Micro-electro-mechanical gyroscope

Abstract

The invention discloses a micro-electro-mechanical gyroscope which comprises a plurality of tuning forks of the same structure, and each tuning fork of the tuning forks comprises a first frame, a second frame and a third frame, a second frame adjacent to the first frame; a Coriolis force unit coupled to the first frame and the second frame, respectively; a drive unit and a detection unit, the drive unit being located in one of the first frame and the second frame, the detection unit being located in the other of the first frame and the second frame; wherein the first frames in the adjacent tuning forks are coupled together, and the second frames in the adjacent tuning forks are coupled together.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a microelectromechanical gyroscope. Background Technology

[0002] Microelectromechanical gyroscopes are gyroscopes manufactured using micromachining technology. They have advantages such as small size, light weight, low cost, and high reliability, and have broad application prospects in both military and civilian markets.

[0003] Among various microelectromechanical gyroscope structures, the linear vibration tuning fork gyroscope structure is currently the most researched and applied due to its ability to provide a large driving displacement and effectively suppress the influence of external linear vibrations. However, in practical applications, there is not only linear vibration noise but also angular vibration noise. Traditional dual-mass tuning fork gyroscopes are unable to suppress the influence of angular vibrations and are highly sensitive to them. Summary of the Invention

[0004] In view of the above problems, the purpose of this invention is to provide a four-mass microelectromechanical gyroscope that achieves the decoupling of the motion of the detection unit and the drive unit, while realizing the synchronous motion of multiple detection units and multiple drive units.

[0005] According to one aspect of the present invention, a microelectromechanical gyroscope is provided, comprising a plurality of tuning forks with identical structures, each tuning fork comprising: a first frame; a second frame adjacent to the first frame; a Coriolis force element coupled to both the first frame and the second frame; a driving unit and a detection unit, wherein the driving unit is located in one of the first frame and the second frame, and the detection unit is located in the other of the first frame and the second frame; wherein the first frames of adjacent tuning forks are coupled together, and the second frames of adjacent tuning forks are coupled together.

[0006] Optionally, the driving unit includes: a driving capacitor located in and coupled to the driving frame; a driving anchor point located in the driving frame; and a driving beam, the driving frame being coupled to the driving anchor point via the driving beam; the detection unit includes: a detection capacitor located in and coupled to the detection frame; a detection anchor point located in the detection frame; and a detection beam, the detection frame being coupled to the detection anchor point via the detection beam.

[0007] Optionally, the first frame is a driving frame, the second frame is a detection frame, the driving capacitor drives the first frame to move linearly in the first axial direction, and the detection capacitor senses the movement of the second frame in the second axial direction.

[0008] Optionally, the drive beam extends in the second axial direction and has a certain stiffness in the second axial direction, so that the drive beam has a certain tensile and compressive strength in the second axial direction, the drive beam has a certain degree of bending freedom, and the drive beam and the drive anchor point restrict the movement of the first frame in the second axial direction; the detection beam extends in the first axial direction and has a certain stiffness in the first axial direction, so that the detection beam has a certain tensile and compressive strength in the first axial direction, the detection beam has a certain degree of bending freedom, and the detection beam and the detection anchor point restrict the movement of the second frame in the first axial direction.

[0009] Optionally, the second frame is a driving frame, the first frame is a detection frame, the driving capacitor drives the second frame to move linearly in the direction of the second axis, and the detection capacitor senses the movement of the first frame in the direction of the first axis.

[0010] Optionally, the drive beam extends along a first axial direction and has a certain stiffness in that direction, so that the drive beam has a certain tensile and compressive strength in the first axial direction, and the drive beam has a certain degree of bending freedom. The drive beam and the drive anchor point restrict the movement of the second frame in the first axial direction. The detection beam extends along a second axial direction and has a certain stiffness in that direction, so that the detection beam has a certain tensile and compressive strength in the second axial direction, and the detection beam has a certain degree of bending freedom. The detection beam and the detection anchor point restrict the movement of the first frame in the second axial direction.

[0011] Optionally, in the first axial direction, multiple tuning forks are arranged in a straight line. Among the tuning forks arranged in the first axial direction, the first frames of adjacent tuning forks are opposite each other and are coupled via a first coupling structure; the second frames of adjacent tuning forks are opposite each other and are coupled via a third coupling structure; in the second axial direction, multiple tuning forks are arranged in a straight line. Among the tuning forks arranged in the second axial direction, the second frames of adjacent tuning forks are opposite each other and are coupled via a fourth coupling structure; the first frames of adjacent tuning forks are far apart from each other, and the far apart first frames of adjacent tuning forks are coupled via a second coupling structure.

[0012] Optionally, one of the driving unit and the detection unit is enclosed inside the first frame, and the other of the driving unit and the detection unit is enclosed inside the second frame.

[0013] Optionally, the first coupling structure is a second type of elastic beam, with both ends of the first coupling structure being coupled to the first frame of the adjacent tuning fork respectively. The second type of elastic beam has a certain degree of freedom of motion in its extension direction, so that the first frames of the adjacent tuning fork can move closer to or further away from each other.

[0014] Optionally, the fourth coupling structure is (consistent with claim 9) a second type of elastic beam, with both ends of the fourth coupling structure being coupled to the second frame of the adjacent tuning fork respectively. The second type of elastic beam has a certain degree of freedom of motion in its extension direction, so that the second frames of the adjacent tuning fork can move closer to or further away from each other.

[0015] Optionally, the first frame has an opening extending in the direction of the second axis, and the second frame has an opening extending in the direction of the first axis; one of the drive beam or the detection beam is exposed to the opening of the first frame, and the other of the drive beam or the detection beam is exposed to the opening of the second frame.

[0016] Optionally, both ends of the first coupling structure are respectively coupled to a drive beam or a detection beam exposed on the side of the first frame, so as to be coupled to the first frame via the drive beam or detection beam exposed on the side of the first frame; the first coupling structure is a first type of elastic beam or a second type of elastic beam, the first type of elastic beam has a certain rigidity in its extension direction, so that the first type of elastic beam is not extensible in its extension direction; the first type of elastic beam has a certain degree of bending freedom, so that the first type of elastic beam can bend around a direction perpendicular to its extension direction; the second type of elastic beam has a certain degree of motion freedom in its extension direction.

[0017] Optionally, both ends of the fourth coupling structure are respectively coupled to a detection beam or a drive beam exposed on the side of the second frame, so as to be coupled to the second frame via the detection beam or drive beam exposed on the side of the second frame; the fourth coupling structure is a first type of elastic beam or a second type of elastic beam, the first type of elastic beam has a certain rigidity in its extension direction, so that the first type of elastic beam is not extensible in its extension direction; the first type of elastic beam has a certain degree of bending freedom, so that the first type of elastic beam can bend about a direction perpendicular to its extension direction; the second type of elastic beam has a certain degree of motion freedom in its extension direction.

[0018] Optionally, the second coupling structure includes: a rigid beam extending in the direction of the second axis, the two ends of the rigid beam of the second coupling structure being coupled to the first frame of the adjacent tuning fork via elastic beams; and a coupling anchor point, the middle position of the rigid beam of the second coupling structure being hinged to the coupling anchor point via a hinge; the second rigid beam has a certain stiffness and bending strength in the first axis and the second axis, so that the second rigid beam has a certain bending resistance in the directions of the first axis and the second axis.

[0019] Optionally, the third coupling structure includes: a rigid beam extending in the direction of the first axis; and a coupling anchor point located on the side of the rigid beam of the third coupling structure; both ends of the rigid beam of the third coupling structure are coupled to the second frame via elastic beams; and the side of the rigid rod of the third coupling structure is coupled to the coupling anchor point via elastic beams.

[0020] Optionally, the third coupling structure includes: a rigid beam extending in the direction of the first axis; and a coupling anchor point; the rigid beam of the third coupling structure is coupled to the second frame via an elastic beam; the rigid beam of the third coupling structure is coupled to the coupling anchor point via a rigid frame; wherein the rigid frame is hollow inside, the coupling anchor point of the third coupling structure is located inside the rigid frame, and the coupling anchor point of the third coupling structure is coupled to the rigid frame via the elastic beam.

[0021] Optionally, the Coriolis force element includes: a Coriolis force frame located in the first frame; a first coupling beam, through which the Coriolis force element is coupled to the first frame; and a second coupling beam, through which the Coriolis force element is coupled to the second frame.

[0022] Optionally, the first coupling beam is a first type of elastic beam extending in the direction of the first axis, and the second coupling beam is a first type of elastic beam extending in the direction of the second axis, wherein the first axis and the second axis are perpendicular to each other; wherein, the first type of elastic beam has a certain rigidity in its extension direction, making the first type of elastic beam non-stretchable in its extension direction; the first type of elastic beam has a certain degree of bending freedom, making the first type of elastic beam bend around a direction perpendicular to its extension direction.

[0023] Optionally, a groove is provided inside the Coriolis force frame, and the second coupling beam is disposed in the groove. One end of the second coupling beam is coupled to the Coriolis force frame, and the other end extends to the outside of the Coriolis force frame and is coupled to the second frame located outside the Coriolis force frame.

[0024] Optionally, the first frames of the plurality of tuning forks move along the first axis, and the first frames of adjacent tuning forks move in opposite phases; the second frames of the plurality of tuning forks move along the second axis, and the second frames of adjacent tuning forks move in opposite phases.

[0025] The microelectromechanical gyroscope provided by this invention includes multiple tuning forks, with the driving units of adjacent tuning forks coupled to each other, so that the driving units of the multiple tuning forks move synchronously; the detection units of adjacent tuning forks are also coupled to each other, so that the detection units of the multiple tuning forks move synchronously. The other modal frequencies of the gyroscope are higher than the driving mode and detection mode frequencies, which can effectively suppress the influence of linear vibration and angular vibration, reduce the measurement error of the gyroscope in the vibration environment, and improve the performance of the gyroscope.

[0026] The microelectromechanical gyroscope provided by this invention has a separate driving unit and a detection unit, and the driving unit and the detection unit are respectively coupled to the Coriolis force unit. The setting of the Coriolis force unit and the elastic beam realizes the decoupling of the motion of the driving mode and the detection mode. Attached Figure Description

[0027] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0028] Figure 1 A schematic diagram of the structure of a microelectromechanical gyroscope according to an embodiment of this application is shown;

[0029] Figure 2 A schematic diagram of the structure of a tuning fork according to an embodiment of this application is shown;

[0030] Figure 3 A schematic diagram of the structure of the driving unit provided according to an embodiment of this application is shown;

[0031] Figure 4 A schematic diagram of the Coriolis force element provided according to an embodiment of this application is shown;

[0032] Figure 5 A schematic diagram of the structure of the detection unit provided according to an embodiment of this application is shown;

[0033] Figure 6 A schematic diagram of the first coupling structure provided according to the first embodiment of this application is shown;

[0034] Figure 7a A schematic diagram of the third coupling structure in one embodiment is shown;

[0035] Figure 7b A schematic diagram of the third coupling structure in another embodiment is shown;

[0036] Figure 8 A schematic diagram of the second coupling structure provided according to an embodiment of this application is shown;

[0037] Figure 9 A schematic diagram of the structure of the microelectromechanical gyroscope provided in the second embodiment of this application is shown;

[0038] Figure 10 A schematic diagram of the structure of a tuning fork according to a second embodiment of this application is shown;

[0039] Figure 11 A schematic diagram of the structure of the driving unit according to the second embodiment of this application is shown;

[0040] Figure 12 A schematic diagram of the detection unit provided according to the second embodiment of this application is shown;

[0041] Figure 13 A schematic diagram of the structure of the microelectromechanical gyroscope provided in the third embodiment of this application is shown;

[0042] Figure 14 A schematic diagram of the structure of a tuning fork according to a third embodiment of this application is shown;

[0043] Figure 15 A schematic diagram of the drive beam provided according to the third embodiment of this application is shown;

[0044] Figure 16 A schematic diagram of the first coupling structure provided according to the third embodiment of this application is shown;

[0045] Figure 17 A schematic diagram of the bending state of the drive beam and the first coupling structure according to the third embodiment of this application is shown;

[0046] Figure 18 A schematic diagram of the structure of the microelectromechanical gyroscope provided in the fourth embodiment of this application is shown;

[0047] Figure 19 A schematic diagram of the structure of a tuning fork according to the fourth embodiment of this application is shown;

[0048] Figure 20 A schematic diagram of the structure of the drive beam provided according to the fourth embodiment of this application is shown. Detailed Implementation

[0049] The invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the various parts in the drawings are not drawn to scale. Furthermore, some well-known parts may not be shown.

[0050] This invention can be presented in various forms, some of which will be described below.

[0051] Figure 1 A schematic diagram of the structure of a microelectromechanical gyroscope according to the first embodiment of this application is shown, as follows: Figure 1 As shown, the microelectromechanical gyroscope includes multiple tuning forks. In this embodiment, the microelectromechanical gyroscope includes tuning forks 10a, 10b, 10c, and 10d. Tuning forks 10a, 10b, 10c, and 10d have the same structure. The structure of the multiple tuning forks will be described below using tuning fork 10a as an example.

[0052] Figure 2 A schematic diagram of the structure of a tuning fork according to the first embodiment of this application is shown, as follows: Figure 2 As shown, the tuning fork 10a includes a first frame 110 and a second frame 120, wherein the first frame 110 and the second frame 120 are arranged in the direction of the second axis (Y-axis). In other words, the second frame 120 and the first frame 110 are adjacent in the direction of the second axis (Y-axis).

[0053] In this embodiment, the first frame 110 serves as the driving frame, the second frame 120 serves as the detection frame, and the tuning fork 10a further includes a driving unit 130, a Coriolis force unit 140, and a detection unit 150. The driving unit 130 is located within and coupled to the first frame 110; the detection unit 150 is located within and coupled to the second frame 120; and the Coriolis force unit 140 is coupled to both the first frame 110 and the second frame 120.

[0054] Figure 3 A schematic diagram of the structure of the driving unit according to the first embodiment of this application is shown, as follows: Figure 3 As shown, the drive unit 130 includes a drive capacitor 131, a drive beam 132, and a drive anchor point 133.

[0055] The driving capacitor 131 is located in and coupled to the first frame 110. The driving capacitor 131 includes a driving capacitor anchor point 1311, a first driving comb tooth 1312 connected to the driving capacitor anchor point 1311, and a second driving comb tooth 1313 connected to the first frame 110. The first driving comb tooth 1312 and the second driving comb tooth 1313 are opposite to each other, constituting the driving capacitor 131. In this embodiment, the first driving comb tooth 1312 and the second driving comb tooth 1313 extend in the direction of a first axis (e.g., the X-axis), and the driving capacitor 131 drives the first frame 131 to move in the direction of the first axis (e.g., the X-axis).

[0056] The first frame 110 is coupled to the drive anchor point 133 via a drive beam 132. The drive beam 132 is a first type of elastic beam extending in the direction of the second axis (e.g., the Y-axis). The first type of elastic beam has a certain rigidity in its extension direction, making it non-stretchable in that direction. Furthermore, the first type of elastic beam has a certain degree of bending freedom, allowing it to bend about a direction perpendicular to its extension direction. In this embodiment, the drive beam 132 has a certain rigidity in the direction of the second axis (e.g., the Y-axis), giving it certain tensile and compressive strength, meaning it is non-stretchable in that direction. The drive beam 132 has a certain degree of bending freedom, allowing it to bend at least about a third axis (e.g., the Z-axis). Due to the constraints of the drive beam 132 and the drive anchor point 133, the first frame 110 can only move along the first axis (e.g., the X-axis) and cannot move along the second axis (e.g., the Y-axis). In other words, the drive beam 132 and the drive anchor point 133 restrict the movement of the first frame 110 in the direction of the second axis (e.g., the Y-axis).

[0057] Furthermore, the first frame 110 has a cavity 111 inside to provide space for accommodating the Coriolis force unit 140. To ensure the balance of the first frame 110, the drive unit 130 is symmetrically arranged on both sides of the Coriolis force unit 140 inside the cavity 111 in the direction of the first axis (e.g., the X-axis). The side of the cavity 111 opposite to the second frame 120 also has an opening to facilitate coupling between the Coriolis force unit 140 located inside the cavity 111 and the second frame 120 located outside the cavity 111.

[0058] Figure 4 A schematic diagram of the Coriolis force element provided according to the first embodiment of this application is shown, as follows: Figure 4 As shown, the Coriolis force element 140 includes a Coriolis force mass block 141, a first coupling beam 142, and a second coupling beam 143. The Coriolis force mass block 141 is located within the cavity 111 of the first frame 110 and is coupled to the first frame 110 via the first coupling beam 142. The first coupling beam 142 is a first type of elastic beam extending in the direction of a first axis (e.g., the X-axis). The first coupling beam 142 has a certain rigidity in the direction of the first axis (e.g., the X-axis), so that the first coupling beam 142 has a certain tensile and compressive strength in the direction of the first axis (e.g., the X-axis), and the first coupling beam 142 is non-extensible in the direction of the first axis (e.g., the X-axis). The first coupling beam 142 has a certain degree of bending freedom, so that the first coupling beam 142 can bend at least around a third axis (e.g., the Z-axis).

[0059] The Coriolis mass 141 is coupled to the second frame 120 via a second coupling beam 143. The second coupling beam 143 is a first-type elastic beam extending along a second axis (e.g., the Y-axis). The second coupling beam 143 has a certain rigidity along the second axis (e.g., the Y-axis), giving it tensile and compressive strength. The second coupling beam 143 is non-extensible along the second axis (e.g., the Y-axis). The second coupling beam 143 has a certain degree of bending freedom, allowing it to bend around a third axis (e.g., the Z-axis). A groove 1411 is formed inside the Coriolis mass 141. The second coupling beam 143 is located within the groove 1411, with one end connected to the Coriolis mass 141 and the other end extending through the opening of the groove 1411 and the opening of the cavity 111 to the outside of the Coriolis unit 140 and the first frame 110, connecting to the second frame 120 located on one side of the first frame 110.

[0060] This application provides a groove 1411 in the Coriolis mass block 141 to provide space for accommodating the second coupling beam 143. Compared with setting the second coupling beam 143 outside the Coriolis mass block 141, this embodiment saves space and further reduces the overall size of the microelectromechanical gyroscope.

[0061] Figure 5 A schematic diagram of the detection unit according to the first embodiment of this application is shown, as follows: Figure 5 As shown, the detection unit 150 includes a detection capacitor 151, a detection beam 152, and a detection anchor point 153.

[0062] The detection capacitor 151 includes a detection capacitor anchor point 1511, a first detection comb tooth 1512 connected to the detection capacitor anchor point 1511, and a second detection comb tooth 1513 connected to the second frame 120. The first detection comb tooth 1512 and the second detection comb tooth 1513 are opposite to each other, constituting the detection capacitor 151. In this embodiment, the first detection comb tooth 1512 and the second detection comb tooth 1513 extend along a first axis (e.g., the X-axis). The detection capacitor 151 and the detection second frame 120 move along a second axis (e.g., the Y-axis).

[0063] The second frame 120 is coupled to the detection anchor point 153 via the detection beam 152. The detection beam 152 is a first type of elastic beam extending in the direction of the first axis (e.g., the X-axis). The detection beam 152 has a certain rigidity in the direction of the first axis (e.g., the X-axis), so that the detection beam 152 has a certain tensile and compressive strength in the direction of the first axis (e.g., the X-axis), that is, the detection beam 152 cannot shrink in the direction of the first axis (e.g., the X-axis). The detection beam 152 has a certain degree of bending freedom, so that the detection beam 152 can bend around the third axis (e.g., the Z-axis).

[0064] Due to the constraints of the detection beam 152 and the detection anchor point 153, the second frame 120 can only move along the second axis (e.g., the Y-axis) and cannot move along the first axis (e.g., the X-axis). In other words, the detection beam 152 and the detection anchor point 153 restrict the movement of the second frame 120 in the first axis (e.g., the X-axis) direction.

[0065] This embodiment achieves the movement of the first frame 110 (driving frame) and the second frame 120 (detection frame) in mutually perpendicular directions by setting mutually perpendicular driving beams 132 and detection beams 152. Furthermore, by setting Coriolis force elements 140, a double decoupling is achieved between the first frame 110 (driving frame) and the second frame 120 (detection frame). That is, when the first frame 110 (driving frame) moves in the first axial direction, the second frame 120 (detection frame) will not be affected by the first frame 110, and when the second frame 120 (detection frame) moves in the second axial direction, the first frame 110 (driving frame) will not be affected by the second frame 120. Thus, a double decoupling of the driving mode and the detection mode is achieved.

[0066] Continue reading Figure 1 In this embodiment, the microelectromechanical gyroscope is symmetrical about both the first axis (e.g., the X-axis) and the second axis (e.g., the Y-axis). Multiple tuning forks are arranged in a straight line along both the first axis (e.g., the X-axis) and the second axis (e.g., the Y-axis). The tuning forks arranged along the first axis (e.g., the X-axis) are symmetrical about the second axis (e.g., the Y-axis), and the tuning forks arranged along the second axis (e.g., the Y-axis) are symmetrical about the first axis (e.g., the X-axis). Specifically, tuning forks 10a, 10b, 10c, and 10d are arranged in a matrix. Tuning forks 10a and 10b are arranged along a first axis (e.g., the X-axis) and are symmetrical about a second axis (e.g., the Y-axis); tuning forks 10b and 10c are arranged along a second axis (e.g., the Y-axis) and are symmetrical about a first axis (e.g., the X-axis); tuning forks 10c and 10d are arranged along a first axis (e.g., the X-axis) and are symmetrical about a second axis (e.g., the Y-axis); and tuning forks 10d and 10a are arranged along a second axis (e.g., the Y-axis) and are symmetrical about a first axis (e.g., the X-axis).

[0067] Accordingly, the driving unit 130 of the tuning forks arranged along the first axis (e.g., the X-axis) is symmetrical about the second axis (e.g., the Y-axis), the Coriolis force unit 140 of the tuning forks arranged along the first axis (e.g., the X-axis) is symmetrical about the second axis (e.g., the Y-axis), and the detection unit 150 of the tuning forks arranged along the first axis (e.g., the X-axis) is symmetrical about the second axis (e.g., the Y-axis); the driving unit 130 of the tuning forks arranged along the second axis (e.g., the Y-axis) is symmetrical about the first axis (e.g., the X-axis), the Coriolis force unit 140 of the tuning forks arranged along the second axis (e.g., the Y-axis) is symmetrical about the first axis (e.g., the X-axis), and the detection unit 150 of the tuning forks arranged along the second axis (e.g., the Y-axis) is symmetrical about the first axis (e.g., the X-axis).

[0068] In a tuning fork arranged along a first axis (e.g., the X-axis), the first frames 110 of adjacent tuning forks are opposite each other and are coupled via a first coupling structure 50, the second frames 120 of adjacent tuning forks are opposite each other and are coupled via a third coupling structure 70.

[0069] In this embodiment, the two ends of the first coupling structure 50 are respectively coupled to the first frame 110 of the adjacent tuning fork. The first coupling structure 50 is a second type of elastic beam extending in the direction of the first axis. The second type of elastic beam is elastic in its extension direction, so that the first frames 110 of the adjacent tuning fork can move closer or further away from each other in the direction of the first axis. Figure 6 A schematic diagram of the first coupling structure according to the first embodiment of this application is shown, as follows: Figure 6 As shown, in this embodiment, the first coupling structure 50 includes one or more elastic beams 510 extending in the direction of the second axis. When multiple elastic beams 510 are provided, the ends of the multiple elastic beams 510 are connected together, and the sides of one or more elastic beams 510 are respectively connected to the adjacent first frame 110 via connecting portions 530. The one or more elastic beams 510 of the first coupling structure 50 are first-type elastic beams. The one or more elastic beams 510 have a certain stiffness in their extending direction and a certain degree of bending freedom, allowing them to bend around a third axis (e.g., the Z-axis). This does not restrict the movement of the first frames 110 of two adjacent tuning forks in the direction of the first axis, thus giving the first coupling structure 50 a certain degree of elasticity in the direction of the first axis, allowing the first frames 110 of two adjacent tuning forks to move closer or further apart along the first axis.

[0070] In other embodiments, the first coupling structure 50 may also be any other coupling structure with a certain degree of elasticity in the direction of the first axis (e.g., the X-axis), and this embodiment does not limit this.

[0071] Figure 7aA schematic diagram of the third coupling structure in one embodiment is shown, such as... Figure 7a As shown, the third coupling structure 70a includes a rigid beam 710a, an elastic beam 720a, an elastic beam 740a, and a coupling anchor point 730a. The rigid beam 710a is straight and extends along the first axis. The rigid beam 710a has a certain rigidity in the first, second, and third axis directions, making it inflexible and non-stretchable. The two ends of the rigid beam 710a are coupled to the second frame 120 via the elastic beam 720a. The elastic beam 720a connecting the rigid beam 710a and the second frame 120 is a second type of elastic beam, giving the third coupling structure 70a a certain degree of freedom in the first axis direction. In other embodiments, the elastic beam 720a can be omitted, and the two ends of the rigid beam 710a can be directly connected to the second frame 120.

[0072] Furthermore, the rigid beam 710a is coupled to the coupling anchor point 730a via an elastic beam 740a. The elastic beam 740a is a third type of elastic beam, which is a U-shaped elastic beam, allowing the rigid beam 710a to rotate relative to the coupling anchor point 730a. In this embodiment, to ensure the balance of the third coupling structure 70a, multiple coupling anchor points 730a are provided, with the rigid beam 710a positioned between these multiple coupling anchor points 730a, and the multiple coupling anchor points 730a are centrally symmetrically arranged.

[0073] Figure 7b A schematic diagram of the third coupling structure in another embodiment is shown, such as Figure 7b As shown, the third coupling structure 70b includes a rigid beam 710b extending in the first axial direction and a coupling anchor point 730b. Both ends of the rigid beam 710b are coupled to the second frame 120 via elastic beams 720b. The elastic beams 720b connecting the rigid beam 710b and the second frame 120 are of the second type, allowing the third coupling structure 70b to have a certain degree of freedom in the first axial direction. In other embodiments, the second type of elastic beam 720b may be omitted.

[0074] Furthermore, in this embodiment, the third coupling structure also includes a rigid frame 750b, and a rigid beam 710b is coupled to a coupling anchor point 730b via the rigid frame 750b. Specifically, the rigid frame 750b is hollow inside, and the coupling anchor point 730b is located inside the rigid frame 750b, and the coupling anchor point 730b is coupled to the rigid frame 750b via an elastic beam 740b. The elastic beam 740b is a first-type elastic beam, which has a certain degree of bending freedom, allowing the rigid frame 750b to rotate relative to the coupling anchor point 730b.

[0075] In other embodiments, the third coupling structure 70 may also be any other coupling structure with rotational degrees of freedom in the direction of the third axis (e.g., the Z-axis), and this embodiment does not limit this.

[0076] In the direction of the second axis (e.g., the Y-axis), the second frames 120 of adjacent tuning forks are close to each other, and the close-to-each second frames 120 are coupled via a fourth coupling structure 80. In the tuning forks arranged in the direction of the second axis (e.g., the Y-axis), the first frames 110 of adjacent tuning forks are far apart from each other and are isolated by the second frames 120. The far-away first frames 110 of adjacent tuning forks are coupled via a second coupling structure 60, which is coupled to the side of the first frame 110 of the adjacent tuning forks respectively.

[0077] Figure 8 A schematic diagram of the second coupling structure according to the first embodiment of this application is shown, as follows: Figure 8 As shown, the second coupling structure 60 includes a rigid beam 610, an elastic beam 630, a hinge 640, and a coupling anchor point 620. The rigid beam 610 extends along the second axis, and its two ends are coupled to the first frame 110 of the adjacent tuning fork via the elastic beam 630, respectively. The rigid beam 610 is coupled to the second coupling anchor point 620 at its middle position via the hinge 640. The rigid beam 610 has a certain stiffness along the first axis, the second axis, and the third axis, giving it a certain degree of bending resistance. The elastic beam 630 is a third type of elastic beam, which is a Z-shaped elastic beam, allowing the rigid beam 610 to rotate relative to the first frame 110.

[0078] The two ends of the fourth coupling structure 80 are respectively coupled to the second frame 120 of the adjacent tuning fork. The fourth coupling structure 80 is a second type of elastic beam extending in the direction of the second axis. The fourth coupling structure 80 has a certain elasticity in the direction of the second axis (e.g., the Y-axis), so that the adjacent second frames 120 can move closer or further away from each other along the direction of the second axis (e.g., the Y-axis).

[0079] In this application, the first frame 110 (driving frame) and the second frame 120 (detection frame) are separated from each other, and the first frame 110 (driving frame) and the second frame 120 (detection frame) are respectively coupled to the Coriolis force element 140. The reasonable arrangement of the Coriolis force element 140, the driving beam, and the detection beam achieves double decoupling between the driving mode and the detection mode. Specifically, in the driving mode, a voltage is applied to the driving capacitor, and the first frame 110 moves along the first axis (e.g., the X-axis) under the action of electrostatic force. Due to the tensile and compressive strength characteristics of the first coupling beam 142 in the first axis (e.g., the X-axis) direction, the Coriolis force element 140 follows the driving unit 130 to move along the first axis (e.g., the X-axis) direction. The end of the second coupling beam 143 connected to the Coriolis force element 140 follows the Coriolis force element 140 to move along the first axis (e.g., the X-axis) direction. Due to the constraints of the detection beam 152 and the detection anchor point 153, the detection unit 150 will not move along the first axis (e.g., the X-axis), and the end of the second coupling beam 143 connected to the detection unit 150 will not move along the first axis (e.g., the X-axis), while the second coupling beam 143 will bend. When an angular velocity is input, under the action of the Coriolis force, the Coriolis force unit 140 will move along the second axis (e.g., the Y-axis). Due to the tensile and compressive strength characteristics of the second coupling beam 143 in the second axis (e.g., the Y-axis), the second frame 120 will follow the Coriolis force unit 140 in the second axis (e.g., the Y-axis). The end of the first coupling beam 142 connected to the Coriolis force unit 140 will also follow the Coriolis force unit 140 in the second axis (e.g., the Y-axis). Due to the constraints of the driving beam 132 and the driving anchor point 133, the driving unit 130 will not move along the second axis (e.g., the Y-axis), and the end of the first coupling beam 142 connected to the driving unit 130 will not move along the second axis (e.g., the Y-axis), while the first coupling beam 142 will bend. This achieves the decoupling of the driving mode and the detection mode motion.

[0080] In the driving mode, the first frames 110 of the multiple tuning forks move along a first axis (e.g., the X-axis), and the first frames 110 of adjacent tuning forks move in opposite phases. In the detection mode, the second frames 120 of the multiple tuning forks move along a second axis (e.g., the Y-axis), and the second frames 120 of adjacent tuning forks move in opposite phases.

[0081] In one embodiment, in the driving mode, when the first frame 110 of tuning fork 10a and the first frame 110 of tuning fork 10c move positively along a first axis (e.g., the X-axis), the first frame 110 of tuning fork 10b and the first frame 110 of tuning fork 10d move negatively along the first axis (e.g., the X-axis), and vice versa. In the detection mode, when the second frame 120 of tuning fork 10a and the second frame 120 of tuning fork 10c move positively along a second axis (e.g., the Y-axis), the second frame 120 of tuning fork 10b and the second frame 120 of tuning fork 10d move negatively along the second axis (e.g., the Y-axis), and vice versa.

[0082] In this application, the first frames 110 of the tuning forks arranged along the first axis (X-axis) are coupled together via a first coupling structure 50, and the first frames 110 of the tuning forks arranged along the second axis (Y-axis) are coupled together via a second coupling structure 60, thereby realizing the synchronous movement of the first frames 110 (driving frames) of the microelectromechanical gyroscope; the second frames 120 of the tuning forks arranged along the first axis (X-axis) are coupled together via a third coupling structure 70, and the second frames 120 of the tuning forks arranged along the second axis (Y-axis) are coupled together via a fourth coupling structure 80, thereby realizing the synchronous movement of the second frames 120 (detection frames) of the microelectromechanical gyroscope.

[0083] Furthermore, the drive unit 130 is disposed inside the first frame 110, and the detection unit is disposed inside the second frame 120, with the first frame 110 and the second frame 120 coupled via Coriolis force elements 140. In the first axis direction (e.g., the X-axis), the first frames 110 of adjacent tuning forks are opposite each other, allowing them to be easily coupled together; the second frames 120 of adjacent tuning forks are opposite each other, allowing them to be easily coupled together. In the second axis direction (e.g., the Y-axis), the second frames 120 of adjacent tuning forks are opposite each other, allowing them to be easily coupled together; although the first frames 110 of adjacent tuning forks are far apart, the sides of the first frames 110 provide the possibility for coupling between the first frames 110 of adjacent tuning forks.

[0084] Figure 9 A schematic diagram of the structure of the microelectromechanical gyroscope provided in the second embodiment of this application is shown, as follows: Figure 9 As shown, the microelectromechanical gyroscope includes multiple tuning forks. In this embodiment, the microelectromechanical gyroscope includes, for example, tuning forks 10a, 10b, 10c, and 10d, and tuning forks 10a, 10b, 10c, and 10d have the same structure.

[0085] Figure 10 A schematic diagram of the structure of a tuning fork according to a second embodiment of this application is shown, as follows: Figure 10As shown, the tuning fork 10a includes a first frame 110, a second frame 120, a driving unit 130, a Coriolis force unit 140, and a detection unit 150. Unlike the first embodiment, in this embodiment, the first frame 110 serves as the detection frame, the second frame 120 serves as the driving frame, and the driving unit 130 is located within and coupled to the second frame 120. The detection unit 150 is located within and coupled to the first frame 110.

[0086] Figure 11 A schematic diagram of the structure of the driving unit according to the second embodiment of this application is shown, as follows: Figure 11 As shown, the drive unit 130 includes a drive capacitor 131, a drive beam 132, and a drive anchor point 133.

[0087] The driving capacitor 131 is coupled to the second frame 120. The driving capacitor 131 includes a driving capacitor anchor point 1311, a first driving comb tooth 1312 connected to the driving capacitor anchor point 1311, and a second driving comb tooth 1313 connected to the second frame 120. The first driving comb tooth 1312 and the second driving comb tooth 1313 are opposite to each other and constitute the driving capacitor 131. The first driving comb tooth 1312 and the second driving comb tooth 1313 extend in the direction of the second axis (e.g., the Y-axis) and drive the second frame 120 to move in the direction of the second axis (e.g., the Y-axis).

[0088] The second frame 120 is coupled to the drive anchor 133 via the drive beam 132. The drive beam 132 is a first type of elastic beam extending in the direction of the first axis (e.g., the X-axis). The drive beam 132 has a certain rigidity in the direction of the first axis (e.g., the X-axis), so that the drive beam 132 has a certain tensile and compressive strength in the direction of the first axis (e.g., the X-axis), that is, the drive beam 132 is not extensible in the direction of the first axis (e.g., the X-axis). The drive beam 132 has a certain degree of bending freedom, so that the drive beam 132 can be bent at least around the third axis (e.g., the Z-axis).

[0089] Due to the constraints of the drive beam 132 and the drive anchor point 133, the second frame 120 can only move along the second axis (e.g., the Y-axis) and cannot move along the first axis (e.g., the X-axis).

[0090] The detection unit 150 is located within the first frame 110 and is coupled to the first frame 110. Figure 12 A schematic diagram of the detection unit according to the second embodiment of this application is shown, as follows: Figure 12 As shown, the detection unit 150 includes a detection capacitor 151, a detection beam 152, and a detection anchor point 153.

[0091] The detection capacitor 151 includes a detection capacitor anchor point 1511, a first detection comb tooth 1512 connected to the detection capacitor anchor point 1511, and a second detection comb tooth 1513 connected to the first frame 110. The first detection comb tooth 1512 and the second detection comb tooth 1513 are opposite to each other and constitute the detection capacitor 151. The first detection comb tooth 1512 and the second detection comb tooth 1513 extend in the direction of a second axis (e.g., the Y-axis).

[0092] The first frame 110 is coupled to the detection anchor point 153 via the detection beam 152. The detection beam 152 is a first-type elastic beam extending in the direction of the second axis (e.g., the Y-axis). The detection beam 152 has a certain rigidity in the direction of the second axis (e.g., the Y-axis), so that the detection beam 152 has a certain tensile and compressive strength in the direction of the second axis (e.g., the Y-axis), that is, the detection beam 152 cannot be stretched or contracted in the direction of the second axis (e.g., the Y-axis). The detection beam 152 has a certain degree of bending freedom, so that the detection beam 152 can bend around the third axis (e.g., the Z-axis).

[0093] Due to the constraints of the detection beam 152 and the detection anchor point 153, the first frame 110 can only move along the first axis (e.g., the X-axis) and cannot move along the second axis (e.g., the Y-axis).

[0094] Furthermore, the first frame 110 has a cavity 111 inside to provide space for accommodating the Coriolis force unit 140. Detection capacitors 151 are located on both sides of the Coriolis force unit 140 within the cavity 111 along a first axis (e.g., the X-axis). The side of the cavity 111 opposite to the second frame 120 also has an opening to facilitate coupling between the Coriolis force unit 140 inside the cavity 111 and the second frame 120 outside the cavity 111.

[0095] The structures of the Coriolis force element 140, the first coupling structure 50, the second coupling structure 60, the third coupling structure 70, and the fourth coupling structure 80 are the same as those in the first embodiment, and will not be described again in this embodiment.

[0096] In this embodiment, in the driving mode, a voltage is applied to the driving capacitor, and the second frame 120 moves along the second axis (e.g., the Y-axis) under the action of electrostatic force. Due to the tensile and compressive strength of the second coupling beam 143 in the second axis (e.g., the Y-axis), the Coriolis force element 140 follows the second frame 120 in the second axis (e.g., the Y-axis). The end of the first coupling beam 142 connected to the Coriolis force element 140 follows the Coriolis force element 140 in the second axis (e.g., the Y-axis). Due to the constraints of the detection beam 152 and the detection anchor point 153, the first frame 110 does not move along the second axis (e.g., the Y-axis), the end of the first coupling beam 142 connected to the first frame 110 does not move along the second axis (e.g., the Y-axis), and the first coupling beam 142 bends. When an angular velocity is input, under the action of the Coriolis force, the Coriolis force element 140 moves along the first axis (e.g., the X-axis). Due to the tensile and compressive strength of the first coupling beam 142 in the first axis (e.g., the X-axis), the first frame 110 follows the Coriolis force element 140 in the first axis (e.g., the X-axis). The end of the second coupling beam 143 connected to the Coriolis force element 140 also follows the Coriolis force element 140 in the first axis (e.g., the X-axis). Due to the constraints of the driving beam 132 and the driving anchor point 133, the second frame 120 does not move along the first axis (e.g., the X-axis), and the end of the second coupling beam 143 connected to the second frame 120 does not move along the first axis (e.g., the X-axis), while the second coupling beam 143 bends. This achieves the decoupling of the driving mode and the detection mode motion.

[0097] In the driving mode, the second frames 120 of the multiple tuning forks move along a second axis (e.g., the Y-axis), and the second frames 120 of adjacent tuning forks move in opposite phases. In the detection mode, the first frames 110 of the multiple tuning forks move along a first axis (e.g., the X-axis), and the first frames 110 of adjacent tuning forks move in opposite phases.

[0098] Figure 13 A schematic diagram of the structure of the microelectromechanical gyroscope provided in the third embodiment of this application is shown, as follows: Figure 13 As shown, the microelectromechanical gyroscope includes multiple tuning forks. In this embodiment, the microelectromechanical gyroscope includes, for example, tuning forks 10a, 10b, 10c, and 10d, and tuning forks 10a, 10b, 10c, and 10d have the same structure.

[0099] Figure 14 A schematic diagram of the structure of a tuning fork according to a third embodiment of this application is shown, as follows: Figure 14 As shown, the tuning fork 10a includes a first frame 110, a second frame 120, a driving unit 130, a Coriolis force unit 140, and a detection unit 150.

[0100] In the first embodiment, the drive unit 130 is enclosed in the first frame 110, and the detection unit 150 is enclosed in the second frame 120. Unlike the first embodiment, in this embodiment, the drive beam 132 of the drive unit 130 is exposed on the side of the first frame 110 away from the Coriolis force unit 140, and the detection beam 152 of the detection unit 150 is exposed on the side of the second frame 120 away from the first frame 110.

[0101] Figure 15 A schematic diagram of the drive beam provided according to the third embodiment of this application is shown, as follows: Figure 15 As shown, the drive beam 132 includes a rigid rod 1321, a hinge 1322, and an elastic beam 1323. The ends of the rigid rod 1321 are coupled to adjacent rigid rods 1321 and the first frame 110 via the elastic beam 1323, respectively. The sides of the rigid rod 1321 are coupled to the drive anchor point 133 via the hinge 1322. The rigid rod 1321 extends in the direction of the second axis (e.g., the Y-axis) and has a certain rigidity in this direction, giving both the rigid rod 1321 and the elastic beam 1323 certain tensile and compressive strength. The rigid rod 1321 is non-extensible in the direction of the second axis (e.g., the Y-axis). Furthermore, the rigid rod 1321 cannot be bent. The elastic beam 1323 is a first type of elastic beam extending in the direction of the second axis (e.g., the Y-axis). The elastic beam 1323 has a certain degree of bending freedom, so that the elastic beam 1323 can bend around the third axis (e.g., the Z-axis) so that the first frame 110 can move along the direction of the first axis (e.g., the X-axis).

[0102] The structure of the detection beam 152 is the same as that of the drive beam 132, except that the detection beam 152 extends in the direction of the first axis (e.g., the X-axis).

[0103] In this embodiment, among the tuning forks arranged along the first axis (e.g., the X-axis), the first frames 110 of adjacent tuning forks are opposite each other, and the drive beams 132 of adjacent tuning forks are opposite each other because the drive beams 132 are exposed on the side of the first frame 110 away from the Coriolis force element 140. The two ends of the first coupling structure 50 are respectively coupled to the drive beams 132 of the adjacent tuning forks to achieve coupling of the first frames 110 of the adjacent tuning forks.

[0104] Figure 16 A schematic diagram of the first coupling structure according to the third embodiment of this application is shown, as follows: Figure 16As shown, the first coupling structure 50 is a first type of elastic beam extending in the direction of the first axis (e.g., the X-axis). As mentioned earlier, the first type of elastic beam has a certain rigidity in its extension direction, which gives the first coupling structure 50 a certain tensile and compressive strength in the direction of the first axis (e.g., the X-axis), and the first coupling structure 50 is non-extensible in the direction of the first axis (e.g., the X-axis). Furthermore, the first coupling structure 50 has a certain degree of bending freedom, which allows the first coupling structure 50 to bend about a third axis (e.g., the Z-axis). Figure 17 A schematic diagram of the bending state of the drive beam and the first coupling structure according to a third embodiment of this application is shown. Figure 17 As shown, the two ends of the first coupling structure 50 are respectively coupled to the rigid rods 1321 in the drive beam. Both the first coupling structure 50 and the first type of elastic beam 1323 are capable of bending.

[0105] In other embodiments, the first coupling structure 50 may also be a second type of elastic beam extending in the direction of the first axis, the second type of elastic beam having a certain degree of extensibility and contraction in the direction of its extension.

[0106] In the direction of the second axis (e.g., the Y-axis), the second frames 120 of adjacent tuning forks are close together, and the detection beams of adjacent tuning forks are opposite each other because the detection beam 152 is exposed on the side of the second frame 120 away from the first frame 110. The two ends of the fourth coupling structure 80 are respectively coupled to the detection beams 152 of the adjacent tuning forks to achieve coupling of the second frames 120 of the adjacent tuning forks.

[0107] The fourth coupling structure 80 has the same structure as the first coupling structure 50, except that it extends along the second axis (e.g., the Y-axis). The fourth coupling structure 80 is a first-type elastic beam, which possesses a certain rigidity in its extension direction, giving it tensile and compressive strength along the second axis (e.g., the Y-axis). The fourth coupling structure 80 is non-extensible along the second axis (e.g., the Y-axis). Furthermore, the fourth coupling structure 80 has a certain degree of bending freedom, allowing it to bend around a third axis (e.g., the Z-axis). The fourth coupling structure 80 can also be a second-type elastic beam.

[0108] In other embodiments, the first coupling structure 50 and the fourth coupling structure 80 may also be any other coupling structure that can provide bending or rotational degrees of freedom in the direction of the third axis (e.g., the Z-axis), and this embodiment does not limit this.

[0109] The structures of the second coupling structure 60 and the third coupling structure 70 are the same as those in the first embodiment, and will not be described again here. The difference from the first embodiment is that in this embodiment, the two ends of the second coupling structure 60 are respectively coupled to the drive beam 132 of the adjacent tuning fork.

[0110] Figure 18 A schematic diagram of the structure of the microelectromechanical gyroscope provided in the fourth embodiment of this application is shown, as follows: Figure 18 As shown, the microelectromechanical gyroscope includes multiple tuning forks. In this embodiment, the microelectromechanical gyroscope includes, for example, tuning forks 10a, 10b, 10c, and 10d, and tuning forks 10a, 10b, 10c, and 10d have the same structure.

[0111] Figure 19 A schematic diagram of the structure of a tuning fork according to a fourth embodiment of this application is shown, as follows: Figure 19 As shown, the tuning fork 10a includes a first frame 110, a second frame 120, a driving unit 130, a Coriolis force unit 140, and a detection unit 150.

[0112] In the second embodiment, the drive unit 130 is enclosed in the second frame 120, and the detection unit 150 is enclosed in the first frame 110. Unlike the second embodiment, in this embodiment, the drive beam 132 of the drive unit 130 is exposed on the side of the second frame 120 away from the first frame 110, and the detection beam 152 of the detection unit 150 is exposed on the side of the first frame 110 away from the Coriolis force unit 140.

[0113] Figure 20 A schematic diagram of the drive beam provided according to the fourth embodiment of this application is shown, as follows: Figure 20 As shown, the drive beam 132 includes a rigid rod 1321, a hinge 1322, and an elastic beam 1323. The ends of the rigid rod 1321 are coupled to adjacent rigid rods 1321 and the second frame 120 via the elastic beam 1323, and the sides of the rigid rod 1321 are coupled to drive anchor points 133 via hinges 1322. The rigid rod 1321 extends along a first axis (e.g., the X-axis) and possesses a certain rigidity in this direction, giving it tensile and compressive strength. The rigid rod 1321 is non-extensible in this direction. Furthermore, the rigid rod 1321 is not allowed to bend. The elastic beam 1323 is a first type of elastic beam extending in the direction of the first axis (e.g., the X-axis). The elastic beam 1323 has a certain degree of bending freedom, so that the elastic beam 1323 can be bent about the direction of the third axis (e.g., the Z-axis), so that the second frame 120 can move along the direction of the second axis (e.g., the Y-axis).

[0114] The structure of the detection beam 152 is the same as that of the drive beam 132, except that the detection beam 152 extends in the direction of the second axis (e.g., the Y-axis).

[0115] In this embodiment, among the tuning forks arranged along the first axis (e.g., the X-axis), the first frames 110 of adjacent tuning forks are opposite each other, and because the detection beams 152 are exposed on the side of the first frame 110 away from the Coriolis force element 140, the detection beams 152 of adjacent tuning forks are opposite each other. The two ends of the first coupling structure 50 are respectively coupled to the detection beams 152 of the adjacent tuning forks to achieve coupling of the first frames 110 of the adjacent tuning forks.

[0116] In the direction of the second axis (e.g., the Y-axis), the second frames 120 of adjacent tuning forks are close together, and the drive beams 132 of adjacent tuning forks are opposite each other because the drive beams 132 are exposed on the side of the second frame 120 away from the first frame 110. The two ends of the fourth coupling structure 80 are respectively coupled to the drive beams 132 of the adjacent tuning forks to achieve coupling of the second frames 120 of the adjacent tuning forks.

[0117] The structures of the first coupling structure 50 and the fourth coupling structure 80 are the same as those in the third embodiment, and will not be described again here.

[0118] The structures of the second coupling structure 60 and the third coupling structure 70 are the same as those in the second embodiment, and will not be described again here. The difference from the second embodiment is that in this embodiment, the two ends of the second coupling structure 60 are respectively coupled to the detection beams 152 of the adjacent tuning fork.

[0119] As described above, these embodiments of the present invention do not exhaustively cover all details, nor do they limit the invention to the specific embodiments described. Clearly, many modifications and variations can be made based on the above description. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to effectively utilize the invention and its modifications. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A micro-electro-mechanical gyroscope comprising a plurality of identical tuning forks, each of the plurality of tuning forks comprising: a first frame; a second frame adjacent to the first frame; a Coriolis force unit coupled to the first frame and the second frame, respectively; a drive unit in one of the first frame and the second frame, and a sense unit in the other of the first frame and the second frame; wherein the first frames of adjacent tuning forks are coupled together, and the second frames of adjacent tuning forks are coupled together.

2. The micro electro mechanical gyroscope according to claim 1, wherein the drive unit comprising: a drive capacitor in a drive frame and coupled to the drive frame; a drive anchor in the drive frame; and a drive beam coupling the drive frame to the drive anchor; the sense unit comprising: a sense capacitor in a sense frame and coupled to the sense frame; a sense anchor in the sense frame; and a sense beam coupling the sense frame to the sense anchor.

3. The micro electro mechanical gyroscope according to claim 2, wherein the first frame is a drive frame, the second frame is a sense frame, the drive capacitor drives the first frame to move linearly in a first axis direction, and the sense capacitor senses the movement of the second frame in a second axis direction.

4. The micro-electromechanical gyroscope according to claim 3, wherein the drive beam extends in the second axis direction and has a certain stiffness in the second axis direction, so that the drive beam has a certain tensile and compressive resistance in the second axis direction, the drive beam has a certain bending freedom, and the drive beam and the drive anchor limit the movement of the first frame in the second axis direction; the sense beam extends in the first axis direction and has a certain stiffness in the first axis direction, so that the sense beam has a certain tensile and compressive resistance in the first axis direction, the sense beam has a certain bending freedom, and the sense beam and the sense anchor limit the movement of the second frame in the first axis direction.

5. The micro-electromechanical gyroscope according to claim 2, wherein, the second frame is a drive frame, the first frame is a sense frame, the drive capacitor drives the second frame to move linearly in a second axis direction, and the sense capacitor senses the movement of the first frame in a first axis direction.

6. The micro-electromechanical gyroscope according to claim 5, wherein the drive beam extends in the first axis direction and has a certain stiffness in the first axis direction, so that the drive beam has a certain tensile and compressive resistance in the first axis direction, the drive beam has a certain bending freedom, and the drive beam and the drive anchor limit the movement of the second frame in the first axis direction; the sense beam extends in the second axis direction and has a certain stiffness in the second axis direction, so that the sense beam has a certain tensile and compressive resistance in the second axis direction, the sense beam has a certain bending freedom, and the sense beam and the sense anchor limit the movement of the first frame in the second axis direction.

7. The micro-electromechanical gyroscope according to claim 2, wherein, In the first axis direction, the plurality of tuning forks are arranged in a straight line, in the tuning forks arranged in the first axis direction, the first frames of adjacent tuning forks are opposite to each other, and the first frames of adjacent tuning forks are coupled via the first coupling structure; the second frames of adjacent tuning forks are opposite to each other, and the second frames of adjacent tuning forks are coupled via the third coupling structure; In the second axis direction, the plurality of tuning forks are arranged in a straight line, in the tuning forks arranged in the second axis direction, the second frames of adjacent tuning forks are opposite to each other, and the second frames of adjacent tuning forks are coupled via the fourth coupling structure, the first frames of adjacent tuning forks are away from each other, and the first frames of adjacent tuning forks away from each other are coupled via the second coupling structure.

8. The micro electro mechanical gyroscope according to claim 7, wherein One of the driving unit and the detection unit is enclosed in the first frame, and the other of the driving unit and the detection unit is enclosed in the second frame.

9. The micro electro mechanical gyroscope according to claim 8, wherein The first coupling structure is a second type of elastic beam, both ends of the first coupling structure are coupled with the first frames of adjacent tuning forks respectively, and the second type of elastic beam has a certain degree of freedom of movement in the direction of extension, so that the first frames of adjacent tuning forks can approach or move away from each other.

10. The micro-electromechanical gyroscope according to claim 8, wherein, The fourth coupling structure is (consistent with claim 9) a second type of elastic beam, both ends of the fourth coupling structure are coupled with the second frames of adjacent tuning forks respectively, and the second type of elastic beam has a certain degree of freedom of movement in the direction of extension, so that the second frames of adjacent tuning forks can approach or move away from each other.

11. The micro-electromechanical gyroscope according to claim 7, wherein, The first frame has an opening extending in the second axis direction, and the second frame has an opening extending in the first axis direction; one of the driving beams or the detection beams is exposed to the opening of the first frame, and the other of the driving beams or the detection beams is exposed to the opening of the second frame.

12. The micro-electromechanical gyroscope according to claim 11, wherein, Both ends of the first coupling structure are coupled with the driving beams or the detection beams exposed to the side of the first frame, so as to be coupled with the first frame via the driving beams or the detection beams exposed to the side of the first frame; the first coupling structure is a first type of elastic beam or a second type of elastic beam, the first type of elastic beam has a certain rigidity in the direction of extension, so that the first type of elastic beam is not scalable in the direction of extension; the first type of elastic beam has a certain bending freedom, so that the first type of elastic beam can bend around a direction perpendicular to the direction of extension; the second type of elastic beam has a certain degree of freedom of movement in the direction of extension.

13. The micro-electromechanical gyroscope according to claim 11, wherein, Both ends of the fourth coupling structure are coupled with the detection beams or the driving beams exposed to the side of the second frame, so as to be coupled with the second frame via the detection beams or the driving beams exposed to the side of the second frame; the fourth coupling structure is a first type of elastic beam or a second type of elastic beam, the first type of elastic beam has a certain rigidity in the direction of extension, so that the first type of elastic beam is not scalable in the direction of extension; the first type of elastic beam has a certain bending freedom, so that the first type of elastic beam can bend around a direction perpendicular to the direction of extension; the second type of elastic beam has a certain degree of freedom of movement in the direction of extension.

14. The micro-electromechanical gyroscope according to claim 8 or 11, wherein, The second coupling structure comprises: a rigid beam extending in the second axis direction, two ends of the rigid beam of the second coupling structure are respectively coupled with the first frame of the adjacent tuning fork via the elastic beam; and a coupling anchor, the middle position of the rigid beam of the second coupling structure is hinged with the coupling anchor via a hinge; the second rigid beam has a certain rigidity and bending strength in the first axis and the second axis, so that the second rigid beam has a certain bending resistance in the first axis and the second axis directions.

15. The micro-electromechanical gyroscope according to claim 8 or 11, wherein, the third coupling structure comprises: a rigid beam extending in the first axis direction; and a coupling anchor, located at the side of the rigid beam of the third coupling structure; two ends of the third coupling structure rigid beam are coupled with the second frame via the elastic beam; the side of the third coupling structure rigid beam is coupled with the coupling anchor via the elastic beam.

16. The micro-electromechanical gyroscope according to claim 8 or 11, wherein the third coupling structure comprises: a rigid beam extending in the first axis direction; and a coupling anchor; the third coupling structure rigid beam is coupled with the second frame via the elastic beam; the third coupling structure rigid beam is coupled with the coupling anchor via the rigid frame; wherein, the rigid frame is hollow inside, the coupling anchor of the third coupling structure is located inside the rigid frame, and the coupling anchor of the third coupling structure is coupled with the rigid frame via the elastic beam.

17. The micro-electromechanical gyroscope according to claim 1, wherein the Coriolis force unit comprises: a Coriolis force frame located in the first frame; a first coupling beam, the Coriolis force unit is coupled with the first frame via the first coupling beam; a second coupling beam, the Coriolis force unit is coupled with the second frame via the second coupling beam.

18. The micro-electromechanical gyroscope according to claim 17, wherein, the first coupling beam is a first type of elastic beam extending in the first axis direction, and the second coupling beam is a first type of elastic beam extending in the second axis direction, and the first axis and the second axis are perpendicular to each other; wherein, the first type of elastic beam has a certain rigidity in the direction of its extension, so that the first type of elastic beam is not scalable in the direction of its extension; the first type of elastic beam has a certain bending freedom, so that the first type of elastic beam can bend around the direction perpendicular to its extension direction.

19. The micro-electromechanical gyroscope according to claim 17, wherein, a groove is formed in the Coriolis force frame, the second coupling beam is arranged in the groove, one end of the second coupling beam is coupled with the Coriolis force frame, and the other end extends to the outside of the Coriolis force frame and is coupled with the second frame located outside the Coriolis force frame.

20. The micro-electromechanical gyroscope according to claim 1, wherein, the first frames of the plurality of tuning forks move in the first axis direction, and the first frames of the adjacent tuning forks in the plurality of tuning forks move in opposite directions; the second frames of the plurality of tuning forks move in the second axis direction, and the second frames of the adjacent tuning forks in the plurality of tuning forks move in opposite directions.

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