Electrostatic stiffness-damping regulation and control method for MEMS (Micro Electro Mechanical System)

By introducing RC elements into the differential parallel plate capacitor structure of MEMS devices and combining DC and AC drive voltages, flexible control of the electrostatic stiffness and damping of MEMS devices is achieved, solving the problems of complex operation and low precision in the prior art, and improving device performance and yield.

CN121376897APending Publication Date: 2026-01-23ZHEJIANG UNIV
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Patent Information

Application Number
CN202511509675.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-10-22
Publication Date
2026-01-23

AI Technical Summary

Technical Problem

Existing MEMS devices require additional structures to adjust stiffness and damping, which is complex to operate and has low control precision. It is difficult to flexibly adjust the equivalent electrostatic stiffness and electrostatic damping by adjusting circuit parameters, which affects device performance and manufacturing yield.

Method used

An RC element is introduced into the differential parallel plate capacitor structure of MEMS devices. By combining DC drive voltage, AC drive voltage and carrier voltage, the electrostatic stiffness and damping can be controlled. The displacement is detected by a CV circuit and the parameters of the RC element are adjusted to achieve flexible adjustment of the equivalent electrostatic stiffness and electrostatic damping.

Benefits of technology

It simplifies the control process, improves the performance accuracy and integration of MEMS devices, is applicable to inertial devices such as accelerometers and gyroscopes, reduces operational complexity and improves manufacturing yield.

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Abstract

The invention discloses an MEMS electrostatic stiffness-damping regulation and control method, and belongs to the technical field of MEMS. The MEMS parallel plate capacitor structure and the RC element are connected in series to form an electrostatic rigidity-damping regulation and control element, and a pair of direct current driving voltage, alternating current driving voltage and carrier wave voltage with opposite symbols is applied to two groups of fixed polar plates of the differential parallel plate capacitor structure, so that displacement detection and resonance driving of an MEMS device can be realized at the same time; and the equivalent static stiffness and the equivalent static damping of the MEMS device can be regulated and controlled by adjusting the parameters of the MEMS parallel plate capacitor structure, the parameters of the RC element, the direct current driving voltage or the alternating current driving voltage. The MEMS static stiffness-damping regulation and control method is simple, driving voltage signal leakage can be restrained when the MEMS is used as a resonance driver, and meanwhile the MEMS static stiffness-damping regulation and control method can be compatible with MEMS device structural design.
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