Measuring device

Abstract

The present invention discloses a measuring device, comprising a base, a first bracket, and a second bracket. The first bracket is used to connect to a system to be measured, and the second bracket is spaced apart from the first bracket and is used to connect to a displacement output terminal of the system to be measured. One of the first bracket and the second bracket is provided with a displacement measuring member, and the other is provided with a displacement measuring mating member. The first bracket has a first state and a second state; the second bracket has a third state and a fourth state. When the first bracket is in the first state, the second bracket is in the third state; when the first bracket is in the second state, the second bracket is in the fourth state; and the maximum value of the first range is less than the minimum value of the second range. The measuring device can measure output displacements in different ranges, reducing measurement costs.

Description

Technical Field

[0001] The present invention relates to the field of precision measurement technology, and in particular to a measuring device. Background Art

[0002] Precision displacement measurement is a key issue in the semiconductor, precision measurement, and metrology fields. In modern manufacturing systems and measuring instruments, the level of precision measurement determines the accuracy of the manufacturing instrument, so precision displacement measurement systems are of great significance to modern equipment manufacturing.

[0003] In order to measure the output displacement of the system to be measured, the existing technology usually needs to build a specially adapted system for direct measurement, which results in high measurement costs. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a measuring device that can measure output displacements in different ranges and reduces measurement costs.

[0005] An embodiment of the present application provides a measuring device, comprising: a base; a first bracket, the first bracket being used to connect to a system to be measured; a second bracket, the second bracket being spaced apart from the first bracket and being used to connect to a displacement output end of the system to be measured; one of the first bracket and the second bracket is provided with a displacement measuring piece, and the other is provided with a displacement measuring fitting piece; the first bracket has a first state and a second state, in the first state, the first bracket is fixedly connected to the base, in the second state, the first bracket is movably connected to the base along a first direction in a first range, the first direction being the direction in which the system to be measured outputs displacement; the second bracket has a third state and a fourth state, in the third state, the second bracket is movably connected to the base along a first direction in a second range, and in the fourth state, the second bracket is fixedly connected to the base; wherein, when the first bracket is in the first state, the second bracket is in the third state, and when the first bracket is in the second state, the second bracket is in the fourth state, the minimum value of the first range is greater than the maximum value of the second range.

[0006] According to the measuring device of the embodiment of the present application, a first bracket and a second bracket are provided, each of which is connected to a displacement measuring part and a displacement measuring fitting, and the first bracket and the second bracket have different displacement ranges. In this way, the displacement of a system to be measured with different output displacement ranges can be measured by moving the first bracket or the second bracket, thereby increasing the scope of application, reducing costs, and having a simple structure, which is convenient for production and processing.

[0007] In a possible implementation of the present application, the first bracket is detachably fixedly connected to the base, and the second bracket is slidably connected to the base along a first direction;

[0008] It also includes a force sensor arranged on the base, and the force sensor is connected to the second bracket to measure the force applied to the second bracket.

[0009] In a possible implementation of the present application, a force measurement assembly is further included, wherein the force measurement assembly includes the force sensor, a first elastic member, and a second elastic member spaced apart along the first direction, and the first elastic member and the second elastic member are extended and retracted along the first direction;

[0010] One end of the first elastic member is connected to the force sensor, and the other end is connected to the second bracket. One end of the second elastic member is connected to the second bracket, and the other end is connected to the base.

[0011] In a possible implementation of the present application, there are two first elastic members, and the two first elastic members are spaced apart and arranged on both sides of the second bracket along a second direction, and the second direction is perpendicular to the first direction;

[0012] The force measurement assembly further includes a connecting rod, two ends of which are respectively connected to the two first elastic members, and the force sensor is connected to the connecting rod.

[0013] In a possible implementation of the present application, the force measurement assembly further includes an anti-bending member, which includes two large-diameter sections located at both ends and a small-diameter section connected between the two large-diameter sections, and the two large-diameter sections are respectively connected to the force sensor and the connecting rod.

[0014] In a possible implementation of the present application, the first elastic member is connected to the connecting rod through a first preload adjustment rod, and the second elastic member is connected to the base through a second preload adjustment rod.

[0015] In a possible implementation of the present application, the second bracket is slidably connected to the base via a sliding assembly;

[0016] The sliding assembly includes a guide rail arranged on the base along a first direction, and a slider slidably matched with the guide rail, and the second bracket is connected to the slider.

[0017] In a possible implementation of the present application, the base is provided with a guide groove extending along the first direction;

[0018] The sliding assembly further includes a guide rod, one end of which is connected to the second bracket, and the other end of which is passed through the guide groove.

[0019] In a possible implementation of the present application, the second bracket is detachably fixedly connected to the base, and the first bracket is movably connected to the base along a first direction via a deformable member.

[0020] In a possible implementation of the present application, there are multiple deformable members, and the multiple deformable members are arranged at intervals along the first direction. One end of the deformable member is connected to the base, and the other end is connected to the first bracket.

[0021] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments with reference to the following drawings, in which:

[0023] Figure 1 is a schematic structural diagram of an angle measuring device according to an embodiment of the present invention;

[0024] Figure 2 is a schematic structural diagram of another angle of the measuring device according to an embodiment of the present invention;

[0025] Figure 3 is a force analysis diagram of a slider in a measuring device according to an embodiment of the present invention;

[0026] Figure 4 is a force analysis diagram of another state of a slider of a measuring device according to an embodiment of the present invention;

[0027] Figure 5 This is a schematic structural diagram of an angle at which a first bracket and a second bracket cooperate with each other in a measuring device according to an embodiment of the present invention;

[0028] Figure 6 is a schematic structural diagram of another angle of cooperation between the first bracket and the second bracket of the measuring device according to an embodiment of the present invention;

[0029] Figure 7 is a top view of a base of a measuring device according to an embodiment of the present invention;

[0030] Figure 8 is a schematic structural diagram of a base of a measuring device according to an embodiment of the present invention;

[0031] Figure 9 is a bottom view of a measuring device according to an embodiment of the present invention.

[0032] Reference numerals:

[0033] Measuring device 100,

[0034] Base 10, guide groove 11, deformable member 12, first support 13, second support 14, connecting block 15,

[0035] First bracket 20, displacement measurement matching piece 21,

[0036] The second bracket 30, the displacement measuring member 31,

[0037] Force measurement assembly 40, force sensor 41, first elastic member 42, second elastic member 43, connecting rod 44, anti-bending member 45, first preload adjustment rod 46, second preload adjustment rod 47,

[0038] Sliding assembly 50, guide rail 51, slider 52, guide rod 521, adapter 522,

[0039] A system 200 to be measured. DETAILED DESCRIPTION

[0040] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0041] In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0042] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0043] The measurement device 100 according to an embodiment of the present application will be described below with reference to the accompanying drawings.

[0044] Reference Figure 1 and Figure 2 A measuring device 100 provided in an embodiment of the present application includes a base 10, a first bracket 20, and a second bracket 30. The first bracket 20 is used to connect to a system to be measured 200. The second bracket 30 is spaced apart from the first bracket 20 and is used to connect to a displacement output end of the system to be measured 200. One of the first bracket 20 and the second bracket 30 is provided with a displacement measuring member 31, and the other is provided with a displacement measuring matching member 21. The first bracket 20 has a first state and a second state. In the first state, the first bracket 20 is fixedly connected to the base 10. In the second state, the first bracket 20 is movably connected to the base 10 along a first direction within a first range, where the first direction is the direction in which the system to be measured 200 outputs displacement. The second bracket 30 has a third state and a fourth state. In the third state, the second bracket 30 is movably connected to the base 10 along a first direction within a second range. In the fourth state, the second bracket 30 is fixedly connected to the base 10. When the first bracket 20 is in the first state, the second bracket 30 is in the third state. When the first bracket 20 is in the second state, the second bracket 30 is in the fourth state. The maximum value of the first range is less than the minimum value of the second range.

[0045] Specifically, refer to Figure 1 and Figure 2 The measuring device in the embodiment of the present invention includes a base 10, and the base 10 is used to support the first bracket 20 and the second bracket 30, etc.

[0046] Reference Figure 1 and Figure 2 The first bracket 20 is used to connect the system to be measured 200. The system to be measured 200 can be fixedly connected to the first bracket 20, such as by welding; or it can be detachably connected to the first bracket 20, for example, by threaded connection, snap connection or connection through a detachable connector.

[0047] The system to be measured 200 may output displacement, force, etc. The system to be measured 200 may be an electromechanical system, for example, a linear motor, a piezoelectric ceramic, etc.

[0048] The second bracket 30 is spaced apart from the first bracket 20 and is used to connect to the displacement output end of the measured system 200. In this way, when the measured system 200 outputs displacement, it can act on the second bracket 30 to generate displacement between the first bracket 20 and the second bracket 30.

[0049] One of the first bracket 20 and the second bracket 30 is provided with a displacement measuring member 31, and the other is provided with a displacement measuring matching member 21. The displacement between the first bracket 20 and the second bracket 30 is measured by the cooperation between the displacement measuring member 31 and the displacement measuring matching member 21. The displacement measuring member 31 may be a laser interferometer, and the displacement measuring matching member 21 may be a reflector, a refractor, or the like.

[0050] The displacement measuring member 31 can be disposed on the first bracket 20 or the second bracket 30. When the displacement measuring member 31 is disposed on the first bracket 20, the displacement measuring matching member 21 is disposed on the second bracket 30 and is arranged opposite to the displacement measuring member 31; when the displacement measuring member 31 is disposed on the second bracket 30, the displacement measuring matching member 21 is disposed on the first bracket 20 and is arranged opposite to the displacement measuring member 31.

[0051] The first bracket 20 has a first state and a second state. In the first state, the first bracket 20 is fixedly connected to the base 10. In the second state, the first bracket 20 is movably connected to the base 10 within a first range along a first direction, where the first direction is the direction in which the system to be measured 200 outputs displacement. Because the first bracket 20 has a second state, the first bracket 20 is detachably fixedly connected to the base 10 in the first state. The first bracket 20 and the base 10 can be connected via a first detachable member, which can be a threaded connector, a snap connector, or the like. The first bracket 20 is movably connected to the base 10 within a first range along the first direction, facilitating the acquisition of the displacement of the first bracket 20 along the first direction, i.e., the output displacement of the system to be measured 200.

[0052] The second bracket 30 has a third state and a fourth state. In the third state, the second bracket 30 is movably connected to the base 10 within a second range along the first direction. In the fourth state, the second bracket 30 is fixedly connected to the base 10. Because the second bracket 30 has a third state, the second bracket 30 is detachably fixedly connected to the base 10 in the fourth state. The second bracket 30 and the base 10 can be connected via a second detachable member, which can be a threaded connector, a snap connector, or the like. The second bracket 30 is movably connected to the base 10 within a second range along the first direction, facilitating the acquisition of the displacement of the second bracket 30 along the first direction, i.e., the output displacement of the system 200 to be measured.

[0053] When the first bracket 20 is in the first state, the second bracket 30 is in the third state. When the first bracket 20 is in the second state, the second bracket 30 is in the fourth state. The maximum value of the first range is less than the minimum value of the second range. In this way, one of the first bracket 20 and the second bracket 30 remains fixed while the other moves, so that measurements can be performed in different displacement ranges.

[0054] It should be noted that the first range may be a displacement range of micrometer or nanometer level, and the second range may be a displacement range of centimeter level, etc.

[0055] Therefore, refer to Figure 1 and Figure 2 According to the measuring device 100 of the embodiment of the present application, a first bracket 20 and a second bracket 30 are respectively connected to the displacement measuring part and the displacement measuring fitting 21, and the first bracket 20 and the second bracket 30 have different displacement ranges. In this way, the displacement of the system to be measured 200 with different output displacement ranges can be measured by moving the first bracket 20 or the second bracket 30, which increases the application range, reduces the cost, and has a simple structure and is easy to produce and process.

[0056] In some embodiments of the present application, reference Figure 1 and Figure 2 The first bracket 20 is detachably fixedly connected to the base 10, and the second bracket 30 is slidably connected to the base 10 along the first direction; the measuring device 100 also includes a force sensor 41 arranged on the base 10, and the force sensor 41 is connected to the second bracket 30 to measure the force applied to the second bracket 30.

[0057] By detachably and fixedly connecting the first bracket 20 to the base 10, and slidingly connecting the second bracket 30 to the base 10 along a first direction, when the system to be measured 200 outputs a displacement, the second bracket 30 moves relative to the first bracket 20, and the displacement is the same as the displacement output by the system to be measured 200. By providing a force sensor 41 connected to the second bracket 30, when the system to be measured 200 outputs a displacement, the second bracket 30 is forced to move. The force sensor 41 can measure the force applied to the second bracket 30 and calculate the output force of the system to be measured 200 based on the force applied to the second bracket 30. Then, according to Hooke's law: F = KΔx, where F is the magnitude of the system output force, K is the system stiffness, and Δx is the change in the system output displacement, the stiffness of the system to be measured 200 can be obtained.

[0058] Specifically, the first bracket 20 is detachably fixedly connected to the base 10, that is, when the first bracket 20 is in the first state, the first bracket 20 and the base 10 can be threaded, snap-fitted, or detachably connected. In the present application, the first bracket 20 and the base 10 are connected by a threaded connector formed by threaded holes formed in the side of the base 10 and threaded holes in the side of the first bracket 20.

[0059] The force sensor 41 is connected to the base 10 via the first support 13. The first support 13 may be provided on a side of the second bracket 30 away from the first bracket 20 along the first direction.

[0060] In some embodiments of the present application, reference Figure 1 and Figure 2 The measuring device 100 also includes a force measuring component 40, which includes a force sensor 41, a first elastic member 42, and a second elastic member 43 spaced apart along a first direction. The first elastic member 42 and the second elastic member 43 extend and retract along the first direction; one end of the first elastic member 42 is connected to the force sensor 41, and the other end is connected to the second bracket 30; one end of the second elastic member 43 is connected to the second bracket 30, and the other end is connected to the base 10.

[0061] By arranging the first elastic member 42 and the second elastic member 43 at intervals along the first direction, and the first elastic member 42 and the second elastic member 43 are extended and retracted along the first direction, the second bracket 30 can maintain balance in the first direction under the action of the first elastic member and the second elastic member 43 in the initial state, and after being subjected to force, the force sensor 41 can measure the change in the force of the two parts within the unit range, so that a larger force range can be measured.

[0062] During use, the first elastic member 42 and the second elastic member 43 can both be in an extended state in their initial state, and the second bracket 30 is in a balanced static state under the action of the first elastic member 42 and the second elastic member 43. When the system to be measured 200 outputs a force, the second bracket 30 is subjected to the force and produces a displacement Δx. The displacement value can be obtained by the displacement measuring member 31. At this time, the force on the second elastic member 43 increases by kΔx, while the force on the first elastic member 42 decreases by kΔx. At this time, the value measured by the force sensor 41 is kΔx, and the force exerted on the second bracket 30 by the system to be measured 200 is 2kΔx, that is, the output force of the system to be measured 200 is 2kΔx. Based on the data obtained by the force sensor 41 and the displacement measuring member 31, the stiffness of the system to be measured 200 can be calculated.

[0063] In some embodiments, the other end of the second elastic member 43 is connected to the base 10 via the second support 14. The first elastic member 42 and the second elastic member 43 can be springs. Further, the first elastic member 42 and the second elastic member 43 can be tension springs to facilitate connection with the second bracket 30, the force sensor 41 and the base 10.

[0064] In some embodiments of the present application, there are two first elastic members 42, and the two first elastic members 42 are arranged on both sides of the second bracket 30 at intervals along the second direction, and the second direction is perpendicular to the first direction; the force measurement component 40 also includes a connecting rod 44, and the two ends of the connecting rod 44 are respectively connected to the two first elastic members 42, and the force sensor 41 is connected to the connecting rod 44.

[0065] By providing two first elastic members 42 and connecting the two first elastic members 42 via a connecting rod 44 , it is convenient to connect the force sensor 41 to the first elastic member 42 .

[0066] Specifically, the distances between the connection point between the force sensor 41 and the connecting rod 44 and the connection point between the first elastic member 42 and the connecting rod 44 are the same, so that the stability and accuracy of the measurement of the force sensor 41 can be improved.

[0067] In some embodiments, there are two second elastic members 43, and each first elastic member 42 corresponds to one second elastic member 43. In this way, the stress stability and movement stability of the second bracket 30 can be improved.

[0068] Adjust the preload force of the two first elastic members 42 and the two second elastic members 43 so that F k1 = F k2 , F k3 = F k4 , the force of the first bracket 20 is referenced to Figure 3 , due to F 促 =(F k1 + F k2 )-(F k3 + F k4 ), when F k1 + F k2 =F k3 + F k4 When F 促 =0; that is, the second bracket 30 is in a balanced static state.

[0069] When the system to be measured 200 outputs ΔF 促 When the force of the first bracket 20 is Figure 4 , according to the balance of forces, (F 促 + ΔF 促 )+(F k3 - kΔx)+(F k4 - kΔx) = (F k1 + kΔx)+(F k2 +kΔx), then, ΔF 促 =4 kΔx.

[0070] The force ΔF of the force sensor 41 传 =(F k3 + F k4 )-(F k3 + kΔx), that is, ΔF 传 =2 kΔx, that is, ΔF 促 =2ΔF 传 .

[0071] In some embodiments, the second bracket 30 is provided with a connecting piece 522 for connecting with the first elastic piece 42 and the second elastic piece 43 . The connecting piece 522 extends along the second direction and is provided with an annular groove for connecting with the first elastic piece 42 and the second elastic piece 43 .

[0072] In some embodiments of the present application, reference Figure 1 The force measurement assembly 40 further includes an anti-bending member 45, which includes two large-diameter sections at both ends and a small-diameter section connected between the two large-diameter sections. The two large-diameter sections are respectively connected to the force sensor 41 and the connecting rod 44.

[0073] Since the force sensor 41 can withstand pressure and tension but cannot withstand bending moment, the bending moment is overcome by providing the anti-bending member 45 so that the force sensor 41 only needs to withstand tension or pressure.

[0074] By providing a large diameter section, it is easy to connect with the first support 13 and the connecting rod 44, and by providing a small diameter section as a flexible structure, the bending moment can be overcome by deformation.

[0075] In some embodiments, the diameter of the large diameter section gradually decreases from the small diameter section, and the small diameter section is symmetrical on both sides. The anti-bending member 45 is detachably connected to the force sensor 41 and the connecting rod 44. For example, the anti-bending member 45 is threadedly connected to the force sensor 41 and the connecting rod 44 via studs.

[0076] In some embodiments of the present application, reference Figure 1 and Figure 2 The first elastic member 42 is connected to the connecting rod 44 through a first preload adjustment rod 46 , and the second elastic member 43 is connected to the base 10 through a second preload adjustment rod 47 .

[0077] The first preload adjustment rod 46 and the second preload adjustment rod 47 facilitate adjustment of the preload forces exerted by the first elastic member 42 and the second elastic member 43 on the second bracket 30 .

[0078] Specifically, one end of a first preload adjustment rod 46 is connected to the first elastic member 42, and the other end is inserted through the connecting rod 44. The other end of the first preload adjustment rod 46 is threadedly connected to a nut, and the elongation of the first elastic member 42 can be adjusted by adjusting the nut. One end of a second preload adjustment rod 47 is connected to the second elastic member 43, and the other end is inserted through the support. The other end of the second preload adjustment rod 47 is threadedly connected to a nut, and the elongation of the second elastic member 43 can be adjusted by adjusting the nut.

[0079] In some embodiments of the present application, reference Figure 5 and Figure 6The second bracket 30 is slidably connected to the base 10 through a sliding assembly 50; the sliding assembly 50 includes a guide rail 51 provided on the base 10 along a first direction, and a slider 52 slidingly engaged with the guide rail 51, and the second bracket 30 is connected to the slider 52.

[0080] By providing a guide rail 51 extending along the first direction and a slider 52 cooperating with the guide rail 51, the movement of the second bracket 30 connected to the slider 52 can be guided, thereby improving the stability of the movement of the second bracket 30. Because the second bracket 30 can move relative to the guide rail 51 over a large distance, displacements over a wide range of travel can be measured.

[0081] Specifically, the guide rail 51 can be a sliding protrusion connected to the base 10, and the slider 52 has a sliding groove that matches the sliding protrusion. The sliding protrusion and the base 10 can be fixedly connected, for example, by welding or by a connector, such as a threaded member or a snap. The second bracket 30 and the slider 52 can be fixedly connected, for example, by welding or by a connector, such as a threaded member or a snap.

[0082] In some embodiments, the sliding assembly 50 may include a groove guide rail 51 provided on the base 10 along the first direction, and a slider 52 having a protrusion that slidably cooperates with the groove guide rail 51 , and the second bracket 30 is connected to the slider 52 .

[0083] In some embodiments of the present application, reference Figure 5 and Figure 6 The base 10 is provided with a guide groove 11 extending along the first direction; the sliding assembly 50 further includes a guide rod, one end of the guide rod is connected to the second bracket 30, and the other end is passed through the guide groove 11.

[0084] By providing the guide groove 11 and the guide rod matched with the guide groove 11 , the stability of the sliding block 52 sliding along the first direction is further improved.

[0085] In some embodiments, there are two guide grooves 11 , which are spaced apart along the second direction on opposite sides of the slider 52 , and there are also two guide rods 521 .

[0086] In some embodiments, the guide groove 11 is a through groove, and the other end of the guide rod is fixed by a stopper to position the second bracket 30 in the fourth state. The stopper can be a nut, and the other end of the guide rod is provided with a thread, and the nut and the thread cooperate to limit and fix the guide rod.

[0087] In some embodiments of the present application, reference Figure 7-Figure 9 The second bracket 30 is detachably fixedly connected to the base 10 , and the first bracket 20 is movably connected to the base 10 along a first direction through the deformable member 12 .

[0088] The second bracket 30 is detachably fixedly connected to the base 10, and the first bracket 20 is movably connected to the base 10 along the first direction, that is, the second bracket 30 is in the fourth state, and the first bracket 20 is in the first state. Specifically, the second bracket 30 can be detachably fixedly connected to the base 10 via a slider 52 to achieve a detachable fixed connection between the second bracket 30 and the base 10. The slider 52 and the base 10 can be connected by a connector, such as a threaded member, a snap member, etc.

[0089] The first bracket 20 is movably connected to the base 10 along a first direction via a deformable member 12. Specifically, the deformable member 12 is fixedly connected to the base 10, and the first bracket 20 is fixedly connected to the deformable member 12. The deformable member 12 is deformable along the first direction to enable the first bracket 20 connected thereto to move along the first direction. Because the deformable member is an integrally formed part, it produces displacement through flexible deformation, eliminating issues such as friction, lubrication, clearance, and the conversion between static friction and dynamic friction. Therefore, high-precision measurements can be achieved within a smaller range. The deformable member 12 can be connected to the base 10 at one end and to the first bracket 20 at the other end; alternatively, both ends of the deformable member 12 can be connected to the base 10, with the first bracket 20 connected to any position between the two ends of the deformable member 12.

[0090] In some embodiments, the deformable member 12 may be a sheet-shaped flexible deformable member for easy deformation. The deformable member 12 may be made of metal or the like.

[0091] In some embodiments of the present application, reference Figure 7-Figure 9 There are multiple deformable members 12, and the multiple deformable members 12 are spaced apart along the first direction. One end of the deformable member 12 is connected to the base 10, and the other end is connected to the first bracket 20.

[0092] The plurality of deformable members 12 improves the stability of the support for the first bracket 20. One end of the deformable member 12 is connected to the base 10, and the other end is connected to the first bracket 20, which increases the deformation range of the deformable member 12 and the displacement range of the first bracket 20.

[0093] In some embodiments, the other ends of the plurality of deformable members 12 are connected via a connecting block 15 , and the first bracket 20 is connected to the connecting block 15 for easy connection.

[0094] In some embodiments, the base 10 is provided with a through opening along the thickness direction of the base 10 , and the shape of the opening is not limited, and can be directional, L-shaped, etc. The deformable member and the connecting block 15 are provided with openings so that the surface of the base 10 remains flat.

[0095] When the first bracket 20 is in the first state, the connecting piece can be passed through the side of the base 10 to fix the connecting block 15 to the base 10. The connecting piece can be a threaded connecting piece or the like.

[0096] Throughout this specification, reference to terms such as "embodiment" or "example" indicates that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0097] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A measuring device, characterized in that: include: base; a first bracket, wherein the first bracket is used to connect to the system to be measured; a second bracket, the second bracket being spaced apart from the first bracket and being used to be connected to a displacement output end of the system to be measured; One of the first bracket and the second bracket is provided with a displacement measuring component, and the other is provided with a displacement measuring matching component, wherein the displacement measuring component is a laser interferometer, and the displacement measuring matching component is a reflector or a refractor; The first bracket has a first state and a second state. In the first state, the first bracket is fixedly connected to the base. In the second state, the first bracket is movably connected to the base within a first range along a first direction via a deformable member. The first direction is the direction in which the system to be measured outputs displacement. The second bracket has a third state and a fourth state. In the third state, the second bracket is movably connected to the base along the first direction within a second range. In the fourth state, the second bracket is detachably fixed to the base. Specifically, when the first bracket is in the first state, the second bracket is in the third state; when the first bracket is in the second state, the second bracket is in the fourth state; the maximum value of the first range is smaller than the minimum value of the second range; the first range is a micrometer or nanometer displacement range; and the second range is a centimeter displacement range.

2. The measuring device according to claim 1, characterized in that The first bracket is detachably fixedly connected to the base, and the second bracket is slidably connected to the base along a first direction; It also includes a force sensor arranged on the base, and the force sensor is connected to the second bracket to measure the force applied to the second bracket.

3. The measuring device according to claim 2, characterized in that The invention also includes a force measurement assembly, wherein the force measurement assembly includes the force sensor, a first elastic member and a second elastic member spaced apart along the first direction, and the first elastic member and the second elastic member are extended and retracted along the first direction; One end of the first elastic member is connected to the force sensor, and the other end is connected to the second bracket. One end of the second elastic member is connected to the second bracket, and the other end is connected to the base.

4. The measuring device according to claim 3, characterized in that There are two first elastic members, and the two first elastic members are spaced apart and arranged on both sides of the second bracket along a second direction, and the second direction is perpendicular to the first direction; The force measurement assembly further includes a connecting rod, two ends of which are respectively connected to the two first elastic members, and the force sensor is connected to the connecting rod.

5. The measuring device according to claim 4, characterized in that The force measurement assembly further includes an anti-bending member, which includes two large-diameter sections at both ends and a small-diameter section connected between the two large-diameter sections. The two large-diameter sections are respectively connected to the force sensor and the connecting rod.

6. The measuring device according to claim 4, characterized in that The first elastic member is connected to the connecting rod through a first preload adjustment rod, and the second elastic member is connected to the base through a second preload adjustment rod.

7. The measuring device according to claim 2, characterized in that The second bracket is slidably connected to the base via a sliding assembly; The sliding assembly includes a guide rail arranged on the base along a first direction, and a slider slidably matched with the guide rail, and the second bracket is connected to the slider.

8. The measuring device according to claim 7, characterized in that The base is provided with a guide groove extending along a first direction; The sliding assembly further includes a guide rod, one end of which is connected to the second bracket, and the other end of which is passed through the guide groove.

9. The measuring device according to claim 1, characterized in that There are multiple deformable members, and the multiple deformable members are arranged at intervals along the first direction. One end of the deformable member is connected to the base, and the other end is connected to the first bracket.

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