Rapid arc extinguishing method, device and equipment based on radio frequency power supply and medium

Abstract

The invention relates to the technical field of radio frequency power supplies, and discloses a quick arc extinguishing method based on a radio frequency power supply, which comprises the following steps: acquiring the power supply working time of the radio frequency power supply in a radio frequency circuit, and acquiring the power supply incident power of the radio frequency power supply when the power supply working time is longer than a preset time; judging whether the incident power of the power supply is greater than a preset incident power threshold value or not; if yes, acquiring the radio frequency power supply reflection power of the radio frequency power supply; when the power supply reflection power is smaller than a preset reflection power threshold value, performing arc detection on the radio frequency circuit based on the power supply incident power and the power supply reflection power; and when the electric arc exists in the radio frequency circuit, reducing the radio frequency power from P1 to P2, after a preset time, uniformly increasing the radio frequency power to P1 within a specified time, and repeating the steps for many times until the electric arc of the radio frequency circuit cannot be detected. The invention further provides a rapid arc extinguishing device and equipment based on the radio frequency power supply and a storage medium. The arc extinguishing speed can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power supply, and in particular to a rapid arc extinguishing method, device, equipment and medium based on radio frequency power supply. Background Art

[0002] Plasma processing technology is widely used in semiconductor manufacturing processes, such as plasma enhanced chemical vapor deposition (PECVD). Its principle is to apply high-frequency voltage to the two poles of the reaction chamber and introduce gas to generate glow discharge in the reaction chamber to form plasma, ionize the gas and react on the surface of the object, thereby generating a thin film. Due to factors such as local charge accumulation on the workpiece surface, surface tip discharge, and changes in the cavity environment, arcs are easily generated in the cavity. The instantaneous energy released by the arc is large, which can cause damage to the workpiece and affect the quality of thin film deposition. Therefore, there is an urgent need for an arc extinguishing method that can quickly detect and eliminate the impact of the arc on the workpiece processing quality. Summary of the invention

[0003] The present invention provides a rapid arc extinguishing method, device, equipment and medium based on a radio frequency power supply, the main purpose of which is to increase the arc extinguishing speed.

[0004] To achieve the above object, the present invention provides a rapid arc extinguishing method based on a radio frequency power supply, comprising:

[0005] Based on a preset data query instruction, the working time of the radio frequency power supply in the radio frequency circuit is obtained to obtain the power supply working time, and when the power supply working time is greater than the preset time, the incident power of the radio frequency power supply is obtained to obtain the power supply incident power;

[0006] Determining whether the incident power of the power source is greater than a preset incident power threshold;

[0007] When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source;

[0008] When the power supply reflected power is less than a preset reflected power threshold, arc detection is performed on the radio frequency circuit based on the power supply incident power and the power supply reflected power;

[0009] When an arc exists in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after a preset time, the RF power is evenly increased to P1 within a specified time, and the above steps are repeated multiple times until the arc of the RF circuit cannot be detected.

[0010] Optionally, the performing arc detection on the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply includes:

[0011] Calculating the reflectivity of the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply to obtain the radio frequency reflectivity;

[0012] Performing differential calculation on the radio frequency reflectivity to obtain a radio frequency reflection differential;

[0013] Taking the power incident power, power reflected power, radio frequency reflectivity and radio frequency reflection differential as arc-related characteristics of the radio frequency circuit to obtain radio frequency arc characteristics;

[0014] A preset arc recognition model is trained based on the radio frequency arc characteristics, and different weights are assigned to each radio frequency arc characteristic to obtain an arc recognition training model, and arc detection is performed on the radio frequency circuit according to the arc recognition training model.

[0015] Optionally, the arc recognition model preset based on the RF arc feature training is trained, and different weights are assigned to each RF arc feature to obtain an arc recognition training model, and arc detection is performed on the RF circuit according to the arc recognition training model, including:

[0016] Dividing the arc corresponding feature data and the radio frequency arc features into a training set and a test set to obtain an arc feature training set and an arc feature test set;

[0017] The preset arc model object is trained by using the arc feature training set and the arc feature test set, and different weights are assigned to each radio frequency arc feature to obtain an arc recognition training model;

[0018] Basic detection data is acquired, and the basic detection data is imported into the arc recognition training model, and arc detection is performed on the radio frequency arc according to the arc recognition training.

[0019] Optionally, when the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the RF power source, before obtaining the reflected power of the RF power source, the method further includes:

[0020] Acquiring a plasma environment of a radio frequency power source, and setting an incident power according to the plasma environment to obtain an initial incident power threshold;

[0021] Acquiring data on changes in the plasma environment over time to obtain real-time plasma change data;

[0022] The initial incident power threshold is automatically adjusted according to the plasma change data to obtain a time-varying incident power threshold, and the time-varying incident power threshold is used as a preset incident power threshold.

[0023] Optionally, automatically adjusting the initial incident power threshold according to the plasma change data to obtain a time-varying incident power threshold, and using the time-varying incident power threshold as a preset incident power threshold, comprises:

[0024] Acquire the initial, middle and late stages of plasma operation according to the plasma change data to obtain the initial, middle and late stages of plasma operation;

[0025] Setting different threshold bases for the early stage of plasma operation, the middle stage of plasma operation and the late stage of plasma operation to obtain an early stage base, a middle stage base and a late stage base;

[0026] According to the early base number, mid-term base number and late base number, the initial incident power threshold is adjusted using the plasma change data to obtain a time-varying incident power threshold composed of an early time-varying power threshold, a mid-term time-varying power threshold and a late time-varying power threshold, and the time-varying incident power threshold is used as a preset incident power threshold.

[0027] Optionally, the RF power of the RF power source is reduced from P1 to P2, and after a preset time, the RF power is uniformly increased to P1 within a specified time, and the above steps are repeated multiple times until no arc of the RF circuit is detected, and the method further includes:

[0028] A maximum number of arc extinguishing times is set for the RF power supply. When the number of repetitions of the steps of reducing the RF power of the RF power supply from P1 to P2 and, after a preset time, uniformly increasing the RF power to P1 within a specified time exceeds the maximum number of arc extinguishing times, an alarm message is generated.

[0029] Optionally, the maximum number of arc extinguishing times is set for the RF power supply, and when the number of repetitions of the steps of reducing the RF power of the RF power supply from P1 to P2 and, after a preset time, uniformly increasing the RF power to P1 within a specified time exceeds the maximum number of arc extinguishing times, after generating an alarm message, the method further includes:

[0030] Turn off the RF power supply.

[0031] In order to solve the above problems, the present invention also provides a rapid arc extinguishing device based on a radio frequency power supply, the device comprising:

[0032] A power acquisition module, used to acquire the working time of the radio frequency power supply in the radio frequency circuit based on a preset data query instruction, obtain the power supply working time, and when the power supply working time is greater than the preset time, acquire the incident power of the radio frequency power supply, and obtain the power supply incident power;

[0033] A power comparison module, used to determine whether the incident power of the power source is greater than a preset incident power threshold;

[0034] When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source;

[0035] An arc detection module, configured to perform arc detection on the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply when the reflected power of the power supply is less than a preset reflected power threshold;

[0036] The circuit arc extinguishing module is used to reduce the RF power of the RF power supply from P1 to P2 when an arc exists in the RF circuit, and after a preset time, evenly increase the RF power to P1 within a specified time, and repeat the above steps multiple times until the arc of the RF circuit cannot be detected.

[0037] In order to solve the above problem, the present invention further provides an electronic device, the electronic device comprising:

[0038] at least one processor; and,

[0039] a memory communicatively connected to the at least one processor; wherein,

[0040] The memory stores a computer program that can be executed by the at least one processor. The computer program is executed by the at least one processor to enable the at least one processor to perform the rapid arc extinguishing method based on radio frequency power supply as described above.

[0041] In order to solve the above problems, the present invention also provides a computer-readable storage medium, including a data storage area and a program storage area, the data storage area stores created data, and the program storage area stores a computer program; wherein, when the computer program is executed by a processor, the rapid arc extinguishing method based on a radio frequency power supply as described above is implemented.

[0042] The embodiment of the present invention obtains the working time of the RF power supply in the RF circuit based on the preset data query instruction, obtains the working time of the power supply, and when the working time of the power supply is greater than the preset time, obtains the incident power of the RF power supply, and obtains the incident power of the power supply; judges whether the incident power of the power supply is greater than the preset incident power threshold; when the incident power of the power supply is greater than the preset incident power threshold, obtains the reflected power of the RF power supply, and obtains the reflected power of the RF power supply; when the reflected power of the power supply is less than the preset reflected power threshold, performs arc detection on the RF circuit based on the incident power of the power supply and the reflected power of the power supply; when there is an arc in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after the preset time, the RF power is uniformly increased to P1 within the prescribed time, and the above steps are repeated for multiple times until the arc of the RF circuit cannot be detected, thereby solving the problem of arc detection and elimination, and ensuring that the RF power supply works normally in the circuit. Therefore, the rapid arc extinguishing method, device, electronic device and computer-readable storage medium based on the RF power supply proposed by the present invention can improve the arc extinguishing speed of the circuit where the RF power supply is located. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 A schematic diagram of a process flow of a rapid arc extinguishing method based on a radio frequency power supply provided by an embodiment of the present invention;

[0044] Figure 2 A schematic diagram of a module of a rapid arc extinguishing device based on a radio frequency power supply provided in one embodiment of the present invention;

[0045] Figure 3 A schematic diagram of the internal structure of an electronic device for implementing a rapid arc extinguishing method based on a radio frequency power supply provided by an embodiment of the present invention.

[0046] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0047] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0048] The embodiment of the present application provides a rapid arc extinguishing method based on a radio frequency power supply. The execution subject of the rapid arc extinguishing method based on a radio frequency power supply includes but is not limited to at least one of the electronic devices such as a server and a terminal that can be configured to execute the method provided in the embodiment of the present application. Among them, the server can be an independent server, or it can be a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, content delivery networks (Content Delivery Network, CDN), and big data and artificial intelligence platforms. In other words, the rapid arc extinguishing method based on a radio frequency power supply can be executed by software or hardware installed on a remote device or a server device, and the software can be a blockchain platform. The server includes but is not limited to: a single server, a server cluster, a cloud server or a cloud server cluster, etc.

[0049] Reference Figure 1 FIG. 1 is a flow chart of a rapid arc extinguishing method based on a radio frequency power supply provided by an embodiment of the present invention. In this embodiment, the rapid arc extinguishing method based on a radio frequency power supply includes the following steps S1-S5:

[0050] S1. Based on a preset data query instruction, the working time of the radio frequency power supply in the radio frequency circuit is obtained to obtain the power supply working time, and when the power supply working time is greater than the preset time, the incident power of the radio frequency power supply is obtained to obtain the power supply incident power.

[0051] It is understandable that the process of obtaining the working time of the RF power supply through preset data query instructions and obtaining the incident power when the working time exceeds the preset time can monitor the operating status of the RF power supply, so that when the power supply works for a long time and the incident power is high, subsequent detection and adjustment measures can be taken in time to ensure the safe and stable operation of the RF circuit.

[0052] In an embodiment of the present invention, the data query instruction refers to a pre-set instruction for extracting the working time information of the RF power supply from the control system or monitoring system of the RF circuit, which is usually issued by the system software or control program, and communicates with the power supply through the communication interface (such as serial port, Ethernet, etc.) of the RF power supply to obtain the working time data of the power supply for subsequent monitoring and control operations.

[0053] Furthermore, the preset time refers to a time threshold pre-set according to actual needs and safety standards during the design, operation or monitoring of the RF power supply or RF circuit, which is used to determine whether the working time of the RF power supply exceeds the allowable range, thereby triggering corresponding monitoring or control operations to ensure the safe and stable operation of the RF circuit.

[0054] For example, after the RF power is turned on, a certain delay must pass (the delay is adjustable and is used as a preset time). When the RF power is just turned on, the environment of the plasma chamber is unstable and the reflected power is large, so it is necessary to wait for the plasma to stabilize before determining whether an arc exists.

[0055] In the embodiment of the present invention, the power incident power refers to the effective power portion of the RF signal output by the RF power supply that is transmitted to the load. It is an important parameter of the energy of the RF power supply output signal, which is used to measure the amount of energy provided by the RF power supply to the load and is one of the key indicators for evaluating the performance of the RF power supply and the working status of the RF circuit.

[0056] Furthermore, the incident power of the RF power supply can be obtained through a directional coupler, a power meter, a spectrum analyzer, an oscilloscope, and other devices, wherein a directional coupler is a commonly used RF signal measurement device that can couple out a portion of the RF signal for measurement. The incident power of the RF signal can be obtained by connecting the directional coupler to the output end of the RF power supply.

[0057] S2. Determine whether the incident power of the power source is greater than a preset incident power threshold.

[0058] It is understandable that by determining whether the incident power of the power supply is greater than the preset incident power threshold, appropriate measures can be taken in time when the incident power is too high, such as arc detection, etc., to ensure the safe and stable operation of the RF circuit and prevent equipment damage or circuit failure caused by excessive incident power.

[0059] In the embodiment of the present invention, the method for setting or obtaining the incident power threshold is generally based on the design parameters of the RF power supply, safety standards, and requirements of actual application scenarios. Specifically, it can be obtained based on equipment specifications and safety standards, through experiments and tests, and by referring to industry experience and similar equipment.

[0060] S3. When the incident power of the power source is greater than a preset incident power threshold, the reflected power of the radio frequency power source is acquired to obtain the reflected power of the radio frequency power source.

[0061] It is understandable that when the incident power of the power supply exceeds the preset threshold, the process of further obtaining the reflected power of the RF power supply can monitor the output characteristics of the RF power supply in more detail, so that when the incident power is too high, by analyzing the reflected power, it can be determined whether there is any abnormality in the RF circuit, such as load mismatch or arcing, so as to take corresponding protection or adjustment measures.

[0062] Furthermore, the RF power supply reflected power refers to the power carried by the part of the signal reflected back to the power supply by the load due to the impedance mismatch between the load and the power supply in the RF signal output by the RF power supply. It is an important parameter to measure the degree of matching between the RF power supply output signal and the load, and can be used to evaluate the energy transmission efficiency and working status of the RF circuit.

[0063] In the embodiment of the present invention, a directional coupler can be used to separate the reflected signal, and then the power of the reflected signal can be measured by a power meter; or an oscilloscope can be used to measure the voltage waveform of the reflected signal, and then the reflected power can be calculated based on the waveform. In addition, the reflected power can also be indirectly calculated by measuring the reflection coefficient (i.e., the ratio of the reflected signal to the incident signal). In practical applications, the selection of an appropriate method depends on the specific measurement requirements and available equipment conditions.

[0064] In the embodiment of the present invention, when the incident power of the power source is greater than a preset incident power threshold, the reflected power of the RF power source is obtained. Before obtaining the reflected power of the RF power source, the method further includes:

[0065] Acquiring a plasma environment of a radio frequency power source, and setting an incident power according to the plasma environment to obtain an initial incident power threshold;

[0066] Acquiring data on changes in the plasma environment over time to obtain real-time plasma change data;

[0067] The initial incident power threshold is automatically adjusted according to the plasma change data to obtain a time-varying incident power threshold, and the time-varying incident power threshold is used as a preset incident power threshold.

[0068] Furthermore, the plasma environment refers to the state in which the gas in the reaction chamber is ionized to form plasma due to the effect of radio frequency energy during the operation of the radio frequency power supply, including parameters such as plasma density, temperature, and composition. These parameters will change with time and space, and affect the output power and efficiency of the radio frequency power supply. In the application of radio frequency power supply, the monitoring and control of the plasma environment is of great significance for improving the stability of the process and the quality of the product.

[0069] In an embodiment of the present invention, the time-varying incident power threshold refers to a threshold obtained by automatically adjusting the initial incident power threshold according to the real-time change data of the plasma environment. This threshold will change with the change of the plasma environment to adapt to different working conditions and load changes, thereby ensuring that the output power of the RF power supply is within a safe range. For example, in the study of the interaction between high-power microwaves and plasma, the frequency of the incident electromagnetic wave is different, and the field strength threshold and the minimum generation time required to produce a step change will change. Therefore, the setting of the time-varying incident power threshold is to better control the output power of the RF power supply to adapt to changes in the plasma environment and improve the stability of the process and product quality. .

[0070] Furthermore, the automatic adjustment of the initial incident power threshold according to the real-time change data of the plasma to obtain a time-varying incident power threshold, and using the time-varying incident power threshold as a preset incident power threshold, includes:

[0071] Acquire the initial, middle and late stages of plasma operation according to the plasma change data to obtain the initial, middle and late stages of plasma operation;

[0072] Setting different threshold bases for the early stage of plasma operation, the middle stage of plasma operation and the late stage of plasma operation to obtain an early stage base, a middle stage base and a late stage base;

[0073] According to the early base number, mid-term base number and late base number, the initial incident power threshold is adjusted using the plasma change data to obtain a time-varying incident power threshold composed of an early time-varying power threshold, a mid-term time-varying power threshold and a late time-varying power threshold, and the time-varying incident power threshold is used as a preset incident power threshold.

[0074] S4. When the power supply reflected power is less than a preset reflected power threshold, arc detection is performed on the radio frequency circuit based on the power supply incident power and the power supply reflected power.

[0075] It is understandable that when the reflected power of the power supply is lower than the preset threshold, the process of using the incident power and reflected power of the power supply to detect arcs in the RF circuit can determine whether there is an arc in the RF circuit by analyzing the relationship between the incident and reflected powers when the reflected power is low, thereby timely discovering potential fault hazards and ensuring the safe operation of the RF circuit.

[0076] Furthermore, arc detection can promptly detect abnormal discharge in the circuit, prevent fire and equipment damage, improve the safety and reliability of the electrical system, and protect the lives and property of personnel. It has a wide range of application scenarios and is of great significance for ensuring electrical safety in various places and meeting the needs of green energy development.

[0077] In an embodiment of the present invention, the arc detection on the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply includes:

[0078] Calculating the reflectivity of the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply to obtain the radio frequency reflectivity;

[0079] Performing differential calculation on the radio frequency reflectivity to obtain a radio frequency reflection differential;

[0080] Taking the power incident power, power reflected power, radio frequency reflectivity and radio frequency reflection differential as arc-related characteristics of the radio frequency circuit to obtain radio frequency arc characteristics;

[0081] A preset arc recognition model is trained based on the radio frequency arc characteristics, and different weights are assigned to each radio frequency arc characteristic to obtain an arc recognition training model, and arc detection is performed on the radio frequency circuit according to the arc recognition training model.

[0082] It should be understood that RF reflectivity refers to the proportion of RF signals reflected back to the source end during transmission due to impedance mismatch of the transmission line or load. It is usually expressed as a reflection coefficient, with a value range of 0 to 1.

[0083] In the embodiment of the present invention, the RF reflection differential refers to the result obtained after differential calculation of the RF reflectivity, which reflects the rate of change of the RF reflectivity over time or other variables. By calculating the differential of the RF reflectivity, transient changes in the RF circuit, such as the generation and disappearance of arcs, can be detected more sensitively. This differential calculation helps to improve the sensitivity and accuracy of arc detection.

[0084] Furthermore, the arc recognition model preset based on the RF arc feature training is assigned different weights to each RF arc feature to obtain an arc recognition training model, and arc detection is performed on the RF circuit according to the arc recognition training model, including:

[0085] Dividing the arc corresponding feature data and the radio frequency arc features into a training set and a test set to obtain an arc feature training set and an arc feature test set;

[0086] The preset arc model object is trained by using the arc feature training set and the arc feature test set, and different weights are assigned to each radio frequency arc feature to obtain an arc recognition training model;

[0087] Basic detection data is acquired, and the basic detection data is imported into the arc recognition training model, and arc detection is performed on the radio frequency arc according to the arc recognition training.

[0088] In an embodiment of the present invention, the arc recognition training model is a model based on machine learning or deep learning algorithms, which is used to identify and detect arc faults. The model can accurately identify the arc state by extracting and analyzing the features of the arc signal, thereby improving the sensitivity and accuracy of arc detection. The model training process includes the steps of data acquisition, data preprocessing, feature extraction, model training and verification. Through training, the model can learn the mapping relationship between arc features and arc states, so as to perform arc detection on RF circuits in practical applications.

[0089] S5. When an arc exists in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after a preset time, the RF power is evenly increased to P1 within a specified time, and the above steps are repeated multiple times until no arc is detected in the RF circuit.

[0090] It is understandable that when an arc is detected in the RF circuit, the process of eliminating the arc by adjusting the power of the RF power supply can reduce the RF power to reduce the energy of the arc, thereby suppressing the generation of the arc, and gradually restore the power after a preset time to ensure the safe and stable operation of the RF circuit. By repeating this process until the arc is completely eliminated, the RF circuit can be effectively protected from damage caused by arc faults.

[0091] In the embodiment of the present invention, the P1 power can be set to 1000W, and the P2 power can be set to 0W.

[0092] Furthermore, the RF power of the RF power source is reduced from P1 to P2, and after a preset time, the RF power is uniformly increased to P1 within a specified time, and the above steps are repeated multiple times until the arc of the RF circuit cannot be detected. The method also includes:

[0093] A maximum number of arc extinguishing times is set for the RF power supply. When the number of repetitions of the steps of reducing the RF power of the RF power supply from P1 to P2 and, after a preset time, uniformly increasing the RF power to P1 within a specified time exceeds the maximum number of arc extinguishing times, an alarm message is generated.

[0094] In the embodiment of the present invention, the maximum number of arc extinguishing times refers to the maximum number of arc extinguishing operations allowed during the operation of the RF power supply. When the RF power supply detects an arc and performs arc extinguishing processing, the number of arc extinguishing operations will be recorded. If the number of arc extinguishing times exceeds the preset maximum number of arc extinguishing times, the system will generate an alarm message to remind the operator to perform inspection and maintenance. The setting of this parameter helps prevent the RF power supply from being damaged due to frequent arc faults and ensure the safe and stable operation of the equipment.

[0095] Among them, the maximum number of arc extinguishing times can be set according to experimental tests, industry standards, equipment manuals, historical data, etc.

[0096] Furthermore, the maximum number of arc extinguishing times is set for the RF power supply. When the number of repetitions of the steps of reducing the RF power of the RF power supply from P1 to P2 and, after a preset time, uniformly increasing the RF power to P1 within a specified time exceeds the maximum number of arc extinguishing times, after generating an alarm message, the method further includes:

[0097] Turn off the RF power supply.

[0098] The embodiment of the present invention obtains the working time of the RF power supply in the RF circuit based on the preset data query instruction, obtains the working time of the power supply, and when the working time of the power supply is greater than the preset time, obtains the incident power of the RF power supply, and obtains the incident power of the power supply; judges whether the incident power of the power supply is greater than the preset incident power threshold; when the incident power of the power supply is greater than the preset incident power threshold, obtains the reflected power of the RF power supply, and obtains the reflected power of the RF power supply; when the reflected power of the power supply is less than the preset reflected power threshold, performs arc detection on the RF circuit based on the incident power of the power supply and the reflected power of the power supply; when there is an arc in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after the preset time, the RF power is uniformly increased to P1 within the prescribed time, and the above steps are repeated for multiple times until the arc of the RF circuit cannot be detected, thereby solving the problem of arc detection and elimination, and ensuring that the RF power supply works normally in the circuit. Therefore, the rapid arc extinguishing method, device, electronic device and computer-readable storage medium based on the RF power supply proposed by the present invention can improve the arc extinguishing speed of the circuit where the RF power supply is located.

[0099] like Figure 2 The figure shows a module schematic diagram of a rapid arc extinguishing device based on a radio frequency power supply according to the present invention.

[0100] The rapid arc extinguishing device 100 based on radio frequency power supply of the present invention can be installed in an electronic device. According to the functions to be implemented, the rapid arc extinguishing device based on radio frequency power supply can include a data acquisition module 101, a signal conversion module 102, an impedance calculation module 103 and a power regulation module 104. The module of the present invention can also be referred to as a unit, which refers to a series of computer program segments that can be executed by an electronic device processor and can complete fixed functions, which are stored in the memory of the electronic device.

[0101] In this embodiment, the functions of each module / unit are as follows:

[0102] The power acquisition module 101 is used to acquire the working time of the radio frequency power supply in the radio frequency circuit based on the preset data query instruction, obtain the power supply working time, and when the power supply working time is greater than the preset time, acquire the incident power of the radio frequency power supply, and obtain the power supply incident power;

[0103] A power comparison module 102, used to determine whether the incident power of the power source is greater than a preset incident power threshold;

[0104] When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source;

[0105] An arc detection module 103, configured to perform arc detection on the RF circuit based on the incident power of the power supply and the reflected power of the power supply when the reflected power of the power supply is less than a preset reflected power threshold;

[0106] The circuit arc extinguishing module 104 is used to reduce the RF power of the RF power supply from P1 to P2 when an arc exists in the RF circuit, and after a preset time, evenly increase the RF power to P1 within a specified time, and repeat the above steps multiple times until the arc of the RF circuit cannot be detected.

[0107] In detail, each module described in the rapid arc extinguishing device 100 based on the radio frequency power supply in the embodiment of the present invention is used in the same manner as described above. Figure 1 The above-mentioned rapid arc extinguishing method based on radio frequency power supply has the same technical means and can produce the same technical effect, so it will not be repeated here.

[0108] like Figure 3 , which is a schematic diagram of the structure of an electronic device for realizing a rapid arc extinguishing method based on a radio frequency power supply according to the present invention.

[0109] The electronic device may include a processor 10, a memory 11, a communication bus 12, and a communication interface 13, and may also include a computer program stored in the memory 11 and executable on the processor 10, such as a rapid arc extinguishing program based on a radio frequency power supply.

[0110] In some embodiments, the processor 10 may be composed of an integrated circuit, for example, a single packaged integrated circuit, or a plurality of packaged integrated circuits with the same or different functions, including one or more central processing units (CPUs), microprocessors, digital processing chips, graphics processors, and combinations of various control chips. The processor 10 is the control core (ControlUnit) of the electronic device, and uses various interfaces and lines to connect various components of the entire electronic device, and executes or executes programs or modules stored in the memory 11 (for example, executing a rapid arc extinguishing program based on a radio frequency power supply, etc.), and calls data stored in the memory 11 to execute various functions of the electronic device and process data.

[0111] The memory 11 includes at least one type of readable storage medium, and the readable storage medium includes a flash memory, a mobile hard disk, a multimedia card, a card-type memory (for example, an SD or DX memory, etc.), a magnetic memory, a disk, an optical disk, etc. In some embodiments, the memory 11 may be an internal storage unit of an electronic device, such as a mobile hard disk of the electronic device. In other embodiments, the memory 11 may also be an external storage device of an electronic device, such as a plug-in mobile hard disk, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (Flash Card), etc. equipped on the electronic device. Further, the memory 11 may also include both an internal storage unit of the electronic device and an external storage device. The memory 11 can not only be used to store application software and various types of data installed in the electronic device, such as the code of a rapid arc extinguishing program based on a radio frequency power supply, but also can be used to temporarily store data that has been output or is to be output.

[0112] The communication bus 12 may be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The bus may be divided into an address bus, a data bus, a control bus, etc. The bus is configured to realize connection and communication between the memory 11 and at least one processor 10, etc.

[0113] The communication interface 13 is used for communication between the above-mentioned electronic device and other devices, including a network interface and a user interface. Optionally, the network interface may include a wired interface and / or a wireless interface (such as a WI-FI interface, a Bluetooth interface, etc.), which is generally used to establish a communication connection between the electronic device and other electronic devices. The user interface may be a display (Display), an input unit (such as a keyboard (Keyboard)), and optionally, the user interface may also be a standard wired interface, a wireless interface. Optionally, in some embodiments, the display may be an LED display, a liquid crystal display, a touch-sensitive liquid crystal display, and an OLED (Organic Light-Emitting Diode, organic light-emitting diode) touch device, etc. Among them, the display may also be appropriately referred to as a display screen or a display unit, which is used to display information processed in the electronic device and to display a visual user interface.

[0114] Figure 3 Only an electronic device with components is shown, and those skilled in the art will understand that Figure 3 The structure shown does not constitute a limitation on the electronic device, and may include fewer or more components than shown in the figure, or combine certain components, or arrange the components differently.

[0115] For example, although not shown, the electronic device may also include a power source (such as a battery) for supplying power to each component. Preferably, the power source may be logically connected to the at least one processor 10 through a power management device, so that the power management device can realize functions such as charging management, discharging management, and power consumption management. The power source may also include one or more DC or AC power sources, recharging devices, power failure detection circuits, power converters or inverters, power status indicators, and other arbitrary components. The electronic device may also include a variety of sensors, Bluetooth modules, Wi-Fi modules, etc., which will not be repeated here.

[0116] It should be understood that the embodiment is for illustration only and the scope of the patent application is not limited to this structure.

[0117] The rapid arc extinguishing program based on the radio frequency power source stored in the memory 11 in the electronic device is a combination of multiple computer programs. When running in the processor 10, it can achieve:

[0118] Based on a preset data query instruction, the working time of the radio frequency power supply in the radio frequency circuit is obtained to obtain the power supply working time, and when the power supply working time is greater than the preset time, the incident power of the radio frequency power supply is obtained to obtain the power supply incident power;

[0119] Determining whether the incident power of the power source is greater than a preset incident power threshold;

[0120] When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source;

[0121] When the power supply reflected power is less than a preset reflected power threshold, arc detection is performed on the radio frequency circuit based on the power supply incident power and the power supply reflected power;

[0122] When an arc exists in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after a preset time, the RF power is evenly increased to P1 within a specified time, and the above steps are repeated multiple times until the arc of the RF circuit cannot be detected.

[0123] Specifically, the specific implementation method of the processor 10 for the above computer program can refer to Figure 1 The description of the relevant steps in the corresponding embodiments will not be repeated here.

[0124] Furthermore, if the module / unit integrated in the electronic device is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a non-volatile computer-readable storage medium. The computer-readable storage medium can be volatile or non-volatile. For example, the computer-readable medium can include: any entity or device capable of carrying the computer program code, a recording medium, a USB flash drive, a mobile hard disk, a magnetic disk, an optical disk, a computer memory, and a read-only memory (ROM).

[0125] The present invention further provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor of an electronic device, the computer program can implement:

[0126] Based on a preset data query instruction, the working time of the radio frequency power supply in the radio frequency circuit is obtained to obtain the power supply working time, and when the power supply working time is greater than the preset time, the incident power of the radio frequency power supply is obtained to obtain the power supply incident power;

[0127] Determining whether the incident power of the power source is greater than a preset incident power threshold;

[0128] When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source;

[0129] When the power supply reflected power is less than a preset reflected power threshold, arc detection is performed on the radio frequency circuit based on the power supply incident power and the power supply reflected power;

[0130] When an arc exists in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after a preset time, the RF power is evenly increased to P1 within a specified time, and the above steps are repeated multiple times until the arc of the RF circuit cannot be detected.

[0131] In the several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of the modules is only a logical function division, and there may be other division methods in actual implementation.

[0132] The modules described as separate components may or may not be physically separated, and the components shown as modules may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0133] In addition, each functional module in each embodiment of the present invention may be integrated into one processing unit, each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional modules.

[0134] It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention.

[0135] Therefore, no matter from which point of view, the embodiments should be regarded as illustrative and non-restrictive, and the scope of the present invention is limited by the appended claims rather than the above description, so it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any attached figure mark in the claims should not be regarded as limiting the claims involved.

[0136] The blockchain referred to in this invention is a new application mode of computer technologies such as distributed data storage, peer-to-peer transmission, consensus mechanism, encryption algorithm, etc. Blockchain is essentially a decentralized database, a string of data blocks generated by cryptographic methods. Each data block contains a batch of network transaction information, which is used to verify the validity of its information (anti-counterfeiting) and generate the next block. Blockchain can include the underlying blockchain platform, platform product service layer, and application service layer.

[0137] The embodiments of the present application can acquire and process relevant data based on artificial intelligence technology. Among them, artificial intelligence (AI) is the theory, method, technology and application system that uses digital computers or machines controlled by digital computers to simulate, extend and expand human intelligence, perceive the environment, acquire knowledge and use knowledge to obtain the best results.

[0138] In addition, it is clear that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices stated in the system claim can also be implemented by one unit or device through software or hardware. The second and other words are used to indicate names, but not to indicate any particular order.

[0139] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present invention.

Claims

1. A rapid arc extinguishing method based on radio frequency power supply, characterized in that: The method comprises: Based on a preset data query instruction, the working time of the radio frequency power supply in the radio frequency circuit is obtained to obtain the power supply working time, and when the power supply working time is greater than the preset time, the incident power of the radio frequency power supply is obtained to obtain the power supply incident power; Determining whether the incident power of the power source is greater than a preset incident power threshold; When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source; When the power supply reflected power is less than a preset reflected power threshold, arc detection is performed on the radio frequency circuit based on the power supply incident power and the power supply reflected power; When an arc exists in the RF circuit, the RF power of the RF power supply is reduced from P1 to P2, and after a preset time, the RF power is evenly increased to P1 within a specified time, and the above steps are repeated multiple times until the arc of the RF circuit cannot be detected.

2. The rapid arc extinguishing method based on radio frequency power supply according to claim 1, characterized in that: The arc detection of the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply includes: Calculating the reflectivity of the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply to obtain the radio frequency reflectivity; Performing differential calculation on the radio frequency reflectivity to obtain a radio frequency reflection differential; Taking the power incident power, power reflected power, radio frequency reflectivity and radio frequency reflection differential as arc-related characteristics of the radio frequency circuit to obtain radio frequency arc characteristics; A preset arc recognition model is trained based on the radio frequency arc characteristics, and different weights are assigned to each radio frequency arc characteristic to obtain an arc recognition training model, and arc detection is performed on the radio frequency circuit according to the arc recognition training model.

3. The rapid arc extinguishing method based on radio frequency power supply according to claim 2, characterized in that: The method of training a preset arc recognition model based on the radio frequency arc feature and assigning different weights to each radio frequency arc feature to obtain an arc recognition training model, and performing arc detection on the radio frequency circuit according to the arc recognition training model includes: Dividing the arc corresponding feature data and the radio frequency arc features into a training set and a test set to obtain an arc feature training set and an arc feature test set; The preset arc model object is trained by using the arc feature training set and the arc feature test set, and different weights are assigned to each radio frequency arc feature to obtain an arc recognition training model; Basic detection data is acquired, and the basic detection data is imported into the arc recognition training model, and arc detection is performed on the radio frequency arc according to the arc recognition training.

4. The rapid arc extinguishing method based on radio frequency power supply according to claim 1, characterized in that: When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the RF power source, before obtaining the reflected power of the RF power source, the method further includes: Acquiring a plasma environment of a radio frequency power source, and setting an incident power according to the plasma environment to obtain an initial incident power threshold; Acquiring data on changes in the plasma environment over time to obtain real-time plasma change data; The initial incident power threshold is automatically adjusted according to the plasma change data to obtain a time-varying incident power threshold, and the time-varying incident power threshold is used as a preset incident power threshold.

5. The rapid arc extinguishing method based on radio frequency power supply according to claim 4, characterized in that: The method of automatically adjusting the initial incident power threshold according to the plasma change data to obtain a time-varying incident power threshold, and using the time-varying incident power threshold as a preset incident power threshold, comprises: Acquire the initial, middle and late stages of plasma operation according to the plasma change data to obtain the initial, middle and late stages of plasma operation; Setting different threshold bases for the early stage of plasma operation, the middle stage of plasma operation and the late stage of plasma operation to obtain an early stage base, a middle stage base and a late stage base; According to the early base number, mid-term base number and late base number, the initial incident power threshold is adjusted using the plasma change data to obtain a time-varying incident power threshold composed of an early time-varying power threshold, a mid-term time-varying power threshold and a late time-varying power threshold, and the time-varying incident power threshold is used as a preset incident power threshold.

6. The rapid arc extinguishing method based on radio frequency power supply according to claim 1, characterized in that: The RF power of the RF power source is reduced from P1 to P2, and after a preset time, the RF power is uniformly increased to P1 within a specified time, and the above steps are repeated multiple times until the arc of the RF circuit cannot be detected. The method also includes: A maximum number of arc extinguishing times is set for the RF power supply. When the number of repetitions of the steps of reducing the RF power of the RF power supply from P1 to P2 and, after a preset time, uniformly increasing the RF power to P1 within a specified time exceeds the maximum number of arc extinguishing times, an alarm message is generated.

7. The rapid arc extinguishing method based on radio frequency power supply according to any one of claims 1 to 6, characterized in that: The maximum number of arc extinguishing times is set for the RF power supply, and when the number of repetitions of the steps of reducing the RF power of the RF power supply from P1 to P2 and, after a preset time, uniformly increasing the RF power to P1 within a specified time exceeds the maximum number of arc extinguishing times, after generating an alarm message, the method further includes: Turn off the RF power supply.

8. A rapid arc extinguishing device based on radio frequency power supply, characterized in that: The device comprises: A power acquisition module, used to acquire the working time of the radio frequency power supply in the radio frequency circuit based on a preset data query instruction, obtain the power supply working time, and when the power supply working time is greater than the preset time, acquire the incident power of the radio frequency power supply, and obtain the power supply incident power; A power comparison module, used to determine whether the incident power of the power source is greater than a preset incident power threshold; When the incident power of the power source is greater than a preset incident power threshold, obtaining the reflected power of the radio frequency power source to obtain the reflected power of the radio frequency power source; An arc detection module, configured to perform arc detection on the radio frequency circuit based on the incident power of the power supply and the reflected power of the power supply when the reflected power of the power supply is less than a preset reflected power threshold; The circuit arc extinguishing module is used to reduce the RF power of the RF power supply from P1 to P2 when an arc exists in the RF circuit, and after a preset time, evenly increase the RF power to P1 within a specified time, and repeat the above steps multiple times until the arc of the RF circuit cannot be detected.

9. An electronic device, characterized in that: The electronic device comprises: at least one processor; and, a memory communicatively connected to the at least one processor; wherein, The memory stores a computer program that can be executed by the at least one processor, and the computer program is executed by the at least one processor to enable the at least one processor to perform the rapid arc extinguishing method based on a radio frequency power source according to any one of claims 1 to 7.

10. A computer-readable storage medium, comprising a data storage area and a program storage area, wherein the data storage area stores created data and the program storage area stores a computer program; wherein: When the computer program is executed by a processor, a rapid arc extinguishing method based on a radio frequency power supply is implemented as claimed in any one of claims 1 to 7.

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