Sample stage and atomic force microscope with same

Abstract

The invention discloses a sample stage and an atomic force microscope with the same, and relates to the technical field of NV microscopes. The sample table comprises a mounting base and a circuit board, the mounting base defines a containing groove, the circuit board is detachably arranged in the containing groove and used for bearing a sample, in the first direction, one end of the containing groove is an open end, the circuit board can be moved into or out of the containing groove through the open end in the first direction, and the first direction is perpendicular to the thickness direction of the circuit board; the circuit board has a microwave antenna adapted to radiate microwaves to the sample. Therefore, the circuit board can be moved into or out of the accommodating groove from the open end of the accommodating groove along the first direction, so that the circuit board can be conveniently detached from the mounting seat, a sample can be conveniently taken and placed outside the sample table, the sample taking and placing difficulty can be favorably reduced, a to-be-measured part of the sample can be conveniently and accurately corresponding to the microwave antenna, and the measurement accuracy is improved. The placement position and posture of the sample can be accurately controlled, the test efficiency and the test precision can be improved, the operation is simple, and the implementation is easy.

Description

Technical Field

[0001] The present invention relates to the technical field of NV microscopes, and more particularly to a sample stage and an atomic force microscope having the same. Background Art

[0002] In related technologies, when performing various tests on a sample, it is necessary to pick up and place the sample. However, due to the spatial blockage of other components (such as the spatial blockage of other components such as a probe, a magnetic field system, a laser system, etc.), there is a problem that it is not easy to pick up and place the sample, and it is not easy to accurately align the measured part of the sample with the microwave antenna, and it is difficult to accurately control the placement position and posture of the sample, which will lead to a series of problems such as low test efficiency and poor accuracy. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. To this end, an object of the present invention is to provide a sample stage that facilitates the picking up and placing operations of the sample outside the sample stage so as to accurately control the placement position and posture of the sample.

[0004] The present invention further provides an atomic force microscope having the above sample stage.

[0005] The sample stage according to an embodiment of the present invention includes: a mounting base that defines a receiving groove; a circuit board that is detachably disposed in the receiving groove and is used to carry a sample. Along a first direction, one end of the receiving groove is configured as an open end, and the circuit board can be moved into or out of the receiving groove through the open end along the first direction, and the first direction is perpendicular to the thickness direction of the circuit board; the circuit board has a microwave antenna, and the microwave antenna is adapted to radiate microwaves to the sample.

[0006] By detachably connecting the mounting base and the circuit board, the sample stage according to an embodiment of the present invention facilitates the disassembly of the circuit board from the mounting base, so as to facilitate the picking up and placing operations of the sample outside the sample stage, so as to accurately control the placement position and posture of the sample, and the operation is simple and easy to implement.

[0007] In some embodiments of the present invention, the sample stage further includes: a stop member that is movably or detachably disposed on the mounting base, and the stop member can block the open end.

[0008] In some embodiments of the present invention, the sample stage further includes: a limiting member. Along the thickness direction of the circuit board, the top end of the receiving groove is open, and the limiting member is disposed on the mounting base and a part of the structure is spaced apart from the bottom wall of the receiving groove to limit the circuit board along the thickness direction of the circuit board.

[0009] In some embodiments of the present invention, the limiting member includes: a fixing portion and a limiting portion, the fixing portion is connected to the limiting portion and has an included angle, the fixing portion is detachably arranged on the mounting seat, and at least part of the limiting portion is spaced apart from the bottom wall of the receiving groove.

[0010] In some embodiments of the present invention, at least part of the microwave antenna is configured as an arc segment.

[0011] In some embodiments of the present invention, the microwave antenna includes: a body portion and a first microstrip line, at least part of the body portion is configured as an arc segment, the circuit board further has a first connector, along a second direction, both sides of the body portion are connected with the first microstrip line, and one end of each first microstrip line away from the body portion is connected with the first connector, and the second direction, the thickness direction of the circuit board, and the first direction are perpendicular to each other.

[0012] In some embodiments of the present invention, the line width of the body portion is smaller than the line width of the first microstrip line.

[0013] In some embodiments of the present invention, the body portion defines or the microwave antenna defines a space with an arc-shaped outer contour and a notch.

[0014] In some embodiments of the present invention, the circuit board further has a second microstrip line, along the first direction, both sides of the microwave antenna are provided with the second microstrip line, and the second microstrip line is grounded.

[0015] In some embodiments of the present invention, along the second direction, the limiting members are provided on both sides of the mounting seat, the second microstrip line extends along the second direction, and both ends of each second microstrip line are respectively connected to the limiting members on both sides of the mounting seat to be grounded, and the second direction, the thickness direction of the circuit board, and the first direction are perpendicular to each other.

[0016] In some embodiments of the present invention, one side of one of the second microstrip lines facing the microwave antenna has a receiving notch, and part of the microwave antenna is located in the receiving notch.

[0017] In some embodiments of the present invention, the circuit board has an avoidance notch, and the avoidance notch is located on one side of one of the second microstrip lines away from the microwave antenna.

[0018] In some embodiments of the present invention, for the two second microstrip lines, the part of the second microstrip line close to the avoidance notch surrounds the avoidance notch.

[0019] In some embodiments of the present invention, the mounting base defines a receiving space having a first top wall and a second top wall. The first top wall and the second top wall are spaced apart to form an avoidance channel. Both the first top wall and the second top wall are configured as the bottom wall of the receiving groove. The avoidance channel communicates the avoidance notch with the receiving space.

[0020] In some embodiments of the present invention, the sample stage further includes a magnetic field generating device for applying a preset magnetic field.

[0021] In some embodiments of the present invention, the circuit board further has a power supply microstrip line and a second connector. The number of the power supply microstrip lines is the same as that of the second connectors and they are in one-to-one correspondence. The power supply microstrip line is adapted to be connected to the sample to conduct current to the sample.

[0022] An atomic force microscope according to an embodiment of the present invention includes a sample stage, a cantilever, and a probe. The sample stage includes the above-mentioned sample stage. The probe is provided at one end of the cantilever, and the probe has an NV color center away from one end of the cantilever.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0024] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, wherein:

[0025] Figure 1 is a schematic diagram of the cooperation between the sample stage and the sample according to an embodiment of the present invention;

[0026] Figure 2 is a schematic diagram of the circuit board according to an embodiment of the present invention;

[0027] Figure 3 is a schematic diagram of the cantilever, the probe, the sample, and the sample stage according to an embodiment of the present invention;

[0028] Figure 4 is a block diagram of the working principle of the atomic force microscope according to an embodiment of the present invention.

[0029] Reference Signs:

[0030] Mounting base 1; Receiving groove 11; Bottom wall 111; Receiving space 12; First top wall 121; Second top wall 122; Avoidance channel 123;

[0031] Circuit board 2; microwave antenna 21; body part 211; first microstrip line 212; first connector 22; second microstrip line 23; accommodation notch 231; avoidance notch 24; power supply microstrip line 25; second connector 26;

[0032] Stopper 3;

[0033] Limiting member 4; fixing part 41; limiting part 42;

[0034] Sample stage 10; sample 20; cantilever 30;

[0035] Probe 40; NV color center 401;

[0036] Atomic force microscope 100; laser 101; detector 102; acquisition card 103; host computer 104; lock-in amplifier 105; phase-locked loop 106; piezoelectric crystal 107. Detailed implementation mode

[0037] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0038] Below, refer to Figures 1 - 4 Describe the sample stage 10 according to the embodiment of the present invention and the atomic force microscope 100 having the same.

[0039] As Figures 1 - 3 shown, the sample stage 10 according to the embodiment of the present invention includes: a mounting base 1 and a circuit board 2. The mounting base 1 defines a receiving groove 11. The circuit board 2 is detachably disposed in the receiving groove 11 and is used to carry the sample 20. Along a first direction, one end of the receiving groove 11 is configured as an open end. The circuit board 2 can be moved into or out of the receiving groove 11 along the first direction through the open end. The first direction is perpendicular to the thickness direction of the circuit board 2. The circuit board 2 has a microwave antenna 21, and the microwave antenna 21 is adapted to radiate microwaves to the sample 20.

[0040] Among them, the sample stage 10 can be used to carry the sample 20. Specifically, the sample 20 can be placed on the circuit board 2. Above the sample 20, a probe 40 is provided. The probe 40 can be configured as an NV (Nitrogen-Vacancy nitrogen vacancy center) probe 40. The tip of the probe 40 is close to the sample 20. The NV color center 401 at the tip of the probe 40 has the advantages of high spatial resolution and high sensitivity to the magnetic field. Using this advantage, quantitative magnetic imaging of the sample 20 can be performed. The circuit board 2 has a microwave antenna 21. The microwave antenna 21 is correspondingly arranged with the sample 20. When the microwave antenna 21 is powered on, it can generate a uniform microwave field. The microwave field can act on the probe 40, that is, the microwave antenna 21 can radiate microwaves to the sample 20.

[0041] A microwave field and excitation light can be applied to the NV color center 401 at the tip of the probe 40, and based on the ODMR (Optically Detected Magnetic Resonance) technology, the fluorescence signal of the NV color center 401 is detected to obtain the microscopic magnetic field information on the surface of the sample 20.

[0042] Such as Figure 1 As shown, the mounting base 1 defines a receiving groove 11. Along the first direction, one end of the receiving groove 11 is configured as an open end. The circuit board 2 can be moved into or out of the receiving groove 11 along the first direction through the open end, so that the circuit board 2 is detachably connected to the mounting base 1. The circuit board 2 can be used to carry the sample 20. In the related art, due to the small size of the sample (the higher the measurement accuracy, the smaller the sample size), other components will interfere with the operation of placing and removing the sample, resulting in the difficulty of completing the operation of placing and removing the sample in the related art, and the placement position of the sample is not precise enough. In the sample stage 10 of the embodiment of the present invention, the circuit board 2 can be moved into or out of the receiving groove 11 along the first direction from the open end of the receiving groove 11. The sample 20 can be first placed at a preset position on the circuit board 2, and then the circuit board 2 and the sample 20 are jointly placed in the receiving groove 11 and fixed to the mounting base 1. Such a setting facilitates the operation of placing and removing the sample 20 outside the sample stage 10, so that the sample 20 is accurately placed at the corresponding position of the microwave antenna 21, which is convenient for accurately controlling the placement position and posture of the sample 20, with simple operation, reduced assembly difficulty, and convenient for the experiment to be carried out.

[0043] In the above embodiment, the circuit board 2 can be moved into or out of the receiving groove 11 along the first direction from the open end of the receiving groove 11, which is convenient for disassembling the circuit board 2 from the mounting base 1, facilitating the operation of placing and removing the sample 20 outside the sample stage 10, reducing the difficulty of placing and removing the sample 20, and facilitating the precise correspondence between the part to be measured of the sample 20 and the microwave antenna 21, accurately controlling the placement position and posture of the sample 20, improving the test efficiency and test accuracy, with simple operation and easy implementation.

[0044] In some embodiments of the present invention, as Figure 1 shown, the sample stage 10 further includes: a stopper 3, which is movably or detachably disposed on the mounting base 1, and the stopper 3 can block the open end.

[0045] Among them, the stopper 3 can be movably disposed on the mounting base 1. As some embodiments of the present invention, the stopper 3 is rotatably disposed on the mounting base 1. When the circuit board 2 needs to be installed in the receiving groove 11, the stopper 3 can be rotated to avoid the open end of the receiving groove 11, so that the circuit board 2 can enter the receiving groove 11. After that, the stopper 3 is rotated to block the open end of the receiving groove 11. As some other embodiments of the present invention, the stopper 3 can be detachably disposed on the mounting base 1. The stopper 3 can be bolted or snap-connected to the mounting base 1. For example, the mounting base 1 can be provided with a slot, and the stopper 3 can have a hook. The stopper 3 can be snap-connected to the slot of the mounting base 1 through the hook. When the circuit board 2 needs to be installed in the receiving groove 11, the stopper 3 can be removed so that the circuit board 2 can enter the receiving groove 11. After that, the stopper 3 is installed in the slot of the mounting base 1. Such a setting can limit the movement of the circuit board 2 in the first direction towards the direction of the stopper 3, so that the circuit board 2 can be stably and reliably fixed in the receiving groove 11, and further fix the relative position of the sample 20, so as to perform various tests on the sample 20.

[0046] As some embodiments of the present invention, there can be multiple stoppers 3. The number of stoppers 3 can be two, three, four, etc. Multiple stoppers 3 can be used to limit the circuit board 2 to further improve the spatial position stability of the circuit board 2 relative to the mounting base 1.

[0047] In some embodiments of the present invention, as Figure 1 shown, the sample stage 10 further includes: a limiting member 4. Along the thickness direction of the circuit board 2, the top end of the receiving groove 11 is open, and the limiting member 4 is disposed on the mounting base 1 and a part of the structure is spaced apart from the bottom wall 111 of the receiving groove 11 to limit the circuit board 2 along the thickness direction of the circuit board 2.

[0048] Among them, along the third direction (the thickness direction of the circuit board 2), the top end of the receiving groove 11 can be open. The open part at the top end of the receiving groove 11 is convenient for placing the circuit board 2 and the sample 20 and for arranging the probes 40. It can reduce the risk of interference between the sample 20 and the groove wall of the receiving groove 11 during the process of placing the sample 20 and the circuit board 2 into the receiving groove 11, and improve the use reliability. It should be noted that the third direction is perpendicular to the first direction.

[0049] The limiting member 4 can be connected to the mounting base 1 by welding, snap connection, or bolt connection, etc. Along the third direction, a part of the structure of the limiting member 4 can be spaced apart from the bottom wall 111 of the receiving groove 11. The circuit board 2 can be placed between a part of the structure of the limiting member 4 and the bottom wall 111, and the spacing distance between a part of the structure of the limiting member 4 and the bottom wall 111 is substantially the same as the thickness dimension of the circuit board 2. When the circuit board 2 is placed between a part of the structure of the limiting member 4 and the bottom wall 111, the limiting member 4 and the bottom wall 111 can limit the movement of the circuit board 2 along the third direction, so that the circuit board 2 is stably and reliably placed in the receiving groove 11, so as to reduce the risk of change in the relative spatial position of the sample 20 during the experiment.

[0050] As some embodiments of the present invention, there can be multiple limiting members 4, and the number of the limiting members 4 can be two, three, four, etc. Multiple limiting members 4 can all be used to limit the circuit board 2, so as to further improve the stability of the spatial position of the circuit board 2 relative to the mounting base 1.

[0051] In some embodiments of the present invention, as Figure 1 shown, the limiting member 4 includes: a fixing portion 41 and a limiting portion 42. The fixing portion 41 is connected to the limiting portion 42 and has an included angle. The fixing portion 41 is detachably arranged on the mounting base 1, and at least a part of the limiting portion 42 is spaced apart from the bottom wall 111 of the receiving groove 11.

[0052] Among them, the fixing portion 41 can be used to fix the limiting member 4 to the mounting base 1, at least a part of the limiting portion 42 can be spaced apart from the bottom wall 111, and the fixing portion 41 can be fixedly connected to the limiting portion 42. As some embodiments of the present invention, the fixing portion 41 and the limiting portion 42 can be integrally formed. Such a setting can enhance the connection strength between the fixing portion 41 and the limiting portion 42 and reduce the risk of fracture at the connection between the fixing portion 41 and the limiting portion 42. As some other embodiments of the present invention, the fixing portion 41 and the limiting portion 42 can be separate parts, and the fixing portion 41 and the limiting portion 42 can be connected by welding, snap connection, or bolt connection, etc.

[0053] Both the fixing part 41 and the limiting part 42 can be configured as plate-like structures. There is an included angle between the plane where the fixing part 41 is located and the plane where the limiting part 42 is located. For example, a 90° included angle can be formed between the fixing part 41 and the limiting part 42. Specifically, the plane where the limiting part 42 is located is parallel to the plane of the bottom wall 111, and the plane where the fixing part 41 is located is perpendicular to the normal direction of the bottom wall 111. Such a setting has a reasonable structure and is convenient for assembly. The fixing part 41 can be detachably arranged on the mounting base 1. Such a setting is convenient for replacing the failed limiting member 4. Moreover, such a setting can also first disassemble the limiting member 4 before assembling the circuit board 2 into the receiving groove 11, then place the circuit board 2 in the receiving groove 11, and then install the limiting member 4, so as to reduce the risk that the limiting member 4 interferes with the circuit board 2 and causes a change in the relative spatial position of the sample 20. Such a setting can provide multiple options for the installation method of the circuit board 2, so as to improve the use flexibility of the sample stage 10.

[0054] At least part of the limiting part 42 can be spaced apart from the bottom wall 111 of the receiving groove 11. The spacing distance between at least part of the limiting part 42 and the bottom wall 111 of the receiving groove 11 is approximately the same as the thickness dimension of the circuit board 2, so as to limit the movement of the circuit board 2 in the third direction through at least part of the limiting part 42 and the bottom wall 111 of the receiving groove 11, so that the circuit board 2 is stably and reliably placed in the receiving groove 11, so as to reduce the risk that the relative spatial position of the sample 20 changes during the experiment.

[0055] As some embodiments of the present invention, at least part of the limiting part 42 can be configured as a spring piece. At least part of the limiting part 42 can have elasticity, and at least part of the limiting part 42 can deform along the third direction. When the circuit board 2 is placed between at least part of the limiting part 42 and the bottom wall 111 of the receiving groove 11, at least part of the limiting part 42 can be in contact with the circuit board 2, and at least part of the limiting part 42 can exert pressure on the circuit board 2 to further limit the movement of the circuit board 2 in the third direction, so that the circuit board 2 is stably and reliably placed in the receiving groove 11.

[0056] In some embodiments of the present invention, as Figure 2 shown, at least part of the microwave antenna 21 is configured as an arc segment.

[0057] Among them, at least part of the microwave antenna 21 can be configured as an arc segment, and the arc segment can be arranged around the sample 20. As some embodiments of the present invention, the microwave antenna 21 can be configured as a quasi-“Ω” shaped structure. Further, the central angle corresponding to the “Ω”-shaped microwave antenna 21 can be close to 360°, so that the microwave antenna 21 is approximately configured as a circle to form a circular microwave field, making the microwave field intensity more uniform. Such a setting can enable the microwave antenna 21 to generate a uniform microwave field, making the microwave energy radiated by the microwave antenna 21 to the probe 40 uniform, reducing the measurement error caused by uneven microwave energy distribution, and improving the accuracy of the measurement result.

[0058] In some embodiments of the present invention, as Figure 2 shown, the microwave antenna 21 includes: a body portion 211 and a first microstrip line 212. At least part of the body portion 211 is configured as an arc segment. The circuit board 2 also has a first connector 22. Along the second direction, both sides of the body portion 211 are connected with the first microstrip line 212, and one end of each first microstrip line 212 far away from the body portion 211 is connected with the first connector 22. The second direction, the thickness direction of the circuit board 2, and the first direction are perpendicular to each other.

[0059] Among them, at least part of the body portion 211 can be configured as an arc segment. As some embodiments of the present invention, the body portion 211 can be configured as a quasi-“Ω” shaped structure. The body portion 211 has opposite ends. Along the second direction, both ends of the body portion 211 are correspondingly connected with the first microstrip line 212, and the body portion 211 and the two connected first microstrip lines 212 are electrically connected.

[0060] As Figure 2 shown, taking the second direction as the left-right direction as an example for illustration, both the left and right ends of the body portion 211 are connected with the first microstrip line 212. The circuit board 2 can also have two first connectors 22. One end of each first microstrip line 212 far away from the body portion 211 is connected with a first connector 22. The first microstrip line 212 is electrically connected with the corresponding first connector 22. The first connector 22 can be configured as an Ipex (Integrated Passive Device Extension) connector. Specifically, the left end of the first microstrip line 212 on the left side of the body portion 211 is connected with the left first connector 22, and the right end of the first microstrip line 212 on the right side of the body portion 211 is connected with the right first connector 22. The current can be conducted in sequence through the left first connector 22, the left first microstrip line 212, the body portion 211, the right first microstrip line 212, and the right first connector 22 (or in the opposite direction, and the current conduction direction depends on the wiring method of the power supply) to form a loop, so that the microwave antenna 21 can generate a uniform microwave field under the action of the current, improving the accuracy of the measurement result.

[0061] In some embodiments of the present invention, as Figure 2 shown, the line width of the body portion 211 is smaller than the line width of the first microstrip line 212.

[0062] Among them, the line width of the body portion 211 can be designed to be smaller than the line width of the first microstrip line 212, so that the line width of the body portion 211 is smaller and the line width of the first microstrip line 212 is larger. The thinner body portion 211 is beneficial to concentrating the current to enhance the field strength of the microwave field formed by the body portion 211. The wider first microstrip line 212 is beneficial to ensuring the reliability of the electrical connection, and can reduce the resistance and voltage components of the first microstrip line 212, so that the ratio of the electromagnetic field strength between the interfering electromagnetic field generated by the first microstrip line 212 at the measurement position of the sample 20 and the target electromagnetic field generated by the body portion 211 at the measurement position of the sample 20 meets the signal-to-noise ratio required by the experiment. Specifically, for example, it is less than 0.5, preferably less than 0.1.

[0063] In some embodiments of the present invention, as Figure 2 shown, the body portion 211 defines or the microwave antenna 21 defines a space with an arc-shaped outer contour and a notch.

[0064] Among them, the body portion 211 can define a space with an arc-shaped outer contour and a notch, or the microwave antenna 21 can define a space with an arc-shaped outer contour and a notch. At least part of the sample 20 can correspond to this space. For example, at least part of the sample 20 can correspond to the center of this space, which can facilitate the precise correspondence between the part to be measured of the sample 20 and the microwave antenna 21, so that the sample 20 is in a uniform magnetic field to improve the measurement accuracy.

[0065] In some embodiments of the present invention, as Figure 1 and Figure 2 shown, the circuit board 2 further has a second microstrip line 23. Along the first direction, the second microstrip lines 23 are provided on both sides of the microwave antenna 21, and the second microstrip lines 23 are grounded.

[0066] Among them, along the first direction, the second microstrip lines 23 can be provided on both sides of the microwave antenna 21. The two second microstrip lines 23 can be conductive, and the two second microstrip lines 23 are both grounded. Such a setting can make the 0 potential point (grounded) at infinity close to the microwave antenna 21, thereby increasing the electric potential gradient near the microwave antenna 21, which is beneficial to concentrating the microwave energy radiated by the microwave antenna 21 to enhance the microwave radiation effect of the microwave antenna 21.

[0067] In some embodiments of the present invention, as Figure 1 and Figure 2As shown, along the second direction, limiting members 4 are provided on both sides of the mounting base 1. The second microstrip line 23 extends along the second direction, and both ends of each second microstrip line 23 are respectively connected to the limiting members 4 on both sides of the mounting base 1 for grounding. The second direction, the thickness direction of the circuit board 2, and the first direction are perpendicular to each other.

[0068] Among them, along the second direction, limiting members 4 can be provided on both sides of the mounting base 1. The limiting members 4 can be conductive. Both second microstrip lines 23 can extend along the second direction, and both ends of each second microstrip line 23 are respectively connected to the limiting members 4 on both sides of the mounting base 1 for grounding. Such a setting can limit the movement of the circuit board 2 along the third direction through the limiting members 4, and can also ground the second microstrip lines 23 through the limiting members 4, so as to integrate functions, reduce the number of corresponding components, save costs, and improve space utilization rate to achieve the purpose of miniaturized design.

[0069] In some embodiments of the present invention, as Figure 2 shown, on one side of one of the second microstrip lines 23 facing the microwave antenna 21, there is a receiving notch 231, and a part of the microwave antenna 21 is located in the receiving notch 231.

[0070] Among them, as some embodiments of the present invention, along the first direction, among the two second microstrip lines 23, the second microstrip line 23 close to the stopper 3 may have a receiving notch 231 on the side facing the microwave antenna 21, and a part of the structure of the microwave antenna 21 is located in the receiving notch 231. Such a setting can make the second microstrip line 23 with the receiving notch 231 and the microwave antenna 21 adjacent to each other along the first direction. After grounding the second microstrip line 23, it can effectively increase the electric potential gradient near the microwave antenna 21, which is beneficial to concentrating the microwave energy radiated by the microwave antenna 21, so as to effectively enhance the microwave radiation effect of the microwave antenna 21.

[0071] In some embodiments of the present invention, as Figure 2 shown, the circuit board 2 has an avoidance notch 24, and the avoidance notch 24 is located on one side of one of the second microstrip lines 23 away from the microwave antenna 21.

[0072] Among them, the circuit board 2 can have an avoidance notch 24. Along the first direction, the avoidance notch 24 can be located on one side of one of the second microstrip lines 23 away from the microwave antenna 21. As some embodiments of the present invention, among the two second microstrip lines 23, the second microstrip line 23 close to the stopper 3 may have a receiving notch 231 on the side facing the microwave antenna 21, and the avoidance notch 24 can be located on the side of the second microstrip line 23 away from the stopper 3 and away from the microwave antenna 21.

[0073] The avoidance notch 24 can be used to avoid the probe 40. Since the tip of the probe 40 is very close to the sample 20, when the circuit board 2 is inserted or removed, the probe 40 can be located at the avoidance notch 24, and the avoidance notch 24 is oriented towards the probe 40 for disassembly and assembly. Such a setting can reduce the risk of abrasion between the circuit board 2 and the tip of the probe 40 (reduce the risk of needle collision), protect the probe 40, and can reduce the assembly difficulty. In addition, the sample stage 10 proposed by the present invention may include a magnetic field generating device for applying a preset magnetic field. It can be understood that the NV color center 401 has unique electron spin characteristics. At zero magnetic field, the energy difference between the spin states of the NV color center 401 is small. By applying a preset magnetic field to the NV color center 401, the energy splitting between different spin states can be increased, thereby improving the resolution of the ODMR signal. The avoidance notch 24 can increase the adjustment space of the magnetic field generating device, so that the magnetic field generating device can be placed on the side, above, etc. of the sample 20, which is conducive to flexibly adjusting the position and posture of the magnetic field generating device according to different test requirements, sample 20 characteristics, and characteristics of the magnetic field generating device, so as to make the test more flexible and feasible.

[0074] In some embodiments of the present invention, such as Figure 1 and Figure 2 shown, among the two second microstrip lines 23, the part of the second microstrip line 23 close to the avoidance notch 24 around the avoidance notch 24.

[0075] Among them, among the two second microstrip lines 23, the second microstrip line 23 close to the avoidance notch 24 can be set in the structural form of the part around the avoidance notch 24. Such a setting is beneficial to reducing the interference of the induced electromotive force in the second microstrip line 23 on the test when adjusting the position or posture of the magnetic field generating device, so as to improve the measurement accuracy.

[0076] In some embodiments of the present invention, such as Figure 1 shown, the mounting base 1 defines an accommodation space 12, and the accommodation space 12 has a first top wall 121 and a second top wall 122. The first top wall 121 and the second top wall 122 are spaced apart to form an avoidance channel 123. The first top wall 121 and the second top wall 122 are both configured as the bottom wall 111 of the receiving groove 11, and the avoidance channel 123 communicates the avoidance notch 24 with the accommodation space 12.

[0077] Among them, the mounting base 1 can define an accommodation space 12. The accommodation space 12 can have a first top wall 121 and a second top wall 122. The first top wall 121 and the second top wall 122 can be spaced apart along the second direction. An avoidance channel 123 can be formed between the first top wall 121 and the second top wall 122. The avoidance channel 123 can communicate the avoidance notch 24 with the accommodation space 12. Other components can be placed in the accommodation space 12. For example, a magnetic field generating device can be placed in the accommodation space 12. By making the avoidance channel 123 communicate the avoidance notch 24 with the accommodation space 12, the magnetic field generating device can move between the accommodation space 12, the avoidance channel 123, the avoidance notch 24, and above the avoidance notch 24, which is beneficial to flexibly adjust the position and posture of the magnetic field generating device according to different test requirements, the characteristics of the sample 20, and the characteristics of the magnetic field generating device. By changing the direction of the preset magnetic field, the response of the NV color center can be measured in different directions, which is very beneficial for studying anisotropic materials or complex three-dimensional magnetic field distributions. In addition, both the first top wall 121 and the second top wall 122 can be configured as the bottom wall 111 of the receiving groove 11. The upper sides of the first top wall 121 and the second top wall 122 can be in contact with the circuit board 2 to be used for receiving the circuit board 2. Such a setting has a reasonable structure and a high space utilization rate.

[0078] In some embodiments of the present invention, the sample stage 10 further includes: a magnetic field generating device for applying a preset magnetic field.

[0079] Among them, the magnetic field generating device can apply a preset magnetic field to the NV color center 401 at the tip of the probe 40. It can be understood that the NV color center 401 has unique electron spin characteristics. In zero magnetic field, the energy difference between the spin states of the NV color center 401 is small. By applying a preset magnetic field to the NV color center 401, the energy splitting between different spin states can be increased, thereby improving the resolution of the ODMR signal. And, the preset magnetic field can make a certain specific spin transition frequency of the NV color center 401 closer to the frequency of the microwave source to optimize the resonance condition, thereby improving the measurement sensitivity. Moreover, the preset magnetic field can reduce the risk that the low-frequency noise in the surrounding environment has an adverse effect on the spin state of the NV color center 401, so as to reduce the decoherence rate and thus extend the spin coherence time. In addition, the preset magnetic field helps to stabilize the spin state of the NV color center 401, making it consistent during the measurement process and reducing the measurement error caused by environmental fluctuations.

[0080] The magnetic field generating device can be configured as a magnet. The position of the magnetic field generating device can be changed, and the magnetic field generating device can be located at positions such as the accommodation space 12, the avoidance channel 123, the avoidance notch 24, and above the avoidance notch 24. By changing the position of the magnetic field generating device, the direction of the preset magnetic field can be changed to measure the response of the NV color center 401 in different directions for studying related properties such as anisotropic materials or complex three-dimensional magnetic field distributions. The structural design is reasonable and the operation is simple.

[0081] In some embodiments of the present invention, as Figure 2 shown, the circuit board 2 further has a power supply microstrip line 25 and a second connector 26. The number of the power supply microstrip lines 25 is the same as that of the second connectors 26 and they are in one-to-one correspondence. The power supply microstrip line 25 is adapted to be connected to the sample 20 to conduct current to the sample 20.

[0082] As some embodiments of the present invention, the power supply microstrip line 25 can be located on the side of the second microstrip line 23 close to the stopper 3 and away from the microwave antenna 21. Along the first direction, the power supply microstrip line 25, the second microstrip line 23 on the side close to the stopper 3, the microwave antenna 21, and the second microstrip line 23 close to the avoidance notch 24 are arranged in sequence. Both the power supply microstrip line 25 and the second connector 26 can conduct electricity. The second connector 26 can be configured as an Ipex (Integrated Passive Device Extension) connector. The number of the power supply microstrip lines 25 is the same as that of the second connectors 26 and they are electrically connected in one-to-one correspondence. The number of the power supply microstrip lines 25 can be two, three, four, etc. The power supply microstrip line 25 can be connected to the sample 20. For example, the contacts of the sample 20 can be connected to the power supply microstrip line 25 through a bonding machine, and an external current source can be connected through the second connector 26, which is convenient for applying current to the sample 20 to facilitate the study of electrical properties of the sample 20 such as electrical transport.

[0083] According to the atomic force microscope 100 of the embodiment of the present invention, as Figure 3 and Figure 4 shown, the atomic force microscope 100 includes: a sample stage 10, a cantilever 30, and a probe 40. The sample stage 10 includes the sample stage 10 of the above embodiment. The probe 40 is provided at one end of the cantilever 30, and the probe 40 has an NV color center 401 at the end far from the cantilever 30.

[0084] Among them, the cantilever 30 can be configured as a tuning fork. The probe 40 can be connected to one end of the cantilever 30. The end of the probe 40 far from the cantilever 30 is the tip of the probe 40. The tip of the probe 40 has an NV color center 401. The atomic force microscope 100 can perform atomic force scanning on the sample 20 based on the principle related to the NV color center 401 to obtain high-resolution and high-precision measurement imaging.

[0085] As Figure 4As shown, the atomic force microscope 100 may further include: a laser 101, a detector 102, a data acquisition card 103, a host computer 104, a lock-in amplifier 105, a phase-locked loop 106, and a piezoelectric crystal 107. The laser 101 can emit laser light to the NV color center 401. The magnetic field generating device can apply a preset magnetic field to the NV color center 401. The microwave antenna 21 can apply a microwave field to the NV color center 401. Based on the ODMR (Optically Detected Magnetic Resonance) technology, the fluorescence signal of the NV color center 401 is detected by the detector 102, and the fluorescence signal is collected by the data acquisition card 103 and transmitted to the host computer 104.

[0086] The phase-locked loop 106 can be used to stabilize the excitation current frequency. The excitation current can act on the piezoelectric crystal 107 connected to the cantilever 30. The excitation current can cause the piezoelectric crystal 107 to vibrate near the resonance frequency, thereby driving the probe 40 to vibrate. When the probe 40 approaches the sample 20, the long-range force (atomic force) between the sample 20 and the probe 40 can act on the probe 40, causing a change in the vibration frequency or amplitude of the cantilever 30. The change in the vibration frequency or amplitude can be demodulated by the lock-in amplifier 105 to obtain relevant information, thereby obtaining the microscopic topography information of the sample 20.

[0087] In the above embodiment, the circuit board 2 can be moved into or out of the receiving groove 11 along the first direction from the open end of the receiving groove 11, which is convenient for removing the circuit board 2 from the mounting seat 1, so as to facilitate the picking and placing operation of the sample 20 outside the sample stage 10, which is beneficial to reducing the difficulty of picking and placing the sample 20, and is convenient for accurately corresponding the part to be measured of the sample 20 with the microwave antenna 21, facilitating the accurate control of the placement position and posture of the sample 20, which is beneficial to improving the test efficiency and test accuracy, with simple operation and easy implementation.

[0088] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0089] In the description of the present invention, the "first feature" and "second feature" may include one or more of such features.

[0090] In the description of the present invention, "a plurality of" means two or more.

[0091] In the description of the present invention, a first feature being "above" or "below" a second feature may include direct contact between the first and second features, or may include contact between the first and second features through additional features therebetween rather than direct contact.

[0092] In the description of the present invention, a first feature being "above", "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature.

[0093] In the description of this specification, descriptions with reference to terms such as "an embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0094] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A sample stage (10), characterized in that: include: A mounting seat (1), wherein the mounting seat (1) defines a receiving groove (11); A circuit board (2), the circuit board (2) being detachably arranged in the receiving groove (11) and used for carrying a sample (20), one end of the receiving groove (11) being configured as an open end along a first direction, the circuit board (2) being able to move into or out of the receiving groove (11) through the open end along the first direction, the first direction being perpendicular to the thickness direction of the circuit board (2); The circuit board (2) has a microwave antenna (21), and the microwave antenna (21) is suitable for radiating microwaves to the sample (20).

2. The sample stage (10) according to claim 1, characterized in that: Also includes: A stopper (3), the stopper (3) being movably or detachably arranged on the mounting seat (1), and the stopper (3) being capable of covering the open end.

3. The sample stage (10) according to claim 1, characterized in that: Also includes: A limiting member (4) is provided on the mounting seat (1) and a part of the structure of the limiting member (4) is spaced apart from the bottom wall (111) of the receiving groove (11) so as to limit the circuit board (2) in the thickness direction of the circuit board (2). The top end of the receiving groove (11) is open. The limiting member (4) is provided on the mounting seat (1) and a part of the structure of the limiting member (4) is spaced apart from the bottom wall (111) of the receiving groove (11) so as to limit the circuit board (2) in the thickness direction of the circuit board (2).

4. The sample stage (10) according to claim 3, characterized in that: The limiting member (4) comprises: a fixing portion (41) and a limiting portion (42); the fixing portion (41) is connected to the limiting portion (42) and has an included angle; the fixing portion (41) is detachably arranged on the mounting seat (1); and at least a portion of the limiting portion (42) is spaced apart from the bottom wall (111) of the receiving groove (11).

5. The sample stage (10) according to claim 1, characterized in that: At least part of the microwave antenna (21) is configured as an arc segment.

6. The sample stage (10) according to claim 5, characterized in that: The microwave antenna (21) comprises: a main body (211) and a first microstrip line (212); at least a portion of the main body (211) is configured as an arc segment; the circuit board (2) further comprises a first connector (22); along a second direction, both sides of the main body (211) are connected to the first microstrip line (212); and one end of each of the first microstrip lines (212) away from the main body (211) is connected to the first connector (22); the second direction, the thickness direction of the circuit board (2), and the first direction are perpendicular to each other.

7. The sample stage (10) according to claim 6, characterized in that: The line width of the main body (211) is smaller than the line width of the first microstrip line (212).

8. The sample stage (10) according to claim 6, characterized in that: The main body (211) defines or the microwave antenna (21) defines a space having an arc-shaped outer contour and a gap.

9. The sample stage (10) according to claim 3, characterized in that: The circuit board (2) further comprises a second microstrip line (23), and along the first direction, the second microstrip line (23) is provided on both sides of the microwave antenna (21), and the second microstrip line (23) is grounded.

10. The sample stage (10) according to claim 9, characterized in that: Along the second direction, the limiting members (4) are provided on both sides of the mounting seat (1), the second microstrip line (23) extends along the second direction, and both ends of each second microstrip line (23) are respectively connected to the limiting members (4) on both sides of the mounting seat (1) for grounding, and the second direction, the thickness direction of the circuit board (2), and the first direction are perpendicular to each other.

11. The sample stage (10) according to claim 9, characterized in that: One of the second microstrip lines (23) has a receiving notch (231) on a side facing the microwave antenna (21), and a portion of the microwave antenna (21) is located in the receiving notch (231).

12. The sample stage (10) according to claim 9, characterized in that: The circuit board (2) has an avoidance notch (24), and the avoidance notch (24) is located on a side of one of the second microstrip lines (23) away from the microwave antenna (21).

13. The sample stage (10) according to claim 12, characterized in that: Of the two second microstrip lines (23), the second microstrip line (23) close to the avoidance gap (24) surrounds a portion of the avoidance gap (24).

14. The sample stage (10) according to claim 12, characterized in that: The mounting seat (1) defines a receiving space (12), the receiving space (12) having a first top wall (121) and a second top wall (122), the first top wall (121) and the second top wall (122) being spaced apart to form an escape channel (123), the first top wall (121) and the second top wall (122) both being configured as the bottom wall (111) of the receiving groove (11), the escape channel (123) connecting the escape notch (24) and the receiving space (12).

15. The sample stage (10) according to any one of claims 1 to 14, characterized in that: Also includes: A magnetic field generating device is used to apply a preset magnetic field.

16. The sample stage (10) according to any one of claims 1 to 14, characterized in that: The circuit board (2) further comprises a power supply microstrip line (25) and a second connector (26); the power supply microstrip lines (25) and the second connectors (26) are the same in number and correspond one to one; the power supply microstrip line (25) is suitable for connecting to the sample (20) to conduct current to the sample (20).

17. An atomic force microscope (100), characterized in that: include: A sample stage (10), a cantilever (30), and a probe (40), wherein the sample stage (10) comprises the sample stage (10) according to any one of claims 1 to 16, wherein the probe (40) is disposed at one end of the cantilever (30), and the probe (40) has an NV color center (401) at one end away from the cantilever (30).

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