Overpressure protection device for vacuum gauge

Abstract

The invention discloses an overpressure protection device for a vacuum gauge, and relates to the technical field of overpressure protection of vacuum gauges.The overpressure protection device comprises a main pipe and a control module, a sealing cover is fixedly connected to the right side of the main pipe, three openings are formed in the right side of the sealing cover, and a first fixing pipe is fixedly connected to the inner wall of the opening in the upper portion of the right side of the sealing cover; an exhaust port is formed in the upper side of the middle of the first fixing pipe, a pressure valve is fixedly connected to the inner wall of the first fixing pipe, and a sealing mechanism and a pressure reduction mechanism are arranged in two openings in the lower portion of the right side of the sealing cover correspondingly. And by arranging a second fixing pipe, a telescopic rod and an elastic rod, when the air pressure rises, a mechanical displacement conversion mode can be used for synchronously amplifying and transmitting force to a pressing rod, the induction precision and response sensitivity of the piezoelectric module are enhanced, and the vacuum gauge has the characteristics that the practicability is high, and the use reliability of the vacuum gauge is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of overpressure protection for vacuum gauges, and particularly to an overpressure protection device for a vacuum gauge. Background Art

[0002] As a key component for monitoring the pressure change in a cavity in a vacuum system, the measurement accuracy and service life of a vacuum gauge largely depend on the stability of its pressure-bearing environment. However, in practical applications, after the vacuum system is connected to the cavity to be measured, due to factors such as sudden gas release, misoperation, or seal failure inside the cavity, backflow air currents or instantaneous overpressure phenomena often occur. Such phenomena can cause the air current to flow back into the vacuum gauge internally, not only interfering with its normal measurement accuracy but also potentially damaging the sensor structure. In severe cases, it may even lead to the failure of the entire vacuum system. The Chinese patent with the publication number CN109060238A discloses an overpressure protection device for a vacuum gauge. This device starts to relieve pressure when the pressure exceeds 0.16 bar. When encountering a pressure shock, the vacuum gauge channel is quickly blocked and the overpressure relief channel relieves pressure simultaneously to protect the safety of the vacuum gauge. It aims to lift the second sphere by the air pressure when the air pressure breaks through to a certain threshold through the air flow thrust, the second sphere disengages from the fixed lower ball seat, and the gas passes through the second air passage and the overpressure relief channel relieves pressure. When the floating lower ball seat and the first sphere exceed 0.12 bar in pressure, the vacuum gauge channel is closed. During this process, the backflow speed and backflow amount of the backflow air current are not accurately limited, so the backflow air current that does not reach the pressure threshold within a short time may still damage the vacuum gauge. In addition, it is difficult for this device to quickly guide and balance the residual pressure of the gas after the backflow occurs, which easily causes the vacuum gauge area to remain in a high-pressure state continuously, further increasing the risk of damage. Therefore, there is an urgent need to propose an overpressure protection device for a vacuum gauge with a fast response speed, high recognition accuracy, dual protection and pressure relief capabilities, which can not only actively identify the increase in the backflow air current speed within a short time and start the protection response in real time, but also regulate the system pressure while closing the closed passage, thereby effectively improving the use reliability of the vacuum gauge and the system safety. Summary of the Invention

[0003] The purpose of the present invention is to provide an overpressure protection device for a vacuum gauge to solve the problems raised in the above background art.

[0004] To solve the above technical problems, the present invention provides the following technical solution: An overpressure protection device for a vacuum gauge, comprising a main pipe and a control module, characterized in that: a cover is fixedly connected to the right side of the main pipe, three openings are provided on the right side of the cover, a first fixed pipe is fixedly connected to the inner wall of the upper opening on the right side of the cover, an exhaust port is provided on the upper side of the middle of the first fixed pipe, a pressure valve is fixedly connected to the inner wall of the first fixed pipe, and a closing mechanism and a pressure reducing mechanism are respectively arranged in the two openings at the lower right side of the cover; The closing mechanism comprises a connection assembly, a pressure rod and a piezoelectric module. One end of the pressure rod contacts the outer wall of the piezoelectric module, and the pressure rod can change the pressure on the piezoelectric module according to the change of the air pressure inside the main pipe; The closing mechanism further comprises a sealing ring and a sealing piece on the upper side of the sealing ring. The sealing piece can descend to block the sealing ring; The pressure reducing mechanism comprises a third fixed pipe, a fixing assembly and a sealing block that can move relative to the fixing assembly. The sealing block can isolate the third fixed pipe and the inside of the main pipe into two sealed cavities.

[0005] According to the above technical solution, the connection assembly comprises a second fixed pipe. The left end of the second fixed pipe is fixedly connected to the inner wall of the opening on the cover. A sliding frame is fixedly connected to the inner wall of the second fixed pipe. An elastic metal film is fixedly connected to the left side of the inner wall of the sliding frame. A first sliding rod is slidably connected to the middle of the inner wall of the sliding frame. A ball is embedded at the left end of the first sliding rod. The outer wall of the ball contacts the outer wall of the elastic metal film. The right end of the first sliding rod is hinged to a telescopic rod. An elastic rod is inserted at the lower end of the telescopic rod. The outer wall of the telescopic rod is hinged to a fixing frame through a torsion spring. The upper end of the fixing frame is fixedly connected to the outer wall of the cover. The lower end of the elastic rod is joined to the right end of the pressure rod. The connection assembly further comprises a connection frame. The upper end of the connection frame is fixedly connected to the outer wall of the cover. A fixing box is fixedly connected to the lower end of the connection frame. The right inner wall of the fixing box is slidably connected to the outer wall of the pressure rod. The left side of the inner wall of the fixing box is fixedly connected to the outer wall of the piezoelectric module.

[0006] According to the above technical solution, the outer wall of the sealing ring is fixedly connected to the upper inner wall of the main pipe. An electromagnet is fixedly connected to the inner wall of the sealing ring. A support frame is fixedly connected to the lower side of the sealing ring. A spring is fixedly connected to the upper surface of the support frame. The upper end of the spring is fixedly connected to the lower surface of the sealing piece. A second sliding rod is further fixedly connected to the lower end of the sealing piece. The lower end of the second sliding rod penetrates through the support frame and extends to the lower side of the support frame. The outer wall of the second sliding rod contacts the inner wall of the support frame. A metal piece is fixedly connected to the upper surface of the sealing piece. A first motor is fixedly connected to the outer wall of the main pipe. The output end of the first motor is fixedly connected to a rotating rod. One end of the rotating rod penetrates through the main pipe and extends to the inside of the main pipe. A pressing block is fixedly connected to the outer wall of the rotating rod on the side inside the main pipe.

[0007] According to the above technical solution, the outer diameter of the sealing piece is larger than the inner diameter of the sealing ring. Both the sealing piece and the sealing ring are made of rubber, the metal piece is made of metal, and the pressing block is located above the metal piece. The pressing block is a horizontally placed triangular structure, and the length of the pressing block in the left-right direction is greater than the distance between the outer wall of the rotating rod and the upper surface of the metal piece.

[0008] According to the above technical solution, the elastic rod is made of elastic metal material, the telescopic rod can change in length, the elastic metal film is made of elastic metal material, the piezoelectric module is electrically connected to the control module, and both the first motor and the electromagnet are electrically connected to the control module.

[0009] According to the above technical solution, the connection point between the fixing frame and the telescopic rod is located at the lower side of the middle part of the telescopic rod, and the torsion spring at the connection between the fixing frame and the telescopic rod can make the pressing rod contact the piezoelectric module when the elastic metal film is in the undeformed state.

[0010] According to the above technical solution, the left end of the third fixing tube is fixedly connected to the inner wall of the upper opening of the cover. A retaining ring is fixedly connected to the left side of the inner wall of the third fixing tube, and an elastic film is fixedly connected to the right side of the inner wall of the third fixing tube. An extension rod is arranged inside the third fixing tube. The right end of the extension rod penetrates through the elastic film and extends to the right side of the elastic film. The left end of the extension rod is fixedly connected to the right side of the sealing block. A threaded cylinder is fixedly connected to the right side of the extension rod. A fixing frame is fixedly connected to the right side of the outer wall of the third fixing tube. A second motor is fixedly connected to the inner wall of the fixing frame. The output end of the second motor is fixedly connected to a threaded rod. The outer wall of the threaded rod is threadedly connected to the inner wall of the threaded cylinder. The left end of the third fixing tube is fixedly connected to the inner wall of the upper opening of the cover.

[0011] According to the above technical solution, the elastic film is a diaphragm structure with elasticity. The outer diameter of the sealing block is larger than the inner diameter of the retaining ring. The second motor is connected to the control module. When the sealing block and the retaining ring are not in contact, the inside of the third fixing tube is communicated with the inside of the main tube.

[0012] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: By providing the pressing rod, piezoelectric module, sealing ring and sealing piece in the closing mechanism, the present invention can realize real-time sensing and active closing control of the abnormal pressure caused by the backflow air flow. By providing the second fixing tube, telescopic rod and elastic rod, when the air pressure increases, the force can be synchronously and amplifiedly transmitted to the pressing rod through the mechanical displacement conversion method, enhancing the sensing accuracy and response sensitivity of the piezoelectric module, so as to realize rapid identification of backflow events and linkage of the plugging structure, and avoid the damage caused by the air flow entering the vacuum gauge. By setting an electromagnet and a metal sheet, and cooperating with a sealing sheet and a sealing ring, the rapid blocking of the upward airflow in the initial stage of backflush is achieved. When the control module detects a voltage mutation, the metal sheet is magnetically attracted by the electromagnet to complete the sealing, effectively cutting off the air flow path; By setting a first motor, a rotating rod and a pressing block, and making them electrically connected to the control module, an auxiliary enhancement mechanism after sealing is realized. After the initial magnetic sealing, the first motor drives the pressing block to press the upper surface of the metal sheet, and the mechanical pressure is used to replace the electromagnetic adsorption for enhanced sealing. This not only reduces the heating risk caused by continuous power-on of the electromagnet and avoids affecting the stability of the measurement environment of the vacuum gauge, but also improves the continuous reliability of the sealing effect of the metal sheet, and ensures the sealing integrity in the face of multiple or high-intensity backflushes; By setting a pressure reduction mechanism, including an extension rod, an elastic membrane, a sealing block and a threaded rod, the air pressure in the cavity of the third fixed tube is actively adjusted when the detected air pressure reaches the threshold value to achieve the slow-release control of the air pressure change inside the main pipe. When a backflush occurs, this structure reduces the rising speed of the high-pressure gas in the main pipe cavity by delaying the connection and extracting the high-pressure gas, and induces the metal sheet to quickly seal through the gas back-drawing, reducing the duration and intensity of the high pressure, further improving the protection effect of the vacuum gauge, and significantly reducing the errors and device damage caused by pressure fluctuations. Description of the Drawings

[0013] The drawings are used to provide a further understanding of the present invention, and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention, and do not constitute a limitation to the present invention. In the drawings: Figure 1 is a three-dimensional structural schematic diagram of the present invention; Figure 2 is a schematic diagram of the rear structure of the present invention; Figure 3 is a schematic diagram of the split structure of the present invention; Figure 4 is a schematic diagram of the internal structure of the sealing ring of the present invention; Figure 5 is a schematic diagram of a partial structure of the sealing mechanism of the present invention; Figure 6 is a schematic diagram of the internal structure of the second fixed tube of the present invention; Figure 7 is a schematic diagram of the structure of the pressure reduction mechanism of the present invention; Figure 8 is a schematic cross-sectional structure diagram of the pressure reduction mechanism of the present invention; In the figure: 1. Main pipe; 2. Cover; 3. First fixed pipe; 4. Exhaust port; 5. Pressure valve; 6. Sealing mechanism; 7. Pressure reduction mechanism; 601. Second fixed pipe; 602. Slide carriage; 603. Elastic metal film; 604. First slide bar; 605. Ball; 606. Telescopic rod; 607. Elastic rod; 608. Pressing rod; 609. Fixed frame; 610. Connecting frame; 611. Fixed box; 612. Piezoelectric module; 613. Sealing ring; 614. Electromagnet; 615. Support frame; 616. Spring; 617. Sealing piece; 618. Second slide bar; 619. Metal piece; 620. First motor; 621. Rotating rod; 622. Pressing block; 701. Third fixed pipe; 702. Elastic film; 703. Extension rod; 704. Sealing block; 705. Threaded cylinder; 706. Fixed frame; 707. Second motor; 708. Threaded rod; 709. Retaining ring. Detailed implementation manners

[0014] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0015] Please refer to Figure 1-8 , the present invention provides a technical solution: an overpressure protection device for a vacuum gauge, including a main pipe 1 and a control module. The right side of the main pipe 1 is fixedly connected with a cover 2. Three openings are provided on the right side of the cover 2. The inner wall of the upper opening on the right side of the cover 2 is fixedly connected with a first fixed pipe 3. An exhaust port 4 is provided on the upper side of the middle of the first fixed pipe 3. A pressure valve 5 is fixedly connected to the inner wall of the first fixed pipe 3. And a sealing mechanism 6 and a pressure reduction mechanism 7 are respectively arranged in the two openings at the lower part on the right side of the cover 2; During the actual application process of this device, the lower side of the main pipe 1 is connected to the measured cavity, and then the upper side of the main pipe 1 is connected to the vacuum gauge. The air flow moves through the inside of the main pipe 1. When air flow backflow occurs, the air pressure inside the main pipe 1 can be discharged through the pressure valve 5; The closing mechanism 6 includes a connecting component, a pressure rod 608, and a piezoelectric module 612. One end of the pressure rod 608 contacts the outer wall of the piezoelectric module 612. The pressure rod 608 can change the pressure on the piezoelectric module 612 according to the air pressure change inside the main pipe 1. The closing mechanism 6 further includes a sealing ring 613 and a sealing piece 617 above the sealing ring 613. The sealing piece 617 can descend to block the sealing ring 613. The connecting component includes a second fixed pipe 601. The left end of the second fixed pipe 601 is fixedly connected to the inner wall of the opening on the cover 2. An inner wall of the second fixed pipe 601 is fixedly connected with a sliding frame 602. A left side of the inner wall of the sliding frame 602 is fixedly connected with an elastic metal film 603. A middle part of the inner wall of the sliding frame 602 is slidably connected with a first sliding rod 604. A left end of the first sliding rod 604 is embedded with a ball 605. An outer wall of the ball 605 contacts an outer wall of the elastic metal film 603. A right end of the first sliding rod 604 is hinged with a telescopic rod 606. A lower end of the telescopic rod 606 is inserted with an elastic rod 607. An outer wall of the telescopic rod 606 is hinged with a fixing frame 609 through a torsion spring. An upper end of the fixing frame 609 is fixedly connected to an outer wall of the cover 2. A lower end of the elastic rod 607 is joined to a right end of the pressure rod 608. The connecting component further includes a connecting frame 610. An upper end of the connecting frame 610 is fixedly connected to an outer wall of the cover 2. A lower end of the connecting frame 610 is fixedly connected with a fixing box 611. A right inner wall of the fixing box 611 is slidably connected with an outer wall of the pressure rod 608. A left side of the inner wall of the fixing box 611 is fixedly connected to an outer wall of the piezoelectric module 612. An outer wall of the sealing ring 613 is fixedly connected to an upper inner wall of the main pipe 1. An inner wall of the sealing ring 613 is fixedly connected with an electromagnet 614. A lower side of the sealing ring 613 is fixedly connected with a support frame 615. An upper surface of the support frame 615 is fixedly connected with a spring 616. An upper end of the spring 616 is fixedly connected to a lower surface of the sealing piece 617. A lower end of the sealing piece 617 is further fixedly connected with a second sliding rod 618. A lower end of the second sliding rod 618 penetrates through the support frame 615 and extends to the lower side of the support frame 615. An outer wall of the second sliding rod 618 contacts an inner wall of the support frame 615. An outer diameter of the sealing piece 617 is larger than an inner diameter of the sealing ring 613. Both the sealing piece 617 and the sealing ring 613 are made of rubber. The elastic rod 607 is made of elastic metal. The telescopic rod 606 can change in length. The elastic metal film 603 is made of elastic metal. The piezoelectric module 612 is electrically connected to the control module. An upper surface of the sealing piece 617 is fixedly connected with a metal piece 619. The metal piece 619 is made of metal; During the application process, if air flow backwash occurs, first, since the air flow pours into the main pipe 1 from the lower side of the main pipe 1 and into the interior of the main pipe 1, and the sealing ring 613 and the sealing piece 617 can cause resistance to the upward path of the air flow, the pressure inside the main pipe 1 will increase. The increase in the pressure inside the main pipe 1 will cause the sealing ring 613 to expand and deform outward, and then exert a force to the right on the ball 605 and the first slide bar 604. The rightward movement of the right end of the first slide bar 604 will drive the telescopic rod 606 to deflect, and then the lower side of the telescopic rod 606 will exert a force to the left on the elastic rod 607, and the lower end of the elastic rod 607 will push the pressure rod 608 to exert pressure on the piezoelectric module 612; After the pressure rod 608 exerts pressure on the piezoelectric module 612, the output voltage of the piezoelectric module 612 fluctuates. At this time, the control module detects the voltage fluctuation of the piezoelectric module 612, and the control module collects the voltage value of the piezoelectric module 612 in real time and analyzes the voltage change rate within a unit time to determine whether it meets the following conditions:

[0016] Among them, represents the voltage value at the current sampling moment, represents the voltage value at the previous sampling moment, is the sampling interval time, is the preset voltage change rate threshold; When this condition is met, it means that the output voltage of the piezoelectric module 612 increases beyond the threshold within a unit time. At this time, the electromagnet 614 will be activated through the control module, so that the electromagnet 614 adsorbs the metal piece 619, and then the sealing piece 617 seals the sealing ring 613, blocking the backwash air flow by the sealing ring 613 and the sealing piece 617, and preventing the inside of the vacuum gauge from being damaged by the impact of the backwash air flow; The outer wall of the main pipe 1 is fixedly connected with a first motor 620. The output end of the first motor 620 is fixedly connected with a rotating rod 621. One end of the rotating rod 621 penetrates through the main pipe 1 and extends to the interior of the main pipe 1. One side outer wall of the rotating rod 621 located inside the main pipe 1 is fixedly connected with a pressing block 622, and the pressing block 622 is located above the metal piece 619. The pressing block 622 is a horizontally placed triangular structure, and the length of the pressing block 622 in the left-right direction is greater than the distance between the outer wall of the rotating rod 621 and the upper surface of the metal piece 619. Both the first motor 620 and the electromagnet 614 are electrically connected to the control module. The connection point between the fixing frame 609 and the telescopic rod 606 is located at the lower side of the middle of the telescopic rod 606, and the torsion spring at the connection between the fixing frame 609 and the telescopic rod 606 can make the pressure rod 608 contact the piezoelectric module 612 when the elastic metal film 603 is in an undeformed state; After the control module detects that the output voltage of the piezoelectric module 612 exceeds the threshold value within a unit time, the first motor 620 is simultaneously started to drive the rotating rod 621 and the pressing block 622 to deflect. At this time, since the response speed of the electromagnet 614 is relatively faster than that of the metal sheet 619, the metal sheet 619 has moved downward at this time. At the initial stage of the rotation of the pressing block 622 and the rotating rod 621, they do not contact the metal sheet 619. Then the starting load of the first motor 620 is relatively low, enabling the first motor 620 to drive the pressing block 622 to deflect and press the metal sheet 619 more quickly. After the control module drives the pressing block 622 to deflect and contact the metal sheet 619 through the first motor 620, the electromagnet 614 is turned off, which can reduce the temperature rise of the main pipe 1 and the internal temperature of the vacuum gauge caused by the working heating of the electromagnet 614. At the same time, the upper side of the metal sheet 619 is extruded by the pressing block 622, so that the metal sheet 619 can withstand a larger air pressure during the subsequent air flow backwash, avoiding the sealing failure caused by the increase in the backwash air flow; The voltage reduction mechanism 7 includes a third fixed pipe 701, a fixing assembly, and a sealing block 704 that can move relative to the fixing assembly. The sealing block 704 can isolate the inside of the third fixed pipe 701 and the main pipe 1 into two sealed cavities. The left end of the third fixed pipe 701 is fixedly connected to the inner wall of the opening on the sealing cover 2. A retaining ring 709 is fixedly connected to the left side of the inner wall of the third fixed pipe 701. An elastic membrane 702 is fixedly connected to the right side of the inner wall of the third fixed pipe 701. An extension rod 703 is arranged inside the third fixed pipe 701. The right end of the extension rod 703 penetrates through the elastic membrane 702 and extends to the right side of the elastic membrane 702. The left end of the extension rod 703 is fixedly connected to the right side of the sealing block 704. A threaded cylinder 705 is fixedly connected to the right side of the extension rod 703. A fixed frame 706 is fixedly connected to the outer wall of the right side of the third fixed pipe 701. A second motor 707 is fixedly connected to the inner wall of the fixed frame 706. The output end of the second motor 707 is fixedly connected to a threaded rod 708. The outer wall of the threaded rod 708 is threadedly connected to the inner wall of the threaded cylinder 705. The left end of the third fixed pipe 701 is fixedly connected to the inner wall of the opening on the sealing cover 2. The elastic membrane 702 is a diaphragm structure with elasticity. The outer diameter of the sealing block 704 is larger than the inner diameter of the retaining ring 709. The second motor 707 is connected to the control module. When the sealing block 704 does not contact the retaining ring 709, the inside of the third fixed pipe 701 is communicated with the inside of the main pipe 1; During the application of the device, the control module is electrically connected to the vacuum gauge. When the internal air pressure in the main pipe 1 gradually decreases, every time it drops by a preset gradient, the control module drives the threaded rod 708 to rotate through the second motor 707. Then the threaded rod 708 drives the threaded barrel 705, the extension rod 703, and the sealing block 704 to move to the right, so that the inside of the third fixed pipe 701 communicates with the inside of the main pipe 1 to restore air pressure balance. Subsequently, the second motor 707 drives the threaded rod 708 to reverse, so that the sealing block 704 seals the retaining ring 709. When the air pressure drops to another gradient, the above process is repeated, making the air pressure drop rate inside the third fixed pipe 701 lag behind that inside the main pipe 1. When an air flow backflush occurs inside the main pipe 1, the internal air pressure in the main pipe 1 rises rapidly at this time. The closing mechanism 6 closes the upper side inside the main pipe 1. At the same time, the second motor 707 is started to drive the threaded rod 708 to rotate, so that the threaded barrel 705, the sealing block 704, and the extension rod 703 move to the right, and then the inside of the third fixed pipe 701 communicates with the inside of the main pipe 1. At this time, the air pressure inside the third fixed pipe 701 is lower than that inside the main pipe 1, and the extension rod 703 moves to the right to drive the elastic membrane 702 to deform to the right, so that the third fixed pipe 701 extracts the gas inside the main pipe 1, thereby slowing down the rising speed of the internal air pressure in the main pipe 1 and reducing the amount of gas escaping from the inside of the main pipe 1 into the vacuum gauge, reducing the risk of damage to the vacuum gauge; At the same time, when the elastic membrane 702 is driven by the extension rod 703 to deform to the right, the gas inside the main pipe 1 will be quickly extracted into the third fixed pipe 701, and the backflush air flow will be balanced in a short time. Then the escaped air flow on the upper side of the main pipe 1 is in a high-pressure area, and the upper-side air flow will be drawn back downward, making the air flow drive the metal sheet 619 to drop and close faster while reducing the possibility of continuous high pressure in the vacuum gauge area and reducing the probability of damage.

[0017] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0018] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An overpressure protection device for a vacuum gauge, comprising a main pipe (1) and a control module, characterized in that: On the right side of the main pipe (1) is fixedly connected with a cover (2). On the right side of the cover (2), there are three openings. On the inner wall of the upper opening on the right side of the cover (2) is fixedly connected with a first fixed pipe (3). On the upper side in the middle of the first fixed pipe (3) is provided with an exhaust port (4). On the inner wall of the first fixed pipe (3) is fixedly connected with a pressure valve (5). And in the two openings at the lower part on the right side of the cover (2) are respectively provided with a sealing mechanism (6) and a pressure reducing mechanism (7). The sealing mechanism (6) includes a connection assembly, a pressure rod (608), and a piezoelectric module (612). One end of the pressure rod (608) is in contact with the outer wall of the piezoelectric module (612). The pressure rod (608) can change the pressure on the piezoelectric module (612) according to the change of the internal air pressure in the main pipe (1). The sealing mechanism (6) further includes a sealing ring (613) and a sealing piece (617) above the sealing ring (613). The sealing piece (617) can descend to block the sealing ring (613). The pressure reducing mechanism (7) includes a third fixed pipe (701), a fixing assembly, and a sealing block (704) that can move relative to the fixing assembly. The sealing block (704) can isolate the third fixed pipe (701) and the inside of the main pipe (1) into two sealed cavities.

2. The overpressure protection device for a vacuum gauge according to claim 1, characterized in that: The connection assembly includes a second fixed pipe (601). The left end of the second fixed pipe (601) is fixedly connected with the inner wall of the opening on the cover (2). On the inner wall of the second fixed pipe (601) is fixedly connected with a sliding frame (602). On the left side of the inner wall of the sliding frame (602) is fixedly connected with an elastic metal film (603). In the middle of the inner wall of the sliding frame (602) is slidably connected with a first sliding rod (604). At the left end of the first sliding rod (604) is embedded with a ball (605). The outer wall of the ball (605) is in contact with the outer wall of the elastic metal film (603). The right end of the first sliding rod (604) is hinged with a telescopic rod (606). The lower end of the telescopic rod (606) is inserted with an elastic rod (607). The outer wall of the telescopic rod (606) is hinged with a fixing frame (609) through a torsion spring. The upper end of the fixing frame (609) is fixedly connected with the outer wall of the cover (2). The lower end of the elastic rod (607) is joined with the right end of the pressure rod (608). The connection assembly further includes a connection frame (610). The upper end of the connection frame (610) is fixedly connected with the outer wall of the cover (2). The lower end of the connection frame (610) is fixedly connected with a fixing box (611). The right inner wall of the fixing box (611) is slidably connected with the outer wall of the pressure rod (608). The left side of the inner wall of the fixing box (611) is fixedly connected with the outer wall of the piezoelectric module (612).

3. The overpressure protection device for a vacuum gauge according to claim 2, characterized in that: The outer wall of the sealing ring (613) is fixedly connected to the inner wall of the upper side of the main pipe (1). An electromagnet (614) is fixedly connected to the inner wall of the sealing ring (613). A support frame (615) is fixedly connected to the lower side of the sealing ring (613). A spring (616) is fixedly connected to the upper surface of the support frame (615). The upper end of the spring (616) is fixedly connected to the lower surface of the sealing piece (617). A second sliding rod (618) is also fixedly connected to the lower end of the sealing piece (617). The lower end of the second sliding rod (618) penetrates through the support frame (615) and extends to the lower side of the support frame (615). The outer wall of the second sliding rod (618) is in contact with the inner wall of the support frame (615). A metal sheet (619) is fixedly connected to the upper surface of the sealing piece (617). A first motor (620) is fixedly connected to the outer wall of the main pipe (1). The output end of the first motor (620) is fixedly connected to a rotating rod (621). One end of the rotating rod (621) penetrates through the main pipe (1) and extends into the interior of the main pipe (1). A pressing block (622) is fixedly connected to the outer wall of one side of the rotating rod (621) inside the main pipe (1).

4. The overpressure protection device for a vacuum gauge according to claim 3, characterized in that: The outer diameter of the sealing piece (617) is larger than the inner diameter of the sealing ring (613). Both the sealing piece (617) and the sealing ring (613) are made of rubber material. The metal sheet (619) is made of metal material. And the pressing block (622) is located above the metal sheet (619). The pressing block (622) is a horizontally placed triangular structure. And the length of the pressing block (622) in the left - right direction is greater than the distance between the outer wall of the rotating rod (621) and the upper surface of the metal sheet (619).

5. The overpressure protection device for a vacuum gauge according to claim 4, characterized in that: The elastic rod (607) is made of elastic metal material. The telescopic rod (606) can change in length. The elastic metal film (603) is made of elastic metal material. The piezoelectric module (612) is electrically connected to the control module. Both the first motor (620) and the electromagnet (614) are electrically connected to the control module.

6. The overpressure protection device for a vacuum gauge according to claim 5, characterized in that: The connection point of the fixed frame (609) and the telescopic rod (606) is located at the lower side of the middle part of the telescopic rod (606). And when the elastic metal film (603) is in the undeformed state, the torsion spring at the connection of the fixed frame (609) and the telescopic rod (606) can make the pressing rod (608) contact with the piezoelectric module (612).

7. The overpressure protection device for a vacuum gauge according to claim 6, characterized in that: The left end of the third fixed pipe (701) is fixedly connected to the inner wall of the opening on the cover (2). A retaining ring (709) is fixedly connected to the left side of the inner wall of the third fixed pipe (701). An elastic membrane (702) is fixedly connected to the right side of the inner wall of the third fixed pipe (701). An extension rod (703) is arranged inside the third fixed pipe (701). The right end of the extension rod (703) penetrates through the elastic membrane (702) and extends to the right side of the elastic membrane (702). The left end of the extension rod (703) is fixedly connected to the right side of a sealing block (704). A threaded cylinder (705) is fixedly connected to the right side of the extension rod (703). A fixed frame (706) is fixedly connected to the right side of the outer wall of the third fixed pipe (701). A second motor (707) is fixedly connected to the inner wall of the fixed frame (706). A threaded rod (708) is fixedly connected to the output end of the second motor (707). The outer wall of the threaded rod (708) is threadedly connected to the inner wall of the threaded cylinder (705). The left end of the third fixed pipe (701) is fixedly connected to the inner wall of the opening on the cover (2).

8. The overpressure protection device for a vacuum gauge according to claim 7, characterized in that: The elastic membrane (702) is a diaphragm structure with elasticity. The outer diameter of the sealing block (704) is larger than the inner diameter of the retaining ring (709). The second motor (707) is connected to the control module. When the sealing block (704) does not contact the retaining ring (709), the inside of the third fixed pipe (701) is communicated with the inside of the main pipe (1).

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