High-power laser cavity surface coating device

Abstract

The invention relates to the technical field of laser coating, in particular to a high-power laser cavity surface coating device which comprises a box body, a vacuum chamber is arranged in the box body, a key removing station used for placing a laser bar is arranged in the vacuum chamber, a key removing accompanying strip located over the key removing station is arranged in the vacuum chamber, and the laser bar is placed in the key removing accompanying strip. The material of the de-bonding strip is the same as that of the laser bar, a plurality of activation strips are arranged on one side, facing the de-bonding station, of the de-bonding strip, the activation strips are made of Pt, an air blowing pipe is arranged between the de-bonding strip and the de-bonding station, and hydrogen is introduced into the air blowing pipe. Hydrogen blown out of the gas blowing pipe is rapidly dissociated into atomic state H + after encountering the activation strip, the atomic state H + has the energy of about 1 eV, has high reducibility and can rapidly reduce dangling bond molecules on the cavity surface, so that after oxygen molecules and water molecules on the surface are removed, the molecules can be pumped away along with a vacuum system under the vacuum condition, and the hydrogen is discharged out of the cavity surface. And a clean laser surface is left.

Description

Technical Field

[0001] This application relates to the technical field of laser coating, and in particular to a high-power laser cavity surface coating device. Background Art

[0002] In high-power and high-efficiency semiconductor lasers, the material design often contains a relatively high aluminum component. After cleavage, the aluminum dangling bonds exposed to the air are prone to combine with oxygen molecules and water molecules in the air, forming dangling bond reconstruction.

[0003] If this temporary reconstruction of dangling bonds is not removed, it will form absorption centers. These absorption centers are near the cavity surface of high-power semiconductor lasers. When the device operates at high power, due to absorption, it causes rapid temperature rise, resulting in the burning of the laser cavity surface; during long-term use, it is also a hidden danger leading to device failure. Summary of the Invention

[0004] In order to reduce the dangling bonds of oxygen molecules and water molecules on the laser cavity surface, this application provides a high-power laser cavity surface coating device.

[0005] The high-power laser cavity surface coating device provided by this application adopts the following technical solutions: A high-power laser cavity surface coating device includes a box body, a vacuum chamber is provided inside the box body, a debonding station for placing a laser bar is provided inside the vacuum chamber, a debonding spacer is provided directly above the debonding station inside the vacuum chamber, the material of the debonding spacer is the same as that of the laser bar, several activation bars are provided on the surface of the debonding spacer facing the debonding station, the activation bars are made of Pt, and a blow pipe is provided between the debonding spacer and the debonding station, and hydrogen gas is passed through the blow pipe.

[0006] By adopting the above technical solutions, the formation of dangling bonds on the cavity surface of semiconductor lasers is based on molecular adsorption, usually with a bond energy of about 1 eV, and the energy is very weak. Active substances with an energy of about 1 eV are required for removal. If the energy is too large, it will damage the cavity surface; if the energy is too small, it cannot play an effective role. The hydrogen gas blown out by the blow pipe quickly dissociates into atomic H ＋ , and this atomic H ＋ has an energy of about 1 eV, has high reducibility, can quickly reduce the dangling bond molecules on the cavity surface, and after removing the oxygen molecules and water molecules on the surface, under vacuum conditions, these molecules will be pumped away by the vacuum system, leaving a clean laser surface.

[0007] Preferably, a coating station is provided inside the vacuum chamber, a coating cavity is provided above the coating station, and a baffle for opening and closing the coating cavity is movably connected to the bottom of the coating cavity.

[0008] By adopting the above technical solution, the laser bar strip moves to the coating station after removing the hanging bonds at the debonding station. The baffle is opened, and a protective film is evaporated on the cavity surface of the laser bar strip in the coating cavity to fully protect the freshly treated cavity surface.

[0009] Preferably, a sample stage is rotatably connected in the vacuum chamber. The part of the sample stage facing the coating cavity is the coating station, and the part of the sample stage facing the debonding strip is the debonding station.

[0010] By adopting the above technical solution, the operator places the laser bar strip on the sample stage. The sample stage drives the laser bar strip to rotate, rotates the laser bar strip to the debonding station to remove the hanging bonds, and then rotates the laser bar strip to the coating station for coating, which is convenient to use.

[0011] Preferably, a fixture for placing the laser bar strip is provided on the sample stage, and a heating wire is provided in the sample stage opposite to the fixture.

[0012] By adopting the above technical solution, the heating wire heats the laser bar strip to ensure the effect during debonding and coating.

[0013] Preferably, the blow pipe includes a fixed pipe and a movable pipe. The fixed pipe is fixedly connected to the box body. The movable pipe is inserted into the fixed pipe and slidably connected to the fixed pipe. An impeller is rotatably connected in the fixed pipe. The impeller is coaxially and fixedly connected with a reciprocating lead screw. The end of the reciprocating lead screw is inserted into the movable pipe, and a connecting block threadedly connected to the reciprocating lead screw is fixed in the movable pipe.

[0014] By adopting the above technical solution, hydrogen is blown in from the fixed pipe and blown out from the movable pipe to spray on the activation strip for activation. When hydrogen passes through the impeller, it will drive the impeller to rotate. The impeller drives the reciprocating lead screw to rotate synchronously. The reciprocating lead screw drives the movable pipe to reciprocate through the connecting block, thereby driving the end of the movable pipe to reciprocate, further increasing the range of hydrogen blown out, improving the contact range between hydrogen and the activation strip and the laser bar strip, and improving the activation effect.

[0015] Preferably, a nozzle is rotatably connected to the end of the movable pipe away from the fixed pipe, and a plurality of inclined spray openings are formed on the side wall of the nozzle.

[0016] By adopting the above technical solution, hydrogen is sprayed out from the nozzle. When hydrogen is sprayed out from the spray opening, due to the inclined setting of the spray opening, hydrogen will drive the nozzle to rotate when it is sprayed out, thereby further increasing the range of hydrogen blown out.

[0017] Preferably, a positioning tube is vertically fixed on the fixed tube. The positioning tube is communicated with the fixed tube. A positioning rod facing the fixture is slidably connected in the positioning tube. The upper end of the positioning rod is fixed with a sealing plate slidably connected in the positioning tube. The lower end of the positioning rod passes through the positioning tube. A positioning spring is connected between the sealing plate and the lower end of the positioning tube. The fixture is provided with a positioning hole matching with the positioning rod. When the positioning rod is inserted into the positioning hole, the fixture is aligned with the key removal strip.

[0018] By adopting the above technical solution, when the sample stage rotates the laser bar to the key removal station, hydrogen is blown out from the blowing tube. At this time, the air pressure in the fixed tube increases, pressing the sealing plate to slide downward and pressing the lower end of the positioning rod into the positioning hole, thereby fixing the sample stage and ensuring the activation effect of the blown hydrogen.

[0019] Preferably, a collision prevention rod is slidably connected to the lower end of the positioning rod. The collision prevention rod and the positioning rod are connected by a collision prevention spring. An inclined collision prevention chamfer is circumferentially arranged on the outer side of the upper end of the fixture. When the positioning rod is at the lowest position and the collision prevention spring is in a natural state, the lower end of the collision prevention rod is aligned with the collision prevention chamfer.

[0020] By adopting the above technical solution, when the sample stage rotates the laser bar to the key removal station, if the position of the laser bar is deviated, that is, when the positioning rod and the positioning hole are not aligned, manual adjustment is required to control the rotation of the sample stage to align the positioning rod and the positioning hole to ensure the activation effect. When the position of the laser bar is deviated, there will be two situations for the positional relationship between the positioning rod and the fixture. One is that the lower end of the positioning rod is located on the upper surface of the fixture but not aligned with the positioning hole. At this time, the collision prevention rod at the lower end of the positioning rod abuts against the upper surface of the fixture under the action of the collision prevention spring. At this time, the operator controls the rotation of the sample stage until the positioning rod is inserted into the positioning hole. The other is that the lower end of the positioning rod is located on the side of the fixture. At this time, the operator controls the rotation of the sample stage, and the collision prevention rod contacts the inclined collision prevention chamfer. The sample stage drives the fixture to continue rotating, and the collision prevention chamfer applies an upward extrusion force to the collision prevention rod until the lower end of the collision prevention rod is extruded to the upper surface of the fixture. The operator continues to control the rotation of the sample stage until the positioning rod is inserted into the positioning hole. The collision prevention rod and the collision prevention chamfer improve the flexibility of fixture positioning and are convenient for use.

[0021] In summary, the present application includes the following beneficial technical effects: Through the setting of the activation strip, when hydrogen encounters the activation strip, atomic hydrogen with an energy of about 1 eV can be generated ＋ , H ＋ impacts the dangling bonds to break them, thereby removing the dangling bonds on the cavity surface of the laser bar and improving the stability of the laser. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1It is a schematic diagram of the overall structure of the embodiment; Figure 2 It is a schematic diagram of the structures of the air blowing pipe and the fixture in the embodiment.

[0023] Description of the reference numerals: 1. Box body; 11. Vacuum chamber; 2. Debonding strip; 21. Activation strip; 3. Air blowing pipe; 31. Fixed pipe; 32. Movable pipe; 33. Impeller; 34. Reciprocating lead screw; 35. Connecting block; 36. Nozzle; 361. Spray orifice; 4. Coating chamber; 41. Baffle; 5. Sample stage; 51. Debonding station; 52. Coating station; 53. Heating wire; 6. Fixture; 61. Positioning hole; 62. Anti-collision chamfer; 7. Positioning pipe; 71. Positioning rod; 72. Sealing plate; 73. Positioning spring; 74. Anti-collision rod; 75. Anti-collision spring. Detailed implementation manners

[0024] The following further elaborates on the present application in detail in conjunction with all the drawings.

[0025] Embodiment

[0026] The embodiment of the present application discloses a high-power laser cavity surface coating device. Referring to Figure 1 , it includes a box body 1. A vacuum chamber 11 is opened in the box body 1. A sample stage 5 is horizontally rotatably connected in the vacuum chamber 11. A fixture 6 for fixing the laser bar is provided on the sample stage 5. A heating wire 53 opposite to the fixture 6 is provided in the sample stage 5. A debonding strip 2 and a coating chamber 4 are fixed in the vacuum chamber 11 above the sample stage 5. A baffle 41 for opening and closing the coating chamber 4 is movably connected to the bottom of the coating chamber 4. The laser bar is placed in the fixture 6. The debonding strip 2 removes the hanging keys on the cavity surface of the laser bar, and then a protective film is evaporated and deposited on the cavity surface through the coating chamber 4 to protect the cavity surface.

[0027] Referring to Figure 1 , the debonding strip 2 and the coating chamber 4 are arranged above the sample stage 5 along the radial direction of the sample platform. The part of the sample stage 5 opposite to the debonding strip 2 is the debonding station 51, and the part of the sample stage 5 opposite to the coating chamber 4 is the coating station 52. Since the debonding strip 2 and the coating chamber 4 are fixed in the vacuum chamber 11, and the sample stage 5 can rotate in the vacuum chamber 11, the debonding station 51 and the coating station 52 are not fixed areas on the sample stage 5. The operator fixes the laser bar in the fixture 6 and rotates the sample stage 5, and the laser bar can be rotated into the debonding station 51 or the coating station 52.

[0028] Referring to Figure 1, the material of the debonding auxiliary strip 2 is the same as that of the laser bar, such as being made of Si or GaAs. A number of activation strips 21 are fixed on the side of the debonding auxiliary strip 2 facing the debonding station 51, and the activation strips 21 are made of Pt. A blowpipe 3 is provided below the debonding auxiliary strip 2 and above the debonding station 51, and hydrogen gas is passed through the blowpipe 3. After the hydrogen gas blown out by the blowpipe 3 encounters the activation strip 21, it is quickly dissociated into atomic H ＋ , this atomic H ＋ has an energy of about 1 eV, has high reducibility, can quickly reduce the dangling bond molecules on the cavity surface, and thus after removing the surface oxygen molecules and water molecules, under vacuum conditions, these molecules will be pumped away by the vacuum system, leaving a clean surface of the laser

[0029] Refer to Figure 1 and Figure 2 , the blowpipe 3 includes a fixed pipe 31 and a movable pipe 32, and the fixed pipe 31 is fixed in the vacuum cavity. One end of the fixed pipe 31 passes through the box body 1 and is connected to an external gas cylinder, and the other end points to the debonding auxiliary strip 2. One end of the movable pipe 32 is inserted into the fixed pipe 31 and is slidably connected to the fixed pipe 31, and the other end is located between the debonding auxiliary strip 2 and the debonding station 51. Hydrogen gas is blown out from the gas cylinder, passes through the fixed pipe 31 and the movable pipe 32, and then is ejected from the end of the movable pipe 32. The movable pipe 32 reciprocally slides along the fixed pipe 31, increasing the range of the hydrogen gas blown out, thereby expanding the contact area between the hydrogen gas and the debonding auxiliary strip 2 and the laser bar, and improving the debonding effect

[0030] Refer to Figure 1 and Figure 2 , a impeller 33 is rotatably connected in the fixed pipe 31, the impeller 33 is coaxially and fixedly connected with a reciprocating lead screw 34, the end of the reciprocating lead screw passes through the movable pipe 32, and a connecting block 35 threadedly connected with the reciprocating lead screw 34 is fixed in the movable pipe 32. When the hydrogen gas is blown into the fixed pipe 31 and passes through the impeller 33, it will drive the impeller 33 to rotate, and the impeller 33 drives the reciprocating lead screw 34 to rotate synchronously. The reciprocating lead screw 34 drives the movable pipe 32 to reciprocally slide along the fixed pipe 31 through the connecting block 35, thereby increasing the blowing range of the hydrogen gas. And during the ventilation process of the hydrogen gas, the movable pipe 32 can reciprocally slide by itself without additional power, which is convenient to use

[0031] Refer to Figure 1 and Figure 2 , a spray head 36 is rotatably connected to the end of the movable pipe 32 away from the fixed pipe 31, and a number of inclined spray openings 361 are provided on the side wall of the spray head 36. When the hydrogen gas is ejected from the inclined spray openings 361, it will drive the spray head 36 to rotate, so as to further increase the range of the hydrogen gas blown out. Moreover, when the hydrogen gas is used for debonding, two steps are required. First, the hydrogen gas needs to impact on the debonding auxiliary strip 2 to form atomic H ＋ , and then it hits the laser bar to remove the dangling bonds. Therefore, blowing the hydrogen gas unidirectionally towards the debonding auxiliary strip 2 or towards the laser bar will affect the debonding effect of the hydrogen gas

[0032] With the arrangement of the rotating nozzle 36, hydrogen is ejected from the rotating nozzle 36. While expanding the hydrogen blowing range, the blowing direction of hydrogen is more multi-directional, making the hydrogen gas flow between the debonding strip 2 and the laser bar strip more disordered, enabling hydrogen to reciprocate between the debonding strip 2 and the debonding station 51, thereby improving the debonding effect of hydrogen.

[0033] To ensure that hydrogen can reciprocate between the debonding strip 2 and the laser bar strip, the laser bar strip needs to be stable and directly opposite to the debonding strip 2 during the debonding process. If there are differences in the positions of the laser strip, it will affect the debonding effect of hydrogen on the laser bar strip. Therefore, a positioning mechanism is provided in the vacuum chamber 11 to improve the accuracy of the position of the laser bar strip during debonding.

[0034] Refer to Figure 1 and Figure 2 The positioning mechanism includes a positioning tube 7 that is vertically and fixedly connected to the fixed tube 31 in a communicating manner. A positioning rod 71 that faces the sample stage 5 is vertically slidably connected in the positioning tube 7. A sealing plate 72 that is slidably connected in the positioning tube 7 is fixed to the upper end of the positioning rod 71. The lower end of the positioning rod 71 passes through the positioning tube 7. A positioning spring 73 is connected between the sealing plate 72 and the lower end of the positioning tube 7. When the positioning spring 73 is in its natural state, the upper end of the positioning rod 71 is located above the fixture 6. A positioning hole 61 that cooperates with the positioning rod 71 is provided on the fixture 6. When the positioning rod 71 is inserted into the positioning hole 61, the fixture 6 is directly opposite to the debonding strip 2.

[0035] Refer to Figure 1 and Figure 2 The laser bar strip is fixed in the fixture 6. The rotation of the sample stage 5 causes the laser bar strip to be located below the debonding strip 2. Hydrogen is blown into the fixed tube 31, increasing the air pressure in the fixed tube 31 and squeezing the sealing plate 72 downward, causing the sealing plate 72 and the positioning rod 71 to move downward until the lower end of the positioning rod 71 is inserted into the positioning hole 61, thereby fixing the fixture 6. At this time, the fixture 6 is directly opposite to the debonding strip 2, and hydrogen debonds the laser bar strip, ensuring the stability and position accuracy of the fixture 6. Moreover, when hydrogen is ejected, the positioning rod 71 can fall by itself to clamp and limit the fixture 6, without the need for additional operations, which is convenient to use.

[0036] Refer to Figure 1 and Figure 2 A collision prevention rod 74 is slidably connected to the lower end of the positioning rod 71. The collision prevention rod 74 and the positioning rod 71 are connected by a collision prevention spring 75. An inclined collision prevention chamfer 62 is provided circumferentially on the outer side of the upper end of the fixture 6. When the positioning rod 71 is at the lowest position and the collision prevention spring 75 is in its natural state, the lower end of the collision prevention rod 74 is directly opposite to the collision prevention chamfer 62.

[0037] If the sample stage 5 is rotated so that the fixture 6 is not completely aligned with the debonding strip 2, the positioning rod 71 and the positioning hole 61 are offset. At this time, the hydrogen is blown out and the positioning rod 71 cannot be inserted into the positioning hole 61. The sample stage 5 needs to be rotated further to calibrate the position of the fixture 6. The positioning rod 71 and the positioning hole 61 are offset. There are two situations for the positional relationship between the positioning rod 71 and the fixture 6: first, the lower end of the positioning rod 71 is located on the upper surface of the fixture 6, but offset from the positioning hole 61; second, the lower end of the positioning rod 71 is not on the fixture 6, that is, the positioning rod 71 and the fixture 6 are completely offset.

[0038] When the positioning rod 71 is in the first condition, the lower end of the anti-collision rod 74 contacts the upper surface of the clamp 6, and the anti-collision spring 75 is in a compressed state. At this time, the operator only needs to continue to rotate the sample stage 5 and adjust the position of the clamp 6 until the positioning rod 71 is aligned with the positioning hole 61 and the positioning rod 71 is inserted into the positioning hole 61.

[0039] When the positioning rod 71 is in the second condition, the operator rotates the sample stage 5 until the lower end of the anti-collision rod 74 contacts the anti-collision chamfer 62 on the side of the clamp 6. The operator continues to control the rotation of the sample stage 5, and the inclined anti-collision chamfer 62 applies an upward squeezing force to the anti-collision rod 74, so that the anti-collision rod 74 gradually moves upward until the anti-collision rod 74 contacts the upper surface of the clamp 6. At this time, the positioning rod 71 returns to the first condition, and the operator can operate according to the first condition.

[0040] Therefore, no matter whether the positioning rod 71 is in the first state or the second state, when the operator calibrates the fixture 6, he only needs to control the rotation of the sample stage 5. The only difference is the rotation angle, which is convenient for operation.

[0041] The implementation principle of a high-power laser cavity surface coating device in the embodiment of the present application is as follows: the operator puts the laser bar into the fixture 6; the fixture 6 is placed on the sample stage 5, and the fixture 6 is heated to a temperature range of 100-280°C. The gas blowing pipe 3 sprays hydrogen with a flow rate of 50-100sccm; the ventilation time is 1min-30mins; the gas supply is stopped, and the laser bar is rotated to the bottom of the Si target to prepare a Si protective film with a thickness of 30-50A; then, other related film layers are prepared, or the laser bar is taken out.

[0042] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A high-power laser cavity surface coating device, comprising a housing (1), a vacuum chamber (11) is provided in the housing (1), a debonding station (51) for placing a laser bar is provided in the vacuum chamber (11), and the characteristics are: The vacuum chamber (11) is provided with a debonding strip (2) located directly above the debonding station (51), the material of the debonding strip (2) being the same as that of the laser bar, the debonding strip (2) is provided with a plurality of activation strips (21) on the side facing the debonding station (51), the activation strips (21) being made of Pt, and a blowing pipe (3) is provided between the debonding strip (2) and the debonding station (51), hydrogen passing through the blowing pipe (3).

2. The high-power laser cavity surface coating device according to claim 1, characterized in that: A coating station (52) is provided in the vacuum chamber (11), a coating cavity (4) is provided above the coating station (52), and a baffle (41) for opening and closing the coating cavity (4) is movably connected to the bottom of the coating cavity (4).

3. The high-power laser cavity surface coating device according to claim 2, characterized in that: A sample stage (5) is rotatably connected in the vacuum chamber (11); a portion of the sample stage (5) directly opposite to the coating chamber (4) is a coating station (52); and a portion of the sample stage (5) directly opposite to the debonding strip (2) is a debonding station (51).

4. The high-power laser cavity surface coating device according to claim 3, characterized in that: A fixture (6) for placing the laser bar is provided on the sample stage (5), and a heating wire (53) facing the fixture (6) is provided in the sample stage (5).

5. The high-power laser cavity surface coating device according to claim 4, characterized in that: The air blowing pipe (3) comprises a fixed pipe (31) and a movable pipe (32); the fixed pipe (31) is fixedly connected to the housing (1); the movable pipe (32) is inserted into the fixed pipe (31) and is slidably connected to the fixed pipe (31); an impeller (33) is rotatably connected to the fixed pipe (31); a reciprocating screw (34) is coaxially fixedly connected to the impeller (33); an end of the reciprocating screw is inserted into the movable pipe (32); and a connecting block (35) threadedly connected to the reciprocating screw (34) is fixedly provided in the movable pipe (32).

6. The high-power laser cavity surface coating device according to claim 5, characterized in that: The end of the movable pipe (32) away from the fixed pipe (31) is rotatably connected to a spray head (36), and a side wall of the spray head (36) is provided with a plurality of inclined spray ports (361).

7. The high-power laser cavity surface coating device according to claim 5, characterized in that: A positioning tube (7) is vertically fixed on the fixed tube (31), and the positioning tube (7) is connected to the fixed tube (31). A positioning rod (71) is slidably connected to the inside of the positioning tube (7) and faces the clamp (6). A sealing plate (72) slidably connected to the inside of the positioning tube (7) is fixed to the upper end of the positioning rod (71). The lower end of the positioning rod (71) passes through the positioning tube (7). A positioning spring (73) is connected between the sealing plate (72) and the lower end of the positioning tube (7). A positioning hole (61) matching with the positioning rod (71) is provided on the clamp (6). When the positioning rod (71) is inserted into the positioning hole (61), the clamp (6) is directly opposite to the key removal strip (2).

8. The high-power laser cavity surface coating device according to claim 7, characterized in that: The lower end of the positioning rod (71) is slidably connected to an anti-collision rod (74), and the anti-collision rod (74) and the positioning rod (71) are connected via an anti-collision spring (75). An inclined anti-collision chamfer (62) is circumferentially arranged on the outer side of the upper end of the clamp (6). When the positioning rod (71) is located at the bottom and the anti-collision spring (75) is in a natural state, the lower end of the anti-collision rod (74) is directly opposite to the anti-collision chamfer (62).

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