High-precision fixed capacitance vacuum capacitor

Abstract

This invention discloses a high-precision fixed-capacitance vacuum capacitor, comprising: a shell, two electrode disks, and two sets of electrode groups. The two electrode disks are respectively fixedly connected to both ends of the shell and enclose a vacuum chamber. The two sets of electrode groups are respectively mounted on the two electrode disks and coupled to each other within the vacuum chamber. At least one set of electrode groups includes a fine-tunable electrode ring, and at least one electrode disk is equipped with an adjustment mechanism. The adjustment mechanism is connected to the fine-tunable electrode ring and can adjust the axial position of the fine-tunable electrode ring in the vacuum chamber to change the coupling length between the fine-tunable electrode ring and the other electrode group. This invention enables fine-tuning of the capacitance value of the vacuum capacitor, achieving precise adjustment of the capacitance value without changing the overall height of the vacuum capacitor, ensuring product size consistency, avoiding interference with user installation, and reducing operational difficulty and complexity.

Description

Technical Field

[0001] This invention relates to the field of capacitor technology, and in particular to a high-precision fixed-capacitance vacuum capacitor. Background Technology

[0002] A vacuum capacitor is a type of capacitor with a ceramic insulating shell, a vacuum dielectric, and high-conductivity oxygen-free copper electrodes. Compared to other capacitors, it has advantages such as high voltage withstand capability, large current carrying capacity, low high-frequency loss, and self-healing ability after transient overload, making it particularly suitable for high-frequency, high-voltage applications. Currently, vacuum capacitors are widely used in equipment such as broadcasting, medical MRI, high-frequency heating, semiconductor etching, and plasma cleaning. In these high-frequency devices, vacuum capacitors form resonant circuits with high-frequency inductors to achieve high-frequency impedance matching and realize stable transmission of radio frequency power.

[0003] Traditional fixed-capacitance vacuum capacitors typically consist of upper and lower sets of electrode rings. These sets are welded to the inner end faces of the upper and lower electrode disks, which are then welded to both ends of a ceramic tube, forming a vacuum chamber. The two sets of electrode rings are sealed and coupled within this chamber. The capacitance value of the vacuum capacitor varies with the length of the electrode rings, wall thickness, spacing between the plates, and the height of the ceramic tube. Due to manufacturing errors and assembly variations, the capacitance value of fixed-capacitance vacuum capacitors produced in each batch typically varies considerably during actual production.

[0004] With the continuous improvement of output power and transmission efficiency in semiconductor manufacturing and other equipment, users have placed higher demands on the capacitance accuracy of fixed vacuum capacitors, typically requiring the allowable deviation to reach ±0.5% or ±1pF of the nominal capacitance. However, existing fixed vacuum capacitors, especially large-capacitance products with small electrode spacing and long electrode length, often fail to meet user requirements in terms of capacitance deviation.

[0005] Currently, existing technologies exist for improving the capacitance accuracy of fixed vacuum capacitors. For example, Chinese invention patent application CN119601379A, published on March 11, 2025, discloses a vacuum capacitor with precisely controllable capacitance. This capacitor uses a connector with a deformable portion for sealing the electrode disk and the housing. When an axial force is applied to the vacuum capacitor, the connector deforms, increasing or decreasing its axial length and thus altering the coupling height of the two electrode groups. While this technology improves capacitance accuracy, it still has some shortcomings. Firstly, when the connector deforms under pressure, the overall height of the capacitor shortens, affecting the consistency of the capacitor's dimensions and consequently impacting installation. Secondly, the applied pressure value is difficult to standardize, leading to complex processes and cumbersome operation. Therefore, it is necessary to improve existing technologies to overcome their deficiencies. Summary of the Invention

[0006] The problem to be solved by the present invention is to provide a high-precision fixed-capacitance vacuum capacitor, so as to overcome the defects of existing technical solutions that can improve the capacitance accuracy of fixed vacuum capacitors, which lead to poor product size consistency and complex process.

[0007] The technical solution adopted by this invention to solve its technical problem is: a high-precision fixed-capacitance vacuum capacitor, comprising: a shell, two electrode disks and two sets of electrode groups, wherein the two electrode disks are respectively fixedly connected to both ends of the shell and together form a vacuum chamber, and the two sets of electrode groups are respectively mounted on the two electrode disks and coupled to each other and housed in the vacuum chamber; at least one set of electrode groups includes a finely adjustable electrode ring, and at least one electrode disk is equipped with an adjustment mechanism, wherein the adjustment mechanism is connected to the finely adjustable electrode ring and can adjust the axial position of the finely adjustable electrode ring in the vacuum chamber to change the coupling length between the finely adjustable electrode ring and the other set of electrode groups;

[0008] The adjustment mechanism includes a connector, an adjusting member, and a sealing plate. The electrode disk has a through hole in the middle. The connector is slidably fitted into the through hole and fixedly connected to the finely adjustable electrode ring. The sealing plate is sealed between the electrode disk and the connector. The adjusting member is connected to the connector and is used to adjust the axial position of the finely adjustable electrode ring through the connector.

[0009] The sealing sheet is annular and includes a first welding part located on the inner ring, a second welding part located on the outer ring, and an elastic deformation part integrally connected between the first welding part and the second welding part. The first welding part is welded to the joint, and the second welding part is welded into the through hole. The elastic deformation part can be elastically deformed by the force applied by the adjusting member through the joint, so as to change the height difference between the first welding part and the second welding part.

[0010] As a further improvement of the present invention, both sets of electrode groups are composed of multiple electrode rings of different diameters coaxially spaced together, and the electrode rings of the two sets of electrode groups are arranged alternately from the inside to the outside. At least one of the innermost electrode rings of the set of electrode groups is set as the adjustable electrode ring, and the other electrode rings except the adjustable electrode ring are fixed to the corresponding electrode disk.

[0011] As a further improvement of the present invention, the cross-section of the elastic deformation portion along the central axis of the sealing sheet is U-shaped, S-shaped or corrugated.

[0012] As a further improvement of the present invention, the adjusting component is a screw, the connector is provided with an adjusting threaded hole, and the adjusting component is threadedly connected to the adjusting threaded hole.

[0013] As a further improvement of the present invention, a first step is provided in the through hole, the adjusting member is installed in the through hole, and the screw head of the adjusting member abuts against the first step, while the screw head does not protrude from the electrode disk.

[0014] As a further improvement of the present invention, the screw head is round and its end face is provided with an adjustment operation groove, which is used for inserting an external tool to apply torque to the adjusting member.

[0015] As a further improvement of the invention, the screw head is provided with a lubrication hole for adding lubricant between the connector and the adjusting member.

[0016] As a further improvement of the present invention, the connector is provided with a guide shaft portion and a positioning shaft portion, the guide shaft portion slidingly engaging with the through hole, and one end of the adjustable electrode ring being fixedly fitted onto the positioning shaft portion.

[0017] As a further improvement of the present invention, only one of the two sets of electrode groups includes the adjustable electrode ring, and only one of the two electrode disks is equipped with the adjustment mechanism, which is connected to the adjustable electrode ring.

[0018] As a further improvement of the present invention, both sets of electrode groups include the adjustable electrode rings, and both electrode disks are equipped with the adjustment mechanism. The two adjustment mechanisms are connected one-to-one to the two adjustable electrode rings.

[0019] The beneficial effects of this invention are as follows: This invention provides a high-precision fixed-capacitance vacuum capacitor. By setting a fine-tunable electrode ring in at least one set of electrodes and installing an adjustment mechanism on at least one electrode disk, the axial position of the fine-tunable electrode ring in the vacuum chamber is adjusted through the adjustment mechanism to change the coupling length between the fine-tunable electrode ring and another set of electrodes. This achieves fine-tuning of the capacitance value of the vacuum capacitor and achieves precise adjustment of the capacitance value. This effectively overcomes the problem of large capacitance value variations caused by component processing errors and product assembly differences, enabling the allowable deviation of the fixed vacuum capacitor to reach ±0.5% or ±1pF of the nominal capacitance value, improving the pass rate of the fixed vacuum capacitor, and meeting the high-precision capacitance value requirements of fixed vacuum capacitors in the semiconductor manufacturing equipment field. In addition, the adjustment mechanism in this invention only fine-tunes the axial position of the fine-tunable electrode ring, and the distance between the two electrode disks does not change, that is, it does not change the overall height of the vacuum capacitor. This ensures product size consistency while improving capacitance accuracy and avoids affecting user installation. At the same time, the adjustment mechanism used in this invention has a simpler process, reducing the difficulty and complexity of operation. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a perspective view of a first embodiment of the high-precision fixed-capacitance vacuum capacitor of the present invention;

[0022] Figure 2 This is a cross-sectional view of the high-precision fixed-capacitance vacuum capacitor of the present invention at its maximum capacitance value in Embodiment 1.

[0023] Figure 3 For the present invention Figure 2 Enlarged view of section A in the middle;

[0024] Figure 4 This is a perspective view of the sealing sheet of the high-precision fixed-capacitance vacuum capacitor of the present invention;

[0025] Figure 5 This is a cross-sectional view of the sealing sheet of the high-precision fixed-capacitance vacuum capacitor of the present invention;

[0026] Figure 6 This is a perspective view of the adjusting component of the high-precision fixed-capacitance vacuum capacitor of the present invention;

[0027] Figure 7 This is a cross-sectional view of the minimum capacitance state in Embodiment 1 of the high-precision fixed capacitance vacuum capacitor of the present invention;

[0028] Figure 8 This is a cross-sectional view of the maximum capacitance state in Embodiment 2 of the high-precision fixed capacitance vacuum capacitor of the present invention.

[0029] Referring to the accompanying drawings, the following explanations are provided:

[0030] 1. Outer shell; 101. Vacuum chamber; 2. Electrode disk; 201. Through hole; 2011. First step; 2012. Second step; 202. Mounting hole; 3. Electrode assembly; 301. Adjustable electrode ring; 4. Connector; 401. Adjusting threaded hole; 402. Guide shaft; 403. Positioning shaft; 5. Adjusting component; 501. Screw head; 5011. Adjustment operation groove; 5012. Lubrication hole; 6. Sealing plate; 601. First welded part; 602. Second welded part; 603. Elastic deformation part. Detailed Implementation

[0031] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0033] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The illustrations only show the components related to this application and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0034] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0035] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0036] Example 1

[0037] See Figures 1 to 7 The present invention provides a high-precision fixed capacitance vacuum capacitor, comprising: a shell 1, two electrode disks 2 and two sets of electrode groups 3.

[0038] The outer casing 1 is a tubular shape with open ends, which can be circular or square, etc. In this embodiment, a circular tube shape is specifically used. The outer casing 1 is made of a rigid insulating material, such as ceramic, which has excellent insulation properties, ensuring that the vacuum capacitor can work safely and stably in a high-voltage environment. At the same time, it has high mechanical strength, which helps to maintain the vacuum state inside the vacuum capacitor.

[0039] The two electrode disks 2 can also be circular or square, etc. In this embodiment, they are specifically circular. The two electrode disks 2 are fixedly connected to the upper and lower ends of the outer shell 1, and the space formed by the two electrode disks 2 and the outer shell 1 is set as a vacuum chamber 101.

[0040] Preferably, both electrode disks 2 have annular connecting portions extending integrally toward the outer casing 1. These annular connecting portions are fixedly connected to the outer casing 1 by welding to achieve reliable connection and good sealing, thereby ensuring the vacuum state of the vacuum chamber 101.

[0041] Furthermore, the two sets of electrode groups 3 are respectively installed on two electrode disks 2 and housed in the vacuum chamber 101 in a coupled manner.

[0042] As one of the important improvements of the present invention, at least one set of electrode groups 3 includes a finely adjustable electrode ring 301, and at least one electrode disk 2 is equipped with an adjustment mechanism. The adjustment mechanism is connected to the finely adjustable electrode ring 301 and can adjust the axial position of the finely adjustable electrode ring 301 in the vacuum chamber 101 to change the coupling length between the finely adjustable electrode ring 301 and another electrode group 3, thereby realizing the fine adjustment of the capacitance value of the vacuum capacitor and achieving the purpose of accurately adjusting the capacitance value of the vacuum capacitor. This effectively overcomes the problem of large capacitance value changes caused by part processing errors and product assembly differences, so that the allowable deviation of the fixed vacuum capacitor reaches ±0.5% or ±1pF of the nominal capacitance value, improves the pass rate of the fixed vacuum capacitor, and meets the high precision requirements of the fixed vacuum capacitor capacitance value in the field of semiconductor manufacturing equipment.

[0043] Furthermore, unlike existing technologies where the deformation of the connector alters the coupling height of the electrode assembly, leading to changes in the overall height of the vacuum capacitor, the adjustment mechanism in this invention only fine-tunes the axial position of the adjustable electrode ring 301. The distance between the two electrode disks 2 remains unchanged, thus preserving the overall height of the vacuum capacitor. This improves capacitance accuracy while ensuring product dimensional consistency, preventing disruption to user installation. Additionally, the adjustment mechanism employed in this invention features a simpler manufacturing process, reducing operational difficulty and complexity.

[0044] It is understood that the axial direction in this document refers to the axial direction of the vacuum capacitor of this application.

[0045] like Figure 2 As shown, the two sets of electrode groups 3 in this invention are both made of multiple electrode rings of different diameters coaxially spaced together. The electrode rings of the two sets of electrode groups 3 are arranged alternately from the inside to the outside, and there is a gap between adjacent electrode rings. At the same time, the electrode rings of the two sets of electrode groups 3 extend at least partially into each other, and the relatively overlapping part is the coupling length of the two sets of electrode groups 3.

[0046] Among them, at least one innermost electrode ring of the electrode group 3 is set as a finely adjustable electrode ring 301, and the other electrode rings except for the finely adjustable electrode ring 301 are fixed to the corresponding electrode disk 2.

[0047] For ease of understanding, Figure 2 As shown for reference, the two sets of electrode groups 3 are defined as the upper electrode group and the lower electrode group, and the two electrode disks 2 are defined as the upper electrode disk and the lower electrode disk.

[0048] Specifically, in this embodiment, only the upper electrode group includes a finely adjustable electrode ring 301, meaning that the innermost electrode ring of the upper electrode group is designated as the finely adjustable electrode ring 301, while the remaining electrode rings of the upper electrode group, excluding the finely adjustable electrode ring 301, are welded to the lower end face of the upper electrode disk. Simultaneously, only the upper electrode disk is equipped with an adjustment mechanism, which is connected to the finely adjustable electrode ring 301. The electrode rings in the lower electrode group are all welded to the upper end face of the lower electrode disk, and the finely adjustable electrode ring 301 is located inside the innermost electrode ring of the lower electrode group. In this way, by adjusting the axial position of the finely adjustable electrode ring 301 in the vacuum chamber 101 through the adjustment mechanism, the coupling length between the finely adjustable electrode ring 301 and the innermost electrode ring of the lower electrode group can be changed, thereby achieving fine-tuning of the capacitance value.

[0049] Of course, in other embodiments of the present invention, only the lower electrode group may include the adjustable electrode ring 301, that is, the innermost electrode ring of the lower electrode group is designated as the adjustable electrode ring 301, while the other electrode rings of the lower electrode group, except for the adjustable electrode ring 301, are welded to the upper end face of the lower electrode disk. Simultaneously, only the lower electrode disk is equipped with an adjustment mechanism, which is connected to the adjustable electrode ring 301. The electrode rings in the upper electrode group are all welded to the lower end face of the upper electrode disk, and the adjustable electrode ring 301 is located inside the innermost electrode ring of the upper electrode group. In this way, by adjusting the axial position of the adjustable electrode ring 301 in the vacuum chamber 101 through the adjustment mechanism, the coupling length between the adjustable electrode ring 301 and the innermost electrode ring of the upper electrode group can be changed, thereby achieving fine-tuning of the capacitance value.

[0050] See Figure 3 The adjustment mechanism includes a connector 4, an adjusting element 5, and a sealing plate 6. A through hole 201 is provided in the center of the electrode disk 2. The connector 4 is slidably fitted within the through hole 201, and its lower end extends into the vacuum chamber 101 and is fixedly connected to the adjustable electrode ring 301. The sealing plate 6 is fixedly connected between the electrode disk 2 and the connector 4. The sealing plate 6 ensures that the vacuum chamber 101 is isolated from the external atmosphere and can also elastically deform to allow the connector 4 to slide up and down within the through hole 201. The adjusting element 5 is connected to the connector 4 and is used to adjust the axial position of the adjustable electrode ring 301 via the connector 4.

[0051] The adjusting component 5 is a screw, and the upper end of the connector 4 is provided with an adjusting threaded hole 401. The adjusting threaded hole 401 is a blind hole and does not penetrate the lower end of the connector 4. The adjusting component 5 is threaded into the adjusting threaded hole 401. Since the sealing plate 6 is fixedly connected between the electrode disk 2 and the connector 4, it can restrict the circumferential movement of the connector 4. When the adjusting component 5 is rotated, under the threaded engagement between the adjusting component 5 and the connector 4, the connector 4 can be driven to move up and down axially. The connector 4 simultaneously drives the adjustable electrode ring 301 to move up and down, thereby changing the coupling length between the adjustable electrode ring 301 and the innermost electrode ring of the lower electrode group, thus changing the capacitance value.

[0052] Figure 2 This refers to the position of the connector 4 and the adjustable electrode ring 301 when the sealing sheet 6 is in its natural state, at which point the vacuum capacitor is at its maximum capacitance. Figure 7 When the adjusting component 5 is rotated clockwise, the connector 4 and the adjustable electrode ring 301 move upward. At the same time, the sealing plate 6 connected to it is stretched upward. The coupling length between the adjustable electrode ring 301 and the innermost electrode ring of the lower electrode group decreases, and the capacitance of the vacuum capacitor decreases accordingly.

[0053] The adjustment mechanism used in this invention has a relatively simple structure and is easy to operate. The axial position of the finely adjustable electrode ring 301 can be adjusted by rotating the adjustment component 5. Compared with the existing technology where it is difficult to solidify the pressure value, the process is simpler, reducing the difficulty and complexity of operation and improving production efficiency.

[0054] Continue reading Figure 3 The adjusting component 5 is provided with a screw head 501, and a first step 2011 is provided in the through hole 201. The adjusting component 5 is installed in the through hole 201, and the bottom surface of the screw head 501 of the adjusting component 5 abuts against the first step 2011, while the top surface of the screw head 501 does not protrude from the electrode disk 2. By adopting this structural design, the present invention can ensure that the top surface of the adjusting component 5 is lower than the mounting plane of the upper electrode disk, thereby avoiding affecting the overall height of the product.

[0055] like Figure 6 As shown, the screw head 501 of the adjusting member 5 in this invention is circular, and its end face is provided with an adjusting operation groove 5011. The adjusting operation groove 5011 can be, but is not limited to, a slotted groove, a cross groove, etc. The adjusting operation groove 5011 is used for external tools (such as screwdrivers) to be inserted to apply torque to the adjusting member 5 so as to adjust the capacitance.

[0056] In addition, the screw head 501 is also provided with a lubrication hole 5012, which is used to add lubricant between the connector 4 and the adjusting member 5 to reduce the torque value required during adjustment. Of course, tools such as snap ring pliers can also be used to insert into the lubrication hole 5012 and rotate the adjusting member 5 to adjust the capacity.

[0057] In this invention, the connector 4 is provided with a guide shaft portion 402 and a positioning shaft portion 403, both of which are cylindrical. The diameter of the guide shaft portion 402 is larger than the diameter of the positioning shaft portion 403. The guide shaft portion 402 slides into the through hole 201 to prevent radial displacement of the electrode ring spacing during the up-and-down movement of the connector 4, which would cause a drop in withstand voltage. Simultaneously, the through hole 201 of the electrode disk 2 is machined with rounded corners to prevent jamming with the connector 4 during capacitance adjustment. The outer diameter of the positioning shaft portion 403 matches the inner diameter of the adjustable electrode ring 301. The upper end of the adjustable electrode ring 301 is fixedly fitted onto the positioning shaft portion 403 to ensure the coaxiality of the adjustable electrode ring 301 with other electrode rings.

[0058] See Figure 4 and Figure 5 The sealing sheet 6 is annular and includes a first welding part 601 located on the inner ring, a second welding part 602 located on the outer ring, and an elastic deformation part 603 integrally connected between the first welding part 601 and the second welding part 602. The first welding part 601 is welded to the connector 4, and the second welding part 602 is welded to the through hole 201. The elastic deformation part 603 can be elastically deformed by the force applied by the adjusting member 5 through the connector 4, so that the height difference between the first welding part 601 and the second welding part 602 changes, thereby allowing the connector 4 to slide up and down in the through hole 201.

[0059] In this embodiment, the first welding part 601, the second welding part 602, and the elastic deformation part 603 are all annular. When the sealing sheet 6 is in its natural state, its first welding part 601 and second welding part 602 are located on the same plane. A second step 2012 is also provided in the through hole 201. The first welding part 601 is welded to the top surface of the guide shaft part 402 of the connector 4, and the second welding part 602 is welded to the second step 2012.

[0060] When the adjusting component 5 is rotated clockwise, the threaded engagement between the adjusting component 5 and the connector 4 will cause the connector 4 and the fine-tuning electrode ring 301 to move upward. At the same time, the sealing plate 6 connected to it will be stretched upward, that is, the first welding part 601 will be lifted, the elastic deformation part 603 will undergo elastic deformation, and apply a downward elastic force to the connector 4, so that the bottom surface of the screw head 501 of the adjusting component 5 will always abut against the first step 2011.

[0061] The elastic deformation portion 603 has a U-shaped, S-shaped, or corrugated cross-section along the central axis of the sealing sheet 6 (i.e., the axial direction of the vacuum capacitor), and in this embodiment, a U-shaped cross-section is preferred. Meanwhile, to ensure the elasticity and tensile strength of the sealing sheet 6, the sealing sheet 6 is formed by stamping thin-walled beryllium copper or tin bronze strip with excellent elasticity using a die.

[0062] The sealing sheet 6 used in this invention includes a first welding part 601, a second welding part 602, and an elastic deformation part 603. This unique design enables it to undergo elastic deformation when subjected to the force applied by the adjusting member 5, thereby achieving fine adjustment of the axial position of the finely adjustable electrode ring 301. At the same time, the first welding part 601 and the second welding part 602 of the sealing sheet 6 are welded to the connector 4 and the through hole 201 respectively, ensuring the sealing of the vacuum chamber 101.

[0063] During the capacitance adjustment process, the high-precision fixed-capacity vacuum capacitor of this invention can be connected to a capacitance measuring instrument through the mounting holes 202 on the two electrode disks 2 to monitor the capacitance change at any time, ensuring that the capacitance is within the standard range. The process is simple and effective.

[0064] Example 2

[0065] The difference between this embodiment and Embodiment 1 is that both sets of electrode groups 3 include adjustable electrode rings 301, and both electrode disks 2 are equipped with adjustment mechanisms. The two adjustment mechanisms are connected one-to-one to the two adjustable electrode rings 301.

[0066] like Figure 8 As shown, the innermost electrode ring of the upper electrode group is a finely adjustable electrode ring 301, which is connected to the adjustment mechanism of the upper electrode disk. Simultaneously, the innermost electrode ring of the lower electrode group is also a finely adjustable electrode ring 301, which is connected to the adjustment mechanism of the lower electrode disk. The two finely adjustable electrode rings 301 are coaxially fitted together, satisfying the requirement that the electrode rings of the two electrode groups 3 are arranged alternately from the inside to the outside.

[0067] The specific structures of the two adjustment mechanisms are the same as in Embodiment 1, and will not be described again.

[0068] In this embodiment, by setting adjustable electrode rings 301 on both sets of electrode groups 3 and installing adjustment mechanisms on both electrode disks 2, the capacitance value of the vacuum capacitor can be finely adjusted to achieve the purpose of accurately adjusting the capacitance value of the vacuum capacitor without changing the overall height of the vacuum capacitor, ensuring the consistency of product size, avoiding affecting the user's installation, and reducing the difficulty and complexity of operation.

[0069] Furthermore, compared to Embodiment 1, the high-precision fixed-capacitance vacuum capacitor in this embodiment can achieve more precise and wider-range capacitance adjustment during the capacitance adjustment process, in order to meet the special application scenarios with extremely high capacitance accuracy requirements and improve the adaptability of the product.

[0070] The same or similar parts between the various embodiments in this specification can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0071] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A high-precision fixed-capacitance vacuum capacitor, comprising a housing (1), two electrode disks (2), and two sets of electrode groups (3), wherein the two electrode disks (2) are respectively fixedly connected to both ends of the housing (1) and together form a vacuum chamber (101), and the two sets of electrode groups (3) are respectively mounted on the two electrode disks (2) and coupled to each other within the vacuum chamber (101); characterized in that: At least one set of the electrode groups (3) includes a finely adjustable electrode ring (301), and at least one of the electrode disks (2) is equipped with an adjustment mechanism connected to the finely adjustable electrode ring (301) and capable of adjusting the axial position of the finely adjustable electrode ring (301) in the vacuum chamber (101) to change the coupling length between the finely adjustable electrode ring (301) and another set of the electrode groups (3); The adjustment mechanism includes a connector (4), an adjusting member (5), and a sealing plate (6). The electrode disk (2) has a through hole (201) in the middle. The connector (4) is slidably fitted in the through hole (201) and fixedly connected to the finely adjustable electrode ring (301). The sealing plate (6) is sealed between the electrode disk (2) and the connector (4). The adjusting member (5) is connected to the connector (4). The adjusting member (5) is used to adjust the axial position of the finely adjustable electrode ring (301) through the connector (4). The sealing sheet (6) is annular and includes a first welding part (601) located in the inner ring, a second welding part (602) located in the outer ring, and an elastic deformation part (603) integrally connected between the first welding part (601) and the second welding part (602). The first welding part (601) is welded to the joint (4), and the second welding part (602) is welded to the through hole (201). The elastic deformation part (603) can be elastically deformed by the force applied by the adjusting member (5) through the joint (4) so ​​as to change the height difference between the first welding part (601) and the second welding part (602). Among them, all electrode rings except the adjustable electrode ring (301) are fixed to the corresponding electrode disk (2).

2. The high-precision fixed-capacitance vacuum capacitor according to claim 1, characterized in that: Both sets of electrode groups (3) are made up of multiple electrode rings of different diameters coaxially spaced together, and the electrode rings of the two sets of electrode groups (3) are arranged alternately from the inside to the outside. At least one of the innermost electrode rings of the set of electrode groups (3) is set as the adjustable electrode ring (301).

3. The high-precision fixed-capacitance vacuum capacitor according to claim 1, characterized in that: The cross-section of the elastic deformation part (603) along the central axis of the sealing sheet (6) is U-shaped, S-shaped or corrugated.

4. The high-precision fixed-capacitance vacuum capacitor according to claim 1, characterized in that: The adjusting component (5) is a screw, and the connector (4) is provided with an adjusting threaded hole (401). The adjusting component (5) is threadedly connected to the adjusting threaded hole (401).

5. The high-precision fixed-capacitance vacuum capacitor according to claim 4, characterized in that: The through hole (201) is provided with a first step (2011), the adjusting member (5) is installed in the through hole (201), and the screw head (501) of the adjusting member (5) abuts against the first step (2011), while the screw head (501) does not protrude from the electrode disk (2).

6. The high-precision fixed-capacitance vacuum capacitor according to claim 5, characterized in that: The screw head (501) is circular and has an adjustment operation groove (5011) on its end face. The adjustment operation groove (5011) is used for inserting an external tool to apply torque to the adjustment member (5).

7. The high-precision fixed-capacitance vacuum capacitor according to claim 5, characterized in that: The screw head (501) is provided with a lubrication hole (5012) for adding lubricant between the connector (4) and the adjusting member (5).

8. The high-precision fixed-capacitance vacuum capacitor according to claim 1, characterized in that: The connector (4) is provided with a guide shaft (402) and a positioning shaft (403). The guide shaft (402) is slidably engaged with the through hole (201). One end of the adjustable electrode ring (301) is fixedly fitted onto the positioning shaft (403).

9. The high-precision fixed-capacitance vacuum capacitor according to claim 1, characterized in that: Only one of the two sets of electrode groups (3) includes the adjustable electrode ring (301), and only one of the two electrode disks (2) is equipped with the adjustment mechanism, which is connected to the adjustable electrode ring (301).

10. The high-precision fixed-capacitance vacuum capacitor according to claim 1, characterized in that: Both sets of electrode groups (3) include the adjustable electrode ring (301), and both electrode disks (2) are equipped with the adjustment mechanism. The two adjustment mechanisms are connected to the two adjustable electrode rings (301) in a one-to-one correspondence.

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