A multi-geometry diffraction guiding device and an x-ray diffraction apparatus

Abstract

The application provides a multi-geometry diffraction guiding device and an X-ray diffraction equipment, the device is used for guiding a diffraction beam to reach a target detector in the X-ray diffraction equipment; the device comprises: a shell, a parallel light path component and a quasi-focusing light path component; the parallel light path component and the quasi-focusing light path component are arranged on the inner side of the shell; the shell is provided with a mounting connecting part corresponding to the target detector; when the diffraction beam is a parallel beam geometry, the parallel light path component is configured to guide the diffraction beam to reach a first detection area of the target detector; when the diffraction beam is a quasi-focusing beam geometry, the quasi-focusing light path component is configured to guide the diffraction beam to reach a second detection area of the target detector. The application can realize fast and efficient mode switching to measure diffraction beams of different geometries, optimize the use efficiency of a large-area detector, and avoid or eliminate manual or mechanical intervention on optical devices during switching.

Description

Technical Field

[0001] This application relates to the field of X-ray optical technology, and in particular to a multi-geometric diffraction guiding device and X-ray diffraction equipment. Background Technology

[0002] X-ray diffraction is a powerful and widely used analytical technique used to study the crystal structure, phase composition, texture, residual stress, and other properties of materials. In a typical X-ray diffraction system, different optical path geometries (such as quasi-focused beam geometry or parallel beam geometry) and their corresponding optical components are selected to optimize measurements for specific applications.

[0003] Quasi-focused beam geometry, also known as the Bragg-Brentano geometry, is commonly used for phase identification and quantitative analysis of powder materials. With the advent of modern detectors with large effective areas (such as linear or area array detectors), diffracted beams intersecting the non-central region of the detector can experience defocusing [Reference 1: Kriegner et al, Journal of Applied Crystallography 48 (Pt 2): 613-618]. This defocusing leads to broadening of diffraction peaks and resolution loss, especially at the edges of the detector's effective area. Therefore, to maintain resolution, the central portion of such large detectors is typically used in the Bragg-Brentano geometry, which diminishes the speed advantage offered by its wide angular coverage.

[0004] Parallel beam geometries are better suited for applications such as grazing incidence X-ray diffraction (GIXRD), residual stress analysis, texture studies, X-ray reflectometry (XRR), and phase identification of solid samples or thin films. This grazing incidence diffraction measurement typically uses a parallel plate collimator (PPC) as the diffraction beam optics. While the PPC ensures that only parallel rays reach the detector, allowing it to operate effectively in zero-dimensional (0D, point detector) mode, the detector's inherent position sensitivity is not utilized for a broad detector coverage area. For a PPC large enough to cover a large detector, the observation length of the PPC may be much larger than the size of the X-ray spot on the sample surface. This means that a large portion of the PPC area, and the detector area behind it, cannot effectively collect diffraction intensity from the sample, resulting in low detector efficiency.

[0005] Chinese patents CN1590992A and CN109709118A disclose a fan-shaped collimation system. Although this design can retain the angular sensitivity of the detector and the efficiency of using a large-area detector, it limits the effective observation area of ​​the sample because all its collimation channels point to the center of the goniometer, thereby reducing the reliability of crystallographic statistics. Furthermore, its single-shaped fan-shaped optical device structure can only support the measurement of a single optical path geometry.

[0006] When using X-ray diffraction techniques to analyze materials, measurement tasks often involve characterizing various sample types (such as powders, solids, and thin films). These samples require measurement of different optical path geometries to ensure the accuracy and efficiency of the data.

[0007] In traditional X-ray diffraction equipment, switching between parallel and quasi-focused beam geometries typically requires manual replacement of the relevant diffraction beam optics. This manual operation is time-consuming, prone to inaccuracies, and poses a significant obstacle to achieving high-throughput automated measurements.

[0008] Some existing technologies attempt to solve the problem of switching between optical devices and optical path geometry:

[0009] For example, US Patent US10900912B2 discloses a device with multiple collimators, the switching of which is achieved by an electric motor driving a collimator changer; however, these collimators are arranged in a multi-select manner and cannot be used for measurement simultaneously.

[0010] For example, Malvern Panalytical's Empyrean and X'Pert3 MRD diffractometers use two different optical paths to achieve switching of diffraction geometry. However, this approach requires two separate detectors and a separate diffraction goniometer arm for mounting optical components, resulting in complex electronic and instrumentation design costs.

[0011] For example, the Bruker D8 diffractometer uses an electrically driven changer to change the geometry of vertical stacking and only allows measurements to be taken with one beam and one collimator at a time.

[0012] For example, European patent EP2194375B1 discloses a method for switching diffraction geometry by rotating an optical module containing an open aperture and a PPC. However, this method requires a dedicated motor for driving and only allows measurements to be taken simultaneously through one beam and one collimator.

[0013] Therefore, in order to measure diffracted beams with different geometries, existing technologies usually require manual or complex mechanical systems to intervene in the optical devices to switch between different measurement modes, and existing solutions cannot be effectively matched with the use of large-area detectors.

[0014] It should be noted that the information in the background section above is only used to enhance the understanding of the background technology of this application, and therefore may include technical information that does not constitute technical information known or easily inferred by a person skilled in the art. Summary of the Invention

[0015] In view of the above problems, this application is made in order to provide a multi-geometry diffraction guide device and X-ray diffraction equipment that overcomes or at least partially solves the above problems.

[0016] This application provides a multi-geometry diffraction guiding device for guiding a diffracted beam to a target detector in an X-ray diffraction device; the device includes: a housing, a parallel optical path component, and a quasi-focusing optical path component;

[0017] The parallel optical path component and the quasi-focusing optical path component are disposed on the inner side of the housing; the housing is provided with a mounting connection part corresponding to the target detector;

[0018] When the diffracted beam has a parallel beam geometry, the parallel optical path component is configured to guide the diffracted beam to the first detection region of the target detector;

[0019] When the diffracted beam has a quasi-focused beam geometry, the quasi-focused optical path component is configured to guide the diffracted beam to the second detection region of the target detector.

[0020] Furthermore, the parallel optical path component includes a first parallel optical path sub-component and a second parallel optical path sub-component; the first detection region includes a first detection sub-region and a second detection sub-region.

[0021] The first parallel optical path sub-component corresponds to the first detector sub-region; the second parallel optical path sub-component corresponds to the second detector sub-region;

[0022] The quasi-focusing optical path component is disposed between the first parallel optical path sub-component and the second parallel optical path sub-component; the second detection region is disposed between the first detection sub-region and the second detection sub-region.

[0023] Furthermore, the diffracted beam includes a first parallel sub-beam and a second parallel sub-beam;

[0024] When the diffracted beam has a parallel beam geometry, the first parallel light path sub-component is configured to guide the first parallel sub-beam to the first detector sub-region, and the second parallel light path sub-component is configured to guide the second parallel sub-beam to the second detector sub-region.

[0025] Furthermore, the diffraction beam comprises two sets that are sequentially guided to corresponding detection regions;

[0026] When the diffracted beam has a parallel beam geometry, the first parallel optical path sub-component is configured to guide the first set of diffracted beams to the first detector sub-region, and the second parallel optical path sub-component is configured to guide the second set of diffracted beams to the second detector sub-region.

[0027] Furthermore, the first parallel optical path sub-component is a first parallel plate collimator; the second parallel optical path sub-component is a second parallel plate collimator.

[0028] Furthermore, the first parallel plate collimator and the second parallel plate collimator correspond to different or the same angular reception resolution.

[0029] Furthermore, the first parallel optical path component is a first parallel plate collimator; the second parallel optical path component is a triaxial crystal analyzer.

[0030] Furthermore, the quasi-focusing optical path component is provided with at least one anti-scattering mask.

[0031] This application provides an X-ray diffraction apparatus, including: an incident light source, a sample stage, a control assembly, and a multi-geometry diffraction guiding device as described in any embodiment of this application;

[0032] The control component is electrically connected to the target detector;

[0033] The incident light source is configured to emit an incident beam to illuminate the sample on the sample stage to generate the diffracted beam;

[0034] The control component is configured to acquire a first diffraction signal from the first detection region and a second diffraction signal from the second detection region, and to superimpose the first diffraction signal and the second diffraction signal to calculate the measurement result.

[0035] Furthermore, it also includes: an axial cable collimator; the axial cable collimator is connected between the mounting connection and the target detector.

[0036] This application has the following advantages:

[0037] In the embodiments of this application, addressing the common practice in existing technologies of requiring manual or complex mechanical systems to intervene in optical devices to switch between different measurement modes, this application provides a solution for guiding diffraction beams of different geometric configurations using an integrated optical path component. Specifically, it provides a multi-geometric diffraction guiding device for guiding diffraction beams to a target detector in an X-ray diffraction apparatus. The device includes a housing, a parallel optical path component, and a quasi-focusing optical path component. The parallel optical path component and the quasi-focusing optical path component are disposed inside the housing. The housing has a mounting connection corresponding to the target detector. When the diffraction beam has a parallel beam geometry, the parallel optical path component is configured to guide the diffraction beam to a first detection area of ​​the target detector; when the diffraction beam has a quasi-focusing beam geometry, the quasi-focusing optical path component is configured to guide the diffraction beam to a second detection area of ​​the target detector. This application enables rapid and efficient mode switching for measuring diffraction beams of different geometric configurations, optimizes the utilization efficiency of large-area detectors, and avoids or eliminates manual or mechanical intervention in optical devices during switching. Attached Figure Description

[0038] To more clearly illustrate the technical solution of this application, the drawings used in the description of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] Figure 1 This is a schematic diagram of the defocusing effect of a diffracted beam with a quasi-focused beam geometry on a large detector.

[0040] Figure 2 This is a schematic diagram of the diffracted beam of the parallel beam geometry being guided by a parallel plate collimator and the corresponding observation length.

[0041] Figure 3 A schematic diagram illustrating the types of target detectors and the division of detection areas applicable to this application;

[0042] Figure 4 This illustration shows a structural schematic diagram of a multi-geometry diffraction guiding device according to an embodiment of this application;

[0043] Figure 5 This is a first structural schematic diagram of a multi-geometry diffraction guiding device according to an embodiment of this application;

[0044] Figure 6 It is by Figure 5 A schematic diagram of the optical path structure for testing the diffracted beam of the corresponding focusing geometry.

[0045] Figure 7 It is by Figure 5 A schematic diagram of the optical path structure for testing diffracted beams with parallel beam geometry.

[0046] Figure 8 It is by Figure 5 The corresponding device performs rapid scanning tests on the diffraction pattern of the diffracted beam with parallel beam geometry.

[0047] Figure 9 It is by Figure 5 The corresponding device performs high-intensity measurements of the diffraction pattern of the diffracted beam with the geometry of the parallel beam.

[0048] Figure 10 This is a schematic diagram of the second structure of a multi-geometry diffraction guiding device according to an embodiment of this application;

[0049] Figure 11 This is a schematic diagram of the third structure of a multi-geometric configuration diffraction guiding device according to an embodiment of this application.

[0050] The attached figures are labeled as follows:

[0051] 11. Parallel optical path component; 111. First parallel optical path sub-component; 1111. First radial line; 112. Second parallel optical path sub-component; 1121. Second radial line; 113. Plate length; 114. Plate spacing; 12. Quasi-focusing optical path component; 13. Housing; 14. Mounting connection; 15. Anti-scattering mask; 151. First mask; 152. Second mask; 2. Target detector; 2a. Upper detection area; 2b. Middle detection area; 2c. Lower detection area; 21. First detection region; 211. First detection sub-region; 212. Second detection sub-region; 22. Second detection region; 231 1. Two-dimensional detector; 2. One-dimensional detector; 3. Diffraction beam; 3a. First focusing sub-beam; 3b. Second focusing sub-beam; 3c. Third focusing sub-beam; 3d. First parallel sub-beam; 3e. Second parallel sub-beam; 3f. Third parallel sub-beam; 311. First diffraction signal; 321. Second diffraction signal; 33. Measurement result; 41. Incident light source; 42. Incident beam; 43. Entrance aperture slit; 44. Diffraction anti-scattering slit; 52. Sample; 53. Observation length; 6. Control component; 7. Axial cable collimator; 81. Focusing circle; 82. Goniometer circle; 83. Goniometer center. Detailed Implementation

[0052] To make the objectives, features, and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0053] The inventors, through analysis of existing technologies, discovered that measuring diffracted beams with different geometries typically involves complex motor mechanisms integrated throughout the entire device, increasing cost and design complexity. Furthermore, existing technologies usually configure the entire detector to measure simultaneously using only one collimator and one optical path, thus failing to effectively utilize the detection capabilities of large-area or strip detectors through more versatile diffracted beam optical configurations. Please refer to [reference needed]. Figure 1-2 The specific analysis is as follows:

[0054] like Figure 1 As shown, for the quasi-focused beam geometry, the divergent incident beam 42 from the incident light source 41 illuminates the powder sample 52 located at the center 83 of the goniometer through the incident aperture slit 43. The resulting diffracted beam 3 converges through the diffraction anti-scattering slit 44 onto the target detector 2 located at the focusing circle 81 and the goniometer circle 82. The large target detector 2 includes an upper detection area 2a, a middle detection area 2b, and a lower detection area 2c. The diffracted beam 3 includes a first focusing sub-beam 3a, a second focusing sub-beam 3b, and a third focusing sub-beam 3c corresponding to different Bragg angles. The first focusing sub-beam 3a corresponds to the upper detection area 2a; the second focusing beam 3b corresponds to the middle detection area 2b; and the third focusing beam 3c corresponds to the lower detection area 2c. For the diffraction beam 3, since it will experience defocusing far from the central focusing circle 81, it is only effectively focused in the middle detection area 2b, while the upper detection area 2a and the lower detection area 2c are defocused. This leads to the broadening of the diffraction peaks and the loss of resolution, which is particularly unfavorable for powder diffraction analysis.

[0055] like Figure 2As shown, for the parallel beam geometry, a parallel incident beam 42 from the incident light source 41 illuminates a thin-film sample 52 located at the center 83 of the goniometer through the incident aperture slit 43. The resulting diffracted beam 3 reaches the central detection region 2b of the target detector 2 through the parallel optical path component 11. The parallel optical path component 11 can employ a parallel plate collimator (PPC) to select the diffracted beam 3. The diffracted beam 3 includes a first parallel sub-beam 3d, a second parallel sub-beam 3e, and a third parallel sub-beam 3f, which are dispersed from each other. Due to the limitation of the receiving angular resolution of the PPC, only the second parallel sub-beam 3e can reach the central detection region 2b of the target detector 2 through the parallel optical path component 11. At this time, the target detector 2 operates in zero-dimensional (0D, point detector) mode. The parallel optical path component 11 has a corresponding observation length 53 at a given 2θ angle. If a large target detector 2 is completely covered by a corresponding large PPC, the observation length 53 may exceed the irradiated area of ​​sample 52, which means that only part of the PPC and part of the detection area of ​​target detector 2 can effectively collect diffraction signals.

[0056] Based on the above analysis, one of the core technical concepts of this application is to provide an improved diffraction beam guiding device, which, when installed in an X-ray diffraction device, can achieve rapid and efficient mode switching to measure diffraction beams with different geometric configurations, optimize the utilization efficiency of large-area detectors, and avoid or eliminate manual or mechanical intervention on optical devices during switching.

[0057] at the same time, Figure 3 An exemplary illustration shows the target detector 2 to which this application applies. The target detector 2 can be a pixel-type area array two-dimensional detector 231 or a strip-type linear array one-dimensional detector 232. One of the core technical concepts of this application is that the above-mentioned detector can be divided into different regions of interest through software logic control, for example, including: an upper detection region 2a, a middle detection region 2b, and a lower detection region 2c; the upper detection region 2a, the middle detection region 2b, and the lower detection region 2c can simultaneously and independently receive detection signals, and different division regions can be configured according to different diffraction beam 3 guiding device structures, enabling these conceptual detector regions to measure diffraction beams 3 with different geometric configurations respectively.

[0058] Reference Figure 4-5 This application illustrates a multi-geometry diffraction guiding device according to an embodiment of the present application. The device is used to guide a diffracted beam 3 to a target detector 2 in an X-ray diffraction device. The device includes: a housing 13, a parallel optical path component 11, and a quasi-focusing optical path component 12.

[0059] The parallel optical path component 11 and the quasi-focusing optical path component 12 are disposed on the inner side of the housing 13; the housing 13 is provided with a mounting connection part 14 corresponding to the target detector 2;

[0060] When the diffracted beam 3 has a parallel beam geometry, the parallel optical path component 11 is configured to guide the diffracted beam 3 to the first detection region 21 of the target detector 2;

[0061] When the diffracted beam 3 has a quasi-focused beam geometry, the quasi-focused optical path component 12 is configured to guide the diffracted beam 3 to the second detection region 22 of the target detector 2.

[0062] In the embodiments of this application, addressing the common need for manual or complex mechanical systems to intervene in optical devices to switch between different measurement modes in existing technologies, this application provides a solution for guiding diffracted beams 3 with different geometric configurations through integrated optical path components. Specifically, it provides a multi-geometric diffraction guiding device for guiding diffracted beams 3 to a target detector 2 in an X-ray diffraction device. The device includes a housing 13, a parallel optical path component 11, and a quasi-focusing optical path component 12. The parallel optical path component 11 and the quasi-focusing optical path component 12 are disposed inside the housing 13. The housing 13 has a mounting connection portion 14 corresponding to the target detector 2. When the diffracted beam 3 has a parallel beam geometry, the parallel optical path component 11 is configured to guide the diffracted beam 3 to a first detection region 21 of the target detector 2. When the diffracted beam 3 has a quasi-focusing beam geometry, the quasi-focusing optical path component 12 is configured to guide the diffracted beam 3 to a second detection region 22 of the target detector 2. This application enables rapid and efficient mode switching to measure diffraction beams 3 with different geometries, optimizes the utilization efficiency of large-area detectors, and avoids or eliminates manual or mechanical intervention of optical devices during switching.

[0063] The following will further describe a multi-geometry diffraction guiding device in this exemplary embodiment.

[0064] It should be noted that the multi-geometry diffraction guiding device is placed in the path of the diffraction beam 3 of the X-ray diffraction equipment and is mounted in front of the target detector 2 via the mounting connection 14, allowing the device to move with the target detector 2 without manual or mechanical intervention to switch measurement modes. After the diffraction beam 3 passes through the corresponding optical path component, the mounting connection 14 provides an optical path channel corresponding to the target detector 2, allowing the diffraction beam 3 to enter the target detector 2. The mounting connection 14 can be indirectly connected to the target detector 2 via an axial cable collimator 7. The mounting connection 14 can be designed on the back or bottom of the device.

[0065] The parallel optical path component 11 can be an equatorial parallel plate collimator, where the equatorial plane is composed of the plane containing the incident light source 41, the center 83 of the goniometer, and the center of the second detection area 22. This collimator is composed of a series of parallel metal plates stacked together with a certain plate length 113, separated by a uniform plate spacing 114. The angular reception resolution of the parallel plate collimator is determined by the ratio of the plate spacing 114 to the plate length 113.

[0066] The quasi-focusing optical path component 12 can be an opening region located in the housing 13, which can be equipped with an anti-scattering mask 15 for the quasi-focusing geometry. This opening region corresponds to the central optical path or region of the device and to the second detection region 22, and is not covered by any PPC. The quasi-focusing optical path component 12 can also be a slit with anti-scattering function. The quasi-focusing optical path component 12 and the corresponding second detection region 22 are intended for measurements of Bragg-Brentano geometry (e.g., phase identification, quantitative analysis) or general two-dimensional diffraction studies. When diffraction signal acquisition is performed, the target detector 2 operates in an inherent one-dimensional mode (for linear and area array detectors) or a two-dimensional mode (for area array detectors).

[0067] One of the core technical concepts of this application is that different beam geometries can be detected without replacing the optical path components within the device. The selection of different geometries for testing can include the following steps:

[0068] Adjust the position of the target detector 2 by moving the diffractometer arm along the goniometer circle 82, and align the target diffraction angle 2θ with the required optical path component (parallel optical path component 11 or quasi-focusing optical path component 12).

[0069] By connecting the control component 6 of the target detector 2, the detection area (first detection area 21 or second detection area 22) corresponding to the optical path is logically selected and activated for data acquisition.

[0070] From the user's perspective, the complex physical replacement is simplified to the positioning of the target detector 2 and software configuration. To perform operations such as grazing incidence angle diffraction (GIXRD), X-ray reflectivity measurement (XRR), residual stress analysis, or texture (pole figure) measurement using the parallel optical path component 11, the target detector 2 is moved to an angle where the sample 2's angle θ is aligned with the diffracted beam 3 using a goniometer, and the data for the first detection region 21 is read out. To perform powder diffraction scanning using the quasi-focusing optical path component 12, the diffracted beam 3 of interest is positioned on the second detection region 22, and the data for the second detection region 22 is read out.

[0071] This application discloses a multi-geometry diffraction guiding device that eliminates the need for manual optics replacement or the use of complex electric changers within the diffraction beam path itself. By providing fixed, dedicated optical paths for different geometries, it achieves efficient utilization of large detectors, alleviating defocusing issues in the edge regions of the Bragg-Brentano mode and the problem of insufficient detector area utilization caused by PPC. When integrated into X-ray analysis equipment, the device improves the overall throughput, flexibility, and automation capabilities of the equipment.

[0072] Reference Figure 5 In one embodiment of this application, the parallel optical path component 11 includes a first parallel optical path sub-component 111 and a second parallel optical path sub-component 112; the first detection region 21 includes a first detection sub-region 211 and a second detection sub-region 212.

[0073] The first parallel optical path sub-component 111 corresponds to the first detector sub-region 211; the second parallel optical path sub-component 112 corresponds to the second detector sub-region 212;

[0074] The quasi-focusing optical path component 12 is disposed between the first parallel optical path sub-component 111 and the second parallel optical path sub-component 112; the second detection region 22 is disposed between the first detection sub-region 211 and the second detection sub-region 212.

[0075] It should be noted that for the geometry of the parallel beam, measurements can be taken using the first parallel beam sub-component 111 and the second parallel beam sub-component 112 located on both sides of the quasi-focusing optical path component 12. Since the optical paths corresponding to the first parallel beam sub-component 111 and the second parallel beam sub-component 112 are different, the diffracted beam 3 can be simultaneously acquired by the corresponding first detector sub-region 211 and the second detector sub-region 212.

[0076] The 2θ angle of the diffracted beam 3 acquired by the first detection sub-region 211 is defined by the first radial line 1111 in the middle of the first parallel optical path sub-component 111, and the 2θ angle of the diffracted beam 3 acquired by the second detection sub-region 212 is defined by the second radial line 1121 in the middle of the second parallel optical path sub-component 112. The desired 2θ angle can be aligned with the corresponding radial line by adjusting the goniometer arm of the diffracted beam 3. Data acquisition and processing of the first detection sub-region 211 and the second detection sub-region 212 can be performed simultaneously by the control component 6.

[0077] Reference Figure 6 As an example, during Bragg-Brentano (quasi-focusing) geometric measurements, the incident light source 41 emits an incident beam 42 with divergence, defined by the incident aperture slit 43, illuminating a powder sample 52 located at the center 83 of the goniometer. After diffraction, the diffracted beam 3 passes through the quasi-focusing optical path component 12 and the axial cable collimator 7 and intersects with the detector in the second detection region 22. The diffracted beam 3 includes a first focusing sub-beam 3a, a second focusing sub-beam 3b, and a third focusing sub-beam 3c corresponding to different Bragg angles, but the defocusing effect is mitigated compared to traditional measurement methods. At this time, the control component 6 only activates the second detection region 22 of the target detector 2 and can set it to a 1D or 2D measurement mode for rapid scanning of the sample.

[0078] Reference Figure 7 As an example, during GIXRD parallel light measurement, the incident light source 41 emits an incident beam 42, defined by an incident aperture slit 43, illuminating a thin-film sample 52 located at the center 83 of the goniometer. The first parallel light path component 111 allows only the first parallel sub-beam 3d within its receiving angle to pass through, after which the first parallel sub-beam 3d is measured by the first detector sub-region 211 of the target detector 2. Similarly, the second parallel light path component 112 allows only the second parallel sub-beam 3e within its receiving angle to pass through, after which the second parallel sub-beam 3e is measured by the second detector sub-region 212 of the target detector 2. The first detector sub-region 211 and the second detector sub-region 212 are configured to operate in zero-dimensional (0D) mode (point detector mode).

[0079] Since the second detection sub-region 212 is located in the middle of the target detector 2, the defocusing effect of the diffracted beam 3 can be alleviated by measuring the diffracted beam 3 with the focus geometry configuration only through the detection area 2b of the middle of the large detector. The detection areas located on both sides or the edges can be effectively used for the measurement of the diffracted beam 3 with the parallel beam geometry configuration.

[0080] In one embodiment of this application, the diffracted beam includes a first parallel sub-beam 3d and a second parallel sub-beam 3e;

[0081] When the diffracted beam 3 has a parallel beam geometry, the first parallel light path sub-component 111 is configured to guide the first parallel sub-beam 3d to the first detector sub-region 211, and the second parallel light path sub-component 112 is configured to guide the second parallel sub-beam 3e to the second detector sub-region 212.

[0082] It should be noted that the purpose of this embodiment is to split the diffracted beam 3 into two alternating parallel sub-beams, and guide the corresponding parallel sub-beams through the first parallel optical path component 111 and the second parallel optical path component 112, respectively.

[0083] As an example, Figure 8 It shows the use of, for example Figure 5 The illustrated device is used in an example of rapid parallel light geometric scanning. Figure 8 Grazing-incidence X-ray diffraction (GIXRD) measurements of Si polycrystalline sample 52 are shown 33. In this "fast scan" mode, the goniometer arm performs segmented scans at a normal speed. Figure 8 In this diagram, the first diffraction signal 311 represents the data collected through the first parallel optical path sub-component 111 and the first detector sub-region 211 in three 2θ angle intervals; the second diffraction signal 321 represents the data collected through the second parallel optical path sub-component 112 and the second detector sub-region 212 in another three 2θ angle intervals; for ease of observation, the curve corresponding to the first diffraction signal 311 is shifted longitudinally; the complete diffraction pattern, i.e., measurement result 33, is obtained by superimposing the segmented data corresponding to the first diffraction signal 311 and the second diffraction signal 321. The fixed 2θ angle deviation (15 degrees in this example) between the first parallel optical path sub-component 111 and the second parallel optical path sub-component 112 is determined by the physical distance between them. By acquiring data simultaneously and in parallel, the time required to obtain the complete diffraction pattern is only half that required by using a traditional single PPC scan.

[0084] In one embodiment of this application, the diffraction beam 3 comprises two sets that are sequentially guided to corresponding detection regions;

[0085] When the diffracted beam 3 has a parallel beam geometry, the first parallel light path sub-component 111 is configured to guide the first set of diffracted beams 3 to the first detector sub-region 211, and the second parallel light path sub-component 112 is configured to guide the second set of diffracted beams 3 to the second detector sub-region 212.

[0086] It should be noted that the purpose of this embodiment is to use the diffracted beam 3 as a complete detection target and detect it through the first parallel optical path component 111 and the second parallel optical path component 112 respectively, so as to obtain two complete diffraction patterns.

[0087] As an example, Figure 9 It shows the use of, for example Figure 5 The illustrated device is used in an application example of high-intensity measurement parallel light geometric scanning. Figure 9 The grazing incidence X-ray diffraction (GIXRD) measurement results 33 for the same Si polycrystalline sample 52 are shown. In this "high-intensity measurement" mode, the goniometer arm scans at a uniform speed, enabling the first parallel optical path sub-component 111 and the second parallel optical path sub-component 112 to acquire data within the same 2θ angular range. Figure 9 In the diagram, the first diffraction signal 311 represents the data acquired through the first parallel optical path sub-component 111 and the first detector sub-region 211, corresponding to the first set of diffraction beams; the second diffraction signal 321 represents the data acquired through the second parallel optical path sub-component 112 and the second detector sub-region 212, corresponding to the second set of diffraction beams; for ease of observation, the curve corresponding to the first diffraction signal 311 is shifted longitudinally; the complete diffraction pattern, i.e., measurement result 33, is obtained by superimposing the data of the first diffraction signal 311 and the second diffraction signal 321 within the same 2θ angle range. Through this simultaneous acquisition method, the measurement time for obtaining measurement result 33 is almost equivalent to that of a traditional single PPC scan, but the signal intensity is doubled, significantly improving the signal-to-noise ratio.

[0088] Reference Figure 5-7 In one embodiment of this application, the first parallel optical path component 111 is a first parallel plate collimator; the second parallel optical path component 112 is a second parallel plate collimator.

[0089] It should be noted that the first parallel plate collimator and the second parallel plate collimator can have the same angular reception (resolution).

[0090] Reference Figure 10 In one embodiment of this application, the first parallel plate collimator and the second parallel plate collimator correspond to different angular reception degrees.

[0091] It should be noted that, due to the relatively large plate spacing 114 of the first parallel plate collimator, the first parallel plate collimator can be a high-intensity, low-resolution collimator; conversely, due to the relatively small plate spacing 114 of the second parallel plate collimator, the second parallel plate collimator can be a high-resolution, low-intensity collimator. Two PPCs with different resolutions can simultaneously collect two sets of diffraction data from sample 52. When calculating the results, one can choose to use the high-resolution data from the second parallel plate collimator, or the high-intensity data from the first parallel plate collimator, or, as needed, superimpose the two sets of data to obtain data with an average resolution and proportionally increased intensity, providing high flexibility in testing and data processing.

[0092] Reference Figure 11 In one embodiment of this application, the first parallel optical path component 111 is a first parallel plate collimator; the second parallel optical path component 112 is a triaxial crystal analyzer.

[0093] It should be noted that the device can integrate a high-resolution crystal triaxial analyzer as a second parallel optical path component 112 to provide higher angular resolution, which can be used for high-resolution diffraction studies, such as measuring epitaxial thin films using Kα1 spectral lines. Similar to other embodiments, different geometries can be selected by adjusting the 2θ angle of the goniometer. The device can integrate different types of advanced optical components, offering high flexibility.

[0094] The above embodiments of this application demonstrate that the device can be modified to include various complex optical elements, such as crystal analyzers, thereby providing users with a powerful and flexible system for advanced XRD measurements without manual intervention.

[0095] In one embodiment of this application, the quasi-focusing optical path component 12 is provided with at least one anti-scattering mask 15.

[0096] It should be noted that the anti-scattering mask 15 can minimize crosstalk between optical paths. The anti-scattering mask 15 may include a pluggable first mask 151 and a second mask 152. The first mask 151 is disposed at the opening of the quasi-focusing optical path component 12, and the second mask 152 is disposed on the side of the quasi-focusing optical path component 12 closer to the target detector 2. The first mask 151 and the second mask 152 can reduce parasitic scattering reaching non-designated detection areas and reduce scattering between different optical paths.

[0097] This application provides an X-ray diffraction device, including: an incident light source 41, a sample stage, a control component 6, and a multi-geometry diffraction guiding device as described in any embodiment of this application;

[0098] The control component 6 is electrically connected to the target detector 2;

[0099] The incident light source 41 is configured to emit an incident beam 42 to illuminate the sample 52 on the sample stage to generate the diffracted beam 3;

[0100] The control component 6 is configured to acquire the first diffraction signal 311 of the first detection region 21 and the second diffraction signal 321 of the second detection region 22, and to superimpose the first diffraction signal 311 and the second diffraction signal 321 to calculate the measurement result 33.

[0101] It should be noted that when the device is installed in an X-ray diffraction apparatus, by setting the 2θ angle of the goniometer, the diffracted beam 3 is guided through the corresponding optical path component (parallel optical path component 11 or quasi-focusing optical path component 12) and projected onto the corresponding predefined detection area. The control component 6 can manage and record the data of the corresponding detection area and perform corresponding data processing according to the set 2θ angle and the expected measurement type.

[0102] In one embodiment of this application, the X-ray diffraction equipment further includes: an axial cable collimator 7; the axial cable collimator 7 is connected between the mounting connection portion 14 and the target detector 2.

[0103] It should be noted that a replaceable or detachable axial cable collimator can also be integrated into the device to control the axial divergence of the diffracted beam 3 arriving at the detection area; the plane of the parallel plate of the axial cable collimator 7 can be perpendicular to the plane of the parallel plate of the parallel optical path component 11.

[0104] Although preferred embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present application. For example, two or more PPCs, or other types of diffraction beam 3 optical devices, can be integrated into the multi-geometry diffraction guiding device. The precise size and characteristics of the PPCs and the segmentation method of the detectors can be adaptively adjusted according to specific analytical requirements.

[0105] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0106] The above provides a detailed description of a multi-geometric configuration diffraction guiding device and X-ray diffraction equipment provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A multi-geometric configuration diffraction guiding device, characterized in that, The device is used to guide a diffraction beam to a target detector in an X-ray diffraction apparatus. The device includes: a housing, a parallel optical path component, and a quasi-focusing optical path component; The parallel optical path component and the quasi-focusing optical path component are disposed on the inner side of the housing; the housing is provided with a mounting connection part corresponding to the target detector; When the diffracted beam has a parallel beam geometry, the parallel optical path component is configured to guide the diffracted beam to the first detection region of the target detector; When the diffracted beam has a quasi-focused beam geometry, the quasi-focused optical path component is configured to guide the diffracted beam to the second detection region of the target detector; The parallel optical path component includes a first parallel optical path sub-component and a second parallel optical path sub-component; the first detection region includes a first detection sub-region and a second detection sub-region. The first parallel optical path sub-component corresponds to the first detector sub-region; the second parallel optical path sub-component corresponds to the second detector sub-region; The quasi-focusing optical path component is disposed between the first parallel optical path sub-component and the second parallel optical path sub-component; the second detection region is disposed between the first detection sub-region and the second detection sub-region.

2. The apparatus according to claim 1, characterized in that, The diffraction beam includes a first parallel sub-beam and a second parallel sub-beam; When the diffracted beam has a parallel beam geometry, the first parallel beam sub-component is configured to guide the first parallel beam to the first detector region, and the second parallel beam sub-component is configured to guide the second parallel beam to the second detector region.

3. The apparatus according to claim 1, characterized in that, The diffraction beam comprises two sets that are sequentially guided to corresponding detection regions; When the diffracted beam has a parallel beam geometry, the first parallel optical path sub-component is configured to guide the first set of diffracted beams to the first detector sub-region, and the second parallel optical path sub-component is configured to guide the second set of diffracted beams to the second detector sub-region.

4. The apparatus according to claim 1, characterized in that, The first parallel optical path component is a first parallel plate collimator; the second parallel optical path component is a second parallel plate collimator.

5. The apparatus according to claim 4, characterized in that, The first parallel plate collimator and the second parallel plate collimator correspond to different or the same angular reception resolution.

6. The apparatus according to claim 1, characterized in that, The first parallel optical path component is a first parallel plate collimator; the second parallel optical path component is a triaxial crystal analyzer.

7. The apparatus according to claim 1, characterized in that, The quasi-focusing optical path component is provided with at least one anti-scattering mask.

8. An X-ray diffraction apparatus, characterized in that, include: An incident light source, a sample stage, a control assembly, and a multi-geometric diffraction guide device as described in any one of claims 1-7; The control component is electrically connected to the target detector; The incident light source is configured to emit an incident beam to illuminate the sample on the sample stage to generate the diffracted beam; The control component is configured to acquire a first diffraction signal from the first detection region and a second diffraction signal from the second detection region, and to superimpose the first diffraction signal and the second diffraction signal to calculate the measurement result.

9. The X-ray diffraction apparatus according to claim 8, characterized in that, Also includes: Axial cable collimator; the axial cable collimator is connected between the mounting connection and the target detector.

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