Hydrocarbon cleaning composition and preparation method thereof

Abstract

The invention belongs to the field of cleaning agents, and particularly relates to a hydrocarbon cleaning composition and a preparation method thereof. The invention discloses a hydrocarbon cleaning composition which comprises the following raw materials in parts by weight: 40-60 parts of a hydrocarbon solvent; 28-36 parts of an alcohol ether solvent; 1 to 12 parts of a surfactant; 0.5-2 parts of fatty alcohol ether sodium sulfate; 2-6 parts of a phosphate ester substance; the surface active agent comprises isomeric alcohol polyoxyethylene ether and a fluorine-containing surface active agent. The hydrocarbon cleaning composition combines a hydrocarbon solvent, an alcohol ether solvent, a surfactant, fatty alcohol ether sodium sulfate and phosphate ester substances, and has remarkable advantages in the aspect of semiconductor cleaning. The cleaning agent can efficiently remove particulate pollutants (such as particles and metal scraps on a silicon wafer), can deeply clean a slit structure (such as a high-aspect-ratio groove), does not damage the surface of a chip, considers the material safety and environmental protection requirements, and is suitable for front-end and rear-end cleaning processes in semiconductor manufacturing.

Description

Technical Field

[0001] This application belongs to the field of cleaning agents, specifically relating to a hydrocarbon cleaning composition and its preparation method. Background Technology

[0002] In semiconductor manufacturing processes, contaminants on the wafer surface (such as particles, organic residues, and metal ions) can severely impact device performance and yield. As integrated circuit process nodes continue to shrink, the requirements for cleaning technologies are becoming increasingly stringent, especially in the removal of particulate contaminants and the cleaning of high aspect ratio structures. Traditional cleaning methods face numerous challenges. Currently, semiconductor cleaning mainly relies on the following technologies: Standard cleaning – using ammonia / hydrogen peroxide and hydrochloric acid / hydrogen peroxide mixtures, which can effectively remove particulate and metal contaminants, but the strongly alkaline or acidic environment easily corrodes the silicon substrate and metal interconnect layers, and it is difficult to thoroughly clean high aspect ratio structures. Organic solvent cleaning – highly soluble for organic contaminants such as photoresist, but highly volatile, and has limited ability to remove nanoscale particles. Supercritical CO2 cleaning: can penetrate fine structures, but the equipment cost is high, and its cleaning effect on certain polar contaminants (such as metal ions) is insufficient.

[0003] Currently available semiconductor cleaning agents mostly use single solvents or simple compounding, which have the following problems: Incomplete particle removal: Traditional surfactants easily lead to particle re-adsorption, affecting surface cleanliness. Insufficient gap cleaning ability: High-viscosity solvents have difficulty effectively penetrating nanoscale trenches.

[0004] Application content

[0005] To address the aforementioned technical problems, this application discloses a hydrocarbon cleaning composition that can be used to remove flux, oil, dust, and other contaminants from electronic instruments, PCB circuit boards, and other semiconductor devices.

[0006] The hydrocarbon cleaning composition comprises the following raw materials in parts by weight:

[0007] 40-60 parts of hydrocarbon solvent;

[0008] 28-36 parts of alcohol ether solvent;

[0009] 1-12 parts of surfactant;

[0010] Sodium fatty alcohol ether sulfate 0.5-2 parts;

[0011] Phosphate esters, 2-6 parts.

[0012] Preferably, the hydrocarbon cleaning composition comprises the following raw materials in parts by weight:

[0013] 55 parts of hydrocarbon solvent;

[0014] 32 parts of alcohol ether solvent;

[0015] 7 parts surfactant;

[0016] 1 part of sodium fatty alcohol ether sulfate;

[0017] Four parts of phosphate esters.

[0018] The hydrocarbon solvent is selected from one or more of nonane, decane, and undecane. The hydrocarbon solvent described in this application is capable of dissolving most oil stains on the surface of semiconductor products.

[0019] The alcohol ether solvent comprises dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:2-5; preferably, the weight ratio is 1:3. 2-tert-butoxyethanol possesses both ethoxy and tert-butyl groups, making it effective against both oils and polar contaminants. Dipropylene glycol butyl ether exhibits strong wettability and can penetrate microstructures (such as high aspect ratio silicon wafer patterns). Using a 1:2-5 weight ratio of dipropylene glycol butyl ether and 2-tert-butoxyethanol in combination with a hydrocarbon solvent can cover contaminants ranging from non-polar (oils) to polar (salts).

[0020] The surfactant comprises isomeric alcohol polyoxyethylene ether and fluorinated surfactant. The weight ratio of the isomeric alcohol polyoxyethylene ether to the fluorinated surfactant is 1:2-4. The isomeric alcohol polyoxyethylene ether is isomeric tridecyl alcohol polyoxyethylene ether and / or isomeric decayl alcohol polyoxyethylene ether.

[0021] The surfactant also includes modified polyethylene glycol monoallyl ether.

[0022] The weight ratio of the isomeric tridecyl alcohol polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:3.

[0023] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5g of polyethylene glycol monoallyl ether (CAS: 27274-31-3) and 1g of pentamethyldisiloxane are reacted at 110±5℃ for 2 hours in the presence of a 10ppm platinum catalyst. After the reaction is completed, the ether is obtained by vacuum distillation.

[0024] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium, and the reaction is carried out for 1-2 hours. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75°C and refluxed for 8-9 hours. After the reaction is completed, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0025] By introducing modified polyethylene glycol monoallyl ether, a stable adsorption layer is formed on the surface of solid particles. Its long-chain molecular structure generates a steric hindrance effect, thereby effectively inhibiting the re-aggregation between particles.

[0026] By combining fluorinated surfactants with modified polyethylene glycol monoallyl ether, the interfacial forces between organic contaminants such as flux and the products to be cleaned can be reduced, making them easier to clean and remove, and preventing the re-adsorption of contaminants.

[0027] Through the synergistic effect of isomeric tridecyl alcohol polyoxyethylene ether and fluorinated surfactants, the cleaning agent system achieves excellent penetration ability, enabling it to penetrate deep into the microporous structure of the workpiece and achieve efficient removal of contaminants from difficult-to-clean areas such as deep holes and blind holes.

[0028] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0029] The phosphate ester is triethyl phosphate and / or diethyl ethylphosphonate. The phosphate ester has a high flash point, which reduces the flammability risk of the hydrocarbon cleaning composition. Simultaneously, the phosphate ester has good flame retardant properties, which helps improve the flame retardant performance of the hydrocarbon cleaning composition.

[0030] A second aspect of the present invention provides a method for preparing the hydrocarbon cleaning composition, comprising the following steps:

[0031] S1. Mix the hydrocarbon solvent and the alcohol ether solvent evenly to obtain the first mixture;

[0032] S2. Then mix the surfactant, sodium fatty alcohol ether sulfate, and phosphate esters evenly to obtain a second mixture;

[0033] S3. Stir the second mixture and the first mixture evenly, and then let them stand to obtain the hydrocarbon cleaning composition.

[0034] Beneficial effects

[0035] This application's hydrocarbon cleaning composition combines hydrocarbon solvents, alcohol ether solvents, surfactants, sodium fatty alcohol ether sulfate, and phosphate esters, offering significant advantages in semiconductor cleaning. It can efficiently remove particulate contaminants (such as microparticles and metal debris on silicon wafers) and deeply clean narrow structures (such as high aspect ratio trenches) without damaging the chip surface. It also considers material safety and environmental requirements, making it suitable for both front-end and back-end cleaning processes in semiconductor manufacturing. Implementation

[0036] Example 1

[0037] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0038] 60 parts of hydrocarbon solvent;

[0039] 36 parts of alcohol ether solvent;

[0040] 12 parts surfactant;

[0041] Two parts of sodium fatty alcohol ether sulfate;

[0042] Six parts of phosphate esters.

[0043] The hydrocarbon solvent is undecane.

[0044] The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:5 between the two.

[0045] The surfactant comprises isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and a fluorinated surfactant. The weight ratio of the isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:2.

[0046] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5 g of polyethylene glycol monoallyl ether and 1 g of pentamethyldisiloxane (CAS: 1438-82-0) are reacted at 110±5 °C for 2 hours in the presence of a 10 ppm platinum catalyst. After the reaction is completed, the ether is obtained by vacuum distillation.

[0047] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol (CAS: 375-01-9) is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a hexane solution (100 mL of n-hexane) containing 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate (CAS: 126-83-0) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is completed, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0048] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0049] The phosphate ester is triethyl phosphate.

[0050] The method for preparing the hydrocarbon cleaning composition includes the following steps:

[0051] S1. Mix the hydrocarbon solvent and the alcohol ether solvent evenly to obtain the first mixture;

[0052] S2. Then mix the surfactant, sodium fatty alcohol ether sulfate, and phosphate esters evenly to obtain a second mixture;

[0053] S3. Stir the second mixture and the first mixture evenly, and then let them stand to obtain the hydrocarbon cleaning composition.

[0054] Example 2

[0055] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0056] 55 parts of hydrocarbon solvent;

[0057] 32 parts of alcohol ether solvent;

[0058] 7 parts surfactant;

[0059] 1 part of sodium fatty alcohol ether sulfate;

[0060] Four parts of phosphate esters.

[0061] The hydrocarbon solvent is undecane.

[0062] The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:3 between the two.

[0063] The surfactant comprises isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and a fluorinated surfactant. The weight ratio of the isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:3.

[0064] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5g of polyethylene glycol monoallyl ether and 1g of pentamethyldisiloxane are reacted at 110±5℃ for 2 hours in the presence of a 10ppm platinum catalyst, and the mixture is then distilled under reduced pressure after the reaction is completed.

[0065] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is complete, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0066] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0067] The phosphate ester is triethyl phosphate.

[0068] The preparation method of the hydrocarbon cleaning composition is the same as in Example 1.

[0069] Comparative Example 1

[0070] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0071] 55 parts of hydrocarbon solvent;

[0072] 32 parts of alcohol ether solvent;

[0073] 7 parts surfactant;

[0074] 1 part of sodium fatty alcohol ether sulfate;

[0075] Four parts of phosphate esters.

[0076] The hydrocarbon solvent is undecane.

[0077] The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:3 between the two.

[0078] The surfactant comprises isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and a fluorinated surfactant. The weight ratio of the isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:1.

[0079] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5g of polyethylene glycol monoallyl ether and 1g of pentamethyldisiloxane are reacted at 110±5℃ for 2 hours in the presence of a 10ppm platinum catalyst, and the mixture is then distilled under reduced pressure after the reaction is completed.

[0080] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is complete, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0081] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0082] The phosphate ester is triethyl phosphate.

[0083] The preparation method of the hydrocarbon cleaning composition is the same as in Example 1.

[0084] Comparative Example 2

[0085] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0086] 55 parts of hydrocarbon solvent;

[0087] 32 parts of alcohol ether solvent;

[0088] 7 parts surfactant;

[0089] 1 part of sodium fatty alcohol ether sulfate;

[0090] Four parts of phosphate esters.

[0091] The hydrocarbon solvent is undecane.

[0092] The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:3 between the two.

[0093] The surfactant comprises isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and a fluorinated surfactant. The weight ratio of the isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:6.

[0094] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5g of polyethylene glycol monoallyl ether and 1g of pentamethyldisiloxane are reacted at 110±5℃ for 2 hours in the presence of a 10ppm platinum catalyst, and the mixture is then distilled under reduced pressure after the reaction is completed.

[0095] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is complete, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0096] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0097] The phosphate ester is triethyl phosphate.

[0098] The preparation method of the hydrocarbon cleaning composition is the same as in Example 1.

[0099] Comparative Example 3

[0100] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0101] 55 parts of hydrocarbon solvent;

[0102] 32 parts of alcohol ether solvent;

[0103] 7 parts surfactant;

[0104] 1 part of sodium fatty alcohol ether sulfate;

[0105] Four parts of phosphate esters.

[0106] The hydrocarbon solvent is undecane.

[0107] The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:3 between the two.

[0108] The surfactants include isotridecyl alcohol polyoxyethylene ether, polyethylene glycol monoallyl ether, and fluorinated surfactants. The weight ratio of isotridecyl alcohol polyoxyethylene ether, polyethylene glycol monoallyl ether, and fluorinated surfactants is 1:3:3.

[0109] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is complete, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0110] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0111] The phosphate ester is triethyl phosphate.

[0112] The preparation method of the hydrocarbon cleaning composition is the same as in Example 1.

[0113] Comparative Example 4

[0114] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0115] 55 parts of hydrocarbon solvent;

[0116] 32 parts of alcohol ether solvent;

[0117] 7 parts surfactant;

[0118] 1 part of sodium fatty alcohol ether sulfate;

[0119] Four parts of phosphate esters.

[0120] The hydrocarbon solvent is undecane.

[0121] The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:3 between the two.

[0122] The surfactant comprises isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and a fluorinated surfactant. The weight ratio of the isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:3.

[0123] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5g of polyethylene glycol monoallyl ether and 1g of pentamethyldisiloxane are reacted at 110±5℃ for 2 hours in the presence of a 10ppm platinum catalyst, and the mixture is then distilled under reduced pressure after the reaction is completed.

[0124] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorononanol (CAS: 423-56-3) is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is completed, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0125] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0126] The phosphate ester is triethyl phosphate.

[0127] The preparation method of the hydrocarbon cleaning composition is the same as in Example 1.

[0128] Comparative Example 5

[0129] A hydrocarbon cleaning composition comprising the following raw materials in parts by weight:

[0130] 55 parts of hydrocarbon solvent;

[0131] 32 parts of alcohol ether solvent;

[0132] 7 parts surfactant;

[0133] 1 part of sodium fatty alcohol ether sulfate;

[0134] Four parts of phosphate esters.

[0135] The hydrocarbon solvent is undecane.

[0136] The alcohol ether solvent is dipropylene glycol butyl ether.

[0137] The surfactant comprises isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and a fluorinated surfactant. The weight ratio of the isotretinoin polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant is 1:3:3.

[0138] The preparation method of the modified polyethylene glycol monoallyl ether includes the following steps: under an inert atmosphere, 1.5g of polyethylene glycol monoallyl ether and 1g of pentamethyldisiloxane are reacted at 110±5℃ for 2 hours in the presence of a 10ppm platinum catalyst, and the mixture is then distilled under reduced pressure after the reaction is completed.

[0139] The preparation method of the fluorinated surfactant includes the following steps: Under an inert atmosphere and ice bath conditions, 1 mol of perfluorobutanol is added dropwise to a reaction apparatus containing 200 mL of n-hexane and 1.6 mol of sodium and reacted for 2 h. Then, a solution of 1 mol of sodium 3-chloro-2-hydroxypropanesulfonate in n-hexane (100 mL of n-hexane) is added, and the mixture is heated to 70-75 °C and refluxed for 8 h. After the reaction is complete, cyclohexane is recovered, washed with anhydrous ethanol, and dried to obtain the final product.

[0140] The sodium fatty alcohol ether sulfate is sodium fatty alcohol polyoxyethylene ether sulfate.

[0141] The phosphate ester is triethyl phosphate.

[0142] The preparation method of the hydrocarbon cleaning composition is the same as in Example 1.

[0143] Performance testing and data

[0144] The performance of the hydrocarbon cleaning compositions prepared in Examples 1-2 and Comparative Examples 1-5 of this application was tested. The specific steps were as follows: the semiconductor chip was placed in the cleaning solution (the hydrocarbon cleaning composition and water were mixed at a volume ratio of 1:15), ultrasonically cleaned at 30°C for 3 minutes, and then rinsed with deionized water.

[0145] The samples were then examined using a 30×20 microscope. Five samples were cleaned for each example and comparative example. The results are shown in the table below.

[0146] (1) Cleaning efficiency: The cleaning efficiency of the sample was tested according to Q / 12NK 5119—2012.

[0147]

[0148] As can be seen from the table above, the hydrocarbon cleaning composition of this application is highly efficient and quick in cleaning semiconductor products. Through the interaction of alcohol ether solvent, isomeric tridecyl alcohol polyoxyethylene ether, modified polyethylene glycol monoallyl ether, and fluorinated surfactant, it can not only efficiently clean particulate contaminants on the chip surface, but also efficiently clean contaminants in the chip's crevices.

[0149] It should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A hydrocarbon cleaning composition, characterized in that, Including the following parts by weight of raw materials: 40-60 parts of hydrocarbon solvent; 28-36 parts of alcohol ether solvent; 1-12 parts of surfactant; Sodium fatty alcohol ether sulfate 0.5-2 parts; Phosphate esters, 2-6 parts; the surfactants include isomeric alcohol polyoxyethylene ethers and fluorinated surfactants.

2. The hydrocarbon cleaning composition according to claim 1, characterized in that, Including the following parts by weight of raw materials: 55 parts of hydrocarbon solvent; 32 parts of alcohol ether solvent; 7 parts surfactant; 1 part of sodium fatty alcohol ether sulfate; Four parts of phosphate esters.

3. The hydrocarbon cleaning composition according to claim 1, characterized in that, The hydrocarbon solvent is selected from one or more of nonane, decane, and undecane.

4. The hydrocarbon cleaning composition according to claim 3, characterized in that, The alcohol ether solvent includes dipropylene glycol butyl ether and 2-tert-butoxyethanol, with a weight ratio of 1:2-5 between dipropylene glycol butyl ether and 2-tert-butoxyethanol.

5. The hydrocarbon cleaning composition according to claim 4, characterized in that, The weight ratio of dipropylene glycol butyl ether to 2-tert-butoxyethanol is 1:

3.

6. The hydrocarbon cleaning composition according to claim 1, characterized in that, The weight ratio of the isomeric alcohol polyoxyethylene ether to the fluorinated surfactant is 1:2-4.

7. The hydrocarbon cleaning composition according to claim 6, characterized in that, The isomeric alcohol polyoxyethylene ether is isomeric tridecyl alcohol polyoxyethylene ether and / or isomeric decayl alcohol polyoxyethylene ether.

8. The hydrocarbon cleaning composition according to claim 1, characterized in that, The surfactant also includes modified polyethylene glycol monoallyl ether.

9. The hydrocarbon cleaning composition according to claim 1, characterized in that, The phosphate esters are triethyl phosphate and / or diethyl ethylphosphonate.

10. A method for preparing the hydrocarbon cleaning composition according to any one of claims 1-9, comprising the following steps: S1. Mix the hydrocarbon solvent and the alcohol ether solvent evenly to obtain the first mixture; S2. Then mix the surfactant, sodium fatty alcohol ether sulfate, and phosphate esters evenly to obtain a second mixture; S3. Stir the second mixture and the first mixture evenly, and then let them stand to obtain the hydrocarbon cleaning composition.

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