Orthogonal collinear integrated dipulse laser-induced breakdown spectroscopy component analysis device

Abstract

The invention discloses an orthogonal collinear integrated double-pulse laser-induced breakdown spectroscopy component analysis device, and relates to the technical field of chemical and spectral analysis, a multi-channel pulse generator controls the laser emission time of a laser time sequence emission unit and the laser collection time of a collection unit; the first laser time sequence emission unit emits first laser which passes through the PS spectroscope and the first focus lens to vertically excite the surface of a tested sample; the second laser time sequence emission unit emits second laser to the tested sample or the PS spectroscope, the second laser is parallel to the surface of the sample in the horizontal direction when emitted to the tested sample, the second laser and the first laser are propagated in the same light path when emitted to the PS spectroscope, and the second laser vertically excites the surface of the sample after passing through the first focus lens; the three-dimensional displacement table carries the sample to move to a laser focusing position; and the collection unit collects and processes the data of the tested sample. The invention provides a dipulse laser-induced breakdown spectroscopy component analysis device with a simple excitation mode.

Description

Technical Field

[0001] The present invention relates to the technical field of chemistry and spectral analysis, and more specifically, to an orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy composition analysis device. Background Art

[0002] Laser-Induced Breakdown Spectroscopy (LIBS) is a technique that ablates the surface of a sample with a high-energy laser pulse to generate a plasma, and then analyzes the emission spectrum of the plasma to determine the composition and content of the sample. It has the advantages of being fast, non-contact, and simple sample preparation, and has been widely used in industrial production monitoring, environmental monitoring, biochemical reconnaissance and other fields. However, traditional single-pulse LIBS technology still faces challenges in the detection limit (LOD) of certain elements, with relatively weak spectral signal intensity and low signal-to-noise ratio, which limits its application in trace element analysis. To improve the detection sensitivity of LIBS, dual-pulse laser-induced breakdown spectroscopy (DP-LIBS) technology has emerged. DP-LIBS uses two laser pulses with a very short interval to enhance the signal intensity of the plasma radiation spectrum and achieve highly sensitive detection of trace elements. According to the difference in optical structure, DP-LIBS is mainly divided into two optical path structures: coaxial and orthogonal. In the coaxial structure, the two pulses have the same propagation axis and are perpendicular to the sample surface; in the orthogonal structure, according to the different excitation orders of the dual pulses, it can be divided into two modes: pre-ablative and re-heating. Different excitation methods have their own advantages in terms of signal enhancement effect and applicable scenarios. For example, the coaxial type is more practical in improving the spectral signal, while the orthogonal type may be more advantageous in the analysis of certain specific materials or complex samples. Currently, most of the existing DP-LIBS measurement devices on the market can only fixedly adopt one excitation method and cannot flexibly switch according to the actual detection requirements, which to a certain extent limits its application range and the optimization of detection effects. In addition, when some devices achieve the switching of the dual-pulse excitation method, the operation is complex and the cost is high, which is not conducive to popularization and application.

[0003] Therefore, how to provide a dual-pulse laser-induced breakdown spectroscopy composition analysis device with a simple excitation method is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the present invention provides an orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy composition analysis device to solve the problems existing in the background art.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] An orthogonal collinear integrated double-pulse laser-induced breakdown spectroscopy composition analysis device, comprising: a multi-channel pulse generator, a first laser timing emission unit, a second laser timing emission unit, a PS beam splitter, a three-dimensional displacement stage, a PS beam splitter, a first focusing mirror, a second focusing mirror, a measured sample and a collection unit. The multi-channel pulse generator controls the emission time of the laser by the first laser timing emission unit and the second laser timing emission unit, as well as the laser acquisition time of the collection unit. The first laser timing emission unit emits a first laser, which is reflected by the PS beam splitter and then passes through the first focusing mirror to vertically excite the surface of the measured sample. The second laser timing emission unit emits a second laser to the measured sample or the PS beam splitter. When the second laser is emitted to the measured sample, it is parallel to the surface of the measured sample in the horizontal direction. When the second laser passes through the second focusing mirror and is emitted to the PS beam splitter, it propagates along the same optical path as the first laser, and after passing through the first focusing mirror, it vertically excites the surface of the measured sample. The three-dimensional displacement stage carries the measured sample and moves the sample to the laser focusing position. The collection unit collects the plasma brightness data generated by the excitation of the measured sample and processes it.

[0007] Preferably, the first laser timing emission unit includes: a first high-power pulsed laser, a first plano-convex mirror, and a second plano-convex mirror. The first high-power pulsed laser emits a first laser. The first plano-convex mirror and the second plano-convex mirror are arranged in parallel to form a laser beam expander group. The first laser is sequentially expanded by the first plano-convex mirror and the second plano-convex mirror. The expanded first laser is reflected by the PS beam splitter and then passes through the focusing mirror to vertically excite the surface of the measured sample.

[0008] Preferably, the second laser timing emission unit includes: a second high-power pulsed laser, a polarizer, a half-wave plate, a first reflector, a second reflector, and a one-dimensional displacement stage. The second high-power pulsed laser emits a second laser, which sequentially passes through the half-wave plate and the polarizer. The half-wave plate and the polarizer form a mirror group to adjust the energy of the second laser. Then, the second laser passing through the polarizer is reflected by the first reflector to the second reflector. The second reflector is arranged on the one-dimensional displacement stage. The second reflector has two setting positions on the one-dimensional displacement stage. When the second reflector is in the first setting position, the second laser is reflected by the second reflector to the measured sample, and the second laser is parallel to the surface of the measured sample in the horizontal direction. When the second reflector is in the second setting position, the second laser is reflected by the second reflector and then sequentially passes through the second focusing mirror and the PS beam splitter, propagates along the same optical path as the first laser, and after passing through the first focusing mirror, vertically excites the surface of the measured sample.

[0009] Preferably, the collection unit includes: a collection mirror, an optical fiber, a spectrometer, and a computer. The collection mirror collects the plasma brightness information generated by the excitation of the sample to be measured and transmits it to the spectrometer through the optical fiber. The spectrometer converts the plasma brightness information into spectral information and sends it to the computer for processing.

[0010] Preferably, an optical platform is further included, and the orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy component analysis device is arranged on the optical platform.

[0011] As can be seen from the above technical solutions, compared with the prior art, the present invention discloses an orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy component analysis device. By building a set of dual-pulse devices, it can integrate two dual-pulse excitation methods, namely orthogonal and collinear, to meet the requirements of different samples and detection scenarios, thereby improving the adaptability and flexibility of detection; with a clever optical path design, it can quickly switch between orthogonal and collinear excitation functions through a simple adjustment device, greatly simplifying the operation process, reducing the usage difficulty and maintenance cost of the equipment, and improving the detection efficiency; through a multi-channel pulse generator, unified control of various excitation functions is achieved, ensuring the precise triggering and coordinated operation of the pulses, further improving the stability and reliability of detection, and at the same time facilitating the integration and operation of the equipment; it can more effectively excite the sample to generate plasma under different excitation methods, enhance the intensity and stability of the spectral signal, thereby improving the detection efficiency and accuracy, reducing the detection limit, and better meeting the high-precision detection requirements such as trace element analysis. Description of the Drawings

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained according to the provided drawings without creative efforts.

[0013] Figure 1 It is a schematic structural diagram provided by the present invention;

[0014] Figure 2 It is a schematic diagram of the three-channel timing control parameters provided by the present invention;

[0015] In the figure, 1 is the first high-power pulsed laser; 2 is the first plano-convex mirror; 3 is the second plano-convex mirror; 4 is the PS beam splitter; 5 is the three-dimensional displacement stage; 6 is the first focusing mirror; 7 is the sample to be measured; 8 is the second focusing mirror; 9 is the second reflecting mirror; 10 is the one-dimensional displacement stage; 11 is the second reflecting mirror; 12 is the first reflecting mirror; 13 is the polarizer; 14 is the half-wave plate; 15 is the second high-power pulsed laser; 16 is the collection mirror; 17 is the optical fiber; 18 is the spectrometer; 19 is the computer; 20 is the multi-channel pulse generator; 21 is the optical platform. Detailed implementation mode

[0016] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0017] The embodiment of the present invention discloses an orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy component analysis device, as Figure 1 shown, including: a multi-channel pulse generator 20, a first laser timing emission unit, a second laser timing emission unit, a PS beam splitter 4, a three-dimensional displacement stage 5, a PS beam splitter 4, a first focusing mirror 6, a second focusing mirror 8, a sample to be measured 7 and a collection unit. The multi-channel pulse generator 20 controls the emission time of the laser emitted by the first laser timing emission unit and the second laser timing emission unit and the laser acquisition time of the collection unit; the first laser timing emission unit emits the first laser, which is reflected by the PS beam splitter 4 and then passes through the first focusing mirror 6 to vertically excite the surface of the sample to be measured 7; the second laser timing emission unit emits the second laser to the sample to be measured 7 or the PS beam splitter 4. When the second laser is emitted to the sample to be measured 7, it is parallel to the surface of the sample to be measured 7 in the horizontal direction. When the second laser passes through the second focusing mirror 8 and is emitted to the PS beam splitter 4, it propagates along the same optical path as the first laser, and after passing through the first focusing mirror 6, it vertically excites the surface of the sample to be measured 7; the three-dimensional displacement stage 5 carries the sample to be measured 7 and moves the sample to the laser focusing position; the collection unit collects the plasma brightness data generated by the excitation of the sample to be measured 7 and processes it.

[0018] In a specific embodiment, the first laser timing emission unit includes: a first high-power pulsed laser 1, a first plano-convex mirror 2, and a second plano-convex mirror 3. The first high-power pulsed laser 1 emits the first laser. The first plano-convex mirror 2 and the second plano-convex mirror 3 are arranged in parallel to form a laser beam expander group. The first laser is successively expanded by the first plano-convex mirror 2 and the second plano-convex mirror 3, and the expanded first laser is reflected by the PS beam splitter 4 and then passes through the focusing mirror to vertically excite the surface of the sample to be measured 7.

[0019] In a specific embodiment, the second laser timing emission unit includes: a second high-power pulsed laser 15, a polarizing mirror 13, a half-wave plate 14, a first reflecting mirror 12, a second reflecting mirror, and a one-dimensional displacement stage 10. The second high-power pulsed laser 15 emits a second laser, which sequentially passes through the half-wave plate 14 and the polarizing mirror 13. The half-wave plate 14 and the polarizing mirror 13 form a mirror group to adjust the energy of the second laser. Then, the second laser passing through the polarizing mirror 13 is reflected by the first reflecting mirror 12 onto the second reflecting mirror. The second reflecting mirror is disposed on the one-dimensional displacement stage 10. The second reflecting mirror has two setting positions on the one-dimensional displacement stage 10. When the second reflecting mirror is in the first setting position, the second laser is reflected by the second reflecting mirror onto the sample to be measured 7, and the second laser is parallel to the surface of the sample to be measured 7 in the horizontal direction. When the second reflecting mirror is in the second setting position, the second laser is reflected by the second reflecting mirror and then sequentially passes through the second focusing mirror 8 and the PS beam splitter 4, and propagates along the same optical path as the first laser. After passing through the first focusing mirror 6, it vertically excites the surface of the sample to be measured 7.

[0020] In a specific embodiment, the collection unit includes: a collection mirror 16, an optical fiber 17, a spectrometer 18, and a computer 19. The collection mirror 16 collects the plasma brightness information generated by the excitation of the sample to be measured 7 and transmits it to the spectrometer 18 through the optical fiber 17. The spectrometer 18 converts the plasma brightness information into spectral information and sends it to the computer 19 for processing.

[0021] In a specific embodiment, an optical platform 20 is further included, and the orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy composition analysis device is disposed on the optical platform 20.

[0022] Specific implementation process of dual-pulse measurement

[0023] Step 1:

[0024] Turn on the device power supply to supply power to the computer 19, the laser source, the multi-channel pulse generator 20, and the three-dimensional displacement stage 5. Start the measurement and control software on the computer 19 to monitor and control the entire experimental process, including monitoring the status of the laser and controlling the data acquisition of the spectrometer 18. Use the measurement and control software to check whether the laser control and the spectrometer 18 are normal, and check whether the input and output of the multi-channel pulse generator 20 are normal.

[0025] Step 2:

[0026] Turn on the water-cooling switch of the two lasers and the laser lamp switch for laser head cooling and laser emission preparation. Turn on the cooling switch of the spectrometer 18 to start the cooling system of the spectrometer 18 and stabilize the temperature of the detector within a suitable operating temperature range. Turn on the switch of the multi-channel pulse generator 20 and confirm whether the initial parameter settings are correct and whether it is in the standby state. Turn on the switch of the three-dimensional displacement stage 5 and use the control software of the computer 19 to move the coordinate axes of the three-dimensional displacement stage 5 to a position close to the laser action area according to the experimental requirements, so as to ensure that the laser can accurately irradiate the sample surface, and during the subsequent experiment, the sample can be conveniently adjusted in position within the adjustment range of the displacement stage.

[0027] Step 3:

[0028] As Figure 2 shown, adjust the timing control parameters of the three channels in the multi-channel pulse generator 20, namely laser timing 1, laser timing 2, and acquisition timing. The timing configurations of the three types of double-pulse laser-induced breakdown spectroscopy are as follows:

[0029] Orthogonal-reheating mode measurement: The first high-power pulsed laser 1 is laser timing 1, and the second high-power pulsed laser 15 is laser timing 2. First, the first high-power pulsed laser 1 emits the first pulsed laser, which irradiates the sample surface to generate an initial laser-induced plasma. After a specific time delay (controlled by laser timing 2), the second high-power pulsed laser 15 emits the second pulsed laser to reheate the plasma generated by the first pulse. The time interval between laser timing 1 and laser timing 2 is generally in the nanosecond-microsecond order of magnitude, and the specific value is optimized according to the properties of the sample and the experimental purpose. The acquisition timing needs to be set at an appropriate time point after the action of the second pulsed laser to ensure that the strongest spectral signal emitted by the plasma can be collected.

[0030] Orthogonal-pre-ablation mode measurement: The second high-power pulsed laser 15 is laser timing 1, and the first high-power pulsed laser 1 is laser timing 2. In this mode, the second high-power pulsed laser 15 first emits the first pulsed laser to pre-ablate the surface of the sample to be measured, removing possible contaminants or oxide layers on the sample surface, and at the same time creating more favorable conditions for the action of the second pulsed laser. After a certain time delay (controlled by laser timing 2), the first high-power pulsed laser 1 emits the second pulsed laser to generate a laser-induced plasma for elemental analysis. When setting the parameters of the multi-channel pulse generator 20, accurately adjust the time interval between laser timing 1 and laser timing 2, which is also in the nanosecond-microsecond order of magnitude. And reasonably set the acquisition timing to obtain the best spectral data.

[0031] Collinear mode measurement: The first high-power pulsed laser 1 is laser timing 1, and the second high-power pulsed laser 15 is laser timing 2. In this mode, the pulsed lasers emitted by the two lasers propagate along the same optical path and successively irradiate the sample surface. The plasma state generated by the first pulsed laser will be directly affected by the second pulsed laser. By adjusting the time interval between laser timing 1 and laser timing 2, the excitation effect of the plasma can be optimized. Similar to the orthogonal mode, the setting range of the time interval is in the nanosecond-microsecond order of magnitude, and the setting of the acquisition timing also needs to be optimized according to the characteristics of the plasma emission spectrum to ensure high-quality spectral data is collected.

[0032] Step 4:

[0033] Adjust the optical path systems of the two lasers. When adjusting the first high-power pulsed laser 1, by adjusting the position of the first high-power pulsed laser 1, the laser is vertically incident on the PS beam splitter 4, then vertically incident on the focusing mirror, and finally focused on the sample surface. When adjusting the second high-power pulsed laser 15, by adjusting the optical lenses in the laser optical path system of the second high-power pulsed laser 15, the laser can be horizontally emitted from the mirror.

[0034] Step 5:

[0035] When using the orthogonal mode for detection, by adjusting the knob of the one-dimensional displacement stage 10, slowly change the height of the parallel light of the second high-power pulsed laser 15, and at the same time observe the laser beam emitted by the second high-power pulsed laser 15 to make it parallel to the sample surface in the horizontal direction (the second mirror 9 and the second mirror 11 are actually the same second mirror, just at different positions of the one-dimensional displacement stage 10). At this time, it is the second mirror 11. When using the collinear mode for detection, adjust the one-dimensional displacement stage 10 to change the laser height. At this time, it is the second mirror 9, and adjust the laser beam emitted by the laser 2 to be vertically incident on the surface of the PS beam splitter. Only when the optical path is vertically incident can it be ensured that the pulsed lasers emitted by the two lasers can accurately propagate along the same optical path to the sample surface to achieve collinear mode measurement.

[0036] Step 6:

[0037] Open the laser windows of the two lasers to allow the pulsed lasers to exit from inside the lasers. The emitted pulsed lasers irradiate the sample surface, and the substances on the sample surface will be rapidly heated and ionized, thereby generating laser-induced plasma. Measure the output energy of the laser with an energy meter and observe the shape and size of the light spot to ensure that the energy distribution of the laser is uniform and the light spot size meets the experimental requirements. At the same time, pay attention to the fixation and placement of the sample to ensure that the sample does not move or shake during the laser action to ensure the consistency and accuracy of each measurement.

[0038] Step 7:

[0039] Turn on the spectrometer 18 and set the parameters of the spectrometer 18 according to the experimental requirements, such as the integration time, wavelength range, etc. Generally speaking, for samples with weak signals, the integration time can be appropriately extended to improve the signal-to-noise ratio; for samples with strong signals, the integration time can be shortened to avoid detector saturation. Then, the collected spectral data is transmitted to the computer through the data transmission interface. The measurement and control software on the computer 19 performs image display on the received spectral data. Through the graphical interface, the spectral data is presented in the form of an intuitive spectrogram, with the abscissa being the wavelength and the ordinate being the spectral intensity. Some auxiliary functions, such as spectral line annotation and peak search, can also be used to conduct preliminary observation and analysis of the spectral data.

[0040] Step 8:

[0041] Combined with the known element spectral line database, search for the spectral peaks of the elements to be measured in the spectral data. During the peak search process, it is necessary to reasonably set the spectral data parameters, such as the minimum intensity threshold of the peak, the full width at half maximum range of the spectral peak, etc., to ensure that all spectral peaks of the elements to be measured can be accurately found while avoiding misjudgment. Prepare a series of standard samples with known element contents, conduct the above-mentioned double-pulse laser-induced breakdown spectroscopy measurement on each standard sample, obtain its spectral data, and determine the spectral peak intensity of the elements to be measured. Using the curve fitting function of the statistical analysis software, plot the element content - spectral peak intensity standard curve with the element content as the abscissa and the spectral peak intensity as the ordinate.

[0042] Step 9:

[0043] When detecting an unknown sample, perform spectral data acquisition according to Steps 1 - 7, and the appropriate double-pulse laser-induced breakdown spectroscopy measurement mode (orthogonal - reheating mode, orthogonal - pre-ablative mode, or collinear mode) can be selected according to the experimental requirements. Find the spectral peak of the element to be measured in the spectrogram of the unknown sample and read its spectral peak intensity. Substitute the spectral peak intensity into the established element content - spectral peak intensity standard curve to calculate the content of the corresponding element in the unknown sample. To improve the measurement accuracy, the unknown sample can be measured multiple times, and the average value is taken as the final determination result of the element content.

[0044] The beneficial effects of the present invention are as follows:

[0045] 1. The design of double-pulse excitation can increase the spectral signal intensity by several times or even dozens of times. This is because the first pulse ablates the sample to generate plasma, and the second pulse reheats or further excites the plasma, making the electron transitions in the plasma more sufficient, thus generating a stronger spectral signal.

[0046] 2. The double-pulse LIBS technology enhances the spectral signal intensity while relatively reducing the background noise, resulting in a significant improvement in the signal-to-noise ratio. The increase in the signal-to-noise ratio helps to more accurately identify and analyze the elemental composition in the sample, especially when detecting low-concentration elements, where the advantage is more obvious.

[0047] 3. Due to the enhanced spectral signal intensity and the improved signal-to-noise ratio, the double-pulse LIBS technology can detect elements at lower concentrations, thus reducing the detection limit. For example, when detecting the content of heavy metal elements in soil, the double-pulse LIBS technology can lower the detection limit to the 10 -9 quantity level, which is of great significance for the detection of trace elements in fields such as environmental monitoring and food safety.

[0048] 4. The lower detection limit enables the double-pulse LIBS technology to be applied in more fields, such as impurity detection in semiconductor materials and trace element analysis in biomedicine, which often require precise measurement of extremely low-concentration elements.

[0049] 5. In single-pulse LIBS, the matrix composition of the sample may interfere with the spectral signal, affecting the accuracy of the detection results. The double-pulse LIBS technology can, to a certain extent, reduce the influence of the matrix effect through the synergistic effect of two pulses. For example, for metal and semiconductor materials, the double pulse can more effectively remove the impurities and oxide layers on the sample surface, making the composition of the plasma closer to the true composition of the sample, thereby improving the detection accuracy.

[0050] 6. The present invention uses a PS spectroscope 4 in combination with a displacement stage to enable the device to have both collinear excitation and orthogonal excitation modes, expanding the sample excitation modes.

[0051] 7. Adjusting the orthogonal and collinear switching of the second-path pulse excitation optical path by using a displacement stage avoids the need to use two lasers for orthogonal and collinear excitation and also avoids the use of two excitation optical paths, greatly reducing the component cost and the complexity of device construction.

[0052] 8. The design of using a half-wave plate 14 in combination with a polarizer 13 to adjust the laser energy can polarize the laser while conveniently adjusting the laser energy, providing a prerequisite for subsequent collinear excitation using a PS spectroscope.

[0053] 9. By using a PS spectroscope to change the direction of the second-path pulse laser optical path, the space occupied by the double-pulse optical path can be greatly shortened, which is more conducive to the integration of the device.

[0054] 10. The method of synchronously controlling the laser emission time of two lasers and the signal acquisition time of the spectrometer 18 by using the multi-channel pulse generator 20 can specify the dual-pulse excitation strategy based on the plasma excitation and disappearance time, which can significantly improve the signal intensity.

[0055] The embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other. For the devices disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple. For the relevant parts, reference can be made to the description in the method section.

[0056] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy composition analysis device, characterized in that, Comprising: A multi-channel pulse generator, a first laser timing emission unit, a second laser timing emission unit, a PS beam splitter, a three-dimensional displacement stage, a PS beam splitter, a first focusing mirror, a second focusing mirror, a sample to be measured and a collection unit. The multi-channel pulse generator controls the emission time of the laser by the first laser timing emission unit and the second laser timing emission unit, as well as the laser acquisition time of the collection unit. The first laser timing emission unit emits a first laser, which is reflected by the PS beam splitter and then passes through the first focusing mirror to vertically excite the surface of the sample to be measured. The second laser timing emission unit emits a second laser to the sample to be measured or the PS beam splitter. When the second laser is emitted to the sample to be measured, it is parallel to the surface of the sample to be measured in the horizontal direction. When the second laser passes through the second focusing mirror and is emitted to the PS beam splitter, it propagates along the same optical path as the first laser, and after passing through the first focusing mirror, it vertically excites the surface of the sample to be measured. The three-dimensional displacement stage carries the sample to be measured and moves the sample to the laser focusing position. The collection unit collects the plasma brightness data generated by the excitation of the sample to be measured and processes it.

2. The integrated orthogonal collinear dual-pulse laser-induced breakdown spectroscopy composition analysis device according to claim 1, wherein The first laser timing emission unit includes: a first high-power pulsed laser, a first plano-convex mirror, and a second plano-convex mirror. The first high-power pulsed laser emits a first laser. The first plano-convex mirror and the second plano-convex mirror are arranged in parallel to form a laser beam expander group. The first laser is expanded in sequence through the first plano-convex mirror and the second plano-convex mirror. The expanded first laser is reflected by the PS beam splitter and then passes through the focusing mirror to vertically excite the surface of the sample to be measured.

3. The integrated orthogonal collinear dual-pulse laser-induced breakdown spectroscopy composition analysis device according to claim 1, characterized in that, The second laser timing emission unit includes: a second high-power pulsed laser, a polarizer, a half-wave plate, a first reflector, a second reflector, and a one-dimensional displacement stage. The second high-power pulsed laser emits a second laser, which passes through the half-wave plate and the polarizer in sequence. The half-wave plate and the polarizer form a mirror group to adjust the energy of the second laser. Then, the second laser passing through the polarizer is reflected by the first reflector to the second reflector. The second reflector is arranged on the one-dimensional displacement stage. The second reflector has two setting positions on the one-dimensional displacement stage. When the second reflector is in the first setting position, the second laser is reflected by the second reflector to the sample to be measured, and the second laser is parallel to the surface of the sample to be measured in the horizontal direction. When the second reflector is in the second setting position, the second laser is reflected by the second reflector and then passes through the second focusing mirror and the PS beam splitter in sequence, propagates along the same optical path as the first laser, and after passing through the first focusing mirror, it vertically excites the surface of the sample to be measured.

4. An orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy composition analysis device according to claim 1, characterized in that, The collection unit includes: a collection mirror, an optical fiber, a spectrometer, and a computer. The collection mirror collects the plasma brightness information generated by the excitation of the sample to be measured and transmits it to the spectrometer through the optical fiber. The spectrometer converts the plasma brightness information into spectral information and sends it to the computer for processing.

5. An orthogonal collinear integrated dual-pulse laser-induced breakdown spectroscopy composition analysis device according to claim 1, characterized in that, It further includes an optical platform, and the orthogonal collinear integrated double-pulse laser-induced breakdown spectroscopy component analysis device is arranged on the optical platform.

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