Macro-micro combined electrode based on MEMS technology and preparation method thereof

Abstract

The invention provides a macro-micro combined electrode based on an MEMS technology and a preparation method of the macro-micro combined electrode. The macro-micro combined electrode based on the MEMS technology comprises a deep brain stimulation (DBS) macro electrode which comprises a non-metal supporting sleeve and at least one metal stimulation contact, the metal stimulation contacts are arranged on the surface of the first end portion of the non-metal supporting sleeve at intervals, and the first end portion is one end deep into the deep brain; the flexible micro-nano electrode array based on the MEMS technology comprises a plurality of detection units which are arranged in parallel, each detection unit comprises a detection site and a wire, the detection sites are all attached to the surface of a first end part, each detection site is used for detecting an electric signal of a deep brain part, each wire is connected with the corresponding detection site, and each detection site is used for detecting the electric signal of the deep brain part. Each wire extends in the direction, away from the first end, of the non-metal supporting sleeve in the mode that the wire is attached to the surface of the non-metal supporting sleeve or penetrates through the interior of the non-metal supporting sleeve.

Description

Technical Field

[0001] The present invention relates to the field of brain-computer interface technology, and in particular to a macro-micro combined electrode based on MEMS technology and a preparation method thereof. Background Art

[0002] Neural electrodes are effective tools for detecting neural signals. In the treatment of some psychiatric disorders, existing medications and traditional surgical methods often fail to accurately localize lesions and achieve effective, personalized intervention. Especially during deep brain stimulation (DBS) surgery, accurately identifying and locating disease-related brain regions, and performing meticulous surgical procedures and treatment, are crucial for improving treatment outcomes. Furthermore, existing control methods rely on manual intervention, increasing the difficulty of subsequent patient control. There is an urgent need for electrodes that enable closed-loop control. However, existing technologies are unable to meet the requirements for high-precision detection and more precise neural control. Summary of the Invention

[0003] In view of the need for neural information collection from electrodes for closed-loop regulation of refractory mental illnesses, the present invention provides a macro-micro combined electrode based on MEMS technology and a preparation method thereof.

[0004] On the one hand, the present invention provides a macro-micro combined electrode based on MEMS technology, including: a deep brain stimulation macro electrode, including a non-metallic support sleeve and at least one metal stimulation contact, the metal stimulation contacts are arranged at intervals on the surface of the first end of the non-metallic support sleeve, and the first end is an end that penetrates deep into the brain; a flexible micro-nano electrode array based on MEMS technology, including a plurality of detection units arranged in parallel, each detection unit including a detection site and a wire, the detection sites are attached to the surface of the first end, each detection site is used to detect an electrical signal deep in the brain, each wire is connected to the corresponding detection site, and each wire extends along the non-metallic support sleeve away from the first end in a manner of being attached to the surface of the non-metallic support sleeve or passing through the interior of the non-metallic support sleeve.

[0005] According to an embodiment of the present invention, the non-metallic support sleeve includes a middle portion, and a first slit and a second slit are formed at both ends of the middle portion, respectively. The first slit is located between the middle portion and the first end portion. Each wire passes through the first slit into the interior of the non-metallic support sleeve and passes through the second slit to the outside of the non-metallic support sleeve.

[0006] According to an embodiment of the present invention, at least one third slit is formed on the first end, and each third slit is located on the side of the first slit away from the second slit and on the edge of a different metal stimulation contact. Each wire starts from the connected detection site, enters or exits from the third slit, and then enters the interior of the non-metallic support sleeve from the first slit.

[0007] According to an embodiment of the present invention, each detection site is attached to a metal stimulation contact.

[0008] According to an embodiment of the present invention, the non-metallic support sleeve also includes a second end, and the middle portion is located between the first end and the second end; each detection unit also includes a soldering pad, and each wire is connected to the corresponding soldering pad after passing through the second slit, and the soldering pad is welded to the external extended circuit board and then attached to the surface of the second end.

[0009] According to an embodiment of the present invention, each detection site is attached to the surface of the first end portion via a medical biocompatible material.

[0010] According to an embodiment of the present invention, the medical biocompatible material includes any one of polyethylene glycol, polylactic acid, polylactic-co-glycolic acid, silk protein, biocompatible UV glue, and MED 2000 medical silicone glue, or a combination thereof.

[0011] According to an embodiment of the present invention, the electrical signal includes one or more of an electrophysiological signal, a dopamine electrochemical signal, or a glutamate electrochemical signal.

[0012] According to an embodiment of the present invention, a flexible micro-nano electrode array includes a base insulating layer, at least one signal transmission layer and an encapsulation insulating layer, and a plurality of detection units are located in the signal transmission layer, wherein the materials of the base insulating layer and the encapsulation insulating layer include one or more of polyimide, polyparaxylene, epoxy resin, polylactic acid, polylactic acid-glycolic acid copolymer, SU8, polyethylene terephthalate, polydimethylsiloxane, silicone, and silicone rubber, and the material of the signal transmission layer includes any one of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum-iridium alloy, titanium alloy, graphite, carbon nanotubes, and PEDOT, or a combination thereof.

[0013] On the other hand, the present invention also provides a method for preparing a macro-micro combined electrode based on MEMS technology, including: obtaining a deep brain stimulation macroelectrode, the deep brain stimulation macroelectrode includes a non-metallic support sleeve and at least one metal stimulation contact, the metal stimulation contacts are arranged at intervals on the surface of the first end of the non-metallic support sleeve, and the first end is an end that penetrates deep into the brain; obtaining a flexible micro-nano electrode array based on MEMS technology, the flexible micro-nano electrode array includes a plurality of detection units arranged in parallel, each detection unit includes a detection site and a wire, each detection site is used to detect an electrical signal deep in the brain, and each wire is connected to a corresponding detection site; attaching the detection site to the surface of the first end, and attaching each wire to the surface of the non-metallic support sleeve or penetrating into the interior of the non-metallic support sleeve along the direction of the non-metallic support sleeve away from the first end.

[0014] The macro-micro combined electrode based on MEMS technology and its preparation method proposed in the present invention have at least the following beneficial effects compared with the prior art:

[0015] 1) Flexible electrodes fabricated using MEMS technology can provide finer spatial resolution and lower rigidity, enabling closer contact with DBS macroelectrodes and brain tissue, improving the biocompatibility of neural electrodes. This allows for more precise acquisition and analysis of neuroelectrophysiological signals, providing real-time feedback for neuromodulation, and supporting adaptive closed-loop therapy at the cellular level.

[0016] 2) By combining deep brain DBS macroelectrodes and flexible neural micro-nanoelectrode arrays based on MEMS technology on the same device, it is possible to simultaneously record multi-channel neural information with high spatiotemporal resolution while achieving deep brain DBS stimulation and regulation;

[0017] 3) By attaching the wires of the flexible micro-nano electrode array to the surface of the non-metallic support sleeve or passing them through the inside of the non-metallic support sleeve, damage to the middle wire portion of the flexible micro-nano electrode array during surgery can be avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above contents and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0019] Figure 1 Schematically shows a cross-sectional view of a macro-micro combined electrode according to a first embodiment of the present invention;

[0020] Figure 2 Schematically shows the distribution of detection sites of the macro-micro combined electrode according to an embodiment of the present invention;

[0021] Figure 3A cross-sectional view schematically shows a macro-micro combined electrode according to a second embodiment of the present invention;

[0022] Figure 4 A schematic diagram of the structure of a macro-micro combined electrode according to a second embodiment of the present invention is shown;

[0023] Figure 5 A cross-sectional view schematically shows a macro-micro combined electrode according to a third embodiment of the present invention;

[0024] Figure 6 Schematically shows the structure of a macro-micro combined electrode according to a third embodiment of the present invention;

[0025] Figure 7 A schematic diagram showing the structure of a flexible micro-nano electrode array based on MEMS technology according to an embodiment of the present invention is shown;

[0026] Figure 8 The flowchart of the method for preparing the macro-micro combined electrode according to an embodiment of the present invention is schematically shown.

[0027] Description of reference numerals:

[0028] 10: DBS macroelectrode; 11: Non-metallic support sleeve; 12: Metal stimulation contact; 20: Flexible micro-nanoelectrode array; 21: Detection site; 22: Wire; 23: Pad; 31: First slit; 32: Second slit; 33: Third slit; 40: Extended circuit board; 71: Base insulation layer; 72: Signal transmission layer: 73: Encapsulation insulation layer. DETAILED DESCRIPTION

[0029] The following describes several preferred embodiments of the present invention with reference to the accompanying drawings to make its technical content clearer and easier to understand. The present invention can be embodied in many different forms of embodiments, and the scope of protection of the present invention is not limited to the embodiments mentioned herein.

[0030] It should be noted that similar or identical parts are numbered the same in the drawings and descriptions. In the drawings, embodiments are labeled for simplicity or convenience. Furthermore, elements or implementations not shown or described in the drawings are known to those of ordinary skill in the art. Furthermore, while examples of parameters with specific values ​​may be provided herein, the parameters do not need to be exactly equal to the corresponding values, but may approximate the corresponding values ​​within acceptable error tolerances or design constraints.

[0031] When expressions such as "at least one of A, B, and C, etc." are used, they should generally be interpreted in accordance with the meaning commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0032] Figure 1 Schematically shows a cross-sectional view of a macro-micro combined electrode according to a first embodiment of the present invention, Figure 2 The diagram schematically shows the distribution of detection sites of the macro-micro combined electrode according to an embodiment of the present invention.

[0033] like Figure 1 As shown, the macro-micro combined electrode based on MEMS technology may include a DBS macro electrode 10 and a flexible micro-nano electrode array 20 based on MEMS technology. In other words, the flexible micro-nano electrode array 20 is prepared based on a micro-electromechanical system (MEMS). Electrode devices based on MEMS technology are highly integrated, miniaturized, and multifunctional, and can achieve accurate recording of neural electrical activity at a high-density cellular level on a single device. Flexible electrodes prepared using MEMS technology can provide more detailed spatial resolution and have lower rigidity, enabling closer contact with electrodes and brain tissue, thereby improving the biocompatibility of neural electrodes. Microsystem chips based on MEMS technology can achieve higher-precision neuroelectrophysiological signal acquisition and analysis, provide real-time feedback for neural regulation, and support adaptive closed-loop treatment at the cellular level.

[0034] Continue reading Figure 1 , the DBS macroelectrode 10 may include a non-metallic support sleeve 11 and at least one metal stimulation contact 12. In other words, the number of metal stimulation contacts 12 may be one or more. When there are multiple metal stimulation contacts 12, the metal stimulation contacts 12 are arranged at intervals on the surface of the first end of the non-metallic support sleeve 11, and the first end is an end that penetrates deep into the brain (not shown in the figure). The metal stimulation contacts 12 can provide neural electrical stimulation at different locations when the DBS macroelectrode 10 is implanted deep in the brain. For example, Figure 1 As shown, there may be eight metal stimulation contacts 12 , which are arranged at fixed intervals at the end of the non-metallic support sleeve 11 , thereby achieving nerve stimulation at eight different positions.

[0035] like Figure 1 and Figure 2 As shown, the flexible micro-nano electrode array 20 may include a plurality of detection units arranged in parallel, each of which may include a detection site 21 and a wire 22 .

[0036] The detection site 21 can be attached to the surface of the first end portion, and after the metal stimulation contact 12 generates neural electrical stimulation, the neural electrical signals of different stimulation sites are stably recorded. In some embodiments, the detection site 21 can be attached to the metal stimulation contact 12 of the first end portion. In other embodiments, the detection site 21 can also be attached to an area of ​​the first end portion that is not covered by the metal stimulation contact 12, such as the area between two adjacent metal stimulation contacts 12. Alternatively, some detection sites 21 can be attached to the metal stimulation contact 12, while some detection sites 21 are not attached to the metal stimulation contact 12, which can be determined according to the specific situation.

[0037] In some embodiments, the detection site 21 can be attached to the surface of the first end portion by a medical biocompatible material. For example, the medical biocompatible material can be any one of polyethylene glycol, polylactic acid, polylactic-co-glycolic acid, silk protein, biocompatible UV glue, MED 2000 medical silicone glue, or a combination thereof.

[0038] The neural electrical signals detected by different detection sites 21 can be the same neural electrical signal or different neural electrical signals. The neural electrical signal can be an electrophysiological signal, a dopamine electrochemical signal or a glutamate electrochemical signal. In some embodiments, the detection site 21 can be made of platinum black, PEDOT / PSS, PEDOT / DSS, PPy, carbon nanotubes, IrO x , hydrogel, and other materials for detecting electrophysiological signals. Furthermore, Nafion can be modified at the detection sites 21 for detecting electrophysiological signals to detect dopamine electrochemical signals, or bioprotein molecules such as glutamate oxidase can be modified to detect glutamate electrochemical signals. In this way, different detection sites 21 can achieve a variety of different neural electrical signal detection.

[0039] like Figure 1 As shown, each wire 22 can be attached to the surface of the non-metallic support sleeve 11 and extend along the non-metallic support sleeve 11 in a direction away from the first end. In other words, in this embodiment, both the detection sites 21 of the flexible micro-nano electrode array 20 and the wires 22 can be attached to the surface of the DBS macroelectrode 10. Thus, securing the wires 22 to the non-metallic support sleeve 11 can prevent damage to the intermediate wire portion of the flexible micro-nano electrode array 20 during surgery.

[0040] In some embodiments, each conductive wire 22 may extend along the non-metallic support sleeve 11 in a direction away from the first end portion in a manner of passing through the interior of the non-metallic support sleeve 11 . Figure 3 Schematically shows a cross-sectional view of a macro-micro combined electrode according to a second embodiment of the present invention, Figure 4The structure of the macro-micro combined electrode according to the second embodiment of the present invention is schematically shown. Figure 3 ) and the first embodiment ( Figure 1 ) mainly lies in the different positional relationship between the conductor 22 and the non-metallic support sleeve 11, and the same components are numbered the same.

[0041] like Figure 3 As shown, after the wire 22 is connected to the detection site 21, it passes through the interior of the non-metallic support sleeve 11. Figure 4 As shown, the wire 22 in the middle of the non-metallic support sleeve 11 is invisible from the outside. Compared to being attached to the surface of the non-metallic support sleeve 11, the wire 22 runs inside the non-metallic support sleeve 11, reducing the risk of the attachment material failing and falling off, thereby better preventing damage to the middle wire portion of the flexible micro-nano electrode array 20 during surgery.

[0042] As an example, the conductor 22 can be passed through the inside of the non-metallic support sleeve 11 by opening a hole. Figure 3 As shown, a first slit 31 can be used to guide the wire into the interior of the non-metallic support sleeve 11. The first slit 31 is located between the middle portion and the first end portion of the non-metallic support sleeve 11. It is understood that the size of the first slit 31 should not be too large to minimize any impact on the structure of the non-metallic support sleeve 11. To facilitate the passage of the wire 22 through the slit, a guide wire (e.g., a tungsten wire) can be used.

[0043] The macro-micro combined electrode of this embodiment utilizes a flexible neural micro-nano electrode array embedded or surface-attached with a deep brain DBS macroelectrode. This ensures that the integrated macro-microelectrode can simultaneously achieve deep brain stimulation while also recording high-resolution cellular-level neural signals, facilitating closed-loop adaptive control of major brain neurological diseases. The embedded flexible micro-nano electrode array prevents damage to the intermediate conductors of the flexible micro-nano electrode array during surgery, ensuring the effectiveness of the macro-micro combined electrode.

[0044] Figure 5 Schematically shows a cross-sectional view of a macro-micro combined electrode according to a third embodiment of the present invention, Figure 6 The structure of the macro-micro combined electrode according to the third embodiment of the present invention is schematically shown.

[0045] like Figure 3 、 Figure 5 and Figure 6As shown, in some embodiments, after the wire 22 passes through the first slit 31 into the interior of the non-metallic support sleeve 11, a second slit 32 may be formed in the middle portion of the non-metallic support sleeve 11 to guide the wire 22 out of the interior of the non-metallic support sleeve 11. The first slit 31 and the second slit 32 may have the same size. In practice, the wire 22 may be guided through the first slit 31 and then through the second slit 32 using a lead wire (e.g., a tungsten wire), thereby reducing the difficulty of passing the wire 22 through the slits 31 and 32.

[0046] like Figure 5 and Figure 6 As shown, in some embodiments, after the wire 22 is led out of the non-metallic support sleeve 11, it can be soldered to the pad 23, and the pad 23 can be located at the second end of the non-metallic support sleeve 11. The second end is opposite to the first end across the middle portion. The pad 23 can be soldered to an external extended circuit board 40. The extended circuit board 40 includes but is not limited to PCB and FPC, and the soldering method includes but is not limited to flip-chip soldering and anisotropic conductive bonding (ACF bonding). The extended circuit board 40 can be attached to the surface of the DBS macroelectrode 10, or it can pass through the non-metallic support sleeve 11 like the wire 22 in some embodiments.

[0047] like Figure 5 As shown, in some embodiments, at least one third slit 33 is further formed on the first end of the non-metallic support sleeve 11. Each third slit 33 is located on a side of the first slit 31 away from the second slit 32 and is located at the edge of a different metal stimulation contact 12. Each wire 22 reaches the connected detection site 21, enters or exits through the third slit 33, and then enters the interior of the non-metallic support sleeve 11 through the first slit 31. For example, there may be three side-by-side third slits 33, which can be inserted into the interior of the non-metallic support sleeve 11 through the first third slit 33, then exit the non-metallic support sleeve 11 through the second third slit 33, and then enter the interior of the non-metallic support sleeve 11 through the third third slit 33. In this way, the detection sites 21 at different locations can be distributed to different locations on the first end, and the wire 22 at the first end of the non-metallic support sleeve 11 can be positioned as much as possible inside the non-metallic support sleeve 11 to prevent the wire 22 at the first end from being damaged during surgery.

[0048] Figure 7 The structure of a flexible micro-nano electrode array based on MEMS technology according to an embodiment of the present invention is schematically shown.

[0049] like Figure 7As shown, the flexible micro-nano electrode array 20 may include a base insulating layer 71, at least one signal transmission layer 72, and an encapsulating insulating layer 73, with multiple detection units located in the signal transmission layer 72. The materials of the base insulating layer 71 and the encapsulating insulating layer 73 include one or more of polyimide (PI), polyparaxylene (Parylene), epoxy resin (EP), polylactic acid (PLA), polylactic-co-glycolic acid copolymer, SU8, polyethylene terephthalate (PET), polydimethylsiloxane (PDMS), silicone, and silicone rubber. The material of the signal transmission layer 72 includes any one of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum-iridium alloy, titanium alloy, graphite, carbon nanotubes, PEDOT, or a combination thereof. As an example, the thickness of the flexible micro-nano electrode array 20 may range from 300 nm to 200 μm.

[0050] In some embodiments, the preparation process of the flexible micro-nano electrode array 20 may include the steps of depositing a base film, evaporating a metal layer, stripping, depositing an insulating film, opening a window, deep etching, and releasing the electrode.

[0051] As an example, the specific preparation process of the flexible micro-nano electrode array 20 can be as follows: the silicon wafer is cleaned by oxygen plasma etching before coating; an insulating layer of 200nm-50μm is deposited; a negative photoresist AZ5214 conductive layer is used for photolithography to pattern the metal layer, including oxygen plasma etching to clean impurities on the surface of the insulating layer, AZ5214 lithography, pre-baking, mask exposure, reverse baking to denature the photoresist, flood exposure, NaOH solution development, deionized water cleaning, nitrogen drying, and drying in an oven; oxygen plasma etching to clean excess organic matter on the surface and evaporate the metal layer, the metal layer material includes but is not limited to chromium, gold, silver, carbon and other metals or organic materials; stripping off excess metal; depositing an insulating layer of 200nm-50μm; using positive photoresist AZ4620 to open a window for photolithography patterning, and using oxygen plasma etching for deep etching to expose the detection site; using positive photoresist AZ4903 as a mask, deep etching photolithography to release the electrode and completely remove impurities such as photoresist to complete the electrode preparation.

[0052] Based on the macro-micro combined electrode of the above embodiment, the present invention also provides a method for preparing the macro-micro combined electrode. Figure 8 The flowchart of the method for preparing the macro-micro combined electrode according to an embodiment of the present invention is schematically shown.

[0053] like Figure 8 As shown, the method for preparing the macro-micro combined electrode may include steps S810 to S830.

[0054] In step S810, a deep brain stimulation (DBS) macroelectrode 10 is obtained. DBS macroelectrode 10 includes a non-metallic support sleeve 11 and at least one metallic stimulation contact 12. Metallic stimulation contact 12 is spaced apart and arranged on the surface of a first end of non-metallic support sleeve 11, the end extending deep into the brain.

[0055] In step S820, a flexible micro-nano electrode array 20 based on MEMS technology is obtained. The flexible micro-nano electrode array 20 includes multiple detection units arranged in parallel, each of which includes a detection site 21 and a wire 22. Each detection site 21 is used to detect an electrical signal deep in the brain, and each wire 22 connects to a corresponding detection site 21.

[0056] In step S830, the detection site 21 is attached to the surface of the first end, and each wire 22 is attached to the surface of the non-metallic support sleeve 11 or penetrated into the interior of the non-metallic support sleeve 11 along the direction away from the first end of the non-metallic support sleeve 11.

[0057] Some details of the preparation method of the macro-micro combined electrode can be found in the content of the macro-micro combined electrode above. It should be noted that the preparation method of the macro-micro combined electrode has the same or similar technical features and beneficial effects as the macro-micro combined electrode of the above embodiment, and will not be repeated here.

[0058] All the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A macro-micro combined electrode based on MEMS technology, characterized in that: include: A deep brain stimulation macroelectrode comprises a non-metallic support sleeve and at least one metal stimulation contact, wherein the metal stimulation contact is arranged at intervals on the surface of a first end portion of the non-metallic support sleeve, the first end portion being the end that penetrates deep into the brain, and the metal stimulation contact is used to provide neural electrical stimulation at different locations when the deep brain stimulation macroelectrode is implanted deep in the brain; A flexible micro-nano electrode array based on MEMS technology includes multiple detection units arranged in parallel, each of which includes a detection site and a wire. The detection sites are attached to the surface of the first end. Each detection site is used to detect an electrical signal at the corresponding stimulation site in the deep brain after the metal stimulation contact generates the neural electrical stimulation. The electrical signals detected by the multiple detection sites include one or more electrophysiological signals, dopamine electrochemical signals, or glutamate electrochemical signals. Each wire is connected to the corresponding detection site. Each wire extends along the non-metallic support sleeve away from the first end in a manner of being attached to the surface of the non-metallic support sleeve or passing through the interior of the non-metallic support sleeve. The non-metallic support sleeve includes a middle portion, and a first slit and a second slit are respectively formed at both ends of the middle portion. The first slit is located between the middle portion and the first end. Each wire passes through the first slit into the interior of the non-metallic support sleeve and passes through the second slit to the outside of the non-metallic support sleeve.

2. The macro-micro combined electrode according to claim 1, characterized in that: At least one third slit is formed on the first end portion, and each of the third slits is located on a side of the first slit away from the second slit and on the edge of a different metal stimulation contact. Each of the wires starts from the connected detection site, passes through or exits the third slit, and then passes through the first slit into the interior of the non-metallic support sleeve.

3. The macro-micro combined electrode according to claim 1 or 2, characterized in that: Each of the detection sites is attached to the metal stimulation contact.

4. The macro-micro combined electrode according to claim 2, characterized in that: The non-metallic support sleeve further includes a second end portion, and the intermediate portion is located between the first end portion and the second end portion; Each of the detection units further includes a soldering pad. Each of the wires passes through the second slit and is connected to the corresponding soldering pad. The soldering pad is soldered to the external extended circuit board and then attached to the surface of the second end.

5. The macro-micro combined electrode according to claim 1, characterized in that: Each of the detection sites is attached to the surface of the first end portion through a medical biocompatible material.

6. The macro-micro combined electrode according to claim 5, characterized in that: The medical biocompatible material includes any one of polyethylene glycol, polylactic acid, polylactic acid-glycolic acid copolymer, silk protein, biocompatible UV glue, MED 2000 medical silicone glue, or a combination thereof.

7. The macro-micro combined electrode according to claim 1, characterized in that: The flexible micro-nano electrode array includes a base insulating layer, at least one signal transmission layer and a packaging insulating layer stacked in sequence, and multiple detection units are located in the signal transmission layer, wherein the materials of the base insulating layer and the packaging insulating layer include one or more of polyimide, polyparaxylene, epoxy resin, polylactic acid, polylactic acid-glycolic acid copolymer, SU8, polyethylene terephthalate, polydimethylsiloxane, silicone, and silicone rubber, and the material of the signal transmission layer includes any one of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum-iridium alloy, titanium alloy, graphite, carbon nanotubes, and PEDOT, or a combination thereof.

8. A method for preparing a macro-micro combined electrode based on MEMS technology, characterized in that: include: Obtaining a deep brain stimulation macroelectrode, the deep brain stimulation macroelectrode comprising a non-metallic support sleeve and at least one metal stimulation contact, the metal stimulation contact being arranged at intervals on a surface of a first end portion of the non-metallic support sleeve, the first end portion being an end that penetrates deep into the brain, the metal stimulation contact being configured to provide electrical stimulation of nerves at different locations when the deep brain stimulation macroelectrode is implanted deep into the brain; Obtaining a flexible micro-nano electrode array based on MEMS technology, the flexible micro-nano electrode array comprising a plurality of detection units arranged in parallel, each of the detection units comprising a detection site and a wire, each of the detection sites being configured to detect an electrical signal at a corresponding stimulation site deep in the brain after the metal stimulation contact generates the neural electrical stimulation, the electrical signals detected by the plurality of detection sites comprising one or more of an electrophysiological signal, a dopamine electrochemical signal, or a glutamate electrochemical signal, and each of the wires being connected to a corresponding detection site; Attaching the detection site to the surface of the first end portion, and attaching each of the wires to the surface of the non-metallic support sleeve or inserting each of the wires into the interior of the non-metallic support sleeve along a direction of the non-metallic support sleeve away from the first end portion; Each of the conductive wires is passed through the first slit into the interior of the non-metallic support sleeve, and passed through the second slit to the outside of the non-metallic support sleeve, wherein the non-metallic support sleeve includes a middle portion, and the first slit and the second slit are respectively formed at both ends of the middle portion, and the first slit is located between the middle portion and the first end portion.

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