Rectangular valve and self-locking opening and closing device thereof

Abstract

The invention relates to the technical field of valves, and discloses a rectangular valve and a self-locking type opening and closing device thereof.The rectangular valve comprises a mounting frame and a driving part, the mounting frame is fixedly connected with the driving part, a connecting rod is fixedly connected to an output shaft of the driving part, and the two ends of the connecting rod are each sequentially hinged to a first hinge rod, a second hinge rod and a valve rod; one end of the first hinge rod is hinged to the connecting rod, the other end of the first hinge rod is hinged to one end of the second hinge rod, a roller is rotationally connected to the hinge point, the other end of the second hinge rod is hinged to one end of the valve rod, the other end of the valve rod penetrates through the mounting frame, and guide rails matched with the roller in a self-locking mode are arranged on the two sides of the mounting frame. The first hinge rod and the connecting rod are located on the same horizontal straight line, and the first hinge rod is perpendicular to the second hinge rod. The connecting rod and the first hinge rod form a straight line, so that the roller is limited in the clamping groove, the roller is locked, and then the valve element is locked at the sealing position.

Description

Technical Field

[0001] The present invention relates to the technical field of valves, and in particular to a rectangular valve and its self-locking opening and closing device. Background Art

[0002] Semiconductor processes are generally carried out in a vacuum chamber. The chamber usually includes a vacuum valve, and the opening and closing of the vacuum valve are performed by an opening and closing device to achieve the evacuation of the vacuum chamber or the transfer of objects in the chamber. Usually, the opening and closing device of the vacuum valve drives the movement of the valve core in the valve through a cylinder to achieve the opening and closing of the valve. However, to ensure the sealing performance of the valve, continuous power supply from the driving member is required. However, when the mechanism fails due to wear or the power supply is interrupted, the valve will lose its sealing effect, thus destroying the vacuum state. Summary of the Invention

[0003] To solve the above problems, the technical solution adopted by the present invention is as follows: A self-locking opening and closing device includes a mounting frame and a driving member. The mounting frame is fixedly connected to the driving member. A connecting rod is fixedly connected to the output shaft of the driving member. Both ends of the connecting rod are sequentially hinged with a first hinge rod, a second hinge rod, and a valve rod. The first hinge rods, second hinge rods, and valve rods at both ends of the connecting rod are mirror-symmetrical with the output direction of the output shaft of the driving member as the axis of symmetry. One end of the first hinge rod is hinged to the connecting rod, the other end of the first hinge rod is hinged to one end of the second hinge rod, and a roller is rotatably connected at this hinge point. The other end of the second hinge rod is hinged to one end of the valve rod, and the other end of the valve rod penetrates through the mounting frame. Guide rails adapted for self-locking with the roller are provided on both sides of the mounting frame. When the roller is self-locked, the first hinge rod and the connecting rod are on the same horizontal line, and the first hinge rod and the second hinge rod are perpendicular.

[0004] Further, a clamping groove is provided at the lower end of the guide rail, and the clamping groove is adapted to be engaged with the roller.

[0005] Further, limit bolts are provided at both ends of the connecting rod near the first hinge rod.

[0006] Further, the limit bolt includes a locking nut and a long rod-shaped screw part. The cross-section of the screw part is T-shaped. External threads are provided on the vertical side of the T-shaped screw part, and it penetrates through the connecting rod from bottom to top. The locking nut is threadedly connected to the screw part to fix the position of the screw part on the connecting rod, and the horizontal side is closely attached to the upper end surface of the driving member to support the connecting rod.

[0007] Further, limit pin pins adapted to the first hinge rod are provided at both ends of the connecting rod.

[0008] A rectangular valve, comprising the above-mentioned self-locking opening and closing device, further comprising a valve body and a valve core. The upper end surface of the valve body is fixedly connected to the lower end surface of the installation frame, and one end of the valve rod passing through the installation frame penetrates the upper end surface of the valve body and is connected to the valve core.

[0009] Further, long strip-shaped through holes are formed on the front and rear end surfaces of the valve body, and the valve core is adapted to the through holes.

[0010] Further, the valve core is of a V-shaped structure, and the inner wall of the through hole is of a V-shaped groove structure adapted to the valve core.

[0011] Further, a sealing ring is provided on the side wall of the valve core.

[0012] Further, a through hole is formed in the valve core.

[0013] Advantages of the present invention: When the roller is self-locked, the arc-shaped outer wall on one side of the roller is located in the card slot. The first hinge rod is parallel to the connecting rod and arranged in a straight line. The first hinge rod is perpendicular to the second hinge rod and the second hinge rod is in the same straight line as the valve rod. At this time, the valve core of the rectangular valve is in a closed state. If the power supply of the driving member is cut off at this time, the valve core of the rectangular valve will be subjected to an upward thrust F1 due to the pressure difference and the sealing force. The upward thrust F1 is transmitted to the roller through the valve rod and the second hinge rod. At this time, the arc-shaped outer wall on one side of the roller is located in the card slot. Due to the pushing of F1, the roller has an upward rolling tendency and generates a horizontal thrust F2 on the first hinge rod to move the roller out of the card slot; however, at this time, the first hinge rod and the connecting rod are in a parallel state, that is to say, the thrust F2 generated by the roller will be horizontally transmitted to the hinge point of the first hinge rod and the connecting rod, and the thrust F2 cannot form a moment on the first hinge rod, so that the first hinge rod cannot rotate around its hinge point with the connecting rod, thereby preventing the roller from moving out of the card slot, realizing the self-locking of the roller and ensuring the locking and sealing performance of the valve core.

[0014] In order to further ensure that when the roller is self-locked, the two first hinge rods and the connecting rod are on the same horizontal straight line and prevent the two first hinge rods and the connecting rod from tilting and shifting, limit bolts are provided at both ends of the connecting rod near the first hinge rod.

[0015] Through the through hole, when evacuating the vacuum cavity, the gas between the upper end surface of the valve core and the inner wall of the upper end surface of the valve body can be evacuated together, realizing pressure balance and facilitating the upward movement of the valve core. Description of the Drawings

[0016] The drawings here are incorporated into the specification and form a part of this specification, showing the embodiments consistent with the present application, and are used together with the specification to explain the principles of the present invention.

[0017] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 Schematic diagram of the closing structure of the present invention; Figure 2 Schematic diagram of the opening structure of the present invention; Figure 3 For Figure 2 The enlarged view of part A of Figure 4 Schematic diagram of the structure when the valve core is closed; Figure 5 Schematic diagram of the structure when the valve core is opened; Figure 6 Schematic diagram of the connecting rod; Figure 7 Schematic diagram of the force-bearing structure when the self-locking type opening and closing device is self-locked; Figure 8 Schematic diagram of the force-bearing structure when the self-locking type opening and closing device releases self-locking; Figure 9 Schematic diagram of the guide rail Figure 1 ; Figure 10 Schematic diagram of the guide rail Figure 2 。

[0019] In the figure: 1, installation frame; 2, driving member; 3, connecting rod; 4, first hinge rod; 5, second hinge rod; 6, valve rod; 7, roller; 8, guide rail; 801, fine-tuning bolt; 9, card slot; 10, limit bolt; 1001, locking nut; 1002, screw part; 11, valve body; 12, valve core; 13, through hole; 14, V-shaped groove structure; 15, sealing ring; 16, through hole; 17, limit pin. Detailed implementation manners

[0020] To make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the following will clearly and completely describe the technical solutions of the embodiments of the present disclosure in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present disclosure.

[0021] Unless otherwise defined, technical or scientific terms used in this disclosure shall have the ordinary meaning as understood by those of ordinary skill in the field to which this disclosure belongs. The "first", "second" and similar terms used in this disclosure do not denote any order, quantity or importance, but are only used to distinguish different components. Words such as "including" or "comprising" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Upper", "lower", "left", "right", etc. are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0022] As Figures 1 - 8 shown, a self-locking opening and closing device includes an installation frame 1 and a driving member 2. The installation frame 1 is fixedly connected to the driving member 2. A connecting rod 3 is fixedly connected to the output shaft of the driving member 2. First articulated rods 4, second articulated rods 5 and valve rods 6 are sequentially articulated at both ends of the connecting rod 3, and the first articulated rods 4, second articulated rods 5 and valve rods 6 at both ends of the connecting rod 3 are symmetrically arranged with the output direction of the output shaft of the driving member 2 as the axis of symmetry; One end of the first articulated rod 4 is articulated with the connecting rod 3, the other end of the first articulated rod 4 is articulated with one end of the second articulated rod 5 and a roller 7 is rotatably connected at the articulated point. The other end of the second articulated rod 5 is articulated with one end of the valve rod 6. The other end of the valve rod 6 penetrates through the installation frame 1. Guide rails 8 adapted for self-locking with the roller 7 are provided on both sides of the installation frame 1. When the roller 7 is self-locked, the first articulated rod 4 and the connecting rod 3 are on the same horizontal straight line, and the first articulated rod 4 is perpendicular to the second articulated rod 5.

[0023] The installation frame 1 is a rectangular frame, and the rectangular frame has a smooth plane to facilitate the fixed installation of the installation frame 1. The driving member 2 is a power device such as a cylinder or a hydraulic cylinder. The driving member 2 can be embedded and fixed on the bottom surface of the installation frame 1 or fixedly installed on the bottom surface of the installation frame 1 by bolt connection to ensure the stability of the driving member 2 and prevent the driving member 2 from shaking during operation and affecting self-locking. In the present invention, the output shaft of the driving member 2 is vertically arranged, that is, the output shaft can move up and down.

[0024] The guide rails 8 are fixedly installed on both sides of the installation frame 1 by bolts. A card slot 9 is provided at the lower end of the guide rail 8. The card slot 9 is adapted to be engaged with the roller 7, as Figure 9 and Figure 10 shown. The card slot 9 can be an arc-shaped card slot, a V-shaped card slot or other shapes adapted to the radian of the roller 7. As Figure 1 and Figure 7As shown, when the roller 7 is self-locked, the arc-shaped outer wall on one side of the roller 7 is located in the card slot 9. The first hinge rod 4 is parallel to the connecting rod 3 and arranged in a straight line. The first hinge rod 4 is perpendicular to the second hinge rod 5 and the second hinge rod 5 and the valve rod 6 are on the same straight line. At this time, the rectangular valve is in the closed state. If the power supply of the driving member 2 is cut off at this time, the valve core of the rectangular valve will be subjected to an upward thrust F1 due to the pressure difference and the sealing force. The upward thrust F1 is transmitted to the roller 7 through the valve rod 6 and the second hinge rod 5. At this time, the arc-shaped outer wall on one side of the roller 7 is located in the card slot 9. Due to the push of F1, the roller 7 has an upward rolling tendency and generates a horizontal thrust F2 on the first hinge rod 4 to move the roller 7 out of the card slot 9. However, at this time, the first hinge rod 4 and the connecting rod 3 are in a parallel state. That is to say, the thrust F2 generated by the roller 7 will be horizontally transmitted to the hinge point of the first hinge rod 4 and the connecting rod 3. The thrust F2 cannot form a moment on the first hinge rod 4, so that the first hinge rod 4 cannot rotate around its hinge point with the connecting rod 3, thereby preventing the roller 7 from moving out of the card slot 9 and realizing the self-locking of the roller 7. In addition, when the roller 7 is self-locked, the connecting rod 3 and the first hinge rods 4 at both ends are arranged in the same horizontal straight line. That is to say, the thrusts F2 received by the two first hinge rods 4 are the same in magnitude, opposite in direction and on the same horizontal straight line. No moment will be generated between the two thrusts F2, which can effectively prevent the two first hinge rods 4 and the connecting rod 3 from tilting due to the generated moment and resulting in the failure of self-locking.

[0025] In order to further ensure that when the roller 7 is self-locked, the two first hinge rods 4 and the connecting rod 3 are in the same horizontal straight line and prevent the two first hinge rods 4 and the connecting rod 3 from tilting and shifting, limit bolts 10 are provided at both ends of the connecting rod 3 near the first hinge rods 4. The limit bolt 10 includes a locking nut 1001 and a long rod-shaped screw part 1002. The cross-section of the screw part 1002 is T-shaped. The vertical side of the T-shaped screw part 1002 is provided with an external thread and penetrates the connecting rod 3 from bottom to top. The locking nut 1001 is threadedly connected to the screw part 1002 to fix the position of the screw part 1002 on the connecting rod 3. The horizontal side is a smooth plane and abuts against the upper end surface of the driving member 2 for supporting.

[0026] When it is necessary to move the roller 7 out of the card slot 9, start the driving member 2, such as Figure 8As shown, the output shaft of the driving member 2 extends upward and drives the connecting rod 3 to move upward. At this time, since the roller 7 is still engaged in the card slot 9, the first hinge rod 4 will be driven by the connecting rod 3 to slightly rotate around its hinge point with the second hinge rod 5 to an inclined state. At this time, the first hinge rod 4 will generate an upwardly inclined pulling force F3 on the roller 7. The pulling force F3 causes the roller 7 to have an upward rolling tendency and generates a horizontal thrust F4 on the first hinge rod 4. At this time, since the first hinge rod 4 is inclined, when the thrust F4 is transmitted to the first hinge rod 4, it will form a moment on the first hinge rod 4, enabling the first hinge rod 4 to rotate around its hinge point with the connecting rod 3, thereby enabling the roller 7 to move out of the card slot 9 and release the self-locking state. In addition, when the roller 7 moves out of the card slot 9 and after moving out of the card slot 9, the roller 7 can convert the sliding friction between it and the card slot 9 and the guide rail 8 into rolling friction, reducing the difficulty of the roller 7 moving.

[0027] Both ends of the connecting rod 3 are provided with limit pins 17 adapted to the first hinge rod 4. As Figure 2 and Figure 3 shown, the limit pins 17 are arranged below the first hinge rod 4. When the roller 7 moves out of the card slot 9, the limit pins 17 are closely attached to the lower end surface of the first hinge rod 4, which can effectively prevent the first hinge rod 4 from falling naturally under the influence of gravity and ensure that the roller 7 is always in contact with the guide rail surface when moving on the guide rail 8, ensuring the stability of the roller 7 moving.

[0028] The connecting rod 3 is in a long strip shape, and the center of its length direction is fixedly connected to the output shaft of the driving member 2 by bolts, ensuring that when the output shaft of the driving member 2 drives the connecting rod 3 to move up and down, the first hinge rod 4, the second hinge rod 5 and the valve rod 6 at both left and right ends of the connecting rod 3 can receive the same magnitude of thrust and move symmetrically in a mirror image, ensuring the synchronism of the movement and ensuring that the left and right ends can be self-locked or release the self-locking simultaneously.

[0029] After long-term use, there will be a certain displacement between the two guide rails 8 on both sides of the installation frame 1, which reduces the parallelism between the two guide rails 8 and will have a certain impact on the synchronous mirror movement of the first hinge rod 4, the second hinge rod 5 and the valve rod 6 at both ends of the connecting rod 3. Therefore, a fine-tuning bolt 801 is also provided on the upper end surface of the guide rail 8. The fine-tuning bolt 801 is threadedly installed on the upper end surface of the guide rail 8, and the upper end surface of the fine-tuning bolt 801 is attached to the inner wall of the upper end surface of the installation frame 1. By adjusting the position of the nut of the fine-tuning bolt 801, the height of the guide rail 8 can be finely adjusted so that the two guide rails 8 can be at the same height and in a parallel state. In addition, during the upward rolling process of the roller 7, an upward thrust will be generated on the guide rail 8. At this time, since the upper end surface of the fine-tuning bolt 801 is attached to the upper end surface of the installation frame 1, the fine-tuning bolt 801 can also play a supporting role for the guide rail 8, effectively preventing the guide rail 8 from moving upward and generating an offset. Of course, in order to ensure the fixation of the position of the guide rail 8, a locking nut is also provided between the fine-tuning bolt 801 and the guide rail 8 to prevent the guide rail 8 from loosening.

[0030] A rectangular valve includes the above self-locking opening and closing device, and also includes a valve body 11 and a valve core 12. The upper end surface of the valve body 11 is fixedly connected to the lower end surface of the installation frame 1. One end of the valve rod 6 passing through the installation frame 1 passes through the upper end surface of the valve body 11 and is connected to the valve core 12. The valve rod 6 and the valve core 12 can be fixedly connected by means of threaded connection, and a locking nut is used to prevent loosening.

[0031] The valve body 11 is a hollow rectangular box body. Long strip-shaped through holes 13 are opened on the front and rear end surfaces of the valve body 11. The valve core 12 is adapted to the through holes 13. The front and rear end surfaces of the valve core 12 can be respectively closely attached to the corresponding through holes 13. When the end surface of the valve core 12 is closely attached to the through hole 13, the rectangular valve is in a closed state. At this time, the roller 7 on the self-locking opening and closing device is located in the card slot 9, and the roller 7 is in a unsealed state; when the end surface of the valve core 12 is not closely attached to the through hole 13, the rectangular valve is in an open state. At this time, the roller 7 moves out of the card slot 9, the self-locking opening and closing device is unlocked, and moves until the valve core 12 is completely opened.

[0032] As Figure 4 and Figure 5 shown, the valve core 12 is of a V-shaped structure, and the V-shaped angle is 35°-40°. The inner wall of the through hole 13 is a V-shaped groove structure 14 adapted to the valve core 12. The side surface of the valve core 12 and the groove surface of the V-shaped groove structure 14 form a sealing surface. That is, the valve core 12 can completely fit in the V-shaped groove structure 14 to block the communication of the through hole 13. A sealing ring 15 is also provided on the side wall of the valve core 12. The sealing between the valve core 12 and the through hole 13 is realized through the sealing ring 15, and the sealing ring 15 can also provide shock absorption and support for the valve core 12, so that a stable state of symmetric force is formed on both sides of the V-shaped valve core 12.

[0033] The valve core 12 is provided with a through hole 16. In the present invention, when the valve core 12 fits with the through hole 13, a sealed cavity will be formed between the upper end surface of the valve core 12 and the inner wall of the upper end surface of the valve body 11. As Figure 4 shown, at this time, the right end surface of the valve core 12 is connected to the vacuum cavity. When evacuating the vacuum cavity, there will be a problem that the gas in the above-mentioned sealed cavity cannot be evacuated. When it is necessary to open the valve core 12 upward, it will be difficult to open the valve core 12 due to the air pressure difference, increasing the working burden of the driving member 2. Therefore, through the through hole 16, when evacuating the vacuum cavity, the gas between the upper end surface of the valve core 12 and the inner wall of the upper end surface of the valve body 11 can be evacuated together, achieving pressure balance and facilitating the upward movement of the valve core 12. Unless otherwise defined, in the embodiments of the present disclosure and the accompanying drawings, the same reference numerals represent the same meaning.

[0034] In the accompanying drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are involved, and other structures can refer to the general design.

[0035] For clarity, in the drawings used to describe the embodiments of the present disclosure, the components or regions are enlarged. It can be understood that when an element is referred to as being "on" or "under" another element, the element can be "directly" on or under the other element, or there can be intermediate elements.

[0036] The above is only the specific implementation manner of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present disclosure can easily think of changes or substitutions, which should all be covered by the protection scope of the present disclosure. For example, the use of the self-locking opening and closing device disclosed in the present invention is not only used for the V-type valve core device in the embodiment, but also includes other applications with the locking function for the valve core and its similar mechanisms. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.

Claims

1. A self-locking opening and closing device, characterized in that: The invention comprises a mounting frame (1) and a driving member (2), wherein the mounting frame (1) is fixedly connected to the driving member (2), and a connecting rod (3) is fixedly connected to the output shaft of the driving member (2), and both ends of the connecting rod (3) are hingedly connected to a first hinged rod (4), a second hinged rod (5) and a valve stem (6) in sequence, and the first hinged rod (4), the second hinged rod (5) and the valve stem (6) at both ends of the connecting rod (3) are mirror-symmetrical with the output direction of the output shaft of the driving member (2) as the symmetry axis; one end of the first hinged rod (4) is connected to the connecting rod (3) The first hinged rod (4) is hinged to one end of the second hinged rod (5) and a roller (7) is rotatably connected to the hinge point. The second hinged rod (5) is hinged to one end of the valve stem (6). The other end of the valve stem (6) passes through the mounting frame (1). Guide rails (8) that are self-lockingly compatible with the roller (7) are provided on both sides of the mounting frame (1). When the roller (7) is self-locking, the first hinged rod (4) and the connecting rod (3) are in the same horizontal straight line, and the first hinged rod (4) and the second hinged rod (5) are perpendicular.

2. A self-locking opening and closing device according to claim 1, characterized in that: A slot (9) is provided at the lower end of the guide rail (8), and the slot (9) is adapted to be engaged with the roller (7).

3. A self-locking opening and closing device according to claim 2, characterized in that: Limit bolts (10) are provided at both ends of the connecting rod (3) near the first hinge rod (4).

4. A self-locking opening and closing device according to claim 3, characterized in that: The limiting bolt (10) comprises a locking nut (1001) and a long rod-shaped screw portion (1002), wherein the cross section of the screw portion (1002) is T-shaped, the vertical side of the T-shaped screw portion (1002) is provided with an external thread and passes through the connecting rod (3) from bottom to top, the locking nut (1001) is threadedly connected to the screw portion (1002) for fixing the position of the screw portion (1002) on the connecting rod (3), and the horizontal side is tightly attached to the upper end surface of the driving member (2) for supporting the connecting rod (3).

5. A self-locking opening and closing device according to claim 2, characterized in that: Limit pins (17) adapted to the first hinged rod (4) are provided at both ends of the connecting rod (3).

6. A rectangular valve, comprising a self-locking opening and closing device as claimed in any one of claims 1 to 5, characterized in that: It also comprises a valve body (11) and a valve core (12), wherein the upper end surface of the valve body (11) is fixedly connected to the lower end surface of the mounting frame (1), and one end of the valve stem (6) passes through the mounting frame (1), passes through the upper end surface of the valve body (11), and is connected to the valve core (12).

7. A rectangular valve according to claim 6, characterized in that: The front and rear end surfaces of the valve body (11) are both provided with elongated through holes (13), and the valve core (12) is adapted to fit the through holes (13).

8. A rectangular valve according to claim 7, characterized in that: The valve core (12) is of a V-shaped structure, and the inner wall of the through hole (13) is of a V-shaped groove structure (14) adapted to the valve core (12).

9. A rectangular valve according to claim 8, characterized in that: A sealing ring (15) is provided on the side wall of the valve core (12).

10. A rectangular valve according to claim 9, characterized in that: The valve core (12) is provided with a through hole (16).

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