Gradient transition composite tantalum carbide coating and preparation method thereof

By depositing a gradient transition composite tantalum carbide coating on the graphite matrix, the problem of the coating being prone to cracking is solved, and process control is simplified, improving the thermal shock resistance and adhesion of the coating.

CN119710620APending Publication Date: 2025-03-28SHANDONG GUOJING NEW MATERIAL CO LTD
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Patent Information

Application Number
CN202411971523.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-03-28

AI Technical Summary

Technical Problem

In the prior art, the difference in thermal expansion coefficient between the tantalum carbide coating and the graphite matrix causes the coating to crack easily and affect performance. At the same time, the multi-component CVD co-deposition process is complex, the component control is difficult, and the process parameter optimization is time-consuming and costly.

Method used

The gradient transition composite tantalum carbide coating is prepared by high-temperature chemical vapor deposition method. The coating consists of a pyrolytic carbon coating, a tantalum carbide-pyrolytic carbon composite coating and a tantalum carbide coating. The difference in thermal expansion coefficients is alleviated through the gradient transition structure, and the process parameter optimization is simplified by controlling the gas flow and temperature during the deposition process.

Benefits of technology

It effectively improves the adhesion between the coating and the substrate, alleviates the cracking problem caused by the difference in thermal expansion coefficient, improves thermal shock resistance, simplifies process control, and reduces production costs.

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Abstract

The invention belongs to the technical field of semiconductors, and particularly relates to a gradient transition composite tantalum carbide coating and a preparation method thereof.The gradient transition composite tantalum carbide coating is located on the surface of a graphite substrate material and sequentially comprises a pyrolytic carbon coating, a tantalum carbide-pyrolytic carbon composite coating and a tantalum carbide coating from inside to outside; wherein the thermal expansion coefficient of the pyrolytic carbon coating is 2.5-4.5 * 10 <-6 > / K, the thermal expansion coefficient of the composite coating is 4.5-6.0 * 10 <-6 > / K, and the thermal expansion coefficient of the tantalum carbide coating is 6.1-8.0 * 10 <-6 > / K. According to the gradient transition structure of the coating, the problem that thermal expansion coefficients between the coating and a base body are not matched is solved, the thermal shock resistance of the coating is effectively improved, meanwhile, the pinning effect can be achieved, the adhesive force between the coatings is enhanced, and the service life of a product is prolonged; compared with a single tantalum carbide coating, crack accumulation and through holes cannot be generated.
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