Three-axis motion platform and plane driving device

Abstract

The invention relates to the technical field of plane driving devices, in particular to a three-axis motion platform and a plane driving device. The three-axis motion platform comprises a base, a first driving mechanism, a second driving mechanism and a chuck, the first driving mechanism comprises first driving pieces, first flexible hinges and a first connecting frame, and one first driving piece is in transmission connection with one end of the first connecting frame through the first flexible hinge; and the other first driving piece is in transmission connection with the other end of the first connecting frame. The second driving mechanism comprises second driving pieces, second flexible hinges and a second connecting frame, one second driving piece is in transmission connection with one end of the second connecting frame through the second flexible hinges, and the other second driving piece is in transmission connection with the other end of the second connecting frame. The chuck is in sliding connection with the first connecting frame in the Y-axis direction, and the chuck is further in sliding connection with the second connecting frame in the X-axis direction. The structure of the three-axis motion platform is simplified, the overall height is reduced, and parallel driving is achieved so as to adapt to scenes with higher acceleration.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of planar driving devices, and particularly relates to a three-axis motion platform and a planar driving device. BACKGROUND

[0002] The three-axis motion platform generally comprises a base, a driving mechanism in the X-axis direction, a driving mechanism in the Y-axis direction and a rotating mechanism in the Z-axis direction. The conventional assembly mode is a stacked assembly, that is, the driving mechanism in the Y-axis direction is first installed on the base, then the driving mechanism in the X-axis direction is installed on the output end of the driving member in the Y-axis direction, and finally the rotating mechanism in the Z-axis direction is integrated on the output end of the driving mechanism in the X-axis direction. The problem of the current stacked three-axis motion platform is that on the one hand, the platform structure is complex, and the height size is large, which limits the installation space of the three-axis motion platform; on the other hand, the driving quality of the driving mechanism in the X-axis direction and the driving mechanism in the Y-axis direction will have a large difference, which cannot achieve the best driving load and cannot adapt to higher acceleration scenes. SUMMARY

[0003] The present application aims to provide a three-axis motion platform and a planar driving device to simplify the structure of the three-axis motion platform, reduce the overall height, facilitate installation and use, and realize parallel driving of the first driving mechanism and the second driving mechanism, so as to avoid a large difference in driving quality along the X-axis direction and the Y-axis direction, and to adapt to higher acceleration scenes.

[0004] To achieve this purpose, the technical solution adopted by the present application is:

[0005] The three-axis motion platform comprises:

[0006] a base;

[0007] a first driving mechanism comprising two first driving members with output directions parallel to the X-axis direction, a first flexible hinge and a first connecting frame, the two first driving members being oppositely and spacedly arranged on the base along the Y-axis direction, one first driving member being drivingly connected to one end of the first connecting frame along the Y-axis direction through the first flexible hinge, and the other first driving member being drivingly connected to the other end of the first connecting frame along the Y-axis direction;

[0008] A second driving mechanism comprises two second driving members whose output directions are parallel to the Y-axis direction, a second flexible hinge and a second connecting frame. The two second driving members are oppositely and spacedly arranged along the X-axis direction on the base. One second driving member is drivingly connected with the second connecting frame at one end along the X-axis direction through the second flexible hinge, and the other second driving member is drivingly connected with the second connecting frame at the other end along the X-axis direction. Along the Z-axis direction, the first connecting frame is above the second connecting frame, and the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other in pairs.

[0009] A chuck is above the first connecting frame along the Z-axis direction and is slidingly connected with the first connecting frame along the Y-axis direction. The chuck is also slidingly connected with the second connecting frame along the X-axis direction.

[0010] As an optional solution, the first driving mechanism and the second driving mechanism each further comprise:

[0011] A carrier, the two carriers of the first driving mechanism are slidingly arranged on the base along the X-axis direction, and the two first driving members are arranged on the corresponding carriers respectively. The two carriers of the second driving mechanism are slidingly arranged on the base along the Y-axis direction, and the two second driving members are arranged on the corresponding carriers respectively.

[0012] A limiting mechanism, the limiting mechanism is arranged on the base and is drivingly connected with the carriers one by one to limit the position of the carriers relative to the base.

[0013] As an optional solution, the limiting mechanism comprises a limiting stator and a limiting mover which are matched with each other. The limiting stator is arranged at the bottom end of the carrier, and the limiting mover is arranged on the base. The output direction of the limiting stator is opposite to the sliding trend of the carrier along the X-axis direction or along the Y-axis direction.

[0014] As an optional solution, the first driving mechanism and the second driving mechanism each further comprise:

[0015] A first stopper, each carrier is provided with the first stopper;

[0016] A second stopper, the two second stoppers are spacedly arranged on the base along the X-axis direction or along the Y-axis direction;

[0017] The first stopper of the carrier of the first driving mechanism is limitingly arranged between the two second stoppers which are spacedly arranged along the X-axis direction. The first stopper of the carrier of the second driving mechanism is limitingly arranged between the two second stoppers which are spacedly arranged along the Y-axis direction.

[0018] Optionally, one of the base and the carrier is provided with a first sliding block, and the other is provided with a first sliding rail in sliding cooperation with the first sliding block;

[0019] The first sliding rail corresponding to the carrier of the first driving mechanism extends along the X-axis direction, and the first sliding rail corresponding to the carrier of the second driving mechanism extends along the Y-axis direction.

[0020] Optionally, the first driving member comprises a first stator and a first mover in cooperation, the first stator is arranged on the corresponding carrier along the X-axis direction, the first mover of one of the first driving members is connected with the first flexible hinge, and the first mover of the other of the first driving members is connected with one end of the first connecting frame away from the first flexible hinge.

[0021] The second driving member comprises a second stator and a second mover in cooperation, the second stator is arranged on the corresponding carrier along the Y-axis direction, the second mover of one of the second driving members is connected with the second flexible hinge, and the second mover of the other of the second driving members is connected with one end of the second connecting frame away from the second flexible hinge.

[0022] Optionally, the first driving mechanism and the second driving mechanism both further comprise an air floating guide rail, the air floating guide rail comprises a guide rail body and a sliding plate in sliding cooperation, and the first mover and the second mover are both connected with the sliding plate of the corresponding air floating guide rail.

[0023] The guide rail body in sliding cooperation with the sliding plate of the first mover extends along the X-axis direction, and the guide rail body in sliding cooperation with the sliding plate of the second mover extends along the Y-axis direction.

[0024] Optionally, the first mover and the second mover are both provided with a displacement sensor, the displacement sensor is used for measuring the floating amount of the first stator along the X-axis direction or the floating amount of the second stator along the Y-axis direction, and the displacement sensor is in signal connection with the corresponding limiting mechanism.

[0025] Optionally, the first connecting frame is provided with a second sliding rail along the Y-axis direction, the chuck is correspondingly provided with a second sliding block, and the second sliding block is arranged in sliding along the Y-axis direction on the second sliding rail.

[0026] The second connecting frame is provided with a third sliding rail along the X-axis direction, the chuck is correspondingly provided with a third sliding block, and the third sliding block is arranged in sliding along the X-axis direction on the third sliding rail.

[0027] A planar driving device comprises the three-axis motion platform.

[0028] The present application has the following advantages:

[0029] The three-axis motion platform proposed in this invention has two first driving members that drive the chuck to move along the X-axis direction via a first connecting frame, and two second driving members that drive the chuck to move along the Y-axis direction via a second connecting frame. This allows the first driving mechanism to drive the chuck independently to achieve movement in the X-axis direction, and the second driving mechanism to drive the chuck independently to achieve movement in the Y-axis direction. Furthermore, utilizing the motion compensation effect of the first and second flexible hinges, the first driving member not connected to the first flexible hinge drives the first connecting frame to deflect at a certain angle relative to the X-axis direction, and the second driving member not connected to the second flexible hinge drives the second connecting frame to deflect at the same angle relative to the Y-axis direction. This ensures that the first and second connecting frames remain perpendicular, meaning that the rotation of the chuck around the Z-axis is achieved through the coordinated action of the first and second driving mechanisms, thus realizing the movement of the chuck along the X and Y axes and its rotation around the Z-axis.

[0030] The advantages of a three-axis motion platform are as follows: 1) The first and second drive components are laid flat on the base, avoiding the stacking and series arrangement of the first and second drive mechanisms, reducing the overall height of the three-axis motion platform, saving installation space, and facilitating the installation and use of the three-axis motion platform; 2) The chuck rotates around the Z-axis direction through the cooperation of the first and second drive mechanisms, eliminating the need for an additional rotary drive mechanism, simplifying the structure and reducing costs; 3) The first drive mechanism drives the chuck independently to achieve movement in the X-axis direction, and the second drive mechanism drives the chuck independently to achieve movement in the Y-axis direction, so as to achieve parallel drive of the chuck, eliminating the difference in drive mass between the first drive mechanism along the X-axis direction and the second drive mechanism along the Y-axis direction, ensuring that the first and second drive mechanisms achieve the optimal drive load, thereby better adapting to scenarios with higher acceleration.

[0031] The planar drive device proposed in this invention utilizes the aforementioned three-axis motion platform, achieving chuck rotation around the Z-axis through the coordinated operation of the first and second drive mechanisms. This eliminates the need for an additional rotary drive mechanism, simplifying the structure and reducing costs. The parallel drive of the chuck by the first and second drive mechanisms eliminates the difference in drive mass between the first drive mechanism along the X-axis and the second drive mechanism along the Y-axis, ensuring optimal drive load for both mechanisms and better adapting to scenarios with higher acceleration. Attached Figure Description

[0032] Figure 1 This is a top view of the three-axis motion platform provided in an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the structure of the three-axis motion platform provided in an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the assembly structure of the first connecting frame, the second connecting frame, and the chuck provided in an embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the structure of the first driving member and the platform provided in an embodiment of the present invention;

[0036] Figure 5 This is a partial structural schematic diagram of the base provided in an embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram of the platform structure provided in an embodiment of the present invention.

[0038] The component names and labels in the diagram are as follows:

[0039] 10. Platform; 20. Limiting mechanism; 30. First stop; 40. Second stop; 50. First slider; 60. First slide rail; 70. Air-bearing guide rail; 701. Guide rail body; 702. Slide plate; 80. Displacement sensor;

[0040] 1. Base; 2. First driving component; 21. First stator; 22. First mover; 3. First flexible hinge; 4. First connecting frame; 41. Second slide rail; 5. Second driving component; 6. Second flexible hinge; 7. Second connecting frame; 71. Third slide rail; 8. Chuck; 81. Second slider; 82. Third slider. Detailed Implementation

[0041] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining the present invention and are not intended to limit the present invention. Furthermore, it should be noted that, for ease of description, only the parts related to the present invention are shown in the accompanying drawings, not all of them.

[0042] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0044] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0045] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0046] The current stacked three-axis motion platform has the following problems: on the one hand, the platform structure is complex and the height is large, which limits the installation space of the three-axis motion platform; on the other hand, there will be a large difference in the driving quality between the drive mechanism in the X-axis direction and the drive mechanism in the Y-axis direction, which cannot achieve the optimal drive load and cannot adapt to scenarios with higher acceleration.

[0047] To solve the above problems, such as Figure 1 and Figure 2As shown, this embodiment proposes a three-axis motion platform, which includes a base 1, a first drive mechanism, a second drive mechanism, and a chuck 8. The first drive mechanism includes two first drive members 2 whose output directions are parallel to the X-axis direction, a first flexible hinge 3, and a first connecting frame 4. The two first drive members 2 are arranged opposite to each other and spaced apart on the base 1 along the Y-axis direction. One first drive member 2 is connected to one end of the first connecting frame 4 along the Y-axis direction through the first flexible hinge 3, and the other first drive member 2 is connected to the other end of the first connecting frame 4 along the Y-axis direction. The second drive mechanism includes two second drive members 5, both with their output directions parallel to the Y-axis, a second flexible hinge 6, and a second connecting frame 7. The two second drive members 5 are positioned opposite each other and spaced apart on the base 1 along the X-axis. One second drive member 5 is connected to one end of the second connecting frame 7 along the X-axis via the second flexible hinge 6, and the other second drive member 5 is connected to the other end of the second connecting frame 7 along the X-axis. Along the Z-axis, the first connecting frame 4 is located above the second connecting frame 7, and the X-axis, Y-axis, and Z-axis are mutually perpendicular. Along the Z-axis, a chuck 8 is located above the first connecting frame 4 and is slidably connected to the first connecting frame 4 along the Y-axis. The chuck 8 is also slidably connected to the second connecting frame 7 along the X-axis.

[0048] Two first driving members 2 drive the chuck 8 to move along the X-axis direction via the first connecting frame 4, and two second driving members 5 drive the chuck 8 to move along the Y-axis direction via the second connecting frame 7. This allows the first driving mechanism to drive the chuck 8 independently to achieve movement in the X-axis direction, and the second driving mechanism to drive the chuck 8 independently to achieve movement in the Y-axis direction. Furthermore, utilizing the motion compensation effect of the first flexible hinge 3 and the second flexible hinge 6, the first driving member 2 (not connected to the first flexible hinge 3) drives the first connecting frame 4 to deflect at a certain angle relative to the X-axis direction, and the second driving member 5 (not connected to the second flexible hinge 6) drives the second connecting frame 7 to deflect at the same angle relative to the Y-axis direction. This ensures that the first connecting frame 4 and the second connecting frame 7 always remain perpendicular. In other words, the first and second driving mechanisms work together to achieve rotation of the chuck 8 around the Z-axis direction, thereby realizing movement of the chuck 8 along the X-axis and Y-axis directions, as well as rotation around the Z-axis direction.

[0049] The advantages of the three-axis motion platform are as follows: 1) The first drive component 2 and the second drive component 5 are laid flat on the base 1, avoiding the stacking and series arrangement of the first drive mechanism and the second drive component 5, reducing the overall height of the three-axis motion platform, saving installation space, and facilitating the installation and use of the three-axis motion platform; 2) The chuck 8 is rotated around the Z-axis by the cooperation of the first drive mechanism and the second drive mechanism, without the need for an additional rotary drive mechanism, simplifying the structure and reducing costs; 3) The first drive mechanism drives the chuck 8 to achieve movement in the X-axis direction, and the second drive mechanism drives the chuck 8 to achieve movement in the Y-axis direction, so as to achieve parallel drive of the chuck 8, eliminate the difference in drive mass between the first drive mechanism along the X-axis direction and the second drive mechanism along the Y-axis direction, and ensure that the first drive mechanism and the second drive mechanism achieve the optimal drive load, thereby better adapting to scenarios with higher acceleration.

[0050] like Figure 1 As shown, along the X-axis, the output end of the first driving member 2 on the left is connected to the first flexible hinge 3, and the first flexible hinge 3 is connected to one end of the first connecting frame 4. The output end of the first driving member 2 on the right is connected to the other end of the first connecting frame 4 away from the first flexible hinge 3. The two first driving members 2 synchronously drive the first connecting frame 4 to move along the X-axis, thereby realizing the movement of the chuck 8 along the X-axis. Along the Y-axis, the output end of the upper second driving member 5 is connected to the second flexible hinge 6, and the second flexible hinge 6 is connected to one end of the second connecting frame 7. The output end of the lower second driving member 5 is connected to the other end of the second connecting frame 7 away from the second flexible hinge 6. The two second driving members 5 synchronously drive the second connecting frame 7 to move along the Y-axis, thereby realizing the movement of the chuck 8 along the Y-axis. The parallel driving of the chuck 8 is achieved through the arrangement of the first driving mechanism and the second driving mechanism on the base 1.

[0051] It should be noted that the chuck 8 of the aforementioned three-axis motion platform is mainly used to support the wafer, and only a small rotation angle (typically 1°-2°) is required. For example... Figure 1As shown, the first driving member 2 on the left (connected to the first flexible hinge 3) drives the first connecting frame 4 to move a small displacement along the X-axis, and the first driving member 2 on the right drives the first connecting frame 4 to move a small displacement along the X-axis. The driving directions of the two first driving members 2 are both along the X-axis and opposite, at which time the first flexible hinge 3 bends. Simultaneously, the second driving member 5 on the upper side (connected to the second flexible hinge 6) drives the second connecting frame 7 to move a small displacement along the Y-axis, and the second driving member 5 on the lower side drives the second connecting frame 7 to move a small displacement along the Y-axis. The driving directions of the two second driving members 5 are both along the Y-axis and opposite, at which time the second flexible hinge 6 bends, causing the first connecting frame 4 and the second connecting frame 7 to rotate synchronously, and the two connecting frames always remain perpendicular, thus achieving a small rotation angle of the chuck 8 around the Z-axis. With the above settings, the chuck 8 can have the freedom of rotation around the Z-axis without the need for an additional rotary drive mechanism, simplifying the structure of the three-axis motion platform and reducing costs.

[0052] like Figure 2 and Figure 3 As shown, the first connecting frame 4 is provided with a second slide rail 41 along the Y-axis, and the chuck 8 is correspondingly provided with a second slider 81, which is slidably mounted on the second slide rail 41 along the Y-axis. The second connecting frame 7 is provided with a third slide rail 71 along the X-axis, and the chuck 8 is correspondingly provided with a third slider 82, which is slidably mounted on the third slide rail 71 along the X-axis. Specifically, the first connecting frame 4 has second slide rails 41 on both sides along the Y-axis, and the chuck 8 is slidably connected to the second slide rails 41 via the second slider 81; the second connecting frame 7 has third slide rails 71 on both sides along the X-axis, and the chuck 8 is slidably connected to the third slide rails 71 via the third slider 82.

[0053] Through the sliding engagement of the second slider 81 with the second slide rail 41 and the sliding engagement of the third slider 82 with the third slide rail 71, the chuck 8 is guided and limited to move along the X-axis and Y-axis directions, improving the moving accuracy and stability of the chuck 8. On the other hand, the second slide rail 41 and the third slide rail 71 are decoupled slide rails, that is, the first connecting frame 4 and the second connecting frame 7 can drive the chuck 8 to move independently, realizing the parallel drive of the first drive mechanism and the second drive mechanism.

[0054] It should be noted that the components and arrangement of each component of the first drive mechanism and the second drive mechanism are the same. The only difference between the two drive mechanisms is their arrangement direction. That is, the first drive mechanism is arranged along the Y-axis and the second drive mechanism is arranged along the X-axis.

[0055] like Figure 1 , Figure 2 and Figure 4As shown, both the first and second drive mechanisms include a platform 10 and a limiting mechanism 20. The two platforms 10 of the first drive mechanism are slidably mounted on the base 1 along the X-axis, and the two first drive members 2 are respectively mounted on their corresponding platforms 10. The two platforms 10 of the second drive mechanism are slidably mounted on the base 1 along the Y-axis, and the two second drive members 5 are respectively mounted on their corresponding platforms 10. The limiting mechanism 20 is mounted on the base 1 and is connected to the platforms 10 in a one-to-one transmission manner to limit the position of the platforms 10 relative to the base 1. Because the platforms 10 are slidably mounted on the base 1, the first drive members 2 and the second drive members 5 are movably arranged on the platforms 10 through their corresponding platforms, thus achieving a floating arrangement of the four drive members on the base 1. This greatly reduces the reaction force of the drive members, suppresses the vibration when the drive members drive the chuck 8 to move, and prevents vibration from being transmitted to the base 1. Therefore, a good vibration isolation effect can be achieved without arranging an active vibration isolation system on the base 1, improving the movement accuracy of the three-axis motion platform.

[0056] Specifically, among the four platforms 10, two platforms 10 are arranged at intervals along the X-axis direction on the base 1, and two second driving members 5 are respectively installed on the corresponding two platforms 10; the other two platforms 10 are arranged at intervals along the Y-axis direction on the base 1, and two first driving members 2 are respectively installed on the corresponding two platforms 10, so as to realize the floating arrangement of the four driving members on the base 1.

[0057] In addition, a limiting mechanism 20 is provided at the bottom of each platform 10, so that the four limiting mechanisms 20 are respectively connected to the four platforms 10 in a one-to-one transmission manner, so that the limiting mechanism 20 transmits driving force to the platform 10 to resist the reaction force when the driving component is working, thereby keeping the position of the driving component and the platform 10 relative to the base 1 stable and preventing the platform 10 and the corresponding driving component from rushing out of the base 1 under the action of the reaction force.

[0058] In this embodiment, the first driving member 2 and the second driving member 5 have the same structure, differing only in the arrangement direction and position of the base 1. For example... Figure 4 As shown, the first driving member 2 includes a cooperating first stator 21 and a first mover 22. The first stator 21 is arranged along the X-axis direction on the corresponding platform 10. The first mover 22 of one first driving member 2 is connected to the first flexible hinge 3, and the first mover 22 of the other first driving member 2 is connected to the end of the first connecting frame 4 away from the first flexible hinge 3. The second driving member 5 includes a cooperating second stator and a second mover. The second stator is arranged along the Y-axis direction on the corresponding platform 10. The second mover of one second driving member 5 is connected to the second flexible hinge 6, and the second mover of the other second driving member 5 is connected to the end of the second connecting frame 7 away from the second flexible hinge 6.

[0059] Specifically, the first stator 21 of the first driving component 2 includes multiple permanent magnets arranged along the Y-axis within a U-shaped frame to establish a strong static magnetic field. The first mover 22 consists of three-phase coil windings and an iron core and can generate a magnetic field after being energized. The first mover 22 is connected to the driven load (first connecting frame 4 and chuck 8) and moves linearly within the U-shaped frame. When an alternating current is applied to the three-phase coil windings of the first mover 22, a changing traveling wave magnetic field is generated around the three-phase coil windings. This traveling wave magnetic field interacts with the static magnetic field generated by the first stator 21 to propel the first mover 22 to move linearly along the X-axis. By changing the phase and amplitude of the applied current, the magnitude and direction of the thrust on the first mover 22 can be precisely controlled; by changing the frequency of the applied current, the operating speed of the first driving component 2 can be adjusted. Since the specific structure of the first driving component 2 described above is all prior art, the array arrangement of the permanent magnets and the control process of the first driving component 2 will not be elaborated further. Furthermore, since the second driving member 5 has the same structure as the first driving member 2, except for the different arrangement direction of the base 1, the specific structure of the second driving member 5 will not be described in detail.

[0060] like Figure 1 and Figure 2 As shown, both the first and second drive mechanisms further include an air-bearing guide rail 70. The air-bearing guide rail 70 includes a guide rail body 701 and a slide plate 702 that are slidably engaged. The first mover 22 and the second mover are both connected to the corresponding slide plate 702 of the air-bearing guide rail 70. The guide rail body 701 that is slidably engaged with the slide plate 702 of the first mover 22 extends along the X-axis, and the guide rail body 701 that is slidably engaged with the slide plate 702 of the second mover extends along the Y-axis. By setting the air-bearing guide rail 70, the movement of the first mover 22 along the X-axis and the movement of the second mover along the Y-axis are guided and limited, thereby improving the movement accuracy and stability of the first mover 22 along the X-axis and the movement accuracy and stability of the second mover along the Y-axis, respectively. Since the guide rail body 701 and the slide plate 702 of the air-bearing guide rail 70 are slidably engaged in a non-contact manner, wear between the guide rail body 701 and the slide plate 702 is avoided, thus improving their service life. Moreover, the coefficient of friction between the guide rail body 701 and the slide plate 702 is extremely low, generating almost no heat and resulting in small thermal deformation, which further improves the guiding and limiting effect and reduces the energy consumption of the first driving component 2 and the second driving component 5.

[0061] It should be noted that both the first mover 22 and the second mover are equipped with displacement sensors 80. The displacement sensors 80 are used to measure the floating amount of the corresponding first stator 21 along the X-axis or the floating amount of the second stator along the Y-axis. The displacement sensors 80 are signal-connected to the corresponding limit mechanisms 20. The aforementioned displacement sensors 80 can capture the original position of the stators (first stator 21 and second stator) through a high-resolution auxiliary encoder, while the main encoder records the floating amount and phase angle of the stator. The floating error is corrected in real time using its own algorithm, ultimately achieving the effect of "stator movement without change in control precision."

[0062] like Figure 4 and Figure 5 As shown, the limiting mechanism 20 includes a limiting stator and a limiting mover that cooperate with each other. The limiting stator is disposed at the bottom end of the platform 10, and the limiting mover is disposed on the base 1. The output direction of the limiting stator is opposite to the sliding tendency of the platform 10 along the X-axis or Y-axis. Specifically, the limiting mechanism 20 is a motor, and the limiting stator of each motor is connected to the corresponding platform 10. The limiting mover is fixed to the base 1. The limiting stator provides resistance to the platform 10 to counteract the reaction force on the platform 10 and the driving member, thereby keeping the position of the driving member and the platform 10 relative to the base 1 stable and achieving a good vibration isolation effect.

[0063] like Figure 5 and Figure 6 As shown, both the first and second drive mechanisms further include a first stop 30 and a second stop 40, with each platform 10 having a first stop 30. The two second stops 40 are spaced apart on the base 1 along the X-axis or Y-axis. The first stop 30 of the platform 10 of the first drive mechanism is positioned between the two spaced-apart second stops 40 along the X-axis. The first stop 30 of the platform 10 of the second drive mechanism is positioned between the two spaced-apart second stops 40 along the Y-axis. Through the limiting cooperation between the two second stops 40 and their corresponding first stops 30, the platform 10 is limited along the X-axis or Y-axis, preventing the platform 10 and the drive member from being ejected from the base 1 after the drive member is subjected to a reaction force.

[0064] Specifically, four stop assemblies are installed on the base 1. Each stop assembly includes a first stop portion 30 and two second stop portions 40. A first stop portion 30 is installed at the bottom of each of the four platforms 10. Two stop assemblies are spaced apart along the Y-axis of the base 1, and the two second stop portions 40 of each stop assembly are spaced apart along the X-axis of the base 1. The first stop portions 30 of the four platforms 10 are respectively located between the two second stop portions 40 of the corresponding same stop assembly to limit the ultimate displacement of the platform 10 along the X-axis or Y-axis.

[0065] like Figure 5 and Figure 6 As shown, one of the platform 10 and the base 1 is provided with a first slider 50, and the other is provided with a first slide rail 60 that slides in cooperation with the first slider 50. The first slide rail 60 corresponding to the platform 10 of the first drive mechanism extends along the X-axis direction, and the first slide rail 60 corresponding to the platform 10 of the second drive mechanism extends along the Y-axis direction. Through the sliding cooperation between the first slider 50 and the second slide rail 41, the sliding of the platform 10 relative to the base 1 along the X-axis direction or along the Y-axis direction is guided and limited, thereby improving the stability of the platform 10.

[0066] Specifically, each platform 10 is equipped with multiple first sliders 50 at its bottom end, and two first slide rails 60 are provided on the base 1 in the area directly opposite each platform 10. Each platform 10 is slidably connected to the two first slide rails 60 through multiple first sliders 50, so that four first slide rails 60 are arranged on the base 1 along the X-axis direction and four first slide rails 60 are arranged on the base 1 along the Y-axis direction.

[0067] In this embodiment, the first connecting frame 4 is connected to the first flexible hinge 3 to form a flexible gantry, and the second connecting frame 7 is connected to the second flexible hinge 6 to form another flexible gantry. This allows the first connecting frame 4 and the second connecting frame 7 to rotate slightly, enabling the chuck 8 to rotate around the Z-axis. This increases the rotational freedom of the chuck 8, eliminating the need for an additional rotational drive mechanism, simplifying the structure, reducing costs, and further lowering the overall height of the three-axis motion platform. During all driving processes of the chuck 8, the driving force is generated by the first driving component 2 and the second driving component 5. Based on their parallel driving method, the driving mass in both the X-axis and Y-axis directions is small and the difference in driving mass is small, improving the response speed and making it suitable for scenarios with higher acceleration. Secondly, both the first driving component 2 and the second driving component 5 have floating stators relative to the base 1, which can effectively suppress vibration during movement, achieving good vibration isolation without the need for an active vibration isolation system. Furthermore, during the movement of the chuck 8, all heat-generating components are located at the various driving components on the platform 10, keeping the chuck 8 away from the heat source, which helps improve the movement accuracy of the chuck 8.

[0068] This embodiment also proposes a planar drive device, which includes the aforementioned three-axis motion platform. Specifically, the planar drive device can be a dicing machine, grinding machine, or similar device used in wafer fabrication processes. By using the aforementioned three-axis motion platform, the planar drive device achieves the rotation of the chuck 8 around the Z-axis through the coordinated action of the first and second drive mechanisms, eliminating the need for an additional rotary drive mechanism, thus simplifying the structure and reducing costs. The parallel drive of the chuck 8 is achieved through the first and second drive mechanisms, eliminating the difference in drive mass between the first drive mechanism along the X-axis and the second drive mechanism along the Y-axis, ensuring that the first and second drive mechanisms achieve optimal drive load, thereby better adapting to scenarios with higher acceleration.

[0069] The above embodiments merely illustrate the basic principles and characteristics of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A three-axis motion platform, characterized in that, include: Base (1); The first drive mechanism includes two first drive members (2) whose output directions are parallel to the X-axis direction, a first flexible hinge (3) and a first connecting frame (4). The two first drive members (2) are arranged opposite to each other and spaced apart on the base (1) along the Y-axis direction. One first drive member (2) is connected to one end of the first connecting frame (4) along the Y-axis direction through the first flexible hinge (3), and the other first drive member (2) is connected to the other end of the first connecting frame (4) along the Y-axis direction. The second drive mechanism includes two second drive members (5) whose output directions are parallel to the Y-axis, a second flexible hinge (6), and a second connecting frame (7). The two second drive members (5) are arranged opposite to each other and spaced apart on the base (1) along the X-axis. One second drive member (5) is connected to one end of the second connecting frame (7) along the X-axis via the second flexible hinge (6), and the other second drive member (5) is connected to the other end of the second connecting frame (7) along the X-axis. Along the Z-axis, the first connecting frame (4) is located above the second connecting frame (7), and the X-axis, Y-axis, and Z-axis are perpendicular to each other. The chuck (8) is located above the first connecting frame (4) along the Z-axis and is slidably connected to the first connecting frame (4) along the Y-axis. The chuck (8) is also slidably connected to the second connecting frame (7) along the X-axis.

2. The three-axis motion platform according to claim 1, characterized in that, Both the first drive mechanism and the second drive mechanism further include: The first drive mechanism has two platforms (10) that are slidably disposed on the base (1) along the X-axis direction, and two first drive members (2) are respectively disposed on the corresponding platforms (10); the second drive mechanism has two platforms (10) that are slidably disposed on the base (1) along the Y-axis direction, and two second drive members (5) are respectively disposed on the corresponding platforms (10). A limiting mechanism (20) is provided on the base (1) and is connected to the platform (10) in a one-to-one transmission manner to limit the position of the platform (10) relative to the base (1).

3. The three-axis motion platform according to claim 2, characterized in that, The limiting mechanism (20) includes a limiting stator and a limiting mover that cooperate with each other. The limiting stator is disposed at the bottom end of the platform (10), and the limiting mover is disposed on the base (1). The output direction of the limiting stator is opposite to the sliding trend of the platform (10) along the X-axis or along the Y-axis.

4. The three-axis motion platform according to claim 3, characterized in that, Both the first drive mechanism and the second drive mechanism further include: First stop (30), each of the platforms (10) is provided with the first stop (30); The second stop (40) is provided on the base (1) at intervals along the X-axis direction or along the Y-axis direction. The first stop (30) of the platform (10) of the first drive mechanism is limited between two second stop (40) spaced apart along the X-axis direction; the first stop (30) of the platform (10) of the second drive mechanism is limited between two second stop (40) spaced apart along the Y-axis direction.

5. The three-axis motion platform according to claim 2, characterized in that, One of the platform (10) and the base (1) is provided with a first slider (50), and the other is provided with a first slide rail (60) that slides in cooperation with the first slider (50). The first slide rail (60) corresponding to the platform (10) of the first drive mechanism extends along the X-axis direction, and the first slide rail (60) corresponding to the platform (10) of the second drive mechanism extends along the Y-axis direction.

6. The three-axis motion platform according to claim 2, characterized in that, The first drive member (2) includes a first stator (21) and a first mover (22) that cooperate with each other. The first stator (21) is arranged along the X-axis direction on the corresponding platform (10). The first mover (22) of one first drive member (2) is connected to the first flexible hinge (3), and the first mover (22) of the other first drive member (2) is connected to the end of the first connecting frame (4) away from the first flexible hinge (3). The second drive member (5) includes a cooperating second stator and a second mover. The second stator is arranged along the Y-axis on the corresponding platform (10). The second mover of one second drive member (5) is connected to the second flexible hinge (6), and the second mover of the other second drive member (5) is connected to the end of the second connecting frame (7) away from the second flexible hinge (6).

7. The three-axis motion platform according to claim 6, characterized in that, Both the first driving mechanism and the second driving mechanism further include an air-floating guide rail (70), the air-floating guide rail (70) includes a guide rail body (701) and a slide plate (702) that are in sliding fit, and the first mover (22) and the second mover are both connected to the slide plate (702) of the corresponding air-floating guide rail (70); The guide rail body (701) that slides in cooperation with the slide plate (702) of the first mover (22) extends along the X-axis direction, and the guide rail body (701) that slides in cooperation with the slide plate (702) of the second mover extends along the Y-axis direction.

8. The three-axis motion platform according to claim 6, characterized in that, Both the first mover (22) and the second mover are provided with displacement sensors (80). The displacement sensors (80) are used to measure the floating amount of the corresponding first stator (21) along the X-axis or the floating amount of the second stator along the Y-axis. The displacement sensors (80) are signal connected to the corresponding limiting mechanism (20).

9. The three-axis motion platform according to any one of claims 1-8, characterized in that, The first connecting frame (4) is provided with a second slide rail (41) along the Y-axis direction, and the chuck (8) is provided with a second slider (81) accordingly. The second slider (81) is slidably disposed on the second slide rail (41) along the Y-axis direction. The second connecting frame (7) is provided with a third slide rail (71) along the X-axis direction, and the chuck (8) is provided with a third slider (82) corresponding to it. The third slider (82) is slidably disposed on the third slide rail (71) along the X-axis direction.

10. A planar driving device, characterized in that, The three-axis motion platform includes any one of claims 1-9.

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