Capacitive vacuum gauge and semiconductor equipment

Abstract

The invention provides a capacitive vacuum gauge and a semiconductor device, and the capacitive vacuum gauge comprises a detection cavity, one side of which is provided with a through hole; the first end of the air inlet pipe is communicated with the through hole, and the second end of the air inlet pipe is communicated with a cavity to be measured; and the insulating pipe is connected to any position of the air inlet pipe, so that the detection cavity is grounded without passing through the air inlet pipe. According to the capacitive vacuum gauge and the semiconductor equipment provided by the embodiment of the invention, the detection cavity is not electrically connected with the outside through the air inlet pipe by virtue of the insulating pipe, so that the precision of a capacitance acquisition circuit is improved, and the precision of air pressure measurement is improved.

Description

Technical Field

[0001] This application relates to the field of vacuum gauge technology, and in particular to a capacitive vacuum gauge and semiconductor device. Background Technology

[0002] Currently, vacuum gauges are used in various applications. For example, in semiconductor manufacturing processes, one or more high-precision vacuum gauges are typically used in processes such as dry etching and physical vapor deposition. Currently, the main type of high-precision vacuum gauge used is the capacitive thin-film vacuum gauge. Its measurement principle involves introducing gas into the detection chamber through an inlet pipe. The gas pressure causes deformation of the detection diaphragm, resulting in a change in the distance between the diaphragm and the fixed electrode, which in turn causes a change in the capacitance between them. The capacitance is then measured using electrical methods, and the corresponding pressure value can be obtained based on the correlation between the capacitance change and the gas change. However, with the development of semiconductor technology, the sensitivity requirements for vacuum gauges are becoming increasingly stringent. Based on the above, it is necessary to provide a higher-precision capacitive metal thin-film vacuum gauge. Summary of the Invention

[0003] The technical problem this application aims to solve is that, with the development of semiconductor technology, the sensitivity of current capacitive vacuum gauges cannot meet the requirements.

[0004] This application provides a capacitive vacuum gauge, comprising: a detection chamber, wherein a through hole is provided on one side of the detection chamber; an air inlet pipe, wherein a first end of the air inlet pipe is connected to the through hole and a second end of the air inlet pipe is connected to the chamber to be measured; and an insulating tube, which is connected at any position of the air inlet pipe so that the detection chamber is not electrically connected to the outside through the air inlet pipe.

[0005] In some embodiments of this application, the insulating tube is connected between the first end and the second end of the air inlet pipe.

[0006] In some embodiments of this application, the insulating tube is provided with a first connecting structure at both ends. The first connecting structure has an L-shaped locking structure. The insulating tube is connected to the air inlet pipe through the first connecting structure and is locked by the L-shaped locking structure.

[0007] In some embodiments of this application, a second connecting structure is provided at the position where the air intake pipe connects to both ends of the insulating pipe. The second connecting structure has an L-shaped locking structure, and the insulating pipe is connected to the air intake pipe through the second connecting structure and locked by the L-shaped locking structure.

[0008] In some embodiments of this application, two L-shaped locking structures connected to both ends of the insulating tube respectively lock the inner wall and the outer wall of the insulating tube on both sides.

[0009] In some embodiments of this application, two L-shaped locking structures, respectively connected to both ends of the insulating tube, are positioned on the same side of the insulating tube.

[0010] In some embodiments of this application, a first connecting structure is provided at one end of the insulating tube, and a second connecting structure is provided at the position where the air inlet pipe connects to the other end of the insulating tube. The first connecting structure has an L-shaped locking structure, and the second connecting structure has an L-shaped locking structure. The insulating tube is connected to the air inlet pipe through the first connecting structure and the second connecting structure and is locked by the L-shaped locking structure.

[0011] In some embodiments of this application, the L-shaped locking structure on the first connecting structure and the L-shaped locking structure on the second connecting structure are located on the same side of the insulating tube.

[0012] In some embodiments of this application, the L-shaped locking structure on the first connecting structure and the L-shaped locking structure on the second connecting structure are respectively located on both sides of the insulating tube.

[0013] In some embodiments of this application, the insulating tube is provided with a first connecting structure at both ends, and the air inlet pipe is provided with a second connecting structure at the position where it connects to the two ends of the insulating tube. The insulating tube is connected to the air inlet pipe through the first connecting structure and the second connecting structure.

[0014] In some embodiments of this application, the first connecting structure includes a first protrusion or a first groove extending axially, and the second connecting structure includes a second protrusion or a second groove extending axially and adapted to the first protrusion or the first groove.

[0015] In some embodiments of this application, the first groove and the second groove are annular grooves, and the first protrusion and the second protrusion are annular protrusions.

[0016] In some embodiments of this application, the first groove and the second groove include a plurality of holes evenly distributed circumferentially, and the first protrusion and the second protrusion include a plurality of pillars evenly distributed circumferentially.

[0017] In some embodiments of this application, the insulating tube and the air inlet tube are connected by welding.

[0018] In some embodiments of this application, the insulating tube and the air inlet tube are connected by a threaded connection.

[0019] In some embodiments of this application, a sealing ring is also provided between the insulating tube and the air inlet tube.

[0020] In some embodiments of this application, the first end of the insulating tube is connected to the detection cavity and communicates with the through hole, and the second end of the insulating tube is connected to the first end of the air inlet tube.

[0021] In some embodiments of this application, the first end of the insulating tube is connected to the second end of the air inlet tube, and the second end of the insulating tube is connected to the cavity to be measured.

[0022] In some embodiments of this application, the insulating tube is made of any one of ceramic, rubber, or plastic.

[0023] This application also provides a semiconductor device, characterized in that it includes: a reaction chamber; and a capacitive vacuum gauge as described above, connected to the reaction chamber, for measuring the pressure of the reaction chamber.

[0024] The capacitive vacuum gauge and semiconductor device described in this application improve the accuracy of the capacitance acquisition circuit and thus the accuracy of air pressure measurement by using an insulating tube to prevent the detection cavity from being grounded through the air inlet pipe. Attached Figure Description

[0025] The following accompanying drawings describe in detail the exemplary embodiments disclosed in this application. The same reference numerals denote similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting and exemplary, and the drawings are for illustrative purposes only and are not intended to limit the scope of this application. Other embodiments may similarly fulfill the intent of this application. It should be understood that the drawings are not drawn to scale. Wherein: Figure 1 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to some embodiments of this application; Figure 2 This is a partial structural schematic diagram of a capacitive vacuum gauge according to other embodiments of this application; Figure 3 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application; Figure 4 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application; Figure 5 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application; Figure 6 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application. Detailed Implementation

[0026] The following description provides specific application scenarios and requirements for this application, intended to enable those skilled in the art to make and use the content of this application. Various partial modifications to the disclosed embodiments will be apparent to those skilled in the art, and the general principles defined herein can be applied to other embodiments and applications without departing from the spirit and scope of this application. Therefore, this application is not limited to the embodiments shown, but rather to the widest scope consistent with the claims.

[0027] The technical solution of this application will be described in detail below with reference to the embodiments and accompanying drawings.

[0028] Figure 1 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to some embodiments of this application.

[0029] Some embodiments of this application provide a capacitive vacuum gauge 100, see reference. Figure 1 As shown, it includes: a detection chamber 110, with a through hole 113 on one side; an air inlet pipe 140, with one end of the air inlet pipe 140 connected to the through hole 113 and the other end of the air inlet pipe 140 connected to the chamber to be measured (not shown in the figure); and an insulating pipe 150, connected at any position of the air inlet pipe 140 so that the detection chamber 110 is not electrically connected to the outside (e.g., grounded) through the air inlet pipe 140.

[0030] Continue to refer to Figure 1 As shown, in some embodiments of this application, the detection cavity 110 includes a first cavity 111 and a second cavity 112 that are fastened and welded together, and the through hole 113 is disposed on the second cavity 112.

[0031] Continue to refer to Figure 1 As shown, the detection chamber 110 contains a moving electrode 120 and a fixed electrode 130 arranged opposite to each other. The moving electrode 120 and the fixed electrode 130 constitute a capacitor. The moving electrode 120 is a thin metal film. The periphery of the moving electrode 120 is welded and fixed to the inner wall of the detection chamber 110. Further, the periphery of the moving electrode 120 is welded and fixed to the inner wall of the second chamber 112 of the detection chamber 110. The moving electrode 120 divides the detection chamber 110 into two parts, ensuring that gas cannot flow between the two parts. The moving electrode 120 is at a certain distance from the through hole 113. The through hole 113 communicates with the internal air passage of the air inlet pipe 140, allowing the side of the moving electrode 120 closest to the air inlet pipe 140 to communicate with the internal air passage of the air inlet pipe 140.

[0032] The fixed electrode plate 130 can be a metal plate or a metal-plated ceramic plate, and is fixed on the other side of the detection cavity 110. Specifically, as shown in the figure... Figure 1 As shown, the fixed electrode plate 130 is fixed inside the inner wall of the first cavity 111 of the detection cavity 110. The inner wall of the first cavity 111 has a stepped structure, and the fixed electrode plate 130 is engaged with the stepped structure.

[0033] When the pressure in the chamber to be measured connected to the air inlet pipe 140 changes, the moving electrode 120 will deform. According to the principle of capacitors, the capacitance is inversely proportional to the distance between the electrodes. At this time, the capacitance value between the moving electrode 120 and the fixed electrode 130 will change accordingly. By processing and calibrating the circuit, this relationship can be obtained, and the pressure value can be measured. The innovation of this application lies in the addition of the insulating tube 150. Therefore, this application omits the detailed structure of the detection chamber 110 and other structures located within the detection chamber 110 (such as the capacitance detection circuit). However, those skilled in the art will understand that the structure of the detection chamber 110 in this application can be set according to actual needs.

[0034] In existing technologies, because the moving electrode plate, detection chamber, and air inlet pipe are connected together, and all three are made of metal, the entire detection chamber is grounded, meaning electrical isolation cannot be achieved. Under this grounded state, the accuracy of the capacitive acquisition circuit is lower than under electrically isolated conditions, thus affecting the final measurement accuracy. While using a ceramic moving electrode plate can achieve electrical isolation, its mechanical properties are inferior to those of metallic materials, also impacting the final measurement accuracy.

[0035] Based on the above issues, refer to Figure 1 As shown, this application adds an insulating tube 150 to the air inlet pipe 140. The insulating tube 150 allows the detection chamber 110 to be electrically connected to the outside without passing through the air inlet pipe 140, thus avoiding external interference, thereby improving the accuracy of the capacitance acquisition circuit and further improving the accuracy of air pressure measurement.

[0036] Specifically, refer to Figure 1 As shown, in some embodiments of this application, the insulating tube 150 is connected between the first end and the second end of the air inlet pipe 140. The first end of the air inlet pipe 140 is welded to the detection chamber 110 or integrally formed with the detection chamber 110 to improve airtightness. The second end of the air inlet pipe 140 is connected to the chamber to be tested. The insulating tube 150 is disposed on the middle section of the air inlet pipe 140. That is, the insulating tube 150 is disposed between the first end and the second end of the air inlet pipe 140, and the insulating tube 150 is formed as a part of the air inlet pipe 140.

[0037] refer to Figure 1As shown in some embodiments of this application, the insulating tube 150 is provided with a first connecting structure 151 at both ends. The first connecting structure 151 has an L-shaped locking structure. The insulating tube 150 is connected to the air intake pipe 140 through the first connecting structure 151 and is locked by the L-shaped locking structure. The L-shaped locking structure can lock any one or both of the inner wall or outer wall of the air intake pipe 140.

[0038] In some embodiments of this application, the insulating tube 150 and the air inlet tube 140 are connected by welding. Welding ensures airtightness and measurement accuracy.

[0039] In some embodiments of this application, the insulating tube 150 and the air intake pipe 140 are connected by a threaded connection. For example, the outer or inner wall of the insulating tube 150 and the inner or outer wall of the air intake pipe are respectively provided with matching threads, and the insulating tube 150 and the air intake pipe 140 are tightened together by the threads. This connection method allows the insulating tube 150 to be detached, but sacrifices some airtightness. To improve airtightness, a sealing ring can be provided between the insulating tube 150 and the air intake pipe 140 to improve sealing performance. In some embodiments of this application, sealant can also be applied to the threaded connection to improve airtightness.

[0040] In some embodiments of this application, the inner diameter, outer diameter, and wall thickness of the insulating tube 150 and the inner diameter, outer diameter, and wall thickness of the air inlet tube 140 can be set as needed. This application does not impose limitations on these dimensional parameters, as long as it ensures normal gas flow within the tube.

[0041] In some embodiments of this application, the material of the insulating tube 150 includes any one of insulating materials suitable for vacuum environments, such as ceramics, rubber, or plastics.

[0042] In some embodiments of this application, the first end of the air inlet pipe 140 can be integrally connected or welded to the detection chamber 110. The second end of the air inlet pipe 140 can be integrally connected or welded to the chamber to be measured. The chamber to be measured is, for example, a reaction chamber such as a deposition reaction chamber or an etching reaction chamber in the field of semiconductor manufacturing.

[0043] Figure 2 This is a partial structural schematic diagram of a capacitive vacuum gauge according to other embodiments of this application. Specifically, Figure 2 This is a partial structural diagram of the portion where the air intake pipe 140 and the insulating pipe 150 are connected. Figure 3 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application.

[0044] refer to Figure 2As shown, in some other embodiments of this application, a second connecting structure 141 is provided on the intake pipe 140 at the position where it connects to both ends of the insulating pipe 150. The second connecting structure 141 has an L-shaped locking structure. The insulating pipe 150 is connected to the intake pipe 140 through the second connecting structure 141 and is locked by the L-shaped locking structure. The second connecting structure 141 is actually a section of annulus protruding from the intake pipe 140. The L-shaped locking structure is formed by changing the inner or outer diameter of the annulus.

[0045] refer to Figure 2 As shown, in some embodiments of this application, two L-shaped locking structures connected to both ends of the insulating tube 150 respectively lock the inner wall and the outer wall of the insulating tube 150.

[0046] refer to Figure 3 As shown, in some embodiments of this application, two L-shaped locking structures connected to both ends of the insulating tube 150 are positioned on the same side of the insulating tube 150.

[0047] Figure 4 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application.

[0048] refer to Figure 4 As shown, in some other embodiments of this application, a first connecting structure 151 is provided at one end of the insulating tube 150, and a second connecting structure 141 is provided at the position where the air inlet pipe 140 is connected to the other end of the insulating tube 150. The first connecting structure 151 has an L-shaped locking structure, and the second connecting structure 141 has an L-shaped locking structure. The insulating tube 150 is connected to the air inlet pipe 140 through the second connecting structure 141 and the first connecting structure 151 and is locked by the L-shaped locking structure.

[0049] In some embodiments of this application, the L-shaped locking structure on the first connecting structure 151 and the L-shaped locking structure on the second connecting structure 141 are located on the same side of the insulating tube 150.

[0050] In some embodiments of this application, the L-shaped locking structure on the first connecting structure 151 and the L-shaped locking structure on the second connecting structure 141 are respectively located on both sides of the insulating tube 150.

[0051] In addition to the air intake pipe 140 and insulating pipe 150 described in this application Figures 1 to 4 Besides the various connection methods shown in the embodiments, any other suitable connection method can be used, as long as it can ensure the electrical isolation of the insulating tube 150 and the airtightness of the air inlet pipe 140 and the insulating tube 150.

[0052] For example, in some other embodiments of this application, the insulating tube 150 is provided with a first connecting structure at both ends, and the air inlet pipe 140 is provided with a second connecting structure at the position where it connects to the two ends of the insulating tube 150. The insulating tube 150 is connected to the air inlet pipe 140 through the first connecting structure and the second connecting structure.

[0053] In other embodiments of this application, the first connecting structure includes a first protrusion or a first groove extending axially, and the second connecting structure includes a second protrusion or a second groove extending axially and adapted to the first protrusion or the first groove.

[0054] In some other embodiments of this application, the first groove and the second groove are annular grooves, and the first protrusion and the second protrusion are annular protrusions.

[0055] In other embodiments of this application, the first groove and the second groove include a plurality of holes evenly distributed circumferentially, and the first protrusion and the second protrusion include a plurality of pillars evenly distributed circumferentially.

[0056] In the above embodiments of this application, the insulating tube 150 is disposed between the first end and the second end of the air intake pipe 140, and the insulating tube 150 is formed as a part of the air intake pipe 140.

[0057] This application is not limited to this; the insulating tube 150 can be disposed at any position in the air intake pipe 140, becoming any part of the air intake pipe 140. For example, the insulating tube 150 can be formed as the first end or the second end of the air intake pipe 140.

[0058] It should be noted that the moving electrode 120 is a thin metal film. The detection cavity 110, which is welded to the moving electrode 120, is usually made of metal.

[0059] Figure 5 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application.

[0060] refer to Figure 5 As shown, in some other embodiments of this application, the first end of the insulating tube 150 is connected to the detection cavity 110 and communicates with the through hole 111, and the second end of the insulating tube 150 is connected to the first end of the air inlet pipe 140. Figure 5 The structure shown is similar to Figure 1 The main difference in the structure shown is the position of the insulating tube 150, so the same parts will not be described again.

[0061] In other embodiments of this application, the detection cavity 110 may be provided with an annular groove having a diameter larger than that of the through hole 111 and surrounding the through hole 111, and the first end of the insulating tube 150 is embedded in the annular groove. The first end of the insulating tube 150 is welded to or threaded to the annular groove.

[0062] In some other embodiments of this application, the first end of the insulating tube 150 may extend into the through hole 111 and be welded or threaded to the inner wall of the through hole 111.

[0063] Figure 6 This is a schematic diagram of the overall structure of a capacitive vacuum gauge according to other embodiments of this application.

[0064] refer to Figure 6 As shown, in some other embodiments of this application, the first end of the insulating tube 150 is connected to the second end of the air inlet tube 140, and the second end of the insulating tube 150 is connected to the cavity to be measured. Figure 6 The structure shown is similar to Figure 1 The main difference in the structure shown is the position of the insulating tube 150, so the same parts will not be described again.

[0065] This application also provides a semiconductor device, comprising: a reaction chamber; and a capacitive vacuum gauge, as described above, connected to the reaction chamber for measuring the pressure of the reaction chamber. The reaction chamber is the chamber to be measured.

[0066] The capacitive vacuum gauge and semiconductor device described in this application improve the accuracy of the capacitance acquisition circuit and thus the accuracy of air pressure measurement by using an insulating tube to prevent the detection cavity from being grounded through the air inlet pipe.

[0067] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this specification, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0068] It should be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; a mechanical connection or an electrical connection; a rotating connection or a sliding connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application in light of the specific circumstances.

[0069] Furthermore, when the terms "first," "second," "third," etc., are used in this application specification to describe various features, these terms are only used to distinguish these features and should not be construed as indicating or implying the correlation or relative importance between features or implicitly indicating the number of features indicated.

[0070] In addition, this application specification describes exemplary embodiments by referring to idealized exemplary cross-sectional views and / or plan views and / or perspective views. Therefore, differences from the illustrated shapes are foreseeable due to factors such as manufacturing techniques and / or tolerances. Therefore, exemplary embodiments should not be construed as limited to the shapes of the regions shown herein, but should include deviations in shape caused, for example, by manufacturing processes. Thus, the regions shown in the figures are substantially schematic, and their shapes are not intended to illustrate the actual shapes of the regions of the device, nor to limit the scope of the exemplary embodiments.

[0071] Furthermore, this application uses specific terms to describe embodiments of this specification. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this application do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0072] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the present application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0073] Finally, it should be understood that the embodiments described in this application are merely illustrative of the principles of the embodiments of this application. Other modifications may also fall within the scope of this application. Therefore, alternative configurations of the embodiments of this application are considered as examples and not limitations, and are regarded as consistent with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly described and illustrated in this application.

Claims

1. A capacitive vacuum gauge, characterized in that, include: A detection cavity, wherein a through hole is provided on one side of the detection cavity; An air intake pipe, the first end of which is connected to the through hole, and the second end of which is connected to the cavity to be measured; An insulating tube is placed at any position on the air inlet pipe so that the detection chamber is not electrically connected to the outside through the air inlet pipe.

2. The capacitive vacuum gauge according to claim 1, characterized in that, The insulating tube is connected between the first end and the second end of the air intake pipe.

3. The capacitive vacuum gauge according to claim 2, characterized in that, The insulating tube is provided with a first connecting structure at both ends. The first connecting structure has an L-shaped locking structure. The insulating tube is connected to the air intake tube through the first connecting structure and is locked by the L-shaped locking structure.

4. The capacitive vacuum gauge according to claim 2, characterized in that, A second connecting structure is provided at the position where the air intake pipe connects to both ends of the insulating pipe. The second connecting structure has an L-shaped locking structure. The insulating pipe is connected to the air intake pipe through the second connecting structure and is locked by the L-shaped locking structure.

5. The capacitive vacuum gauge according to claim 4, characterized in that, Two L-shaped locking structures, which are respectively connected to both ends of the insulating tube, are respectively locked onto the inner wall and the outer wall of the insulating tube.

6. The capacitive vacuum gauge according to claim 4, characterized in that, Two L-shaped locking structures, respectively connected to both ends of the insulating tube, are positioned on the same side of the insulating tube.

7. The capacitive vacuum gauge according to claim 2, characterized in that, One end of the insulating tube is provided with a first connecting structure, and the position where the air inlet pipe connects to the other end of the insulating tube is provided with a second connecting structure. The first connecting structure has an L-shaped locking structure, and the second connecting structure has an L-shaped locking structure. The insulating tube is connected to the air inlet pipe through the first connecting structure and the second connecting structure and is locked by the L-shaped locking structure.

8. The capacitive vacuum gauge according to claim 7, characterized in that, The L-shaped locking structure on the first connecting structure and the L-shaped locking structure on the second connecting structure are located on the same side of the insulating tube.

9. The capacitive vacuum gauge according to claim 7, characterized in that, The L-shaped locking structure on the first connecting structure and the L-shaped locking structure on the second connecting structure are located on both sides of the insulating tube, respectively.

10. The capacitive vacuum gauge according to claim 2, characterized in that, The insulating tube is provided with a first connecting structure at both ends, and the air inlet pipe is provided with a second connecting structure at the connection position between the air inlet pipe and the two ends of the insulating tube. The insulating tube is connected to the air inlet pipe through the first connecting structure and the second connecting structure.

11. The capacitive vacuum gauge according to claim 10, characterized in that, The first connecting structure includes a first protrusion or a first groove extending axially, and the second connecting structure includes a second protrusion or a second groove extending axially and adapted to the first protrusion or the first groove.

12. The capacitive vacuum gauge according to claim 11, characterized in that, The first groove and the second groove are annular grooves, and the first protrusion and the second protrusion are annular protrusions.

13. The capacitive vacuum gauge according to claim 11, characterized in that, The first groove and the second groove include a plurality of holes evenly distributed along the circumference, and the first protrusion and the second protrusion include a plurality of pillars evenly distributed along the circumference.

14. The capacitive vacuum gauge according to claim 1, characterized in that, The insulating tube is connected to the air intake tube by welding.

15. The capacitive vacuum gauge according to claim 1, characterized in that, The insulating tube is connected to the air inlet tube by a threaded connection.

16. The capacitive vacuum gauge according to claim 15, characterized in that, A sealing ring is also provided between the insulating tube and the air inlet tube.

17. The capacitive vacuum gauge according to claim 1, characterized in that, The first end of the insulating tube is connected to the detection cavity and communicates with the through hole, and the second end of the insulating tube is connected to the first end of the air inlet tube.

18. The capacitive vacuum gauge according to claim 1, characterized in that, The first end of the insulating tube is connected to the second end of the air inlet tube, and the second end of the insulating tube is connected to the cavity to be measured.

19. The capacitive vacuum gauge according to claim 1, characterized in that, The insulating tube is made of any one of ceramic, rubber, or plastic.

20. A semiconductor device, characterized in that, include: Reaction chamber; The capacitive vacuum gauge as described in any one of claims 1 to 19 is connected to the reaction chamber and is used to measure the pressure of the reaction chamber.

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