Deviation detection method, correction method, optical detection equipment and storage medium

Abstract

The invention discloses a deviation detection method, a correction method, optical detection equipment and a storage medium. The deviation detection method comprises the following steps: acquiring a first detection image of a to-be-detected piece on a bearing module, and acquiring a second detection image of the to-be-detected piece after the bearing module rotates by a preset angle; processing according to the first detection image and the second detection image to obtain an actual rotation angle of the bearing module; and determining the rotation angle deviation and / or the rotation center of the bearing module according to the preset angle and the actual angle. The actual rotation angle of the bearing module can be calculated according to the detection images before and after rotation, and the rotation angle deviation and the rotation center are accurately calculated according to the actual angle and the preset angle, so that the accuracy of the detection result is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection equipment, and particularly relates to a deviation detection method, a calibration method, an optical detection equipment and a storage medium. Background Art

[0002] Existing optical detection equipment realizes the rotation or displacement operation of a workpiece to be measured through a motion device. Currently, for rotation control, it is default that the rotation angle and rotation center of the motion device are accurate.

[0003] In actual use, due to the insufficient precision of the motion device, the rotation angle of the motion device will deviate, resulting in a deviation in the detection position when detecting the workpiece to be measured, leading to inaccurate detection results or an increase in subsequent calculation costs. Summary of the Invention

[0004] The main technical problem to be solved by the present invention is how to determine the accuracy of the rotation angle of the motion device.

[0005] According to a first aspect, in one embodiment, a deviation detection method for a motion device is provided. The motion device includes a carrying module and a rotating module. The carrying module is used to carry a workpiece to be measured, and the rotating module is used to drive the carrying module to rotate and drive the workpiece to be measured to rotate by the carrying module;

[0006] The deviation detection method includes:

[0007] Obtain a first detection image of the workpiece to be measured on the carrying module, and obtain a second detection image of the workpiece to be measured after the carrying module rotates a preset angle;

[0008] Process the first detection image and the second detection image to obtain the actual angle of rotation of the carrying module;

[0009] Determine the rotation angle deviation and / or rotation center of the carrying module according to the preset angle and the actual angle.

[0010] According to a second aspect, in one embodiment, a calibration method for a motion device is provided, including:

[0011] Obtain the rotation angle deviation of the rotating module of the motion device according to the deviation detection method described in the first aspect;

[0012] Calibrate the preset angle of rotation of the carrying module according to the rotation angle deviation.

[0013] According to a third aspect, in one embodiment, an optical detection equipment is provided, including: a motion device, an image detector, and a processing module;

[0014] The motion device includes a carrying module and a rotating module. The carrying module is used to carry the device under test, and the rotating module is used to drive the carrying module to rotate and drive the device under test to rotate by the carrying module;

[0015] The image detector is used to obtain the image of the device under test on the carrying module;

[0016] The processing module is used for:

[0017] Controlling the rotating module to drive the carrying module to rotate;

[0018] Controlling the image detector to obtain the first detection image of the device under test on the carrying module; and obtaining the second detection image of the device under test after the carrying module rotates a preset angle;

[0019] Calculating the actual angle of rotation of the carrying module according to the first detection image and the second detection image;

[0020] Determining the rotation angle deviation and / or the rotation center of the carrying module according to the preset angle and the actual angle.

[0021] According to the fourth aspect, in one embodiment, a computer-readable storage medium is provided. A program is stored on the medium, and the program can be executed by a processor to implement the method described in the first aspect.

[0022] According to the deviation detection method, correction method, optical detection device and storage medium of the above embodiments, by collecting the detection images of the device under test before and after the rotation of the carrying module, calculating the actual angle of rotation of the carrying module according to the detection images before and after the rotation, and accurately calculating the rotation angle deviation and the rotation center according to the actual angle and the preset angle, thereby ensuring the accuracy of the detection result. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of an optical detection device provided by an embodiment of the present application;

[0024] Figure 2 It is a flowchart of a deviation detection method provided by an embodiment of the present application;

[0025] Figure 3 It is a schematic diagram of the device under test before and after rotation provided by an embodiment of the present application;

[0026] Figure 4 It is a schematic diagram of the first detection image and the second detection image provided by an embodiment of the present application;

[0027] Figure 5 It is a schematic diagram of the first direction vector and the second direction vector provided by an embodiment of the present application;

[0028] Figure 6Flowchart of a calibration method provided by an embodiment of the present application.

[0029] Reference numerals: 10 - motion device; 11 - displacement module; 12 - rotation module; 13 - carrying module; 20 - image detector; 30 - processing module. Detailed implementation manners

[0030] The present invention will be further described in detail below in conjunction with the accompanying drawings through specific implementation manners. Similar elements in different implementation manners adopt related similar element numbers. In the following implementation manners, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification to avoid submerging the core part of the present application in excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and general technical knowledge in the art.

[0031] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various implementation manners. At the same time, the steps or actions in the method description can also be reordered or adjusted in a manner obvious to those skilled in the art. Therefore, the various sequences in the specification and drawings are only for clearly describing a certain embodiment and do not mean that they are necessary sequences unless it is stated that a certain sequence must be followed.

[0032] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meanings. And the "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connection (coupling).

[0033] In the field of optical detection, the surface to be measured of the object to be measured is scanned by an image detector to obtain a corresponding detection image, and the detection of preset features is performed based on the detection image. In actual detection, there are cases where the image capture of the surface to be measured cannot be completed in one imaging and multiple image acquisitions are required. Therefore, optical detection devices are generally configured with a motion device to move the area to be measured of the object to be measured into the imaging area of the image detector, and the motion mode can be by displacing and rotating the object to be measured.

[0034] Taking the wafer to be measured as an example, for a circular workpiece to be measured, the position of the area to be measured generally needs to be adjusted by means of displacement and rotation. During the rotational movement, due to reasons such as the machining accuracy and measurement accuracy of the motion device itself, there are deviations in the actual rotation angle and rotation center of the bearing module, and these deviations will affect the accuracy of the motion control of the workpiece to be measured, thereby affecting the detection result.

[0035] In the embodiments of the present application, by acquiring the detection images before and after rotation and calculating the rotation angle and rotation center based on the detection images, the motion accuracy of the motion device can be accurately determined, so as to perform correction or compensation in subsequent detections and improve the accuracy of the detection result.

[0036] As Figure 1 shown, the embodiments of the present application provide an optical detection device, which may include: a motion device 10, an image detector 20, and a processing module 30; in some embodiments, the optical detection device may further include an imaging module and a light source.

[0037] The motion device 10 may include a bearing module 13 and a rotation module 12. The bearing module 13 is used to carry the workpiece to be measured, and the rotation module 12 is used to drive the bearing module 13 to rotate and drive the workpiece to be measured to rotate by the bearing module 13.

[0038] In some embodiments, the motion device 10 may further include a displacement module 11. The displacement module 11 is used to drive the rotation module 12 to perform two-dimensional translational motion, and drive the bearing module 13 to move by the rotation module 12.

[0039] The image detector 20 is used to acquire the image of the workpiece to be measured on the bearing module 13.

[0040] The light source may include a detection light source and / or an ambient light source. When the workpiece to be measured is irradiated by the light source, corresponding signal lights such as reflected light and scattered light will be generated.

[0041] The imaging module may include an objective lens, an imaging lens group, and other optical elements, and is used to collect the signal light generated when the surface to be measured is irradiated by the light source and project the imaging of the signal light onto the image detector 20.

[0042] The processing module 30 is used to: control the rotation module 12 to drive the bearing module 13 to rotate; control the image detector 20 to acquire the first detection image of the workpiece to be measured on the bearing module 13; and acquire the second detection image of the workpiece to be measured after the bearing module 13 rotates a preset angle; process the first detection image and the second detection image to obtain the actual angle of rotation of the bearing module 13; determine the rotation angle deviation and / or rotation center of the bearing module 13 according to the preset angle and the actual angle.

[0043] In some embodiments, the processing module 30 may process the first detection image and the second detection image to obtain the actual angle of rotation of the carrier module 13, which may include:

[0044] The processing module 30 sets the rotation amounts of the carrier module 13 corresponding to the first detection image and the second detection image relative to the reference position as the first angle and the second angle respectively, and the rotation amount from the first angle to the second angle is the preset angle. The processing module 30 obtains the first coordinate information of at least two marking points on the workpiece to be measured at the first angle according to the first detection image. The processing module 30 obtains the second coordinate information of each marking point at the second angle according to the second detection image. The processing module 30 calculates the actual angle of rotation of the carrier module 13 according to the first coordinate information and the second coordinate information.

[0045] In some embodiments, the processing module 30 may calculate the actual angle of rotation of the carrier module 13 according to the first coordinate information and the second coordinate information, which may include:

[0046] The processing module 30 selects at least two marking points on the workpiece to be measured as reference marking points, and every two reference marking points form a group.

[0047] The processing module 30 obtains the first direction vector between two reference marking points of the carrier module 13 at the first angle according to the coordinates corresponding to the two reference marking points in a group in the first coordinate information.

[0048] The processing module 30 obtains the second direction vector between the two reference marking points of the carrier module 13 at the second angle according to the coordinates corresponding to the two reference marking points in the same group in the second coordinate information.

[0049] The processing module 30 calculates the actual angle of rotation of the carrier module 13 according to the first direction vector and the second direction vector corresponding to at least one group of reference marking points.

[0050] In some embodiments, the processing module 30 may determine the rotation center of the carrier module 13 according to the preset angle and the actual angle, which may include:

[0051] The processing module 30 calculates the rotation center corresponding to each reference marking point according to the rotation angle deviation, and the reference marking point is the marking point participating in the calculation of the rotation angle deviation.

[0052] The processing module 30 calculates the rotation center of the carrier module 13 according to the rotation centers corresponding to all reference marking points.

[0053] In summary, the optical detection device provided by the embodiments of the present application can detect the rotation deviation of the carrier module 13 through image detection, and can perform angle correction and / or correction of the spatial position of the component to be measured based on the calculated rotation angle deviation and / or rotation center of the carrier module 13, thereby improving the detection accuracy.

[0054] The following elaborates on the specific processes of the deviation detection method and the correction method for the optical detection device, as Figure 2 shown, a deviation detection method provided by an embodiment of the present application may include the following steps:

[0055] Step 1: Obtain a first detection image of the component to be measured on the carrier module 13, and obtain a second detection image of the component to be measured after the carrier module 13 rotates a preset angle.

[0056] For example, after the component to be measured is placed on the carrier module 13, a single image can be directly obtained as the first detection image, or after the rotation module 12 is controlled by the processing module 30 to rotate, a single image can be obtained as the first detection image. After obtaining the first detection image, the rotation module 12 is then controlled to rotate according to the preset angle, and after the rotation is completed, a single image is obtained as the second detection image.

[0057] Step 2: Process the first detection image and the second detection image to obtain the actual rotation angle of the carrier module 13. The processing module 30 can calculate the angle of the same marked points or features in the two detection images by obtaining the same marked points or features in the first detection image and the second detection image, thereby calculating the actual rotation angle of the carrier module 13.

[0058] In some embodiments, the component to be measured has preset features;

[0059] In step 1, after obtaining the first detection image of the component to be measured, it may further include:

[0060] Step 100: Detect the preset features according to the first detection image, and select at least two preset features as marked points.

[0061] For example, algorithms such as template matching or feature recognition can be used to perform matching and detection of preset features in the detection image. Taking a wafer as an example, crystal grains or cutting grooves can be detected and used as marked points in sequence.

[0062] Among them, taking a wafer as an example, the above-mentioned marked points or features can be crystal materials, cutting grooves, positioning grooves, or alignment marks for upper and lower layer alignment on the wafer. As Figure 3 shown, corresponding to before and after the rotation of the component to be measured, assume that there are preset marked points mark1 and mark2 on the surface of the component to be measured, as Figure 4As shown, the obtained first detection image and second detection image both have image information corresponding to the marking points mark1 and mark2.

[0063] For other types of components to be measured, the marking points can be set according to the type of the component to be measured, such as the corners, cutting lines, alignment marks, etc. of a square panel.

[0064] In some embodiments, step 2 may include:

[0065] Step 210: Set the rotation amounts of the carrier modules 13 corresponding to the first detection image and the second detection image relative to the reference position as the first angle and the second angle respectively, and the rotation amount from the first angle to the second angle is a preset angle.

[0066] For example, the rotation module 12 may have a rotational angle sensing component such as an encoder. The carrier module 13 is fixedly connected to the rotation module 12, and the processing module 30 obtains the rotation amount of the carrier module 13 by acquiring the rotational angle output by the rotation module 12. Therefore, when acquiring the first detection image and the second detection image, through the data output by the rotation module 12, the rotation amount of the carrier module 13 relative to the reference position can be obtained, and the corresponding rotation amounts are set as the first angle and the second angle. The difference in the rotation amounts between the first angle and the second angle corresponds to the preset angle, for example, 30 degrees.

[0067] Step 220: Obtain the first coordinate information of at least two marking points on the component to be measured at the first angle according to the first detection image.

[0068] Step 230: Obtain the second coordinate information of each marking point at the second angle according to the second detection image.

[0069] For example, by combining the motion coordinate system of the motion device 10 and the imaging coordinate system of the image detector 20, and performing conversion according to the pixel size and combining the two coordinate systems, the coordinate information of any pixel point in the motion coordinate system in the detection image can be obtained. Alternatively, the coordinate system of the carrier module 13 can also be used as the reference coordinate system, and by performing conversion according to the pixel size and combining the two coordinate systems, the coordinate information of any pixel point in the detection image in the coordinate system of the carrier module 13 can be obtained.

[0070] Regardless of which reference method is adopted, as Figure 5 shown, relative to the component to be measured and the carrier module 13, a coordinate system can be established based on the theoretical rotation center of the carrier module 13 to calculate the coordinate information of the marking point relative to the theoretical rotation center O.

[0071] Step 240: Calculate the actual angle of rotation of the carrier module 13 according to the first coordinate information and the second coordinate information.

[0072] However, due to the machining accuracy and measurement accuracy of the motion mechanism, on the one hand, the actual rotation center of the bearing module 13 may shift. For example, Figure 4 the O shown 1 is the actual rotation center of the bearing module 13, which has shifted compared to the theoretical rotation center O.

[0073] On the other hand, since the theoretical rotation angle of the bearing module 13 is read by obtaining the data output by the rotation module 12, due to the factor of measurement accuracy, there is a deviation between the theoretical angle and the actual angle of rotation of the bearing module 13. By the coordinate information of the marked points before and after rotation, the center of the circle can be determined through the midline, and the actual angle can be calculated through triangle calculation, or the actual angle can also be calculated by means of vector calculation, etc.

[0074] In some embodiments, step 240 may include:

[0075] Step 241, select at least two marked points on the test piece as reference marked points, and each two reference marked points form a group.

[0076] In fact, a test piece may have multiple marked points, and each two marked points form a group for calculation. According to the actual angles calculated from multiple groups, calculations such as averaging or median removal can be performed to obtain a more accurate actual angle.

[0077] Step 242, according to the coordinates corresponding to the two reference marked points in a group in the first coordinate information, obtain the first direction vector between the two reference marked points when the bearing module 13 is at the first angle.

[0078] Step 243, according to the coordinates corresponding to the two reference marked points in the same group in the second coordinate information, obtain the second direction vector between the two reference marked points when the bearing module 13 is at the second angle.

[0079] For example, the following formula can be used to calculate the direction vector:

[0080]

[0081]

[0082] Wherein, is the first direction vector, is the second direction vector, (x m1，θ1 , y m1，θ1 ) and (x m2，θ1 , y m2，θ1 ) are the coordinates corresponding to the two reference marked points in a group in the first coordinate information; (x m1，θ2 , y m1，θ2 ) and (x m2，θ2 , ym2，θ2 ) are the coordinates corresponding to two reference marker points in the same group in the second coordinate information.

[0083] Step 244: Calculate the actual rotation angle of the carrier module 13 according to the first direction vector and the second direction vector corresponding to at least one group of reference marker points.

[0084] In some embodiments, in step 244, it may include:

[0085] Use the following formula to calculate the actual angle of the carrier module 13:

[0086]

[0087] where, θ1 is the first angle; θ2 is the second angle; is the first direction vector, is the second direction vector, and α is the actual rotation angle of the carrier module 13.

[0088] Step 3: Determine the rotation angle deviation and / or rotation center of the carrier module 13 according to the preset angle and the actual angle.

[0089] In some embodiments, in step 3, to determine the rotation angle deviation of the carrier module 13 according to the preset angle and the actual angle, it may include:

[0090] Use the following formula to calculate the rotation angle deviation of the carrier module 13:

[0091] β = θ2 - θ1;

[0092] ΔT = β - α;

[0093] where, ΔT is the rotation angle deviation of the carrier module 13; β is the preset angle.

[0094] In some embodiments, in step 3, to determine the rotation center of the carrier module 13 according to the preset angle and the actual angle, it may include:

[0095] Step 320: Calculate the rotation center corresponding to each reference marker point according to the rotation angle deviation, and the reference marker points are the marker points participating in the calculation of the rotation angle deviation.

[0096] Step 330: Calculate the rotation center of the carrier module 13 according to the rotation centers corresponding to all reference marker points.

[0097] In some embodiments, step 320 may include:

[0098] Use the following formula to calculate the rotation center corresponding to each reference marker point:

[0099]

[0100] α = β + ΔT;

[0101] Wherein, x θ1 and y θ1 are the first coordinate information of the reference marking point at the first angle; x θ2 and y θ2 are the second coordinate information of the reference marking point at the second angle; ccx and ccy are the coordinate information of the rotation center corresponding to the reference marking point; α is the actual angle of rotation of the carrier module 13; β is the preset angle of rotation of the carrier module 13; △T is the rotation deviation angle.

[0102] In some embodiments, step 330 may include:

[0103] Calculating the average value of the rotation centers corresponding to all reference marking points as the rotation center of the carrier module 13.

[0104] For example, the rotation centers corresponding to the marking point mark1 and the marking point mark2 are:

[0105]

[0106]

[0107] Wherein, ccx 1 and ccy 1 are the rotation centers corresponding to the marking point mark1, and ccx 2 and ccy 2 are the rotation centers corresponding to the marking point mark2.

[0108] At this time, based on these two marking points, it can be calculated that:

[0109]

[0110] As Figure 6 shown, an embodiment of the present application also provides a calibration method for a motion device 10, which may include:

[0111] Step 10: Obtain the rotation angle deviation of the rotation module 12 of the motion device 10 according to the deviation detection method described in the above embodiment.

[0112] Step 20: Calibrate the preset angle of rotation of the carrier module 13 according to the rotation angle deviation.

[0113] For example, if the current preset angle is 30°, and the actual rotation angle obtained through the above deviation detection method is 29.9°, with a corresponding rotation angle deviation of 0.1 degree, then the preset angle is modified to 30.1° so that the actual rotation angle after calibration is 30°.

[0114] In some embodiments, in order to improve the correction of the rotation angle, experiments can be carried out by setting multiple preset angles to obtain the corresponding rotation angle deviation, and the relationship between the preset angle and the rotation angle deviation can be obtained.

[0115] In step 20, it may further include:

[0116] According to the current preset angle and the rotation angle deviation, determine the correction amount corresponding to the current preset angle and the rotation angle.

[0117] For example, when the current preset angle is 30°, the actual rotation angle is 29.9° obtained by the above deviation detection method, and the corresponding rotation angle deviation is 0.1 degree. Then the preset angle is modified to 30.1°. The actual rotation angle after correction may be 29.99°. Then, according to the above relationship, the calculated correction amount is 0.11° so that the actual rotation angle after correction is 30°.

[0118] In some embodiments, the correction method may further include:

[0119] Step 30: Obtain the rotation center of the rotation module 12 according to the deviation detection method described in the above embodiments.

[0120] Step 40: Based on the rotation center, correct the spatial position of the test piece on the carrier module 13.

[0121] In the detection items, it is generally default that the center of the test piece is aligned with the rotation center of the carrier module 13. Due to reasons such as installation accuracy and equipment accuracy, the center of the test piece may not be aligned with the actual rotation center of the carrier module 13, as Figure 5 shown by the deviation between O and O 1 In some detection items, it is required that the center of the test piece be aligned with the rotation center of the carrier module 13. For example, it is necessary to rely on the center of the test piece to divide the specific test area, such as edge detection. For these detection items, it is necessary to ensure that the center of the test piece is aligned with the actual rotation center of the carrier module 13.

[0122] Therefore, the correction method provided by the embodiments of the present application can correct the rotation angle of the carrier module and can also correct the position of the test piece on the carrier module, improving the accuracy of detection.

[0123] In summary, the deviation detection method provided by the embodiments of the present application can detect the rotation angle deviation and the actual rotation center of the current carrier module 13 through image detection, and can correct the preset angle of rotation of the carrier module 13 and correct the spatial position of the workpiece to be measured through a correction method, so as to reduce or eliminate the problems caused by the above rotation angle deviation and rotation center deviation in subsequent detections and improve the detection accuracy.

[0124] The optical detection device provided by the present application can implement the above deviation detection method and correction method, and can achieve a better detection effect.

[0125] Those skilled in the art can understand that all or part of the functions of the above methods can be implemented in a hardware manner or in a computer program manner. When all or part of the functions in the above embodiments are implemented in a computer program manner, the program can be stored in a computer-readable storage medium. The storage medium may include: read-only memory, random access memory, magnetic disk, optical disk, hard disk, etc. The above functions are implemented by a computer executing the program. For example, the program is stored in the memory of the device, and when the processor executes the program in the memory, the above all or part of the functions can be implemented. In addition, when all or part of the functions in the above embodiments are implemented in a computer program manner, the program can also be stored in a storage medium such as a server, another computer, magnetic disk, optical disk, flash drive or mobile hard disk, and saved to the memory of the local device by downloading or copying, or the system of the local device is updated. When the processor executes the program in the memory, the above all or part of the functions in the embodiments can be implemented.

[0126] This document has been described with reference to various exemplary embodiments. However, those skilled in the art will recognize that changes and modifications can be made to the exemplary embodiments without departing from the scope of this document. For example, various operating steps and the components used to perform the operating steps can be implemented in different ways according to a particular application or any number of cost functions associated with the operation of the system (e.g., one or more steps can be deleted, modified, or incorporated into other steps).

[0127] Although the principles of this document have been shown in various embodiments, many modifications of the structure, arrangement, proportion, elements, materials, and components, which are particularly applicable to specific environments and operating requirements, can be used without departing from the principles and scope of this disclosure. The above modifications and other changes or corrections will be included within the scope of this document.

[0128] The foregoing detailed description has been presented with reference to various embodiments. However, those skilled in the art will recognize that various modifications and changes can be made without departing from the scope of this disclosure. Accordingly, the consideration of this disclosure is to be illustrative in nature and not limiting in a restrictive sense, and all such modifications are intended to be included within its scope. Similarly, the advantages, other advantages, and solutions to problems of the various embodiments have been described above. However, benefits, advantages, solutions to problems, and any elements that produce these, or any element that makes them more explicit, should not be construed as critical, essential, or necessary. As used herein, the term "comprising" and any other variants thereof are non-exclusive inclusions, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but also other elements not expressly listed or inherent to the process, method, system, article, or apparatus. In addition, the term "coupled" and any other variants thereof as used herein refer to physical connection, electrical connection, magnetic connection, optical connection, communication connection, functional connection, and / or any other connection.

[0129] Those having skill in the art will recognize that many changes may be made in the details of the above-described embodiments without departing from the basic principles of the invention. Thus, the scope of the invention should be determined only by the claims.

Claims

1. A method for detecting deviation of a motion device, characterized in that, the motion device includes a carrying module and a rotating module, the carrying module is used to carry a test piece, and the rotating module is used to drive the carrying module to rotate and drive the test piece to rotate by the carrying module; the deviation detection method includes: acquiring a first detection image of the test piece on the carrying module, and acquiring a second detection image of the test piece after the carrying module rotates a preset angle; processing the first detection image and the second detection image to obtain the actual angle of rotation of the carrying module; determining the rotation angle deviation and / or rotation center of the carrying module according to the preset angle and the actual angle.

2. The method according to claim 1, characterized in that, processing the first detection image and the second detection image to obtain the actual angle of rotation of the carrying module, including: setting the rotation amounts of the carrying module corresponding to the first detection image and the second detection image relative to the reference position as a first angle and a second angle respectively, and the rotation amount from the first angle to the second angle is the preset angle; acquiring first coordinate information of at least two marking points on the test piece at the first angle according to the first detection image; acquiring second coordinate information of each marking point at the second angle according to the second detection image; calculating the actual angle of rotation of the carrying module according to the first coordinate information and the second coordinate information.

3. The deviation detection method according to claim 2, characterized in that, calculating the actual angle of rotation of the carrying module according to the first coordinate information and the second coordinate information, including: selecting at least two of the marking points on the test piece as reference marking points, and taking every two of the reference marking points as a group; obtaining a first direction vector between two reference marking points of the carrying module at the first angle according to the coordinates corresponding to the two reference marking points in a group in the first coordinate information; obtaining a second direction vector between two reference marking points of the carrying module at the second angle according to the coordinates corresponding to the two reference marking points in the same group in the second coordinate information; calculating the actual angle of rotation of the carrying module according to the first direction vector and the second direction vector corresponding to at least one group of reference marking points.

4. The deviation detection method according to claim 3, characterized in that, calculating the actual angle of rotation of the carrying module according to the first direction vector and the second direction vector corresponding to at least one group of reference marking points, including: calculating the actual angle of rotation of the carrying module by using the following formula: Among them, θ1 is the first angle; θ2 is the second angle; is the first direction vector, is the second direction vector, and α is the actual angle of rotation of the carrier module.

5. The deviation detection method according to claim 4, characterized in that, determining the rotation angle deviation of the carrying module according to the preset angle and the actual angle, including: calculating the rotation angle deviation of the carrying module by using the following formula: β = θ2 - θ1; △T＝β-α； wherein, △T is the rotation angle deviation of the carrying module; β is the preset angle.

6. The deviation detection method according to claim 1, characterized in that, Determining the rotation center of the carrying module according to the preset angle and the actual angle includes: Calculating the rotation center corresponding to each reference marking point according to the rotation angle deviation, where the reference marking point is the marking point participating in the calculation of the rotation angle deviation; Calculating the rotation center of the carrying module according to the rotation centers corresponding to all the reference marking points.

7. The deviation detection method according to claim 6, wherein, Calculating the rotation center of the carrying module according to the rotation centers corresponding to all the reference marking points includes: Calculating the average value of the rotation centers corresponding to all the reference marking points as the rotation center of the carrying module.

8. The deviation detection method according to claim 6, wherein, Calculating the rotation center corresponding to each reference marking point according to the rotation angle deviation includes: Calculating the rotation center corresponding to each reference marking point by using the following formula: α＝β+△T； where x θ1 and y θ1 are the first coordinate information of the reference marking point at the first angle; x θ2 and y θ2 are the second coordinate information of the reference marking point at the second angle; ccx and ccy are the coordinate information of the rotation center corresponding to the reference marking point; α is the actual angle of rotation of the bearing module; β is the preset angle of rotation of the bearing module; △T is the rotation deviation angle.

9. The deviation detection method according to claim 6, wherein, The test piece has preset features; After obtaining the first detection image of the test piece, it further includes: Detecting the preset features according to the first detection image, and selecting at least two preset features as marking points.

10. A calibration method for a motion device, wherein, It includes: Obtaining the rotation angle deviation of the rotation module of the motion device according to the deviation detection method described in claim 1; Calibrating the preset angle of rotation of the carrying module according to the rotation angle deviation.

11. The calibration method according to claim 10, wherein, It further includes: Obtaining the rotation center of the rotation module according to the deviation detection method described in claim 6; Based on the rotation center, calibrating the spatial position of the test piece on the carrying module.

12. An optical detection device, wherein, It includes: A motion device, an image detector and a processing module; The motion device includes a carrying module and a rotation module, the carrying module is used to carry the test piece, and the rotation module is used to drive the carrying module to rotate and drive the test piece to rotate by the carrying module; The image detector is used to obtain an image of the test piece on the carrying module; The processing module is used for: Controlling the rotation module to drive the carrying module to rotate; Controlling the image detector to obtain the first detection image of the test piece on the carrying module; and obtaining the second detection image of the test piece after the carrying module rotates by a preset angle; Processing the first detection image and the second detection image to obtain the actual angle of rotation of the carrying module; Determining the rotation angle deviation and / or the rotation center of the carrying module according to the preset angle and the actual angle.

13. The optical detection device according to claim 12, wherein, The processing module processes the first detection image and the second detection image to obtain the actual angle of rotation of the carrying module, including: The processing module respectively sets the rotation amounts of the carrier modules corresponding to the first detection image and the second detection image relative to the reference position as a first angle and a second angle, and the rotation amount from the first angle to the second angle is the preset angle; Obtain the first coordinate information of at least two marked points on the workpiece to be measured at the first angle according to the first detection image; Obtain the second coordinate information of each of the marked points at the second angle according to the second detection image; Calculate the actual angle of rotation of the carrier module according to the first coordinate information and the second coordinate information.

14. The optical detection device according to claim 13, wherein, The processing module calculates the actual angle of rotation of the carrier module according to the first coordinate information and the second coordinate information, including: The processing module selects at least two of the marked points on the workpiece to be measured as reference marked points, and every two of the reference marked points form a group; According to the coordinates corresponding to the two reference marked points in a group in the first coordinate information, obtain a first direction vector between the two reference marked points when the carrier module is at the first angle; According to the coordinates corresponding to the two reference marked points in the same group in the second coordinate information, obtain a second direction vector between the two reference marked points when the carrier module is at the second angle; Calculate the actual angle of rotation of the carrier module according to the first direction vector and the second direction vector corresponding to at least one group of reference marked points.

15. The optical detection device according to claim 12, wherein, The processing module determines the rotation center of the carrier module according to the preset angle and the actual angle, including: The processing module calculates the rotation center corresponding to each reference marked point according to the rotation angle deviation, and the reference marked point is the marked point participating in the calculation of the rotation angle deviation; Calculate the rotation center of the carrier module according to the rotation centers corresponding to all the reference marked points.

16. A computer-readable storage medium, wherein, A program is stored on the medium, and the program can be executed by a processor to implement the method according to any one of claims 1-11.

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