A high acceleration displacement device

Abstract

The application provides a high-acceleration displacement device, and relates to the technical field of motion devices. The high-acceleration displacement device comprises a support table, a first direction motion mechanism arranged on the support table, a second direction motion mechanism arranged on the support table and a driven component. The first direction motion mechanism comprises a first direction frame structure, and the second direction motion mechanism comprises a second direction frame structure. The first direction frame structure and the second direction frame structure are crossed in a third direction to form a driven space, the driven component is arranged in the driven space, and the second direction motion mechanism is arranged above the first direction frame structure along the third direction. The first direction frame structure drives the driven component to move in a first direction, and the second direction frame structure drives the driven component to move in a second direction. An observation hole is arranged on the support table and penetrates through in the third direction, and a projection of the observation hole in the third direction at least partially covers the driven space.

Description

Technical Field

[0001] This specification relates to the technical field of motion devices, and in particular to a high-acceleration displacement device. Background Art

[0002] The two-dimensional motion device may include a first-direction motion mechanism and a second-direction motion mechanism. The second-direction motion mechanism may be used to drive the driven component to move in the second direction, and the first-direction motion mechanism may be used to drive the second-direction motion mechanism and the driven component as a whole to move in the first direction, thereby realizing the two-dimensional motion of the driven component. The two-dimensional motion device may also include a support platform for assembling the first-direction motion mechanism and the second-direction motion mechanism. With the development of semiconductor technology and the advancement of process technology, it is necessary to observe and study the driven component from both above and below at the same time in the early research and development and testing stages. However, the support platform, first-direction motion mechanism and / or second-direction motion mechanism of the conventional stacked two-dimensional motion device will hinder the observation from below the driven component. Summary of the Invention

[0003] One or more embodiments of the present specification provide a high-acceleration displacement device, comprising: a support platform, a first-direction movement mechanism provided on the support platform, a second-direction movement mechanism provided on the support platform, and a driven component; the first-direction movement mechanism includes a first-direction frame structure capable of moving along a first direction, and the second-direction movement mechanism includes a second-direction frame structure capable of moving along a second direction; the first-direction frame structure and the second-direction frame structure intersect in a third direction to form a driven space, and the driven component is provided in the driven space, wherein the third direction is perpendicular to the first direction and the second direction, and the second-direction movement mechanism is provided above the first-direction frame structure along the third direction; the first-direction frame structure drives the driven component to move along the first direction, and the second-direction frame structure drives the driven component to move along the second direction; an observation hole is provided on the support platform that is arranged to pass through the third direction, and the projection of the observation hole in the third direction at least partially covers the driven space.

[0004] In some embodiments, the first-direction movement mechanism includes a first mechanical guide device, which is arranged on the first-direction frame structure and extends in the second direction, and the driven component is connected to the slider of the first mechanical guide device so that the driven component can move along the second direction within the first-direction frame structure; the second-direction movement mechanism includes a second mechanical guide device, which is arranged on the second-direction frame structure and extends in the first direction, and the driven component is connected to the slider of the second mechanical guide device so that the driven component can move along the first direction within the second-direction frame structure.

[0005] In some embodiments, the driven member and the slider of the first mechanical guide device, or the driven member and the slider of the second mechanical guide device are connected by a flexible connector; the flexible connector is configured as follows: the flexible connector has rigidity along the first direction and the second direction, and has flexibility along the third direction.

[0006] In some embodiments, the flexible connector includes: a first fixing portion fixedly connected to the driven member, a second fixing portion directly or indirectly fixedly connected to the first direction frame structure or the second direction frame structure, and a flexible spring connecting the first fixing portion and the second fixing portion.

[0007] In some embodiments, the flexible connector includes: a first fixed portion fixedly connected to the driven member, a second fixed portion directly or indirectly fixedly connected to the slider of the first mechanical guide device on the first direction frame structure or the slider of the second mechanical guide device on the second direction frame structure, and a flexible spring connecting the first fixed portion and the second fixed portion.

[0008] In some embodiments, one or more first limiting portions are provided on the first fixing portion, and one or more second limiting portions are provided on the second fixing portion, and the first limiting portions cooperate with the second limiting portions to limit the displacement of the first fixing portion and the second fixing portion in the third direction.

[0009] In some embodiments, the high-acceleration displacement device further includes: a first balancing mass block, a first driving device, a second balancing mass block and a second driving device; the first driving device is arranged on the first balancing mass block, driving the first direction frame structure to move relative to the first balancing mass block along the first direction, and the first balancing mass block is configured to be able to move along the first direction relative to the support platform when the first driving device is working; the second driving device is arranged on the second balancing mass block, driving the second direction frame structure to move relative to the second balancing mass block along the second direction, and the second balancing mass block is configured to be able to move along the second direction relative to the support platform when the second driving device is working; the first balancing mass block and the second balancing mass block are both arranged on the support platform.

[0010] In some embodiments, the high acceleration displacement device also includes: a first balancing mass block zeroing device and / or a second balancing mass block zeroing device; the first balancing mass block zeroing device is used to drive the first balancing mass block to move along the first direction to be in a first zero position preset relative to the support platform; the second balancing mass block zeroing device is used to drive the second balancing mass block to move along the second direction to be in a second zero position preset relative to the support platform.

[0011] In some embodiments, the high-acceleration displacement device also includes: a first measuring device in the first direction and a first measuring device in the second direction; the first measuring device in the first direction is used to measure the position of the first-direction frame structure relative to the support platform in the first direction, and the first measuring device in the second direction is used to measure the position of the second-direction frame structure relative to the support platform in the second direction.

[0012] In some embodiments, the high acceleration displacement device further includes: a first direction second measuring device and a second direction second measuring device; the first direction second measuring device is used to measure the position of the first direction frame structure relative to the first balance mass block in the first direction, and the second direction second measuring device is used to measure the position of the second direction frame structure relative to the second balance mass block in the second direction.

[0013] In some embodiments, the high acceleration displacement device also includes: a first direction balancing mass measuring device and a second direction balancing mass measuring device; the first direction balancing mass measuring device is used to measure the position of the first balancing mass block relative to the support platform in the first direction, and the second direction balancing mass measuring device is used to measure the position of the second balancing mass block relative to the support platform in the second direction.

[0014] In some embodiments, the driven component is suspended relative to the support platform; or, the driven component is set on the support platform, and a flexible connector is provided between the driven component and the first direction frame structure, or between the driven component and the second direction frame structure, and the flexible connector is configured as follows: the flexible connector has rigidity along the first direction and the second direction, and has flexibility along the third direction.

[0015] In some embodiments, at least one of the two ends of the first-direction frame structure in the second direction is provided with a first reinforcing plate; and / or at least one of the two ends of the second-direction frame structure in the first direction is provided with a second reinforcing plate.

[0016] In some embodiments, the driven member includes a lower structure, an upper structure, and a connecting structure connecting the lower structure and the upper structure, the lower structure is connected to the first direction frame structure and the second direction frame structure, and the upper structure is used to carry objects; the first reinforcing plate is located below the lower structure along the third direction; there is a gap between the lower structure and the upper structure, and the second reinforcing plate is configured such that: when the driven member moves in the first direction, the second reinforcing plate is at least partially in the gap or detached from the gap.

[0017] In some embodiments, the distance between the overall center of mass of the mover of the first drive device, the first-direction motion mechanism and the driven component and the center of the driving force of the first drive device in the third direction does not exceed a first range; the distance between the overall center of mass of the stator of the first drive device and the first balancing mass block and the center of the driving force of the first drive device in the third direction does not exceed a second range; the distance between the overall center of mass of the mover of the second drive device, the second-direction motion mechanism and the driven component and the center of the driving force of the second drive device in the third direction does not exceed a third range; the distance between the overall center of mass of the stator of the second drive device and the second balancing mass block and the center of the driving force of the second drive device in the third direction does not exceed a fourth range.

[0018] In some embodiments, the first range, the second range, the third range, and the fourth range are all 0-5 mm.

[0019] In some embodiments, the first-direction movement mechanism includes a third mechanical guide device, which is arranged on the support platform and extends along the first direction, and the slider of the third mechanical guide device is connected to the first-direction frame structure; the second-direction movement mechanism includes a fourth mechanical guide device, which is arranged on the support platform and extends along the second direction, and the slider of the fourth mechanical guide device is connected to the second-direction frame structure.

[0020] In some embodiments, air-floating plane bearings are provided on any two or three of the lower surface of the first direction frame structure, the lower surface of the second direction frame structure, and the lower surface of the driven component.

[0021] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) through the arrangement of the first direction frame structure, the second direction frame structure and the observation hole, the object carried by the driven component can be observed from above and below at the same time; and the frame structure is more conducive to setting the distance between the driven component and the observation hole; (2) the first direction movement mechanism and the second direction movement mechanism are both arranged on the support platform, which is conducive to achieving high-acceleration movement of the driven component in different dimensions; (3) the driven component is driven by the first direction frame structure and the second direction frame structure, and the movement of the driven component relative to the first direction frame structure and the movement of the driven component are controlled by the first mechanical guide device and the second mechanical guide device. The first balancing mass block and the second balancing mass block are capable of absorbing the additional impact generated by the driven member during high acceleration and high deceleration, thereby improving the movement accuracy of the driven member; (7) the first balancing mass block and / or the second balancing mass block are capable of returning to zero by the first balancing mass block returning to zero and / or the second balancing mass block returning to zero, thereby eliminating the two first balancing mass blocks. The possible position difference of the balancing mass block or the two second balancing mass blocks due to movement; (8) solving the problem of difficulty in absolute position measurement of high acceleration displacement device by three sets of measuring devices (first measuring device in the first direction and first measuring device in the second direction, second measuring device in the first direction and second measuring device in the second direction, and first direction balancing mass measuring device and second direction balancing mass measuring device); (9) strengthening the rigidity of the first direction frame structure and / or the second direction frame structure by the first reinforcing plate and the second reinforcing plate to avoid pitching during movement; (10) by setting the center of mass and the center of driving force of multiple components, each component can maintain balance during movement to avoid pitching during movement; (11 ) The rotation of the first direction frame structure or the second direction frame structure around the third direction is converted into the force exerted on the third mechanical guide device and the fourth mechanical guide device and the differential between the two first balance mass blocks and the differential between the two second balance mass blocks through the third mechanical guide device and the fourth mechanical guide device, thereby avoiding the rotation, bending or twisting of the first direction frame structure or the second direction frame structure; (12) Through the arrangement of the first mechanical guide device, the second mechanical guide device, the third mechanical guide device and the fourth mechanical guide device, the high acceleration displacement device is suitable for a vacuum environment, solving the problem that the displacement stage in some related embodiments is not suitable for a vacuum environment and the magnetic levitation displacement stage is difficult to manufacture and control.It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings represent the same structures or steps.

[0023] Figure 1 is a schematic diagram of a high acceleration displacement device according to some embodiments of this specification.

[0024] Figure 2 It is a schematic front view of a high acceleration displacement device according to some embodiments of this specification.

[0025] Figure 3 1 is a schematic top view of a high acceleration displacement device according to some embodiments of this specification.

[0026] Figure 4 Schematic diagram of an explosion of a high-acceleration displacement device according to some embodiments of this specification.

[0027] Figure 5 Schematic diagram of a first direction frame structure of a high acceleration displacement device according to some embodiments of this specification.

[0028] Figure 6 Schematic diagram of some flexible connectors of a high-acceleration displacement device according to some embodiments of this specification.

[0029] Figure 7 Schematic diagram of other flexible connectors of the high acceleration displacement device according to some embodiments of this specification.

[0030] Figure 8 Schematic diagram of a first reinforcing plate and a second reinforcing plate of a high-acceleration displacement device according to other embodiments of this specification.

[0031] Figure 9 It is a cross-sectional schematic diagram of the second direction frame structure and driven components of the high acceleration displacement device shown in other embodiments of this specification.

[0032] Figure 10 It is a cross-sectional schematic diagram of a first direction frame structure and a driven component of a high acceleration displacement device according to other embodiments of this specification.

[0033] Figure 11 Schematic diagram of the center of mass of a high acceleration displacement device according to some embodiments of this specification.

[0034] Markings in the figure: 1000 support platform; 1100 observation hole; 1010 balancing mass block limiting mechanism; 1020 frame structure limiting mechanism; 100 first direction movement mechanism; 200 second direction movement mechanism; 300 driven component; 301 lower structure; 302 upper structure; 303 connecting structure; 304 air-floating plane bearing; 101 first direction frame structure; 1011 first direction frame structure crossbeam; 1012 first direction frame structure connecting rod; 102 first mechanical guide device; 201 second direction frame structure; 2011 second direction frame structure crossbeam; 2012 second direction frame structure connecting rod; 202 second mechanical guide device; 400 flexible connector; 400a cavity; 401 first fixing portion; 402 second fixing portion; 403 flexible spring; 404 first limiting portion; 405 second limiting portion; 500 First balancing mass block; 600 First drive device; 600a Stator; 600b Mover; 700 Second balancing mass block; 800 Second drive device; 800a Stator; 800b Mover; 501 First balancing mass block zeroing device; 701 Second balancing mass block zeroing device; 502 First measuring device in the first direction; 702 First measuring device in the second direction; 503 Second measuring device in the first direction; 703 Second measuring device in the second direction; 504 First direction balancing mass measuring device; 704 Second direction balancing mass measuring device; 505 First balancing mass block guide device; 705 Second balancing mass block guide device; 103 First reinforcing plate; 203 Second reinforcing plate; 901 Third mechanical guide device; 902 Fourth mechanical guide device. DETAILED DESCRIPTION

[0035] To more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the following descriptions are some examples or embodiments of this specification, and those skilled in the art can apply the technical solutions or methods disclosed in this specification to other scenarios based on these technical contents without inventive effort.

[0036] It should be understood that the terms "system," "device," "equipment," "portion," and / or "component," "unit," and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0037] Unless otherwise specified, technical terms used in this specification to describe components, elements, and the like do not necessarily refer to the singular but may include the plural. Generally speaking, terms such as "include" and "comprising" only indicate the inclusion of the steps, elements, or components specifically identified, and these steps, elements, and components do not constitute an exclusive list. For example, the method or device being described may also include other steps or components.

[0038] In the description of this specification, it should be understood that the descriptions involving directions, such as up, down, front, back, left, and right, and the directions or positional relationships indicated are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise expressly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0039] A two-dimensional motion device refers to a motion control system that can achieve precise motion in a first direction (e.g., the X-axis) and / or a second direction (e.g., the Y-axis) within a horizontal plane. The functions of a two-dimensional motion device can include trajectory control, positioning adjustment, and complex path planning. It can be applied to precision machining, experimental testing, and automated production lines, especially in semiconductor manufacturing equipment.

[0040] In some related embodiments, the two-dimensional motion device may include a first-direction motion mechanism (e.g., an X-axis motion mechanism) and a second-direction motion mechanism (e.g., a Y-axis motion mechanism). The second-direction motion mechanism may be used to drive the driven member to move in the second direction, and the first-direction motion mechanism may be used to drive the second-direction motion mechanism and the driven member as a whole to move in the first direction, thereby achieving two-dimensional motion of the driven member. In some related embodiments, the two-dimensional motion device may further include a support platform for mounting the first-direction motion mechanism and the second-direction motion mechanism.

[0041] With the development of semiconductor technology and advancements in process technology, simultaneous observation and research from above and below the driven component is required during the early stages of R&D and testing. In some related embodiments, the support platform, first-direction motion mechanism, and / or second-direction motion mechanism of the two-dimensional motion device can obstruct observation from below the driven component, especially with stacked two-dimensional motion platforms.

[0042] Based on this, one or more embodiments of the present specification provide a high-acceleration displacement device, which includes a support platform with an observation hole, allowing a user to observe the driven component from below, and when the driven component performs two-dimensional movement, the first-direction movement mechanism and the second-direction movement mechanism will not hinder the observation from below of the driven component, and can better set the distance between the driven component and the observation hole; in addition, the first-direction movement mechanism and the second-direction movement mechanism are both arranged on the support platform, which reduces the driving mass of the upper movement structure compared to the stacked two-dimensional movement platform, which is conducive to achieving high-acceleration movement of the driven component in two dimensions.

[0043] Figure 1 is a schematic diagram of a high-acceleration displacement device according to some embodiments of this specification, Figure 2 is a schematic front view of a high acceleration displacement device according to some embodiments of this specification, Figure 3 is a schematic top view of a high acceleration displacement device according to some embodiments of this specification, Figure 4 Schematic diagram of the explosion of the high acceleration displacement device according to some embodiments of this specification. Figures 1 to 4 As shown, in one or more embodiments of this specification, the high-acceleration displacement device can be suitable for use in a vacuum environment or a non-vacuum environment. In some embodiments, the high-acceleration displacement device may include: a support platform 1000, a first-direction motion mechanism 100 disposed on the support platform 1000, a second-direction motion mechanism 200 disposed on the support platform 1000, and a driven member 300. In some embodiments, the first-direction motion mechanism 100 includes a first-direction frame structure 101 capable of movement along a first direction X, and the second-direction motion mechanism 200 includes a second-direction frame structure 201 capable of movement along a second direction Y. The middle part of the first direction frame structure 101 and the second direction frame structure 201 provides an observable space. Compared with the beam motion mechanism or the gantry motion mechanism in some related embodiments, the first direction frame structure 101 and the second direction frame structure 201 can allow the user to observe the driven component 300 from above or below; in addition, the first direction motion mechanism 100 and the second direction motion mechanism 200 are both arranged on the support table 1000, which can better balance the motion mass and driving force in two dimensions, which is conducive to the high acceleration motion of the displacement device in two dimensions. In some embodiments, the driven component 300 may include a carrier. In some embodiments, the carrier can be a motion carrier, such as an XYZ motion carrier or an XYRZ motion carrier. In some embodiments, the carrier can be used to carry various objects. In some embodiments, the carrier can be used to carry wafers.

[0044] In some embodiments, the first direction frame structure 101 and the second direction frame structure 201 may be rectangular. In other embodiments, the first direction frame structure 101 and the second direction frame structure 201 may also be other shapes, such as polygonal, or having curved sides.

[0045] In some embodiments, the first-direction frame structure 101 and the second-direction frame structure 201 intersect in the third direction Z to form a driven space A. The driven member 300 is disposed within the driven space A, wherein the third direction Z is perpendicular to the first direction X and the second direction Y. The second-direction motion mechanism 200 is disposed above the first-direction frame structure 101 along the third direction Z. In some embodiments, the first-direction frame structure 101 has a rectangular first accommodation space within it, and the second-direction frame structure 201 has a rectangular second accommodation space within it. In some embodiments, the first accommodation space and the second accommodation space have overlapping portions in the third direction Z, which form the driven space A. Compared to conventional stacked two-dimensional stages, the driven member 300 can be disposed within the driven space A, which allows for better adjustment of the spacing between the driven member 300 and the support platform 1000, thereby adjusting the observation distance.

[0046] In some embodiments, the first direction frame structure 101 drives the driven member 300 to move along the first direction X, and the second direction frame structure 201 drives the driven member 300 to move along the second direction Y.

[0047] In some embodiments, the first-direction frame structure 101 may include two first-direction frame structure beams 1011 extending in the second direction Y. In some embodiments, the driven member 300 is disposed between the two first-direction frame structure beams 1011, and the driven member 300 may be directly or indirectly connected to at least one of the two first-direction frame structure beams 1011. In some embodiments, when the first-direction frame structure 101 moves along the first direction X, at least one of the two first-direction frame structure beams 1011 drives (e.g., pushes or pulls) the driven member 300 to move along the first direction X.

[0048] In some embodiments, the second-direction frame structure 201 may include two second-direction frame structure beams 2011 extending in the first direction X. In some embodiments, the driven member 300 is disposed between the two second-direction frame structure beams 2011, and the driven member 300 may be directly or indirectly connected to at least one of the two second-direction frame structure beams 2011. In some embodiments, when the second-direction frame structure 201 moves along the second direction Y, at least one of the two second-direction frame structure beams 2011 drives (e.g., pushes or pulls) the driven member 300 to move along the second direction Y.

[0049] In some embodiments, the support platform 1000 is provided with an observation hole 1100 extending therethrough in the third direction Z. The projection of the observation hole 1100 in the third direction Z at least partially covers the driven space A. In some embodiments, the size of the observation hole 1100 can cover the driven space A. For example, the size of the observation hole 1100 can be larger than the size of the driven space A so as to prevent the driven member 300 in the driven space A from being obstructed during movement. In other embodiments, the size of the observation hole 1100 can be smaller than the driven space A but still cover the driven member 300. In some embodiments, the driven member 300 can be a platform having a loading area. The size of the observation hole 1100 can match the size of the loading area, or the size of the observation hole 1100 can be slightly larger than the size of the loading area. In some embodiments, the lower surface of the driven member 300 can be observed from bottom to top through the observation hole 1100.

[0050] It should be noted that the above-mentioned observation may at least include observing the driven component 300 by arranging photographic equipment or video equipment or other visual equipment, sensors, etc.; and the observation light is diffuse, even if the size of the observation hole 1100 is the same as the size of the loading area, slightly larger or even smaller, by adjusting the lens or the distance between the driven component 300 and the observation hole 1100, the observation range can also cover the entire movement stroke.

[0051] In one or more embodiments of the present specification, the first direction movement mechanism 100 includes a first mechanical guide device 102, which is arranged on the first direction frame structure 101 and extends in the second direction Y. The driven component 300 is connected to the slider of the first mechanical guide device 102 so that the driven component 300 can move along the second direction Y in the first direction frame structure 101.

[0052] In some embodiments, the first mechanical guide device 102 may include a guide rail extending along the second direction Y and a slider matching the guide rail. In some embodiments, the guide rail of the first mechanical guide device 102 is fixedly connected to the first direction frame structure 101, for example, fixedly connected to the first direction frame structure crossbeam 1011, and the slider of the first mechanical guide device 102 is fixedly connected to the driven component 300.

[0053] In some embodiments, the guide rails of the first mechanical guide device 102 can be arranged on the upper surface of the first-directional frame-shaped structural beam 1011. In this embodiment, the precision of the first mechanical guide device 102 depends on the precision of the upper surface of the first-directional frame-shaped structural beam 1011. In other embodiments, the guide rails of the first mechanical guide device 102 can be arranged on the side of the first-directional frame-shaped structural beam 1011 (e.g., the inner wall of the first-directional frame-shaped structure 101). In this embodiment, the precision of the first mechanical guide device 102 can be adjusted by adjusting the position of the ends of the guide rails of the first mechanical guide device 102 on the side of the first-directional frame-shaped structural beam 1011, thereby reducing the machining precision requirements for the upper surface of the first-directional frame-shaped structural beam 1011.

[0054] In some embodiments, there can be two first mechanical guide devices 102. In some embodiments, the two first mechanical guide devices 102 are respectively arranged on two first-direction frame-shaped structural beams 1011. In some embodiments, the two first mechanical guide devices 102 are respectively located on both sides of the driven component 300 in the second direction Y.

[0055] In one or more embodiments of the present specification, the second direction movement mechanism 200 includes a second mechanical guide device 202, which is arranged on the second direction frame structure 201 and extends in the first direction X. The driven component 300 is connected to the slider of the second mechanical guide device 202 so that the driven component 300 can move along the first direction X in the second direction frame structure 201.

[0056] In some embodiments, the second mechanical guide device 202 may include a guide rail extending along the first direction X and a slider matching the guide rail. In some embodiments, the guide rail of the second mechanical guide device 202 is fixedly connected to the second direction frame structure 201, for example, fixedly connected to the second direction frame structure crossbeam 2011, and the slider of the second mechanical guide device 202 is fixedly connected to the driven component 300.

[0057] In some embodiments, the guide rails of the second mechanical guide device 202 can be arranged on the upper surface of the second-direction frame-shaped structural beam 2011. In this embodiment, the precision of the second mechanical guide device 202 depends on the precision of the upper surface of the second-direction frame-shaped structural beam 2011. In other embodiments, the guide rails of the second mechanical guide device 202 can be arranged on the side of the second-direction frame-shaped structural beam 2011 (e.g., the inner wall of the first-direction frame-shaped structure 101). In this embodiment, the precision of the second mechanical guide device 202 can be adjusted by adjusting the position of the end of the guide rails of the second mechanical guide device 202 on the side of the second-direction frame-shaped structural beam 2011, thereby reducing the machining precision requirements for the upper surface of the second-direction frame-shaped structural beam 2011.

[0058] In some embodiments, there can be two second mechanical guide devices 202. In some embodiments, the two second mechanical guide devices 202 are respectively arranged on two second-direction frame-shaped structural beams 2011. In some embodiments, the two second mechanical guide devices 202 are respectively located on both sides of the driven component 300 in the first direction X.

[0059] In one or more embodiments of this specification, see Figure 1 As shown, the driven component 300 and the slider of the first mechanical guide device 102 , or the driven component 300 and the slider of the second mechanical guide device 202 are connected via a flexible connector 400 .

[0060] In some embodiments, the driven member 300 is connected to the slider of the first mechanical guide device 102 via a flexible connector 400, and the driven member 300 is fixedly connected to the slider of the second mechanical guide device 202. In other embodiments, the driven member 300 is connected to the slider of the second mechanical guide device 202 via a flexible connector 400, and the driven member 300 is fixedly connected to the slider of the first mechanical guide device 102.

[0061] In some embodiments, the flexible connector 400 is configured such that the flexible connector 400 is rigid along the first direction X and the second direction Y, and flexible along the third direction Z. Because the first-direction frame structure 101 and the second-direction frame structure 201 may have manufacturing errors or installation errors, or the first mechanical guide device 102 and the second mechanical guide device 202 may have manufacturing errors or installation errors, decoupling in the third direction Z by disposing the flexible connector 400 in at least one of the first mechanical guide device 102 and the second mechanical guide device 202 can accommodate such manufacturing errors or installation errors.

[0062] Figure 6Schematic diagram of some flexible connectors of high acceleration displacement devices according to some embodiments of this specification. Figure 1 、 Figure 6 As shown, in some embodiments, the flexible connector 400 may include: a first fixed portion 401 fixedly connected to the driven member 300, a second fixed portion 402 directly or indirectly fixedly connected to the first direction frame structure 101 or the second direction frame structure 201, and a flexible spring 403 connecting the first fixed portion 401 and the second fixed portion 402.

[0063] In some embodiments, the second fixing portion 402 may be fixedly connected to a slider of the first mechanical guide device 102 on the first direction frame structure 101. In other embodiments, the second fixing portion 402 may be fixedly connected to a slider of the second mechanical guide device 202 on the second direction frame structure 201.

[0064] In some embodiments, the flexible reed 403 may be a thin sheet-shaped reed. In some embodiments, the flexible reed 403 may be configured to be parallel or substantially parallel to the XY plane in which the first direction X and the second direction Y lie. In some embodiments, one end of the flexible reed 403 may be able to rise or fall relative to the other end, thereby allowing the first fixing portion 401 and the second fixing portion 402 to deform in the third direction Z, thereby achieving decoupling in the third direction Z.

[0065] In some embodiments, two adjacent cavities may be provided in the middle of the flexible connector 400. Both cavities have curved side walls, which are arranged opposite each other to form a weak portion with less material between the two curved side walls. In some embodiments, the weak portion has a variable width in the third direction Z. In some embodiments, the width of the weak portion near the first fixing portion 401 is greater than the width in the middle, and the width of the weak portion near the second fixing portion 402 is greater than the width in the middle, thereby allowing the middle to deform, thereby allowing the first fixing portion 401 and the second fixing portion 402 to deform in the third direction Z, so as to achieve decoupling in the third direction Z. In some embodiments, the weak portion forms a flexible reed 403.

[0066] Figure 7 Schematic diagram of other flexible connectors of the high acceleration displacement device according to some embodiments of this specification. Figure 1 、 Figure 7As shown, in some embodiments, the flexible connector 400 may include: a first fixing portion 401 fixedly connected to the driven member 300; a second fixing portion 402 directly or indirectly fixedly connected to the first-direction frame structure 101 (e.g., a slider of the first mechanical guide device 102 thereon) or the second-direction frame structure 201 (e.g., a slider of the second mechanical guide device 202 thereon); and a flexible spring 403 connecting the first fixing portion 401 and the second fixing portion 402. In some embodiments, the first fixing portion 401 is provided with one or more first limiting portions 404, and the second fixing portion 402 is provided with one or more second limiting portions 405. The first limiting portions 404 cooperate with the second limiting portions 405 to limit the displacement of the first fixing portion 401 and the second fixing portion 402 in the third direction Z.

[0067] In some embodiments, two adjacent cavities 400a may be provided in the middle of the flexible connector 400. Both cavities 400a have curved sidewalls, which are arranged opposite each other to form a weak point with less material between the two curved sidewalls. In some embodiments, the weak point has a variable width in the third direction Z. In some embodiments, the width of the weak point near the first fixing portion 401 is greater than the width in the middle, and the width of the weak point near the second fixing portion 402 is greater than the width in the middle, thereby allowing the middle to deform, thereby allowing the first fixing portion 401 and the second fixing portion 402 to have a spacing in the third direction Z, so as to achieve decoupling in the third direction Z. In some embodiments, the weak point forms a flexible reed 403.

[0068] In some embodiments, one end of the first fixing portion 401 extends toward the second fixing portion 402 to form a first limiting portion 404. In some embodiments, one end of the second fixing portion 402 extends toward the first fixing portion 401 to form a second limiting portion 405. In some embodiments, the first limiting portion 404 and the second limiting portion 405 are spaced apart in the third direction Z to allow the first fixing portion 401 and the second fixing portion 402 to move within a certain range in the third direction Z. In some embodiments, when the movement of the first fixing portion 401 and the second fixing portion 402 in the third direction Z exceeds the spacing between the first limiting portion 404 and the second limiting portion 405 in the third direction Z, the first limiting portion 404 and the second limiting portion 405 can abut against each other to prevent further movement of the first fixing portion 401 and the second fixing portion 402 in the third direction Z, thereby forming a limit in the third direction Z.

[0069] In some embodiments, there may be two first limiting portions 404, with the two first limiting portions 404 being located at the upper and lower ends of the first fixing portion 401, respectively. Correspondingly, there may also be two second limiting portions 405, with the two second limiting portions 405 being located at the upper and lower ends of the second fixing portion 402, respectively. In other embodiments, there may be more than two first limiting portions 404 and second limiting portions 405.

[0070] In other embodiments, the structures of the first limiting portion 404 and the second limiting portion 405 can also be applied to Figure 6 A flexible connector 400 is shown.

[0071] It should be noted that, in some embodiments, the driven component 300 and the first direction frame structure 101 and the second direction frame structure 201 can also be connected by other means, such as air-floating guide rails. When using air-floating guide rails, the flexible connector 400 with a limiting structure can play a better role.

[0072] In one or more embodiments of this specification, see Figures 1 to 4 as well as Figure 8 As shown, the high acceleration displacement device may include: a first balancing mass 500, a first driving device 600, a second balancing mass 700, and a second driving device 800. The first balancing mass 500 and the second balancing mass 700 are respectively used to absorb the impact force generated when the first direction frame structure 101 and the second direction frame structure 201 carry the driven component 300 when moving.

[0073] In some embodiments, the first driving device 600 is disposed on the first balancing mass 500 and drives the first-direction frame structure 101 to move relative to the first balancing mass 500 in the first direction X. The first balancing mass 500 is configured to move relative to the support platform 1000 in the first direction X when the first driving device 600 is in operation. In some embodiments, the first balancing mass 500 is configured to move freely based on the reaction force generated by driving the first-direction frame structure 101 to move, thereby absorbing the impact force generated by the movement of the first-direction frame structure 101 (e.g., high-acceleration or high-deceleration movement), thereby improving the movement accuracy of the driven component 300.

[0074] In some embodiments, the first drive device 600 may include a stator 600a and a mover 600b. In some embodiments, a slot is defined on the side of the first balancing mass 500 to accommodate the stator 600a of the first drive device 600. In some embodiments, the mover 600b of the first drive device 600 is fixedly connected to the first directional frame structure 101. In some embodiments, the first directional frame structure 101 may include a first directional frame structure connecting rod 1012 connecting two first directional frame structure crossbeams 1011, and the mover 600b of the first drive device 600 is fixedly connected to the first directional frame structure connecting rod 1012.

[0075] In some embodiments, there are two first balancing masses 500 , each located on either side of the first directional frame structure 101 in the second direction Y. Correspondingly, there are two first driving devices 600 , one of which is positioned between each first balancing mass 500 and the first directional frame structure 101 .

[0076] In some embodiments, the second driving device 800 is disposed on the second balancing mass 700 and drives the second-direction frame structure 201 to move relative to the second balancing mass 700 in the second direction Y. The second balancing mass 700 is configured to move relative to the support platform 1000 in the second direction Y when the second driving device 800 is in operation. In some embodiments, the second balancing mass 700 is configured to move freely based on the reaction force generated by driving the second-direction frame structure 201 to move, thereby absorbing the impact force generated by the movement of the second-direction frame structure 201.

[0077] In some embodiments, the second drive device 800 may include a stator 800a and a mover 800b. In some embodiments, a slot is defined on the side of the second balancing mass 700 to accommodate the stator 800a of the second drive device 800. In some embodiments, the mover 800b of the second drive device 800 is fixedly connected to the second-direction frame structure 201. In some embodiments, the second-direction frame structure 201 may include a second-direction frame structure connecting rod 2012 connecting two second-direction frame structure crossbeams 2011, and the mover 800b of the second drive device 800 is fixedly connected to the second-direction frame structure connecting rod 2012.

[0078] In some embodiments, there are two second balancing masses 700 , each located on either side of the second directional frame structure 201 in the first direction X. Correspondingly, there are two second driving devices 800 , each of which is provided between the second balancing mass 700 and the second directional frame structure 201 .

[0079] In some embodiments, the high acceleration displacement device may be a four-balanced mass high acceleration displacement device having two first balancing masses 500 and two second balancing masses 700 .

[0080] In some embodiments, the first balancing mass block 500 and the second balancing mass block 700 are both disposed on the support platform 1000. In some embodiments, the first balancing mass block 500 and the second balancing mass block 700 are slidably connected relative to the support platform 1000. Figure 4 As shown, the high acceleration displacement device may include a first balancing mass guide device 505 for guiding the movement of the first balancing mass 500 in the first direction X. In some embodiments, the first balancing mass guide device 505 includes a guide rail provided on the support platform 1000 and one or more sliders provided on the first balancing mass 500. In some embodiments, see Figure 4 As shown, the high-acceleration displacement device may include a second balancing mass guide device 705 for guiding the movement of the second balancing mass 700 in the second direction Y. In some embodiments, the second balancing mass guide device 705 includes a guide rail provided on the support platform 1000 and one or more sliders provided on the second balancing mass 700.

[0081] In one or more embodiments of this specification, see Figures 1 to 4 as well as Figure 8 As shown, the high acceleration displacement device may include: a first balancing mass block zero return device 501 and / or a second balancing mass block zero return device 701.

[0082] In some embodiments, the first balancing mass zeroing device 501 is used to drive the first balancing mass 500 to move along the first direction X to a predetermined first zero position relative to the support platform 1000. In some embodiments, the first balancing mass zeroing device 501 can be a linear drive device. In some embodiments, the first balancing mass zeroing device 501 can include a stator fixedly connected to the support platform 1000 and a mover fixedly connected to the first balancing mass 500.

[0083] In some embodiments, the two first balancing masses 500 may generate motion errors after one or more movements. This motion error may cause the positions of the two sides of the first directional frame structure 101 to be out of sync, resulting in undesirable torsion of the first directional frame structure 101 in the third direction Z. The first balancing mass zeroing device 501 corresponding to each first balancing mass 500 drives the first balancing mass 500 back to the first zero position to overcome the undesirable torsion.

[0084] It should be noted that, when the first driving device 600 is working, the stator and the mover of the first balancing mass block zero return device 501 are configured to be able to move freely relative to each other.

[0085] In some embodiments, the second balancing mass zeroing device 701 is used to drive the second balancing mass 700 to move along the second direction Y to a predetermined second zero position relative to the support platform 1000. In some embodiments, the second balancing mass zeroing device 701 can be a linear drive device. In some embodiments, the second balancing mass zeroing device 701 can include a stator fixedly connected to the support platform 1000 and a mover fixedly connected to the second balancing mass 700.

[0086] In some embodiments, the two second balancing masses 700 may generate motion errors after one or more movements. This motion error may cause the positions of the two sides of the second directional frame structure 201 to be out of sync, resulting in undesirable torsion of the second directional frame structure 201 in the third direction Z. The second balancing mass zeroing device 701 corresponding to each second balancing mass 700 drives the second balancing mass 700 back to the second zero position to overcome the undesirable torsion.

[0087] It should be noted that, when the second balancing mass block 700 is working, the stator and the mover of the second balancing mass block zero return device 701 are configured to be able to move freely relative to each other.

[0088] In one or more embodiments of the present specification, the high-acceleration displacement device may include: a first-direction first measurement device 502 and a second-direction first measurement device 702. In some embodiments, the first-direction first measurement device 502 is used to measure the position of the first-direction frame structure 101 relative to the support platform 1000 in the first direction X, and the second-direction first measurement device 702 is used to measure the position of the second-direction frame structure 201 relative to the support platform 1000 in the second direction Y.

[0089] In some embodiments, the first direction first measurement device 502 and the second direction first measurement device 702 may be linear scales. In some embodiments, the first direction first measurement device 502 may be disposed on the first direction frame structure connecting rod 1012 of the first direction frame structure 101. In some embodiments, the second direction first measurement device 702 may be disposed on the second direction frame structure connecting rod 2012 of the second direction frame structure 201.

[0090] In some embodiments, the high-acceleration displacement device may include: a first-direction second measurement device 503 and a second-direction second measurement device 703. In some embodiments, the first-direction second measurement device 503 is used to measure the position of the first-direction frame structure 101 relative to the first balancing mass 500 in the first direction X, and the second-direction second measurement device 703 is used to measure the position of the second-direction frame structure 201 relative to the second balancing mass 700 in the second direction Y.

[0091] In some embodiments, the first-direction second measurement device 503 and the second-direction second measurement device 703 may be linear scales. In some embodiments, the first-direction second measurement device 503 may be disposed on the mover 600b of the first drive device 600. In some embodiments, the second-direction second measurement device 703 may be disposed on the mover 800b of the second drive device 800.

[0092] In some embodiments, the high-acceleration displacement device may include: a first-direction balancing mass measurement device 504 and a second-direction balancing mass measurement device 704. In some embodiments, the first-direction balancing mass measurement device 504 is used to measure the position of the first balancing mass 500 relative to the support platform 1000 in the first direction X, and the second-direction balancing mass measurement device 704 is used to measure the position of the second balancing mass 700 relative to the support platform 1000 in the second direction Y.

[0093] In some embodiments, the first-direction balance mass measurement device 504 and the second-direction balance mass measurement device 704 can be optical scales. In some embodiments, the first-direction balance mass measurement device 504 can be disposed on a side of the first balance mass 500 and a side of the support platform 1000. In some embodiments, the second-direction balance mass measurement device 704 can be disposed on a side of the second balance mass 700 and a side of the support platform 1000.

[0094] Figure 8 Schematic diagram of the first reinforcing plate and the second reinforcing plate of the high acceleration displacement device according to other embodiments of this specification. Figure 8 As shown, a first reinforcing plate 103 is provided at at least one of the two ends of the first-direction frame structure 101 in the second direction Y. In some embodiments, a first reinforcing plate 103 is provided at one end of the first-direction frame structure 101 in the second direction Y. In some embodiments, a first reinforcing plate 103 is provided at each of the two ends of the first-direction frame structure 101 in the second direction Y.

[0095] In some embodiments, three sides of the first reinforcing plate 103 may be respectively connected to two first direction frame structure beams 1011 and one first direction frame structure connecting rod 1012. In some embodiments, the driven member 300 is arranged between the two first reinforcing plates 103.

[0096] In some embodiments, the first reinforcing plate 103 is used to increase the stiffness of the first direction frame structure 101, increase movement stability, and prevent pitch problems in the movement direction (for example, rotation or deformation around the second direction Y during movement along the first direction X).

[0097] In some embodiments, a second reinforcing plate 203 is provided at at least one of the two ends of the second-direction frame structure 201 in the first direction X. In some embodiments, a second reinforcing plate 203 is provided at one end of the second-direction frame structure 201 in the first direction X. In some embodiments, a second reinforcing plate 203 is provided at each of the two ends of the second-direction frame structure 201 in the first direction X.

[0098] In some embodiments, three sides of the second reinforcing plate 203 may be respectively connected to two second direction frame structure beams 2011 and one second direction frame structure connecting rod 2012. In some embodiments, the driven member 300 is arranged between the two second reinforcing plates 203.

[0099] In some embodiments, the second reinforcing plate 203 is used to increase the stiffness of the second direction frame structure 201, increase movement stability, and prevent pitch problems in the movement direction (for example, rotation or deformation around the first direction X during movement along the second direction Y).

[0100] In one or more embodiments of this specification, see Figure 4 、 Figure 5 、 Figure 9 and Figure 10 As shown, the driven component 300 may include a lower structure 301, an upper structure 302 and a connecting structure 303 connecting the lower structure 301 and the upper structure 302. The lower structure 301 is connected to the first direction frame structure 101 and the second direction frame structure 201. The upper structure 302 is used to carry objects.

[0101] In some embodiments, the lower structure 301 may include two rod-shaped structures arranged in parallel, and the upper structure 302 is disposed above the two rod-shaped structures. Figure 5 As shown, the rod-shaped structure may be provided with a notch 302 a. In some embodiments, the notch 302 a may be used to provide a space for arranging the flexible connector 400.

[0102] In some embodiments, the upper structure 302 may be a stage. In some embodiments, the upper structure 302 may be a motion stage, such as an XYZ motion stage or an XYRZ motion stage.

[0103] In some embodiments, the first reinforcing plate 103 is located below the lower structure 301 along the third direction Z. When the driven member 300 moves along the second direction Y inside the first direction frame structure 101, the first reinforcing plate 103 does not interfere with the movement of the driven member 300. Figure 10 As shown, the first reinforcing plate 103 can be arranged on the lower surface of the first direction frame structure 101, and the lower structure 301 is fixedly connected to the upper surface of the slider of the first mechanical guide device 102, so that the first reinforcing plate 103 is located below the lower structure 301.

[0104] In some embodiments, there is a gap between the lower structure 301 and the upper structure 302. In some embodiments, the second reinforcing plate 203 is configured such that when the driven member 300 moves in the first direction X, the second reinforcing plate 203 is at least partially located in the gap or out of the gap. Figure 9 As shown, when the driven member 300 moves to the left along the first direction X inside the second direction frame structure 201, the right end of the second reinforcing plate 203 on the left is inserted into the gap between the lower structure 301 and the upper structure 302; when the driven member 300 moves to the right to the middle along the first direction X inside the second direction frame structure 201, the second reinforcing plate 203 on the left and the second reinforcing plate 203 on the right are both separated from the gap between the lower structure 301 and the upper structure 302; when the driven member 300 continues to move to the right along the first direction X inside the second direction frame structure 201, the left end of the second reinforcing plate 203 on the right is inserted into the gap between the lower structure 301 and the upper structure 302. For example, the second reinforcing plate 203 can be arranged on the upper surface of the second-direction frame structure 201, with the lower structure 301 located below the upper surface and the upper structure 302 located above the upper surface. The upper structure 302 and the lower structure 301 are connected by a connecting structure 303. The connecting structure 303 is located near the middle of the upper structure 302 and the lower structure 301 along the second direction Y, so that a gap is left between the upper structure 302 and the lower structure 301 at both ends in the Y direction. Based on this, while the second-direction frame structure 201 is structurally reinforced, the driven component 300 can have a maximum stroke.

[0105] In one or more embodiments of the present specification, the distance between the center of mass of the mover 600b of the first drive device 600, the first-direction motion mechanism 100, and the driven member 300 and the center of the driving force of the first drive device 600 in the third direction Z does not exceed a first range to increase motion stability and prevent pitching problems during motion in the first direction X. In some embodiments, the first range is 0 to 5 mm.

[0106] In some embodiments, the distance between the center of mass of the mover 600b of the first drive device 600, the first direction motion mechanism 100 and the driven component 300 and the center of the driving force of the first drive device 600 in the third direction Z is 0, that is, the two are on the same horizontal plane (or parallel to the plane of the support platform 1000).

[0107] In some embodiments, the distance between the center of mass of the stator 600a of the first drive device 600 and the first balancing mass 500 and the center of the driving force of the first drive device 600 in the third direction Z does not exceed a second range, thereby increasing motion stability and preventing pitching problems during motion along the first direction X. In some embodiments, the second range is 0-5 mm.

[0108] In some embodiments, the distance between the overall center of mass of the stator 600a of the first drive device 600 and the first balancing mass block 500 and the center of the driving force of the first drive device 600 in the third direction Z is 0, that is, the two are on the same horizontal plane (or parallel to the plane of the support platform 1000).

[0109] In some embodiments, see Figure 11 As shown, the center of mass of the mover 600b of the first drive device 600, the first-direction motion mechanism 100, and the driven member 300 can be located within plane C, the center of the driving force of the first drive device 600 can be located within plane B, and the center of mass of the stator 600a of the first drive device 600 and the first balancing mass 500 can be located within plane A. In some embodiments, the distance between plane A and plane B does not exceed a first range, and the distance between plane B and plane C does not exceed a second range.

[0110] In some embodiments, the distance between the center of mass of the second drive device 800b, the second-direction motion mechanism 200, and the driven member 300, and the center of the driving force of the second drive device 800 in the third direction Z does not exceed a third range to increase motion stability and prevent pitching problems during motion in the second direction Y. In some embodiments, the third range is 0-5 mm.

[0111] In some embodiments, the distance between the center of mass of the mover 800b of the second drive device 800, the second direction motion mechanism 200 and the driven component 300 and the center of the driving force of the second drive device 800 in the third direction Z is 0, that is, the two are on the same horizontal plane (or parallel to the plane of the support platform 1000).

[0112] In some embodiments, the distance between the center of mass of the stator 800a of the second drive device 800 and the second balancing mass 700 and the center of the driving force of the second drive device 800 in the third direction Z does not exceed a fourth range, thereby increasing motion stability and preventing pitching problems during motion in the second direction Y. In some embodiments, the fourth range is 0-5 mm.

[0113] In some embodiments, the distance between the center of mass of the stator 800a of the second drive device 800 and the second balancing mass block 700 as a whole and the center of the driving force of the second drive device 800 in the third direction Z is 0, that is, the two are on the same horizontal plane (or parallel to the plane of the support platform 1000).

[0114] In some embodiments, see also Figure 11 As shown, the center of mass of the mover 800b of the second drive device 800, the second-direction motion mechanism 200, and the driven member 300 can be located within plane C, the center of the driving force of the second drive device 800 can be located within plane B, and the center of mass of the stator 800a of the second drive device 800 and the second balancing mass 700 can be located within plane A. In some embodiments, the distance between plane A and plane B does not exceed a first range, and the distance between plane B and plane C does not exceed a second range.

[0115] It should be noted that the driving space A formed by the first direction frame structure 101 and the second direction frame structure 201 can better set the height of the driven component 300. By controlling the distance between the above-mentioned driving force center and the center of mass of the corresponding driven component in the third direction Z, the pitching moment of the first direction frame structure 101, the second direction frame structure 201, the first balancing mass block 500 and the second balancing mass block 700 during the movement process can be effectively reduced, the pitching situation of the device during movement can be reduced, and the movement accuracy and stability can be improved.

[0116] In one or more embodiments of this specification, the ratio (m) of the mass of the first balancing mass block 500 to the sum of the masses of the mover 600b of the first driving device 600 and the driven component 300 is 第一平衡质量块 / (m 第一驱动装置的动子 +m 被驱动构件)) can be 8 to 12. In some embodiments, the ratio (m) of the mass of the first balancing mass block 500 to the sum of the masses of the mover 600b of the first driving device 600 and the driven component 300 is 第一平衡质量块 / (m 第一驱动装置的动子 +m 被驱动构件 ))can be 10.

[0117] In some embodiments, the ratio (m) of the mass of the second balancing mass 700 to the sum of the masses of the mover 800b of the second driving device 800 and the driven component 300 is 第二平衡质量块 / (m 第二驱动装置的动子 +m 被驱动构件 )) can be 8 to 12. In some embodiments, the ratio (m) of the mass of the second balancing mass block 700 to the sum of the masses of the mover 800b of the second driving device 800 and the driven component 300 is 第二平衡质量块 / (m 第二驱动装置的动子 +m 被驱动构件 ))can be 10.

[0118] The above ratio setting can ensure that the stroke of the balancing mass (eg, the first balancing mass 500 and / or the second balancing mass 700 ) is not too large.

[0119] In one or more embodiments of this specification, see Figure 2 、 Figure 4 As shown, the first-direction motion mechanism 100 includes a third mechanical guide device 901. The third mechanical guide device 901 is disposed on a support platform 1000 and extends along the first direction X. The slider of the third mechanical guide device 901 is connected to the first-direction frame structure 101. The third mechanical guide device 901 is used to guide the movement of the first-direction frame structure 101 in the first direction X and provide support for the first-direction frame structure 101.

[0120] In some embodiments, the second-direction motion mechanism 200 includes a fourth mechanical guide 902, which is mounted on the support platform 1000 and extends along the second direction Y. The slider of the fourth mechanical guide 902 is connected to the second-direction frame structure 201. The fourth mechanical guide 902 is used to guide the movement of the second-direction frame structure 201 in the second direction Y and provide support for the second-direction frame structure 201. In some embodiments, the third and fourth mechanical guides 901 and 902 can be used to withstand deflection about the third direction Z (RZ deflection) caused by asynchronous drive between the two sides and various disturbances.

[0121] In some embodiments, the third mechanical guide device 901 and the fourth mechanical guide device 902 provide guidance and support for the first directional frame structure 101 and the second directional frame structure 201. Deflection of the first directional frame structure 101 or the second directional frame structure 201 about the third direction Z can be supported by the third mechanical guide device 901 or the fourth mechanical guide device 902, thereby preventing deformation of the first directional frame structure 101 or the second directional frame structure 201. In some embodiments, due to the support provided by the third mechanical guide device 901 and the fourth mechanical guide device 902, the deflection of the first directional frame structure 101 or the second directional frame structure 201 about the third direction Z can be further converted into a differential motion between the two first balancing masses 500 and / or a differential motion between the two second balancing masses 700.

[0122] In some embodiments, the third mechanical guide device 901 and the fourth mechanical guide device 902 are suitable for use in a vacuum environment.

[0123] In some embodiments, by changing the setting heights of the third mechanical guide device 901 and the fourth mechanical guide device 902, the setting heights of the first direction frame structure 101 and the second direction frame structure 201 can be changed, so that the relevant components meet the values ​​of the first range and the third range, avoiding pitching when the first direction frame structure 101 and the second direction frame structure 201 move.

[0124] In one or more embodiments of this specification, air-floating plane bearings 304 are provided on any two or three of the lower surface of the first direction frame structure 101 , the lower surface of the second direction frame structure 201 , and the lower surface of the driven component 300 .

[0125] In some embodiments, the first direction frame structure 101 and / or the second direction frame structure 201 may be guided and / or supported using air-floating plane bearings 304 .

[0126] In some embodiments, the lower surface of the driven component 300 can be supported by an air-bearing plane bearing 304. In this embodiment, the lower surface of the driven component 300 is provided with an air-bearing plane bearing 304, which is supported on the support platform 1000. In this embodiment, the driven component 300 and the first mechanical guide device 102, as well as the driven component 300 and the second mechanical guide device 202, can be connected via a flexible connector 400 to achieve decoupling in the third direction Z. In this embodiment, the flexible connector 400 can include the aforementioned first and second limiting portions 404 and 405 to limit the position of the driven component 300 in the third direction Z.

[0127] In some embodiments, in a non-vacuum environment, the air-bearing guide device (e.g., air-bearing plane bearing 304) can be an aerostatic bearing suitable for non-vacuum environments. It should be noted that when installing the air-bearing guide device, the range of motion must avoid observation aperture 1100, so the size of observation aperture 1100 should be minimized. However, the observation range can be improved by increasing the distance between the bottom surface of driven component 300 and observation aperture 1100 (e.g., increasing the air-bearing gap).

[0128] In one or more embodiments of this specification, see Figure 5 As shown, the high-acceleration displacement device further includes: a balancing mass limiting mechanism 1010 and a frame-type structure limiting mechanism 1020. In some embodiments, the balancing mass limiting mechanism 1010 may include elastic elements and / or damping elements arranged in the first direction X and elastic elements and / or damping elements arranged in the second direction Y, for limiting the position of the first balancing mass 500 in the first direction X and limiting the position of the second balancing mass 700 in the second direction Y. In some embodiments, the frame-type structure limiting mechanism 1020 may include elastic elements and / or damping elements arranged in the first direction X and elastic elements and / or damping elements arranged in the second direction Y, for limiting the position of the first-direction frame-type structure 101 in the first direction X and limiting the position of the second-direction frame-type structure 201 in the second direction Y.

[0129] In summary, one or more embodiments of the specification provide a high-acceleration displacement device, which includes a support platform with an observation hole, allowing a user to observe a driven component from below, and when the driven component performs two-dimensional movement, the first-direction movement mechanism and the second-direction movement mechanism will not hinder the observation from below of the driven component, and can better set the distance between the driven component and the observation hole; in addition, the first-direction movement mechanism and the second-direction movement mechanism are both arranged on the support platform, which reduces the driving mass in a single dimension compared to the stacked two-dimensional motion platform, and is conducive to achieving high-acceleration movement of the driven component in two dimensions.

[0130] Furthermore, by combining different technical features in one or more embodiments, the motion performance of the high-acceleration displacement device can be further improved and adapted to different environments. For example, the first-direction motion mechanism and the second-direction motion mechanism can be connected to other components using only mechanical guides, enabling application in both vacuum and non-vacuum environments, while also resolving the issue of inconvenient placement of air bearings in observation apertures. A balancing mass is utilized to absorb the impact of high-speed, high-acceleration motion. Furthermore, by effectively controlling the Z-direction distance between the driving center and the center of mass of the driven component and adding reinforcement plates, the low rigidity of the frame structure, which is prone to pitching, is overcome, thereby improving motion stability. Furthermore, the first-direction motion mechanism and the second-direction motion mechanism can be connected to other components using only air guides, or using both air guides and mechanical guides, enabling application in non-vacuum environments. The air guides can effectively improve the stability of the driven component during motion and, combined with flexible connectors with position limits, provide protection. Furthermore, the balancing mass is utilized to absorb the impact of high-speed, high-acceleration motion. In addition to the above combinations, various other combinations consistent with technical principles can be employed according to different circumstances, and these are not listed here.

[0131] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are taught in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A high acceleration displacement device, characterized in that: include: A support platform, a first direction motion mechanism provided on the support platform, a second direction motion mechanism provided on the support platform, and a driven component; The first direction movement mechanism includes a first direction frame structure capable of moving along a first direction, and the second direction movement mechanism includes a second direction frame structure capable of moving along a second direction; The first-direction frame structure and the second-direction frame structure intersect in a third direction to form a driven space, the driven member is disposed in the driven space, wherein the third direction is perpendicular to the first direction and the second direction, and the second-direction motion mechanism is disposed above the first-direction frame structure along the third direction; The first direction frame structure drives the driven member to move along the first direction, and the second direction frame structure drives the driven member to move along the second direction; The support platform is provided with an observation hole extending through the third direction, wherein a projection of the observation hole in the third direction at least partially covers the driven space; The high acceleration displacement device further comprises: a first balancing mass block, a first driving device, a second balancing mass block and a second driving device; The first driving device drives the first direction frame structure to move relative to the first balancing mass block along the first direction, and the second driving device drives the second direction frame structure to move relative to the second balancing mass block along the second direction; The distance between the center of mass of the entirety of the mover of the first driving device, the first-direction motion mechanism, and the driven member and the center of the driving force of the first driving device in the third direction does not exceed a first range; The distance between the center of mass of the stator of the first driving device and the first balancing mass block as a whole and the center of the driving force of the first driving device in the third direction does not exceed a second range.

2. The high acceleration displacement device according to claim 1, characterized in that: The first-direction movement mechanism includes a first mechanical guide device, which is provided on the first-direction frame structure and extends in the second direction. The driven member is connected to a slider of the first mechanical guide device so that the driven member can move in the first-direction frame structure along the second direction. The second-direction movement mechanism includes a second mechanical guide device, which is arranged on the second-direction frame structure and extends in the first direction. The driven component is connected to the slider of the second mechanical guide device so that the driven component can move along the first direction within the second-direction frame structure.

3. The high acceleration displacement device according to claim 2, characterized in that: The driven member and the slider of the first mechanical guide device, or the driven member and the slider of the second mechanical guide device are connected via a flexible connector; The flexible connector is configured such that: the flexible connector has rigidity along the first direction and the second direction, and has flexibility along the third direction.

4. The high acceleration displacement device according to claim 3, characterized in that: The flexible connector includes a first fixing portion fixedly connected to the driven member, a second fixing portion directly or indirectly fixedly connected to the first direction frame structure or the second direction frame structure, and a flexible spring connecting the first fixing portion and the second fixing portion.

5. The high acceleration displacement device according to claim 4, characterized in that: One or more first limiting parts are provided on the first fixing part, and one or more second limiting parts are provided on the second fixing part. The first limiting parts cooperate with the second limiting parts to limit the displacement of the first fixing part and the second fixing part in the third direction.

6. The high acceleration displacement device according to claim 1, characterized in that: The first driving device is provided on the first balancing mass block, and the first balancing mass block is configured to be able to move along the first direction relative to the support platform when the first driving device is in operation; The second driving device is provided on the second balancing mass block, and the second balancing mass block is configured to be able to move along the second direction relative to the support platform when the second driving device is in operation; The first balancing mass block and the second balancing mass block are both arranged on the support platform.

7. The high acceleration displacement device according to claim 6, characterized in that: Also includes: a first balancing mass zero return device and / or a second balancing mass zero return device; The first balancing mass block zero return device is used to drive the first balancing mass block to move along the first direction to be in a first zero position preset relative to the support platform; The second balancing mass block zero return device is used to drive the second balancing mass block to move along the second direction so as to be in a second zero position preset relative to the support platform.

8. The high acceleration displacement device according to claim 6, characterized in that: Also includes: a first measuring device in a first direction and a first measuring device in a second direction; The first measurement device in the first direction is used to measure the position of the first-direction frame structure relative to the support platform in the first direction, and the first measurement device in the second direction is used to measure the position of the second-direction frame structure relative to the support platform in the second direction; Also included: a first direction second measuring device and a second direction second measuring device; The second measuring device in the first direction is used to measure the position of the first-direction frame structure relative to the first balancing mass block in the first direction, and the second measuring device in the second direction is used to measure the position of the second-direction frame structure relative to the second balancing mass block in the second direction; Also included: a first direction balance mass measuring device and a second direction balance mass measuring device; The first direction balancing mass measuring device is used to measure the position of the first balancing mass block relative to the support platform in the first direction, and the second direction balancing mass measuring device is used to measure the position of the second balancing mass block relative to the support platform in the second direction.

9. The high acceleration displacement device according to claim 1, characterized in that: At least one of the two ends of the first-direction frame structure in the second direction is provided with a first reinforcing plate; And / or, a second reinforcing plate is provided at at least one of the two ends of the second-direction frame structure in the first direction.

10. The high acceleration displacement device according to claim 9, characterized in that: The driven component includes a lower structure, an upper structure, and a connecting structure connecting the lower structure and the upper structure, the lower structure is connected to the first direction frame structure and the second direction frame structure, and the upper structure is used to carry an object; The first reinforcing plate is located below the lower structure along the third direction; A gap is defined between the lower structure and the upper structure, and the second reinforcing plate is configured such that when the driven member moves in the first direction, the second reinforcing plate is at least partially located in the gap or is separated from the gap.

11. The high acceleration displacement device according to claim 6, characterized in that: The distance between the center of mass of the whole of the mover of the second driving device, the second-direction motion mechanism and the driven member and the center of the driving force of the second driving device in the third direction does not exceed a third range; The distance between the center of mass of the stator of the second driving device and the second balancing mass block as a whole and the center of the driving force of the second driving device in the third direction does not exceed a fourth range.

12. The high acceleration displacement device according to claim 11, characterized in that: The first range, the second range, the third range, and the fourth range are all 0-5 mm.

13. The high acceleration displacement device according to claim 1, characterized in that: The first direction movement mechanism includes a third mechanical guide device, the third mechanical guide device is arranged on the support platform and extends along the first direction, and the slider of the third mechanical guide device is connected to the first direction frame structure; The second direction movement mechanism includes a fourth mechanical guide device, which is arranged on the support platform and extends along the second direction. The slider of the fourth mechanical guide device is connected to the second direction frame structure.

14. The high acceleration displacement device according to claim 1, characterized in that: Air-floating plane bearings are provided on any two or three of the lower surface of the first direction frame structure, the lower surface of the second direction frame structure, and the lower surface of the driven component.

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