Microfocus X-ray visual inspection equipment for surface defects of plate-shaped object

Abstract

The invention discloses microfocus X-ray visual inspection equipment for surface defects of a plate-shaped object. An objective table of the microfocus X-ray visual inspection equipment is used for horizontally bearing the detected plate-shaped object; the radiation source is a signal emitter, and the detector is a signal collector; the objective table is used for achieving translation in the Z direction and the X direction and can achieve rotation in the horizontal plane, and the radiation source and the detector which are located above the objective table and below the objective table respectively can swing along with the rectangular frame and can move on the Y-direction rod in the Y direction. Three-dimensional dead-corner-free detection is achieved through multi-axis linkage, the definition and detection precision of acquisition imaging are effectively improved, the phenomena of missing detection and false detection are prevented, and the device is particularly suitable for 2D and 3D detection of chip packaging defect micro-focus X-ray vision.

Description

TECHNICAL FIELD

[0001] The present application relates to a surface defect micro-focus X-ray vision detection device for plate-shaped objects, more particularly to a non-destructive detection of the surface of a semiconductor chip, which is especially suitable for the micro-focus X-ray vision 2D and 3D detection of chip packaging defects. BACKGROUND

[0002] Due to the small size of the internal high-precision object details of a semiconductor chip package, X-ray three-dimensional reconstruction technology has been applied to chip packaging defect detection to identify and screen out defect features. The existing micro-focus X-ray vision detection device has the problems of incomplete image acquisition, low contrast and gray scale of the acquired data image, low image resolution, and low imaging image clarity, which easily causes missed detection and false detection. SUMMARY

[0003] The present application is to avoid the shortcomings of the prior art, and provides a surface defect micro-focus X-ray vision detection device for plate-shaped objects, which realizes 2D or 3D defect detection of a semiconductor chip package and reduces the missed detection and false detection rate of defect detection.

[0004] The present application adopts the following technical solutions to solve the technical problems:

[0005] The surface defect micro-focus X-ray vision detection device for plate-shaped objects of the present application has the following characteristics: a stage, a stage moving module, a vision detection module, and a vision detection moving module.

[0006] The stage is horizontally arranged and used for carrying a plate-shaped object to be detected.

[0007] The vision detection module uses a radiation source as a signal transmitter and a detector as a signal collector. The radiation source and the detector are located on the same center line and are oppositely arranged below and above the stage.

[0008] The stage moving module includes a Z-direction translation unit for driving the stage to translate in the Z direction, an X-direction translation unit for driving the stage to translate in the X direction, and a rotation driving unit for driving the stage to rotate about an axis in the horizontal plane.

[0009] The vision detection moving module is provided with a rectangular frame on the base, so that the stage is located in the rectangular frame. The rectangular frame includes two side swing rods, a bottom longitudinal beam, and a top longitudinal beam. The radiation source is arranged on the bottom longitudinal beam, and the detector is arranged on the top longitudinal beam. The two side swing rods are vertical rods that can swing synchronously in the vertical plane. The bottom longitudinal beam and the top longitudinal beam are Y-direction rods that can be linked with the swing rods, so that the rectangular frame can swing as a whole. The radiation source and the detector can move in the Y direction on the Y-direction rods to adjust the Y-direction position.

[0010] The micro-focus X-ray visual inspection device for surface defects of plate-shaped objects of the present invention is characterized by: by setting the coordinated action of the visual inspection moving module and the stage moving module, 360-degree projection imaging of the plate-shaped object is obtained, realizing 3D detection of surface defects, subsurface defects and internal defects, and completing the CL three-dimensional reconstruction of the disc-shaped object based on the geometric parameters and projection data of the spatial position of the device.

[0011] The invention's micro-focus X-ray vision inspection device for surface defects of plate-shaped objects is also characterized by the following structural form: [The structure includes a swing arm and a swing arm drive unit.]

[0012] The swing arm is a double-layered rod consisting of an upper swing arm and a light source swing arm;

[0013] The bottom longitudinal beam is connected to the lower end of the two side light source swing arms via connecting blocks;

[0014] The top longitudinal beam is connected to the top of the upper swing arms on both sides;

[0015] The swing arm drive unit is driven by a stepper motor via a worm gear reducer to swing the upper swing arm, thereby causing the detector to swing; the stepper motor via a worm gear reducer and then via a second clutch drives the light source swing arm to swing, thereby causing the X-ray source to swing.

[0016] The micro-focus X-ray visual inspection device for surface defects of plate-shaped objects of the present invention is also characterized by the setting of a light source swing arm locking mechanism. It uses a support block fixed on the base to fix the lower swing arm positioning shaft, and sets a first pneumatic clutch with a small gear on the lower swing arm positioning shaft. The first pneumatic clutch is in the "engaged" state so that the small gear meshes with the large gear. The large gear is fixedly connected to the light source swing arm. The position locking of the light source swing arm is achieved by the meshing of the small gear and the large gear.

[0017] The micro-focus X-ray vision inspection device for surface defects of plate-shaped objects of the present invention is also characterized by the fact that the swing arm and the swing arm driving unit are symmetrically arranged on both sides of the stage and driven synchronously.

[0018] The micro-focus X-ray vision inspection device for surface defects of plate-shaped objects of the present invention is also characterized by the following two driving modes of the swing arm drive unit:

[0019] Method 1: Set the second clutch to the "engaged" state and the first clutch to the "disengaged" state. The light source swing arm and the upper swing rod swing synchronously, which in turn drives the detector and the X-ray source to swing synchronously.

[0020] Method 2: Set the second clutch to the "disengaged" state, the upper swing arm swings independently, and drives the detector to swing synchronously. At the same time, set the first clutch to the "engaged" state, so that the light source swing arm and the radiation source are kept in the set position.

[0021] Compared with the prior art, the present application has the beneficial effects of:

[0022] 1、The visual detection moving module and the object table moving module in the present application are multi-axis linkage, three-dimensional dead angle-free detection is realized, the clarity and detection accuracy of image acquisition are effectively improved, the phenomenon of missed detection and false detection is prevented, the equipment structure is simple, and the equipment maintenance is facilitated.

[0023] 2、The present application sets a clutch in the swing rod driving unit, the probe realizes independent swing by the clutch, and X-ray projection imaging is received in a larger range, compared with the traditional X-ray visual detection equipment, the structure is simple, and the clarity and accuracy of imaging are effectively improved.

[0024] 3、The present application is especially suitable for 2D and 3D defect detection of semiconductor chips, different detection modes of 2D or 3D are selected according to requirements, the equipment utilization rate is effectively improved, and the equipment preparation cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a schematic diagram of the detection equipment of the present application;

[0026] Figure 2 It is a schematic diagram of the swing rod and the swing rod driving unit structure in the detection equipment of the present application;

[0027] Figure 3 It is a schematic diagram of the object table assembly in the present application;

[0028] Figure 4 It is a schematic diagram of the X-direction translation unit structure of the object table in the present application;

[0029] Figure 5 It is a schematic diagram of the Z-direction translation unit structure of the object table in the present application;

[0030] Figure 6 It is a schematic diagram of the front surface structure of the rotation movement unit of the object table in the present application;

[0031] Figure 7 It is a schematic diagram of the back surface structure of the rotation movement unit of the object table in the present application.

[0032] Figure 8 It is a schematic diagram of the Y-direction translation structure of the probe in the present application;

[0033] Figure 9 It is a schematic diagram of the Y-direction translation structure of the ray source in the present application.

[0034] Reference signs: 1 base; 2 rectangular frame; 3 stage; 4-1 detector; 4-2 ray source; 5 measured plate-shaped object; 2-1 connecting block; 2-2 light source swing arm; 2-3 pinion; 2-4 first pneumatic clutch; 2-5 support block; 2-6 lower swing arm positioning shaft; 2-7 gear; 2-8 light source counterweight; 2-9 second pneumatic clutch; 2-10 worm gear reducer; 2-11 stepping flange; 2-12 stepping motor; 2-13 motor base pad plate; 2-14 upper swing rod; 2-15 swing rod counterweight; 3-1 X direction translation unit; 3-2 Z direction translation unit; 3-3 rotary drive unit; 3-1-1 X direction movement fixed plate; 3-1-2 first linear guide rail; 3-1-3 first bearing seat; 3-1-4 first limit sensor; 3-1-5 first ball screw group; 3-1-6 first nut connecting piece; 3-1-7 first motor integrated seat; 3-1-8 horizontal reducer; 3-1-9 horizontal stepping motor; 3-1-10 horizontal support block; 3-1-11 workbench support plate; 3-2-1 vertical stepping motor; 3-2-2 vertical reducer; 3-2-3 second motor integrated seat; 3-2-4 vertical drag chain connecting block; 3-2-5 horizontal displacement positioning piece; 3-2-6 vertical drag chain; 3-2-7 vertical drag chain protection sleeve; 3-2-8 second ball screw; 3-2-9 second limit sensor; 3-2-10 second bearing seat; 3-2-11 up-down back plate; 3-2-12 reinforcing rib; 3-2-13 guide rail upper plate; 3-2-14 horizontal shaft drag chain connecting plate; 3-2-15 horizontal drag chain; 3-2-16 drag chain guide plate; 3-2-17 horizontal drag chain support plate; 3-2-18 second linear guide rail; 3-2-19 anti-collision block; 3-3-1 stage base; 3-3-2 up-down positioning piece; 3-3-3 rotary disc; 3-3-4 V-shaped bearing; 3-3-5 eccentric bearing; 3-3-6 motor fixed plate; 3-3-7 servo motor; 3-3-8 spring; 3-3-9 friction wheel pre-tightening block; 3-3-10 pre-tightening bolt; 3-3-11 shaft end check ring; 3-3-12 rubber-coated wheel; 3-3-13 carbon fiber plate; 3-3-14 compression ring; 4-1-1 frame base; 4-1-2 detector motor; 4-1-3 third motor integrated seat; 4-1-4 third linear guide rail; 4-1-5 third ball screw; 4-1-6 detector body; 4-1-7 third bearing seat; 4-1-8 dust cover; 4-2-1 profile base; 4-2-2 fourth bearing seat; 4-2-3 fourth linear guide rail; 4-2-4 ray source body; 4-2-5 fourth ball screw; 4-2-6 fourth motor integrated seat; 4-2-7 ray source motor. DETAILED DESCRIPTION

[0035] REFERENCE Figure 1The detection device in the embodiment comprises a carrier table 3, a carrier table moving module, a visual detection module and a visual detection moving module; the carrier table 3 is horizontally arranged and used for carrying a plate-shaped object 5 to be detected; the visual detection module is configured with a ray source 4-2 as a signal transmitter and a detector 4-1 as a signal collector, the ray source 4-2 and the detector 4-1 are located on the same center line and oppositely arranged below and above the carrier table; the carrier table moving module comprises a Z-direction translation unit for driving the carrier table to translate in the Z direction, an X-direction translation unit for driving the carrier table to translate in the X direction, and a rotation driving unit for driving the carrier table to rotate about an axis in a horizontal plane; the visual detection moving module is configured with a rectangular frame 2 on a base, so that the carrier table 3 is located in the rectangular frame 2, the rectangular frame comprises two side swing rods, a bottom longitudinal beam and a top longitudinal beam, the ray source 4-2 is arranged on the bottom longitudinal beam, the detector 4-1 is arranged on the top longitudinal beam, the two side swing rods are vertical rods capable of synchronously swinging in a vertical plane, the bottom longitudinal beam and the top longitudinal beam are Y-direction rods capable of being linked with the swing rods, so that the rectangular frame can swing as a whole, and the ray source 4-2 and the detector 4-1 can move in the Y direction on the Y-direction rods for adjusting the Y-direction position. Through the coordinated action of the visual detection moving module and the carrier table moving module, 360-degree projection imaging of the plate-shaped object is obtained, 3D detection of surface defects, subsurface defects and internal defects is realized, and CL three-dimensional reconstruction of the disc-shaped object is completed based on the geometric parameters of the space position of the device and the projection data.

[0036] Figure 2 The swing rod is composed of an inner and outer double-layer rod of an upper swing rod 2-14 and a light source swing arm 2-2; the bottom longitudinal beam is connected to the lower ends of the two light source swing arms 2-2 through a connecting block 2-2; the top longitudinal beam is connected to the top of the two upper swing rods 2-14; the swing rod driving unit is configured with a stepper motor 2-12 driving the upper swing rod 2-14 to swing through a worm and gear reducer 2-10, thereby driving the detector 4-1 to swing; the light source swing arm 2-2 is driven to swing by the stepper motor 2-12 through the worm and gear reducer 2-10 and then through a second clutch 2-9, thereby driving the ray source 4-2 to swing. The light source swing arm 2-2 locking mechanism is configured with a support block 2-5 fixed on the base 1 fixing a lower swing arm positioning shaft 2-6, and a first pneumatic clutch 2-4 with a pinion 2-3 arranged on the lower swing arm positioning shaft 2-6; the first pneumatic clutch 2-4 is in a state of “engagement” to make the pinion 2-3 engage with a large gear 2-7, and the large gear 2-7 is fixedly connected with the light source swing arm 2-2, so as to realize the position locking of the light source swing arm 2-2 by the engagement of the pinion 2-3 and the large gear 2-7. The swing rod and the swing rod driving unit are symmetrically arranged on the two sides of the carrier table and synchronously driven, so as to improve the stability.

[0037] In the specific implementation, the corresponding technical measures comprise:

[0038] Figure 2As shown, the swing rod and swing rod driving unit include a connecting block 2-1, a light source swing arm 2-2, a pinion 2-3, a first pneumatic clutch 2-4, a support block 2-5, a lower swing arm positioning shaft 2-6, a gear wheel 2-7, a light source counterweight 2-8, a second pneumatic clutch 2-9, a worm gear reducer 2-10, a stepping flange 2-11, a stepping motor 2-12, a motor base pad plate 2-13, an upper swing rod 2-14, and a swing rod counterweight 2-15 arranged at the lower end of the upper swing rod. The connecting block 2-1 is arranged on the light source swing arm 2-2, the pinion 2-3, the first pneumatic clutch 2-4, and the lower swing arm positioning shaft 2-6 are arranged on the support block 2-5; the support block 2-5 is fixedly arranged on the base 1; the light source swing arm 2-2 provided with the light source counterweight 2-8 at the lower end is arranged on the second pneumatic clutch 2-9; the second pneumatic clutch 2-9 is arranged on the worm gear reducer 2-10; the worm gear reducer 2-10 and the stepping motor 2-12 are arranged on the stepping flange 2-11, and the motor base pad plate 2-13 is fixedly arranged on the base 1; the upper swing rod 2-14 and the swing rod counterweight 2-15 are arranged on the worm gear reducer 2-10; the stepping motor 2-12 drives the upper swing rod 2-14 and the light source swing arm 2-2 to swing; the gear wheel 2-7 is used in cooperation with the second pneumatic clutch 2-9, and the pinion 2-3 is used in cooperation with the first pneumatic clutch 2-4, so as to realize the separation or synchronous movement of the light source swing arm 2-2 and the upper swing rod 2-14; the swing rod counterweight 2-15 and the light source counterweight 2-8 are used to reduce the load of the stepping motor 2-12 in the swinging process, which is conducive to saving cost and reducing installation space.

[0039] The driving mode of the swing rod driving unit is as follows:

[0040] Mode one: the electromagnetic valve of the second clutch 2-9 is attracted and is in the “on” state, and the electromagnetic valve of the first clutch 2-4 is separated and is in the “off” state, the light source swing arm 2-2 and the upper swing rod 2-14 swing synchronously, and drive the detector 4-1 and the ray source 4-2 to swing synchronously, so as to realize scanning detection.

[0041] Mode two: the electromagnetic valve of the second clutch 2-9 is separated and is in the “off” state, the upper swing rod 2-14 swings independently and drives the detector 4-1 to swing synchronously, and the electromagnetic valve of the first clutch 2-4 is attracted and is in the “on” state, so that the light source swing arm 2-2 and the ray source 4-2 remain at the set position.

[0042] Figure 3As shown, the stage moving module includes a Z-direction translation unit 3-2 for driving the Z-direction translation of the stage, an X-direction translation unit 3-1 for driving the X-direction translation of the stage, and a rotation driving unit 3-3 for driving the rotation of the stage in the horizontal plane, wherein the X-direction translation unit 3-1 is arranged on the base 1, the Z-direction translation unit 3-2 is arranged on the X-direction translation unit 3-1, and the rotation driving unit 3-3 is arranged on the Z-direction translation unit 3-2.

[0043] Figure 4 As shown, the X-direction translation unit 3-1 includes an X-direction moving fixed plate 3-1-1, a first linear guide rail 3-1-2, a first bearing seat 3-1-3, a first limit sensor 3-1-4, a first ball screw 3-1-5, a first nut connecting piece 3-1-6, a first motor integrated seat 3-1-7, a horizontal speed reducer 3-1-8, a horizontal stepping motor 3-1-9, a horizontal support block 3-1-10, and a workbench support plate 3-1-11. The X-direction moving fixed plate 3-1-1 is arranged on the workbench support plate 3-1-11, the workbench support plate 3-1-11 is arranged on the support block 3-1-10, and the support block 3-1-10 is arranged on the base 1; one side of the first linear guide rail 3-1-2 is arranged above the X-direction moving fixed plate 3-1-1, and the other side is arranged directly below; the first bearing seat 3-1-3, the first limit sensor 3-1-4, the first ball screw group 3-1-5, the first motor integrated seat 3-1-7, the horizontal speed reducer 3-1-8, and the horizontal stepping motor 3-1-9 are arranged on the X-direction moving fixed plate 3-1-1, and the first nut connecting piece 3-1-6 is arranged on the round nut of the first ball screw 3-1-5; the horizontal stepping motor 3-1-9 drives the Z-direction translation unit 3-2 of the stage to displace in the horizontal direction; the X-direction moving unit 3-1 of the stage is driven to displace in the X-direction by the horizontal stepping motor 3-1-9, the horizontal speed reducer 3-1-8 is used to improve the torque, the first ball screw 3-1-5 transmits the torque and the rotation speed, and the first linear guide rail 3-1-2 guides.

[0044] Figure 5As shown, the Z-direction translation unit 3-2 includes a vertical stepper motor 3-2-1, a vertical speed reducer 3-2-2, a second motor integrated seat 3-2-3, a vertical drag chain connecting block 3-2-4, a horizontal displacement positioning piece 3-2-5, a vertical drag chain 3-2-6, a vertical drag chain protection sleeve 3-2-7, a second ball screw 3-2-8, a second limit sensor 3-2-9, a second bearing seat 3-2-10, an up-down back plate 3-2-11, a reinforcing rib 3-2-12, a guide rail upper plate 3-2-13, a horizontal shaft drag chain connecting plate 3-2-14, a horizontal drag chain 3-2-15, a drag chain guide plate 3-2-16, a horizontal drag chain support plate 3-2-17, a linear guide rail 23-2-18, a slider backing plate 3-2-19, and a bumper 3-2-20. Among them, the bumper 3-2-20, the second linear guide rail 3-2-18, the horizontal shaft drag chain connecting plate 3-2-14, the guide rail upper plate 3-2-13, the second bearing seat 3-2-10, the second limit sensor 3-2-9, the vertical drag chain protection sleeve 3-2-7, the horizontal displacement positioning piece 3-2-5, and the second motor integrated seat 3-2-3 are arranged on the up-down back plate 3-2-11; one end of the horizontal drag chain 3-2-15 is arranged on the horizontal shaft drag chain connecting plate 3-2-14, and the other end is arranged on the drag chain guide plate 3-2-16; the drag chain guide plate 3-2-16 is arranged on the horizontal drag chain support plate 3-2-17; the horizontal drag chain support plate 3-2-17 is arranged directly below the base 1; the reinforcing rib 3-2-12 is arranged on the up-down back plate 3-2-11 and the guide rail upper plate 3-2-13; one end of the second ball screw 3-2-8 is arranged in the second bearing seat 3-2-10, and the other end is arranged in the second motor integrated seat 3-2-3; one end of the vertical drag chain 3-2-6 is arranged on the vertical drag chain protection sleeve 3-2-7, and the other end is arranged on the vertical drag chain connecting block 3-2-4; one end of the vertical speed reducer 3-2-2 is arranged on the second motor integrated seat 3-2-3, and the other end is arranged on the vertical stepper motor 3-2-1; the vertical stepper motor 3-2-1 drives the rotary drive unit 3-3 to displace in the Z-direction. The displacement of the Z-direction translation unit 3-2 in the Z-direction is driven by the vertical speed reducer 3-2-2, which is used to increase the torque, and the second ball screw 3-2-8 transmits the torque and the speed, and the second linear guide rail 3-2-18 guides.

[0045] Figure 6 and Figure 7As shown, the rotary drive unit 3-3 includes a stage base 3-3-1, an up-down positioning piece 3-3-2, a rotary disc 3-3-3, a V-shaped bearing 3-3-4, an eccentric bearing 3-3-5, a motor fixing plate 3-3-6, a servo motor 3-3-7, a spring 3-3-8, a friction wheel pre-tightening block 3-3-9, a pre-tightening bolt 3-3-10, an axle end check ring 3-3-11, a rubber-coated wheel 3-3-12, a carbon fiber plate 3-3-13, and a compression ring 3-3-14. The friction wheel pre-tightening block 3-3-9, the motor fixing plate 3-3-6, and the up-down positioning piece 3-3-2 are arranged on the stage base 3-3-1; the spring 3-3-8 is arranged on the pre-tightening bolt 3-3-10, which is arranged between the friction wheel pre-tightening block 3-3-9 and the motor fixing plate 3-3-6; the servo motor 3-3-7 is arranged on the motor fixing plate 3-3-6, the rubber-coated wheel 3-3-12 is arranged on the axle end check ring 3-3-11, which is arranged on the servo motor 3-3-7; the carbon fiber plate 3-3-13 is arranged between the rotary disc 3-3-3 and the compression ring 3-3-14; the servo motor 3-3-7 drives the rotary disc 3-3-3, the carbon fiber plate 3-3-13, and the compression ring 3-3-14 to rotate, and the rubber-coated wheel 3-3-12 rotates in friction with the rotary disc 3-3-3. The stage rotary motion unit 3-3 is driven by the servo motor 3-3-7, the rubber-coated wheel 3-3-12 is in friction transmission with the rotary disc 3-3-3, the installation position of the pre-tightening rubber-coated wheel 3-3-12 is adjusted, so that the rubber-coated wheel 3-3-12 is always in friction contact with the rotary disc 3-3-3, and the three groups of V-shaped bearings 3-3-4 and the two groups of eccentric bearings 3-3-5 are driven to guide.

[0046] Figure 8 As shown, the detector translation module is arranged for the detector 4-1, including a frame base 4-1-1, a detector motor 4-1-2, a third motor integrated seat 4-1-3, a third linear guide rail 4-1-4, a third ball screw 4-1-5, a detector body 4-1-6, a third bearing seat 4-1-7, and a dust cover 4-1-8. The detector motor 4-1-2, the third motor integrated seat 4-1-3, the third linear guide rail 4-1-4, the third bearing seat 4-1-7, and the dust cover 4-1-8 are arranged on the frame base 4-1-1. The detector motor 4-1-2 is used to drive the displacement of the detection head 4-1-6, the third ball screw 4-1-5 transmits the rotational speed and torque, and the third linear guide rail 4-1-4 guides the displacement direction.

[0047] Figure 9As shown, the ray source translation module is arranged for the ray source 4-2, including the profile base 4-2-1, the fourth bearing seat 4-2-2, the fourth linear guide rail 4-2-3, the ray source body 4-2-4, the fourth ball screw 4-2-5, the fourth motor integrated seat 4-2-6 and the ray source motor 4-2-7. Among them, the fourth bearing seat 4-2-2, the fourth linear guide rail 4-2-3, the fourth motor integrated seat 4-2-6 and the ray source motor 4-2-7 are arranged on the profile base 4-2-1. The ray source motor 4-2-7 is used to drive the displacement of the ray source 4-2-4, the fourth ball screw 4-2-5 transmits the rotation speed and torque, and the fourth linear guide rail 4-2-3 guides the displacement direction.

[0048] In specific implementation, the corresponding technical measures also include:

[0049] The detector 4-1 in the visual detection module is used to accept the attenuated X-ray imaging emitted by the ray source 4-2, so it needs to be synchronized with each other in the movement process.

[0050] When the upper swing rod 2-16 and the light source swing arm 2-2 swing to 30 degrees in the vertical direction, the clutch is disengaged, the upper swing rod 2-16 continues to rotate with the worm gear reducer 2-12, and the detector 4-1 continues to swing, receiving the ray source projection imaging in the ray source 4-2, which can effectively improve the clarity and accuracy of imaging.

[0051] The X-direction translation unit 3-1, the translation of the detector 4-1, and the translation of the ray source 4-2 all use the top pin structure to adjust the level and parallelism, ensuring smooth operation without jamming.

[0052] The rotating disc 3-3-3 is installed with three groups of V-shaped bearings 3-3-4 and two groups of eccentric bearings 3-3-5, which are used to adjust the installation distance to make the rotation of the rotating disc 3-3-3 smooth without jamming. This structure effectively reduces the risk of jamming in the rotation process compared with the traditional waist-shaped hole adjustment.

[0053] In specific implementation, the monitoring system is installed in the upper computer, which is a DMC-E3032-A16 motion control card. The motion control card connects each motion process shaft through the EtherCAT communication protocol. The motion control card is externally connected with the EtherCAT remote IO module, which is convenient for system expansion. The motion control card supports returning to the origin, single-axis constant-length variable speed variable motion, continuous displacement, PVT motion and interpolation motion, and also has many auxiliary functions such as IO counting, high-speed latching and position comparison. It is cheap, simple to connect and has strong expandability. The detector is connected with the motion control card through the EtherCAT communication protocol, and the ray source is connected with the motion control card through the RS232 data line.

[0054] The detection device in the embodiment is particularly suitable for 2D detection of surface defects of chip packaging, and local magnification or reduction imaging of visual detection is realized by lifting position of the stage moving module.

[0055] The 2D detection is set to realize surface defect detection of chip packaging: the detector and the central axis of the ray source are in a collinear position at the zero position, multi-angle adjustment is performed on the visual detection moving module according to different specifications of chips, the stage moving module is linked with multi-point displacement, and then imaging at different positions is collected, local magnification or reduction imaging of chips is realized by lifting position of the stage moving module, and 360-degree dead-angle-free imaging of the surface of the chip is realized through multi-axis linkage.

[0056] The 3D detection is set to realize subsurface and internal defect detection of chip packaging: 360-degree projection imaging of chip packaging is realized through cooperative action of the visual detection moving module and the stage moving module, CL three-dimensional reconstruction of the chip is performed based on geometric parameters and projection data of the space position of the device; when 3D defect detection is performed, the detector 4-1 and the ray source 4-2 move synchronously, the line connecting the focal point of the ray source and the center of the detector forms an angle with the rotating shaft of the rotating disc 3-3-3, the position of the rotating disc 3-3-3 is adjusted to make the detector, the ray source and the center of the rotating disc 3-3-3 collinear; the chip to be detected is placed, the rotating step angle of the rotating disc 3-3-3 is set, the detector and the ray source are started, 360-degree projection of the object is collected, one projection is collected and saved every time the device moves, and the projection is numbered according to the step angle. The geometric parameters of the space position of each axis are fed back to the upper computer in real time, and three-dimensional CL reconstruction of the chip is realized by combining the 360-degree projection data with the corresponding geometric parameters.

[0057] The above is an actual implementation case of the present application, which does not limit the scope of the present application. Therefore, a person skilled in the art can indirectly and directly use the technical solution to other related fields without deviating from the purpose of the present application, which is within the protection scope of the present application.

Claims

1. A device for microfocus X-ray vision inspection of surface defects of plate-like objects, characterized in that The device comprises a stage, a stage moving module, a visual detection module and a visual detection moving module. The stage is horizontally arranged and used for carrying a plate-shaped object (5) to be detected. The visual detection module uses a ray source (4-2) as a signal transmitter and a detector (4-1) as a signal collector, and the ray source (4-2) and the detector (4-1) are located on the same center line and oppositely arranged below and above the stage. The stage moving module comprises a Z-direction translation unit used for driving the stage to translate in the Z direction, an X-direction translation unit used for driving the stage to translate in the X direction, and a rotation driving unit used for driving the stage to rotate about an axis in a horizontal plane. The visual detection moving module is arranged on a base (1) and comprises a rectangular frame, the stage being arranged in the rectangular frame, the rectangular frame comprising two side swing rods, a bottom longitudinal beam and a top longitudinal beam, the ray source (4-2) being arranged on the bottom longitudinal beam and the detector (4-1) being arranged on the top longitudinal beam, the two side swing rods being vertical rods capable of synchronously swinging in a vertical plane, the bottom longitudinal beam and the top longitudinal beam being Y-direction rods capable of being linked with the swing rods, so that the rectangular frame can swing as a whole, and the ray source (4-2) and the detector (4-1) can move in the Y direction on the Y-direction rods for adjusting the Y-direction positions.

2. The micro-focus X-ray visual inspection device for surface defects of plate-shaped objects according to claim 1, characterized in that: Through the coordinated action of the visual detection moving module and the stage moving module, 360-degree projection imaging of the plate-shaped object is obtained, 3D detection of surface defects, subsurface defects and internal defects is realized, and CL three-dimensional reconstruction of the disc-shaped object is completed based on geometric parameters of a space position where the device is located and projection data.

3. The plate-shaped object surface defect micro-focus X-ray visual detection device according to claim 1, characterized in that: The structure of the swing rod and the swing rod driving unit is as follows: The swing rod is composed of an inner outer double-layer rod of an upper swing rod (2-14) and a light source swing arm (2-2); The bottom longitudinal beam is connected to the lower ends of the two light source swing arms (2-2) through a connecting block (2-2); The top longitudinal beam is connected to the top of the two upper swing rods (2-14); The swing rod driving unit is composed of a step motor (2-12) driving the upper swing rod (2-14) to swing through a worm and gear reducer (2-10), thereby driving the detector (4-1) to swing; the step motor (2-12) drives the light source swing arm (2-2) to swing through the worm and gear reducer (2-10) and a second clutch (2-9), thereby driving the ray source (4-2) to swing.

4. The apparatus according to claim 3, wherein: the X-ray source is a microfocus X-ray source; and the X-ray detector is a microfocus X-ray detector. The light source swing arm (2-2) locking mechanism is fixed by the support block (2-5) fixed on the base (1) to fix the lower swing arm positioning shaft (2-6), and a first pneumatic clutch (2-4) with a pinion (2-3) is arranged on the lower swing arm positioning shaft (2-6), the first pneumatic clutch (2-4) is in the state of "engagement" to make the pinion (2-3) engage with the gear (2-7), the gear (2-7) is fixedly connected with the light source swing arm (2-2), and the engagement of the pinion (2-3) and the gear (2-7) realizes the position locking of the light source swing arm (2-2).

5. The apparatus according to claim 3, wherein: the X-ray source is a microfocus X-ray source; and the X-ray detector is a microfocus X-ray detector. The swing rod and the swing rod driving unit are symmetrically arranged on both sides of the object table and are synchronously driven.

6. The apparatus according to claim 4, wherein: the X-ray source is a microfocus X-ray source; and the X-ray detector is a microfocus X-ray detector. The driving mode of the swing rod driving unit is as follows: Mode one: the second clutch (2-9) is in the state of "engagement", the first clutch (2-4) is in the state of "disengagement", the light source swing arm (2-2) and the upper swing rod (2-14) are synchronously swung, and the detector (4-1) and the ray source (4-2) are synchronously swung; Mode two: the second clutch (2-9) is in the state of "disengagement", the upper swing rod (2-14) is independently swung, and the detector (4-1) is synchronously swung, and the first clutch (2-4) is in the state of "engagement", so that the light source swing arm (2-2) and the ray source (4-2) are kept at the set position.

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