X-ray wavelength dispersion pattern super-resolution synthesis method and super-resolution X-ray emission spectrometer

Abstract

The invention discloses an X-ray wavelength dispersion pattern super-resolution synthesis method and a super-resolution X-ray emission spectrometer, and belongs to the technical field of X-ray emission spectrums. The method comprises the following steps of: 1, acquiring a wavelength dispersion pattern M of X-ray fluorescence by utilizing a detector on a detector assembly; 2, the detector is continuously displaced by a certain distance, wavelength dispersion pattern collection is carried out once each time the detector is displaced, the displacement distance of the detector is recorded, and the total displacement distance is the pixel width of the detector; 3, obtaining one-dimensional light intensity distribution data of all wavelength dispersion patterns; 4, determining a super-resolution multiple according to the moving distance of the detector; and 5, synthesizing all the obtained dispersion patterns to obtain a super-resolution dispersion pattern O, and calculating a super-resolution XES spectral line on the basis of the super-resolution dispersion pattern O. According to the invention, high resolution of the XES spectral line energy can be realized without adopting an expensive high-resolution X-ray detector, and the cost of an XES spectrometer is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray emission spectra, and in particular to a super-resolution synthesis method of X-ray wavelength dispersion patterns and a super-resolution X-ray emission spectrometer. Background Art

[0002] X-ray emission spectroscopy (XES) is an important electronic structure characterization technique that can provide important information such as local electronic structure, spin state, ligands, etc. It plays an irreplaceable role in many fields such as condensed matter physics, functional materials, analytical chemistry, industrial catalysis, semiconductor devices, etc. When X-rays are incident on the sample, the core energy level electrons absorb photons and are excited, and then de-excited by emitting X-ray photons (i.e., X-ray fluorescence emission) and refilling the core energy level holes. The energy of the photons emitted during the de-excitation process reflects the energy difference between the excited state energy level and the core energy level. By analyzing the energy distribution of the emitted photons, information about the unoccupied orbitals of the material can be obtained.

[0003] Traditionally, most XES experimental devices rely on the construction of large synchrotron radiation scientific facilities, using high-throughput synchrotron radiation X-ray sources for experiments. However, due to the scarcity of synchrotron radiation experimental equipment, a large number of scientific research and industrial XES industry needs are difficult to meet. Therefore, the development of laboratory XES spectrometers based on conventional X-ray sources is of great significance to promoting the application of XES technology in related fields.

[0004] Compared with the synchrotron radiation XES beamline, the XES spectrometer is limited by construction costs and it is difficult to use large-size high-resolution X-ray surface / linear array detectors like synchrotron radiation beamlines. Summary of the invention

[0005] 1. Technical problem to be solved by the invention

[0006] In view of the fact that it is difficult to improve the spectral line energy resolution of existing XES spectrometers, the present invention provides a super-resolution synthesis method of X-ray wavelength dispersion patterns and a super-resolution X-ray emission spectrometer, thereby realizing a super-resolution X-ray emission spectrometer with relatively low cost, excellent performance and convenient operation.

[0007] 2. Technical solution

[0008] In order to achieve the above object, the technical solution provided by the present invention is:

[0009] The present invention provides a method for super-resolution synthesis of X-ray wavelength dispersion patterns, comprising the following steps:

[0010] Step 1: Use the light source component to emit X-rays to the sample. The sample is excited to generate X-ray fluorescence that reaches the analysis crystal component. The X-ray fluorescence is wavelength dispersed and focused before reaching the detector component. The detector on the detector component acquires the dispersion pattern M.

[0011] Step 2: continuously displacing the detector by a certain distance, collecting a wavelength dispersion pattern each time the detector is displaced, and recording the moving distance of the detector, the total displacement distance being the pixel width of the detector;

[0012] Step 3, obtaining one-dimensional light intensity distribution data of all dispersion patterns;

[0013] Step 4: Determine the super-resolution multiple according to the detector moving distance;

[0014] Step 5: Synthesize all the obtained dispersion patterns to obtain a super-resolution dispersion pattern O, and calculate the super-resolution XES spectrum lines based on this.

[0015] As a further improvement of the present invention, in the step 1, a grating ruler is provided on the detector assembly for measuring the displacement distance of the detector.

[0016] As a further improvement of the present invention, in the step 2, the detector is displaced along the dispersion direction of the X-ray fluorescence, and the detector is displaced the same distance each time; the total displacement distance is the pixel width of the detector; the total number of dispersion patterns obtained is the same as the super-resolution multiple.

[0017] As a further improvement of the present invention, in the step three, if the detector is a planar array detector, the obtained dispersion pattern is integrated along the non-dispersion direction to obtain one-dimensional light intensity distribution data; if the detector is a linear array detector, no integration is required, and the one-dimensional light intensity distribution data is directly obtained.

[0018] As a further improvement of the present invention, in the step 4, the detector movement distance is the pixel width of the super-resolution dispersion pattern O; based on the grating scale displacement measurement result, the obtained dispersion pattern set is numerically interpolated to generate a dispersion pattern set that accurately corresponds to the pixel width of the super-resolution dispersion pattern O; the super-resolution multiple n=the pixel M of the detector direct-read dispersion pattern y Width / pixel of super-resolution dispersion pattern O y Width = Pixel M of the detector direct reading pattern y Width / detector movement distance.

[0019] As a further improvement of the present invention, in the step 5, the pixels M on each dispersion pattern M are obtained. y The pixel O on the corresponding super-resolution dispersion pattern O isy Represents that, obtain the linear equations about the super-resolution dispersion pattern O, and solve it to obtain each pixel O y The value of .

[0020] As a further improvement of the present invention, all pixels O y After the values ​​of are connected in sequence, the super-resolution dispersion pattern O is obtained.

[0021] The present invention also provides a super-resolution X-ray emission spectrometer for implementing the above-mentioned synthesis method, comprising:

[0022] A detector assembly, used for collecting a dispersion pattern of X-ray fluorescence generated by the sample;

[0023] Analytical crystal assembly for dispersing and focusing X-ray fluorescence;

[0024] A light source assembly, used for emitting X-rays, so that the sample is excited to produce X-ray fluorescence;

[0025] Sample stage, used to place samples.

[0026] As a further improvement of the present invention, a detector is arranged on the detector assembly, and the detector is mounted on a first precision displacement platform, and the first precision displacement platform is used to push the detector to displace, and a grating ruler is arranged on the first precision displacement platform to record the displacement distance of the detector.

[0027] As a further improvement of the present invention, the analytical crystal assembly includes a crystal, and the crystal is mounted on a second precision translation stage, and the second precision translation stage is used to drive the crystal to move and adjust the angle between the crystal and the sample.

[0028] 3. Beneficial effects

[0029] Compared with the existing known technologies, the technical solution provided by the present invention has the following significant effects:

[0030] (1) From the analysis of the principle of XES spectrometer, it can be seen that the spectral energy resolution is determined by the resolution of X-ray optics and surface / line array detectors, and high-resolution X-ray detectors are usually very expensive. The present invention provides a super-resolution synthesis method for X-ray wavelength dispersion patterns. By moving along the dispersion direction and obtaining multiple images with the surface / line array detector for super-resolution synthesis, a lower-resolution X-ray surface / line array detector is used to achieve high-resolution measurement of the X-ray dispersion pattern, thereby achieving high-energy resolution of XES spectral lines without using expensive high-resolution X-ray detectors, thereby reducing the cost of XES spectrometers.

[0031] (2) The present invention provides a super-resolution X-ray emission spectrometer, which uses a first precision translation stage and a grating ruler to perform displacement and distance detection on a detector. By cooperating with a wavelength dispersion pattern super-resolution synthesis method, high-resolution images can be achieved without using expensive high-resolution X-ray detectors, thereby reducing the cost of the XES spectrometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 Schematic diagram of the principle of the super-resolution X-ray emission spectrometer of the present invention;

[0033] Figure 2 The structure block diagram of the super-resolution X-ray emission spectrometer of the present invention is shown in FIG.

[0034] Figure 3 Schematic diagram of the principle of the super-resolution image synthesis method of the present invention;

[0035] Figure 4 A top view of the structure of the super-resolution X-ray emission spectrometer of the present invention;

[0036] Figure 5 It is a schematic diagram of the structure of the light source assembly in the super-resolution X-ray emission spectrometer of the present invention;

[0037] Figure 6 It is a schematic diagram of the structure of the sample stage in the super-resolution X-ray emission spectrometer of the present invention;

[0038] Figure 7 It is a schematic diagram of the structure of the analysis crystal component in the super-resolution X-ray emission spectrometer of the present invention;

[0039] Figure 8 It is a schematic diagram of the structure of the detector assembly in the super-resolution X-ray emission spectrometer of the present invention.

[0040] Explanation of the numbers in the schematic diagram:

[0041] 1. Detector assembly; 11. First precision translation stage; 12. Grating ruler; 13. Detector;

[0042] 2. Analysis crystal assembly; 21. Second precision translation stage; 22. Crystal holder; 23. Crystal; 3. Light source assembly; 31. Light source holder; 32. Light source emitter; 4. Sample stage; 41. Sample holder; 42. Stepper motor; 43. Sample wheel; 44. Retaining spring; 5. Host computer. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned objects, features and advantages of the invention more obvious and understandable, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0046] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0048] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0049] Example

[0050] Combination Figure 1 and Figure 2 The super-resolution X-ray emission spectrometer of this embodiment adopts a dispersion structure. The basic X-ray optical principle is as follows: Figure 1 As shown. The overall principle is based on a Rowland circle crystal monochromator. The detector assembly 1 and the analysis crystal assembly 2 are mounted on the Rowland circle, and the sample is mounted at a position deviating from the Rowland circle. The sample emits X-ray fluorescence after being excited by the X-ray light source emitted by the light source assembly 3, and can be regarded as an X-ray source with a certain area. Since the source can be equivalent to a group of point light sources located on the Rowland circle, the Bragg angles corresponding to these point light sources are continuously distributed. Therefore, according to the monochromatic and focusing principles of the bent crystal, a dispersion pattern of the sample X-ray fluorescence will be generated on the detector assembly 1, and the dispersion pattern will be calibrated and integrated to obtain the XES spectrum. The composition structure of the super-resolution XES spectrometer of the present invention is shown in FIG. Figure 2 As shown, the dotted arrows represent the X-ray optical path and the solid arrows represent the measurement and control instructions.

[0051] Combination Figure 4-Figure 8 , a super-resolution X-ray emission spectrometer of this embodiment specifically includes:

[0052] The detector assembly 1 is used to collect images of the X-ray fluorescence generated by the sample; in this embodiment, the detector assembly 1 includes a detector 13 (which can be a surface / line array detector), a grating ruler 12 and a first precision displacement stage 11, the detector 13 is mounted on the first precision displacement stage 11, the first precision displacement stage 11 is used to push the detector 13 to move, and the grating ruler 12 is arranged on the first precision displacement stage 11 to record the displacement distance of the detector 13. In this embodiment, the first precision displacement stage 11 translates the detector 13 on the one hand so that the angle between the center of the detector and the crystal 23 in the analysis crystal assembly 2 conforms to the Bragg angle corresponding to the center of the XES curve. On the other hand, during the test process, the detector 13 is moved at a small distance to achieve super-resolution measurement. The reading head of the grating ruler 12 is fixed on the mounting seat of the detector 13, and is used to measure the micro-displacement size of the detector 13 with high precision.

[0053] The analysis crystal assembly 2 is used to disperse and focus the X-ray fluorescence, and includes a crystal 23. The crystal 23 is mounted on a second precision translation stage 21 through a crystal holder 22. The second precision translation stage 21 is used to drive the crystal 23 to move and adjust the angle between the crystal 23 and the sample to meet the Bragg angle corresponding to the test target XES spectrum line. The Bragg angle can be calculated according to the following formula: Wherein h is Planck's constant, c is the speed of light, E is the photon energy corresponding to the spectral line to be measured, and d is the interplanar spacing of the diffraction surfaces of the crystal 23 .

[0054] The light source assembly 3 is used to emit X-rays so that the sample is excited to generate X-ray fluorescence. It includes a light source emitter 32, which is mounted on a light source bracket 31. In this embodiment, the light source can be a fixed target X-ray tube, a rotating target X-ray source, a metal jet X-ray source, or other types of white light / monochromatic light X-ray sources.

[0055] The sample stage 4 is used to place the sample, and includes a sample holder 41. A sample wheel 43 and a stepper motor 42 are mounted on the sample holder 41. The stepper motor 42 drives the sample wheel 43 to rotate, and the sample positions in the test sequence are rotated to the X-ray light source irradiation position in sequence to perform the XES experiment. In this embodiment, the sample is fixed to the sample holder 41 by a clamping spring 44.

[0056] The host computer 5 (computer) is electrically connected to the detector assembly 1, sends instructions to the detector assembly 1 and receives images from the detector assembly 1, and synthesizes the images.

[0057] In this embodiment, the sample center, X-ray source spot center, crystal 23 center and detector 13 center are located in the same horizontal plane. The X-ray source and crystal 23 are located on both sides of the normal line of the sample plane to obtain a higher sample emission X-ray receiving efficiency.

[0058] This embodiment provides a method for super-resolution synthesis of X-ray wavelength dispersion patterns, comprising the following steps:

[0059] Step 1: Use the light source assembly 3 to emit light to the sample. The sample is excited to generate X-ray fluorescence that reaches the analysis crystal assembly 2. The X-ray fluorescence is dispersed and focused before reaching the detector assembly 1. The detector 13 on the detector assembly 1 acquires the dispersion pattern M.

[0060] Step 2: Continuously displace the detector 13 by a certain distance, collect the dispersion pattern once each time it is displaced, and record the movement distance of the detector 13 after the displacement. The detector 13 is displaced along the dispersion direction of the X-ray fluorescence, and the displacement distance of the detector 13 is the same each time; the total number of dispersion patterns obtained is the same as the value of the super-resolution multiple.

[0061] Step three, obtain the one-dimensional light intensity distribution data of all dispersion patterns, and obtain the pixel width of the direct-reading pattern of the detector 13; wherein, if the detector 13 is a planar array detector, the obtained dispersion pattern is integrated along the non-dispersion direction to obtain the one-dimensional light intensity distribution data; if the detector 13 is a linear array detector, no integration is required, and the one-dimensional light intensity distribution data is directly obtained.

[0062] Step 4: Determine the super-resolution multiple according to the moving distance of the detector 13; the moving distance of the detector 13 is the pixel width of the super-resolution dispersion pattern O; the super-resolution multiple n=the pixel M of the direct-reading dispersion pattern of the detector 13 y Width / pixel of super-resolution dispersion pattern O y Width = pixel M of the direct-reading pattern of detector 13 y Width / moving distance of detector 13.

[0063] Step 5: synthesize all the obtained dispersion patterns to obtain a super-resolution dispersion pattern O. y The pixel O on the corresponding super-resolution dispersion pattern O is y Represents that, obtain the linear equations about the super-resolution dispersion pattern O, and solve it to obtain each pixel O y The value of all pixels O y After the values ​​of are connected in sequence, the super-resolution dispersion pattern O is obtained.

[0064] Combination Figure 3 In this embodiment, the super-resolution X-ray dispersion pattern synthesis method is introduced with 4 times super-resolution. In this embodiment, according to the precise displacement value obtained from the grating ruler 12, the image acquired by the detector 13 is interpolated to the corresponding 0, 1 / 4, 2 / 4, 3 / 4 detector 13 pixel size displacement. In this embodiment, the resolution of the super-resolution dispersion pattern O is four times that of the detector direct reading pattern. The pixel reading value of the A pattern corresponding to the displacement 0 is related to the high-resolution pattern as follows (where G Xy represents the reading value of pixel y of image X):

[0065] G A1 =G O1 +G O2 +G O3 +G O4

[0066] G A2 =G O5 +G O6 +G O7 +G O8

[0067] G A3 =G O9 +GO10 +G O11 +G O12

[0068] G A4 =G O13 +G O14 +G O15 +G O16

[0069] G A5 =G O17 +G O18 +G O19 +G O20

[0070] For pattern B, since the X-ray detector only responds to X-ray photons in a specific energy range, the portion of pixel 5 that is outside the dispersion pattern range does not contribute to the reading, so the reading value of pixel 5 can be written as:

[0071] G B5 =G O18 +G O19 +G O20

[0072] Other pixels can be written as:

[0073] G B1 =G O2 +G O3 +G O4 +G O5

[0074] G B2 =G O6 +G O7 +G O8 +G O9

[0075] G B3 =G O10 +G O11 +G O12 +G O13

[0076] G B4 =G O14 +G O15 +G O16 +G O17

[0077] Patterns C and D can be deduced in the same way. In this way, we get a linear equation system about the super-resolution dispersion pattern O. The number of effective equations is equal to the number of unknowns. Therefore, Gaussian elimination method, LU decomposition method and other methods can be used to solve it and obtain G o1 ~G o20 value, thereby obtaining a super-resolution dispersion pattern O.

[0078] An operation method of a super-resolution X-ray emission spectrometer of this embodiment is as follows:

[0079] 1. According to the energy range of the XES spectrum line to be tested, based on the Bragg formula, calculate the appropriate crystal 23 interplanar spacing, select the corresponding analysis crystal 23, and install it on the analysis crystal assembly 2;

[0080] 2. Install the sample to be tested on the sample stage 4;

[0081] 3. Use the second precision translation stage 21 to adjust the angle between the crystal 23 and the sample stage 4 so that the X-rays stimulated by the sample are incident at the Bragg angle of the center of the test spectrum line;

[0082] 4. Use the first precision translation stage 11 to adjust the angle between the detector 13 and the crystal 23 so that the X-rays dispersed by the analysis crystal 23 are incident on the detector 13;

[0083] 5. According to the super-resolution measurement parameters, the micro-displacement distance of the detector 13 is set, and the micro-displacement distance d = l / n, where l is the pixel size of the detector 13 (i.e., the pixel M of the direct-reading pattern of the detector 13 y The width of the image is n, and n is the super-resolution multiple. According to collecting dispersion patterns at displacement distances 0, 1d, 2d, ....nd, super-resolution XES spectral line synthesis is performed;

[0084] 6. Save the data and turn off the light source and detector.

[0085] The present invention and its embodiments are described schematically above, and the description is not restrictive. The drawings show only one embodiment of the present invention, and the actual structure is not limited thereto. Therefore, if a person skilled in the art is inspired by it and designs a structural method and an embodiment similar to the technical solution without creativity without departing from the purpose of the invention, they shall all fall within the protection scope of the present invention.

Claims

1. A method for super-resolution synthesis of X-ray wavelength dispersion patterns, characterized in that: The following steps are involved: Step 1: Using a light source component (3) to emit X-rays to a sample, the sample is excited to generate X-ray fluorescence that reaches an analysis crystal component (2), the X-ray fluorescence is wavelength dispersed and focused and then reaches a detector component (1), and a detector (13) on the detector component (1) acquires a dispersion pattern M; Step 2: continuously displacing the detector (13) by a certain distance, collecting a wavelength dispersion pattern each time the detector (13) is displaced, and recording the moving distance of the detector (13) after the displacement, wherein the total displacement distance is the pixel width of the detector; Step 3, obtaining one-dimensional light intensity distribution data of all dispersion patterns; Step 4: determining the super-resolution multiple according to the moving distance of the detector (13); Step 5: Synthesize all the obtained dispersion patterns to obtain a super-resolution dispersion pattern O, and calculate the super-resolution XES spectrum lines based on this.

2. The method for super-resolution synthesis of X-ray wavelength dispersion patterns according to claim 1, characterized in that: In the step 1, a grating ruler (12) is provided on the detector assembly (1) for measuring the displacement distance of the detector (13).

3. The X-ray wavelength dispersion pattern super-resolution synthesis method according to claim 1, characterized in that: In the step 2, the detector (13) is displaced along the dispersion direction of the X-ray fluorescence, and the detector (13) is displaced the same distance each time; the total displacement distance is the pixel width of the detector (13); and the total value of the dispersion patterns obtained is the same as the value of the super-resolution multiple.

4. The method for super-resolution synthesis of X-ray wavelength dispersion patterns according to claim 1, characterized in that: In the step three, if the detector (13) is a planar array detector, the obtained dispersion pattern is integrated along the non-dispersion direction to obtain one-dimensional light intensity distribution data; if the detector (13) is a linear array detector, no integration is required and the one-dimensional light intensity distribution data is directly obtained.

5. The method for super-resolution synthesis of X-ray wavelength dispersion patterns according to claim 1, characterized in that: In the step 4, the detector (13) moves a distance approximately equal to the pixel width of the super-resolution dispersion pattern O; Based on the grating scale displacement measurement result, the obtained dispersion pattern set is numerically interpolated to generate a dispersion pattern set with a pixel width that accurately corresponds to the super-resolution dispersion pattern O; the super-resolution multiple n=the pixel M of the dispersion pattern directly read by the detector (13) y Width / pixel of super-resolution dispersion pattern O y Width = Pixel M of the detector (13) direct reading pattern y Width / moving distance of detector (13).

6. The X-ray wavelength dispersion pattern super-resolution synthesis method according to claim 1, characterized in that: In the step 5, the pixels M on each dispersion pattern M are obtained. y The pixel O on the corresponding super-resolution dispersion pattern O is y Represents that, obtain the linear equations about the super-resolution dispersion pattern O, and solve it to obtain each pixel O y The value of .

7. The method for super-resolution synthesis of X-ray wavelength dispersion patterns according to claim 6, characterized in that: Set all pixels O y After the values ​​of are connected in sequence, the super-resolution dispersion pattern O is obtained.

8. A super-resolution X-ray emission spectrometer, used to implement the synthesis method according to any one of claims 1 to 7, characterized in that: include A detector assembly (1) for collecting images of X-ray fluorescence generated by a sample; An analytical crystal assembly (2) for dispersing and focusing X-ray fluorescence; A light source assembly (3) is used to emit X-rays so that the sample is excited to generate X-ray fluorescence; The sample stage (4) is used to place the sample.

9. The super-resolution X-ray emission spectrometer according to claim 8, characterized in that: A detector (13) is arranged on the detector assembly (1), and the detector (13) is mounted on a first precision displacement platform (11). The first precision displacement platform (11) is used to push the detector (13) to move, and a grating ruler (12) is arranged on the first precision displacement platform (11) to record the displacement distance of the detector (13).

10. The super-resolution X-ray emission spectrometer according to claim 8, characterized in that: The analytical crystal assembly (2) comprises a crystal (23), wherein the crystal (23) is mounted on a second precision displacement stage (21), and the second precision displacement stage (21) is used to drive the crystal (23) to move and adjust the angle between the crystal (23) and the sample.

Images