Double-position correction method for checking aspheric surface
Through a two-bit correction method that corrects and measures in two different positions, the problem of difficult to detect and correct aspherical optical components with large diameters and large relative apertures in the prior art is solved, and higher measurement accuracy and lower detection errors are achieved, ensuring high-quality imaging and stability of the optical system.
Patent Information
- Application Number
- CN202510204739.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2025-05-27
AI Technical Summary
The prior art is difficult to effectively detect and correct aspherical optical components with large diameters and large relative apertures, and it is impossible to achieve aspherical inspection of ultra-large diameters and large relative apertures.
The two-bit correction method is used to correct and measure at two different positions. Through the partitioning of front and rear conjugation points and the use of internal self-accurate correction lenses, comprehensive detection of aspherical surfaces and effective elimination of errors are achieved.
It improves the measurement accuracy of aspherical optical components, reduces detection errors, ensures high consistency in the geometry and design requirements of the optical components, and improves the imaging quality and system stability of the optical system.
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Figure CN120043743A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of aspherical two-position correction, and specifically to a method for testing aspherical two-position correction. Background Art
[0002] Aspherical optics is an important branch in the field of optics, which studies and applies the optical properties of aspherical lenses or lenses. The surface shape of an aspherical optical element is not a simple spherical surface, but is defined by a complex mathematical formula, used to improve imaging quality, reduce the volume and weight of an optical system, and correct spherical aberration and other optical defects. Aspherical optics mainly includes aberration theory, aspherical optical system design, auxiliary optical system design, processing technology, and image quality evaluation. The design of the auxiliary optical system is an important part of modern optical engineering, playing a bridging role between the design of the aspherical optical system and aspherical processing, mainly used to optimize the performance of the optical system and solve special requirements in complex imaging tasks. Such designs are usually used to supplement the functions of the main optical system, such as improving imaging quality, expanding the field of view, enhancing sensitivity, or correcting aberration, etc.
[0003] Aspherical inspection can be divided into two main types:
[0004] 1. Classical Aspherical Inspection
[0005] Self-collimation inspection is carried out using the self-imaging point of the aspherical surface. The expression of the third-order aberration for eliminating spherical aberration is:
[0006]
[0007] Wherein, is the self-collimation auxiliary surface, the aperture stop is located on the auxiliary surface, and the light rays pass through the aspherical surface to be inspected twice.
[0008] 2. Null Correction - Aspherical Detection
[0009] Null correction is achieved by introducing a compensation optical element (usually a null compensation plate or other correction element) that matches the surface shape of the aspherical surface to be measured, converting the aspherical wavefront into a wavefront close to a spherical or planar wavefront, enabling a standard interferometer to directly measure. The spherical aberration generated by the correction lens is used to correct the normal distance difference of the concave aspherical surface to be inspected. The concave aspherical surface to be inspected is a self-collimation surface. According to the third-order aberration theory, the expressions for the correction lens and the field lens to correct the spherical aberration of the concave aspherical surface to be inspected are:
[0010]
[0011] However, due to the complexity of the aspherical surface, traditional inspection methods are difficult to inspect aspherical surfaces with large apertures and large relative apertures, and it is impossible to achieve the inspection of aspherical surfaces with ultra-large apertures and ultra-large relative apertures. Therefore, there is an urgent need for an improved technology to solve this problem existing in the prior art. Summary of the Invention
[0012] The object of the present invention is to provide a double - position correction method for aspherical surfaces that can adapt to this complexity, provide comprehensive detection of different angles and positions of aspherical surfaces, and the measurement results at two different positions can be mutually corrected and compensated, thereby reducing the accumulation of errors, effectively eliminating errors caused by test light sources, measuring instruments or environmental factors, providing higher measurement accuracy, and enabling the shape errors of aspherical optical elements to be detected and corrected more accurately, so as to solve the problems raised in the above - mentioned background technology.
[0013] To achieve the above object, the present invention provides the following technical solution: A double - position correction method for aspherical surfaces, the double - position correction method for aspherical surfaces includes:
[0014] The point on the left of the paraxial curvature center is the rear conjugate point o', and the point on the right of the paraxial curvature center is the front conjugate point o". The front conjugate point o" and the rear conjugate point o' are conjugate to each other and have an object - image relationship.
[0015] According to the partition of the front and rear conjugate points, the demarcation point 1 is the rear conjugate point, the demarcation point 2 is the front conjugate point, and the two demarcation points 1 and 2 divide the optical axis into three intervals.
[0016] The middle area between the front and rear demarcation points is the middle area 3 - 4, the area behind the rear demarcation point 1 is the rear area 5 - 6, the area in front of the front demarcation point 2 is the front area 7 - 8, and the point C is the curvature center of the aspherical surface to be detected.
[0017] Plan the planning conditions for the concave aspherical surface i to be detected and the convex aspherical surface i to be detected.
[0018] Taking the rear conjugate point O' of the aspherical surface i to be detected as the object point and the front conjugate point O" as the image point is the rear double - position correction.
[0019] Taking the rear conjugate point O" of the aspherical surface i to be detected as the object point and the front conjugate point O' as the image point is the front double - position correction.
[0020] Preferably, in the rear double - position correction, the rear conjugate point O' of the aspherical surface to be detected is the object point and the front conjugate point O" is the image point.
[0021] Preferably, the aspherical surface to be detected is the i - surface. For the planning conditions of the concave aspherical surface i to be detected
[0022]
[0023] The planning conditions for the convex aspherical surface i to be detected are:
[0024]
[0025] The expression of the spherical aberration coefficient of the aspherical surface to be detected is:
[0026] The expression for the spherical aberration coefficient of the single-sided third-order aberration is as follows:
[0027]
[0028] Where:
[0029]
[0030] Preferably, for the solution of the structural parameters of the two-position correction - aspheric testing optical system, if the front surface of the aspheric surface i to be tested is the (i - 1) surface, the distance between the (i - 1) surface and the aspheric surface i to be tested is d (i-1)-i , the rear surface of the aspheric surface i to be tested is the (i + 1) surface, and the distance between the aspheric surface i to be tested and the (i + 1) surface is d i-(i+1) , the (i - 1) surface and the (i + 1) surface are the same surface, only the height of the light ray on the surface is different. According to the surface transfer formula:
[0031]
[0032]
[0033] The simultaneous solution of the above formulas gives:
[0034]
[0035] Set h like this i-1 , h i , h i+1 , and according to equation (8), can be solved according to equation (9) can be solved according to the surface transfer formula
[0036]
[0037] Preferably, the 3rd surface is the aspheric surface to be tested. Both the concave aspheric surface and the convex aspheric surface to be tested satisfy the normalization condition. The aperture angle u of the curvature center of the aspheric surface 3 to be tested 03 = 1, u 3 + u' 3 = 2. For the concave aspheric surface to be tested, h 03 = -1, r 03 = -1, K = -2e 2 , for the convex aspheric surface to be tested, h 03 = 1, r 03 = 1, K = +2e 2 ;
[0038] For the height of the concave aspheric surface 3 to be tested: h 03 = -1, and the height h on the self - collimation correction lenses 4 and 5 inside 4-5 > 0; h1-2 <0, h 1-2 = 0, h 1-2 > 0.
[0039] For the height h of the convex aspheric surface 3 to be inspected 03 = +1, h 1-2 > 0.
[0040] Preferably, in the post double - position correction, the post - conjugate point O' of the aspheric surface i to be inspected is the object point, and the pre - conjugate point O'' is the image point. The internal auto - collimation correction lens 4 - 5 is located between the front and rear conjugate points of the concave aspheric surface 3 to be inspected;
[0041] The internal auto - collimation correction lens 4 - 5 is located at the post - conjugate point O' of the concave aspheric surface 3 to be inspected and at the rear demarcation point 1;
[0042] The internal auto - collimation correction lens 4 - 5 is located behind the post - conjugate point O' of the concave aspheric surface 3 to be inspected and in the rear area;
[0043] The internal auto - collimation correction lens 4 - 5 is located between the front and rear conjugate points of the convex aspheric surface 3 to be inspected.
[0044] Light rays emit from point O, are refracted by the correction lens 1 - 2 composed of surface 1 and surface 2 and imaged to the post - conjugate point O' of the aspheric surface 3 to be inspected. The light rays emitted from the post - conjugate point O' are incident on the aspheric surface 3 to be inspected, reflected by surface 3 to the pre - conjugate point O'', and then incident on the internal auto - collimation correction lens 4 - 5 composed of surface 4 and surface 5. The light rays are reflected internally by surface 5 and return along the original path, converging to the object point O.
[0045] Preferably, for the post double - position correction, light rays emitted from finite distance or infinite distance are converged by the correction lens (group) to the post - conjugate point O' (object point) of the concave aspheric surface i to be inspected. The light rays passing through the post - conjugate point O' are incident on the concave aspheric surface i to be inspected. According to the incident direction, the correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the post - conjugate point O'. The light rays are reflected by the concave aspheric surface i to converge to the pre - conjugate point O'' (image point) of the concave aspheric surface i. The light rays passing through the pre - conjugate point O'' are incident on the internal auto - collimation correction lens (group). According to the incident direction, the internal auto - collimation correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the pre - conjugate point O''. The light rays are reflected by the internal auto - collimation surface and return along the original path.
[0046] Preferably, the light rays emitted from a finite distance or infinity in the front double-position correction are converged by a correction lens (group) to the front conjugate point O'' (object point) of the concave aspheric surface i to be inspected. The light rays passing through the front conjugate point O'' are incident on the concave aspheric surface i to be inspected. According to the incident direction, the correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the front conjugate point O''; the light rays are reflected by the concave aspheric surface i to be inspected and converged to the rear conjugate point O' (image point) of the concave aspheric surface i to be inspected. The light rays passing through the rear conjugate point O' are incident on the internal autocollimation correction lens (group). According to the incident direction, the internal autocollimation correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the rear conjugate point O'; the light rays are reflected by the internal autocollimation surface and return along the original path.
[0047] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0048] (1) By performing correction and measurement at two different positions, the influence of systematic errors and environmental factors can be effectively eliminated, and the shape of the aspheric surface can be accurately measured. This reduces the detection error of the aspheric optical element to the lowest level and ensures a high degree of consistency between the geometric shape of the optical element and the design requirements.
[0049] (2) By improving the accuracy of the aspheric optical element and reducing the surface error, the double-position correction technology effectively guarantees the imaging quality, beam propagation efficiency, and system stability of the optical system.
[0050] (3) This double-position correction method can adapt to this complexity, provide a comprehensive inspection of different angles and positions of the aspheric surface. The measurement results at two different positions can be mutually corrected and compensated, thereby reducing the accumulation of errors, effectively eliminating the errors caused by the test light source, measuring instrument, or environmental factors, providing higher measurement accuracy, and enabling the shape error of the aspheric optical element to be more accurately detected and corrected. Description of the Drawings
[0051] Figure 1 It is a schematic diagram of the double-position correction concave aspheric surface inspection of the present invention;
[0052] Figure 2 It is a schematic diagram of the double-position correction convex aspheric surface inspection of the present invention;
[0053] Figure 3 It is a schematic diagram of the front double-position correction aspheric surface inspection of the present invention;
[0054] Figure 4 It is a schematic diagram of the inspection of the internal autocollimation correction lens located between the front and rear conjugate points of the concave aspheric surface 3 to be inspected of the present invention;
[0055] Figure 5 It is a schematic diagram of the inspection of the internal autocollimation correction lens located at the rear conjugate point O' of the concave aspheric surface 3 to be inspected of the present invention;
[0056] Figure 6This is a schematic diagram of the self-collimation correction lens in the present invention located behind the rear conjugate point O' of the concave aspheric surface 3 to be inspected;
[0057] Figure 7 This is a schematic diagram of the self-collimation correction lens in the present invention located between the front and rear conjugate points of the convex aspheric surface 3 to be inspected. Specific embodiments
[0058] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0059] Please refer to Figures 1-7 , the present invention provides a technical solution: a two-position correction method for inspecting aspheric surfaces, and the two-position correction method for inspecting aspheric surfaces includes:
[0060] The point on the left side of the paraxial curvature center is the rear conjugate point o', and the point on the right side of the paraxial curvature center is the front conjugate point o". The front conjugate point o" and the rear conjugate point o' are conjugate to each other and have a conjugate image relationship;
[0061] According to the partitioning of the front and rear conjugate points, the demarcation point 1 is the rear conjugate point, the demarcation point 2 is the front conjugate point, and the two demarcation points 1 and 2 divide the optical axis into three intervals;
[0062] The middle area between the front and rear demarcation points is the middle area 3-4, the area behind the rear demarcation point 1 is the rear area 5-6, the area in front of the front demarcation point 2 is the front area 7-8, and point C is the curvature center of the aspheric surface to be inspected;
[0063] Plan the planning conditions for the concave aspheric surface i to be inspected and the planning conditions for the convex aspheric surface i to be inspected;
[0064] Taking the rear conjugate point O' of the aspheric surface i to be inspected as the object point and the front conjugate point O" as the image point is the rear two-position correction;
[0065] Taking the rear conjugate point O" of the aspheric surface i to be inspected as the object point and the front conjugate point O' as the image point is the front two-position correction.
[0066] In the rear two-position correction, the rear conjugate point O' of the aspheric surface to be inspected is the object point, and the front conjugate point O" is the image point.
[0067] Plan the planning conditions for the concave aspheric surface i to be inspected and the planning conditions for the convex aspheric surface i to be inspected. The aspheric surface to be inspected is the i surface. For the planning conditions of the concave aspheric surface i to be inspected, the expression of the spherical aberration coefficient of the aspheric surface to be inspected is:
[0068]
[0069] The planning conditions for the convex aspheric surface i to be inspected are as follows:
[0070]
[0071] The expression for the spherical aberration coefficient of the single-sided third-order aberration is:
[0072]
[0073] d (i-1)-i ; The back surface of the aspheric surface i to be inspected is the (i + 1) surface, and the distance between the aspheric surface i to be inspected and the (i + 1) surface is d i-(i+1) , The (i - 1) surface and the (i + 1) surface are the same surface, only the height of the light ray on the surface is different. According to the surface transfer formula:
[0074]
[0075]
[0076] Solving the above formulas simultaneously gives:
[0077]
[0078] Among them:
[0079]
[0080] For the solution of the structural parameters of the two-position correction - aspheric surface inspection optical system, if the front surface of the aspheric surface i to be inspected is the (i - 1) surface, the distance between the (i - 1) surface and the aspheric surface i to be inspected is d (i-1)-i , The back surface of the aspheric surface i to be inspected is the (i + 1) surface, and the distance between the aspheric surface i to be inspected and the (i + 1) surface is d i-(i+1) , The (i - 1) surface and the (i + 1) surface are the same surface, only the height of the light ray on the surface is different. According to the surface transfer formula:
[0081]
[0082] Solving the above formulas simultaneously gives:
[0083]
[0084] Set h like this i-1 , h i , h i+1 , According to equation (8), can be solved According to equation (9), can be solved According to the surface transfer formula, can be solved
[0085]
[0086] According to the paraxial formula, l, l', u, u', and r can be solved for each other.
[0087]
[0088] Solution for the curvature radius of a thin lens:
[0089] The optical system for two-position correction - aspheric surface inspection is an internally self-collimating optical system. The optical system from the first surface to the internally self-collimating Nth surface is free of spherical aberration.
[0090]
[0091] Expression for single surface P:
[0092]
[0093] The curvature radius of the single surface is solved according to (11):
[0094]
[0095] The third surface is the aspheric surface to be inspected. Whether it is a concave or convex aspheric surface to be inspected, it satisfies the normalization condition. The aperture angle u of the curvature center of the aspheric surface 3 to be inspected 03 = 1, u 3 + u' 3 = 2. For the concave aspheric surface to be inspected, h 03 = -1, r 03 = -1, K = -2e 2 , for the convex aspheric surface to be inspected, h 03 = 1, r 03 = 1, K = +2e 2 ;
[0096] For the height of the concave aspheric surface 3 to be inspected: h 03 = -1. The height h on the internally self-collimating correction lenses 4 and 5 4-5 > 0; h 1-2 < 0, h 1-2 = 0, h 1-2 > 0.
[0097] The light-emitting object point O docked with the internally self-collimating correction lens is imaged at the rear conjugate point O' (virtual object point) of the aspheric surface 3 to be inspected through the correction lenses 1 - 2. After reflection from the concave aspheric surface 3 to be inspected, it is imaged at the front conjugate point O'' (image point) of the aspheric surface 3 to be inspected. The light rays emitted from point O'' are docked with the internally self-collimating correction lenses 4 - 5.
[0098] In the subsequent two-position correction, the rear conjugate point O' of the aspheric surface i to be inspected is the object point, and the front conjugate point O'' is the image point. The internally self-collimating correction lenses 4 - 5 are located between the front and rear conjugate points of the concave aspheric surface 3 to be inspected;
[0099] The internal auto-collimation correction lens 4-5 is located at the rear conjugate point O' of the concave aspheric surface 3 to be inspected and is located at the rear demarcation point 1;
[0100] The internal auto-collimation correction lens 4-5 is located in the rear area after the rear conjugate point O' of the concave aspheric surface 3 to be inspected;
[0101] The internal auto-collimation correction lens 4-5 is located between the front and rear conjugate points of the convex aspheric surface 3 to be inspected.
[0102] Light rays emit from point O, are refracted by the correction lens 1-2 formed by surface 1 and surface 2 to form an image at the rear conjugate point O' of the aspheric surface 3 to be inspected. The light rays emitted from the rear conjugate point O' are incident on the aspheric surface 3 to be inspected, reflected by surface 3 to the front conjugate point O", and incident on the internal auto-collimation correction lens 4-5 formed by surface 4 and surface 5. The light rays are internally auto-collimated and reflected by surface 5, return along the original path, and converge to the object point O.
[0103] The rear double-position correction corrects the light rays emitted from a finite distance or an infinite distance. The light rays are converged by the correction lens (group) to the rear conjugate point O' (object point) of the concave aspheric surface i to be inspected. The light rays passing through the rear conjugate point O' are incident on the concave aspheric surface i to be inspected. According to the incident direction, the correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the rear conjugate point O'. The light rays are reflected by the concave aspheric surface i to be inspected and converge to the front conjugate point O" (image point) of the concave aspheric surface i to be inspected. The light rays passing through the front conjugate point O" are incident on the internal auto-collimation correction lens (group). According to the incident direction, the internal auto-collimation correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the front conjugate point O". The light rays are reflected by the internal auto-collimation surface and return along the original path.
[0104] For the aspheric surface inspection of the rear double-position correction internal auto-collimation correction lens, it is usually necessary to combine the auto-collimation technique (internal auto-collimation) and multiple position corrections (rear double-position correction) to eliminate systematic errors. First, ensure that the laboratory temperature is stable (within ±0.5 °C) during the preparation work, and avoid vibration and air flow interference.
[0105] Adjust the reference plane of the interferometer (such as a Zygo interferometer) or the autocollimator to ensure the optical path is collimated, calibrate the accuracy of the reference mirror or the standard spherical mirror (above λ / 20), clean the lens surface, and avoid dust or scratches affecting the measurement.
[0106] Install the aspheric lens on an adjustable bracket, adjust the attitude so that the optical axis coincides with the interferometer optical path, and use the autocollimator (or the auto-collimation function of the interferometer) to observe the reflected image to ensure that the light spot reflected from the lens surface returns to the origin and eliminate the tilt error.
[0107] Record the wavefront aberration map of the interferometer (or the reflection data of the autocollimator), analyze the surface shape error (PV value, RMS value, etc.), and fine-tune the lens position according to the measurement results to optimize the alignment state.
[0108] Change the measurement position, rotate the lens 180° (or other fixed angle) around the optical axis, or translate it to another calibration position, readjust the optical path, repeat the auto - collimation alignment step, and collect and record the wavefront aberration map data again to ensure that the two measurement conditions are the same.
[0109] Use the data from the two measurements (position 1 and position 2) to eliminate the systematic error of the interferometer itself through the differential method.
[0110] Formula: True surface error = (position 1 data + position 2 data) / 2.
[0111] Compare the theoretical surface shape with the measured data and calculate the deviation of the aspheric coefficients (such as conic constant, higher - order term error).
[0112] Acceptance criteria: Judge whether it is qualified according to the design requirements (such as RMS ≤ λ / 20, PV ≤ λ / 4).
[0113] Record key parameters such as the surface error distribution map and the results of Zernike polynomial decomposition, and finally generate a report.
[0114] Ensure that the environmental conditions are the same during the two calibration processes. If a compensator (such as a null compensator) is used, its accuracy needs to be calibrated separately. For large - aperture / high - steepness aspheres, multiple measurements in sub - regions may be required and stitching is carried out. If there are special requirements (such as dynamic measurement or in - situ detection), the optical path design needs to be adjusted or more calibration positions need to be introduced.
[0115] The front double - position correction is for the light rays emitted from a finite or infinite distance. After passing through the correction lens (group), they converge to the front conjugate point O” (object point) of the concave aspheric surface i to be inspected. The light rays passing through the front conjugate point O” are incident on the concave aspheric surface i to be inspected. According to the incident direction, the correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the front conjugate point O”. The light rays are reflected by the concave aspheric surface i to be inspected and converge to the rear conjugate point O' (image point) of the concave aspheric surface i to be inspected. The light rays passing through the rear conjugate point O' are incident on the internal auto - collimation correction lens (group). According to the incident direction, the internal auto - collimation correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i at the rear conjugate point O'. The light rays are reflected by the internal auto - collimation surface and return along the original path.
[0116] By performing calibration and measurement at two different positions, the influence of systematic errors and environmental factors can be effectively eliminated, and the shape of the aspheric surface can be accurately measured, which minimizes the detection error of the aspheric optical element and ensures a high degree of consistency between the geometric shape of the optical element and the design requirements.
[0117] By improving the accuracy of the aspheric optical element and reducing the surface error, the double - position correction technology effectively guarantees the imaging quality, beam propagation efficiency, and system stability of the optical system.
[0118] This two-position correction method can adapt to this complexity, providing comprehensive detection of different angles and positions on the aspherical surface. The measurement results at two different positions can be mutually corrected and compensated, thereby reducing the accumulation of errors, effectively eliminating errors caused by the test light source, measuring instrument, or environmental factors, providing higher measurement accuracy, and enabling the shape error of the aspherical optical element to be detected and corrected more accurately.
[0119] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A dual-position correction method for inspecting an aspheric surface, characterized in that: The dual-position correction method for inspecting an aspheric surface comprises: The point on the left side of the paraxial curvature center is the posterior conjugate point o', and the point on the right side of the paraxial curvature center is the anterior conjugate point o", the anterior conjugate point o" and the posterior conjugate point o' are conjugates and are in an image relationship with each other; By the division of the front and rear conjugate points, the dividing point 1 is the rear conjugate point, the dividing point 2 is the front conjugate point, and the two dividing points 1 and 2 are used to divide the optical axis into three intervals; The area between the front and rear dividing points is the middle area 3-4, the area behind the rear dividing point 1 is the rear area 5-6, the area before the front dividing point 2 is the front area 7-8, and point C is the center of curvature of the aspheric surface to be tested; Planning the planning conditions of the concave aspheric surface i to be inspected and the planning conditions of the convex aspheric surface i to be inspected; The posterior conjugate point O' of the aspheric surface to be inspected is the object point, and the anterior conjugate point O" is the image point for the post-double-position correction; The posterior conjugate point O" of the aspheric surface to be inspected is the object point, and the anterior conjugate point O' is the image point for the anterior double-position correction.
2. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: In the post-binary correction, the rear conjugate point O' of the aspheric surface to be inspected is the object point, and the front conjugate point O" is the image point.
3. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: The aspheric surface to be tested is surface i, and the planning condition for the concave aspheric surface i to be tested is The planning condition of the convex aspheric surface i to be tested is: The expression of the spherical aberration coefficient of the aspheric surface to be tested is: The expression of the single-sided third-order spherical aberration coefficient is: in:
4. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: The structural parameters of the dual-position correction-aspheric surface inspection optical system are solved. If the previous surface of the aspheric surface i to be inspected is the (i-1) surface, and the distance from the (i-1) surface to the aspheric surface i to be inspected is d (i-1)-i , the next surface of the aspheric surface i to be tested is the (i+1) surface, and the distance between the aspheric surface i to be tested and the (i+1) surface is d i-(i+1) , the (i-1) surface and the (i+1) surface are the same surface, only the height of the light on the surface is different, according to the surface rotation formula: The above formulas are solved together to obtain: So set h i-1 ,h i ,h i+1 , according to formula (8), we can solve u i , l i , According to formula (9), we can solve d i-(i-1) , According to the surface rotation formula, it can be solved l i ' -1 , u' i-1 , 5. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: The third surface is the aspheric surface to be tested. The concave aspheric surface or the convex aspheric surface to be tested meets the normalization condition. The aperture angle u of the curvature center of the aspheric surface 3 to be tested is 03 =1,u3+u'3=2, for the concave aspheric surface to be tested h 03 =-1,r 03 =-1,K = -2e 2 , for the convex aspheric surface h 03 =1,r 03 =1,K=+2e 2 ; The height of the concave aspheric surface 3 to be tested: h 03 = -1, height h on the inner autocollimation correction lenses 4 and 5 4-5 >0;h 1-2 <0,h 1-2 =0,h 1-2 >0. For the height h of the convex aspheric surface 3 to be tested 03 =+1,h 1-2 >0.
6. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: In the rear double-position correction, the rear conjugate point O' of the aspheric surface to be tested is the object point, the front conjugate point O" is the image point, and the inner autocollimation correction lens 4-5 is located between the front and rear conjugate points of the concave aspheric surface 3 to be tested; The inner autocollimation correction lens 4-5 is located at the rear conjugate point O' of the concave aspheric surface 3 to be inspected and at the rear dividing point 1; The inner autocollimation correction lens 4-5 is located behind the rear conjugate point O' of the concave aspheric surface 3 to be inspected, and is located in the rear area; The inner autocollimation correction lens 4-5 is located between the front and rear conjugate points of the convex aspheric surface 3 to be inspected. The light is emitted from point O, refracted by the correction lens 1-2 formed by surfaces 1 and 2 to form an image at the rear conjugate point O' of the aspheric surface 3 to be tested. The light emitted from the rear conjugate point O' is incident on the aspheric surface 3 to be tested, reflected by surface 3 to the front conjugate point O", and then incident on surfaces 4 and 5 to form an internal self-collimating correction lens 4-5. The light is self-reflected by surface 5, returns along the original path, and converges to the object point O.
7. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: The rear double-position correction is that the light emitted from a finite distance or an infinite distance is converged to the rear conjugate point O' (object point) of the concave aspheric surface i to be tested by the correction lens (group), the light passing through the rear conjugate point O' is incident on the concave aspheric surface i to be tested, and the correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i to be tested at the rear conjugate point O' according to the incident direction; the light is reflected by the concave aspheric surface i to be tested and converged to the front conjugate point O" (image point) of the concave aspheric surface i to be tested, the light is incident on the inner autocollimation correction lens (group) through the front conjugate point O", and the inner autocollimation correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i to be tested at the front conjugate point O" according to the incident direction, and the light is reflected by the inner autocollimation surface and returns along the original path.
8. A dual-position correction method for inspecting an aspheric surface according to claim 1, characterized in that: The front double-position correction is that the light emitted from a finite distance or an infinite distance is converged to the front conjugate point O" (object point) of the concave aspheric surface i to be inspected by the correction lens (group), the light passing through the front conjugate point O" is incident on the concave aspheric surface i to be inspected, and the correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i to be inspected at the front conjugate point O" according to the incident direction; the light is reflected by the concave aspheric surface i to be inspected and converged to the rear conjugate point O' (image point) of the concave aspheric surface i to be inspected, the light is incident on the inner autocollimation correction lens (group) through the rear conjugate point O', and the inner autocollimation correction lens (group) corrects the spherical aberration generated by the concave aspheric surface i to be inspected at the rear conjugate point O' according to the incident direction, and the light is reflected by the inner autocollimation surface and returns along the original path.