Pressure sensor and pressure detection method thereof

Abstract

The invention relates to a pressure sensor and a pressure detection method thereof. The pressure sensor includes: a substrate; a compressible sponge layer on the substrate; and a top flexible reflective layer on the compressible sponge layer; the tunnel diode circuit structure is arranged between the compressible sponge layers and comprises a radio frequency identification (RFID) antenna; the compressible sponge layer is used for reducing the distance between the top flexible reflecting layer and the substrate under the condition that the compressible sponge layer is deformed due to external pressure so as to adjust the capacitance value between the top flexible reflecting layer and the substrate; the tunnel diode circuit structure is used for adjusting self complex impedance under the condition that the capacitance value between the top flexible reflecting layer and the substrate is detected to be changed, so that the RFID antenna load is unbalanced, and a scattering signal is output; the scattering signal is used for determining the environment air pressure of the to-be-detected environment where the pressure sensor is located. By adopting the method, long-distance and high-reliability air pressure monitoring under a completely passive condition can be realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pressure sensors, in particular to a pressure sensor and a pressure detection method thereof. BACKGROUND

[0002] With the development of wireless sensing and radio frequency identification (RFID) technology, a passive ultra high frequency (UHF) sensor technology based on the backscattering principle has emerged. This technology uses the electromagnetic waves emitted by the reader to provide energy for the sensor tag, and realizes wireless transmission of data by modulating the antenna impedance. It has the characteristics of no battery, simple structure and easy integration, thereby promoting its wide application in the fields of environmental monitoring and industrial Internet of Things.

[0003] In the traditional technology, the passive UHF sensor mainly relies on the passive reflection mechanism, that is, after receiving the radio frequency energy emitted by the reader, the sensor modulates the reflected signal by changing the antenna load impedance, thereby realizing the back transmission of information. This method can achieve a reading distance of several meters to tens of meters under ideal conditions, and is suitable for some short-distance identification and sensing scenarios.

[0004] However, the current passive sensing method based on traditional backscattering has the problems of short reading distance, serious signal attenuation, and limited dynamic range. Specifically, due to the double-path loss, the return signal strength decays with the fourth power of the transmission distance, and there is a large intensity difference between the reader transmission signal and the sensor reflection signal, making it difficult to reliably receive the signal in long-distance or complex environments, which seriously limits its application in large tank interiors, rotating part monitoring, and far-field harsh environments. Therefore, there is an urgent need for a new passive sensing solution that can achieve long-distance and high-reliability monitoring without the need for a battery. SUMMARY

[0005] Therefore, it is necessary to provide a pressure sensor and a pressure detection method thereof capable of passive sensing in view of the above technical problems.

[0006] In a first aspect, the present application provides a pressure sensor comprising: a substrate; a compressible sponge layer located on the substrate; and a top flexible reflection layer located on the compressible sponge layer;

[0007] The tunnel diode circuit structure is arranged between the compressible sponge layers and comprises a radio frequency identification (RFID) antenna.

[0008] The compressible sponge layer is used to reduce the distance between the top flexible reflection layer and the substrate when the compressible sponge layer is deformed by external pressure, so as to adjust the capacitance value between the top flexible reflection layer and the substrate.

[0009] The tunnel diode circuit structure is used to adjust its complex impedance when detecting that the capacitance value between the top flexible reflective layer and the substrate changes, so as to make the RFID antenna load unbalanced and output a scattering signal; the scattering signal is used to determine the environmental air pressure of the environment where the pressure sensor is located.

[0010] In some embodiments, the tunnel diode circuit structure further comprises: a rectifier circuit and a tunnel diode amplification structure connected in sequence with the RFID antenna; the rectifier circuit is used to detect the capacitance value between the top flexible reflective layer and the substrate, and convert the capacitance value between the top flexible reflective layer and the substrate into a direct current;

[0011] The tunnel diode circuit structure is used to adjust its complex impedance when detecting that the direct current changes.

[0012] In some embodiments, the tunnel diode circuit structure is made of III-V compound semiconductor materials.

[0013] In some embodiments, the tunnel diode amplification structure and the RFID antenna are integrated on the substrate through a mounting process.

[0014] In some embodiments, the tunnel diode circuit structure further comprises: an impedance matching circuit;

[0015] The impedance matching circuit is connected in series between the direct current and the RFID antenna;

[0016] The impedance matching circuit is used to convert the complex impedance of the tunnel diode circuit structure into a resistance impedance; the RFID antenna is used to output a generated scattering signal according to the resistance impedance.

[0017] In some embodiments, the reader-writer is used to receive the scattering signal output by the RFID antenna, and determine the environmental air pressure of the environment where the pressure sensor is located according to the signal strength of the scattering signal.

[0018] In some embodiments, the tunnel diode circuit structure further comprises: an antenna feed point;

[0019] The antenna feed point is connected in series between the impedance matching circuit and the RFID antenna;

[0020] The antenna feed point is used to receive the resistance impedance output by the impedance matching circuit and transmit the resistance impedance to the RFID antenna; and receive the electromagnetic wave emitted by the reader-writer and convert the electromagnetic wave into electrical energy for the tunnel diode circuit structure to operate.

[0021] In some embodiments, the substrate is a high-frequency substrate material.

[0022] In some embodiments, the tunnel diode circuit structure further comprises:

[0023] a microstrip connecting line connected in series between the impedance matching circuit and the rectified current, for transmitting the self-complex impedance output by the tunnel diode circuit structure to the impedance matching circuit.

[0024] In a second aspect, the present application provides a pressure detection method, comprising:

[0025] acquiring a scattering signal output by an RFID antenna in the pressure sensor under the condition that the pressure sensor is placed in a to-be-detected environment;

[0026] determining a signal strength of the scattering signal, and determining a target air pressure matched with the signal strength according to the signal strength; the target air pressure is an air pressure value of the to-be-detected environment.

[0027] In a third aspect, the present application further provides a pressure detection device, comprising:

[0028] an acquisition module, configured to acquire a scattering signal output by an RFID antenna in the pressure sensor under the condition that the pressure sensor is placed in a to-be-detected environment;

[0029] a detection module, configured to determine a signal strength of the scattering signal, and determine a target air pressure matched with the signal strength according to the signal strength; the target air pressure is an air pressure value of the to-be-detected environment.

[0030] In a fourth aspect, the present application further provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor implements the following steps when executing the computer program:

[0031] acquiring a scattering signal output by an RFID antenna in the pressure sensor under the condition that the pressure sensor is placed in a to-be-detected environment;

[0032] determining a signal strength of the scattering signal, and determining a target air pressure matched with the signal strength according to the signal strength; the target air pressure is an air pressure value of the to-be-detected environment.

[0033] In a fifth aspect, the present application further provides a computer readable storage medium, which stores a computer program, and the computer program implements the following steps when executed by a processor:

[0034] acquiring a scattering signal output by an RFID antenna in the pressure sensor under the condition that the pressure sensor is placed in a to-be-detected environment;

[0035] determining a signal strength of the scattering signal, and determining a target air pressure matched with the signal strength according to the signal strength; the target air pressure is an air pressure value of the to-be-detected environment.

[0036] In a sixth aspect, the present application also provides a computer program product comprising a computer program which, when executed by a processor, implements the following steps:

[0037] In the case that the pressure sensor is placed in the environment to be measured, the scattering signal output by the RFID antenna in the pressure sensor is acquired;

[0038] The signal strength of the scattering signal is determined, and according to the signal strength, a target air pressure matching the signal strength is determined; the target air pressure is the air pressure value of the environment to be measured.

[0039] The above pressure sensor and pressure detection method convert the change of external air pressure into the change of capacitance value through the capacitive sensing structure composed of the compressible sponge layer and the top flexible reflective layer, and actively adjust the complex impedance of the tunnel diode circuit due to the high sensitivity of the tunnel diode circuit to the small capacitance change, thereby significantly amplifying the backscattering signal strength of the RFID antenna. This design fundamentally overcomes the problem of weak signal and short reading distance caused by double-path loss of traditional passive sensors, realizes long-distance and high-reliability air pressure monitoring under completely passive (without battery) conditions, and greatly expands the application potential in complex environments such as industrial Internet of Things. BRIEF DESCRIPTION OF DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related art, the drawings needed to be used in the embodiment or related art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0041] Figure 1 The first pressure sensor structure diagram provided for the present embodiment;

[0042] Figure 2 The structure diagram of the first tunnel diode circuit structure provided for the present embodiment;

[0043] Figure 3 The structure diagram of the second tunnel diode circuit structure provided for the present embodiment;

[0044] Figure 4 The structure diagram of the third tunnel diode circuit structure provided for the present embodiment;

[0045] Figure 5 The structure diagram of the fourth tunnel diode circuit structure provided for the present embodiment;

[0046] Figure 6A The structure diagram of the fifth tunnel diode circuit structure provided for the present embodiment;

[0047] Figure 6B A second pressure sensor structure diagram provided for the embodiment;

[0048] Figure 7 A flow diagram of a pressure detection method provided for the embodiment;

[0049] Figure 8 A structural block diagram of a pressure detection device provided for the embodiment;

[0050] Figure 9 An internal structure diagram of a computer device provided for the embodiment. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0052] It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application. In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0053] In the conventional passive sensor technology, due to the limited reading distance, serious signal attenuation and the need for regular battery maintenance, it is difficult to meet the demand of long-distance, high-reliability environmental monitoring, especially in large storage tanks, rotating parts or harsh environments and other application scenarios, the limitations of traditional methods are more prominent.

[0054] And the technical solution innovatively combines the compressible sponge layer and the tunnel diode circuit structure, not only realizes the accurate perception of the change of the environmental air pressure, but also significantly enhances the signal transmission distance and intensity by using the reflection amplification mechanism, so as to achieve long-distance, high-sensitivity, passive and wireless environmental air pressure monitoring without battery power supply, providing an efficient and reliable solution to solve the traditional technical problems.

[0055] Based on this, in an exemplary embodiment, a pressure sensor is provided, such asFigure 1 As shown, the pressure sensor includes: a substrate 1; a compressible sponge layer 2 located on the substrate; and a top flexible reflective layer 3 located on the compressible sponge layer; a tunnel diode circuit structure 4 disposed between the compressible sponge layers, including a radio frequency identification (RFID) antenna 40; the compressible sponge layer is used to reduce the distance between the top flexible reflective layer and the substrate when deformed by external pressure, so as to adjust the capacitance value between the top flexible reflective layer and the substrate; the tunnel diode circuit structure is used to adjust its own complex impedance when a change in the capacitance value between the top flexible reflective layer and the substrate is detected, so as to cause the RFID antenna load imbalance and output a scattered signal; the scattered signal is used to determine the ambient air pressure of the environment to be measured by the pressure sensor.

[0056] The substrate can be understood as the underlying support structure of the pressure sensor. It is usually made of high-frequency substrate material and provides a stable physical foundation and electrical performance for the entire sensor.

[0057] The compressible sponge layer can be understood as being located between the substrate and the top flexible reflective layer. It has elastic deformation characteristics and can deform under external pressure, thereby adjusting the distance between the top flexible reflective layer and the substrate and affecting the capacitance value between them.

[0058] The top flexible reflective layer can be understood as covering the compressible sponge layer. As the direct contact surface for the sensor to sense changes in external pressure, its deformation is transmitted to the substrate through the sponge layer, affecting the sensing capacitance.

[0059] The tunnel diode circuit structure can be understood as being integrated inside the sensor, including the tunnel diode and its bias circuit, used to detect and amplify the minute capacitance changes caused by the deformation of the compressible sponge layer, and to cause the RFID antenna load to become unbalanced by adjusting its own complex impedance, thereby outputting a scattered signal carrying pressure information.

[0060] The RFID antenna can be understood as a bridge for communication between the sensor and the external reader. It is responsible for receiving the electromagnetic waves emitted by the reader and converting them into electrical energy for the internal circuitry of the sensor. At the same time, it reflects the scattered signal (carrying pressure information) output by the sensor back to the reader for demodulation processing.

[0061] For example, the substrate is a high-frequency substrate material (such as Rogers RO4000 series, FR4, etc.), which has low loss tangent characteristics in the UHF band, can minimize the transmission loss of radio frequency signals, and ensure that energy is efficiently transferred from the RFID antenna to the RFID chip.

[0062] It should be noted that in the case of the pressure sensor being placed or installed in the environment to be measured (or the surface of an object), the operator holds the UHF reader / writer or fixes the reader / writer at a distance, and periodically transmits an interrogation wave to the sensor. The reader / writer receives and demodulates the amplified modulated signal reflected back from the sensor, compares the read signal strength value with the calibration database, and obtains the real-time air pressure of the environment to be measured. In the entire process, the sensor does not need to be powered by a battery and does not need any physical connection, achieving remote, passive and wireless monitoring.

[0063] In some embodiments, the top flexible reflective layer, the compressible sponge layer and the substrate constitute a Micro-Electro-Mechanical Systems Sensitive Capacitance (MEMS sensitive capacitance), the capacitance value of which changes with the external pressure. When the ambient air pressure changes, the distance of the middle compressible sponge layer changes, causing the gap between the top flexible reflective layer and the substrate to change, thereby causing the pressure sensitive capacitance to change in response.

[0064] In some embodiments, the pressure sensor converts weak capacitance changes into strong radio frequency reflection signal amplification: the radio frequency wave emitted by the UHF reader / writer is captured by the sensor antenna. Part of the radio frequency energy is converted into a direct current bias current by the integrated rectifier circuit, providing a working point for the tunnel diode and stabilizing it in the negative differential resistance region. When the ambient air pressure changes, the sensitive capacitance value changes, slightly disturbing the direct current bias point of the tunnel diode. Since the tunnel diode is extremely sensitive to its bias, this weak voltage change will cause its own impedance to change greatly and nonlinearly, causing the overall load impedance at the antenna end to be mismatched, thereby strongly modulating the reflection coefficient of the antenna. The incident wave of the reader / writer is thus reflected by a reflected wave with an amplified amplitude and carrying pressure information.

[0065] It should be noted that before using the pressure sensor, the sensor can also be placed in a standard pressure environment, and the reverse scattering signal intensity (RSSI) or phase of the sensor at a specific distance can be read out and calibrated using the UHF reader / writer, to establish a signal intensity-air pressure comparison database. In the case of determining the scattering signal, the pressure sensor can directly determine the ambient air pressure based on the signal intensity-air pressure comparison database according to the signal intensity of the scattering signal.

[0066] The pressure sensor and the pressure detection method thereof convert the change of the external air pressure into the change of the capacitance value through the capacitive sensing structure composed of the compressible sponge layer and the top flexible reflective layer, and actively adjust the complex impedance of the tunnel diode circuit due to the high sensitivity of the tunnel diode circuit to the slight change of the capacitance, so as to significantly amplify the backscattering signal strength of the RFID antenna. This design fundamentally overcomes the problem of weak signal and short reading distance caused by the double-path loss of the traditional passive sensor, realizes the long-distance and high-reliability air pressure monitoring under the condition of complete passivity (without battery), and greatly expands the application potential in complex environments such as industrial Internet of Things.

[0067] On the basis of the above-mentioned embodiments, as shown in the figure, in the present embodiment, the tunnel diode circuit structure 4 further comprises: a rectifier circuit 41 and a tunnel diode amplification structure 42 connected in sequence with the RFID antenna; the rectifier circuit 41 is used for detecting the capacitance value between the top flexible reflective layer and the substrate, and converting the capacitance value between the top flexible reflective layer and the substrate into a direct current; the tunnel diode circuit structure is used for adjusting the complex impedance of itself in the case of detecting the change of the direct current. Figure 2

[0068] Wherein, the rectifier circuit can be understood as a circuit structure for converting an alternating current signal (such as an alternating current caused by the change of the capacitance in the pressure sensor) into a unidirectional direct current signal, for providing a stable direct current power supply or signal processing basis for the subsequent circuit.

[0069] Wherein, the tunnel diode amplification structure can be understood as an amplification circuit constructed by using the negative resistance characteristic of the tunnel diode, which can realize the amplification and reflection of the signal by adjusting the complex impedance of itself when detecting the input signal (such as the change of the direct current output by the rectifier circuit), so as to enhance the scattering signal strength output by the RFID antenna. The tunnel diode amplification structure works in the negative differential resistance region of its current-voltage characteristic, for providing the gain of the radio frequency reflection signal.

[0070] In some embodiments, the tunnel diode amplification structure, the RFID chip and the RFID antenna are integrated on the same substrate through chip mounting process. Wherein, the RFID chip is a kind of micro electronic device for non-contact data exchange by using radio frequency signal, which is usually composed of integrated circuit and antenna, and can communicate with the reader through radio waves to realize the reading, writing and storage of data.

[0071] For example, the tunnel diode circuit structure is prepared from III-V compound semiconductor materials. Preferably, gallium arsenide (GaAs) or indium phosphide (InP).

[0072] ​In the above embodiment, the tunnel diode circuit structure realizes precise detection and efficient conversion of the capacitance change between the top flexible reflection layer and the substrate by integrating the rectifier circuit and the tunnel diode amplification structure, that is, converting the small capacitance change into adjustable direct current change, and further adjusting the self complex impedance of the tunnel diode by using the negative resistance characteristic of the tunnel diode, thereby significantly enhancing the reflection signal strength and transmission distance of the RFID antenna. This technical solution not only improves the sensitivity and reliability of the pressure sensor, but also realizes remote passive wireless monitoring, effectively solving the application limitations of traditional sensors in complex environments.

[0073] On the basis of the above embodiment, as shown in Figure 3 In the present embodiment, the tunnel diode circuit structure further comprises: an impedance matching circuit 43; the impedance matching circuit is connected in series between the rectifier current 41 and the RFID antenna 40; the impedance matching circuit is used to convert the self complex impedance of the tunnel diode circuit structure into a resistance impedance; and the RFID antenna is used to output the generated scattering signal according to the resistance impedance.

[0074] The impedance matching circuit is a circuit structure used to adjust the input / output impedance of the circuit to achieve optimal matching state with the source impedance or load impedance, aiming to maximize power transmission efficiency and reduce signal reflection.

[0075] In some embodiments, the impedance matching circuit converts the self complex impedance of the tunnel diode circuit structure into a resistance impedance after receiving the self complex impedance of the tunnel diode circuit structure; and the RFID antenna is used to output the generated scattering signal according to the resistance impedance.

[0076] In some embodiments, the present embodiment also involves a reader / writer, which is used to receive the scattering signal output by the RFID antenna, and determine the environmental air pressure of the environment to be measured where the pressure sensor is located according to the signal strength of the scattering signal. For example, after receiving the scattering signal output by the RFID antenna, the signal strength of the scattering signal is determined; and based on a pre-set signal air pressure table, the air pressure matching the signal strength is found from the signal air pressure table as the environmental air pressure of the environment to be measured where the pressure sensor is located.

[0077] In the above embodiment, the impedance matching circuit added in the tunnel diode circuit structure effectively converts the self complex impedance of the tunnel diode circuit structure into a resistance impedance matched with the RFID antenna, ensuring efficient energy transmission and maximizing the reflection signal strength. This design not only significantly improves the signal reliability and transmission distance of the pressure sensor in remote passive monitoring, but also reduces signal loss by optimizing impedance matching, thereby enhancing the stability and environmental adaptability of the entire system.

[0078] On the basis of the above embodiment, as shown in Figure 4As shown, in this embodiment, the tunnel diode circuit structure further comprises: an antenna feed point 44; the antenna feed point is connected in series between the impedance matching circuit 43 and the RFID antenna 40; the antenna feed point is used to receive the resistive impedance output by the impedance matching circuit and transmit the resistive impedance to the RFID antenna; and receive the electromagnetic waves emitted by the reader-writer and convert the electromagnetic waves into electrical energy for the operation of the tunnel diode circuit structure. Wherein, the antenna feed point refers to a specific position point in the antenna structure for connecting the transmission line (such as the feeder) and the antenna radiator, which realizes efficient transmission and radiation of signals through mutual conversion of electrical energy and electromagnetic waves.

[0079] In some embodiments, the antenna feed point, as a key hub connecting the antenna and the front-end circuit, on the one hand, efficiently feeds the signals optimized by the impedance matching circuit into the RFID antenna in a way with minimum reflection, ensuring the maximum efficiency of electromagnetic wave radiation; on the other hand, it receives the electromagnetic waves emitted by the external reader-writer through electromagnetic coupling and converts them into electrical energy which is delivered to the rectifier circuit through the microstrip connection line, providing passive power supply support for the entire pressure sensor system, thereby realizing the dual functions of signal transmission and energy harvesting.

[0080] In the above embodiment, the antenna feed point introduced in the tunnel diode circuit structure not only serves as a key connection hub between the impedance matching circuit and the RFID antenna, ensuring efficient transmission of resistive impedance to optimize the antenna reflection performance, but also has the function of energy harvesting, which can receive electromagnetic waves emitted by the reader-writer and convert them into electrical energy to operate the entire circuit structure. This innovative design significantly improves the passive working ability and long-distance communication stability of the pressure sensor, while reducing the dependence on external power supply, prolonging the service life of the device and widening the application scenarios.

[0081] Based on the above embodiment, as shown, Figure 5 In this embodiment, the tunnel diode circuit structure further comprises: a microstrip connection line 45 connected in series between the impedance matching circuit and the rectifier circuit, used to transmit the self-complex impedance output by the tunnel diode circuit structure to the impedance matching circuit. Wherein, the microstrip connection line is a microstrip transmission line structure made on the surface of a printed circuit board (PCB), composed of a metal conductor strip and a ground plane below it, isolated by a dielectric layer, used to transmit high-frequency or radio-frequency signals in the circuit.

[0082] In some embodiments, the microstrip connection line is connected in series between the impedance matching circuit and the rectifier circuit. It uses its stable transmission characteristics to accurately transmit the signals processed by the rectifier circuit to the impedance matching circuit in a low-loss and high-fidelity manner, ensuring the stability of the signal characteristics during transmission, providing reliable guarantee for the subsequent precise processing of the signal by the impedance matching circuit and realizing good impedance matching with the RFID antenna.

[0083] In the above embodiment, the microstrip connecting line as the key transmission element between the impedance matching circuit and the rectifier circuit can accurately transmit the dynamic complex impedance signal output by the tunnel diode circuit structure to the impedance matching network without loss, ensuring high fidelity of the signal in the transmission process. This design effectively avoids signal attenuation and distortion, providing accurate electrical parameters for subsequent impedance matching and reflected signal amplification, thereby significantly improving the signal quality and measurement accuracy of the pressure sensor in long-distance passive monitoring.

[0084] On the basis of the above embodiment, as shown in Figure 6A In this embodiment, the tunnel diode circuit structure 4 specifically includes: an RFID antenna 40, a rectifier circuit 41 and a tunnel diode amplification structure 42 connected in sequence with the RFID antenna 40, an impedance matching circuit 43, an antenna feed point 44, a microstrip connecting line 45 and an RFID chip. On the basis of the above embodiment, as shown in Figure 6B In this embodiment, the pressure sensor, as shown in Figure 1 The pressure sensor includes: a substrate 1; a compressible sponge layer 2 on the substrate; and a top flexible reflective layer 3 on the compressible sponge layer; a tunnel diode circuit structure 4 arranged between the compressible sponge layers.

[0085] In one exemplary embodiment, as shown in Figure 7 A pressure detection method is provided, which is described by taking a reader-writer in Figure 1 as an example, including the following steps S201 to S202. Among them:

[0086] S201 obtains the scattering signal output by the RFID antenna in the pressure sensor when the pressure sensor is placed in the environment to be measured.

[0087] In some embodiments, the reader-writer obtains the scattering signal output by the RFID antenna in the pressure sensor when the pressure sensor is placed in the environment to be measured.

[0088] S202 determines the signal strength of the scattering signal and determines the target air pressure matching the signal strength according to the signal strength.

[0089] Among them, the target air pressure is the air pressure value of the environment to be measured.

[0090] In some embodiments, the reader-writer determines the signal strength of the scattering signal; based on the pre-set signal-air pressure reference table, the target air pressure matching the signal strength is determined according to the signal strength.

[0091] In the above embodiment, by acquiring the scattering signal output by the RFID antenna in the pressure sensor in real time, and accurately analyzing the signal strength to determine the matched target air pressure value, high-precision, long-distance passive monitoring of the air pressure of the environment to be measured is realized. This non-contact measurement method not only eliminates the wiring complexity of traditional wired sensors, but also significantly improves the signal transmission distance using the reflection amplification mechanism, and is particularly suitable for harsh environment monitoring scenarios such as large storage tanks and rotating parts that are difficult to directly contact.

[0092] It should be understood that, although each step in the flowchart involved in each of the above embodiments is shown in sequence according to the arrow, these steps are not necessarily executed in the order indicated by the arrow. Unless otherwise specified herein, there is no strict order limitation for the execution of these steps, and these steps can be executed in other orders. Moreover, at least part of the steps in the flowchart involved in each of the above embodiments can include multiple steps or stages, which are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily sequential, but can be executed in rotation or alternation with at least part of other steps or steps or stages in other steps.

[0093] Based on the same inventive concept, the embodiments of the present application also provide a pressure detection device for implementing the above-mentioned pressure detection method. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme described in the above method, so the specific limitations in one or more pressure detection device embodiments provided below can refer to the limitations of the pressure detection method described above, which will not be repeated here.

[0094] In one exemplary embodiment, as shown in Figure 8 A pressure detection device is provided, comprising: an acquisition module 801 and a detection module 802, wherein:

[0095] The acquisition module 801 is configured to acquire a scattering signal output by an RFID antenna in a pressure sensor when the pressure sensor is placed in an environment to be measured.

[0096] The detection module 802 is configured to determine the signal strength of the scattering signal, and determine a target air pressure matched with the signal strength according to the signal strength. The target air pressure is the air pressure value of the environment to be measured.

[0097] Each module in the above pressure detection device can be realized by software, hardware, and combinations thereof, in whole or in part. The above modules can be embedded in or independent of the processor in the computer device in hardware form, or can be stored in the memory in the computer device in software form, so as to be called and executed by the processor to perform the operations corresponding to the above modules.

[0098] In an example embodiment, a computer device, which can be a server, is provided, and an internal structure diagram of the computer device can be as shown in Figure 9 The computer device includes a processor, a memory, an input / output interface, and a communication interface. The processor, the memory, and the input / output interface are connected through a system bus, and the communication interface is connected to the system bus through the input / output interface. The processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for running the operating system and the computer program in the non-volatile storage medium. The database of the computer device is configured to store data. The input / output interface of the computer device is configured to exchange information between the processor and external devices. The communication interface of the computer device is configured to communicate with external terminals through a network connection. The computer program is executed by the processor to implement a pressure detection method.

[0099] Those skilled in the art can understand that Figure 9 The structure shown in the above embodiment is only a block diagram of part of the structure related to the scheme of the present application, and does not constitute a limitation on the computer device to which the scheme of the present application is applied. The specific computer device can include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0100] In an example embodiment, a computer device is provided, which includes a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the steps in the above method embodiments.

[0101] In an example embodiment, a computer readable storage medium is provided, which stores a computer program. The computer program is executed by a processor to implement the steps in the above method embodiments.

[0102] In an example embodiment, a computer program product is provided, which includes a computer program. The computer program is executed by a processor to implement the steps in the above method embodiments.

[0103] It should be noted that the data (including but not limited to data for analysis, stored data, displayed data, etc.) involved in the present application are all information and data authorized by the user or authorized by all parties, and the collection, use, and processing of the relevant data need to comply with relevant regulations.

[0104] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program. The computer program can be stored in a non-volatile computer readable storage medium, and when the computer program is executed, the processes of the above-mentioned embodiments of the methods can be included. Any reference to memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical storage, high-density embedded non-volatile memory, resistive memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration but not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc. The database involved in the embodiments provided in the present application can include at least one of a relational database and a non-relational database. The non-relational database can include a distributed database based on a block chain, etc., without being limited thereto. The processor involved in the embodiments provided in the present application can be a general-purpose processor, a central processing unit, a graphics processing unit, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, etc., without being limited thereto.

[0105] Any combination of the technical features of the above embodiments can be made. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combination of the technical features does not exist, it should be considered as the scope of the present application.

[0106] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A pressure sensor, characterized by, The pressure sensor comprises a substrate, a compressible sponge layer on the substrate, and a top flexible reflective layer on the compressible sponge layer; A tunnel diode circuit structure is arranged between the compressible sponge layers and comprises an RFID antenna; The compressible sponge layer is used to reduce the distance between the top flexible reflective layer and the substrate when the compressible sponge layer is deformed under external pressure, so as to adjust the capacitance value between the top flexible reflective layer and the substrate; The tunnel diode circuit structure is used to adjust its complex impedance when detecting that the capacitance value between the top flexible reflective layer and the substrate changes, so as to make the RFID antenna unbalanced and output a scattering signal; the scattering signal is used to determine the environmental air pressure of the environment where the pressure sensor is located.

2. The pressure sensor of claim 1, wherein, The tunnel diode circuit structure further comprises a rectifier circuit and a tunnel diode amplification structure connected in sequence with the RFID antenna; the rectifier circuit is used to detect the capacitance value between the top flexible reflective layer and the substrate and convert the capacitance value between the top flexible reflective layer and the substrate into a direct current; The tunnel diode circuit structure is used to adjust its complex impedance when detecting that the direct current changes.

3. The pressure sensor of claim 2, wherein, The tunnel diode circuit structure is made of III-V compound semiconductor materials.

4. The pressure sensor of claim 3, wherein, The tunnel diode amplification structure and the RFID antenna are integrated on the substrate by a mounting process.

5. The pressure sensor of claim 2, wherein, The tunnel diode circuit structure further comprises an impedance matching circuit; The impedance matching circuit is connected in series between the rectifier circuit and the RFID antenna; The impedance matching circuit is used to convert the complex impedance of the tunnel diode circuit structure into a resistance impedance; the RFID antenna is used to output a generated scattering signal according to the resistance impedance.

6. The pressure sensor of claim 5, wherein, A reader / writer is used to receive the scattering signal output by the RFID antenna and determine the environmental air pressure of the environment where the pressure sensor is located according to the signal strength of the scattering signal.

7. The pressure sensor of claim 6, wherein, The tunnel diode circuit structure further comprises an antenna feed point; The antenna feed point is connected in series between the impedance matching circuit and the RFID antenna; The antenna feed point is used to receive the resistance impedance output by the impedance matching circuit and transmit the resistance impedance to the RFID antenna, and receive electromagnetic waves emitted by the reader / writer and convert the electromagnetic waves into electric energy for the tunnel diode circuit structure to operate.

8. The pressure sensor of claim 1, wherein, The substrate is a high-frequency substrate material.

9. The pressure sensor of claim 5, wherein, The tunnel diode circuit structure further comprises: A microstrip connecting line connected in series between the impedance matching circuit and the rectifier circuit, used to transmit the complex impedance output by the tunnel diode circuit structure to the impedance matching circuit.

10. A pressure detection method characterized by, The method comprises: When the pressure sensor is placed in the environment to be measured, acquiring the scattering signal output by the RFID antenna in the pressure sensor; Determining the signal strength of the scattering signal and determining a target air pressure matched with the signal strength according to the signal strength; the target air pressure is the air pressure value of the environment to be measured.

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