the top of the curved discharge capillary 3 and presses the curved discharge capillary 3 tightly.

[0055] Through the cooperation of the gas filling channel cover plate 6, the copper electrode cover plate 7 and the capillary cover plate 8, the gas filling channel 4, the copper electrode 5, the curved discharge capillary 3 and the like can be effectively fixed, and the curved discharge capillary 3 can be tightly clamped.

[0056] To fix the device to the translation stage, in some embodiments, reference Figure 5 The middle part of the support base 1 is provided with four rectangularly arranged countersunk holes 11, and the device is fixed on the translation stage through the countersunk holes 11. The support base 1 can be made of organic glass material, which can effectively prevent leakage to the translation stage, and can also be used in a relatively high vacuum environment. The height of the support base 1 is set to match the height of the bent discharge capillary 3 with the height of the high-intensity laser in the experiment. For example, the height of the support base 1 is 15 mm.

[0057] In some embodiments, capillary support positioning holes 12 are provided at four corners of the upper surface of the support base 1, and a positioning through hole 21 is provided on the capillary support 2. The fastener passes through the positioning through hole 21 and the capillary support positioning hole 12 to fix the capillary support 2 on the support base 1. Exemplarily, the capillary support positioning hole 12 is a threaded hole located outside the counterbore 11, and the capillary support 2 is stably fixed to the support base 1 at the threaded hole.

[0058] The main function of the capillary cover plate 8 is to cooperate with the capillary support 2 to fix the bent capillary from the upper and lower directions. Figure 6 The capillary support 2 has capillary cover plate positioning grooves 22 on the upper surface thereof, which are located on both sides of the capillary positioning groove 24. The capillary cover plate 8 is fixed in the capillary cover plate positioning grooves 22. Figure 7 The capillary cover plate 8 is provided with a first protrusion 82 and a second protrusion 83 at both ends, and the first protrusion 82 and the second protrusion 83 match the shape of the capillary cover plate positioning groove 22 on the upper surface of the capillary support 2. The first protrusion 82 and the second protrusion 83 are respectively provided with a capillary cover plate positioning hole 81. The fastener passes through the capillary cover plate positioning hole 81 to fix the capillary cover plate 8 in the capillary cover plate positioning groove 22 and compress the bent discharge capillary 3. Specifically, under the action of the fastener, it cooperates with the positioning threaded hole on the capillary support 2 and the capillary cover plate positioning groove 22 to compress the bent discharge capillary 3 from above to prevent the capillary from leaking.

[0059] In some embodiments, the capillary support sides of the curved discharge capillary 3 are provided with first positioning holes 25 for fixing the gas filling channel cover plate 6. Figure 8 The gas-filling channel 4 includes a cylindrical end 41 and a rectangular end 42. The cylindrical end 41 is arranged at one end of the gas-filling channel 4 as an air inlet hole; the rectangular end 42 is arranged at the other end of the gas-filling channel 4. The rectangular end 42 has a gas-filling channel air-filling port 43 in the center as a capillary air-filling hole. The rectangular end 42 is fixed in the gas-filling channel positioning groove 23. The cylindrical end 41 and the rectangular end 42 are hollow structures that are connected concentrically. The cylindrical end 41 at the front end of the gas-filling channel is an air inlet hole, which can be connected to the gas through a plastic hose or the like during the experiment; the rectangular end 42 of the gas-filling channel is stuck in the gas-filling channel positioning groove 23 on both sides of the capillary, and the cylindrical end 41 is concentrically assembled with the capillary air inlet 31 at both ends of the curved capillary to ensure that the gas is directly filled into the capillary from both ends of the curved discharge capillary 3.

[0060] The gas filling channel cover plate 6 is used to fix the gas filling channel 4. Fig. 9The air-filling channel cover plate 6 includes two surfaces perpendicular to each other, one of which blocks the air-filling channel 4, and the other surface is provided with a second positioning hole 52 of the air-filling channel cover plate. The fastener passes through the second positioning hole 52 of the air-filling channel cover plate and the first positioning hole 25 of the air-filling channel cover plate to fix the air-filling channel cover plate 6 on the capillary bracket 2, that is, the air-filling channel cover plate is covered on the outside of the rectangular end 42 of the air-filling channel on the left and right sides of the capillary bracket 2; the upper end of the other surface of the air-filling channel cover plate 6 is provided with a supporting groove 51 matching the cylindrical end 41, and the supporting groove 51 is used to support the cylindrical end 41 of the capillary air-filling channel.

[0061] Specifically, the support groove 51 is a semicircular groove, which cooperates with the cylindrical end 41 at the front end of the inflation channel 4 to support the inflation channel 4 from below. Under the action of the fastener, the second positioning hole 52 of the inflation channel cover plate cooperates with the first positioning hole 25 of the inflation channel cover plate on the capillary support 2 to achieve a tight clamping of the inflation channel 4 and the capillary support 2.

[0062] In some embodiments, the capillary support sides at both ends of the curved discharge capillary are provided with first positioning holes 26 for fixing the copper electrode cover plate 7. Fig.10 The copper electrode 5 is L-shaped, and the upper end of the copper electrode 5 is provided with a first through hole 61 concentrically assembled with the end of the curved discharge capillary 3. The first through hole 61 is used as a discharge hole to ionize the gas in the curved discharge capillary to form a plasma channel; the lower end of the copper electrode 5 is provided with a second through hole 62 at the end, and the second through hole 62 is used to connect with an external high-voltage source. Specifically, the second through hole 62 is connected to the terminal to apply high voltage to both sides of the capillary.

[0063] Exemplarily, the thickness of the copper electrode 5 is 500 μm, the first through hole 61 and the second through hole 62 are both circular holes, and the aperture of the discharge hole is 700 μm, which can fully ensure that the gas jet in the capillary is not hindered and the laser light path is not blocked.

[0064] The copper electrode cover plate 7 covers the copper electrode 5 on the front and rear surfaces of the capillary support 2 at the front and rear sides of the capillary, and the copper electrode cover plate 7 is used to fix the copper electrode 5; refer to Fig.11 An L-shaped groove matching the shape of the copper electrode 5 is provided on the inner side of the copper electrode cover plate 7, and a second copper electrode cover plate positioning hole 72 is provided on the copper electrode cover plate 7. After the discharge hole of the copper electrode 5 is concentrically assembled with the end of the bent discharge capillary 3, the fastener passes through the second copper electrode cover plate positioning hole 72 and the first copper electrode cover plate positioning hole 26 on the capillary support 2 to fix the copper electrode 5 on the capillary support 2. After the copper electrode 5 is connected to a high-voltage power supply, it is used to ionize the gas in the capillary. Specifically, the second copper electrode through holes 62 on both sides of the capillary support 2 are respectively connected to the positive and negative electrodes of the high-voltage source using connectors such as crocodile clips or wiring terminals, so as to ionize the gas in the capillary.

[0065] The copper electrode cover plate 7 is made of organic glass. An "L"-shaped groove is designed inside one side of the copper electrode cover plate, which is a copper electrode positioning groove 71. Under the action of the fastener, the second positioning holes 72 of the copper electrode cover plate on both sides cooperate with the first positioning holes 26 of the copper electrode cover plate on the capillary support 2 to position the copper electrode 5.

[0066] The curved discharge capillary and the clamping device in the above-mentioned embodiment of the present invention can realize the effective fixation of the gas filling channel 4, the copper electrode 5, the curved discharge capillary 3, etc. through the mutual cooperation of the gas filling channel cover plate 6, the copper electrode cover plate 7 and the capillary cover plate 8, and realize the tight clamping of the curved discharge capillary 3, so that laser guidance can be realized in the curved discharge capillary. It is expected that relativistic laser guidance based on the curved discharge capillary, synchrotron radiation source based on the laser wakefield acceleration of the curved plasma channel, and electron cascade acceleration experiment of the laser wakefield can be realized in the future.

[0067] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various modifications or variations within the scope of the claims, which does not affect the essence of the present invention. The above preferred features can be used in any combination without conflicting with each other.

Claims

1. A curved discharge capillary, characterized in that: The upper sheet comprises an upper sheet and a lower sheet, wherein the upper sheet is provided with a first groove and two first air inlet grooves, wherein the first groove is arranged along the length direction of the upper sheet, the two first air inlet grooves are respectively located at two ends of the upper sheet, and the first air inlet groove intersects and interpenetrates with the first groove; the lower sheet is provided with a second groove and a second air inlet groove at a position corresponding to the upper sheet; After the upper piece and the lower piece are assembled, the first air inlet groove and the second air inlet groove are combined to form a capillary air inlet, and the first groove and the second groove are combined to form a curved capillary channel, the cross-section of the curved capillary channel is circular, and the curvature of the curved capillary channel changes gradually in the longitudinal direction.

2. The curved discharge capillary according to claim 1, characterized in that: The curved discharge capillary is obtained by etching a sapphire substrate using a femtosecond laser precision processing technology.

3. A clamping device for a bent discharge capillary, characterized in that: The device is used to clamp the curved discharge capillary according to claim 1 or 2, and the device comprises: A bracket base is fixed on the translation table; A capillary support, fixed on the support base; A capillary positioning groove is provided in the middle of the upper surface of the capillary support and is used to fix the bent discharge capillary on the capillary support; Four gas-filling channel positioning grooves are provided on the upper surface of the capillary support, and the gas-filling channel positioning grooves are respectively located on both sides of the end of the capillary positioning groove; Four inflation channels, respectively assembled in the inflation channel positioning grooves; Copper electrodes are mounted on the sides of the capillary support at both ends of the curved discharge capillary; An air filling channel cover plate, which is arranged on the surface of the air filling channel; A copper electrode cover plate, covering the surface of the copper electrode; The capillary cover plate covers the curved discharge capillary and presses the curved discharge capillary tightly.

4. The clamping device for a bent discharge capillary according to claim 3, characterized in that: The middle part of the support base is provided with four countersunk holes arranged in a rectangular shape, and the device is fixed on the translation platform through the countersunk holes.

5. The clamping device for a bent discharge capillary according to claim 3, characterized in that: Capillary bracket positioning holes are provided at four corners of the upper surface of the bracket base, and the capillary bracket is provided with a positioning through hole, and a fastener passes through the positioning through hole and the capillary bracket positioning hole to fix the capillary bracket on the bracket base; The capillary support upper surface is provided with capillary cover plate positioning grooves located on both sides of the capillary positioning groove, and the capillary cover plate is fixed in the capillary cover plate positioning grooves; On the side surfaces of the capillary support at both sides of the curved discharge capillary, there are provided first positioning holes of the gas filling channel cover plate for fixing the gas filling channel cover plate; Copper electrode cover plate first positioning holes for fixing the copper electrode cover plate are provided on the side surfaces of the capillary support at both ends of the curved discharge capillary.

6. The clamping device for a bent discharge capillary according to claim 5, characterized in that: The inflation channel comprises: A cylindrical end portion, provided at one end of the inflation passage, serving as an air inlet; A rectangular end portion is provided at the other end of the inflation channel, the center of the rectangular end portion is provided with an inflation port of the inflation channel as a capillary inflation hole, and the rectangular end portion is fixed in the positioning groove of the inflation channel; The cylindrical end and the rectangular end are hollow structures that penetrate and are concentric.

7. The clamping device for a bent discharge capillary according to claim 6, characterized in that: The inflation channel cover plate includes two surfaces perpendicular to each other, one of which blocks the inflation channel, and the other surface is provided with a second positioning hole of the inflation channel cover plate, and a fastener passes through the second positioning hole of the inflation channel cover plate and the first positioning hole of the inflation channel cover plate to fix the inflation channel cover plate on the capillary bracket; the upper end of the other surface of the inflation channel cover plate is provided with a supporting groove matching the cylindrical end.

8. The clamping device for a bent discharge capillary according to claim 5, characterized in that: The copper electrode is L-shaped, and the upper end of the copper electrode is provided with a first through hole concentrically assembled with the end of the bent discharge capillary, and the first through hole serves as a discharge hole to ionize the gas in the bent discharge capillary; the lower end of the copper electrode is provided with a second through hole at the end, and the second through hole is used to connect to an external high voltage source.

9. The clamping device for a bent discharge capillary according to claim 8, characterized in that: An L-shaped groove matching the shape of the copper electrode is provided on the inner side of the copper electrode cover plate, and a second copper electrode cover plate positioning hole is provided on the copper electrode cover plate. After the discharge hole of the copper electrode is concentrically assembled with the port of the bent discharge capillary, a fastener passes through the second positioning hole of the copper electrode cover plate and the first positioning hole of the copper electrode cover plate to fix the copper electrode on the capillary bracket.

10. The clamping device for a bent discharge capillary according to claim 5, characterized in that: The capillary cover plate is provided with a first protrusion and a second protrusion at both ends thereof which match the shape of the capillary cover plate positioning groove. The first protrusion and the second protrusion are respectively provided with a capillary cover plate positioning hole. A fastener passes through the capillary cover plate positioning hole to fix the capillary cover plate in the capillary cover plate positioning groove and compress the curved discharge capillary.

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