Control method of ALD equipment based on multi-component collaborative operation

Abstract

The invention relates to a multi-component collaborative operation-based control method for ALD equipment, which comprises the following steps of: splitting the equipment into a plurality of components according to functions, newly establishing a corresponding functional block for each component, and respectively adding a plurality of actions for each functional block; declaring an enumeration data type; a variable is declarated in each function block; compiling action logic of each action; and calling each function block and the action of each function block in the main program according to the action logic of the equipment. The method has the advantages that the method is reasonable in design, equipment with a complex structure is split into a plurality of components, the action of each component is decomposed, and the action of each component is called according to the action logic of the equipment, so that the program structure is clear, the calling is convenient and flexible, and the program is convenient to maintain and update.

Description

TECHNICAL FIELD

[0001] The application relates to a control method for multi-component cooperative operation, in particular to a control method for ALD equipment based on multi-component cooperative operation, and belongs to the technical field of photovoltaic ALD. BACKGROUND

[0002] Atomic layer deposition (ALD) is a high-precision coating preparation technology, which realizes single-atom layer precision film deposition by alternately introducing different chemical vapor precursors on the surface of a substrate.

[0003] The ALD equipment is composed of an automatic mechanism and a reaction furnace, has a complex structure and is difficult to control, and the control method in the prior art has the problems of complicated control, complicated program structure, cumbersome calling, and large maintenance and updating workload. SUMMARY

[0004] The application provides the following technical solutions: The application provides a control method for ALD equipment based on multi-component cooperative operation, which comprises the following steps: 1. The equipment is divided into a plurality of components according to functions, such as components A, B and C. 2. A corresponding function block fbA, fbB and fbC is newly created for each component A, B and C, and a plurality of actions such as S1, S2 and S3 are added to each function block fbA, fbB and fbC. 3. An enumerated data type EnumUnitSta: {S1, S2, S3} and an EnumActSta: {Start, Done, Busy} are declared. 4. A variable UnitStaCtl: EnumUnitSta, UnitStaFb: EnumUnitSta and ActSta: EnumActSta is declared in the function block fbA, fbB and fbC. 5. Action logic of each action S1, S2 and S3 is written. 6. Each function block fbA, fbB and fbC and the actions S1, S2 and S3 of each function block are called in the main program according to the action logic of the equipment.

[0005] Preferably, in step 2, the plurality of actions such as S1, S2 and S3 perform different functions.

[0006] Preferably, in step 4, the UnitStaCtl is used to give an action, the UnitStaFb is used to feed back a currently executed action, and the ActSta is used to control the start of an action and feed back the state of the action.

[0007] The application has the advantages that the method is reasonable in design, the complex device is split into multiple components, the action of each component is decomposed, the action of each component is called according to the action logic of the device, the program structure is clear and convenient to call, and the program is convenient to maintain and update. BRIEF DESCRIPTION OF DRAWINGS

[0008] Figure 1 is an embodiment of a control program structure of the ALD device based on the control method of the ALD device based on the cooperative work of multiple components.

[0009] Figure 2 is an embodiment of a sub-action program structure of the ALD device based on the control method of the ALD device based on the cooperative work of multiple components.

[0010] Figure 3 is an embodiment of a main program action flow chart of the ALD device based on the control method of the ALD device based on the cooperative work of multiple components.

[0011] Figure 4 is a structure diagram of a flower basket loading and unloading sheet mechanism.

[0012] Figure 5 is an embodiment of a program structure diagram of the flower basket loading and unloading sheet mechanism to which the control method of the ALD device based on the cooperative work of multiple components is applied. Figure 4

[0013] Figure 6 is an embodiment of a flower basket loading and unloading sheet control flow chart of the flower basket loading and unloading sheet mechanism to which the control method of the ALD device based on the cooperative work of multiple components is applied. Figure 4

[0014] Fig. 1 is a sheet sorting mechanism, Fig. 2 is a sheet feeding mechanism, and Fig. 3 is a flower basket transplanting mechanism. DETAILED DESCRIPTION

[0015] The application will be further described in detail below in combination with embodiments and specific implementation manners.

[0016] As shown in Fig. 1, a control method of an ALD device based on the cooperative work of multiple components includes the following steps: Figure 3 1. The device is split into multiple components according to functions, such as components A, B and C. 2. The corresponding function blocks fbA, fbB and fbC are newly created for the components A, B and C, and a plurality of actions such as S1, S2 and S3 (added according to requirements) are added to each function block fbA, fbB and fbC to execute different functions, as shown in Fig. 2. Figure 1 ​​​​3. Declare the enumerated data type EnumUnitSta: {S1, S2, S3}, EnumActSta: {Start, Done, Busy}; 4. Declare the variables UnitStaCtl: EnumUnitSta, UnitStaFb: EnumUnitSta, ActSta: EnumActSta in the function blocks fbA, fbB, fbC, wherein the action is given by UnitStaCtl, the currently executing action is fed back by UnitStaFb, and the start of the action and the status of the action are controlled by ActSta; 5. Write the action logic of each action S1, S2, S3, for example, according to the program structure shown in Figure 2 ; 6. Call each function block fbA, fbB, fbC and the action S1, S2, S3 of each function block according to the action logic of the device in the main program, for example, according to the example program shown in Figure 3 ; Embodiment

[0017] As shown in Figure 4 , a flower basket loading and unloading mechanism, the structure of which comprises a wafer sorting mechanism, a wafer lifting mechanism, and a flower basket transplanting mechanism.

[0018] Working principle: Unloading: After the flower basket full of wafers is placed behind the flower basket transplanting mechanism in the previous process, the flower basket transplanting mechanism transports the flower basket to the working position, then the wafer lifting mechanism rises to lift the wafers out of the flower basket, the wafer sorting mechanism clamps and positions the wafers, and then waits for the next process to suck away the wafers. After the wafers are sucked away, the wafer sorting mechanism and the wafer lifting mechanism return to the initial position, and the flower basket transplanting mechanism transports the empty flower basket to the next flower basket position to wait for the previous process to take away the empty flower basket.

[0019] Loading: After the empty flower basket is placed behind the flower basket transplanting mechanism in the previous process, the flower basket transplanting mechanism transports the flower basket to the working position, then the wafer lifting mechanism rises to the position, waits for the next process to place the wafers on the wafer lifting mechanism, the wafer sorting mechanism clamps and positions the wafers, and then the wafer lifting mechanism lowers to place the wafers into the flower basket, and the wafer sorting mechanism returns to the initial position. The flower basket transplanting mechanism transports the full flower basket to the next flower basket position to wait for the previous process to take away the flower basket.

[0020] Based on the above process, a control method for ALD equipment based on multi-component collaborative work is designed, comprising the following steps: 1. Defining the flower basket transplanting mechanism as component A, and the wafer sorting mechanism and the wafer lifting mechanism as component B; 2. As shown in Figure 5As shown, a new function block fbA is created for component A. fbA contains actions S1: transfer a full flower basket to the work position; S2: transfer an empty flower basket to the work position; S3: transfer a full flower basket to the next flower basket position; and S4: transfer an empty flower basket to the next flower basket position. Create a new function block fbB for component B. fbB contains actions S1: unloading action flow, and S2: loading action flow. 3. For example Figure 6 As shown, the specific steps of loading and unloading flower baskets include: The mounting process is as follows: fbA.S1 -> fbB.S1 -> fbA.S4. Unloading procedure: fbA.S2-> fbB.S2-> fbA.S3.

[0021] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the protection scope of the present invention.

Claims

1. A control method of an ALD apparatus based on multi-component cooperative work, characterized by, The method comprises the following steps:

1. Splitting the device into several components according to functions, such as components A, B and C; 2. Newly creating corresponding function blocks fbA, fbB and fbC for the components A, B and C, and adding several actions such as S1, S2 and S3 to each function block fbA, fbB and fbC respectively; 3. Declaring an enumerated data type EnumUnitSta: {S1, S2, S3} and EnumActSta: {Start, Done, Busy}; 4. Declaring variables UnitStaCtl: EnumUnitSta, UnitStaFb: EnumUnitSta and ActSta: EnumActSta in the function blocks fbA, fbB and fbC; 5. Writing action logics of the actions S1, S2 and S3; 6. Calling the function blocks fbA, fbB and fbC and the actions S1, S2 and S3 of the function blocks in the main program according to the action logics of the device.

2. The control method of an ALD apparatus based on cooperative work of multiple components according to claim 1, wherein, In the step 2, the several actions such as S1, S2 and S3 perform different functions respectively.

3. The control method of an ALD apparatus based on cooperative work of multiple components according to claim 2, wherein, In the step 4, the UnitStaCtl is used to give an action, the UnitStaFb is used to feedback a currently executing action, and the ActSta is used to control starting of the action and feedback of a state of the action.

Images