Rotating disc type scanning confocal system of special etching process photoetching rotating disc design

Abstract

The invention discloses a rotating disc type scanning confocal system of a special etching process photoetching rotating disc design. A laser light source assembly, a micro-lens array dodging assembly, an excitation color filter switching assembly, a dichroscope switching assembly, a field diaphragm assembly, a high-speed turntable pin assembly, a fluorescence channel light splitting assembly, a relay system assembly and a ten-bit color filter rotating wheel assembly are innovatively designed, and particularly, the etching process of the high-speed turntable pin assembly is adopted. The problems that a traditional confocal microscope is high in phototoxicity, low in collection efficiency and incapable of imaging living cells are solved, and the defects in the prior art are overcome.

Description

Technical Field

[0001] The present application relates to optical microscopy technology, specifically the field of biomedical imaging technology, and particularly to a turntable scanning confocal microscope with a special etching process photolithography turntable design. Background Art

[0002] Confocal Laser Scanning Microscopy (CLSM), as a high-resolution optical imaging technique, has been widely used in multiple research fields, including cell biology, neuroscience, and materials science. This technique effectively removes out-of-focus signals through spatial pinholes, significantly improving image contrast and three-dimensional imaging capabilities. It is particularly suitable for high-resolution imaging of fluorescently stained samples. However, due to its use of a point scanning method for image acquisition, the scanning speed is relatively slow, making it difficult to meet the requirements of dynamic imaging with high temporal resolution. In addition, to achieve sufficient signal intensity, CLSM requires the use of high-power laser excitation, which may cause phototoxicity to living samples and lead to rapid photobleaching of fluorescent molecules, thereby limiting its application in long-term, living cell observation. In addition, the high cost of equipment, complex system maintenance, and the professional requirements for operators have also, to a certain extent, restricted the popularity and widespread application of this technology.

[0003] In summary, although confocal microscopy technology occupies an important position in the field of modern microscopic imaging, its limitations in scanning speed, imaging depth, phototoxicity control and spatial resolution have prompted related fields to continuously explore higher-performance imaging methods.

[0004] Application Contents

[0005] This application aims to overcome the shortcomings of traditional confocal microscopy, such as high phototoxicity and slow scanning speed, and proposes a turntable scanning confocal system with a special etching process and photolithography turntable design. The specific technical solutions and features are as follows:

[0006] A turntable scanning confocal system with a special etching process photolithography turntable design includes a laser light source component, a microlens array homogenization component, an excitation filter switching component, a dichroic mirror switching component, a field of view aperture component, a high-speed turntable pinhoel component, a fluorescence channel spectrometer component, a relay system component, and a ten-position filter wheel component. The laser light source component includes a beam shaping and collimating component and a shutter laser safety component. The beam shaping and collimating component includes an SMA fiber connector (1), a collimating lens (2), a collimating lens barrel (3), and a pressure ring (4). One end of the SMA fiber connector (1) is connected to the laser light source, and the other end is connected to the collimating lens barrel (3). The collimating lens (2) is installed on the collimating lens barrel (3) through the pressure ring (4). The shutter laser safety component includes a shutter bracket (5), a micro motor (6) and a baffle (7). One end of the shutter bracket (5) is fixed to the SMA optical fiber connector (1), and the other end is connected to the micro motor (6). The baffle (7) is installed on the motor shaft of the micro motor (6). The baffle is switched back and forth by the motor drive to achieve the laser safety function. The micro lens array light homogenization component includes a first micro lens array (8), a double micro lens base (9) and a second micro lens array (10). The first micro lens array (8) and the second micro lens array (10) are respectively installed on the two ends of the double micro lens base (9) to form a micro lens light homogenization component. The parallel light beam is homogenized from left to right through the double micro lens to achieve the effect of homogenizing the Gaussian distribution collimated light spot, thereby greatly improving the uniformity of the camera field of view. The excitation filter switching assembly comprises a stepping motor (11), an excitation filter (12) and a filter base (13); the stepping motor (11) is connected to the filter base (13) via a motor shaft; the excitation filter (12) is installed in the filter base (13); the stepping motor (11) drives the excitation filter (12) to realize two-position switching, thereby achieving the purpose of re-filtering the laser wavelength into a narrowband band, and being compatible with more light sources with different wavelengths. The dichroic mirror switching assembly comprises a first DC motor (14), a first gear (15), a first rack (16), a dichroic mirror adjustment base (17), a dichroic mirror seat (18) and a first dichroic mirror (19), wherein the first dichroic mirror (19) is mounted on the dichroic mirror seat (18), and the dichroic mirror seat (18) is fixed on the dichroic mirror adjustment base (17). The first DC motor (14) drives the dichroic mirror adjustment base (17) to switch between two positions of the dichroic mirror through the first gear (15) and the first rack (16) as gear transmission, thereby meeting the requirements of multi-laser wavelength compatibility and anti-laser fluorescence, thereby achieving a high-speed two-position switching of 70ms.The field aperture assembly comprises a first aperture piece (20), a second aperture piece (21), a second gear (22) and a second DC motor (23). The first aperture piece (20) and the second aperture piece (21) are connected to each other by a rack and a second gear (22). The second DC motor (23) drives the second gear (22) to rotate, thereby driving the first aperture piece (20) and the second aperture piece (21) to move synchronously, thereby achieving the effect of controlling the aperture size at any time, thereby controlling the field of view size. The high-speed turntable pinhoel assembly comprises a third DC motor (24), a photolithography turntable (25), a screw motor (26), a guide rail (27) and a turntable assembly housing (28). The third DC motor (24), the photolithography turntable (25), the screw motor (26) and the guide rail (27) are all installed inside the turntable assembly housing (28). The photolithography turntable (25) is installed on the motor shaft of the third DC motor (24). The third DC motor (24) drives the photolithography turntable (25) to rotate at high speed. The third DC motor (24) is installed on the guide rail (27). The screw motor (26) drives the guide rail (27) to realize switching between two positions (wide field and confocal mode). The design adopts dual motor drive, a two-phase stepping motor for screw transmission, and realizes the translation of the turntable at two positions. The DC motor realizes the high-speed rotation of the turntable. A photoelectric switch is designed to monitor the speed of the turntable. The fluorescence channel light splitting component includes a second dichroic mirror (29), a mirror base (30), a dichroic mirror base (31), a fourth DC motor (32) and a second rack (33). The second dichroic mirror (29) is mounted on the mirror base (30), and the mirror base (30) is mounted on the dichroic mirror base (31). The dichroic mirror base (31) is meshed with the second rack (33). The fourth DC motor (32) and the second rack (33) are driven by a gear rack to drive the entire module to switch between three stations, distributing more fluorescence of different wavelengths to different cameras for collection, thereby improving collection efficiency, greatly shortening experimental time, and reducing laser light toxicity. The relay system component includes a relay lens (34) and a relay bracket (35), which can relay the position of the phase plane to the camera target surface at the farthest point, ensuring more design space. The ten-digit color filter wheel assembly comprises a color filter wheel (36), a color filter (37) and a fifth DC motor (38); the color filter (37) is mounted on the color filter wheel (36) via a pressure ring; the color filter wheel (36) is mounted on the fifth DC motor (38); and the fifth DC motor (38) drives the color filter (37) to rotate at high speed.

[0007] Furthermore, the connection between the shutter bracket (5) and the SMA optical fiber connector (1) is a detachable structure.

[0008] Furthermore, the diameter of the filter that can be loaded by the excitation filter switching assembly is The two-position switching angle range is 0° to 50°.

[0009] Furthermore, the gear rack transmission stroke range of the dichroic mirror switching assembly is 0-100mm.

[0010] Furthermore, the field of view size that can be controlled by the field stop assembly ranges from 1mm×1mm to 15mm×15mm.

[0011] Furthermore, the photolithography turntable (25) of the high-speed turntable pinhoel assembly adopts quartz glass as a substrate, and a high-transmittance film is plated on a circular section on one side, and an opaque film is plated on a circular section on the other side. Then, a soda mask is made according to a design pattern of the turntable to etch the opaque film to form a translucent pattern.

[0012] Furthermore, the coating layer of the photolithography turntable (25) of the high-speed turntable pinhoel component is three layers in total, the first layer of high light-transmittance film is a single-sided magnesium fluoride transparent film, the second layer of opaque film is a chromium metal layer, and the third layer is a silicon dioxide protective layer, and the thickness can be selected from 100nm to 200nm.

[0013] Furthermore, the photolithography turntable (25) of the high-speed turntable pinhoel assembly adopts an Archimedean spiral distribution hole design, and the turntable array hole size D is based on an empirical value at 2 times the Airy disk size, and is optimized for a 100×NA 1.49 oil immersion objective lens: 0.61×532 / 1.49×2×100=43.6um, and the optional value D 100 =45μm-50μm; optimized for 60×NA 1.46 objective lens: 0.61×532 / 1.46×2×60=26.7um, optional value D 60 =30μm-35μm.

[0014] Furthermore, the fluorescence channel spectrometer has three working conditions, wherein the working condition 1 is wide field shooting, the working condition 2 is D 60 =30μm-35μm shooting, working condition three is D 100 =45μm-50μm shooting.

[0015] Furthermore, the single switching angle of the ten-bit color filter wheel assembly is no more than 60°, and the single switching time is 0-60ms.

[0016] In summary, this application solves the problems of high phototoxicity, low acquisition efficiency, and inability to perform live cell imaging in traditional confocal microscopes through innovative designs of the laser light source assembly, microlens array homogenization assembly, excitation filter switching assembly, dichroic mirror switching assembly, field aperture assembly, high-speed turntable Pinhoel assembly, fluorescence channel spectrometer assembly, relay system assembly, and ten-position filter wheel assembly, especially the etching process of the high-speed turntable Pinhoel assembly, thereby overcoming the shortcomings of the prior art. The turntable scanning confocal system with a special etching process photolithography turntable design proposed in this application has many significant advantages and positive effects, and the beneficial effects achieved are as follows:

[0017] 1. Greatly improved image acquisition efficiency.

[0018] 2. Significantly reduce sample phototoxicity to ensure live cell imaging.

[0019] 3. The special turntable pattern design can remove the out-of-focus background and improve the resolution of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of the laser light source assembly of this application;

[0021] Figure 2 This is a schematic diagram of the structure of the microlens array light uniformity component of this application;

[0022] Figure 3 This is a schematic diagram of the structure of the excitation filter switching component of this application;

[0023] Figure 4 This is a schematic diagram of the structure of the dichroic mirror switching component of this application;

[0024] Figure 5 This is a schematic diagram of the structure of the field stop assembly of this application;

[0025] Figure 6 This is a schematic diagram of the high-speed turntable pinhoel component structure of this application;

[0026] Figure 7 Schematic diagram of the high-speed turntable for this application;

[0027] Figure 8 This is a schematic diagram of the structure of the fluorescence channel spectrometer component of this application;

[0028] Figure 9 This is a schematic diagram of the relay system components for this application;

[0029] Figure 10 This is a schematic diagram of the structure of the ten-bit color filter wheel assembly of this application;

[0030] Figure 11This is a schematic diagram of the principle of this application;

[0031] Figure 12 This is a schematic diagram of the excitation light path and turntable module assembly for this application;

[0032] Figure 13 This is a schematic diagram of the detection optical path assembly for this application;

[0033] Figure: 1. SMA fiber connector; 2. Collimating lens; 3. Collimating lens barrel; 4. Pressure ring; 5. Shutter bracket; 6. Micromotor; 7. Baffle; 8. First microlens array; 9. Dual microlens mount; 10. Second microlens array; 11. Stepper motor; 12. Excitation filter; 13. Filter base; 14. First DC motor; 15. First gear; 16. First rack; 17. Dichroic mirror adjustment base; 18. Dichroic mirror mount; 19. First dichroic mirror; 20. First aperture plate; 21. Second aperture plate; 22. Second gear; 23. Second DC motor; 24. Third DC motor; 25. Photolithography turntable; 26. Lead screw motor; 27. Guide rail; 28. Turntable assembly housing; 29. Second dichroic mirror; 30. Mirror holder; 31. Dichroic mirror base; 32. Fourth DC motor; 33. Second rack; 34. Relay lens; 35. Relay bracket; 36. Color filter wheel; 37. Color filter; 38. Fifth DC motor; 39. Excitation light path; 40. Turntable assembly; 41. Detection light path. DETAILED DESCRIPTION

[0034] The term "embodiment" is used herein specifically to describe any embodiment as "exemplary," and should not be construed as superior or preferable to other embodiments. Performance indicators in the embodiments of this application were tested using conventional testing methods in the art, unless otherwise specified. It should be understood that the terms used in this application are intended solely to describe specific implementations and are not intended to limit the disclosure herein.

[0035] Unless otherwise specified, the technical and scientific terms used herein have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs; other experimental methods and technical means not specifically specified in this application refer to experimental methods and technical means commonly used by ordinary technicians in this field.

[0036] As used herein, the terms "substantially" and "approximately" are used to describe small fluctuations. For example, they can refer to less than or equal to ±5%, such as less than or equal to ±2%, such as less than or equal to ±1%, such as less than or equal to ±0.5%, such as less than or equal to ±0.2%, such as less than or equal to ±0.1%, such as less than or equal to ±0.05%. Numerical data expressed or presented in range format herein are used for convenience and brevity only and should therefore be interpreted flexibly to include not only the values explicitly listed as the limits of the range, but also all independent values or subranges contained within the range. For example, a numerical range of "1-5%" should be interpreted to include not only the explicitly listed values of 1% to 5%, but also the independent values and subranges within the indicated range. Thus, included in this numerical range are independent values such as 2%, 3.5%, and 4%, and subranges such as 1% to 3%, 2% to 4%, and 3% to 5%, etc. This principle also applies to ranges that only list a single value. Furthermore, this interpretation applies regardless of the width of the range or the characteristics described.

[0037] Throughout this document, including in the claims, transitional terms such as "comprises," "includes," "with," "having," "contains," "involving," and "accommodating" are understood to be open-ended, meaning "including but not limited to." Only the transitional terms "consisting of" and "composed of" are closed transitional terms.

[0038] In order to better illustrate the content of this application, numerous specific details are provided in the specific examples below. It should be understood by those skilled in the art that this application can be implemented without certain specific details. In the examples, some methods, means, instruments, equipment, etc. well known to those skilled in the art are not described in detail in order to highlight the main purpose of this application.

[0039] Under the premise of no conflict, the technical features disclosed in the embodiments of the present application can be arbitrarily combined, and the resulting technical solutions belong to the contents disclosed in the embodiments of the present application. It should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like mentioned in this application indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the technical features and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application, unless it conflicts with the context. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance, unless it conflicts with the context.

[0040] The specific implementation methods of the present application are described below to facilitate understanding of the present application by those skilled in the art. However, it should be clear that the present application is not limited to the scope of the specific implementation methods. For those skilled in the art in the present technology, as long as various changes are within the spirit and scope of the present application as defined and determined by the attached claims, these changes are obvious, and all application creations based on the concept of the present application are protected.

[0041] See also Figures 1 to 10This embodiment provides a turntable scanning confocal system with a special etching process photolithography turntable design, including a laser light source component, a microlens array homogenization component, an excitation filter switching component, a dichroic mirror switching component, a field of view aperture component, a high-speed turntable pinhoel component, a fluorescence channel spectrometer component, a relay system component, and a ten-position filter wheel component. The laser light source component includes a beam shaping and collimating component and a shutter laser safety component. The beam shaping and collimating component includes an SMA fiber connector (1), a collimating lens (2), a collimating lens barrel (3) and a pressure ring (4). One end of the SMA fiber connector (1) is connected to the laser light source, and the other end is connected to the collimating lens barrel (3). The collimating lens (2) is installed on the collimating lens barrel (3) through the pressure ring (4). The shutter laser safety component includes a shutter bracket (5), a micro motor (6) and a baffle (7). One end of the shutter bracket (5) is fixed to the SMA optical fiber connector (1), and the other end is connected to the micro motor (6). The baffle (7) is installed on the motor shaft of the micro motor (6). The baffle is switched back and forth by the motor drive to achieve the laser safety function. The micro lens array light homogenization component includes a first micro lens array (8), a double micro lens base (9) and a second micro lens array (10). The first micro lens array (8) and the second micro lens array (10) are respectively installed on the two ends of the double micro lens base (9) to form a micro lens light homogenization component. The parallel light beam is homogenized from left to right through the double micro lens to achieve the effect of homogenizing the Gaussian distribution collimated light spot, thereby greatly improving the uniformity of the camera field of view. The excitation filter switching assembly comprises a stepping motor (11), an excitation filter (12) and a filter base (13); the stepping motor (11) is connected to the filter base (13) via a motor shaft; the excitation filter (12) is installed in the filter base (13); the stepping motor (11) drives the excitation filter (12) to realize two-position switching, thereby achieving the purpose of re-filtering the laser wavelength into a narrowband band, and being compatible with more light sources with different wavelengths. The dichroic mirror switching assembly comprises a first DC motor (14), a first gear (15), a first rack (16), a dichroic mirror adjustment base (17), a dichroic mirror seat (18) and a first dichroic mirror (19), wherein the first dichroic mirror (19) is mounted on the dichroic mirror seat (18), and the dichroic mirror seat (18) is fixed on the dichroic mirror adjustment base (17). The first DC motor (14) drives the dichroic mirror adjustment base (17) to switch between two positions of the dichroic mirror through the first gear (15) and the first rack (16) as gear transmission, thereby meeting the requirements of multi-laser wavelength compatibility and anti-laser fluorescence, thereby achieving a high-speed two-position switching of 70ms.The field aperture assembly comprises a first aperture piece (20), a second aperture piece (21), a second gear (22) and a second DC motor (23). The first aperture piece (20) and the second aperture piece (21) are connected to each other by a rack and a second gear (22). The second DC motor (23) drives the second gear (22) to rotate, thereby driving the first aperture piece (20) and the second aperture piece (21) to move synchronously, thereby achieving the effect of controlling the aperture size at any time, thereby controlling the field of view size. The high-speed turntable pinhoel assembly comprises a third DC motor (24), a photolithography turntable (25), a screw motor (26), a guide rail (27) and a turntable assembly housing (28). The third DC motor (24), the photolithography turntable (25), the screw motor (26) and the guide rail (27) are all installed inside the turntable assembly housing (28). The photolithography turntable (25) is installed on the motor shaft of the third DC motor (24). The third DC motor (24) drives the photolithography turntable (25) to rotate at high speed. The third DC motor (24) is installed on the guide rail (27). The screw motor (26) drives the guide rail (27) to realize switching between two positions (wide field and confocal mode). The design adopts dual motor drive, a two-phase stepping motor for screw transmission, and realizes the translation of the turntable at two positions. The DC motor realizes the high-speed rotation of the turntable. A photoelectric switch is designed to monitor the speed of the turntable. The fluorescence channel light splitting component includes a second dichroic mirror (29), a mirror base (30), a dichroic mirror base (31), a fourth DC motor (32) and a second rack (33). The second dichroic mirror (29) is mounted on the mirror base (30), and the mirror base (30) is mounted on the dichroic mirror base (31). The dichroic mirror base (31) is meshed with the second rack (33). The fourth DC motor (32) and the second rack (33) are driven by a gear rack to drive the entire module to switch between three stations, distributing more fluorescence of different wavelengths to different cameras for collection, thereby improving collection efficiency, greatly shortening experimental time, and reducing laser light toxicity. The relay system component includes a relay lens (34) and a relay bracket (35), which can relay the position of the phase plane to the camera target surface at the farthest point, ensuring more design space. The ten-digit color filter wheel assembly comprises a color filter wheel (36), a color filter (37) and a fifth DC motor (38); the color filter (37) is mounted on the color filter wheel (36) via a pressure ring; the color filter wheel (36) is mounted on the fifth DC motor (38); and the fifth DC motor (38) drives the color filter (37) to rotate at high speed.

[0042] Example 1

[0043] See also Figures 11 to 13In order to realize the turntable scanning confocal system of a special etching process photolithography turntable design proposed in this application, this application provides an embodiment, and the specific implementation method is as follows: First, the system is mainly divided into three parts: an excitation light path (39), a turntable assembly (40), and a detection light path (41). The laser is connected to the excitation light path (39) system through an SMA optical fiber connector (1), collimated by a lens, uniformed by a microlens array, relayed by two sets of lenses, and finally reflected to the turntable surface by a dichroic mirror, forming a square light spot of about 20*20mm. After being relayed by the tube lens objective of the microscope, a uniform light spot is finally formed and irradiated on the sample plane; forming the excitation light path (39) system. The turntable assembly (40) is the core component of the confocal system, and is installed with the photolithography turntable (25). The special pattern distribution design and high-speed rotation, multi-point synchronous scanning ensure that the exposure time of different positions on the sample plane is consistent. The special pinhole size design removes stray light outside the focal plane and only ensures that the light at the focal plane position passes, achieving the function of confocal removal of defocused background. Multi-point scanning and high-speed rotation of the turntable greatly shorten the exposure time, reduce the sample's phototoxicity, and achieve live cell imaging. After the excitation light path (39) is irradiated on the sample, it excites the fluorescent-labeled sample to generate fluorescence. The detection light path (41) collects the fluorescence, which is incident on the intermediate image plane through the tube lens, and then passes through the relay system component and is finally relayed to the camera target surface using two lenses to form a fluorescence image acquisition. A fluorescence dichroic mirror is installed between the two lenses to achieve the function of dual-camera synchronous acquisition, further improving acquisition efficiency.

[0044] In summary, this application solves the problems of high phototoxicity, low acquisition efficiency, and inability to perform live cell imaging in traditional confocal microscopes through innovative designs of the laser light source assembly, microlens array homogenization assembly, excitation filter switching assembly, dichroic mirror switching assembly, field stop assembly, high-speed turntable Pinhoel assembly, fluorescence channel spectrometer assembly, relay system assembly, and ten-position filter wheel assembly, particularly the etching process of the high-speed turntable Pinhoel assembly, thus overcoming the shortcomings of the prior art. This application achieves the beneficial effects of greatly improving image acquisition efficiency, significantly reducing sample phototoxicity, ensuring live cell imaging, and achieving the function of removing out-of-focus background and improving the resolution of the system through the unique turntable pattern design.

[0045] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

[0046] The technical solutions disclosed in this application and the technical details disclosed in the embodiments are merely illustrative of the application concept of this application and do not constitute a limitation on the technical solutions of this application. Any conventional changes, replacements or combinations of the technical details disclosed in the embodiments of this application have the same application concept as this application and are within the scope of protection of the claims of this application.

Claims

1. A turntable scanning confocal system with a special etching process photolithography turntable design, comprising a laser light source assembly, a microlens array homogenization assembly, an excitation filter switching assembly, a dichroic mirror switching assembly, a field of view aperture assembly, a high-speed turntable pinhoel assembly, a fluorescence channel spectrometer assembly, a relay system assembly, and a ten-position filter wheel assembly. The laser light source assembly comprises a beam shaping and collimating assembly and a shutter laser safety assembly, the beam shaping and collimating assembly comprises an SMA fiber connector (1), a collimating lens (2), a collimating lens barrel (3), and a pressure ring (4), one end of the SMA fiber connector (1) is connected to the laser light source, and the other end is connected to the collimating lens barrel (3), and the collimating lens (2) is mounted on the collimating lens barrel (3) through the pressure ring (4). The shutter laser safety component includes a shutter bracket (5), a micro motor (6) and a baffle (7). One end of the shutter bracket (5) is fixed to the SMA optical fiber connector (1), and the other end is connected to the micro motor (6). The baffle (7) is installed on the motor shaft of the micro motor (6). The micro lens array light homogenization component includes a first micro lens array (8), a double micro lens base (9) and a second micro lens array (10). The first micro lens array (8) and the second micro lens array (10) are respectively installed on the two ends of the double micro lens base (9). The excitation filter switching component includes a stepper motor (11), an excitation filter (12) and a filter base (13). The stepper motor (11) is connected to the filter base (13) through the motor shaft. The excitation filter (12) is installed in the filter base (13). The stepper motor (11) drives the excitation filter (12) to achieve two-position switching. The dichroic mirror switching assembly comprises a first DC motor (14), a first gear (15), a first rack (16), a dichroic mirror adjustment base (17), a dichroic mirror seat (18) and a first dichroic mirror (19), wherein the first dichroic mirror (19) is mounted on the dichroic mirror seat (18), and the dichroic mirror seat (18) is fixed on the dichroic mirror adjustment base (17). The first DC motor (14) drives the dichroic mirror adjustment base (17) to switch between two working positions of the dichroic mirror through a first gear (15) and a first rack (16) as a gear transmission. The field aperture assembly comprises a first aperture piece (20), a second aperture piece (21), a second gear (22) and a second DC motor (23); the first aperture piece (20) and the second aperture piece (21) are connected to each other by a rack and a second gear (22); the second DC motor (23) drives the second gear (22) to rotate, thereby driving the first aperture piece (20) and the second aperture piece (21) to move synchronously.The high-speed turntable pinhoel assembly comprises a third DC motor (24), a photolithography turntable (25), a lead screw motor (26), a guide rail (27) and a turntable assembly housing (28). The third DC motor (24), the photolithography turntable (25), the lead screw motor (26) and the guide rail (27) are all installed inside the turntable assembly housing (28). The photolithography turntable (25) is installed on the motor shaft of the third DC motor (24). The third DC motor (24) drives the photolithography turntable (25) to rotate at high speed. The third DC motor (24) is installed on the guide rail (27). The lead screw motor (26) drives the guide rail (27) to realize the switching between two positions (wide field and confocal mode). The fluorescent channel light splitting component includes a second dichroic mirror (29), a mirror base (30), a dichroic mirror base (31), a fourth DC motor (32) and a second rack (33). The second dichroic mirror (29) is mounted on the mirror base (30), and the mirror base (30) is mounted on the dichroic mirror base (31). The dichroic mirror base (31) is meshed with the second rack (33). The fourth DC motor (32) and the second rack (33) are driven by a gear rack to drive the entire module to switch between three workstations. The relay system component includes a relay lens (34) and a relay bracket (35). The ten-digit color filter wheel assembly comprises a color filter wheel (36), a color filter (37) and a fifth DC motor (38); the color filter (37) is mounted on the color filter wheel (36) via a pressure ring; the color filter wheel (36) is mounted on the fifth DC motor (38); and the fifth DC motor (38) drives the color filter (37) to rotate at high speed.

2. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The connection between the shutter bracket (5) and the SMA optical fiber connector (1) is a detachable structure.

3. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The diameter of the filter that can be loaded by the excitation filter switching assembly is The two-position switching angle range is 0° to 50°.

4. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The gear rack transmission travel range of the dichroic mirror switching assembly is 0-100mm.

5. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The field of view size that can be controlled by the field aperture assembly ranges from 1mm×1mm to 15mm×15mm.

6. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The photolithography turntable (25) of the high-speed turntable pinhoel assembly adopts quartz glass as a substrate, and a high-transmittance film is plated on a circular section on one side, and an opaque film is plated on a circular section on the other side. A soda mask is made according to a design pattern of the turntable to etch the opaque film to form a translucent pattern.

7. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1 or 6, characterized in that: The coating layer of the photolithography turntable (25) of the high-speed turntable pinhoel component is three layers in total. The first layer of high light-transmittance film is a single-sided magnesium fluoride transparent film, the second layer of opaque film is a chromium metal layer, and the third layer is a silicon dioxide protective layer, and the thickness can be selected from 100nm to 200nm.

8. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, 6 or 7, characterized in that: The photolithography turntable (25) of the high-speed turntable pinhoel assembly adopts an Archimedean spiral distribution hole design, and the turntable array hole size D is twice the Airy disk size, which is optimized for a 100×NA 1.49 oil immersion objective lens: 0.61×532 / 1.49×2×100=43.6um, optional value D 100 =45μm-50μm; optimized for 60×NA 1.46 objective lens: 0.61×532 / 1.46×2×60=26.7um, optional value D 60 =30μm-35μm.

9. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The fluorescence channel spectrometer has three working conditions, wherein the first working condition is wide field shooting, the second working condition is D 60 =30μm-35μm shooting, working condition three is D 100 =45μm-50μm shooting.

10. The rotating disk scanning confocal system with a special etching process photolithography rotating disk design according to claim 1, characterized in that: The single switching angle of the ten-position filter wheel assembly is no more than 60°, and the single switching time is 0-60ms.

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