Phosphorus trifluoride purification equipment

Abstract

The invention discloses phosphorus trifluoride purification equipment, which comprises an adsorption tower body, an upper cover, a plurality of gas inlet ends and a gas outlet end, and also comprises a double-position sliding molecular sieve structure, which comprises a first molecular sieve adsorption cylinder and a second molecular sieve adsorption cylinder; the pressure variable-diameter adjusting structure is arranged between the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder and comprises an elastic adjusting assembly arranged on the inner side wall of the adsorption tower body, and the upper end and the lower end of the elastic adjusting assembly are connected to the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder respectively; a pressure adjusting disc is connected to the middle of the elastic adjusting assembly, a plurality of holes allowing chlorine trifluoride to pass through are formed in the pressure adjusting disc, inner blocking structures are arranged in the holes, and a top rib assembly is fixedly arranged at the top of the first molecular sieve adsorption cylinder. And the service cycle of the adsorption structure is prolonged to the maximum extent.

Description

Technical Field

[0001] The present invention relates to a phosphorus trifluoride processing device, particularly a phosphorus trifluoride purification device. Background Art

[0002] Phosphorus trifluoride is an important inorganic compound with unique chemical properties and wide applications, especially in the semiconductor and electronics industries. It is used as a dopant, that is, for phosphorus atom implantation to adjust the electrical properties of silicon-based semiconductors; it is used as an etching gas, that is, for etching silicon or metal thin films in plasma processes, which is milder than other gases.

[0003] The purity of phosphorus trifluoride will directly affect its use performance. If unpurified phosphorus trifluoride is directly used for etching, it may affect the conductivity of the carrier. Therefore, in the prior art, after the production of crude phosphorus trifluoride is completed, the phosphorus trifluoride is passed into a rectifying column and then adsorbed by a molecular sieve to remove impurities in the crude phosphorus trifluoride. However, when passing through the molecular sieve, since the inlet amount and inlet speed of the crude phosphorus trifluoride are affected by the upper reaction mechanism or screening mechanism, and the gap of the molecular sieve remains unchanged all the time. Therefore, when the inlet gas amount and inlet speed of the crude product increase, the fixed molecular sieve is difficult to cope with, resulting in the molecular sieve, as the last filtration checkpoint, releasing some impurities, thus affecting the purity of phosphorus trifluoride.

[0004] Therefore, the present case aims to provide a phosphorus trifluoride purification device, which can not only adsorb and purify the incoming phosphorus trifluoride gas in multiple segments, but also control the gas pressure between the two adsorption structures to avoid the pulverization phenomenon of the lower adsorption structure, thereby maximizing the service life of the adsorption structure while ensuring the adsorption efficiency. Summary of the Invention

[0005] The present invention provides a phosphorus trifluoride purification device, which can effectively solve the above problems.

[0006] The present invention is implemented as follows: A phosphorus trifluoride purification device includes an adsorption tower body for adsorbing phosphorus trifluoride. The top of the adsorption tower body is movably provided with an upper cover, and several inlet ends are connected to the upper cover. The bottom of the adsorption tower body is provided with an outlet end, and further includes: A two-position sliding molecular sieve structure, including a first molecular sieve adsorption cylinder arranged at the bottom inside the adsorption tower body. A second molecular sieve adsorption cylinder is arranged above the first molecular sieve adsorption cylinder. The first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder are both locked on the inner wall of the adsorption tower body. The effective pore diameter of the second molecular sieve adsorption cylinder is larger than that of the first molecular sieve adsorption cylinder. The phosphorus trifluoride enters the first molecular sieve adsorption cylinder after being adsorbed by the second molecular sieve adsorption cylinder; A pressure variable-diameter adjusting structure arranged between the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder. The pressure variable-diameter adjusting structure includes an elastic adjusting component arranged on the inner side wall of the adsorption tower body. The upper and lower ends of the elastic adjusting component are respectively connected to the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder. A pressure adjusting disc is connected to the middle of the elastic adjusting component. A number of holes for chlorine trifluoride to pass through are provided on the pressure adjusting disc. An inner barrier structure is arranged in the holes. A top bone component is fixedly arranged on the top of the first molecular sieve adsorption cylinder. When the pressure adjusting disc is pressed and descends, it will squeeze the top bone component, and the top bone component will push out the inner barrier structure in the hole, making the inner diameter of the hole smaller.

[0007] As a further improvement, guide rails are arranged on the inner side of the adsorption tower body. The outer wall of the adsorption tower body is recessed inward to form an inner groove. The structures of the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder are the same. The first molecular sieve adsorption cylinder includes a material placing frame for carrying molecular sieves. A number of matching rib grooves are arranged on the outer side of the material placing frame. After the material placing frame is placed into the adsorption tower body, the matching rib grooves cooperate with the guide rails. A number of limiting parts are arranged on the inner groove. The limiting parts penetrate through the guide rails and are connected to the matching rib grooves.

[0008] As a further improvement, alignment holes are provided on the inner groove. The limiting part includes a sealing gasket arranged on the alignment hole. A locking nail is installed on the sealing gasket. The locking nail penetrates through the sealing gasket and is connected to the threaded hole on the matching rib groove.

[0009] As a further improvement, the elastic adjusting component includes at least two elastic adjusting seats. The elastic adjusting seat includes a first limiting spring arranged at the lower end of the second molecular sieve adsorption cylinder. The edge of the upper end of the first molecular sieve adsorption cylinder is provided with a second limiting spring. An installation platform is connected between the first limiting spring and the second limiting spring. The pressure adjusting disc is accommodated in the installation platform.

[0010] As a further improvement, the installation platform includes a C-shaped clamping sleeve connected to the first limiting spring and the second limiting spring. The opening of the C-shaped clamping sleeve is used to accommodate the pressure adjusting disc. A perforation is provided on the side of the pressure adjusting disc away from the opening. A positioning pin for locking the pressure adjusting disc is connected to the perforation.

[0011] As a further improvement, the pressure adjusting disc includes a pressure movable disc connected to the C-shaped clamping sleeve. The holes are arranged axially on the pressure movable disc. A number of axial flow channels are arranged on the inner side of the pressure movable disc. The axial flow channels communicate with a reflux channel laterally. The inner barrier structure is located in the reflux channel.

[0012] As a further improvement, the inner barrier structure includes a trigger part located inside the reflux channel. The trigger part is connected to a barrier part. After the trigger part is lifted by the parietal bone assembly, the barrier part is pushed out so that the barrier part extends into the axial flow channel.

[0013] As a further improvement, the barrier part is a folding piece, and a plurality of flow holes are provided in the folding piece.

[0014] As a further improvement, the parietal bone assembly includes an extension rod seat fixed on the top surface of the first molecular sieve adsorption cylinder. A plurality of separation rods are connected to the top surface of the extension rod seat. The separation rods extend into the reflux channel and are arranged at intervals with the trigger part.

[0015] As a further improvement, the pressure detection structure includes a first pressure detector arranged at the top inside the adsorption tower body, and a second pressure detector is arranged at the bottom inside the adsorption tower body.

[0016] The beneficial effects of the present invention are as follows: In the prior art, molecular sieves are often used to purify the post-section processing of phosphorus trifluoride. The molecular sieves are used to perform the last step of processing on the impurities of phosphorus trifluoride. When arranging the molecular sieves, a very large accommodating framework is usually used, and the molecular sieves are filled into the framework. If the molecular sieves in the upper part are pulverized and blocked, it will directly cause the molecular sieves in the lower part to be unusable and need to be directly replaced. Therefore, through the double-position sliding molecular sieve structure provided by the present invention, with the two ends of the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder arranged, the second molecular sieve adsorption cylinder with a larger effective pore diameter is placed at the upper end of the larger-volume first molecular sieve adsorption cylinder, so that the second molecular sieve adsorption cylinder bears the first-stage pressure of the gas. Even if the second molecular sieve adsorption cylinder shows a pulverized phenomenon, only the upper half part needs to be replaced. And the larger-volume first molecular sieve adsorption cylinder, because it is arranged at the lower end, has a lower possibility of being directly impacted by a large amount of high-pressure gas, so that its blockage phenomenon can be weakened, the service life is longer, and at the same time, it is relatively low in terms of enterprise cost and has higher economic benefits.

[0017] Since the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder need to be replaced, especially the second molecular sieve adsorption cylinder, whose replacement frequency is higher than that of the first molecular sieve adsorption cylinder, it is necessary to set them to be in a movable state, but they cannot be in a suspended state. Therefore, the present invention is provided with guide rails inside the adsorption tower body, and matching rib grooves are arranged on the outer sides of the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder. Through the sliding placement method, the first molecular sieve adsorption cylinder and the second molecular sieve adsorption cylinder can reach and be positioned at the specified positions, and the sealing performance can be ensured during the fixing process.

[0018] Although the second molecular sieve adsorption cylinder bears pressure for the first molecular sieve adsorption cylinder, in fact, the first molecular sieve adsorption cylinder may still be directly affected by high-pressure gas. In order to protect the first molecular sieve adsorption cylinder without affecting the filtration efficiency, the present invention provides a pressure variable-diameter adjustment structure on the basis of the two-position sliding molecular sieve structure. When the pressure of the incoming phosphorus trifluoride gas is too high, it will directly press down the pressure adjustment disc installed on the elastic adjustment component, causing the pressure adjustment disc to touch the top bone component, and the top bone component will push out the inner barrier structure in the hole, so that the inner diameter of the hole becomes smaller, and the available passage area of the gas passing through the hole after passing through the second molecular sieve adsorption cylinder becomes smaller, weakening the pressure and speed of the gas, so as to ensure that the gas passes through the first molecular sieve adsorption cylinder at a relatively uniform and stable speed. While the gas is stably filtered, the purification equipment has a longer service life.

[0019] In order to sense the gas flow rate and pressure changes, so as to automatically adjust its own state changes, in the present invention, the pressure adjustment disc is arranged between the first limit spring and the second limit spring, and the telescopic amounts of the first limit spring and the second limit spring are changed by the pressure when the gas enters, and then it is judged whether to trigger the inner barrier structure in the pressure adjustment disc, so that the state can be automatically changed according to the gas changes without manual monitoring.

[0020] During the fixing process of the pressure adjustment disc, it needs to change dynamically according to the states of the first limit spring and the second limit spring. Therefore, the pressure adjustment disc is slidably fixed inside the adsorption tower body through a C-shaped bushing, and can move synchronously with the first limit spring and the second limit spring, thus realizing the effect of automatic adjustment.

[0021] When adjusting the gas pressure and gas volume, it mainly adjusts the flow rate through the pressure adjustment disc. Therefore, the present invention is provided with axial flow channels on the pressure adjustment disc, and the gas passes through the axial flow channels. When adjustment is needed, the ventilation volume of the axial flow channels is changed. Therefore, a reflux channel is arranged beside each axial flow channel, and the inner barrier structure is arranged in the reflux channel, so as to change the ventilation volume of the axial flow channel.

[0022] It is the inner barrier structure that changes the diameter of the axial flow channel. One end of the inner barrier structure is triggered by the top bone component. When the entire pressure adjustment disc descends, it will contact the top bone component, thereby pushing out the trigger part, and then driving the barrier part to be pushed out, thus realizing the transformation of the passage diameter. After the gas pressure drops, the pressure adjustment disc rises, and the barrier part will automatically swing down under the action of gravity, without hindering the normal flow of the gas.

[0023] During the process of the parietal bone component cooperating with the reflux channels, it needs to cooperate with several reflux channels in order to achieve the effect of consistent adjustment. Therefore, in the present invention, the parietal bone component is set as several separating rods, and the several separating rods cooperate with the descending reflux channels, so that the ventilation volume in all the reflux channels can be adjusted consistently, and the gas pressure can be better stabilized.

[0024] Since the actions of changing the fluid flow rate are all automatically adjusted inside the device, it is difficult for the experimenters to know the situation of the molecular sieve inside and the replacement cycle of the molecular sieve. Therefore, the present invention sets a pressure detection structure inside the adsorption tower body. By detecting the gas pressure at different positions of the adsorption tower body, it can be judged whether there is resistance when the gas passes through the molecular sieve, and then it can be judged whether the molecular sieve needs to be replaced, so as to achieve the effects of mechanical self-adjustment and intelligent self-inspection. Brief Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0026] Figure 1 It is a front view structural schematic diagram of the present invention.

[0027] Figure 2 It is a top view structural schematic diagram of the present invention.

[0028] Figure 3 It is an internal structural schematic diagram of the present invention.

[0029] Figure 4 It is a structural schematic diagram of the first molecular sieve adsorption cylinder of the present invention.

[0030] Figure 5 It is a structural schematic diagram of the pressure adjustment disk of the present invention.

[0031] Figure 6 It is a structural schematic diagram of the internal barrier structure of the present invention.

[0032] Figure 7 It is a structural schematic diagram of the mounting table of the present invention.

[0033] Figure 8 It is a structural schematic diagram of the parietal bone component of the present invention.

[0034] In the figure: Adsorption tower body 10, guide rail 11, inner groove 12, bearing socket 13, upper cover 20, air outlet end 30, two-position sliding molecular sieve structure 40, first molecular sieve adsorption cylinder 41, material placement frame 411, matching rib groove 412, limiting part 413, sealing gasket 4131, locking nail 4132, second molecular sieve adsorption cylinder 42, pressure variable diameter adjustment structure 50, elastic adjustment component 51, first limiting spring 511, second limiting spring 512, installation platform 513, C-type bushing 5131, positioning pin 5132, pressure adjustment disc 52, hole 521, pressure movable disc 522, axial flow channel 523, return flow channel 524, inner barrier structure 53, trigger part 531, barrier part 532, top bone assembly 54, extension rod seat 541, separation rod 542. Detailed implementation manners

[0035] To make the implementation manners of the present invention clear, all of them fall within the scope of protection of the present invention. Therefore, the following detailed description of the implementation manners of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected implementation manners of the present invention. Based on the implementation manners in the present invention, all other implementation manners obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

[0036] In the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0037] Refer to Figures 1 to 8As shown in the figure, a phosphorus trifluoride purification device includes an adsorption tower body 10 for adsorbing phosphorus trifluoride. A top cover 20 is movably arranged at the top of the adsorption tower body 10, and a plurality of air inlet ends are connected to the top cover 20. An air outlet end 30 is arranged at the bottom of the adsorption tower body 10. It further includes: a two-position sliding molecular sieve structure 40, which includes a first molecular sieve adsorption cylinder 41 arranged at the inner bottom of the adsorption tower body 10. A second molecular sieve adsorption cylinder 42 is arranged above the first molecular sieve adsorption cylinder 41. The first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42 are both locked on the inner wall of the adsorption tower body 10. The effective pore diameter of the second molecular sieve adsorption cylinder 42 is larger than that of the first molecular sieve adsorption cylinder 41. After the phosphorus trifluoride is adsorbed by the second molecular sieve adsorption cylinder 42, it enters the first molecular sieve adsorption cylinder 41; a pressure variable diameter adjustment structure 50 arranged between the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42. The pressure variable diameter adjustment structure 50 includes an elastic adjustment component 51 arranged on the inner side wall of the adsorption tower body 10. The upper and lower ends of the elastic adjustment component 51 are respectively connected to the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42. A pressure adjustment disc 52 is connected to the middle of the elastic adjustment component 51. A plurality of holes 521 for passing chlorine trifluoride are arranged on the pressure adjustment disc 52. An inner barrier structure 53 is arranged in the holes 521. A top bone component 54 is fixedly arranged at the top of the first molecular sieve adsorption cylinder 41. When the pressure adjustment disc 52 is pressed and descends, it will squeeze the top bone component 54, and the top bone component 54 will push out the inner barrier structure 53 in the holes 521, making the inner diameter of the holes 521 smaller.

[0038] The first molecular sieve adsorption cylinder 41 is located below the second molecular sieve adsorption cylinder 42. In order to fix the first molecular sieve adsorption cylinder 41, a bearing socket 13 is arranged at the inner bottom of the adsorption tower body 10, and the first molecular sieve adsorption cylinder 41 is installed in the bearing socket 13.

[0039] In the prior art, molecular sieves are often used to purify the post-processing of phosphorus trifluoride. The molecular sieves are used to perform the last step of treatment on the impurities of phosphorus trifluoride. When arranging the molecular sieves, a very large accommodating framework is usually adopted, and the molecular sieves are filled into the framework. If the molecular sieves in the upper part are pulverized and blocked, it will directly cause the molecular sieves in the lower part to be unusable and need to be directly replaced. Therefore, in the present invention, a double-position sliding molecular sieve structure 40 is provided. By arranging the two ends of the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42, the second molecular sieve adsorption cylinder 42 with a larger effective pore diameter is placed at the upper end of the first molecular sieve adsorption cylinder 41 with a larger volume, so that the second molecular sieve adsorption cylinder 42 bears the first-stage pressure of the gas. Even if the second molecular sieve adsorption cylinder 42 is pulverized, only the upper half part needs to be replaced. Since the large-volume first molecular sieve adsorption cylinder 41 is arranged at the lower end, the possibility of being directly flushed by a large amount of high-pressure gas is relatively low, so that its blockage phenomenon can be weakened, the service life is longer, and at the same time, the cost for the enterprise is relatively low and the economic benefit is higher.

[0040] The existing molecular sieves need to be regenerated after being taken out, and the regeneration method often adopts the backwashing regeneration method. Since the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42 need to be replaced, especially the second molecular sieve adsorption cylinder 42, whose replacement frequency is higher than that of the first molecular sieve adsorption cylinder 41, it needs to be set to be movable, but it cannot be in a suspended state. Therefore, in this embodiment, a guide rail 11 is provided inside the adsorption tower body 10, and an inner groove 12 is formed by the outer wall of the adsorption tower body 10 recessing inward. The structures of the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42 are the same. The first molecular sieve adsorption cylinder 41 includes a material placing frame 411 for carrying the molecular sieves. A number of matching rib grooves 412 are provided on the outer side of the material placing frame 411. After the material placing frame 411 is placed into the adsorption tower body 10, the matching rib grooves 412 cooperate with the guide rail 11. A number of limiting members 413 are provided on the inner groove 12. The limiting members 413 penetrate through the guide rail 11 and are connected to the matching rib grooves 412. By providing a guide rail 11 inside the adsorption tower body 10 and providing matching rib grooves 412 on the outer sides of the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42, the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42 can reach and be specified at the designated positions by the sliding placement method, and the sealing performance can be ensured during the fixing process.

[0041] When replacing the first molecular sieve adsorption cylinder 41 and the second molecular sieve adsorption cylinder 42, the upper cover 20 needs to be disassembled. Once the upper cover 20 is disassembled, the gas remaining in the equipment will leak out, which may cause pollution. Therefore, before disassembling the upper cover 20, the gas in the adsorption tower body 10 needs to be replaced. During the gas replacement, nitrogen is introduced through the nitrogen inlet at the top of the equipment, and the nitrogen makes the gas in the adsorption tower body 10 and the molecular sieve flow out through the nitrogen outlet at the bottom of the adsorption tower body 10, so as to ensure safety after the upper cover 20 is opened.

[0042] In order to ensure the sealing effect, a positioning hole is provided in the inner groove 12. The limiting member 413 includes a sealing gasket 4131 arranged on the positioning hole. A locking nail 4132 is installed on the sealing gasket 4131. The locking nail 4132 penetrates through the sealing gasket 4131 and is connected to the threaded hole on the matching rib groove 412. Through the limiting member 413, while the molecular sieve adsorption cylinder can be fixed, the gas flowing through it can be prevented from leaking out.

[0043] Although the second molecular sieve adsorption cylinder 42 is used to bear the pressure instead of the first molecular sieve adsorption cylinder 41, in fact, the first molecular sieve adsorption cylinder 41 may still be directly affected by high-pressure gas. In order to protect the first molecular sieve adsorption cylinder 41 without affecting the filtration efficiency, the present invention provides a pressure variable diameter adjustment structure 50 on the basis of the double-position sliding molecular sieve structure 40. When the gas pressure of the incoming phosphorus trifluoride is too high, it will directly press down the pressure adjustment disc 52 installed on the elastic adjustment component 51, so that the pressure adjustment disc 52 touches the top bone component 54, and the top bone component 54 will push out the inner barrier structure 53 in the hole 521, so that the inner diameter of the hole 521 becomes smaller, and the available passing area of the gas passing through the hole 521 after passing through the second molecular sieve adsorption cylinder 42 becomes smaller, so that the gas pressure and speed are both weakened, so as to ensure that the gas passes through the first molecular sieve adsorption cylinder 41 at a relatively uniform and stable speed, so that while the gas is stably filtered, the purification equipment has a longer service life.

[0044] In order to sense the gas flow rate and pressure changes so as to automatically adjust its own state changes, in this embodiment, the elastic adjustment component 51 includes at least two elastic adjustment seats. The elastic adjustment seat includes a first limit spring 511 provided at the lower end of the second molecular sieve adsorption cylinder 42, and a second limit spring 512 is provided at the edge of the upper end of the first molecular sieve adsorption cylinder 41. An installation platform 513 is connected between the first limit spring 511 and the second limit spring 512. A pressure adjustment disk 52 is accommodated in the installation platform 513. The pressure adjustment disk 52 is arranged between the first limit spring 511 and the second limit spring 512. The expansion and contraction amounts of the first limit spring 511 and the second limit spring 512 are changed by the pressure when the gas enters, and then it is judged whether to trigger the internal blocking structure 53 in the pressure adjustment disk 52, so that the state can be automatically changed according to the gas change without manual monitoring.

[0045] It should be emphasized that the first limit spring 511 and the second limit spring 512 are sleeve-type springs, that is, the springs are limited by the sleeves to prevent them from falling out directly.

[0046] During the fixing process of the pressure adjustment disk 52, it needs to change dynamically according to the states of the first limit spring 511 and the second limit spring 512. Therefore, the installation platform 513 in this embodiment includes a C-shaped bushing 5131 connected to the first limit spring 511 and the second limit spring 512. The opening of the C-shaped bushing 5131 is used to accommodate the pressure adjustment disk 52. A perforation is provided on the side of the pressure adjustment disk 52 away from the opening, and a positioning pin 5132 for locking the pressure adjustment disk 52 is connected to the perforation. The pressure adjustment disk 52 is slidably fixed inside the adsorption tower body 10 through the C-shaped bushing 5131 and can move synchronously with the first limit spring 511 and the second limit spring 512, thereby achieving the effect of automatic adjustment.

[0047] When adjusting the gas pressure and gas volume, it mainly adjusts the flow rate through the pressure adjustment disk 52. Therefore, the pressure adjustment disk 52 in this embodiment includes a pressure movable disk 522 connected to the C-shaped bushing 5131. The hole 521 is opened axially on the pressure movable disk 522. A plurality of axial flow channels 523 are provided inside the pressure movable disk 522. The axial flow channels 523 communicate with a reflux channel 524 laterally. The internal blocking structure 53 is located in the reflux channel 524. By providing the axial flow channels 523 on the pressure adjustment disk 52 and passing the gas through the axial flow channels 523, and when adjustment is needed, the ventilation volume of the axial flow channels 523 is changed. Therefore, a reflux channel 524 is provided beside each axial flow channel 523, and the internal blocking structure 53 is exactly arranged in the reflux channel 524, so that the ventilation volume of the axial flow channels 523 can be changed.

[0048] It is the internal barrier structure 53 that changes the diameter of the axial flow channel 523. The internal barrier structure 53 includes a trigger part 531 located inside the return flow channel 524. The trigger part 531 is connected to a barrier part 532. After the trigger part 531 is lifted by the skull component 54, the barrier part 532 is pushed out, so that the barrier part 532 extends into the axial flow channel 523. One end of the internal barrier structure 53 is triggered by the skull component 54. When the entire pressure regulating disc 52 descends, it will contact the skull component 54, thereby pushing out the trigger part 531, and then driving the barrier part 532 to be pushed out, so as to realize the transformation of the diameter. After the gas pressure drops, the pressure regulating disc 52 rises, and the barrier part 532 will also automatically swing downward under the action of gravity, without hindering the normal flow of gas.

[0049] Among them, the barrier part 532 is a folding piece, and several flow holes are opened in the folding piece. Even if some gas enters the return flow channel 524 through the unexpanded barrier part 532, it will be blocked by the skull component 54.

[0050] During the cooperation process between the skull component 54 and the return flow channel 524, it needs to cooperate with several return flow channels 524 in order to achieve the effect of consistent adjustment. Therefore, the skull component 54 in this embodiment includes an extension rod seat 541 fixed on the top surface of the first molecular sieve adsorption cylinder 41. Several separation rods 542 are connected to the top surface of the extension rod seat 541. The separation rods 542 extend to the return flow channel 524 and are arranged at intervals with the trigger part 531. By setting the skull component 54 as several separation rods 542, the several separation rods 542 cooperate with the descending return flow channel 524, so that the ventilation volume in all the return flow channels 524 can be adjusted consistently, and the gas pressure can be stabilized better.

[0051] Since the actions of changing the fluid flow rate are all automatically adjusted inside the equipment, it is difficult for the experimenters to know the situation of the internal molecular sieve and the replacement cycle of the molecular sieve. Therefore, the present invention sets a pressure detection structure inside the adsorption tower body 10. By detecting the gas pressure at different positions of the adsorption tower body 10, it can be judged whether there is resistance when the gas passes through the molecular sieve, and then it can be judged whether the molecular sieve needs to be replaced, so as to achieve the effects of mechanical self-adjustment and intelligent self-check.

[0052] Since the actions of changing the fluid flow rate are all automatically adjusted inside the device, it is difficult for the experimenters to know the situation of the molecular sieve inside and the replacement cycle of the molecular sieve. Therefore, the pressure detection structure of this embodiment includes a first pressure detector 141 arranged at the top inside the adsorption tower body 10, and a second pressure detector 142 is arranged at the bottom inside the adsorption tower body 10. By arranging a pressure detection structure inside the adsorption tower body and detecting the gas pressure at different positions of the adsorption tower body, it is possible to determine whether there is resistance when the gas passes through the molecular sieve, and then determine whether the molecular sieve needs to be replaced, so as to achieve the effects of mechanical self-adjustment and intelligent self-checking.

[0053] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A phosphorus trifluoride purification device, comprising an adsorption tower body (10) for adsorbing phosphorus trifluoride, a top cover (20) is movably arranged at the top of the adsorption tower body (10), several air inlet ends are connected to the top cover (20), and an air outlet end (30) is arranged at the bottom of the adsorption tower body (10), characterized in that, It further includes: A two-position sliding molecular sieve structure (40), comprising a first molecular sieve adsorption cylinder (41) arranged at the inner bottom of the adsorption tower body (10), a second molecular sieve adsorption cylinder (42) is arranged above the first molecular sieve adsorption cylinder (41), the first molecular sieve adsorption cylinder (41) and the second molecular sieve adsorption cylinder (42) are both locked on the inner wall of the adsorption tower body (10), the effective pore diameter of the second molecular sieve adsorption cylinder (42) is larger than that of the first molecular sieve adsorption cylinder (41), and the phosphorus trifluoride enters the first molecular sieve adsorption cylinder (41) after being adsorbed by the second molecular sieve adsorption cylinder (42); A pressure variable diameter adjustment structure (50) arranged between the first molecular sieve adsorption cylinder (41) and the second molecular sieve adsorption cylinder (42), the pressure variable diameter adjustment structure (50) comprises an elastic adjustment component (51) arranged on the inner side wall of the adsorption tower body (10), the upper and lower ends of the elastic adjustment component (51) are respectively connected to the first molecular sieve adsorption cylinder (41) and the second molecular sieve adsorption cylinder (42), a pressure adjustment disc (52) is connected to the middle of the elastic adjustment component (51), a plurality of holes (521) for chlorine trifluoride to pass through are arranged on the pressure adjustment disc (52), an inner barrier structure (53) is arranged in the holes (521), a top bone component (54) is fixedly arranged at the top of the first molecular sieve adsorption cylinder (41), when the pressure adjustment disc (52) is pressed and descends, it will squeeze the top bone component (54), and the top bone component (54) will push out the inner barrier structure (53) in the holes (521), making the inner diameter of the holes (521) smaller; A pressure detection structure arranged inside the adsorption tower body (10), and the pressure detection structure is used to detect the pressure at the upper end and the lower end of the two-position sliding molecular sieve structure (40).

2. The phosphorus trifluoride purification equipment according to claim 1, wherein A guide rail (11) is arranged inside the adsorption tower body (10), an inner groove (12) is formed by the inward depression of the outer wall of the adsorption tower body (10), the structures of the first molecular sieve adsorption cylinder (41) and the second molecular sieve adsorption cylinder (42) are the same, the first molecular sieve adsorption cylinder (41) comprises a material placing frame (411) for carrying molecular sieves, a plurality of matching rib grooves (412) are arranged on the outer side of the material placing frame (411), after the material placing frame (411) is placed into the adsorption tower body (10), the matching rib grooves (412) are matched with the guide rail (11), and a plurality of limit pieces (413) are arranged on the inner groove (12), the limit pieces (413) penetrate through the guide rail (11) and are connected with the matching rib grooves (412).

3. The phosphorus trifluoride purification equipment according to claim 2, characterized in that, A positioning hole is arranged on the inner groove (12), the limit piece (413) comprises a sealing gasket (4131) arranged on the positioning hole, a locking nail (4132) is installed on the sealing gasket (4131), and the locking nail (4132) penetrates through the sealing gasket (4131) and is connected with the threaded hole on the matching rib groove (412).

4. The phosphorus trifluoride purification equipment according to claim 1, characterized in that, The elastic adjustment component (51) includes at least two elastic adjustment seats. Each elastic adjustment seat includes a first limiting spring (511) disposed at the lower end of the second molecular sieve adsorption cylinder (42), and a second limiting spring (512) is disposed at the upper edge of the first molecular sieve adsorption cylinder (41). An installation platform (513) is connected between the first limiting spring (511) and the second limiting spring (512), and a pressure adjustment disc (52) is disposed inside the installation platform (513).

5. The purification equipment for phosphorus trifluoride according to claim 4, wherein, The installation platform (513) includes a C-shaped bushing (5131) connected to the first limiting spring (511) and the second limiting spring (512). The opening of the C-shaped bushing (5131) is used to accommodate the pressure adjustment disc (52). A perforation is formed on the side of the pressure adjustment disc (52) away from the opening, and a positioning pin (5132) for locking the pressure adjustment disc (52) is connected to the perforation.

6. A phosphorus trifluoride purification device according to claim 1, wherein, The pressure adjustment disc (52) includes a pressure movable disc (522) connected to the C-shaped bushing (5131). A hole (521) is formed in the axial direction of the pressure movable disc (522). A plurality of axial flow channels (523) are formed inside the pressure movable disc (522). The axial flow channels (523) communicate with a reflux channel (524) in the lateral direction, and the internal barrier structure (53) is located in the reflux channel (524).

7. A phosphorus trifluoride purification device according to claim 1, wherein, The internal barrier structure (53) includes a triggering part (531) located inside the reflux channel (524). The triggering part (531) is connected to a barrier part (532). After the triggering part (531) is lifted by the skull component (54), the barrier part (532) is pushed out so that the barrier part (532) extends into the axial flow channel (523).

8. The phosphorus trifluoride purification equipment according to claim 7, characterized in that, The barrier part (532) is a folding piece, and a plurality of flow holes are formed in the folding piece.

9. A phosphorus trifluoride purification device according to claim 7, characterized in that, The skull component (54) includes an extension rod seat (541) fixed on the top surface of the first molecular sieve adsorption cylinder (41). A plurality of separation rods (542) are connected to the top surface of the extension rod seat (541). The separation rods (542) extend into the reflux channel (524) and are arranged at intervals with the triggering part (531).

10. The phosphorus trifluoride purification equipment according to claim 1, characterized in that, The pressure detection structure includes a first pressure detector (141) disposed at the top inside the adsorption tower body (10), and a second pressure detector (142) is disposed at the bottom inside the adsorption tower body (10).

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