Free-form surface adaptive measurement device and method based on Fourier spot analysis

By combining Fourier spot analysis and liquid crystal spatial light modulator, the measurement failure problem of adaptive interferometer in detecting large surface deviations from freeform surfaces is solved, realizing fast and accurate detection of freeform surface shape errors, which is applicable to various surface shapes and interference structures.

CN122258784APending Publication Date: 2026-06-23SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Patent Information

Application Number
CN202610250044.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-03
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

Existing adaptive interferometers struggle to form or distinguish interference fringes when dealing with large deviations from freeform surfaces, leading to measurement failures and an inability to effectively detect surface shape errors with large deviations from freeform surfaces.

Method used

An adaptive measurement method based on Fourier spot analysis is adopted. By analyzing the distribution characteristics of Fourier spot on the surface, dynamic compensation is performed using a liquid crystal spatial light modulator. The compensation wavefront is optimized by combining a non-metaphorical metaheuristic algorithm of the population and a fourth-order Jung-Kutta algorithm to achieve zero-position testing.

Benefits of technology

It expands the adaptive interferometry measurement range, enabling rapid and accurate detection of large surface deviations from freeform surfaces. It possesses global search and local refinement capabilities, is applicable to various surface shapes and interference structures, and offers fast measurement speed and high accuracy.

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Abstract

The invention discloses a free-form surface adaptive measurement device and method based on Fourier spot analysis, particularly relates to a free-form surface adaptive zero interferometer device for large surface shape deviation, and belongs to the field of optical detection. Comprising a light source system, an adaptive compensation system, an interference system and a to-be-measured surface. According to the liquid crystal spatial light modulator, aberration compensation of a self-adaptive element is guided through analysis of Fourier transform light spots of a system, dependence on an interference pattern is avoided, the measurement range of a traditional self-adaptive interferometer is greatly expanded, and destructive transformation of a light path of the traditional interferometer is not needed.
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