Micro-nano processing laboratory equipment information control method and device

Abstract

The invention provides a micro-nano processing laboratory equipment information control method and device. The method comprises the following steps: acquiring user login information; calling item information to which a user belongs, user experiment reservation information, user associated equipment information and user historical query information according to the user login information; predicting the attention weight of the user to each piece of laboratory equipment management information in combination with the user identity permission, the item information to which the user belongs, the user reservation experiment information, the user associated equipment information and the user historical query information; adjusting the display sequence and the detailed degree of each piece of laboratory equipment management information in combination with the attention weight; and the data board is used for sending laboratory equipment management information to the user according to the display sequence and the detailed degree.

Description

Technical Field

[0001] The present invention relates to the field of laboratory equipment, and in particular to a method and device for controlling laboratory equipment information based on micro-nano processing. Background Art

[0002] The micro-nano processing laboratory involves multiple experimental links in semiconductor micro-nano processing, including but not limited to pattern transfer (such as photolithography machine), thin film deposition (such as CVD), etching (dry / wet method), test packaging, etc. Each experimental link is equipped with one or more important experimental process equipment, and each experimental process equipment needs to be equipped with supporting factory facilities (pure water system, exhaust gas treatment device, etc.), forming a multi-layer dependency relationship.

[0003] In the existing technology, a huge laboratory equipment management system is usually used to manage micro-nano processing laboratory equipment. The laboratory equipment management system integrates the operating data of the experimental process equipment and factory equipment corresponding to the above-mentioned experimental links. When laboratory managers or maintenance personnel need to obtain relevant data of specific equipment, they need to find the experimental link to which the equipment belongs and the accurate equipment name. However, the data storage location of the specific equipment is relatively complicated to operate. People who do not have a detailed understanding of the laboratory equipment or external experimental personnel find it difficult to quickly and accurately find the data of the corresponding equipment. When an emergency occurs in the laboratory equipment, it is also difficult for technical personnel to quickly retrieve the specific parameters of the equipment. Summary of the Invention

[0004] Based on this, the present invention provides a method and device for controlling the information of micro-nano processing laboratory equipment. According to the user's project information, scheduled experiment information and related equipment information, combined with the user's historical query information, the method and device quickly and accurately display the laboratory equipment management data that the user is most interested in to the user, reducing redundant laboratory equipment data retrieval processes and improving the efficiency of users in retrieving laboratory equipment data.

[0005] In a first aspect, the present invention provides a method for controlling information of equipment in a micro-nano processing laboratory. The method is applied to a user end and includes:

[0006] Get user login information;

[0007] Retrieve user project information, user scheduled experiment information, user historical operation device information, and user historical query information based on the user login information;

[0008] Combine user identity permissions, user project information, user scheduled experiment information, user historical operation equipment information, and user historical query information to predict the user's attention weight for each laboratory equipment management information;

[0009] The display order and detail level of each laboratory equipment management information are adjusted in combination with the attention weight.

[0010] Furthermore, the user's attention weight for each laboratory equipment management information is predicted by combining the user's identity authority, the user's project information, the user's scheduled experiment information, the user's historical operation equipment information, and the user's historical query information, specifically:

[0011] Input the user's identity permissions, user project information, user scheduled experiment information, user historical operation equipment information, and user historical query information into the attention prediction model to obtain the user's attention weight for each laboratory equipment management information;

[0012] Among them, the user identity permissions include the user's device browsing permissions and the user's device information content browsing permissions, the user's project information includes the user's project fund balance and the user's project progress information, the user's scheduled experiment information includes the scheduled experiment time period and the scheduled experiment progress, the user's historical device operation information includes the user's historical scheduled device records and the user's historical device operation records, and the user's historical query information includes the user's historical browsing of device management information and the corresponding time for the user to browse each device management information.

[0013] Furthermore, the display order and detail level of each laboratory equipment management information are adjusted in combination with the attention weight, specifically:

[0014] Obtain the original weight of each laboratory equipment management information;

[0015] Combining the attention weight and the original weight to obtain the display weight of each laboratory equipment management information;

[0016] The display order and detail level of each item of laboratory equipment management information are obtained according to the display weight.

[0017] Furthermore, the micro-nano processing laboratory equipment information control method further includes:

[0018] Statistics on the time users spend browsing each piece of equipment management information in the laboratory equipment management information dashboard;

[0019] According to the historical average browsing time of each device management information in the user's historical query information, if the browsing time of any device management information is less than a preset threshold ratio of the historical average browsing time, the attention prediction model parameters are adjusted.

[0020] Furthermore, the micro-nano processing laboratory equipment information control method further includes:

[0021] Get the user's query command;

[0022] Get the user's real query instruction based on the user's project information, the user's scheduled experiment information, the user's historical operation equipment information, the user's historical query information and the query instruction;

[0023] The laboratory equipment management target data is retrieved and displayed according to the user query real instruction.

[0024] Furthermore, the user's actual query instruction is obtained based on the user's project information, user's scheduled experiment information, user's associated device information, query instruction, and user's historical query information, specifically:

[0025] Inputting the query instruction into a natural language recognition model to obtain query keywords;

[0026] The user's project information, user's scheduled experiment information, user's historical device operations, user's historical query information and query keywords are input into the deep learning network model to obtain the user's real query instructions.

[0027] Furthermore, the user query real instruction includes one or more query real instructions;

[0028] When the user query real instruction is one, retrieve and display the laboratory equipment management target data according to the user query real instruction;

[0029] When the user has more than one real query instruction, calculating the reliability of each real query instruction;

[0030] Retrieve and display laboratory equipment management target data based on the most reliable query real instructions.

[0031] Furthermore, the micro-nano processing laboratory equipment information control method further includes:

[0032] When the user query instruction is more than one, obtaining user feedback information on the laboratory equipment management target data;

[0033] If the feedback information is negative feedback, recalculate the reliability of each query real instruction based on the feedback information;

[0034] The laboratory equipment management target data is retrieved and displayed according to the recalculated query real instruction with the highest reliability.

[0035] Furthermore, the micro-nano processing laboratory equipment information control method further includes:

[0036] Obtaining a user's laboratory equipment reservation request, wherein the laboratory equipment reservation request includes the user's intended equipment and the user's intended reservation time;

[0037] The laboratory equipment reservation recommendation plan is generated and sent based on the user's laboratory equipment reservation request, various laboratory equipment management information, the user's attention weight to various laboratory equipment management information and the user's actual query instructions.

[0038] In a second aspect, the present invention further provides a method for controlling information of equipment in a micro-nano processing laboratory. The method is applied to an administrator side and includes:

[0039] Obtain laboratory equipment information, laboratory project management information and laboratory personnel management information;

[0040] Combine the administrator's login timestamp and historical browsing time to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information;

[0041] When an emergency occurs in the laboratory equipment information, laboratory project management information, or laboratory personnel management information, the display priority of the emergency is adjusted to the highest;

[0042] The laboratory equipment information, laboratory project management information and laboratory personnel management information are sorted and displayed according to the adjusted priorities.

[0043] Furthermore, the display priority of the laboratory equipment information, laboratory project management information, and laboratory personnel management information is set in combination with the administrator's login timestamp and historical browsing time, specifically:

[0044] Filter laboratory management history browsing records with similar time characteristics based on the administrator login timestamp;

[0045] The display priority of the laboratory equipment information, the laboratory project management information, and the laboratory personnel management information is set according to the laboratory management history browsing records with similar time characteristics and the historical browsing duration of each information corresponding to the laboratory management history browsing records.

[0046] In a third aspect, the present invention provides a micro-nano processing laboratory equipment information control device, which is applied to a user end and includes:

[0047] User information acquisition module, used to obtain user login information;

[0048] An information retrieval module is used to retrieve the user's project information, the user's scheduled experiment information, the user's historical operation device information and the user's historical query information according to the user login information;

[0049] The information weight determination module is used to predict the user's attention weight for each laboratory equipment management information by combining the user's identity authority, the user's project information, the user's scheduled experiment information, the user's historical operation equipment information and the user's historical query information;

[0050] The information display setting module is used to adjust the display order and detail level of each laboratory equipment management information in combination with the attention weight.

[0051] In a fourth aspect, the present invention further provides a micro-nano processing laboratory equipment information control device, which is applied to an administrator end and includes:

[0052] Laboratory information acquisition module, used to obtain laboratory equipment information, laboratory project management information and laboratory personnel management information;

[0053] The information priority setting module is used to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information based on the administrator's login timestamp and historical browsing time;

[0054] A priority adjustment module is used to adjust the display priority of the emergency to the highest when an emergency occurs in the laboratory equipment information, laboratory project management information or laboratory personnel management information;

[0055] The information management terminal display module is used to sort and display the laboratory equipment information, laboratory project management information and laboratory personnel management information according to the adjusted priority.

[0056] In a fifth aspect, the present invention further provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the micro-nano processing laboratory equipment information control method of any one of the first and second aspects.

[0057] In a sixth aspect, the present invention further provides a computer device comprising a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it executes the micro-nano processing laboratory equipment information control method of any one of the first and second aspects.

[0058] The beneficial effects of adopting the above technical solution are as follows: In the digital management system of the micro-nano processing laboratory of this embodiment, the system relies on advanced data processing technology to comprehensively integrate the user's project information, scheduled experiment information and related equipment information. By deeply analyzing the research direction of the user's project, such as nanomaterial preparation, semiconductor device processing, etc., the required equipment type can be accurately located; based on data such as the time, duration, and frequency of the scheduled experiment, the user's usage habits can be understood; at the same time, the technical parameters, operating status, maintenance records and other information of the associated equipment are used to form a complete equipment portrait. On this basis, the system traces back the user's historical query records and uses machine learning algorithms to explore their data query preferences. For example, are users more concerned about the equipment's usage reservation status, real-time operating parameters, or maintenance and calibration information? By building a personalized data recommendation model, when a user logs in to the system or initiates a query request, it can quickly match and filter out the equipment management data that best suits their needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for describing the embodiments or the prior art.

[0060] Figure 1 This is a schematic diagram of a method for controlling information of micro-nano processing laboratory equipment in one embodiment of the present application;

[0061] Figure 2 This is a schematic diagram of a micro-nano processing laboratory equipment information control device in one embodiment of the present application. DETAILED DESCRIPTION

[0062] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. In order to explain the present invention in more detail, the following is a specific description of the micro-nano processing laboratory equipment information control method and device provided by the present invention in conjunction with the accompanying drawings.

[0063] Unless otherwise defined, the technical or scientific terms used in this application should have the usual meanings understood by people with ordinary skills in the field to which the invention belongs. The words "first", "second" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. Words such as "include" or "comprise" mean that the elements or objects preceding the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0064] Micro-nanofabrication laboratories involve a variety of high-precision equipment, including photolithography machines and electron beam processing equipment. These devices generate data, including operating parameters, maintenance parameters, and usage logs, with diverse data types and structures. Existing equipment management systems for micro-nanofabrication laboratories are often displayed via web pages. These systems divide laboratory equipment into several equipment groups based on the micro-nanofabrication process steps they correspond to, with each group containing one or more micro-nanofabrication equipment. Furthermore, equipment management in micro-nanofabrication laboratories prioritizes different aspects for users and administrators. When users lack a comprehensive understanding of the lab's equipment, they struggle to quickly locate the corresponding data for a specific device within the micro-nanofabrication laboratory equipment system. Furthermore, because each process device in the micro-nanofabrication laboratory system contains a wide variety of data types and a large volume of data, it can be challenging for laboratory personnel to quickly locate the data for a specific process device.

[0065] The micro-nano processing laboratory equipment information control method provided by the embodiment of the present invention is applied to a micro-nano processing platform. There are multiple identity attributes in the micro-nano processing platform, including users and administrators. The user groups can be divided into project leaders and project members. In the equipment information acquisition stage, the project leader's main concerns include the experimental yield of the micro-nano processing equipment, the advancement of the micro-nano processing equipment, the overall progress of the experimental project, and the experimental results of the project members; the project members' main concerns include the available reservation time of the micro-nano processing equipment, the historical yield of the micro-nano processing equipment required for the experiment, and the alternative equipment for the micro-nano processing equipment required for the experiment; the administrator's main concerns include the fault alarm information of the micro-nano processing equipment, the equipment usage accuracy of the micro-nano processing platform users, and the equipment usage time of the micro-nano processing platform users.

[0066] The embodiment of the present invention provides an application scenario of the micro-nano processing laboratory equipment information control method, and the application scenario includes the terminal device provided in the embodiment, and the terminal device includes but is not limited to a smart phone and a computer device, wherein the computer device can be at least one of a desktop computer, a portable computer, a laptop computer, a mainframe computer, a tablet computer, etc. The terminal device predicts the user's interest in the micro-nano processing laboratory equipment based on the user's login information received and displays it. Figure 1 The schematic diagram of the micro-nano processing laboratory equipment information control method is shown. For the specific process, please refer to the embodiment of the micro-nano processing laboratory equipment information control method.

[0067] When the micro-nano processing laboratory equipment information control method is applied to the user end, it specifically includes the following steps:

[0068] Step S101: Obtain user login information.

[0069] The user login information includes the user's account name and password. Each user in the micro-nano processing platform is configured with a corresponding account name and password. The user enters the corresponding user account name and password through the micro-nano processing platform login interface.

[0070] Step S102: retrieve the user's project information, the user's scheduled experiment information, the user's historical operation device information, and the user's historical query information according to the user login information.

[0071] Specifically, the user's account name runs through all process links of the micro-nano processing platform, such as experimental task reservation, experimental equipment reservation, experimental task data query, etc. Through the user's account name, the user's project information, user's scheduled experiment information, user's historical operation equipment information, and user's historical query information can be retrieved in the micro-nano processing platform. It should be noted that experimental projects in the micro-nano processing platform are established in the form of teams. Although the project information of different users in the same team is the same, the scheduled experiment information, user's historical operation equipment information, and user's historical query information of different users in the same team are different.

[0072] Among them, considering that the user logs into the equipment management system of the micro-nano processing platform in order to view specific information related to the user's project or experiment, this embodiment retrieves information such as the user's project information, the user's scheduled experiment information, the user's historical operation equipment information, and the user's historical query information based on the user's login information to collaboratively predict the equipment information that the user is interested in. The user's project information includes the member information of the user's project, the project's completed experiment information, the project's scheduled experiment information, the project's progress, etc.; the user's scheduled experiment information is the information of one or more experiments that the user has scheduled within a preset time period, including the time of the scheduled experiment, the idle time of the equipment required for the scheduled experiment, the expected delivery time of the scheduled experiment, etc.; the user's historical operation equipment information includes the user's historical reservation equipment records and the user's historical operation equipment records; the user's historical query information includes the user's historical browsing of equipment management information and the corresponding time of the user browsing each piece of equipment management information, wherein the user's historical browsing of equipment management information includes the user's historical browsing of device information, the historical query of device information, the historical browsing of project information, and the historical query of project information.

[0073] Step S103 , combining the user's identity authority, the user's project information, the user's scheduled experiment information, the user's historical operation equipment information and the user's historical query information to predict the user's attention weight for each laboratory equipment management information.

[0074] In the embodiment, the user identity permission includes user browsable equipment permission and user browsable equipment information content permission; the user affiliated project information includes user project fund balance and user project progress information; the user reserved experiment information includes reserved experiment period and reserved experiment progress; the user historical operation equipment information includes user historical reservation equipment record and user historical operation equipment record; the user historical query information includes user historical browsable equipment management information and time length corresponding to user browsable each equipment management information. The laboratory equipment management information includes user project information (including project content and project progress), user reserved experiment information (including reserved experiment content, reserved experiment member, reserved experiment target, reserved experiment period), user reserved equipment information (including equipment reservable time, equipment technical parameter, equipment state, equipment historical yield rate and equipment maintenance time, etc.), user interested equipment information (including user concerned equipment information and user affiliated project related equipment information, specifically equipment reservable time, equipment technical parameter, equipment state, equipment historical yield rate and equipment maintenance time, etc.), user historical experiment information (including user historical experiment result, user historical operation equipment parameter, user historical operation equipment state, user historical operation equipment violation record, user historical operation equipment yield rate, etc.), project fund use, project internal experiment violation record and user historical query equipment information (including equipment reservable time, equipment technical parameter, equipment state, equipment yield rate and equipment maintenance time, etc.).

[0075] In the embodiment, the user identity permission, the user affiliated project information, the user reserved experiment information, the user associated equipment information and the user historical query information are input into the attention prediction model to obtain the attention weight of the user to each item of laboratory equipment management information. The attention prediction model is a deep learning prediction model, and through training of the user historical data set of the micro-nano processing platform, specific parameters are adjusted, so that the attention weight of the user to each item of laboratory equipment management information can be predicted through the user identity permission, the user affiliated project information, the user reserved experiment information, the user associated equipment information and the user historical query information. The attention prediction model adjusts the attention weight in combination with the frequency of the same equipment in the user reserved experiment information in the user historical query information. The higher the frequency of the same equipment in the user reserved experiment information in the user historical query information, the higher the attention weight of the equipment information. The attention prediction model adjusts the user associated equipment information in combination with the user affiliated project information and the user reserved experiment information. If the user associated equipment information belongs to the user affiliated project or the reserved experiment related equipment, the attention weight of the user associated equipment information is higher.

[0076] For example, when user A is a project member of Project A, his user identity permissions only allow him to view the experimental task progress, experimental reservation information, and equipment information related to his experimental tasks; by retrieving the specific information of Project A to which user A belongs (such as Project A is a key experimental project, and the project funding of Project A is reorganized), user A's scheduled experiment information (including specific experimental task information, experiment reservation time, and experimental equipment usage time limit), user A's associated equipment information (including user A's historical operation equipment information, user A's reserved equipment idle time, user A's reserved equipment operating status, etc.), and user A's historical query information (such as user A repeatedly querying the idle time of lithography equipment in historical query information), the retrieved user A's identity permissions, project information, reserved experiment information, user-associated equipment information, and historical query information are input into the attention prediction model. Through deep learning and organization of the above content by the attention prediction model, it is predicted that user A has a high attention to the lithography equipment information in the scheduled experiment in the micro-nano processing platform. Therefore, it can be determined that user A has the highest attention weight for the lithography equipment information among all laboratory equipment management information, the second highest attention weight for the available reservation time information of the equipment required for the scheduled experimental task, and the lowest attention weight for the project progress.

[0077] When user B is the project leader of project B, his user identity permission allows him to view the experimental task progress, experimental reservation information and equipment information related to all experimental tasks included in the project. By retrieving the specific information of user B's project B (such as whether project B is an urgent task, the progress of project B, the funding of project B, and the yield of the experimental tasks included in project B, etc.), user B's scheduled experiment information (including specific experimental task information, the reserved time of the experiment and the time limit for the use of experimental equipment), user B's associated equipment information (including user B's historical operation equipment information, the idle time of the equipment reserved by user B, the operating status of the equipment reserved by user B, etc.), and user B's historical query information (such as user B's multiple inquiries about the project progress and the yield of the experimental tasks included in the project in the historical query information), the attention prediction model is used to deeply learn and organize the above content, and it is predicted that user B has a high degree of attention to the project progress and the yield of the tasks included in the project in the micro-nano processing platform, thereby determining that user B has the highest attention weight for the information of his project.

[0078] Step S104: adjusting the display order and detail level of each item of laboratory equipment management information in combination with the attention weight.

[0079] Specifically, the above step S104 includes the following steps:

[0080] Step S1041: Obtain the original weight of each item of laboratory equipment management information.

[0081] Step S1042: combining the attention weight and the original weight to obtain the display weight of each item of laboratory equipment management information.

[0082] Step S1043 : obtaining the display order and detail level of each item of laboratory equipment management information according to the display weight.

[0083] When the display weight of any laboratory equipment management information is higher, it means that the display order of the laboratory equipment management information is higher and the display detail is higher, so that users can learn about the laboratory equipment management information with the highest interest as quickly as possible, while the laboratory equipment management information with lower interest can be moved back in the display page, and the display detail is lower or even skipped.

[0084] It should be noted that, in this embodiment, each item of laboratory equipment management information in the micro-nano processing laboratory equipment management system has an original weight, which can be used as the initial display order and level of detail of each item of laboratory equipment management information in the micro-nano processing laboratory equipment management system, and the attention weight is adjusted based on the user's specific related information, so that the user can quickly access the equipment information that the user is actually interested in in the micro-nano processing laboratory equipment management platform, thereby improving the effectiveness of the user's browsing of equipment information in the micro-nano processing laboratory equipment management platform.

[0085] In this embodiment, the original weight settings for each item of laboratory equipment management information are slightly different on the project member side and the project administrator side. The original weight settings for the laboratory equipment management information on the project member side are as follows: user project information >> user scheduled experiment information > user scheduled equipment information > user interested equipment information > user historical experiment information > project funding usage > project experiment violation records > user historical query equipment information; the original weight settings for the laboratory equipment management information on the project administrator side are as follows: user project information >> project funding usage > project experiment violation records > user historical experiment information > user scheduled experiment information > user scheduled equipment information > user interested equipment information > user historical query equipment information.

[0086] The original weight of each item of laboratory equipment management information can be expressed in digital form, while the attention weight is expressed in a specific proportion, and the display weight is expressed as the product of the original weight and the attention weight. A detail threshold is set for the display weight of each item of laboratory equipment management information. When the display weight of the laboratory equipment management information exceeds the corresponding detail threshold, the laboratory equipment management information is displayed in detail. When the display weight of the laboratory equipment management information is less than the corresponding detail threshold, the laboratory equipment management information is displayed briefly; and when the display weight of any laboratory equipment management information is less than the preset omission threshold, the laboratory equipment management information is not displayed. Furthermore, the display order of each item of laboratory equipment management information is adjusted by sorting the display weights. The greater the display weight, the higher the display order of the laboratory equipment management information. However, since the user project information is much larger than other equipment, its corresponding display weight is the largest, so the user project information is always in the front display order.

[0087] Specifically, in this embodiment, the laboratory equipment management information after adjusting the display order and level of detail can be presented to the user in the form of a data board. The display area percentage of each item of laboratory equipment management information in the data board can be calculated based on the number of items of laboratory equipment management information and the level of detail of each item of laboratory equipment management information. The laboratory equipment management information can then be arranged based on the display order to obtain the data board after adjusting the display order and level of detail. Furthermore, in this embodiment, the laboratory equipment management information after adjusting the display order and level of detail can also be presented to the user in the form of a list, wherein each item of laboratory equipment management information is displayed sequentially according to the display order, and the display content of each item of laboratory equipment management information is adjusted based on the level of detail. When the level of detail of any item of laboratory equipment management information is simplified, the laboratory equipment management information can be described using brief text or data. When the level of detail of any item of laboratory equipment management information is detailed, the laboratory equipment management information can be described using specific text or data, or even in combination with specific charts or demonstration videos.

[0088] In order to further improve the accuracy of information push in the above-mentioned micro-nano processing laboratory equipment information control method, this embodiment also sets a corresponding feedback mechanism based on user behavior, specifically:

[0089] Step 201 : Count the browsing time of each item of equipment management information in the laboratory equipment management information dashboard by the user.

[0090] Step S202 , based on the historical average browsing duration of each device management information in the user's historical query information, if the browsing duration of any device management information is less than a preset threshold ratio of the historical average browsing duration, adjust the attention prediction model parameters.

[0091] For example, statistics on the time users spend browsing various equipment management information in the laboratory equipment management information dashboard, such as the time users spend browsing the available reservation time for etching equipment. Less than the average browsing time of users' historical reservation time for etching equipment If the preset threshold ratio is greater than , it means that the user’s attention to the available reservation time of the etching equipment is not high during the login process of this time, then the attention prediction model parameters are adjusted to increase the attention weight of the information that the user really pays attention to.

[0092] Based on the above technical solution, considering that users can obtain target data by searching in addition to obtaining target data through the displayed laboratory equipment management information, the embodiment of the present application further improves the micro-nano processing laboratory equipment information control method by combining users' search for specific laboratory equipment management information, specifically including the following steps:

[0093] Step S106: Obtain the user's query instruction.

[0094] In this embodiment, the user's query command is generally input in the form of natural language. The user's query command can be entered in the form of an assistant dialog box, or a specific query command can be directly entered in the search box. For example, "lithography equipment parameters", "which etching equipment can be reserved", "illegal operation", etc.

[0095] Step S107 , obtaining the user's actual query instruction based on the user's project information, the user's scheduled experiment information, the user's historical operation device information, the user's historical query information and the query instruction.

[0096] The actual query instruction of the user is obtained based on the project information, the experiment information scheduled by the user, the historical device operation information, the historical query information and the query instruction, specifically:

[0097] Step S1071: input the query instruction into a natural language recognition model to obtain query keywords.

[0098] Among them, the query keywords correspond to one or more keywords of micro-nano processing laboratory equipment management information, and the types of the query keywords include but are not limited to time characteristics, project characteristics, equipment characteristics, query purposes, etc. This embodiment can obtain the specific content of the match between the user query instruction and the micro-nano processing laboratory equipment management auxiliary platform through the combination of query keywords, among which the time characteristics can indicate whether the user queries current information or historical information, the project characteristics can indicate the specific project name or number queried by the user, the equipment characteristics can indicate the specific equipment type or specific equipment name queried by the user, and the query purpose can indicate whether the user queries specific data or needs to make an appointment.

[0099] Step S1072: Input the user's project information, user's scheduled experiment information, user's historical operation device information, user's historical query information and query keywords into the deep learning network model to obtain the user's real query instructions.

[0100] Considering that the expressions of equipment names, project names, or specific equipment numbers in the micro-nano processing laboratory equipment management auxiliary platform are similar, ordinary users may not necessarily master the correct expressions of the names of each device and specific query instructions in the micro-nano processing laboratory equipment management auxiliary platform. Therefore, there may be one or more results for the query keyword combination obtained by the natural language recognition model. In order to more accurately understand the user's query instruction, the user's project information, the user's scheduled experiment information, the user's historical equipment operation information, the user's historical query information, and the query instruction can be combined to deduce the user's true query instruction. For example, when the user's query instruction is input into the natural language recognition model and the query keyword only includes "etching equipment", the micro-nano processing laboratory equipment management auxiliary platform can obtain multiple query instructions based on only the keyword "etching equipment". At this time, the user's project information includes the part using etching equipment, the user's scheduled experiment information includes experiments using etching equipment, the user's historical equipment operation information has records of using etching equipment, and the user's historical query information has query records for etching equipment. These can be combined and input into the deep learning network model to deduce the true query instruction corresponding to the query keyword.

[0101] Furthermore, in the case where there are too many query instructions corresponding to the query keyword, the above-mentioned deep learning network model can only perform partial screening. Therefore, in this embodiment, for the user query real instruction obtained in the above-mentioned step S1072, there is a case where the user query real instruction includes one or more query real instructions:

[0102] When the user query real instruction is one, retrieve and display the laboratory equipment management target data according to the user query real instruction;

[0103] When the user query real instruction is more than one, the reliability of each query real instruction is calculated; the laboratory equipment management target data is called and displayed according to the query real instruction with the highest reliability.

[0104] Specifically, the keywords of each query real instruction are extracted, and the occurrence frequency of each keyword in the user historical query instruction is called; the higher the occurrence frequency of all keywords in the historical query instruction in the same query real instruction, the higher the reliability of the query real instruction.

[0105] Step S108, the laboratory equipment management target data is called and displayed according to the user query real instruction.

[0106] It should be noted that the user query real instruction in the embodiment also includes emotional intensity, when the user query real instruction points to the laboratory equipment bookable time and the laboratory equipment yield, the most detailed laboratory equipment management target data is called and displayed according to the user query real instruction.

[0107] Further, for the case that there is more than one user query real instruction, considering that the calculation of reliability may not completely express the real intention of the user, in the embodiment of the application, a feedback mechanism is also provided, which adjusts the reliability by combining the feedback information of the user, so as to dynamically adjust the calculation method of the reliability for different users, so that the micro-nano machining laboratory management auxiliary platform has a higher hit rate for the subsequent query real instruction of the same user, therefore, the micro-nano machining laboratory equipment information control method of the embodiment also includes:

[0108] Step S203, when the user query real instruction is more than one, the feedback information of the user to the laboratory equipment management target data is obtained.

[0109] Step S204, if the feedback information is negative feedback, the reliability of each query real instruction is recalculated in combination with the feedback information.

[0110] For example, when there is more than one user query real instruction, if the user feedbacks that the current laboratory equipment management target data is not the data actually queried by the user, it is considered that the previously predicted user query real instruction is unreliable, and the reliability of each query real instruction needs to be recalculated according to the feedback data.

[0111] Step S205, the laboratory equipment management target data is called and displayed according to the query real instruction with the highest reliability recalculated.

[0112] For example, when a user queries the three results of the real instruction pointing to the available appointment time of the lithography equipment, the historical experimental yield of the lithography equipment, and the fault record of the lithography equipment, the historical yield of the lithography equipment is fed back to the user through the reliability of each real instruction query. When the user feedback information is received indicating that "you don't want to query the historical yield, you need to query the available appointment time of the lithography equipment", it is necessary to recalculate the reliability of the above-mentioned user query real instruction based on the feedback information. After recalculation, the reliability of "the available appointment time of the lithography equipment" is the highest.

[0113] Furthermore, the above-disclosed micro-nano processing laboratory equipment information control method, whether in the laboratory equipment management information display stage or the query result push stage in conjunction with the user's query instruction, pushes the single micro-nano processing laboratory equipment management information that the user wants to know. Considering that the purpose of the user's understanding of the micro-nano laboratory equipment management information is to form a data foundation for the laboratory equipment reservation stage, the embodiment of the present application can also generate a specific laboratory equipment reservation recommendation plan in conjunction with the user's laboratory equipment reservation request, including the following specific steps:

[0114] Step S301: Obtain a user's laboratory equipment reservation request, where the laboratory equipment reservation request includes the user's intended equipment and the user's intended reservation time.

[0115] Among them, the user's intended device is any micro-nano processing laboratory equipment that the user has the right to use, and the user's intended reservation time is any time period within the preset time period when the user sends the laboratory equipment reservation request, and the length of this time period is not less than the shortest reservation time of the laboratory equipment.

[0116] Step S302 : Generate and send a laboratory equipment reservation recommendation plan based on the user's laboratory equipment reservation request, laboratory equipment management information, the user's attention weight to each laboratory equipment management information, and the user's actual query instruction.

[0117] Among them, the laboratory equipment management information includes user project information (including project content and project progress), user scheduled experiment information (including scheduled experiment content, scheduled experiment members, scheduled experiment goals, and scheduled experiment period), user reserved equipment information (including equipment reservation time, equipment technical parameters, equipment status, equipment historical yield and equipment maintenance time, etc.), user interested equipment information (including equipment information that the user is concerned about and equipment information related to the user's project, specifically equipment reservation time, equipment technical parameters, equipment status, equipment historical yield and equipment maintenance time, etc.), user historical experiment information (including user historical experiment results, user historical operation equipment parameters, user historical operation equipment status, user historical operation equipment violation records, user historical operation equipment yield, etc.), project fund usage, experiment violation records within the project, and user historical query equipment information (including equipment reservation time, equipment technical parameters, equipment status, equipment yield and equipment maintenance time, etc.).

[0118] The generation phase of the above-mentioned experimental equipment reservation recommendation plan is subject to the following specific constraints:

[0119] (1) Equipment constraints

[0120] First, determine the planned reservation time of the user's intended equipment based on the user's historical experiment information, user's historical query information and project fund usage in the laboratory equipment management information. If the planned reservation time of the user's intended equipment is inconsistent with the user's intended reservation time, the user's intended reservation time shall prevail, and the planned reservation time of the user's intended equipment shall be used as a backup.

[0121] Taking the user's intended device as photolithography machine A as an example, according to the user's historical experimental information and user's historical query information, the user's historical operation records and historical query information for photolithography machine A both prefer off-peak hours, and the user's project fund usage status is that the balance is less than 30%. Therefore, the user's planned reservation time for photolithography machine A is 02:00-03:00 during off-peak hours; at this time, combined with the user's laboratory equipment reservation request, the intended reservation time for photolithography machine A is 09:00-10:00 during busy hours. At this time, the planned reservation time for photolithography machine A can be used as a backup, and the user's intended reservation time for photolithography machine A shall prevail.

[0122] Then, according to the user historical operation device violation record and the user historical operation device yield rate of the user historical experiment information, and the device state, the device historical yield rate and the device maintenance time of the user intended device, the operation error rate of the user to the intended device is predicted, if the operation error rate of the user to the intended device is lower than the preset fault tolerance rate, the experimental device reservation recommendation scheme is formed according to the intended device reservation time; if the operation error rate of the user to the intended device is higher than the preset fault tolerance rate, it is judged whether the experimental auxiliary personnel is set in the planned reservation time and the intended reservation time, if the experimental auxiliary personnel is set in the intended reservation time, the experimental device reservation recommendation scheme is formed according to the intended device reservation time; if the experimental auxiliary personnel is not set in the intended reservation time, and the experimental auxiliary personnel is set in the planned reservation time, the experimental device reservation recommendation scheme is formed according to the planned reservation time of the intended device.

[0123] For example, continuing the above example, if it is found from the historical operation violation record of the user according to the historical operation violation record of the user that the historical operation violation record of the user to the lithography machine A is more, the historical operation device yield rate is lower, and the operation error rate of the user to the lithography machine A is predicted to be as high as 70% in combination with the device state, the device historical yield rate and the device maintenance time of the lithography machine A, which indicates that if the user operates according to the intended device reservation time, the situation of more violation and higher operation error rate may still occur, at this time, it is further checked whether the experimental auxiliary personnel is set in the intended reservation time and the planned reservation time to ensure that the user can complete the experiment under the cooperation of the experimental auxiliary personnel and avoid the occurrence of violation.

[0124] (2) User constraint condition

[0125] According to the user constraint condition, the generation of the experimental device reservation recommendation scheme needs to combine the level of the project content to which the user belongs, the platform activity degree of the user and the device preference of the user, which specifically includes the following contents:

[0126] The level of the project content to which the user belongs is divided into key emergency project, general emergency project, key non-emergency project and non-emergency project, wherein different device reservation priority weights correspond to different levels, when the level of the project content to which the user belongs is the key emergency project, the device reservation priority weight is the highest, when the level of the project content to which the user belongs is the general emergency project, the device reservation priority weight is the second highest, when the level of the project content to which the user belongs is the key non-emergency project, the device reservation priority weight decreases, and when the level of the project content to which the user belongs is the non-emergency project, the device reservation priority weight is the lowest.

[0127] The platform activity degree of the user is determined by weighted calculation of the login times of the user within a preset time period, the cumulative number of device reservations of the user and the number of training participation of the user, and the specific expression is: .

[0128] A user's device preferences can be determined by combining their device information of interest, their historical experiment information, and their historical query information. The device information of interest is determined based on the user's attention weight for each piece of laboratory equipment management information. If the device information of interest, historical experiment information, and historical query information all indicate that the user has a high preference for one of multiple devices of interest in the micro-nano fabrication platform, a lab equipment reservation recommendation is generated based on the device of interest with the highest preference.

[0129] When there is a conflict between two or more users in the experimental equipment reservation recommendation plan, the equipment reservation priority weight corresponding to the level of the user's project content and the user platform activity are compared, and the experimental equipment reservation recommendation plan is sent to the user with the highest comprehensive equipment reservation priority weight and user platform activity.

[0130] (3) Experimental process constraints

[0131] Furthermore, considering that there may be correlations between different experiments, when generating an experimental equipment reservation plan, it is also necessary to combine the equipment information related to the user's project in the user's equipment information of interest to generate an experimental equipment reservation recommendation plan.

[0132] For example, in micro-nano processing experiments, multiple devices may need to be used in coordination, such as the process chain of photolithography → etching → thin film deposition. When the user's intended device is a photolithography device, the available reservation time of the etching device and the thin film deposition device can be combined to lock, and a reservation recommendation plan for experimental equipment can be generated by combining the photolithography device, etching device and thin film deposition device. For another example, in micro-nano processing experiments, there is a dependency relationship between certain experimental equipment. In this case, it is necessary to determine whether the user's intended device has a dependency relationship with other equipment. If there is a dependency relationship, it is necessary to generate a reservation recommendation plan for experimental equipment in combination with the idle time of the dependent equipment. For example, a photolithography experiment must be followed by a measurement experiment. Then, when the user's intended device is a photolithography device, a dependency relationship is formed between the photolithography device and the measurement device, and a reservation recommendation plan for the photolithography device needs to be generated in combination with the idle time of the measurement device.

[0133] In order to ensure the reliability of the experimental equipment reservation plan, this embodiment sets the above three constraints as follows: the equipment constraint condition is met only when the user constraint condition and the experimental process constraint condition are met; when the user constraint condition and the experimental process constraint condition cannot be met, the user is advised to change the experimental plan; when the equipment constraint condition cannot be met, the experimental equipment reservation plan is generated based on the equipment idle time closest to the user's intended reservation time.

[0134] The above-disclosed micro-nanofabrication laboratory equipment information control method determines the device information of interest to the user based on the experimental tasks and related device information related to the user's login information. However, for the administrator, the administrator is more concerned about whether the micro-nanofabrication laboratory equipment can operate normally or whether there are any faults. Specifically, the following steps are included:

[0135] Step S401: Acquire laboratory equipment information, laboratory project management information, and laboratory personnel management information.

[0136] Step S402 : setting display priorities of laboratory equipment information, laboratory project management information, and laboratory personnel management information based on the administrator's login timestamp and historical browsing duration.

[0137] The display priority of the laboratory equipment information, laboratory project management information, and laboratory personnel management information is set based on the administrator's login timestamp and historical browsing time, specifically:

[0138] Filter laboratory management history browsing records with similar time characteristics based on the administrator login timestamp;

[0139] The display priority of the laboratory equipment information, the laboratory project management information, and the laboratory personnel management information is set according to the laboratory management history browsing records with similar time characteristics and the historical browsing duration of each information corresponding to the laboratory management history browsing records.

[0140] For example, if the administrator's login timestamp corresponds to a weekday, the administrator's lab management browsing history for weekdays can be retrieved to determine the administrator's browsing time for various information on weekdays. For example, if the browsing time for equipment operating status is the highest on weekdays, the lab equipment information can be given the highest display priority. If the administrator's login timestamp corresponds to a holiday, the administrator's lab management browsing history for holiday periods can be retrieved to determine the administrator's browsing time for various information on holidays. For example, if the browsing time for lab project management information is the highest on holidays, the lab project management information can be given the highest display priority.

[0141] Step S403: When an emergency occurs in the laboratory equipment information, laboratory project management information, or laboratory personnel management information, the display priority of the emergency is adjusted to the highest.

[0142] For example, when an emergency occurs, such as laboratory equipment failure, laboratory equipment damage, urgent completion of a laboratory project, insufficient laboratory project funds, or laboratory personnel operating in violation of regulations, the display priority of the emergency will be adjusted to the highest, so that the above emergency can be pushed to the administrator quickly and intuitively, thereby improving the efficiency of responding to the above emergency.

[0143] Step S404: sort and display the laboratory equipment information, laboratory project management information, and laboratory personnel management information according to the adjusted priorities.

[0144] It should be understood that although the Figure 1 The steps in the flowchart are shown in the order indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of these steps, and these steps can be executed in other orders. Figure 1 At least part of the steps may include multiple sub-steps or sub-stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the sub-steps or stages of other steps.

[0145] The embodiment disclosed in the above invention describes in detail the method for controlling the information of the equipment in the micro-nano processing laboratory. The method disclosed in the present invention can be implemented by various types of equipment. Therefore, the present invention also discloses a device for controlling the information of the equipment in the micro-nano processing laboratory. Figure 2 , specific embodiments are given below to explain in detail.

[0146] The micro-nano processing laboratory equipment information control device is applied to the user end and includes:

[0147] User information acquisition module 501, used to obtain user login information;

[0148] The information retrieval module 502 is used to retrieve the user's project information, the user's scheduled experiment information, the user's historical operation device information and the user's historical query information according to the user login information;

[0149] The information weight determination module 503 is used to predict the user's attention weight for each laboratory equipment management information based on the user's identity authority, the user's project information, the user's scheduled experiment information, the user's historical operation equipment information, and the user's historical query information;

[0150] The information display setting module 504 is used to adjust the display order and detail level of each item of laboratory equipment management information in combination with the attention weight.

[0151] The micro-nano processing laboratory equipment information control device is applied to the administrator side and includes:

[0152] Laboratory information acquisition module, used to obtain laboratory equipment information, laboratory project management information and laboratory personnel management information;

[0153] The information priority setting module is used to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information based on the administrator's login timestamp and historical browsing time;

[0154] A priority adjustment module is used to adjust the display priority of the emergency to the highest when an emergency occurs in the laboratory equipment information, laboratory project management information or laboratory personnel management information;

[0155] The information management terminal display module is used to sort and display the laboratory equipment information, laboratory project management information and laboratory personnel management information according to the adjusted priority.

[0156] Regarding the micro-nano processing laboratory equipment information control device, all of the above-mentioned methods can be referred to in detail, and will not be repeated here. Each module in the above-mentioned device can be implemented in whole or in part by software, hardware, or a combination thereof. Each of the above-mentioned modules can be embedded in or independent of the processor of the terminal device in the form of hardware, or can be stored in the memory of the terminal device in the form of software so that the processor can call and execute the operations corresponding to each of the above modules.

[0157] In one embodiment, the present invention further provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the above-mentioned method for controlling information of equipment in a micro-nano processing laboratory.

[0158] The computer-readable storage medium may be an electronic memory such as flash memory, EEPROM (Electrically Erasable Programmable Read-Only Memory), EPROM (Erasable Programmable Read-Only Memory), a hard disk, or ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium has storage space for program code for executing any of the steps of the above-described method. This program code can be read from or written to one or more computer program products, and the program code may be compressed in a suitable form.

[0159] In one embodiment, the present invention provides a computer device comprising a memory and a processor, wherein the memory stores a computer program, and the processor executes the above-mentioned micro-nano processing laboratory equipment information control method when executing the computer program.

[0160] The computer device includes a memory, a processor, and one or more computer programs, wherein the one or more computer programs can be stored in the memory and configured to be executed by one or more processors, and the one or more application programs are configured to execute the above-mentioned micro-nano processing laboratory equipment information control method.

[0161] A processor may include one or more processing cores. The processor utilizes various interfaces and circuits to connect the various components within the entire computer device. It executes instructions, programs, code sets, or instruction sets stored in memory, and accesses data stored in memory to perform various functions of the computer device and process data. Optionally, the processor may be implemented in the form of at least one of a digital signal processing (DSP), a field-programmable gate array (FPGA), and a programmable logic array (PLA). The processor may integrate one or a combination of a central processing unit (CPU), a graphics processing unit (GPU), and a modem. The CPU primarily processes the operating system, user interface, and application programs; the GPU is responsible for rendering and drawing display content; and the modem handles wireless communications. It is understood that the modem may not be integrated into the processor and may be implemented separately via a communications chip.

[0162] The memory may include random access memory (RAM) or read-only memory (ROM). The memory may be used to store instructions, programs, codes, code sets, or instruction sets. The memory may include a program storage area and a data storage area, wherein the program storage area may store instructions for implementing an operating system, instructions for implementing at least one function (such as a touch function, a sound playback function, an image playback function, etc.), instructions for implementing the above-mentioned various method embodiments, etc. The data storage area may also store data created by the terminal device during use, etc.

[0163] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A method for controlling information of equipment in a micro-nano processing laboratory, wherein the method is applied to a user end and is characterized in that: include: Get user login information; Retrieve user project information, user scheduled experiment information, user historical operation device information, and user historical query information based on the user login information; Combine user identity permissions, user project information, user scheduled experiment information, user historical operation equipment information, and user historical query information to predict the user's attention weight for each laboratory equipment management information; The display order and detail level of each laboratory equipment management information are adjusted in combination with the attention weight.

2. The micro-nano processing laboratory equipment information control method according to claim 1, characterized in that: The method combines user identity authority, user project information, user scheduled experiment information, user historical operation equipment information, and user historical query information to predict the user's attention weight for each laboratory equipment management information, specifically: Input the user's identity permissions, user project information, user scheduled experiment information, user historical operation equipment information, and user historical query information into the attention prediction model to obtain the user's attention weight for each laboratory equipment management information; Among them, the user identity permissions include the user's device browsing permissions and the user's device information content browsing permissions, the user's project information includes the user's project fund balance and the user's project progress information, the user's scheduled experiment information includes the scheduled experiment time period and the scheduled experiment progress, the user's historical device operation information includes the user's historical scheduled device records and the user's historical device operation records, and the user's historical query information includes the user's historical browsing of device management information and the corresponding time for the user to browse each device management information.

3. The micro-nano processing laboratory equipment information control method according to claim 2, characterized in that: The display order and detail level of each laboratory equipment management information are adjusted in combination with the attention weight, specifically: Obtain the original weight of each laboratory equipment management information; Combining the attention weight and the original weight to obtain the display weight of each laboratory equipment management information; The display order and detail level of each item of laboratory equipment management information are obtained according to the display weight.

4. The micro-nano processing laboratory equipment information control method according to claim 3, characterized in that: Also includes: Statistics on the time users spend browsing each piece of equipment management information in the laboratory equipment management information dashboard; According to the historical average browsing time of each device management information in the user's historical query information, if the browsing time of any device management information is less than a preset threshold ratio of the historical average browsing time, the attention prediction model parameters are adjusted.

5. The micro-nano processing laboratory equipment information control method according to claim 1, characterized in that: Also includes: Get the user's query command; Get the user's real query instruction based on the user's project information, the user's scheduled experiment information, the user's historical operation equipment information, the user's historical query information and the query instruction; The laboratory equipment management target data is retrieved and displayed according to the user query real instruction.

6. The micro-nano processing laboratory equipment information control method according to claim 5, characterized in that: The user's actual query instruction is obtained based on the user's project information, user's scheduled experiment information, user's associated device information, query instruction and user's historical query information, specifically: Inputting the query instruction into a natural language recognition model to obtain query keywords; The user's project information, user's scheduled experiment information, user's historical device operations, user's historical query information and query keywords are input into the deep learning network model to obtain the user's real query instructions.

7. The micro-nano processing laboratory equipment information control method according to claim 6, characterized in that: The user query real instruction includes one or more query real instructions; When the user query real instruction is one, retrieve and display the laboratory equipment management target data according to the user query real instruction; When the user has more than one real query instruction, calculating the reliability of each real query instruction; Retrieve and display laboratory equipment management target data based on the most reliable query real instructions.

8. The micro-nano processing laboratory equipment information control method according to claim 7, characterized in that: Also includes: When the user query instruction is more than one, obtaining user feedback information on the laboratory equipment management target data; If the feedback information is negative feedback, recalculate the reliability of each query real instruction based on the feedback information; The laboratory equipment management target data is retrieved and displayed according to the recalculated query real instruction with the highest reliability.

9. The micro-nano processing laboratory equipment information control method according to claim 5, characterized in that: Also includes: Obtaining a user's laboratory equipment reservation request, wherein the laboratory equipment reservation request includes the user's intended equipment and the user's intended reservation time; The laboratory equipment reservation recommendation plan is generated and sent based on the user's laboratory equipment reservation request, various laboratory equipment management information, the user's attention weight to various laboratory equipment management information and the user's actual query instructions.

10. A method for controlling information of equipment in a micro-nano processing laboratory, said method being applied to an administrator side, characterized in that: include: Obtain laboratory equipment information, laboratory project management information and laboratory personnel management information; Combine the administrator's login timestamp and historical browsing time to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information; When an emergency occurs in the laboratory equipment information, laboratory project management information, or laboratory personnel management information, the display priority of the emergency is adjusted to the highest; The laboratory equipment information, laboratory project management information and laboratory personnel management information are sorted and displayed according to the adjusted priorities.

11. The micro-nano processing laboratory equipment information control method according to claim 10, characterized in that: The display priority of the laboratory equipment information, laboratory project management information, and laboratory personnel management information is set based on the administrator's login timestamp and historical browsing time, specifically: Filter laboratory management history browsing records with similar time characteristics based on the administrator login timestamp; The display priority of the laboratory equipment information, the laboratory project management information, and the laboratory personnel management information is set according to the laboratory management history browsing records with similar time characteristics and the historical browsing duration of each information corresponding to the laboratory management history browsing records.

12. A micro-nano processing laboratory equipment information control device, the micro-nano processing laboratory equipment information control device is applied to the user end, characterized in that: include: User information acquisition module, used to obtain user login information; An information retrieval module is used to retrieve the user's project information, the user's scheduled experiment information, the user's historical operation device information and the user's historical query information according to the user login information; The information weight determination module is used to predict the user's attention weight for each laboratory equipment management information by combining the user's identity authority, the user's project information, the user's scheduled experiment information, the user's historical operation equipment information and the user's historical query information; The information display setting module is used to adjust the display order and detail level of each laboratory equipment management information in combination with the attention weight.

13. A micro-nano processing laboratory equipment information control device, the micro-nano processing laboratory equipment information control device is applied to the administrator end, characterized in that: include: Laboratory information acquisition module, used to obtain laboratory equipment information, laboratory project management information and laboratory personnel management information; The information priority setting module is used to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information based on the administrator's login timestamp and historical browsing time; A priority adjustment module is used to adjust the display priority of the emergency to the highest when an emergency occurs in the laboratory equipment information, laboratory project management information or laboratory personnel management information; The information management terminal display module is used to sort and display the laboratory equipment information, laboratory project management information and laboratory personnel management information according to the adjusted priority.

14. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the micro-nano processing laboratory equipment information control method according to any one of claims 1 to 11 are implemented.

15. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, it performs the micro-nano processing laboratory equipment information control method according to any one of claims 1 to 11.

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