Dielectrophoresis device easy to control and manufacture, preparation method of dielectrophoresis device and method for manufacturing dielectrophoresis composite membrane

Abstract

The invention discloses a dielectrophoresis device easy to control and manufacture, a preparation method of the dielectrophoresis device easy to control and manufacture and a method for manufacturing a dielectrophoresis composite film. Transparent conductive glass is used for pasting a conductive copper adhesive tape to serve as a providing substrate of a dielectrophoresis alternating electric field; commercial PDMS is used to spin-coat a conductive layer of transparent conductive glass to serve as a die cavity for producing the dielectrophoresis composite film, the method is simple, convenient and easy to manufacture and low in cost, and the dielectric composite film which is controllable in thickness and area and excellent in actual use effect (dielectric materials are orderly arranged in organic matter) can be rapidly prepared.

Description

Technical Field

[0001] The invention belongs to the field of dielectrophoresis equipment, and in particular relates to an easy-to-control and easy-to-make dielectrophoresis device and a preparation method thereof, and a method for making a dielectrophoresis composite film. Background Art

[0002] In recent years, piezoelectric nanogenerators (PENG) and triboelectric nanogenerators (TENG) have become the hot spots of international research. They are one of the effective methods to convert mechanical energy in the environment into electrical energy. The dielectric elastomer prepared by composite dielectric, ferroelectric and piezoelectric materials with organic matter can effectively improve the output performance of the PENG piezoelectric layer or TENG friction layer in its device. In the process of composite organic and inorganic materials, the functional materials are generally deposited at the bottom of the organic film layer in the organic matter, which greatly affects the electrical properties of the dielectric material in the organic matter. The researchers use the dielectrophoresis method to arrange the dielectric materials in the organic matter in an orderly manner, thereby further improving the electrical output performance of the device. The facilities required by the researchers when using dielectrophoresis technology are relatively complex, and the thickness, area, etc. of the composite film of a fixed mold cannot be changed when it is used. If it needs to be changed, a new mold must be made again, and the process is complicated and the cost is high. Summary of the invention

[0003] In view of the above-mentioned deficiencies in the prior art, the present invention provides a dielectrophoresis device that is easy to control and manufacture, a method for manufacturing the same, and a method for manufacturing a dielectrophoresis composite membrane.

[0004] The technical solution adopted by the present invention is: A dielectrophoresis device that is easy to control and manufacture, comprising a first conductive glass, a second conductive glass, a conductive electrode and an organosilicon polymer coating; the first conductive glass comprises a first glass substrate and a first conductive layer; the first conductive layer is located at one end face of the first glass substrate, and a conductive electrode is arranged between the first conductive layer and the other end face of the first glass substrate; the second conductive glass comprises a second glass substrate and a second conductive layer; the second conductive layer is located at one end face of the second glass substrate, and a conductive electrode is arranged between the second conductive layer and the other end face of the second glass substrate; the first conductive layer and the second conductive layer are arranged oppositely; the organosilicon polymer coating is located between the first conductive layer and the second conductive layer, and the organosilicon polymer coating is provided with a dielectrophoresis solvent filling position, and the dielectrophoresis solvent filling position and the first conductive layer and the second conductive layer constitute a dielectrophoresis solvent filling cavity. The conductive glass uses commercially available transparent conductive glass, and a conductive electrode is pasted on the conductive glass as an electrode for providing an alternating electric field, and a spin-coated organosilicon polymer coating is used as a processing mold for the dielectrophoresis composite film to be manufactured. The dielectrophoresis composite film can be directly obtained by the dielectrophoresis device.

[0005] As a preferred solution of the present invention, the first conductive glass and / or the second conductive glass is FTO transparent conductive glass or ITO transparent conductive glass.

[0006] As a preferred embodiment of the present invention, the organic silicon polymer coating is a PDMS coating. The PDMS coating is obtained by spin coating using a PDMS organic solvent, wherein the PDMS organic solvent used is obtained by mixing a commercially available PDMS with a curing agent and a main agent in a ratio of 1:10, stirring the mixture, and filtering the gas in the PDMS in a vacuum container for about 30 minutes.

[0007] As a preferred solution of the present invention, the organic silicon polymer coating is PDMS organic solvent spin-coated onto the first conductive layer or the second conductive layer.

[0008] As a preferred solution of the present invention, the conductive electrode is a conductive copper tape, which is pasted to the edge of the first conductive layer, folded and pasted to the other end face of the first glass substrate; or the conductive electrode is pasted to the edge of the second conductive layer, folded and pasted to the other end face of the second glass substrate. The conductive layer is directly extended to the outer end face of the glass substrate using a cheap conductive copper tape purchased on the market as an electrode for introducing an alternating electric field.

[0009] As a preferred solution of the present invention, the conductive electrode on the first conductive glass and the conductive electrode on the second conductive glass are not on the same side.

[0010] The present invention also provides a method for manufacturing a dielectrophoresis device that is easy to control and manufacture, the steps being: S1, preparing a first conductive glass and a second conductive glass; purchasing FTO transparent conductive glass or ITO transparent conductive glass on the market, and cutting them into glass sheets of required sizes according to actual needs.

[0011] S2, the first conductive glass and the second conductive glass are respectively attached with conductive electrodes; The conductive electrode uses a conductive copper tape, one end of the conductive copper tape is pasted on the edge of the first conductive layer of the first conductive glass, and the other end of the conductive copper tape is folded toward the first glass substrate of the first conductive glass and then pasted on the first glass substrate; One end of the conductive copper tape is pasted on the edge of the second conductive layer of the second conductive glass, and the other end of the conductive copper tape is folded toward the second glass substrate of the second conductive glass and then pasted on the second glass substrate.

[0012] S3, spin coating to prepare a PDMS coating on the second conductive layer, and hollowing out the PDMS coating to form a DEP solvent filling position, and the second conductive layer and the DEP solvent filling position form a DEP solvent filling groove; The specific steps are: A PDMS organic solvent is prepared and the PDMS organic solvent is vacuum filtered to remove the gas in the PDMS organic solvent; the PDMS organic solvent used is obtained by mixing commercially available PDMS with a curing agent and a main agent in a ratio of 1:10, and then fully stirring, and filtering the gas in the PDMS in a vacuum container for about 30 minutes.

[0013] The spin coating speed is determined according to the thickness of the dielectrophoresis composite film, and the PDMS organic solvent is coated on the second conductive layer 22 according to the spin coating speed.

[0014] After spin coating, the PDMS coating is allowed to stand for air drying and solidification to obtain; specifically, the coating is allowed to stand for 10-30 minutes and then solidified in a forced air drying oven for 1-2 hours before being taken out.

[0015] At room temperature, the PDMS coating is hollowed out according to the size of the dielectrophoresis composite film to form a dielectrophoresis solvent filling position.

[0016] A region of the required size of the dielectrophoresis composite film was dug out from the middle of the PDMS coating using a blade to form a cavity as a filling position for the dielectrophoresis solvent.

[0017] S4, the first conductive layer of the first conductive glass is placed on the PDMS coating, and the dielectrophoresis solvent filling position and the first conductive layer and the second conductive layer form a dielectrophoresis solvent filling cavity.

[0018] The present invention also provides a method for making a dielectrophoresis composite film using the dielectrophoresis device prepared above, after obtaining a dielectrophoresis solvent filling tank, filling the dielectrophoresis solvent into the dielectrophoresis solvent filling tank, wherein the dielectrophoresis solvent is a solvent compounded with PDMS; Then, the first conductive layer of the first conductive glass is placed on the PDMS coating layer and the dielectrophoresis solvent is pressed, and after the bubbles in the dielectrophoresis solvent are filtered out, the first conductive layer is fixed on the PDMS coating layer to obtain a dielectrophoresis device filled with the dielectrophoresis solvent, which presents a sandwich structure as a whole; The dielectrophoresis device filled with dielectrophoresis solvent is subjected to dielectrophoresis, and the dielectrophoresis solvent is heated to solidify under an AC high voltage environment after the dielectrophoresis is completed. After solidification, the heating and high voltage are turned off; and the dielectrophoresis composite film is peeled off from the dielectrophoresis solvent filling tank at room temperature to obtain the dielectrophoresis composite film.

[0019] The specific process is to connect two conductive electrodes of the dielectrophoresis device filled with dielectrophoresis solvent to the high-voltage amplifier, the high-voltage amplifier is controlled by the signal generator, and the signal generator can control the output voltage, output waveform and output frequency of the high-voltage amplifier; and place the dielectrophoresis device filled with dielectrophoresis solvent into a safety container and then onto a heating table; the signal generator controls the high-voltage amplifier to make the dielectrophoresis device filled with dielectrophoresis solvent perform dielectrophoresis; after the dielectrophoresis is completed, the heating device is turned on at a heating temperature of 80-100°C, so that the dielectrophoresis solvent is cured for 1-2 hours under an AC high voltage environment, and then the heating device and the high-voltage amplifier are turned off; after curing, a dielectrophoresis composite film is obtained, which is peeled off from the second conductive glass at room temperature.

[0020] Beneficial effects: The present invention uses transparent conductive glass pasted with conductive copper tape as a substrate for providing a dielectrophoretic alternating electric field, and uses commercial PDMS spin-coated on a conductive layer of a transparent conductive glass as a mold cavity for producing a dielectrophoretic composite film. The dielectrophoretic composite film is simple, easy to manufacture, and has low cost. The dielectric composite film with controllable thickness and controllable area and excellent practical use effect (the dielectric material is orderly arranged in the organic matter) can be quickly prepared. Based on the research on the preparation of dielectric elastomers by dielectrophoresis technology, the present invention has developed a dielectrophoresis device with a simple manufacturing process, low cost, and effectively controllable thickness and area of ​​the composite film layer through actual experimental verification. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic structural diagram of the dielectrophoresis device of the present invention.

[0023] Figure 2 This is a diagram showing the state of use of the dielectrophoresis device of the present invention when performing dielectrophoresis.

[0024] Figure 3 is a micrograph of the composite membrane without dielectrophoresis.

[0025] Figure 4 This is a micrograph of the dielectrophoretic composite membrane of the present invention.

[0026] Figure 5 The figure is a comparison chart of the transmittance of the non-dielectrophoretic composite film and the dielectrophoretic composite film of the present invention.

[0027] Figure 6 A comparison chart of the voltage output performance of the friction nanogenerator using a non-dielectrophoretic composite film and a dielectrophoretic composite film. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] The present invention provides a dielectrophoresis device which is easy to control and manufacture, such as Figure 1 As shown, it includes a first conductive glass 1, a second conductive glass 2, a conductive electrode 3 and an organic silicon polymer coating 4; the first conductive glass 1 and the second conductive glass 2 are commercially available transparent conductive glass, usually FTO transparent conductive glass or ITO transparent conductive glass, and the two conductive glasses can be the same or different. This embodiment takes the same as an example for demonstration.

[0030] The first conductive glass 1 includes a first glass substrate 11 and a first conductive layer 12; the first conductive layer adopts an FTO conductive layer or an ITO conductive layer; the first conductive layer 12 is located at one end surface of the first glass substrate 11, and a conductive electrode 3 is arranged between the first conductive layer 12 and the other end surface of the first glass substrate 11; the conductive electrode 3 used is a conductive copper tape, one end of the conductive electrode 3 is adhered to the edge of the first conductive layer, and then folded and adhered to the outer end surface of the first glass substrate, and the part of the conductive copper tape located at the outer end surface of the first glass substrate serves as an electrode of the alternating electric field.

[0031] The second conductive glass 2 includes a second glass substrate 21 and a second conductive layer 22; similarly, the second conductive layer adopts an FTO conductive layer or an ITO conductive layer; the second conductive layer 22 is located at one end face of the second glass substrate 21, and a conductive electrode 3 is provided between the second conductive layer 22 and the other end face of the second glass substrate 21; the conductive electrode 3 used is a conductive copper tape, which is pasted to the edge of the second conductive layer and then folded and pasted to the outer end face of the second glass substrate, and the portion of the conductive copper tape located at the outer end face of the second glass substrate serves as another electrode of the alternating electric field.

[0032] For the convenience of distinction, the conductive electrode of the first conductive glass and the conductive electrode of the second conductive glass are not located on the same side, but are arranged on two sides.

[0033] In order to obtain a dielectrophoretic composite film and facilitate the tearing off of the dielectrophoretic composite film, the present embodiment prepares a silicone polymer coating 4 on the second conductive layer 22. The present embodiment obtains the PDMS coating by spin coating a PDMS organic solvent. The PDMS organic solvent used is commercially available PDMS, which is mixed with a curing agent and a main agent in a ratio of 1:10, and then fully stirred, and the gas in the PDMS is filtered out in a vacuum container for about 30 minutes.

[0034] A blade is used to dig out an area of ​​the required size of the dielectrophoresis composite film in the middle of the PDMS coating to form a cavity as the dielectrophoresis solvent filling position 41, the second conductive layer serves as the bottom of the dielectrophoresis solvent filling position, the first conductive glass is placed on the upper layer, and the first conductive layer 12 and the second conductive layer 22 are opposite to each other, so that the silicone polymer coating 4 is located between the first conductive layer 12 and the second conductive layer 22, and the dielectrophoresis solvent filling position and the first conductive layer and the second conductive layer constitute the dielectrophoresis solvent filling cavity.

[0035] The present invention also provides an embodiment of a method for manufacturing a dielectrophoresis device that is easy to control and manufacture, the steps being: S1, preparing a first conductive glass 1 and a second conductive glass 2; purchasing FTO transparent conductive glass or ITO transparent conductive glass on the market, and cutting them into glass sheets of required sizes according to actual needs.

[0036] S2, the first conductive glass 1 and the second conductive glass 2 are respectively attached with conductive electrodes 3; The conductive electrode 3 uses a conductive copper tape, one end of which is pasted on the edge of the first conductive layer 12 of the first conductive glass, and the other end of the conductive copper tape is folded toward the first glass substrate 11 of the first conductive glass and then pasted on the first glass substrate 11; One end of the conductive copper tape is pasted on the edge of the second conductive layer 22 of the second conductive glass, and the other end of the conductive copper tape is folded toward the second glass substrate 21 of the second conductive glass and then pasted on the second glass substrate 21 .

[0037] S3, spin coating to prepare a PDMS coating on the second conductive layer 22, and hollowing out the PDMS coating to form a DEP solvent filling position, so that the second conductive layer 22 and the DEP solvent filling position form a DEP solvent filling groove; The specific steps are: A PDMS organic solvent is prepared and the PDMS organic solvent is vacuum filtered to remove the gas in the PDMS organic solvent; the PDMS organic solvent used is obtained by mixing commercially available PDMS with a curing agent and a main agent in a ratio of 1:10, and then fully stirring, and filtering the gas in the PDMS in a vacuum container for about 30 minutes.

[0038] The spin coating speed is determined according to the thickness of the dielectrophoresis composite film, and the PDMS organic solvent is coated on the second conductive layer 22 according to the spin coating speed.

[0039] After spin coating, the PDMS coating is allowed to stand for air drying and solidification to obtain; specifically, the coating is allowed to stand for 10-30 minutes and then solidified in a forced air drying oven for 1-2 hours before being taken out.

[0040] At room temperature, the PDMS coating is hollowed out according to the size of the dielectrophoresis composite film to form a dielectrophoresis solvent filling position.

[0041] A region of the required size of the dielectrophoresis composite film was dug out from the middle of the PDMS coating using a blade to form a cavity as a filling position for the dielectrophoresis solvent.

[0042] S4, the first conductive layer 11 of the first conductive glass is placed on the PDMS coating, and the dielectrophoresis solvent filling position and the first conductive layer and the second conductive layer form a dielectrophoresis solvent filling cavity.

[0043] After the dielectrophoresis device is obtained, it is mainly used to prepare a dielectrophoresis composite membrane. The present invention also provides a method for preparing a dielectrophoresis composite membrane using the dielectrophoresis device prepared above, such as Figure 2 As shown, after obtaining the dielectrophoresis solvent filling tank, the dielectrophoresis solvent is filled into the dielectrophoresis solvent filling tank, wherein the dielectrophoresis solvent is a solvent compounded with PDMS; Then, the first conductive layer 11 of the first conductive glass is placed on the PDMS coating and the dielectrophoresis solvent is pressed, and after filtering out bubbles in the dielectrophoresis solvent, the first conductive layer 11 is fixed on the PDMS coating to obtain a dielectrophoresis device filled with the dielectrophoresis solvent, which presents a sandwich structure as a whole; The two conductive electrodes of the dielectrophoresis device filled with dielectrophoresis solvent are connected to the high-voltage amplifier device, and the high-voltage amplifier device is regulated by a signal generator, and the signal generator can regulate the output voltage, output waveform, and output frequency of the high-voltage amplifier device; the dielectrophoresis device filled with the dielectrophoresis solvent is placed in a safety container and then placed on a heating table; the signal generator regulates the high-voltage amplifier device to make the dielectrophoresis device filled with the dielectrophoresis solvent perform dielectrophoresis; 1-2 hours before the end of the dielectrophoresis, the heating device is turned on at a heating temperature of 80-100° C., and the dielectrophoresis solvent is cured for 1-2 hours under an AC high voltage environment, and then the heating device and the high-voltage amplifier device are turned off; after curing, a dielectrophoresis composite film is obtained, which is peeled off from the second conductive glass at room temperature.

[0044] Micrograph of the composite membrane without dielectrophoresis Figure 3 As shown in the micrograph of the dielectrophoresis composite membrane Figure 4 As shown, the size and thickness of the composite film without dielectrophoresis and the prepared dielectrophoresis composite film are the same, and the transmittance comparison diagram of the two is as shown in Figure 5 As shown in the figure, after applying the two to the friction nanogenerator, the voltage output performance is compared. Figure 6 As shown, the transmittance of the composite film without dielectrophoresis is about 0.65%, and its output voltage as a triboelectric layer (15% dielectric composite ratio) is about 130V; the transmittance of the composite film with dielectrophoresis is about 43.2%, and its output voltage as a triboelectric layer (15% dielectric composite ratio) is about 255V. By comparison, it can be seen that the dielectrophoresis composite film prepared by the dielectrophoresis device manufactured by the present application can greatly improve the orderliness of the arrangement of inorganic materials in organic matter, and its transmittance is higher and the voltage output performance is better.

[0045] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0046] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A dielectrophoresis device that is easy to control and manufacture, characterized in that: The invention comprises a first conductive glass (1), a second conductive glass (2), a conductive electrode (3) and an organic silicon polymer coating (4); the first conductive glass (1) comprises a first glass substrate (11) and a first conductive layer (12); the first conductive layer (12) is located on one end surface of the first glass substrate (11), and a conductive electrode (3) is provided between the first conductive layer (12) and the other end surface of the first glass substrate (11); the second conductive glass (2) comprises a second glass substrate (21) and a second conductive layer (22); the second conductive layer (22) is located on one end surface of the second glass substrate (21), and a conductive electrode (3) is provided between the second conductive layer (22) and the other end surface of the second glass substrate (21); the first conductive layer (12) and the second conductive layer (22) are arranged opposite to each other; the organic silicon polymer coating (4) is located between the first conductive layer (12) and the second conductive layer (22), and the organic silicon polymer coating (4) is provided with a dielectrophoresis solvent filling position, and the dielectrophoresis solvent filling position and the first conductive layer and the second conductive layer form a dielectrophoresis solvent filling cavity.

2. The easy-to-control and easy-to-manufacture dielectrophoresis device according to claim 1, characterized in that: The first conductive glass (1) and / or the second conductive glass (2) is FTO transparent conductive glass or ITO transparent conductive glass.

3. The easy-to-control and easy-to-manufacture dielectrophoresis device according to claim 2, characterized in that: The organic silicon polymer coating (4) is a PDMS coating.

4. The easy-to-control and easy-to-manufacture dielectrophoresis device according to claim 3, characterized in that: The organic silicon polymer coating (4) is a PDMS organic solvent spin-coated onto the first conductive layer or the second conductive layer.

5. The easy-to-control and easy-to-manufacture dielectrophoresis device according to claim 2, characterized in that: The conductive electrode (3) is a conductive copper tape, and the conductive electrode (3) is adhered to the edge of the first conductive layer, folded and adhered to the other end surface of the first glass substrate; or the conductive electrode (3) is adhered to the edge of the second conductive layer, folded and adhered to the other end surface of the second glass substrate.

6. The easy-to-control and easy-to-manufacture dielectrophoresis device according to claim 5, characterized in that: The conductive electrode (3) on the first conductive glass (1) and the conductive electrode (3) on the second conductive glass (2) are not on the same side.

7. A method for manufacturing a dielectrophoresis device that is easy to control and manufacture, characterized in that: The steps are: S1, preparing a first conductive glass (1) and a second conductive glass (2); S2, the first conductive glass (1) and the second conductive glass (2) are respectively attached with conductive electrodes (3); The conductive electrode (3) uses a conductive copper tape, one end of the conductive copper tape is adhered to the edge of the first conductive layer (12) of the first conductive glass, and the other end of the conductive copper tape is folded toward the first glass substrate (11) of the first conductive glass and then adhered to the first glass substrate (11); One end of a conductive copper tape is adhered to the edge of the second conductive layer (22) of the second conductive glass, and the other end of the conductive copper tape is folded toward the second glass substrate (21) of the second conductive glass and then adhered to the second glass substrate (21); S3, preparing a PDMS coating by spin coating on the second conductive layer (22), and hollowing out the PDMS coating to form a dielectrophoresis solvent filling position, wherein the second conductive layer (22) and the dielectrophoresis solvent filling position form a dielectrophoresis solvent filling groove; S4, the first conductive layer (11) of the first conductive glass is placed on the PDMS coating, and the dielectrophoresis solvent filling position, the first conductive layer and the second conductive layer form a dielectrophoresis solvent filling cavity.

8. The method for manufacturing the easy-to-control and easy-to-manufacture dielectrophoresis device according to claim 7, characterized in that: In step S3, the specific steps are: preparing a PDMS organic solvent and performing vacuum filtration on the PDMS organic solvent to remove gas in the PDMS organic solvent; Determine a spin coating speed according to the thickness of the dielectrophoresis composite film, and apply a PDMS organic solvent on the second conductive layer (22) according to the spin coating speed; After spin coating, the PDMS coating was obtained by air drying and curing. At room temperature, the PDMS coating is hollowed out according to the size of the dielectrophoresis composite film to form a dielectrophoresis solvent filling position.

9. A method for preparing a dielectrophoresis composite membrane using the dielectrophoresis device prepared according to claim 8, characterized in that: After obtaining a dielectrophoresis solvent filling tank, the dielectrophoresis solvent is filled into the dielectrophoresis solvent filling tank; then, a first conductive layer (11) of a first conductive glass is placed on the PDMS coating layer and the dielectrophoresis solvent is pressed, and after filtering out bubbles in the dielectrophoresis solvent, the first conductive layer (11) is fixed on the PDMS coating layer to obtain a dielectrophoresis device filled with the dielectrophoresis solvent; the dielectrophoresis device filled with the dielectrophoresis solvent is subjected to dielectrophoresis, and after the dielectrophoresis is completed, the dielectrophoresis solvent is heated to solidify under an alternating high voltage environment, and after solidification, the heating and high voltage are turned off; and the dielectrophoresis composite film is peeled off from the dielectrophoresis solvent filling tank at room temperature to obtain the dielectrophoresis composite film.

10. The method for preparing a dielectrophoretic composite membrane according to claim 9, characterized in that: The two conductive electrodes of the dielectrophoresis device filled with dielectrophoresis solvent are connected to the high-voltage amplifier, and the high-voltage amplifier is controlled by the signal generator; the dielectrophoresis device filled with dielectrophoresis solvent is placed in a safety container and then placed on a heating table; the signal generator controls the high-voltage amplifier to make the dielectrophoresis device filled with dielectrophoresis solvent perform dielectrophoresis; after the dielectrophoresis is completed, the heating device is turned on at a heating temperature of 80-100° C., and the dielectrophoresis solvent is cured for 1-2 hours under an AC high voltage environment, and then the heating device and the high-voltage amplifier are turned off; after curing, a dielectrophoresis composite film is obtained, which is peeled off from the second conductive glass at room temperature.

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