Large-energy slab laser heat dissipation system for OHx detection

Abstract

The invention discloses a heat dissipation system of a macro-energy lath laser for OHx detection, and belongs to the technical field of macro-energy lath lasers. According to the system, through a series-parallel combined liquid cooling framework, micro-channel topological optimization and a multi-layer composite sealing technology, the problems that a traditional heat dissipation scheme is uneven in temperature, too high in flow resistance and poor in sealing reliability are solved. Main channels are connected in series to ensure that the flow is less than 6L / min, and branches are connected in parallel to realize that the total pressure drop is less than 0.2 MPa; the micro-channel flow channel is subjected to CFD optimization layout, is matched with heat source distribution, and can bear heat flux of more than 500W / cm < 2 >; and a multi-layer sealing structure (the micro-channel copper substrate / Mo-Cu transition layer / AlN ceramic ring) is combined with a double-channel sealing interface, so that a cooling liquid is prevented from leaking to pollute an optical path. According to the invention, the temperature difference is less than 2 DEG C, the wavelength drift is less than 0.1 nm, the OHx spectrum detection precision and the system environment adaptability are obviously improved, and the method is suitable for long-term stable operation at an extreme temperature (-40 DEG C to 50 DEG C).

Description

Technical Field

[0001] The present invention belongs to the technical field of high-energy slab lasers, and in particular relates to a high-energy slab laser heat dissipation system for OHx detection. Background Art

[0002] OHx radicals (such as OH, HO2, etc.) are key intermediates in atmospheric chemistry, and their concentration monitoring is of great significance for the study of atmospheric pollution, photochemical reactions and climate change. Lasers, as the core components of high-precision detection systems, play an important role in environmental monitoring, scientific research experiments and other fields. Among them, high-energy slab lasers are particularly suitable for atmospheric component monitoring scenarios such as OHx free radical detection due to their high power output, excellent beam quality and stability. However, as the output energy of lasers continues to increase (such as hundreds of watts to kilowatts), the waste heat generated inside them also increases. If the heat dissipation efficiency is insufficient, the temperature of the laser crystal will increase, causing problems such as thermal lens effect, beam distortion, wavelength drift, etc., which will seriously affect the detection accuracy and laser life. Therefore, an efficient and reliable heat dissipation system is the key to ensuring the long-term stable operation of high-energy slab lasers. High-energy slab lasers generate high-density heat flux when working (the heat load per unit area can reach hundreds of W / cm 2 ), laser wavelength stability requirements are high (±0.1°C). Inefficient or uneven heat dissipation can lead to increased temperature gradients in the gain medium, triggering thermal lensing, laser wavelength drift (e.g., wavelength shift > 0.5nm), beam distortion, and even crystal fracture. Therefore, lasers used for OHx detection often operate outdoors or in extreme environments, placing higher demands on the compactness and environmental adaptability of the cooling system.

[0003] Currently, high-energy slab lasers primarily utilize liquid cooling (e.g., water cooling or microchannel cooling). Water-cooling solutions often employ a single series or parallel water-cooling structure. While series water cooling ensures that the cooling medium flows through all heat-generating units, it suffers from high flow resistance and significant pressure drop. This can lead to insufficient heat dissipation at the far end, creating a temperature gradient, particularly in high-power lasers. While a simple parallel structure can reduce flow resistance, it can lead to localized overheating due to uneven flow distribution. Flow control valves are often used to distribute flow, but these have numerous drawbacks, such as delayed dynamic response, difficulty matching transient heat loads, pressure disturbances, seal failure risks, and microchannel particulate contamination.

[0004] The core pump source of the high-energy slab laser is a semiconductor laser (hereinafter referred to as diode), and the heat load per unit area can reach hundreds of W / cm 2, and high temperature uniformity (±0.1°C). Existing technologies, which aim to improve performance by optimizing flow channel design (such as microchannel cooling) or adding auxiliary heat dissipation components (such as thermoelectric coolers), still have many drawbacks. Traditional heat dissipation solutions suffer from the following issues: 1) Insufficient temperature uniformity: Conventional microchannel structures (such as parallel straight grooves) can easily lead to uneven coolant flow, causing local hot spots, which affect laser beam quality and fail to meet the requirements for efficient heat dissipation under high-density heat flux. 2) Excessive flow resistance (pressure drop > 1 MPa): Undersized microchannels or improper flow channel design increase pumping power consumption and reduce system energy efficiency. 3) The conflict between structural strength and heat dissipation efficiency: Overcrowding microchannels can reduce laser structural strength, while overly wide channels reduce heat dissipation efficiency. 4) Poor environmental adaptability: Under extreme temperature conditions, traditional microchannel cooling can fail due to scaling, clogging, or decreased heat exchange efficiency. Therefore, a new heat dissipation architecture that balances efficient temperature uniformity, low flow resistance, and engineering feasibility is urgently needed to meet the stringent requirements of high-energy slab lasers in applications such as OHx detection.

[0005] Chinese patent CN116111427A proposes a water-cooling heat dissipation system for high-energy, high-repetition-rate slab lasers. The optical system compartment and the water system compartment are separated to protect the optical components. Chinese patent CN2247531367 proposes a crystal microchannel heat sink structure for double-end end-pumped slab laser amplifiers. The microchannel heat sink unit improves cooling efficiency and reduces the impact of temperature on laser output power and beam quality.

[0006] Chinese patent CN222720852U proposes a high-power heat sink for laser devices that uses phase change materials and heat conducting tapes to store and conduct heat. The above patented heat dissipation systems cannot meet the requirements of high-density heat flow (heat load per unit area can reach hundreds to thousands of W / cm 2 ) under the requirements of efficient heat dissipation, low flow and low pressure drop, reasonable proportional distribution of flow and compact size.

[0007] Traditional heat dissipation technology has the disadvantages of insufficient heat dissipation efficiency, poor temperature uniformity, and low water channel sealing reliability. It is difficult to meet the high-efficiency heat dissipation requirements of large-energy slab lasers. A more efficient heat dissipation solution is urgently needed to improve laser reliability. In order to solve the above technical problems, the present invention provides a high-energy slab laser heat dissipation system for OHx detection. Through a series-parallel liquid cooling architecture, microchannel topology optimization, and high-reliability sealing technology, it breaks through the heat dissipation bottleneck of large-energy slab lasers in OHx detection and achieves high-efficiency heat dissipation requirements (>500W / cm2) under low pressure drop (<0.2MPa) and small flow rate (<6L / min). 2), temperature uniformity (temperature difference <2°C) and wavelength stability (drift <0.1nm), significantly improving OHx detection accuracy, system compactness and long life, meeting the needs of harsh environments. The series-parallel combination of water-cooling architecture The main channel series ensures low flow requirements (flow <6L / min), and the branches are connected in parallel to ensure that the total pressure drop is reduced to <0.2MPa, and the pump power consumption is reduced by 40%. And through the gradient design of the flow channel cross-section, the flow balance of the parallel branches is achieved (deviation <5%) to avoid local overheating. The microchannel combined with the topological optimization flow channel design concept (tens to hundreds of microns) not only increases the heat exchange area, but also reduces the deposition of particulate matter, significantly improves the heat dissipation efficiency, and can withstand >500 W / cm 2 The microchannel structure achieves uniform flow distribution, minimizes pressure drop, and avoids local overheating, making it ideal for cooling the long strip gain medium of slab lasers. The water cooling system ensures laser wavelength stability (drift < 0.1 nm), significantly improving OHx spectral detection sensitivity. Summary of the Invention

[0008] In order to solve the technical problems described in the background, the present invention proposes a high-energy slab laser heat dissipation system for OHx detection.

[0009] The technical solution of the present invention is as follows:

[0010] A high-energy slab laser cooling system for OHx detection, comprising:

[0011] The series-parallel liquid cooling architecture includes a series main channel and parallel branches. The main channel flow rate is less than 6L / min and the total pressure drop is less than 0.2MPa.

[0012] Microchannel topology optimization flow channel, optimize microchannel layout through CFD simulation, and match heat source distribution;

[0013] The multi-layer composite sealing structure consists of a microchannel copper substrate, a Mo / Cu composite transition layer, and an AlN ceramic sealing ring connected by active metal brazing;

[0014] Double-pass sealing interface, including main seal and inert gas purge chamber;

[0015] Water distributor, return seat, sleeve and quick-insert self-locking joints achieve balanced flow distribution and compact layout.

[0016] In the above technical solution, the series-parallel liquid cooling architecture includes:

[0017] The heat dissipation water path of the continuous single-frequency OPO module is connected in series with the heat dissipation water path of the 1064nm module;

[0018] The diode cooling water path and the laser crystal cooling water path are connected in series, with two groups in total;

[0019] Three sets of series water channels are connected in parallel, and the flow channel cross-section is designed to be gradual.

[0020] In the above technical solution, the channel size of the microchannel topology optimization flow channel is tens to hundreds of microns, and the heat flux density is greater than 500W / cm 2 , temperature uniformity ±0.1℃.

[0021] In the above technical solution, the multi-layer composite sealing structure is connected by Ag-Cu-Ti solder, and a Mo / Cu transition layer is provided between the ceramic sealing ring and the copper substrate.

[0022] In the above technical solution, the coolant is deionized water, and the water pipeline is installed with a self-cleaning filtration system and a deionization filter element.

[0023] In the above technical solution, the mounting base plate is made of copper and has water channels directly processed thereon, and the thermal control module is detachably connected to the high-energy slab laser frame.

[0024] In the above technical solution, the diode heat dissipation water path adopts a microchannel structure, and the laser crystal heat dissipation water path adopts a macrochannel structure.

[0025] In the above technical solution, the optical cavity and the water system compartment are designed to be separated, and a gas adsorption layer is provided at the interface.

[0026] In the above technical solution, the temperature difference of the heat dissipation water path is less than 2° C., and the laser wavelength drift is less than 0.1 nm.

[0027] In the above technical solution, the operating environment temperature of the system is -40°C to 50°C, and the coolant flow channel adopts passivation treatment and quick-insert self-locking joints.

[0028] Beneficial effects:

[0029] 1. Traditional heat dissipation technology has the problems of insufficient heat dissipation efficiency, poor temperature uniformity, and low water channel sealing reliability. It is difficult to meet the high-efficiency heat dissipation requirements of large-energy slab lasers. A more efficient heat dissipation solution is urgently needed to improve laser reliability. In order to solve the above technical problems, the present invention provides a high-energy slab laser heat dissipation system for OHx detection. By combining a series-parallel liquid cooling architecture, microchannel topology optimization and high-reliability sealing technology, it breaks through the heat dissipation bottleneck of large-energy slab lasers in OHx detection and achieves high-efficiency heat dissipation requirements (>500W / cm2) under low pressure drop (<0.2MPa) and small flow rate (<6L / min). 2), temperature uniformity (temperature difference <2°C) and wavelength stability (drift <0.1nm), significantly improving OHx detection accuracy, system compactness, and longevity. The high-energy slab laser water-cooling system of this invention utilizes a series-parallel combination of a water-cooling rack and a topology-optimized flow channel design. A flow resistance matching design (such as a CFD-optimized asymmetric flow channel) replaces valve regulation, eliminating dynamic hysteresis, pressure disturbances, and the risk of seal failure. The flow resistance of each branch is proportional to the heat load, meeting low flow and low pressure drop requirements. It also enables on-demand distribution of coolant to different areas, achieving heat dissipation uniformity of ±0.1°C. The series connection of the main channel ensures low flow requirements (flow rate <6L / min), while the parallel connection of the branches reduces the total pressure drop to <0.2MPa, reducing pump power consumption by 40%. Furthermore, a gradient flow channel cross-section design achieves flow balance (deviation <5%) in the parallel branches, preventing local overheating.

[0030] 2. The core pump source of the high-energy slab laser is a semiconductor laser (hereinafter referred to as diode). The main heating elements are diodes and laser crystals. The heat load per unit area can reach hundreds of W / cm 2 , and the temperature uniformity is high (±0.1℃). Traditional liquid cooling or heat pipe solutions can no longer meet the heat dissipation requirements. Existing technologies improve performance through straight-groove microchannel flow channel design or adding auxiliary heat dissipation components (such as thermoelectric coolers), but there are still many disadvantages, such as insufficient temperature uniformity, excessive flow resistance, and microchannel blockage. The high heat flux density element in the high-energy slab laser heat dissipation system of this application adopts a microchannel combined with a topologically optimized flow channel design. The microchannel layout is optimized through CFD simulation to match the laser heat source distribution (such as dense in the center and sparse at the edge), which not only increases the heat exchange area; the water channel is designed with a self-cleaning filtration system to reduce particle deposition and significantly improve heat dissipation efficiency, meeting the stringent requirements of high-energy slab lasers in applications such as OHx detection, ensuring the wavelength stability of the high-energy slab laser (drift <0.1nm), and greatly improving the sensitivity of OHx spectral detection.

[0031] 3. Traditional water-cooling system sealing methods (such as rubber O-rings) are prone to leakage due to long-term vibration or thermal deformation, and coolant volatilization can contaminate the optical path (especially water vapor, which can interfere with the OHx spectrum). The present invention utilizes a multi-layer composite sealing structure. From the inside out, the structure consists of a microchannel copper substrate, a Mo / Cu composite transition layer, and an AlN ceramic sealing ring. The ceramic ring, the microchannel copper substrate, and the Mo / Cu composite transition layer are connected by active metal brazing (Ag-Cu-Ti brazing filler metal) to form an airtight interface. All sealing interfaces utilize a double-pass seal (primary seal + inert gas purge chamber) to ensure that leaking materials do not contact the optical path. This protects the laser's internal optical components, reduces corrosion, and improves the stability and reliability of the cooling system. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1This is a top view of a high-energy slab laser;

[0033] Figure 2 This is a bottom view of the high-energy slab laser;

[0034] Figure 3 This is an isometric view of a high-energy slab laser;

[0035] Figure 4 The three-dimensional structure diagram of the heat dissipation channel of the high-energy slab laser;

[0036] Figure 5 This is a top view of the heat dissipation water channel structure of the high-energy slab laser;

[0037] Figure 6 This is a top view of the diode heat dissipation water channel structure;

[0038] Figure 7 This is a cross-sectional view of the sealing structure of the heat dissipation water channel of a high-energy slab laser.

[0039] Among them: 1-high energy slab laser frame, 2-continuous single-frequency OPO module mounting base plate, 3-1064nm continuous single-frequency module mounting base plate, 4-amplifier module mounting base plate, 5-water inlet quick-plug self-locking connector, 6-water outlet quick-plug self-locking connector, 7-optical cavity air inlet, 8-optical cavity air outlet; 9-water divider, 10-flow meter, 11-water return seat, 12-water pipe, 13-continuous single-frequency OPO module heat dissipation water path structure, 14-1064nm continuous single-frequency module heat dissipation water path structure, 15-diode heat dissipation water path structure, 16-laser crystal heat dissipation water path structure, 17-sleeve, 18-water inlet, 19-water outlet, 20-rubber pad, 21-microchannel copper substrate, 22-Mo / Cu composite material transition layer, 23-AlN ceramic sealing ring. DETAILED DESCRIPTION

[0040] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. However, the following embodiments are intended only to explain the present invention, and the scope of protection of the present invention should include the entire contents of the claims. Moreover, through the description of the following embodiments, those skilled in the art can fully implement the entire contents of the claims of the present invention.

[0041] Example

[0042] This embodiment provides a high-energy slab laser cooling system for OHx detection. By combining a series-parallel liquid cooling architecture, microchannel topology optimization, and high-reliability sealing technology, it achieves efficient heat dissipation requirements under low pressure drop and small flow, temperature uniformity, and wavelength stability requirements, significantly improving OHx detection accuracy. The water cooling system ensures laser wavelength stability, greatly improving the sensitivity of OHx spectral detection. Figure 1 、 Figure 2and Figure 3 As shown in the figure, the heat dissipation water path structure of the high energy slab laser includes the following components:

[0043] High-energy slab laser frame 1, continuous single-frequency OPO module mounting base plate 2, 1064nm continuous single-frequency module mounting base plate 3, amplifier module mounting base plate 4, water inlet quick-plug self-locking joint 5, water outlet quick-plug self-locking joint 6, optical cavity air inlet 7, optical cavity air outlet 8; water divider 9, flow meter 10, return water seat 11, water pipe 12, continuous single-frequency OPO module heat dissipation water path structure 13, 1064nm continuous single-frequency module heat dissipation water path structure 14, diode heat dissipation water path structure 15, laser crystal heat dissipation water path structure 16, sleeve 17, water inlet 18, water outlet 19, rubber pad 20, microchannel copper substrate 21, Mo / Cu composite material transition layer 22, AlN ceramic sealing ring 23.

[0044] The continuous single-frequency OPO module mounting base plate 2, the 1064nm continuous single-frequency module mounting base plate 3 and the amplifier module mounting base plate 4 are all mounted on the large energy slab laser frame 1. The water inlet quick-plug self-locking joint 5 and the water outlet quick-plug self-locking joint 6 are both mounted on the front end of the large energy slab laser frame 1. The optical cavity air inlet 7 and the optical cavity air outlet 8 are respectively located on both sides of the large energy slab laser frame 1. The continuous single-frequency OPO module mounting base plate 2 is directly processed with a water channel structure, such as the continuous single-frequency OPO module heat dissipation water channel structure 13. The 1064nm continuous single-frequency module mounting base plate 3 is directly processed with a water channel structure, such as the 1064nm continuous single-frequency module heat dissipation water channel structure 14. Figure 4 、 Figure 5 and Figure 6 As shown, both the diode and the laser crystal are water-cooled, and the heat dissipation water path structure configuration is as follows: diode heat dissipation water path structure 15, and laser crystal heat dissipation water path structure 16. Figure 7 As shown, the water channel of the high-energy slab laser adopts a multi-layer composite sealing structure. The water divider 9 and the return water seat 11 are installed at the bottom of the high-energy slab laser frame 1. The water channel in the high-energy slab laser frame 1 is connected to the continuous single-frequency OPO module mounting base 2, the 1064nm continuous single-frequency module mounting base 3, and the amplifier module mounting base 4 by a sleeve. A rubber pad 20 is installed at one end of the sleeve, and the other end of the sleeve is sealed with a multi-layer composite sealing structure. The multi-layer composite sealing structure is a microchannel copper substrate 21, a Mo / Cu composite material transition layer 22, and an AlN ceramic sealing ring 23.

[0045] This embodiment provides an implementation scheme of a high-energy slab laser heat dissipation system for OHx detection, as follows:

[0046] The operating environment temperature of high energy slab laser is -40℃ to 50℃;

[0047] The core pump source of the high-energy slab laser is a semiconductor laser, and the main heating elements are diodes and laser crystals. The heat load per unit area can reach hundreds of W / cm 2 , and the temperature uniformity is high (±0.1℃). The main thermal control modules of the high-energy slab laser include a continuous single-frequency OPO module, a 1064nm continuous single-frequency module, two groups of diodes, and two groups of laser crystals. Each thermal control module is detachably connected to the high-energy slab laser frame, which is convenient for assembly and debugging. The continuous single-frequency OPO module mounting base, the 1064nm continuous single-frequency module mounting base, and the amplifier module mounting base are all made of copper, and water channels are directly machined into the mounting base structure. The diodes and laser crystals are cooled by water. Among them, the diode heat dissipation flow channel is a microchannel structure, and the laser crystal heat dissipation flow channel is a macrochannel structure. Only the water distributor and the return water seat are connected to the high-energy slab laser frame through water pipes. The water system of the whole machine is a sealed flow channel, and the water inlet and outlet of the whole machine flow channel are installed with quick-plug self-locking joints (made of polyoxymethylene POM). The quick-plug self-locking joints have a self-locking function. The water pipe is made of PA12 nylon (black acetal), the flow channel coolant is deionized water, the thermal control module mounting base is passivated, and a deionized filter element is installed in the water pipe to prevent corrosion caused by long-term water flow in the pipe and to prevent dirt from increasing the flow resistance and pressure drop in the water channel.

[0048] The high-energy slab laser cooling system utilizes a combination of series and parallel waterway architecture. Specifically, the cooling waterway for the CW single-frequency OPO module and the 1064nm CW single-frequency module are connected in series, while the diode cooling waterway and the laser crystal cooling waterway are also connected in series (two groups in total). These three waterway structures are then connected in parallel. The series connection of the main channel ensures low flow requirements, while the parallel connection of the branches reduces the total pressure drop to <0.2MPa, reducing pump power consumption by 40%. Furthermore, a gradient design of the flow channel cross-section ensures flow balance in the parallel branches (deviation <5%), preventing local overheating.

[0049] The optical layout of the high-energy slab laser determines that the length of the water pipe cannot be changed. In order to reduce costs and facilitate processing, the water pipe diameters of the high-energy slab laser frame and the continuous single-frequency OPO module mounting base, 1064nm continuous single-frequency module mounting base, and single-frequency amplifier module mounting base are designed to be the same. The entire water system adjusts the flow and pressure drop of each thermal control module by changing the sleeve diameter and CFD topology optimization, and realizes the on-demand distribution of coolant in different areas. The heat dissipation uniformity reaches ±0.1℃, achieving high-efficiency heat dissipation requirements (>500W / cm2) under low pressure drop (<0.2MPa) and small flow (<6L / min). 2 ); temperature uniformity (temperature difference <2°C) and wavelength stability (drift <0.1nm). A gradient flow channel design achieves flow balance in parallel branches (deviation <5%), preventing local overheating.

[0050] The core pump source of the high-energy slab laser is a diode, a high-heat flux component. The diode of the present invention adopts a microchannel combined with topologically optimized flow channel design. The microchannel layout is optimized through CFD simulation to match the laser heat source distribution (such as dense center and sparse edge). The microchannel combined with the topologically optimized flow channel design concept (tens to hundreds of microns) not only increases the heat exchange area, but also reduces particle deposition, significantly improving the heat dissipation efficiency and can withstand >500 W / cm 2 The microchannel structure also achieves uniform flow distribution, reduces pressure drop, and avoids local overheating. It combines high-efficiency temperature uniformity with low flow resistance, meeting the stringent requirements of high-energy slab lasers in applications such as OHx detection. It also ensures wavelength stability (drift < 0.1 nm) and significantly enhances OHx spectral detection sensitivity.

[0051] The high-energy slab laser's waterway is designed with anti-contamination and sealing features in mind. The waterway seal utilizes a multi-layer composite sealing structure. From the inside out, the structure comprises a microchannel copper substrate, a Mo / Cu composite transition layer, and an AlN ceramic sealing ring. The ceramic ring, the microchannel copper substrate, and the Mo / Cu composite transition layer are connected via active metal brazing (Ag-Cu-Ti brazing filler metal), forming an airtight interface. All sealed interfaces utilize a dual-pass seal (primary seal + inert gas purge chamber) to ensure zero contact between leaked materials and the optical path. The optical compartment and waterway system compartment are separated, improving overall thermal stability and preventing coolant leakage and contamination of optical components. A vapor adsorption layer (molecular sieve + activated carbon) is placed between the coolant flow channel and the high-energy slab laser's water and optical path to capture potentially leaking volatile media, protecting the laser's internal optical components, reducing corrosion, and improving the stability and reliability of the heat dissipation system.

[0052] The foregoing description is intended only to provide specific embodiments of the present invention, which will enable those skilled in the art to understand and implement the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not intended to be limited to the embodiments shown herein, but rather to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A high-energy slab laser cooling system for OHx detection, characterized in that: include: The series-parallel liquid cooling architecture includes a series main channel and parallel branches. The main channel flow rate is less than 6L / min and the total pressure drop is less than 0.2MPa. Microchannel topology optimization flow channel, optimize microchannel layout through CFD simulation, and match heat source distribution; The multi-layer composite sealing structure consists of a microchannel copper substrate, a Mo / Cu composite transition layer, and an AlN ceramic sealing ring connected by active metal brazing; Double-pass sealing interface, including main seal and inert gas purge chamber; Water distributor, return seat, sleeve and quick-insert self-locking joints achieve balanced flow distribution and compact layout.

2. The system according to claim 1, wherein: The series-parallel liquid cooling architecture includes: The heat dissipation water path of the continuous single-frequency OPO module is connected in series with the heat dissipation water path of the 1064nm module; The diode cooling water path and the laser crystal cooling water path are connected in series, with two groups in total; Three sets of series water channels are connected in parallel, and the flow channel cross-section is designed to be gradual.

3. The system according to claim 1, wherein: The channel size of the microchannel topology optimized flow channel is tens to hundreds of microns, and the heat flux density is greater than 500W / cm 2 , temperature uniformity ±0.1℃.

4. The system according to claim 1, wherein: The multi-layer composite sealing structure is connected by Ag-Cu-Ti solder, and a Mo / Cu transition layer is provided between the ceramic sealing ring and the microchannel copper substrate.

5. The system according to claim 1, wherein: The coolant is deionized water, and the water pipeline is installed with a self-cleaning filtration system and a deionized filter element.

6. The system according to claim 1, wherein: The installation base plate is made of copper and has water channels directly processed thereon. The thermal control module is detachably connected to the high-energy slab laser frame.

7. The system according to claim 1, wherein: The diode heat dissipation water path adopts a microchannel structure, and the laser crystal heat dissipation water path adopts a macrochannel structure.

8. The system according to claim 1, wherein: The optical cavity and the water system compartment are designed to be separated, and a gas adsorption layer is provided at the interface.

9. The system according to claim 1, wherein: The temperature difference of the heat dissipation water path is less than 2° C., and the laser wavelength drift is less than 0.1 nm.

10. The system according to claim 1, wherein: The operating environment temperature of the system is -40°C to 50°C, and the coolant flow channel adopts passivation treatment and quick-insert self-locking joints.

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