Multi-wire sawing apparatus and method for improving stability of multi-wire sawing process

By setting the bearing housing temperature differently, the instability problem of multi-line cutting caused by the main roller runout is solved, the service life of the bearing bush is extended, and production efficiency and wafer quality are improved.

CN122275174APending Publication Date: 2026-06-26BEIJING TIANKE HEDA SEMICON CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
BEIJING TIANKE HEDA SEMICON CO LTD
Filing Date
2026-04-20
Publication Date
2026-06-26

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Abstract

This invention provides a multi-wire cutting device and a method for improving the stability of the multi-wire cutting process. The method includes: a measurement step: installing a main roller onto a multi-wire cutting machine, such that at least two axial surfaces of the main roller respectively mate with the bearing surfaces in corresponding bearing housings to form a rotating pair, and measuring the wear state parameters of each axial surface; a temperature setting step: based on the relative differences in the wear state parameters of each axial surface, differentially setting the break-in target temperature for the corresponding bearing housing, so that the break-in target temperature for the bearing housing corresponding to the axial surface with poor wear is lower than the break-in target temperature for the bearing housing corresponding to the axial surface with good wear; a break-in step: with the cutting wire wound around the V-groove of the main roller to form a cutting wire mesh and the worktable not lowering, driving the main roller to drive the cutting wire mesh to circulate at high speed for a certain period of time, while controlling the temperature of each bearing housing at the break-in target temperature set based on the wear state parameters of each axial surface; keeping the bearing temperature at a suitable temperature, slowing down the rusting process, thereby extending the service life of the bearing surface and improving the stability of the multi-wire cutting process.
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Description

Technical Field

[0001] This invention relates to the field of silicon carbide cutting technology, specifically to a multi-wire cutting device and a method for improving the stability of the multi-wire cutting process. Background Technology

[0002] The slurry multi-wire cutting technology uses a steel wire wound on a main roller to move at high speed, thereby driving free abrasive to grind and remove the crystal rod, thus achieving the method of simultaneously cutting a silicon carbide crystal into dozens of wafers.

[0003] Before dicing, the multi-wire dicing machine needs to be assembled with its main roller, guide rollers, I-beam rollers, and worktable. The main roller is the core component of the multi-wire dicing machine, featuring V-grooves for dicing wafers of different thicknesses. Steel wire introduced from the guide rollers forms a dicing wire mesh on the main roller as it rotates. During dicing, the main roller drives the wire mesh at high speed, while the worktable, loaded with silicon carbide crystals, descends according to a set process. The high-speed rotating wire mesh carries free abrasive particles into the silicon carbide crystals, thus completing the dicing. However, due to the long dicing time, accidents can occur, affecting wafer yield. One serious issue is excessive main roller runout. During high-speed dicing, excessive runout causes significant vibration of the steel wires, which can range from affecting the wafer's surface shape to causing wire skipping. If not detected in time, the V-grooves may be cut too deeply, leading to wire breakage. Therefore, preventing excessive main roller runout before dicing is crucial for improving wafer quality.

[0004] Current technology typically involves cleaning the shaft surface of the multi-wire EDM machine, the bearing surface of the main roller, and the locating pins with alcohol and rust remover before installation, followed by applying grease. This installation method ensures a low runout value for the main roller when wear is minimal, which is beneficial for multi-wire EDM. However, it fails to consider that as the EDM machine is used for longer periods, friction on the bearing surfaces increases, leading to a decrease in the fit between the two and an increase in the main roller runout, thus affecting the multi-wire EDM process. Currently, the ultimate solution to this problem is to replace the bearing surfaces. To avoid affecting the cut surface shape, it is generally necessary to replace the main roller and all bearings on the multi-wire EDM machine simultaneously. This is expensive and increases labor time, reducing production capacity, which is clearly not an ideal solution. Therefore, finding a way to extend the service life of the bearings, reduce the main roller runout value, and improve the stability of the multi-wire EDM process is a significant challenge in improving the surface quality of silicon carbide wafers. Summary of the Invention

[0005] This invention provides a multi-wire cutting device and a method for improving the stability of the multi-wire cutting process, so that the bearing temperature is always maintained at a suitable temperature, the rusting process is slowed down, thereby extending the service life of the bearing surface and improving the stability of the multi-wire cutting process.

[0006] To address the aforementioned problems, this invention provides a method for improving the stability of a multi-wire cutting process, comprising: a measurement step: installing a main roller onto a multi-wire cutting machine, such that at least two axial surfaces of the main roller respectively mate with the bearing surfaces in corresponding bearing housings to form a rotating pair, and measuring the wear state parameters of each axial surface; a temperature setting step: based on the relative differences in the wear state parameters of each axial surface, differentially setting the break-in target temperature for the bearing housing corresponding to the axial surface with poor wear state, such that the break-in target temperature for the bearing housing corresponding to the axial surface with good wear state is lower than the break-in target temperature for the bearing housing corresponding to the axial surface with good wear state; a break-in step: with the cutting wire wound around the V-groove of the main roller to form a cutting wire mesh and the worktable not descending, driving the main roller to drive the cutting wire mesh to circulate at high speed for a certain period of time, while simultaneously controlling the temperature of each bearing housing at the break-in target temperature set based on the wear state parameters of each axial surface.

[0007] Optionally, at least two of the shaft surfaces are the fixed end shaft surface and the movable end shaft surface of the main roller, and the bearing housing corresponds to the fixed end bearing housing and the movable end bearing housing.

[0008] Optionally, the wear condition parameter is the radial runout value of the axial surface.

[0009] Optionally, the radial runout value of the axial surface is negatively correlated with the target running-in temperature.

[0010] Optionally, when the radial runout value of the shaft surface is in the range of 0-20 μm, the target running-in temperature is 0.98Tmax~Tmax; when the radial runout value of the shaft surface is in the range of 20-40 μm, the target running-in temperature is 0.93Tmax~0.98Tmax; when the radial runout value of the shaft surface is in the range of 40-60 μm, the target running-in temperature is 0.89Tmax~0.93Tmax; and when the radial runout value of the shaft surface is greater than 60 μm, the target running-in temperature is not higher than 0.87Tmax.

[0011] Optionally, when the radial runout value of the shaft surface is in the range of 0-10 μm, the target running-in temperature is set to Tmax; when the radial runout value of the shaft surface is in the range of 10-20 μm, the target running-in temperature is set to 0.98Tmax; when the radial runout value of the shaft surface is in the range of 20-30 μm, the target running-in temperature is set to 0.95Tmax; when the radial runout value of the shaft surface is in the range of 30-40 μm, the target running-in temperature is set to 0.93Tmax; when the radial runout value of the shaft surface is in the range of 40-50 μm, the target running-in temperature is set to 0.91Tmax; when the radial runout value of the shaft surface is in the range of 50-60 μm, the target running-in temperature is set to 0.89Tmax; and when the radial runout value of the shaft surface is greater than 60 μm, the target running-in temperature is set to 0.87Tmax.

[0012] Optionally, the specified time period is 25 to 35 minutes.

[0013] Optionally, the measurement steps include: attaching a dial indicator with a holder to the stationary frame of the multi-wire cutting machine, so that the indicator head abuts against the coating resin on the two end faces of the main roller, and reading and recording the radial runout values ​​of the two axial surfaces when the main roller is running at a slow speed.

[0014] Optionally, based on the relative differences in the wear state parameters of each of the shaft surfaces, a differentiated break-in target temperature is set for the bearing housing, such that the break-in target temperature of the bearing housing corresponding to the shaft surface with poor wear is lower than the break-in target temperature of the bearing housing corresponding to the shaft surface with good wear. This method includes: when the radial runout value of the fixed-end shaft surface is greater than the radial runout value of the movable-end shaft surface, setting the break-in target temperature of the fixed-end bearing housing to be lower than the break-in target temperature of the movable-end bearing housing; and when the radial runout value of the movable-end shaft surface is greater than the radial runout value of the fixed-end shaft surface, setting the break-in target temperature of the movable-end bearing housing to be lower than the break-in target temperature of the fixed-end bearing housing.

[0015] The present invention also provides a multi-wire cutting device, including a main roller, a bearing housing, a temperature control system, and a wire forming mechanism. The main roller includes a fixed end shaft surface and a movable end shaft surface. The bearing housing includes a fixed end bearing housing and a movable end bearing housing corresponding to the fixed end shaft surface and the movable end shaft surface, respectively. The temperature control system includes a first temperature control unit and a second temperature control unit corresponding to the fixed end bearing housing and the movable end bearing housing, respectively. The temperature control system is configured to: acquire wear state parameters of the fixed end shaft surface and the movable end shaft surface, respectively; and, based on the wear state parameters... Based on the relative differences in the numbers, the target running-in temperatures for the fixed-end bearing housing and the movable-end bearing housing are set differently, so that the target running-in temperature for the bearing housing corresponding to the shaft surface with poor wear is lower than the target running-in temperature for the bearing housing corresponding to the shaft surface with good wear. Under the condition that the cutting wire is wound around the V-groove of the main roller to form a cutting wire mesh and the worktable does not descend, the main roller is driven to drive the cutting wire mesh to circulate at high speed for a certain period of time, while the temperatures of the fixed-end bearing housing and the movable-end bearing housing are respectively controlled at the target running-in temperature set based on the wear state parameters of each shaft surface.

[0016] Optionally, the equipment is suitable for cutting crystal rods with an outer diameter in the range of 50.8 mm to 200 mm.

[0017] Optionally, the temperature control system further includes a memory storing a fluctuation value-temperature mapping table, and the controller is configured to perform the differential settings according to the mapping table.

[0018] Optionally, the runout-temperature mapping table includes: when the radial runout value of the axial surface is in the range of 0-20μm, the target running-in temperature is 0.98Tmax~Tmax; when the radial runout value of the axial surface is in the range of 20-40μm, the target running-in temperature is 0.93Tmax~0.98Tmax; when the radial runout value of the axial surface is in the range of 40-60μm, the target running-in temperature is 0.89Tmax~0.93Tmax; and when the radial runout value of the axial surface is greater than 60μm, the target running-in temperature is no higher than 0.87Tmax.

[0019] Compared with the prior art, the technical solution of the present invention has the following advantages: In the technical solution of the present invention for improving the stability of multi-wire cutting process, the target running-in temperature is set differently based on the difference in wear state parameters of the shaft surface. This ensures that the temperature of each bearing box matches the actual wear degree of its corresponding shaft surface, and that the bearing bush is always in a suitable temperature range adapted to its wear state. This avoids problems such as excessive thermal expansion due to uniform high temperature setting or poor fit due to uniform low temperature setting. At the same time, for shaft surfaces with poor wear state, a relatively lower target running-in temperature is set to reduce the working temperature of the bearing bush on that side. This effectively slows down the electrochemical corrosion and oxidation rusting process caused by surface micro-damage, reduces the deterioration of fit accuracy caused by rust, and significantly extends the service life of the bearing bush surface.

[0020] Furthermore, the radial runout value of the shaft surface is negatively correlated with the target running-in temperature. The more severe the wear, the lower the corresponding temperature. By reducing the amount of thermal expansion, the bearing clearance increase caused by wear is actively offset, maintaining a stable oil film thickness and fit accuracy. This avoids applying excessively high temperatures to the severely worn shaft surface, which could lead to thermal expansion interference or lubrication failure. By controlling the temperature, frictional heat accumulation is reduced, preventing a vicious cycle where wear leads to heat generation and thus exacerbates wear.

[0021] In the technical solution of the multi-wire cutting equipment of the present invention, by configuring a first temperature control unit and a second temperature control unit for the fixed end bearing housing and the movable end bearing housing respectively, the bearing bushes at both ends can independently adjust the temperature according to the actual wear state of their corresponding shaft surfaces, ensuring that the temperature of each end bearing bush is always maintained in a suitable range that is compatible with the current wear degree; at the same time, the temperature control system makes differentiated settings based on the relative differences in the wear state parameters at both ends, so that the bearing housing corresponding to the shaft surface with poor wear state obtains a lower break-in target temperature, and the working temperature of the bearing bush on that side is reduced in a targeted manner, thereby effectively slowing down the electrochemical corrosion and oxidation rusting process aggravated by the micro-damage and increased surface roughness of the shaft surface, maintaining the surface integrity of the bearing bush surface, reducing rust damage, significantly extending the service life of the bearing bush surface, and reducing the replacement frequency. Attached Figure Description

[0022] Figure 1 This is a flowchart of a method for improving the stability of a multi-wire cutting process according to an embodiment of the present invention. Detailed Implementation

[0023] As the operating time of existing multi-wire cutting machines increases, the friction on the bearing surface becomes more frequent, which leads to a decrease in the fit between the two and an increase in the runout value of the main roller, thus affecting the multi-wire cutting process.

[0024] Based on this, the present invention provides a method for improving the stability of the multi-wire cutting process. By differentially setting the break-in target temperature based on the differences in the wear state parameters of the shaft surface, the temperature of each bearing housing is matched with the actual wear degree of its corresponding shaft surface. This ensures that the bearing bush is always in a suitable temperature range adapted to its wear state, avoiding problems such as excessive thermal expansion due to uniform high temperature setting or poor fit due to uniform low temperature setting. At the same time, for shaft surfaces with poor wear conditions, a relatively lower break-in target temperature is set to reduce the working temperature of the bearing bush on that side, thereby effectively slowing down the electrochemical corrosion and oxidation rusting process aggravated by surface micro-damage, reducing the deterioration of fit accuracy caused by rust, and significantly extending the service life of the bearing bush surface.

[0025] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0026] Please refer to the following first. Figure 1 A method for improving the stability of a multi-wire cutting process includes an S1 measurement step, an S2 temperature setting step, and an S3 break-in step.

[0027] In this embodiment, the S1 measurement step is as follows: the main roller is installed on the multi-wire cutting machine, so that at least two axial surfaces of the main roller respectively cooperate with the bearing surface in the bearing housing at the corresponding position to form a rotating pair, and the wear state parameters of each axial surface are measured respectively.

[0028] In this embodiment, before installing the main roller onto the multi-wire cutting machine, the process includes fixing the main roller with the V-groove cut by strapping, then lifting it with a tool cart, and cleaning the tile surface and positioning pins with rust remover and alcohol for later use; after cleaning the shaft surface and positioning holes of the main roller mounting position on the multi-wire cutting machine with rust remover and alcohol, lubricant is evenly applied to the positioning hole position before installation.

[0029] The process of installing the main roller into the multi-wire cutting machine includes transporting the main roller to the multi-wire cutting machine chamber by a tool cart, adjusting its height and front-to-back position, inserting the positioning pin of the main roller into the positioning hole of the multi-wire cutting machine to complete the assembly, so that at least two axial surfaces of the main roller respectively cooperate with the bearing surface in the bearing box at the corresponding position to form a rotating pair, and measuring the wear condition parameters of each axial surface.

[0030] In this embodiment, at least two of the shaft surfaces are the fixed end shaft surface and the movable end shaft surface of the main roller. Both the fixed end shaft surface and the movable end shaft surface are journal surfaces that mate with the bearing housing, but they differ in function and structural characteristics. Specifically, the fixed end shaft surface is rigidly connected to the drive system (main spindle housing, motor) and is the power input end for the rotation of the main roller. It also restricts the axial movement of the main roller and bears the main cutting resistance, driving torque, and axial positioning force. The force during the cutting process is large and complex. The movable end shaft surface is not connected to the drive system and allows the main roller to freely expand and contract axially when the temperature changes (thermal expansion compensation). It only restricts radial runout but not axial displacement and mainly bears the radial support force generated by the tension of the cutting wire mesh. It does not bear the driving torque and axial positioning force. The bearing housing includes a fixed end bearing housing corresponding to the fixed end shaft surface, and a movable end bearing housing corresponding to the movable end shaft surface.

[0031] In this embodiment, after assembly, the main roller is slowly rotated by hand. If there is no obvious resistance, it means that the assembly effect is good.

[0032] In this embodiment, at least two axial surfaces of the main roller are respectively fitted with the bearing surfaces in the bearing housing at corresponding positions to form a rotating pair, and the wear condition parameters of each axial surface are measured. Specifically, a dial indicator with a holder is attached to the side wall of the cutting chamber, and the indicator head is respectively pressed against the coating resin on the two end faces of the main roller. Under the slow operation of the main roller, the radial runout value of the main roller is tested and recorded.

[0033] In other embodiments, the wear condition parameters may also be vibration acceleration, amplitude value, bearing clearance value, bearing thickness reduction amount, and bearing heating rate, etc.

[0034] In this embodiment, the S2 temperature setting step involves: based on the relative differences in the wear state parameters of each shaft surface, differentially setting the target running-in temperature corresponding to the bearing housing, so that the target running-in temperature of the bearing housing corresponding to the shaft surface with poor wear is lower than that of the bearing housing corresponding to the shaft surface with good wear. Here, by reducing the target running-in temperature of the side with poor wear (larger radial runout value), the thermal expansion of the bearing bush on that side is reduced, preventing the bearing clearance, which was originally increased due to wear, from expanding excessively under hot conditions. At the same time, the side with better wear is allowed to maintain a relatively high temperature, obtaining sufficient thermal expansion and oil film support stiffness. This differential setting allows the two ends with uneven wear to obtain similar dynamic support characteristics after thermal equilibrium, avoiding the main roller from bending due to the significant difference in stiffness at both ends. Meanwhile, the microscopic integrity of the shaft surface with poor wear has been destroyed, and there are more oxidation active points. By actively lowering the break-in target temperature of the bearing housing on that side, the corresponding bearing surface is kept in a relatively low and suitable temperature range. This can significantly slow down the electrochemical corrosion and oxidation rusting process caused by surface damage, reduce further deterioration of fit accuracy due to rust, and thus extend the service life of the severely worn bearing.

[0035] In this embodiment, the break-in target temperature is a target control value set for the bearing housing based on the wear state of the shaft surface. The control system adjusts the temperature of the bearing housing to make it equal to the break-in target temperature.

[0036] In this embodiment, the method of differentially setting the break-in target temperature corresponding to the bearing housing based on the relative differences in the wear state parameters of each shaft surface, so that the break-in target temperature of the bearing housing corresponding to the shaft surface with poor wear state is lower than the break-in target temperature of the bearing housing corresponding to the shaft surface with good wear state, includes: when the radial runout value of the fixed end shaft surface is greater than the radial runout value of the movable end shaft surface, setting the break-in target temperature of the fixed end bearing housing to be lower than the break-in target temperature of the movable end bearing housing; ... to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of the movable end bearing housing to be lower than the radial runout value of When the radial runout value of the shaft surface is greater than that of the fixed end shaft surface, the running-in target temperature of the movable end bearing housing is set lower than that of the fixed end bearing housing. By comparing the relative magnitudes of the radial runout values ​​of the shaft surfaces at both ends of the main roller in real time, the side with more severe wear is automatically identified and assigned a lower temperature. This achieves an adaptive logic that the end with greater wear corresponds to the end with a lower temperature, ensuring that temperature control resources can be automatically tilted towards the wear side. This achieves true dynamic balance of the main roller at both ends and eliminates the asymmetry of support stiffness through temperature difference compensation.

[0037] Furthermore, the S2 temperature setting step provides executable target parameters for the S3 break-in step, ensuring that subsequent high-speed cycles can be carried out under preset thermal boundary conditions, allowing the bearings and bushings to complete the break-in process in a controllable temperature environment. At the same time, by pre-identifying wear differences and setting corresponding low-temperature compensation, it prevents thermal expansion runaway caused by the continuous increase in temperature on the severely worn side during subsequent high-speed operation, thus suppressing the main roller vibration caused by the temperature-wear coupling effect from the source.

[0038] In this embodiment, the S3 running-in step is performed: the steel wire is introduced by the guide wheel and wound around the V-groove of the main roller to form a cutting wire mesh under the low speed of the main roller; at this time, without lowering the worktable, the main roller is driven to drive the cutting wire mesh to circulate at a high speed for a certain period of time, while the temperature of each bearing box is controlled at the running-in target temperature set based on the wear state parameters of each shaft surface.

[0039] Here, the main roller is driven to rotate at a sub-high speed for a certain period of time, so that the axial surface and bearing surface of the main roller can complete the grinding of micro-peaks and the establishment of a lubricating film in the relatively high-speed sliding, thus achieving a stable tribological state in advance. Furthermore, the sub-high-speed operation generates frictional heat similar to the actual working conditions. Combined with the differentiated target temperature control set in S2, the fixed end and the moving end bearing boxes can reach thermal stability at their predetermined break-in target temperatures, ensuring that the thermal expansion matches the wear compensation requirements and providing a stable temperature field reference for formal cutting.

[0040] In this embodiment, the sub-high speed is between low-speed measurement and full-speed cutting, with a certain time range of 25-35 minutes, specifically 30 minutes. This ensures that enough heat is generated within 30 minutes to reach thermal equilibrium, while avoiding excessive wear or temperature control overshoot caused by full-speed operation.

[0041] In this embodiment, the radial runout value of the bearing surface is negatively correlated with the target running-in temperature; the larger the radial runout value, the more severe the bearing wear and the larger the bearing clearance. If a higher temperature is set at this time, the thermal expansion of the bearing bush will further reduce the clearance, which may lead to oil film rupture or even direct metal-to-metal contact. However, by adopting a negative correlation strategy (higher runout value means lower temperature), the severely worn side can maintain a lower amount of thermal expansion, maintain a relatively large effective clearance, ensure the integrity of the lubricating oil film, and avoid the risk of bearing failure caused by dry friction.

[0042] In this embodiment, after the S3 break-in step, the main roller runout value can be effectively reduced, ensuring that the runout value is within 20μm. This allows the multi-wire cutting machine and the main roller to achieve a better break-in degree, thereby extending the service life of the bearing, ensuring the stability of the cutting process, reducing the risk of wire breakage, and thus ensuring product yield.

[0043] In this embodiment, when the radial runout value of the shaft surface is in the range of 0-20 μm, the target running-in temperature is 0.98Tmax~Tmax; when the radial runout value of the shaft surface is in the range of 20-40 μm, the target running-in temperature is 0.93Tmax~0.98Tmax; when the radial runout value of the shaft surface is in the range of 40-60 μm, the target running-in temperature is 0.89Tmax~0.93Tmax; when the radial runout value of the shaft surface is greater than 60 μm, the target running-in temperature is no higher than 0.87Tmax; continuous shaft surface wear... The process is discretized into four distinct radial runout ranges (0-20μm, 20-40μm, 40-60μm, and >60μm), transforming them into quickly identifiable engineering standards. On-site operators can directly determine the temperature range from measured values ​​using tables without complex calculations, significantly improving the consistency and convenience of process execution. Simultaneously, as the radial runout value increases from slight (0-20μm) to severe (>60μm), the target break-in temperature gradually decreases from near the upper limit (0.98Tmax~Tmax) to no higher than 0.87Tmax, forming a gradual strategy of slow temperature reduction as wear intensifies. This stepped cooling avoids thermal stress shocks to the bearing material caused by sudden temperature drops (rapid shrinkage leading to cracks or deformation), allowing evenly shrinking bearings under hot conditions to maintain a stable fit.

[0044] Preferably, when the radial runout value of the shaft surface is in the range of 0-10 μm, the target running-in temperature is set to Tmax; when the radial runout value of the shaft surface is in the range of 10-20 μm, the target running-in temperature is set to 0.98Tmax; when the radial runout value of the shaft surface is in the range of 20-30 μm, the target running-in temperature is set to 0.95Tmax; when the radial runout value of the shaft surface is in the range of 30-40 μm, the target running-in temperature is set to 0.93Tmax; when the radial runout value of the shaft surface is in the range of 40-50 μm, the target running-in temperature is set to 0.91Tmax; when the radial runout value of the shaft surface is in the range of 50-60 μm, the target running-in temperature is set to 0.89Tmax; and when the radial runout value of the shaft surface is greater than 60 μm, the target running-in temperature is set to 0.87Tmax.

[0045] Please refer to Table 1 for the radial runout value of the main roller shaft surface and the target running-in temperature.

[0046]

[0047] As shown in Table 1, the break-in temperature decreases in 0.5℃ increments, resulting in a more refined break-in process. This achieves a high-resolution temperature response to the wear state and can more accurately match the thermal compensation requirements under specific wear conditions. A total temperature difference range of only 3℃ (22℃-19℃) can cover the wear range of 0-60μm and above, indicating that the thermal expansion of the bearing is sensitive to temperature changes. A small temperature difference can generate sufficient clearance compensation, avoiding problems such as increased oil film viscosity and excessive starting torque caused by large temperature drops. Extreme low temperatures are not required; a relatively low temperature relative to the wear state is sufficient to achieve rust prevention and life extension. This provides on-site operators with directly verifiable quantitative operating standards, eliminating the need for complex calculations and achieving a rapid closed loop from "wear diagnosis" to "temperature execution," thereby improving the standardization of the process and the operability of equipment maintenance.

[0048] The present invention also provides a multi-wire cutting device, including a main roller, a bearing housing, a temperature control system, and a wire forming mechanism. The main roller includes a fixed end shaft surface and a movable end shaft surface. The bearing housing includes a fixed end bearing housing and a movable end bearing housing corresponding to the fixed end shaft surface and the movable end shaft surface, respectively. The temperature control system includes a first temperature control unit and a second temperature control unit corresponding to the fixed end bearing housing and the movable end bearing housing, respectively. The temperature control system is configured to: acquire wear state parameters of the fixed end shaft surface and the movable end shaft surface, respectively; and, based on each wear state... The relative differences in parameters lead to differentiated setting of the target running-in temperature for the fixed-end bearing housing and the movable-end bearing housing, ensuring that the target running-in temperature for the bearing housing corresponding to the shaft surface with poor wear is lower than that for the bearing housing corresponding to the shaft surface with good wear. Under the condition that the cutting wire is wound around the V-groove of the main roller to form a cutting wire mesh and the worktable does not descend, the main roller is driven to drive the cutting wire mesh to circulate at high speed for a certain period of time, while the temperatures of the fixed-end bearing housing and the movable-end bearing housing are respectively controlled at the target running-in temperature set based on the wear state parameters of each shaft surface.

[0049] In this embodiment, by configuring a first temperature control unit and a second temperature control unit for the fixed-end bearing housing and the movable-end bearing housing respectively, the temperature control system can independently set and regulate the target running-in temperature at both ends based on the wear state parameters of the fixed-end and movable-end bearing surfaces. This ensures that regardless of whether the wear degree at both ends is consistent, the bearing surface at each end can always be within a suitable temperature range matching its current wear state. At the same time, by precisely controlling the temperature of each bearing housing within a suitable range set based on the wear state, it avoids thermal fatigue of the bearing material and oxidation and deterioration of the lubricating oil caused by excessively high temperatures, and reduces corrosion damage and fit failure caused by excessive thermal expansion by lowering the temperature on the severely worn side. This temperature control strategy that matches the wear state significantly reduces abnormal wear on the bearing surface, extends the service life of the fixed-end and movable-end bearings, and reduces the frequency of equipment maintenance. Combined with differentiated thermal management with low temperature on the severely worn side and relatively high temperature on the slightly worn side, it compensates for the difference in support stiffness caused by uneven wear at both ends. This provides balanced dynamic support at both ends of the main roller, effectively suppressing off-center loading, bending, and torsional vibrations during rotation, thus ensuring high stability throughout the multi-wire cutting process from the hardware perspective.

[0050] In this embodiment, the device is suitable for cutting crystal rods with an outer diameter in the range of 50.8mm-200mm.

[0051] In this embodiment, the temperature control system further includes a memory storing a runout value-temperature mapping table. The controller is configured to execute the differentiated settings according to the mapping table. It can automatically query and determine the corresponding target running-in temperature based on the real-time acquired radial runout value of the bearing surface, eliminating the need for manual table lookup or experience-based judgment. This ensures that wear state parameters can be instantly and accurately converted into specific temperature control commands, allowing the bearing surface to be adjusted to a suitable temperature range appropriate to its wear level in the shortest possible time. This avoids temperature deviations caused by delays or errors in manual settings, thereby effectively leveraging the technical effects of differentiated temperature control in slowing rusting and extending service life.

[0052] In this embodiment, the runout value-temperature mapping table includes: when the radial runout value of the axial surface is in the range of 0-20μm, the target running-in temperature is 0.98Tmax~Tmax; when the radial runout value of the axial surface is in the range of 20-40μm, the target running-in temperature is 0.93Tmax~0.98Tmax; when the radial runout value of the axial surface is in the range of 40-60μm, the target running-in temperature is 0.89Tmax~0.93Tmax; and when the radial runout value of the axial surface is greater than 60μm, the target running-in temperature is no higher than 0.87Tmax.

[0053] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A method for improving the stability of a multi-wire cutting process, characterized in that, include: Measurement steps: Install the main roller onto the multi-wire cutting machine, so that at least two axial surfaces of the main roller respectively mate with the bearing surface in the bearing housing at the corresponding position to form a rotating pair, and measure the wear condition parameters of each axial surface respectively; Temperature setting steps: Based on the relative differences in the wear state parameters of each shaft surface, the break-in target temperature corresponding to the bearing housing is set differently, so that the break-in target temperature of the bearing housing corresponding to the shaft surface with poor wear state is lower than the break-in target temperature of the bearing housing corresponding to the shaft surface with good wear state. Break-in process: With the cutting wire wound around the V-groove of the main roller to form a cutting wire mesh and the worktable not descending, drive the main roller to drive the cutting wire mesh to circulate at high speed for a certain period of time, while controlling the temperature of each bearing box to the break-in target temperature set based on the wear state parameters of each shaft surface.

2. The method as described in claim 1, characterized in that, At least two of the shaft surfaces are the fixed end shaft surface and the movable end shaft surface of the main roller, and the bearing housing corresponds to the fixed end bearing housing and the movable end bearing housing.

3. The method as described in claim 2, characterized in that, The wear condition parameter is the radial runout value of the axial surface.

4. The method as described in claim 3, characterized in that, The radial runout value of the axial surface is negatively correlated with the target running-in temperature.

5. The method as described in claim 4, characterized in that, When the radial runout value of the shaft surface is in the range of 0-20μm, the target running-in temperature is 0.98Tmax~Tmax; when the radial runout value of the shaft surface is in the range of 20-40μm, the target running-in temperature is 0.93Tmax~0.98Tmax; when the radial runout value of the shaft surface is in the range of 40-60μm, the target running-in temperature is 0.89Tmax~0.93Tmax; when the radial runout value of the shaft surface is greater than 60μm, the target running-in temperature is no higher than 0.87Tmax.

6. The method as described in claim 5, characterized in that, When the radial runout value of the shaft surface is in the range of 0-10 μm, the target running-in temperature is set to Tmax; when the radial runout value of the shaft surface is in the range of 10-20 μm, the target running-in temperature is set to 0.98Tmax; when the radial runout value of the shaft surface is in the range of 20-30 μm, the target running-in temperature is set to 0.95Tmax; when the radial runout value of the shaft surface is in the range of 30-40 μm, the target running-in temperature is set to 0.93Tmax; when the radial runout value of the shaft surface is in the range of 40-50 μm, the target running-in temperature is set to 0.91Tmax; when the radial runout value of the shaft surface is in the range of 50-60 μm, the target running-in temperature is set to 0.89Tmax; and when the radial runout value of the shaft surface is greater than 60 μm, the target running-in temperature is set to 0.87Tmax.

7. The method as described in claim 1, characterized in that, The specified time is 25 to 35 minutes.

8. The method as described in claim 3, characterized in that, The measurement steps include: attaching a dial indicator with a holder to the stationary frame of the multi-wire cutting machine, making the indicator head abut against the coating resin on the two end faces of the main roller, and reading and recording the radial runout values ​​of the two axial surfaces when the main roller is running at a slow speed.

9. The method as described in claim 3, characterized in that, The method of differentially setting the break-in target temperature for the bearing housing based on the relative differences in the wear state parameters of each shaft surface, so that the break-in target temperature of the bearing housing corresponding to the shaft surface with poor wear state is lower than the break-in target temperature of the bearing housing corresponding to the shaft surface with good wear state, includes: when the radial runout value of the fixed end shaft surface is greater than the radial runout value of the movable end shaft surface, setting the break-in target temperature of the fixed end bearing housing to be lower than the break-in target temperature of the movable end bearing housing; when the radial runout value of the movable end shaft surface is greater than the radial runout value of the fixed end shaft surface, setting the break-in target temperature of the movable end bearing housing to be lower than the break-in target temperature of the fixed end bearing housing.

10. A multi-wire cutting device, comprising a main roller, a bearing housing, a temperature control system, and a wire mesh forming mechanism, characterized in that, The main roller includes a fixed end shaft surface and a movable end shaft surface. The bearing housing includes a fixed end bearing housing and a movable end bearing housing corresponding to the fixed end shaft surface and the movable end shaft surface, respectively. The temperature control system includes a first temperature control unit and a second temperature control unit corresponding to the fixed end bearing housing and the movable end bearing housing, respectively. The temperature control system is configured to: acquire wear state parameters of the fixed end shaft surface and the movable end shaft surface respectively; and, based on the relative differences of the wear state parameters, differentiate the run-in target temperature of the fixed end bearing housing and the movable end bearing housing, so that the run-in target temperature of the bearing housing corresponding to the shaft surface with poor wear state is lower than the run-in target temperature of the bearing housing corresponding to the shaft surface with good wear state. With the cutting wire wound around the V-groove of the main roller to form a cutting wire mesh and the worktable not descending, the main roller is driven to drive the cutting wire mesh to circulate at a high speed for a certain period of time. At the same time, the temperatures of the fixed end bearing box and the movable end bearing box are controlled at the break-in target temperature set based on the wear state parameters of each shaft surface.

11. The multi-wire cutting equipment as described in claim 10, characterized in that, The equipment is suitable for cutting crystal rods with an outer diameter in the range of 50.8mm-200mm.

12. The multi-wire cutting equipment as described in claim 10, characterized in that, The temperature control system further includes a memory storing a fluctuation value-temperature mapping table, and the controller is configured to perform the differential settings according to the mapping table.

13. The multi-wire cutting equipment as described in claim 12, characterized in that, The runout-temperature mapping table includes the following: when the radial runout value of the shaft surface is in the range of 0-20μm, the target running-in temperature is 0.98Tmax~Tmax; when the radial runout value of the shaft surface is in the range of 20-40μm, the target running-in temperature is 0.93Tmax~0.98Tmax; when the radial runout value of the shaft surface is in the range of 40-60μm, the target running-in temperature is 0.89Tmax~0.93Tmax; and when the radial runout value of the shaft surface is greater than 60μm, the target running-in temperature is no higher than 0.87Tmax.