Control system, control method and medium for vacuum butterfly valve

Abstract

The application relates to the technical field of vacuum control, and provides a control system and method of a vacuum butterfly valve and a medium. The application aims to solve the problems of poor expansibility, high module coupling degree and easy fault interlocking of the control system of the existing vacuum butterfly valve. The method is applied to a main control module of the control system of the vacuum butterfly valve, and the control system of the vacuum butterfly valve further comprises a driving module and an air pressure acquisition module. The method comprises the following steps: acquiring current pressure information of a preset cavity collected by the air pressure acquisition module; acquiring opening degree adjustment information corresponding to a target valve plate in the preset cavity according to target pressure information and the current pressure information; and controlling the driving module to adjust the opening degree of the target valve plate according to the target opening degree information. The method is independently operated through the functions of main control, driving and acquisition, coupling is reduced, and the system stability and maintainability are improved. Meanwhile, through step-by-step collaborative processing of pressure acquisition, opening degree calculation and driving execution, the signal processing efficiency and system response speed are improved.

Description

Technical Field

[0001] This application relates to the field of vacuum control technology, and in particular to a control system, control method and medium for a vacuum butterfly valve. Background Technology

[0002] Existing vacuum butterfly valve control systems generally adopt a centralized control architecture, with signal acquisition, calculation and decision-making, and drive execution functions highly integrated into a single controller. This results in poor system scalability, high module coupling, and excessive computational load on a single processor, making it difficult to accurately adjust the valve opening according to changes in cavity pressure. Summary of the Invention

[0003] This application provides a control system, control method, and medium for a vacuum butterfly valve, aiming to solve the problems of poor system scalability, high module coupling, and easy cascading failures caused by the centralized control architecture commonly used in existing vacuum butterfly valve control systems, where signal acquisition, calculation and decision-making, and drive execution functions are highly integrated into a single controller.

[0004] In a first aspect, embodiments of this application provide a control method applied to the main control module of a control system for a vacuum butterfly valve. The control system of the vacuum butterfly valve is disposed in a preset cavity, and the control system of the vacuum butterfly valve further includes a drive module and a pressure acquisition module; comprising: The air pressure acquisition module acquires the current pressure information of the preset cavity; Based on the preset target pressure information and the current pressure information, obtain the opening adjustment information corresponding to the target valve plate in the preset cavity; The drive module is controlled to adjust the opening of the target valve plate according to the opening adjustment information; The drive module acquires the operating parameters and status information of the target valve plate, and adjusts the opening adjustment information according to the operating parameters and status information. The operating parameters include at least one or more of the following: motor operating current, speed, valve plate rotation speed, and adjustment stroke. The status information includes at least one or more of the following: actual valve plate opening, motor operating status, drive module power supply status, encoder connection status, and power circuit temperature. Adjusting the opening adjustment information according to the operating parameters and status information includes: performing multi-dimensional analysis on the operating parameters and status information, the multi-dimensional analysis including at least one or more of the following: calculating opening deviation, judging valve plate jamming, judging adjustment stability, and judging drive module overheating risk; executing a preset adaptive adjustment strategy on the opening adjustment information according to the analysis results corresponding to the multi-dimensional analysis, the adaptive adjustment strategy including at least one of eliminating static deviation and suppressing overshoot oscillation; and sending the adjusted opening adjustment information to the drive module, the drive module correcting the opening of the target valve plate according to the adjusted opening adjustment information.

[0005] Secondly, this application provides a control system for a vacuum butterfly valve, which is set in a preset cavity and includes a main control module, a drive module and a pressure acquisition module. The main control module includes a memory and a processor; the memory is used to store a computer program; the processor is used to execute the computer program and implement the method provided in any embodiment of this application when executing the computer program.

[0006] Thirdly, this application provides a computer-readable storage medium storing a computer program that, when executed by a processor, causes the processor to implement the method provided in any embodiment of this application.

[0007] This application adopts a modular decoupled architecture, with the main control, drive, and acquisition functions operating independently, reducing coupling and improving system stability and maintainability. Secondly, by processing pressure acquisition, opening degree calculation, and drive execution in a step-by-step coordinated manner, signal processing efficiency and system response speed are improved. Simultaneously, opening degree adjustment information is directly generated based on pressure deviation, achieving precise valve opening control and enhancing the pressure control stability of the vacuum system.

[0008] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0009] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0010] Figure 1 This is a schematic block diagram of the structure of a control system for a vacuum butterfly valve provided in one embodiment of this application; Figure 2 This is a schematic diagram illustrating the application of a control system for a vacuum butterfly valve according to an embodiment of this application; Figure 3 This is a schematic block diagram of the structure of a main control module provided in one embodiment of this application; Figure 4 This is a schematic block diagram of the structure of a driving module provided in one embodiment of this application; Figure 5 This is a schematic block diagram of the structure of a communication module provided in one embodiment of this application; Figure 6 This is a schematic flowchart illustrating the steps of a control method provided in an embodiment of this application; Figure 7 This is a schematic block diagram of the structure of a control device for a vacuum butterfly valve provided in one embodiment of this application; Figure 8 This is a schematic block diagram of the structure of another main control module provided in one embodiment of this application.

[0011] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Detailed Implementation

[0012] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0013] The flowchart shown in the attached diagram is for illustrative purposes only and does not necessarily include all content and operations / steps, nor does it necessarily have to be performed in the order described. For example, some operations / steps can be broken down, combined, or partially merged, so the actual execution order may change depending on the actual situation.

[0014] It should be understood that, in order to clearly describe the technical solutions of the embodiments of the present invention, the terms "first" and "second" are used in the embodiments of the present invention to distinguish identical or similar items with substantially the same function and effect. Those skilled in the art will understand that the terms "first" and "second" do not limit the quantity or execution order, and the terms "first" and "second" are not necessarily different.

[0015] It should be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. As used in this specification and the appended claims, the singular forms "one," "an," and "that" are intended to include the plural forms unless the context clearly indicates otherwise.

[0016] It should also be understood that the terms used in this application specification and the appended claims refer to any combination of one or more of the associated listed items and all possible combinations, and include such combinations.

[0017] Existing vacuum butterfly valve control systems generally adopt a centralized control architecture, with signal acquisition, calculation and decision-making, and drive execution functions highly integrated into a single controller. This results in poor system scalability, high module coupling, and excessive computational load on a single processor, making it difficult to accurately adjust the valve opening according to changes in cavity pressure.

[0018] To solve the above problem, please refer to Figure 1 This application provides a control system for a vacuum butterfly valve, which is set in a preset cavity and includes a main control module, a drive module and a pressure acquisition module.

[0019] The main control module is used to acquire the current pressure information of the preset cavity collected by the air pressure acquisition module; the main control module acquires the opening adjustment information of the target valve plate in the preset cavity according to the preset target pressure information and the current pressure information; the main control module controls the drive module to adjust the opening of the target valve plate according to the target opening information.

[0020] Specifically, the vacuum butterfly valve control system provided in this application addresses the core problems of centralized control architectures in the prior art, such as high module coupling, poor system scalability, easy cascading of faults, insufficient real-time signal processing, and response delay. The system is housed in a preset chamber, which is an upstream process pressure control chamber used to hold the process medium to be vacuum-processed. The system is installed in conjunction with a vacuum pipeline system, which connects upstream to an upstream gas control system and downstream to a downstream vacuum pump. By adjusting the opening of the butterfly valve plate, closed-loop precise control of the vacuum pressure inside the preset chamber is achieved.

[0021] Please see Figure 1 The core of the vacuum butterfly valve control system includes a main control module, a drive module, and a pressure acquisition module. Each module adopts a physically separated independent board structure design, and electrical connection and data interaction are achieved through standardized inter-board interconnection connectors and internal buses. The modules adopt a unified interface standard to achieve loose physical and logical coupling, and can be selected independently, freely matched, quickly replaced, and independently upgraded.

[0022] The signal acquisition end of the air pressure acquisition module is connected to the air pressure sampling port of the preset cavity through a vacuum-sealed connector, and the signal output end is electrically connected to the main control module through a sensor input interface. The air pressure acquisition module is used to acquire air pressure data inside the preset cavity in real time, convert the acquired air pressure physical quantity into a standard analog voltage signal, and transmit the analog voltage signal to the main control module.

[0023] In this embodiment, the air pressure acquisition module uses a high-precision vacuum air pressure sensor, which outputs a 0-10V standard analog voltage signal, suitable for 1×10 vacuum conditions. -5 The system can collect pressure data across the entire range from Pa to standard atmospheres, with a sampling accuracy better than 0.2%FS, ensuring the accuracy and long-term stability of pressure data collection.

[0024] The main control module is the core of the system's perception and decision-making. It is electrically connected to the air pressure acquisition module and the drive module, and is an independent main control board hardware entity with independent power supply, self-testing, computation, and communication capabilities. The corresponding execution steps are as follows: First, acquire the current pressure information of the preset cavity collected by the air pressure acquisition module: The main control module receives the analog voltage signal output by the air pressure acquisition module, converts the analog signal to a digital signal through an internal analog-to-digital converter circuit, and then preprocesses the digital signal using a preset filtering algorithm to eliminate electromagnetic noise and mechanical vibration interference during the acquisition process, ultimately obtaining the real-time current pressure information of the preset cavity; Second, based on the preset target pressure information and... The system acquires the opening adjustment information of the target valve plate in the preset cavity based on the current pressure information: the main control module has pre-stored the target pressure information, which can be configured via local buttons or remotely sent from the host computer; the main control module calculates the real-time deviation between the target pressure information and the current pressure information, processes the deviation based on the preset PID control algorithm, and generates the target valve plate opening adjustment information that matches the deviation; third, the control drive module adjusts the opening of the target valve plate according to the target opening information: the main control module sends the generated opening adjustment information to the drive module through the high-speed inter-board communication bus, and at the same time sends a drive control command to the drive module to trigger the drive module to execute the valve plate opening adjustment action.

[0025] For example, the main control module does not need to rely on the computing resources of other modules and can independently complete the entire process of pressure acquisition and processing, control algorithm calculation and logical decision-making, ensuring the real-time and independent nature of control decisions.

[0026] The drive module is the core of the system's execution drive. Its input end is electrically connected to the main control module via the inter-board communication bus, and its output end is electrically connected to the motor actuator of the butterfly valve, as well as the rotary encoder signal of the butterfly valve. The drive module is an independent drive board hardware entity with independent power supply, independent self-test, signal decoding, and power drive capabilities. The corresponding execution steps are as follows: It receives the opening adjustment information and control commands issued by the main control module, obtains the current actual valve position information of the target valve plate collected by the rotary encoder, generates the corresponding PWM drive signal based on the preset motion control algorithm, and drives the motor to run through the internal H-bridge power circuit. The motor drives the valve plate of the butterfly valve to rotate through the reducer and transmission shaft, adjusting the valve plate to the target opening degree that matches the opening adjustment information, thus completing the full closed-loop control of the valve plate position.

[0027] For example, the drive module can independently complete the closed-loop control of the valve plate position. Even if the communication link between the main control module and the drive module is briefly interrupted, the drive module can maintain the current valve position stability, ensure the safety of system operation, and avoid large fluctuations in the vacuum chamber pressure.

[0028] For example, the complete workflow of the vacuum butterfly valve control system provided in this application includes: System power-on initialization: After the system is connected to the preset power supply, the main control module and the driver module each execute an independent power-on self-test process. The self-test includes the power supply voltage status, the integrity of core components, the on / off status of communication interfaces, and the status of storage units. After the self-test is completed, the main control module establishes a stable communication connection with the driver module through the preset inter-board bus. After confirming that the status of each module is normal, the system enters standby mode.

[0029] Pressure signal acquisition and processing: The main control module acquires the simulated air pressure signal of the preset cavity in real time through the air pressure acquisition module at a preset sampling frequency. The acquired signal is converted from analog to digital and filtered before interference is eliminated to obtain an accurate current pressure value.

[0030] Control decision and opening calculation: The main control module acquires the preset target pressure information, calculates the real-time deviation between the target pressure information and the current pressure information, and uses the PID control algorithm to calculate the deviation value to generate the opening adjustment information corresponding to the target valve plate.

[0031] Drive execution and opening adjustment: The main control module sends the opening adjustment information to the drive module via the high-speed bus. The drive module combines the current valve position information collected by the rotary encoder and generates a PWM drive signal through the motion control algorithm to control the motor to run smoothly and drive the valve plate to adjust to the target opening.

[0032] Status feedback and closed-loop iteration: The drive module collects information such as the motor's operating current, the actual valve position of the valve plate, and the module's fault status in real time, and feeds the above information back to the main control module; the main control module combines the pressure acquisition data and valve position feedback data, adjusts the parameters of the control algorithm in real time, and continuously executes the above steps in a loop to achieve full closed-loop continuous control of the preset cavity pressure.

[0033] By decomposing the traditional centralized control architecture into three independent functional modules—perception and decision-making, execution and driving, and signal acquisition—each module adopts an independent physical board design and achieves loose coupling through standardized interfaces. Each module has the ability to independently power supply, independently self-test, and independently operate. The failure of a single module will not affect the normal operation of other modules, thus realizing physical isolation of the fault domain and solving the problems of high module coupling and easy chain propagation of faults in existing technologies.

[0034] Furthermore, by adopting a pipelined parallel signal processing mechanism, the air pressure acquisition module acquires pressure signals in real time, while the main control module performs control algorithm calculations simultaneously, and the drive module executes valve plate position closed-loop control simultaneously. The three links operate in parallel, without waiting for a single processor to complete the entire process calculation, which significantly reduces the end-to-end delay from signal acquisition to execution. The end-to-end response delay can be controlled to within 10ms, which greatly improves the system's response speed and processing efficiency, and solves the problems of insufficient real-time performance and response delay caused by single-processor operation in existing technologies.

[0035] Finally, by adopting a unified interface standard for each module, corresponding modules can be selected and replaced independently according to the needs of different vacuum conditions. For example, a higher-precision gas pressure acquisition module can be replaced for high vacuum conditions, and a higher-power drive module can be replaced for large-diameter, high-torque butterfly valves. There is no need to redesign the entire system, which takes into account both the needs of large-scale production and personalized customization. At the same time, module replacement does not require disassembling the whole machine, but only the corresponding faulty board needs to be replaced. After replacement, it can be operated normally after only one debugging, which greatly reduces the maintenance cost and operation complexity of the system.

[0036] In some embodiments, such as Figure 1 As shown, the control system of the vacuum butterfly valve also includes a communication module. The communication module can be designed as an independent communication module card, electrically connected to the main control module via standardized inter-board interconnect connectors and inter-board communication buses. It possesses independent power supply, self-testing, and communication processing capabilities. The communication module is the core of the system's communication interaction, responsible for parsing external host computer communication protocols and internal bus data interaction, enabling data interaction between the main control module and external preset terminal devices. In this embodiment, the preset terminal devices include a host computer, an upstream gas control system, and a factory fieldbus control console.

[0037] In this embodiment, the communication module connects to the field communication bus via an external communication connector to receive control commands from an external host computer. The control commands include target pressure information, valve opening control commands, system parameter configuration commands, and equipment calibration commands. The communication module performs protocol parsing and data verification on the received control commands. The verification content includes data frame format, checksum, and device address. After the verification is successful, the parsed valid command data is transmitted to the main control module via the inter-board communication bus, triggering the main control module to execute the corresponding control action. Meanwhile, the communication module receives system status data, pressure acquisition data, valve position feedback data, and fault information data uploaded by the main control module. After encapsulating the above data using standard protocols, it uploads the data to external preset terminal devices through the field communication bus, realizing remote monitoring of system operation status, data reporting, and fault early warning.

[0038] When the communication module fails, the faulty board reports the fault information to the main control module through the internal bus. The main control module and the drive module can disconnect from the remote communication link to maintain local pressure closed-loop control, ensuring the pressure of the preset cavity is stable and preventing system shutdown due to communication module failure, thus further improving the reliability of system operation.

[0039] By adding an independent communication module, the communication interaction function is completely decoupled from the main control module. The communication module can independently complete protocol parsing and data interaction, allowing the main control module to focus on control algorithm calculation and logical decision-making. This further optimizes the allocation of system computing resources and improves the system's response speed. At the same time, communication modules adapted to different communication protocols can be replaced according to different application scenarios, such as communication modules adapted to CAN bus, PROFIBUS bus, and Modbus bus, without modifying the hardware and software of the main control module and driver module, greatly improving the system's compatibility and scenario adaptability.

[0040] In some embodiments, such as Figure 2 As shown, the control system of the vacuum butterfly valve is applied to the industrial vacuum pipeline control system. The vacuum pipeline control system includes an upstream gas control system, an upstream process chamber, a downstream vacuum pump, vacuum pipelines and flange connections. The control system of the vacuum butterfly valve is installed in series on the vacuum pipeline between the upstream process chamber and the downstream vacuum pump through the pipeline flange.

[0041] The hardware integration architecture of the vacuum butterfly valve control system includes the butterfly valve internal frame, power module, main control module, communication module, drive module, motor drive system, and valve body. All components are integrated and installed in the butterfly valve internal frame. The system is configured with a preset power supply and power module. The preset power supply adopts a 24V industrial DC power supply and is electrically connected to the power module through a waterproof power interface. The power module is installed in the butterfly valve internal frame and has power filtering, overcurrent protection, overvoltage protection, short circuit protection, and reverse connection protection functions. The output of the power module is electrically connected to the main control module, communication module, and drive module respectively, providing isolated and stable operating power to each module, ensuring that the power supply of each module is independent, and the power supply stability of a single module will not affect the power supply stability of other modules.

[0042] The air pressure sampling port of the air pressure acquisition module is installed in the upstream process cavity and connected to the inside of the cavity through a vacuum sealing joint to collect air pressure data inside the cavity in real time. The signal output end of the air pressure acquisition module is connected to the sensor input interface through a shielded cable. The sensor input interface is installed on the butterfly valve body and electrically connected to the main control module, transmitting the collected 0-10V analog voltage signal to the main control module to form a complete pressure signal acquisition link.

[0043] The main control module, communication module, and driver module all adopt independent PCB board designs. They are physically and electrically connected to the internal bus board through board-to-board connectors. The internal bus board realizes the interconnection of power and control signals between boards. Inter-board communication uses SPI bus and UART bus. The main control module and communication module exchange data via UART bus, and the main control module and driver module exchange data at high speed via SPI bus. The maximum communication rate can reach 10Mbps, ensuring the real-time transmission of control commands and feedback data.

[0044] The output of the drive module is electrically connected to the motor drive system, which includes a motor, a reducer, a drive shaft, and a rotary encoder. The motor is a two-phase stepper motor or a permanent magnet synchronous servo motor. The power output of the motor is fixedly connected to the input of the reducer. The output of the reducer is coaxially connected to the rotary valve plate of the valve body through the drive shaft. The rotary encoder is coaxially mounted on the output shaft of the motor. The signal output of the encoder is electrically connected to the drive module through a shielded cable. The rotation angle data of the motor is collected in real time, converted into the actual valve position information of the valve plate, and fed back to the drive module to form a complete closed-loop drive link for the valve plate position.

[0045] The valve body adopts the KF standard vacuum interface design, including the inlet KF connector body, the outlet KF connector body, the rotary valve plate, and the valve seat seal. The inlet KF connector body is fixedly connected to the outlet pipe of the upstream process chamber through a pipe flange, and the outlet KF connector body is fixedly connected to the inlet pipe of the downstream vacuum pump through a pipe flange. The rotary valve plate is fixedly connected to the drive shaft through a coupling, and can rotate from 0 to 90° under the drive of a motor. By adjusting the rotation angle of the valve plate, the flow area of ​​the valve body is adjusted, so as to achieve precise control of the vacuum degree of the chamber.

[0046] The communication module connects to the communication fieldbus via an external communication connector. The communication fieldbus is connected to the upstream gas control system and a preset host computer terminal, enabling remote data interaction and collaborative control between the system and external devices.

[0047] This embodiment details the system's hardware integration architecture, signal link, power supply architecture, and industrial application scenarios. All components adopt industrial-grade standard parts and standardized interface designs, which can be directly implemented in industrial vacuum control scenarios in industries such as semiconductors, photovoltaics, chemicals, and pharmaceuticals. At the same time, each functional board is independently installed in the internal frame of the butterfly valve, which has good electromagnetic and physical isolation effects, further improving the system's operational stability and anti-interference capabilities.

[0048] In some embodiments, such as Figure 3As shown, the main control module adopts an independent main control PCB board design. The board integrates an embedded system, an analog-to-digital converter (ADC) circuit, an inter-board communication bus, a data storage module, a power conversion unit, a digital tube display unit, a sensor input connector, and an inter-board interconnect connector. The embedded system hardware layer is surface-mounted to the main control PCB board. The core components include a microcontroller, a crystal oscillator, a memory chip, a reset circuit, and a memory chip. In this embodiment, the microcontroller is an industrial-grade 32-bit ARM Cortex-M4 core microcontroller with a maximum operating frequency of 168MHz, featuring multiple ADC acquisition interfaces, PWM output interfaces, and communication interfaces. The crystal oscillator is an 8MHz high-precision passive crystal oscillator, which, in conjunction with an internal phase-locked loop, provides a stable clock signal for the microcontroller. The memory chip is a 16MB SPI Flash memory chip used to store control programs, system configuration parameters, and historical running data. The reset circuit adopts a dual-path design for power-on reset and manual reset, ensuring stable reset upon system power-on and allowing manual reset and restart in case of fault. The memory chip is a 32KB SRAM chip, providing temporary data cache space for program execution.

[0049] The software layer is embedded in the microcontroller's Flash memory chip and includes a control algorithm / PID control unit, a communication application layer unit, a valve plate position setting module, a data processing (filtering algorithm) unit, and a peripheral circuit drive unit.

[0050] The built-in incremental PID control algorithm is used to calculate and generate corresponding valve opening adjustment information based on the deviation between the target pressure and the actual pressure. It supports online self-tuning and manual configuration of PID parameters, and can adapt to the control requirements of vacuum chambers with different volumes and pumping speeds.

[0051] The communication application layer unit is used to implement protocol parsing and data encapsulation for inter-board communication, and to drive the SPI bus and UART bus to complete full-duplex data interaction with the driver module and communication module.

[0052] The valve plate position setting module is used to generate corresponding valve plate target position parameters based on the opening adjustment information, convert them into an instruction format that the drive module can recognize, and then send them to the drive module.

[0053] The data processing (filtering algorithm) unit incorporates a moving average filtering algorithm and a median filtering algorithm to filter the pressure digital signal acquired by the analog-to-digital conversion circuit, eliminating power frequency interference, mechanical vibration noise and sensor random noise, thereby improving the accuracy and stability of pressure acquisition.

[0054] The peripheral circuit driver unit is used to drive the digital tube display, analog-to-digital conversion circuit, storage module and other peripheral circuits to work normally, and realize the initialization, configuration and status reading of the corresponding hardware.

[0055] The analog-to-digital converter (ADC) circuit uses a 16-bit high-precision ADC chip. The analog input terminal of the ADC chip is connected to the air pressure acquisition module through the sensor input connector, and the digital output terminal is connected to the high-speed I / O port of the microcontroller. The ADC chip is used to convert the 0-10V analog voltage signal output by the air pressure acquisition module into a digital signal and transmit it to the microcontroller for processing. In this embodiment, the ADC sampling frequency is set to 1kHz to ensure the real-time performance and resolution of the pressure acquisition.

[0056] The inter-board communication bus includes an SPI bus interface and a UART bus interface, which are connected to the corresponding interfaces of the driver module and the communication module through inter-board interconnection connectors to realize high-speed, full-duplex data interaction between boards. The data storage module uses an external 8KBEEPROM chip, which is electrically connected to the microcontroller's I2C interface to store system calibration parameters, PID configuration parameters, and device address information, ensuring that the parameters are not lost after the system is powered off and can be directly retrieved after power-on.

[0057] The power conversion unit uses an isolated DC-DC power chip. The input end is connected to the system power module, and the output end is connected to the embedded system and various peripheral circuits respectively. It converts the input, such as 24V DC power, into 3.3V and 5V isolated DC power required by the microcontroller and peripheral circuits. It has overcurrent, overvoltage and short circuit protection functions, and at the same time realizes power isolation between analog acquisition circuit and digital control circuit, reducing crosstalk interference. The digital tube display unit uses a 4-digit 0.56-inch high-brightness digital tube, which is connected to the I / O port of the microcontroller through a driving transistor. It is used to display the current cavity pressure value, valve plate opening percentage, and system fault code in real time, which is convenient for on-site debugging and equipment status viewing.

[0058] The sensor input connector uses an industrial-grade waterproof aviation connector, which is fixedly installed on the butterfly valve housing and is used to connect the shielded signal cable of the air pressure acquisition module. The board-to-board interconnect connector uses a high-speed board-to-board connector, which is soldered to the edge of the PCB board and is used to realize the physical and electrical connection with the drive module and communication module. It supports hot-swapping and facilitates module replacement and field maintenance.

[0059] This embodiment details the hardware composition, software functions, chip selection, and circuit design of the main control module. All designs use mature industrial-grade components, which can be directly fabricated, soldered, and programmed. Furthermore, both the hardware and software of the main control module adopt a modular design, allowing for the tailoring or expansion of functions as needed, thus possessing excellent compatibility and scalability.

[0060] In some embodiments, such as Figure 4As shown, the drive module adopts an independent drive PCB board design. The board integrates an embedded system, MOSFET driver, MOSFET-H bridge circuit, coil current sampling circuit, analog-to-digital converter (ADC) circuit, encoder isolation circuit, inter-board communication bus (SPI), power conversion unit, and inter-board interconnection connector. The embedded system hardware layer is surface-mounted onto the drive PCB board. The core components include a microcontroller, crystal oscillator, memory chip, reset circuit, and RAM chip. In this embodiment, the microcontroller uses an industrial-grade 32-bit ARM Cortex-M3 core microcontroller with 6 independent PWM output interfaces and high-speed I / O ports, fully adapting to the motor drive control requirements. The crystal oscillator uses an 8MHz high-precision passive crystal oscillator to provide a stable clock signal for the microcontroller. The memory chip uses an 8MB SPI Flash memory chip to store the drive control program and motion control parameters. The reset circuit adopts a power-on reset design to ensure stable system reset upon power-on. The RAM chip uses a 16KBSRAM chip to provide cache space for program execution.

[0061] The embedded system software layer is embedded in the flash memory chip of the microcontroller and includes a motion control algorithm unit, a communication application layer unit, a motion mode configuration unit, a data processing (filtering algorithm) unit, and a peripheral circuit driving unit.

[0062] The motion control algorithm unit incorporates a position closed-loop PID control algorithm and an S-shaped acceleration / deceleration control algorithm. Based on the target opening information sent by the main control module and the actual valve position information collected by the rotary encoder, it calculates and generates corresponding PWM drive signals to control the smooth start-stop and operation of the motor, thereby achieving precise adjustment of the valve opening. It also incorporates motor stall detection, overcurrent protection, and limit protection logic to prevent motor damage and valve overtravel.

[0063] The communication application layer unit is used to implement protocol parsing and data encapsulation for SPI bus communication, complete high-speed data interaction with the main control module, receive control commands in real time, and upload operating status and feedback data.

[0064] The motion mode configuration unit is used to configure the motor's operating mode, acceleration and deceleration parameters, opening limit parameters, and stall protection threshold, adapting to butterfly valves with different diameters and torques and motors with different power.

[0065] The data processing (filtering algorithm) unit has a built-in first-order low-pass filter algorithm, which is used to filter the motor coil current sampling signal and the encoder acquisition signal to eliminate electromagnetic interference and improve the valve position control accuracy.

[0066] The peripheral circuit driving unit is used to drive peripheral circuits such as MOS transistor drivers, encoder isolation circuits, and ADC circuits to work normally, and to realize the initialization, configuration and status reading of the corresponding hardware.

[0067] The power drive circuit includes a MOSFET driver and a MOSFET-H bridge circuit. The input terminal of the MOSFET driver is connected to the PWM output interface of the microcontroller, and the output terminal is connected to the gate of the MOSFET-H bridge circuit. The output terminal of the MOSFET-H bridge circuit is connected to the two-phase coils of the motor. In this embodiment, the MOSFET driver uses a high-speed half-bridge driver chip, and the MOSFET-H bridge circuit uses four N-channel enhancement-mode power MOSFETs to form a full-bridge circuit. It can control the forward and reverse rotation and speed of the motor according to the PWM signal output by the microcontroller, realizing bidirectional adjustment of the valve opening. At the same time, it has built-in overcurrent and overheat protection functions, and the maximum continuous output current can reach 10A, which is suitable for the motor drive requirements of most industrial vacuum butterfly valves.

[0068] The coil current sampling circuit uses a 20mΩ high-precision milliohm sampling resistor, which is connected in series in the lower output circuit of the MOS transistor-H bridge circuit. The two ends of the sampling resistor are connected to the input of the analog-to-digital converter circuit through a differential line. The output of the analog-to-digital converter circuit is connected to the I / O port of the microcontroller. The coil current sampling circuit is used to collect the motor's operating current in real time. After being converted into a digital signal by the 12-bit analog-to-digital converter circuit, it is transmitted to the microcontroller. The microcontroller determines in real time whether the motor has a stall or overcurrent fault based on the current data, and triggers the corresponding current limiting protection or shutdown protection action.

[0069] The encoder isolation circuit uses a dual-channel high-speed optocoupler isolation chip. The input terminal is connected to the differential signal output terminal of the rotary encoder, and the output terminal is connected to the timer encoder interface of the microcontroller. The encoder isolation circuit is used to electrically isolate the encoder's acquired signal, eliminate electromagnetic interference in the industrial field, ensure the accuracy of valve position signal acquisition, and protect the microcontroller's core circuit from damage caused by external high-voltage interference.

[0070] The Inter-Board Communication Bus (SPI) adopts the SPI high-speed serial bus interface, which connects to the corresponding interface of the main control module through the inter-board interconnect connector to realize high-speed data interaction between the driver module and the main control module. The maximum communication rate can reach 10Mbps, ensuring the real-time issuance of control commands and the rapid uploading of feedback data.

[0071] The power conversion unit uses isolated DC-DC power chips and linear voltage regulator chips. The input end is connected to the system power module, and the output end is connected to the embedded system, power drive circuit, and various peripheral circuits respectively. It converts the input 24V DC power supply into 3.3V, 5V, and 12V isolated DC power supplies required by the system, providing stable power supply for different circuit units. At the same time, it realizes power supply isolation between control circuit and power circuit, greatly improving the system's anti-interference capability.

[0072] The board-to-board interconnect connectors are high-speed board-to-board connectors, soldered to the edge of the PCB board, to achieve physical and electrical connection with the main control module. They support hot-swapping, facilitating module replacement and field maintenance.

[0073] This embodiment details the hardware composition, software functions, power circuit design, and chip selection of the drive module. All designs use mature industrial-grade components, which can be directly fabricated, soldered, and programmed. At the same time, the drive module has a complete protection mechanism and independent closed-loop control capability, which can independently and accurately control the valve plate position, ensuring the stability and reliability of the system drive execution.

[0074] In some embodiments, such as Figure 5 As shown, the communication module adopts an independent communication PCB board design. The board integrates an embedded system, CAN transceiver circuit, isolated power supply, inter-board communication bus (UART), power conversion unit, rotary switch, indicator lights, external communication connector, and inter-board interconnect connector. The embedded system hardware layer is surface-mounted onto the communication PCB board. The core components include a microcontroller, crystal oscillator, memory chip, reset circuit, and RAM chip. In this embodiment, the microcontroller uses an industrial-grade 32-bit ARM Cortex-M0 core microcontroller with a built-in CAN controller, fully adapting to industrial fieldbus communication requirements. The crystal oscillator is an 8MHz high-precision passive crystal oscillator, providing a stable clock signal for the microcontroller. The memory chip is a 4MB SPI Flash memory chip, used to store communication protocol programs and device configuration parameters. The reset circuit adopts a power-on reset design to ensure stable system reset upon power-on. The RAM chip is an 8KBSRAM chip, providing cache space for program execution.

[0075] The embedded system software layer is embedded in the flash memory chip of the microcontroller, including the communication protocol stack unit, the communication application layer unit, and the peripheral circuit driver unit.

[0076] The communication protocol stack unit has built-in CANopen, Modbus-RTU, and Modbus-TCP protocol stacks, supporting mainstream communication protocols in industrial fields. The corresponding protocol type can be configured through a rotary switch or host computer commands to achieve compatible communication with external host computers, PLCs, and fieldbuses.

[0077] The communication application layer unit is used to convert, parse, and encapsulate external communication data and internal inter-board communication data, complete the data pass-through and command interaction between the external host computer and the main control module, and support data verification and abnormal frame filtering.

[0078] Peripheral circuit driver unit: Used to drive the CAN transceiver circuit, rotary switch, indicator light and other peripheral circuits to work normally, and realize the initialization, configuration and status reading of the corresponding hardware.

[0079] CAN transceiver circuit and isolated power supply: The CAN transceiver circuit adopts a high-speed CAN transceiver chip. The input of the CAN transceiver is connected to the CAN controller interface of the microcontroller, and the output is connected to the communication fieldbus through an external communication connector. The isolated power supply adopts a low-power isolated DC-DC chip to provide isolated power supply for the CAN transceiver circuit. At the same time, a high-speed optocoupler is used between the CAN transceiver circuit and the microcontroller for digital signal isolation, realizing electrical isolation of the communication interface and internal circuits such as 3000V, eliminating bus interference and ground loop interference in the industrial field, and improving the stability and anti-interference capability of communication.

[0080] Inter-board communication bus (UART): The inter-board communication bus adopts the UART asynchronous serial bus interface, which is connected to the corresponding interface of the main control module through the inter-board interconnect connector to realize data interaction between the communication module and the main control module. It supports parity check and baud rate adaptation. The default baud rate is set to 115200bps to ensure the reliability of data transmission.

[0081] Power Conversion Unit: The power conversion unit adopts an isolated DC-DC power chip. The input end is connected to the system power module, and the output end is connected to the embedded system, CAN transceiver circuit, and various peripheral circuits respectively. It converts the input DC power, such as 24V, into the isolated DC power required by the system, such as 3.3V or 5V, and has overcurrent, overvoltage, and short circuit protection functions.

[0082] Rotary switch and indicator lights: The rotary switch adopts an 8-bit address-encoded rotary switch, which connects to the microcontroller's I / O port for setting the device's CAN bus address and communication baud rate on-site. Configuration can be completed without connecting to a host computer, adapting to multi-node bus networking requirements. The indicator lights include a power indicator, a communication status indicator, and a fault indicator, all using high-brightness LED beads, connected to the microcontroller's I / O port, and used to indicate the module's power supply status, communication interaction status, and fault status, respectively, facilitating on-site debugging and troubleshooting.

[0083] External communication connectors and board-to-board interconnection connectors: The external communication connectors are industrial-grade waterproof aviation connectors, fixedly installed on the butterfly valve housing, used to access the field communication bus and connect the external host computer and control system; the board-to-board interconnection connectors are board-to-board high-speed connectors, soldered to the edge of the PCB board, used to realize the physical and electrical connection with the main control module, supporting hot-swapping, facilitating module replacement and field maintenance.

[0084] This embodiment details the hardware composition, software protocol, circuit design, and chip selection of the communication module. All designs use mature industrial-grade components, which can be directly fabricated, soldered, and programmed. The communication module supports multiple mainstream industrial communication protocols, and the communication protocol can be changed or configured according to different application scenarios without modifying the design of the main control module and driver module, which greatly improves the system's compatibility and scenario adaptability.

[0085] Please refer to Figure 6 This application provides a control method applicable to, for example, Figure 1 The diagram shows the main control module of the vacuum butterfly valve control system. The hardware architecture, module composition, and connection relationships of the vacuum butterfly valve control system can be found in the full description of the aforementioned embodiments, and will not be repeated here. This method aims to solve the core problems of existing vacuum butterfly valve control methods, such as reliance on a single centralized processor, poor real-time signal processing, low control accuracy, weak fault tolerance, and high module coupling.

[0086] The provided control method includes steps S101 to S104. Details are as follows: Step S101. Obtain the current pressure information of the preset cavity from the air pressure acquisition module.

[0087] Specifically, this step is the system's sensing phase. The core is to achieve high-precision and high-real-time acquisition of vacuum chamber pressure signals through the collaboration of the main control module and the air pressure acquisition module. After the system completes the power-on initialization process, the power supply link and signal transmission link between the main control module and the air pressure acquisition module are normal. The analog-to-digital conversion circuit (ADC), storage unit, and core controller of the main control module are all in normal working condition, and the system enters normal operation mode.

[0088] The main control module sends a sampling trigger command to the pressure acquisition module according to the preset sampling frequency. In this embodiment, the sampling frequency can be configured within the range of 100Hz-1kHz according to the volume of the vacuum cavity and the pumping speed. A low sampling frequency of 100Hz is used for cavities with large volume and slow dynamic changes, while a high sampling frequency of 1kHz is used for cavities with small volume and high dynamic changes, ensuring the real-time performance and validity of the sampled data. After receiving the sampling trigger command, the pressure acquisition module collects the real-time pressure value inside the preset cavity (upstream process pressure control cavity) through its built-in high-precision vacuum pressure sensor. The pressure physical quantity is converted into a 0-10V standard analog voltage signal, which is transmitted to the sensor input interface of the main control module through a shielded twisted pair cable. The signal transmission adopts a dual-ended differential input method to effectively suppress common-mode electromagnetic interference in the industrial environment.

[0089] The main control module continuously samples the received analog voltage signal through a built-in 16-bit high-precision ADC circuit. The conversion time for a single sampling is less than 1μs, and 16 consecutive samples are completed within each sampling cycle. This converts the analog voltage signal into corresponding digital raw data, which is stored in the ADC's FIFO buffer. The main control module reads the raw digital data from the buffer and, according to the voltage-pressure calibration curve obtained before leaving the factory using a standard vacuum gauge, converts the digital data into the corresponding actual pressure value. This yields the current pressure information of the preset cavity. The calibration curve is stored in the main control module's non-volatile memory, ensuring accuracy even when power is off.

[0090] The main control module verifies the validity of the converted current pressure information and determines whether the pressure value is within the preset range of the sensor. If the value exceeds the range or does not change for a long time, it is determined to be an acquisition abnormality, triggering a sensor fault warning to ensure the legality and validity of the acquired data.

[0091] Step S102. Obtain the opening adjustment information corresponding to the target valve plate in the preset cavity based on the preset target pressure information and the current pressure information.

[0092] Specifically, this step is the system's decision-making stage. The core is that the main control module independently completes the control algorithm calculation, generates precise valve opening adjustment commands, and obtains preset target pressure information through the main control module. There are two acquisition methods: one is local configuration, where the target pressure value is input by the on-site operator via the main control module's physical buttons and digital display unit, and stored in the main control module's non-volatile memory unit; the other is remote distribution, where the target pressure control command is received from an external host computer or PLC control cabinet via the communication module, and after protocol parsing and verification, the target pressure information is extracted.

[0093] The main control module calculates the deviation between the target pressure information and the current pressure information obtained in step S101. The absolute deviation value is calculated as: Deviation value = Target pressure value - Current pressure value. Simultaneously, the relative deviation rate is calculated as: Relative deviation rate = Absolute deviation value / Target pressure value × 100%. The main control module performs dead-zone processing on the calculated absolute deviation value. The preset dead-zone threshold is ±0.2% of the target pressure value. When the absolute deviation value is within the dead-zone threshold range, it is determined that the current pressure has reached the target value, and the deviation value is set to 0. This avoids frequent valve adjustments due to small pressure fluctuations, extending the equipment's service life. Simultaneously, the deviation value is limited within the preset full-range pressure range of the cavity to prevent excessive deviation values ​​from causing control overshoot.

[0094] The preprocessed deviation value is input into the preset valve plate control algorithm by the main control module for calculation. In this embodiment, the valve plate control algorithm adopts an incremental PID control algorithm. The proportional coefficient P, integral coefficient I, and derivative coefficient D of the algorithm can be configured locally or remotely, and it also supports parameter self-tuning. The main control module can automatically optimize the PID parameters according to the dynamic characteristics of the cavity. The main control module obtains the control increment of the current control cycle through algorithm calculation, and combines it with the output control quantity of the previous cycle to obtain the final output control quantity of the current cycle. After the output control quantity is limited from 0-100%, it is converted into the corresponding valve plate opening percentage, generating the opening adjustment information corresponding to the target valve plate. Among them, 0% opening corresponds to the valve plate fully closed, 100% opening corresponds to the valve plate fully open, and the resolution of the opening adjustment information is 0.1%, ensuring the accuracy of valve plate opening adjustment.

[0095] The main control module encapsulates the generated opening adjustment information according to a preset communication protocol format. The encapsulation content includes frame header, device address, opening data, checksum, and frame tail to ensure the accuracy and anti-interference capability of subsequent data transmission.

[0096] Step S103. The control drive module adjusts the opening of the target valve plate according to the target opening information.

[0097] Specifically, this step is the system execution phase. The core is that the main control module issues control commands, and the drive module independently completes the closed-loop control of the valve plate position, realizing the decoupling of decision-making and execution. The main control module sends the packaged opening adjustment information and drive control commands to the drive module through the high-speed SPI bus between boards. In this embodiment, the communication rate of the SPI bus is set to 10Mbps, and the data transmission delay is less than 1ms, ensuring the real-time issuance of control commands and meeting the requirements of high dynamic control.

[0098] The main control module sends an execution trigger command to the drive module, triggering the drive module to perform the valve plate opening adjustment action. After receiving the opening adjustment information and the trigger command, the drive module, in conjunction with the current actual valve position information of the valve plate collected by the rotary encoder, generates a PWM drive signal through the built-in motion control algorithm. The signal is then used to control the motor through the H-bridge power circuit. The motor drives the valve plate to rotate through the reducer and drive shaft, adjusting the valve plate to the target opening degree corresponding to the opening adjustment information, thus completing the valve plate opening adjustment.

[0099] The main control module receives the execution completion signal from the drive module, confirms that the valve plate has been adjusted to the target opening, completes the adjustment action of this control cycle, and enters the next control cycle. It then cyclically executes steps S101 to S103 to achieve continuous closed-loop control of the preset chamber pressure.

[0100] If the main control module fails to receive feedback signals from the drive module for three consecutive control cycles, it determines that the communication link is abnormal, immediately triggers a fault warning, and locks the issuance of new control commands to prevent the valve plate from malfunctioning and ensure system safety.

[0101] Step S104. Obtain the operating parameters and status information of the target valve plate collected by the drive module; adjust the opening adjustment information according to the operating parameters and status information; the operating parameters include at least one or more of the following: motor operating current, speed, valve plate rotation speed, and adjustment stroke; the status information includes one or more of the following: actual valve plate opening, motor operating status, drive module power supply status, encoder connection status, and power circuit temperature.

[0102] Specifically, by adding closed-loop feedback of valve plate operating status and iterative optimization steps for opening adjustment information, the accuracy and stability of valve plate control are improved, avoiding opening control deviations caused by changes in motor load and fluctuations in cavity pressure.

[0103] The driving module acquires the operating parameters and status information of the target valve plate in real time during the entire process of adjusting the valve plate opening, at a frequency synchronized with the control cycle.

[0104] The operating parameters include the motor's real-time operating current, motor speed, valve plate rotation speed, and valve plate opening adjustment stroke. Status information includes the current actual valve plate opening, motor operating status, drive module power supply status, encoder connection status, and power circuit temperature. The drive module encapsulates and verifies the collected operating parameters and status information according to a preset feedback data format, and uploads it to the main control module via the inter-board SPI bus. The feedback cycle is fully synchronized with the system control cycle, ensuring that the main control module can obtain the valve plate's full-stroke operating status in real time. The main control module receives the data packets uploaded by the drive module, performs verification and parsing, and stores the valid operating parameters and status information in a temporary cache unit for subsequent control optimization and status monitoring.

[0105] In some embodiments, adjusting the opening adjustment information according to the operating parameters and status information includes: performing multi-dimensional analysis on the operating parameters and status information, wherein the multi-dimensional analysis includes at least one or more of the following: calculating the opening deviation, determining valve plate jamming, determining adjustment stability, and determining the risk of overheating of the drive module; executing a preset adaptive adjustment strategy on the opening adjustment information according to the analysis results corresponding to the multi-dimensional analysis, wherein the adaptive adjustment strategy includes at least one of eliminating static deviation and suppressing overshoot oscillation; and sending the adjusted opening adjustment information to the drive module, wherein the drive module corrects the opening of the target valve plate according to the adjusted opening adjustment information.

[0106] The main control module performs multi-dimensional analysis of operating parameters and status information to determine whether the actual operating status of the valve plate meets the control expectations: it compares the target opening degree of the valve plate with the actual opening degree and calculates the real-time opening degree deviation value; it judges whether the valve plate is stuck or stalled based on the motor's operating current; it judges whether the adjustment process is smooth based on the motor speed and the valve plate's rotation speed; and it judges whether the drive module is at risk of overheating based on the power circuit temperature.

[0107] Based on the analysis results, the main control module adaptively adjusts the opening adjustment information. Specific adjustment strategies may include, but are not limited to: 1. When there is a static deviation between the actual opening degree and the target opening degree, the main control module adaptively adjusts the integral coefficient of the PID control algorithm to eliminate the static deviation and ensure that the valve plate accurately reaches the target opening degree.

[0108] 2. When overshoot or oscillation occurs during valve plate adjustment, the main control module adaptively adjusts the derivative coefficient of the PID control algorithm to suppress overshoot and oscillation and improve the stability of the adjustment process.

[0109] 3. When the motor operating current is detected to exceed the preset stall threshold or the valve plate becomes stuck, the main control module immediately generates an opening holding command and sends it to the drive module to stop the valve plate adjustment action. At the same time, a fault warning is triggered to prevent the motor from burning out.

[0110] 4. When a significant change in chamber pressure is detected, and the rate of change exceeds a preset threshold, the main control module adjusts the opening adjustment information in advance according to the pressure change trend, thereby achieving feedforward control and significantly improving the dynamic response speed of pressure control.

[0111] 5. When the temperature of the power circuit of the drive module is detected to exceed the preset threshold, the main control module reduces the valve plate adjustment speed and reduces the motor output power to avoid overheating and damage to the drive module.

[0112] Finally, the main control module repackages the adjusted opening information and sends it to the drive module in real time. The drive module dynamically corrects the valve opening based on the new opening information, thus completing the optimization and iteration of the control closed loop.

[0113] This embodiment achieves pressure-valve position dual closed-loop optimized control through real-time feedback of valve plate operating parameters and adaptive adjustment of opening information, improving the valve plate opening control accuracy and cavity pressure control accuracy. It also has comprehensive fault warning and protection functions, greatly improving the system's control accuracy and operational stability.

[0114] In some embodiments, the control system of the vacuum butterfly valve further includes a communication module; after the control drive module adjusts the opening of the target valve plate according to the target opening information, the control system further includes: acquiring the status information and fault information of the control system of the vacuum butterfly valve; and sending the status information and fault information to a preset terminal device through the communication module.

[0115] Based on the core control method described above, this embodiment adds a remote reporting step for system status and fault information. It achieves remote monitoring of system operation status through an independent communication module, solving the problems of untimely status feedback and weak remote operation and maintenance capabilities in the existing centralized control system.

[0116] In this embodiment, the control system of the vacuum butterfly valve also includes a communication module. This communication module is an independent physical communication module card, electrically connected to the main control module via a UART bus, and possesses independent power supply, independent protocol parsing, and independent communication interaction capabilities. After the control drive module adjusts the opening of the target valve plate according to the target opening information in step S103, the main control module collects the status information and fault information of each module in the system in real time according to a preset inspection cycle of, for example, 100ms, ensuring timely capture of fault information.

[0117] The status information includes, but is not limited to: the core operating status of the main control module, real-time pressure acquisition data, valve opening data, control algorithm parameters, and power supply voltage status; the motor operating status, valve position feedback data, drive current data, and power circuit temperature of the drive module; the communication connection status and bus data interaction status of the communication module; and the sensor operating status and sampling data validity of the air pressure acquisition module.

[0118] Fault information includes, but is not limited to: ADC acquisition fault, storage fault, and algorithm operation abnormality in the main control module; motor overcurrent fault, stall fault, encoder disconnection fault, and drive circuit fault in the drive module; bus communication fault and protocol parsing fault in the communication module; and sensor disconnection fault and sampling data over-range fault in the air pressure acquisition module.

[0119] Secondly, the main control module classifies and organizes the collected status and fault information, encapsulates the data according to the preset protocol format, and classifies the fault information into three levels: prompt level, warning level, and emergency level. Different levels correspond to different reporting priorities and processing strategies, with emergency level faults having the highest reporting priority.

[0120] The main control module sends the encapsulated status and fault information to the communication module in priority order through the inter-board UART bus, with emergency fault information being sent first to ensure that emergency faults can be transmitted to the terminal device as soon as possible.

[0121] After receiving the data, the communication module performs secondary protocol encapsulation on the data and converts it into a communication protocol format supported by the preset terminal device. In this embodiment, the communication module has built-in mainstream industrial protocol stacks such as CANopen, Modbus-RTU, and Modbus-TCP, which can automatically adapt to the type of terminal device without modifying the main control module program.

[0122] The communication module sends the encapsulated status and fault information to preset terminal devices via an external communication fieldbus. The preset terminal devices include field host computers, PLC control cabinets, factory DCS systems, and remote operation and maintenance monitoring platforms.

[0123] Finally, the communication module receives the response signal from the terminal device to confirm that the data was sent successfully. If the transmission fails, the communication module will retransmit up to 3 times according to the preset retransmission mechanism, and at the same time, it will feed back the transmission failure status to the main control module to trigger a local fault prompt.

[0124] This embodiment achieves remote reporting of system status and fault information through an independent communication module, realizing remote monitoring and maintenance of the vacuum butterfly valve control system. The reporting delay of status information and fault information is reduced. At the same time, the communication module is completely decoupled from the main control module, so the failure of the communication module will not affect the local closed-loop control of the main control module, thus balancing remote monitoring capabilities and system reliability.

[0125] In some embodiments, after acquiring the status information and fault information of the control system of the vacuum butterfly valve, the method further includes: if it is determined from the status information and fault information that any one of the drive module, the air pressure acquisition module and the communication module has failed, the module that has not failed is identified as a normal working module.

[0126] This embodiment forms the basis for realizing the system's fault tolerance and hot-swappable replacement functions. The core is to use the main control module to monitor the operating status of each module in real time and diagnose faults, accurately identify and isolate faulty modules, ensure that normally functioning modules can continue to operate, and avoid the failure of a single module causing the entire system to crash.

[0127] While collecting status and fault information from each module of the system according to a preset inspection cycle of 100ms, the main control module performs real-time fault diagnosis on the operating status of each module. The fault diagnosis adopts a multi-parameter comprehensive judgment method, combining multiple dimensions such as the module's heartbeat signal, communication status, data validity, and internal status to avoid misjudgment and missed judgment.

[0128] For the barometric pressure acquisition module, fault diagnosis conditions may include, but are not limited to: no heartbeat signal received from the barometric pressure acquisition module for 3 consecutive inspection cycles; pressure data exceeding the sensor's range for 10 consecutive sampling cycles; no change in pressure data for 10 consecutive sampling cycles (the change is less than the sensor resolution); and the internal status word returned by the barometric pressure acquisition module contains a fault flag. Meeting any of the above conditions indicates a fault in the barometric pressure acquisition module.

[0129] For the drive module, fault diagnosis conditions may include, but are not limited to: no feedback signal received from the drive module for three consecutive control cycles; the motor current returned by the drive module exceeds twice the rated current and lasts for more than 500 ms; the encoder data returned by the drive module is abnormal (such as sudden changes in value or exceeding the range); the internal status word returned by the drive module contains a fault flag bit. If any of the above conditions are met, the drive module is determined to have failed.

[0130] For the communication module, fault diagnosis conditions include, but are not limited to: no heartbeat signal received from the communication module for 5 consecutive inspection cycles; no response received after 10 consecutive data transmissions to the communication module; and the internal status word returned by the communication module containing a fault flag. Meeting any of these conditions indicates a fault in the communication module.

[0131] When the main control module determines that any one of the drive module, air pressure acquisition module, or communication module has failed based on the above fault diagnosis conditions, it immediately marks that module as a faulty working module, while designating the remaining unfaulty modules as normal working modules. The main control module stores the faulty module's identification information, fault type information, and fault occurrence time in a non-volatile storage unit to form a fault log, facilitating subsequent fault analysis and tracing.

[0132] This embodiment lays the foundation for subsequent execution of safety policies and hot-swappable replacement operations through accurate fault diagnosis and module status marking, realizing rapid fault location and isolation, and improving the system's fault tolerance capability.

[0133] For example, the module that malfunctions is identified as the faulty working module; the normally operating module is controlled to execute a preset safety policy, including: disconnecting the signal interaction link between the normally operating module and the faulty working module; generating fault alarm information corresponding to the faulty working module; the fault alarm information includes the unique identifier information and fault type information of the faulty working module; sending the fault alarm information to the terminal device through the communication module; upon receiving the faulty module replacement instruction sent by the terminal device in response to the fault alarm information, responding to the faulty module replacement instruction to complete the replacement of the faulty working module; and restoring the signal interaction link after the faulty working module replacement is completed.

[0134] Once the main control module determines that a module is a faulty working module, it immediately controls all normally working modules to execute the preset safety policy. The main control module immediately disables the communication interface corresponding to the faulty working module and cuts off all signal interaction links between the normally working modules and the faulty working module to prevent the abnormal signals of the faulty module from affecting the operation of the normally working modules.

[0135] If the faulty module is the air pressure acquisition module, the main control module disables the corresponding ADC input channel and SPI communication interface, and switches the pressure control mode to valve position holding mode to keep the current valve opening unchanged, maintain the cavity pressure, and avoid valve malfunction due to pressure data loss.

[0136] If the faulty module is the driver module, the main control module disables the corresponding SPI communication interface and locks the issuance of all new control commands to keep the current valve opening unchanged, thus preventing the valve from going out of control due to the failure of the driver module.

[0137] If the faulty module is a communication module, the main control module disables the corresponding UART communication interface and switches to local control mode to continue executing local pressure closed-loop control, ensuring that the process is not affected.

[0138] The main control module generates standardized fault alarm information based on the type of the faulty module and the fault diagnosis results. This fault alarm information includes, but is not limited to: unique identifier information of the faulty working module (e.g., module serial number, hardware version number, software version number); fault type information (e.g., sensor disconnection, motor stall, communication failure, etc.); fault occurrence time (accurate to milliseconds); and system status information at the time of the fault (e.g., current pressure, valve opening, motor current, etc.). The fault alarm information is encapsulated according to a preset format, and a corresponding alarm level is set according to the fault severity.

[0139] If the communication module is functioning normally, the main control module immediately sends fault alarm information to the communication module via the UART bus. The communication module then converts the fault alarm information into a protocol format supported by the terminal device and prioritizes sending it to the preset terminal device. Emergency-level fault alarm information will trigger an audible and visual alarm on the terminal device, reminding maintenance personnel to handle the situation promptly.

[0140] If the communication module itself is faulty, the main control module will trigger a local audio-visual fault warning, display the fault code on a digital tube, and wait for on-site maintenance personnel to handle it.

[0141] After receiving a fault alarm, maintenance personnel send a faulty module replacement command to the main control module via the terminal device. Upon receiving the replacement command, the main control module first confirms that the system is currently in a safe state (valve opening remains unchanged, chamber pressure is stable), then returns a replacement permission response to the terminal device, and simultaneously enters hot-swap mode.

[0142] In hot-swappable mode, the main control module cuts off the power supply to the faulty module (through the onboard power control switch) to ensure that the faulty module is completely de-energized. At this time, maintenance personnel can safely remove the faulty module and insert a new module of the same model.

[0143] After a new module is inserted, the main control module automatically detects its presence, then supplies power to the new module and executes the initialization process. The initialization process includes: reading the new module's unique identifier and version information; performing a handshake communication with the new module to confirm normal communication; sending necessary configuration parameters (such as sampling frequency, PID parameters, etc.) to the new module; and performing a functional self-test on the new module to confirm that all functions are normal.

[0144] If initialization and self-test both pass, the main control module sends a message to the terminal device indicating successful module replacement; if initialization or self-test fails, it sends a message to the terminal device indicating failed module replacement and triggers a local fault message.

[0145] Once the main control module confirms that the new module has been successfully replaced and is functioning normally, it immediately restores the signal interaction link between the normal working module and the new module, and switches the system back from hot-swappable mode to normal operating mode.

[0146] If the pressure acquisition module is replaced: the main control module enables the corresponding ADC input channel and SPI communication interface to restore pressure data acquisition, and at the same time switches the control mode from valve position holding mode back to pressure closed-loop control mode to continue pressure regulation.

[0147] If the driver module is replaced: the main control module enables the corresponding SPI communication interface, resumes the issuance of control commands, and continues to execute pressure closed-loop control.

[0148] If the communication module is replaced: the main control module enables the corresponding UART communication interface to restore the remote communication function, and at the same time resends the cached status information and fault logs to the terminal device.

[0149] After the system returns to normal operation, the main control module generates a module replacement record, which is stored in a non-volatile storage unit. The record includes the replacement time, faulty module identifier, new module identifier, and maintenance personnel information.

[0150] This example demonstrates how to replace faulty modules online without system downtime through a comprehensive safety strategy and hot-swappable replacement process. The system's mean time to repair (MTTR) is reduced from several hours to less than 5 minutes, significantly improving system availability and reliability. Furthermore, the entire replacement process is automatically controlled by the main control module, requiring no system downtime and not affecting ongoing processes. This makes it particularly suitable for industries with extremely high requirements for production continuity, such as semiconductors, photovoltaics, and pharmaceuticals.

[0151] In some embodiments, before the pressure acquisition module acquires the current pressure information of the preset cavity, the method further includes: after the control system of the vacuum butterfly valve is powered on, the main control module and the drive module perform power-on self-tests respectively; after the power-on self-tests are completed, a communication connection is established with the drive module according to the preset inter-board bus.

[0152] This embodiment, based on the aforementioned core control method, adds system power-on initialization and independent self-test steps to ensure that each module is in normal condition and the communication link is stable after the system is powered on, avoiding equipment damage or control failure caused by the system operating under abnormal conditions. Before the air pressure acquisition module collects the current pressure information of the preset cavity in step S101, the system is first connected to a 24V industrial DC power supply. The power supply module provides stable isolated power supply to each module. The main control module and the drive module are powered on and started simultaneously, and begin to execute independent power-on self-test processes. The self-test processes of the two modules are completely independent and executed in parallel without affecting each other.

[0153] Secondly, the main control module performs a full power-on self-test, which includes, but is not limited to: 1. Power status self-test: Checks whether the kernel power supply voltage and peripheral power supply voltage are within the normal operating range. If the voltage exceeds the normal range, it immediately triggers a power fault alarm, stops the subsequent startup process, and locks all control outputs. 2. Core component self-test: Checks whether the microcontroller, crystal oscillator, memory chip, ADC circuit, and communication interface are working properly, reads the device parameters and calibration data in the memory chip, verifies the integrity of the data, and automatically restores the factory default parameters if the data is corrupted; 3. Peripheral function self-test: Check whether the digital tube display, key input, and sensor input interface are normal, drive the digital tube to perform a full brightness test, and verify that the display function is normal; 4. Program status self-check: Verify the checksum of the control program to confirm that the program is not damaged. If the program is abnormal, trigger a program fault alarm and enter safe standby mode.

[0154] Simultaneously, the driver module performs an independent power-on self-test, which includes, but is not limited to: 1. Power supply status self-test: Checks whether the power supply to the control circuit and the power circuit is normal. If the voltage is abnormal, the power drive circuit is immediately locked to prevent the motor from outputting power and avoid malfunction of the motor. 2. Core component self-test: Checks whether the microcontroller, crystal oscillator, memory chip, MOSFET drive circuit, and encoder interface are working properly; 3. Power circuit self-test: Checks whether there are short circuits or open circuits in the MOSFET-H bridge circuit, and whether the coil current sampling circuit is normal. If a short circuit fault is found, the drive output is immediately and permanently locked to prevent the equipment from burning out. 4. Encoder self-test: Checks the connection status of the rotary encoder, whether the signal output is normal, reads the initial position of the encoder, confirms the initial opening of the valve plate, and if the encoder is disconnected, triggers an encoder fault alarm and prohibits drive output.

[0155] Furthermore, after the main control module and the driver module complete their self-tests, they generate local self-test results. If the self-test fails, the corresponding module immediately enters a fault-safe mode, locks all control outputs, and displays the fault code through indicator lights and digital tubes. If the self-test passes, it enters a standby state, waiting for the communication connection to be established.

[0156] After the main control module passes its self-test, it sends a connection handshake frame to the driver module via the inter-board SPI bus. The handshake frame contains the main control module's device address, communication parameters, and synchronization clock information. Upon receiving the handshake frame, the driver module verifies the data. If the verification is successful, it returns a handshake response frame to the main control module. This response frame contains the driver module's device address, device status, and supported communication parameters. Upon receiving the handshake response frame, the main control module confirms that the driver module's self-test and status are normal, completes communication parameter synchronization with the driver module, establishes a stable full-duplex communication connection, and simultaneously sets up a communication heartbeat mechanism with a sending period of, for example, 100ms, for real-time monitoring of the communication link's connectivity.

[0157] Finally, after the main control module confirms that the communication connection with the drive module is normal, the system completes the entire power-on initialization process, enters the normal operation mode, and begins to execute the core control process from steps S101 to S103 in a loop.

[0158] This embodiment ensures that the hardware, software, and peripherals of each module are in normal condition after the system is powered on by establishing independent power-on self-tests and communication links between the main control module and the driver module, thus avoiding equipment damage caused by the system operating under abnormal conditions. At the same time, the independent self-test mechanism enables early identification and accurate location of faults, greatly improving the system's startup security and operational reliability.

[0159] In some embodiments, the control system of the vacuum butterfly valve further includes a communication module; before acquiring the current pressure information of the preset cavity acquired by the pressure acquisition module, the system further includes: receiving control commands sent by an external host computer through the communication module, performing protocol parsing and verification on the control commands, and acquiring the current pressure information acquired by the pressure acquisition module after the control commands are verified.

[0160] Based on the core control method described above, this embodiment adds steps for receiving, parsing, and double-verifying control commands from the host computer, thereby achieving remote closed-loop control of the system, ensuring the legality and validity of control commands, and avoiding system control anomalies caused by invalid or erroneous commands.

[0161] Before acquiring the current pressure information of the preset cavity through the air pressure acquisition module in step S101, the system first receives control commands sent by an external host computer via the communication module. The external host computer sends control commands to the system through the field communication bus. The control commands include target pressure setting commands, valve opening control commands, PID parameter configuration commands, system calibration commands, and equipment start / stop commands. The control commands are encapsulated according to a preset communication protocol format and include the device address, command type, data content, and checksum.

[0162] The communication module monitors bus data in real time through an external communication connector and receives control commands sent on the bus. First, it matches the device address of the control command to determine whether the command is sent to this device. If the device address does not match, the command is discarded to avoid interference from invalid data. If the device address matches, the complete command data frame is received.

[0163] Secondly, the communication module performs protocol parsing on the received complete instruction data frame, extracting the instruction type, data content, and checksum field. According to the preset protocol rules, the format of the data frame is checked to determine whether the frame header and frame trailer are correct and whether the data length conforms to the specifications. If the format is incorrect, it is determined to be an invalid instruction, and an instruction parsing failure is reported to the main control module. At the same time, an error response frame is returned to the host computer.

[0164] The communication module verifies the instruction data, recalculates the checksum of the data content, and compares it with the checksum carried in the instruction. If the two do not match, the instruction data transmission is determined to be incorrect and the instruction is invalid. A retransmission request is sent to the host computer, and the instruction is discarded.

[0165] If the instruction format verification and validation both pass, the communication module determines that the control instruction is a valid and legal instruction, transmits the parsed instruction content to the main control module through the inter-board UART bus, and simultaneously returns a confirmation frame to the host computer indicating that the instruction was successfully received.

[0166] Furthermore, after receiving a valid control command transmitted by the communication module, the main control module performs a second validity check on the command content, determining whether the parameters of the command are within the preset safety range. For example, whether the target pressure value is within the safe pressure range of the cavity, whether the valve opening value is within the range of 0-100%, and whether the PID parameters are within the preset reasonable range. If the parameters exceed the legal range, the command is deemed invalid and is refused to be executed. At the same time, an error message indicating that the parameters have exceeded the limit is returned to the host computer through the communication module.

[0167] If the command parameters are valid, the main control module executes the corresponding control commands. For example, based on the target pressure setting command, it updates the target pressure information in the storage unit; based on the valve opening control command, it directly generates the corresponding opening adjustment information and sends it to the drive module for execution; based on the PID parameter configuration command, it updates the operating parameters of the control algorithm. After the main control module completes the command execution, it enters the normal closed-loop control process and begins executing step S101, acquiring the current pressure information of the preset cavity collected by the air pressure acquisition module, and based on the new target pressure information, executing the subsequent opening calculation and adjustment steps.

[0168] This embodiment ensures the legality and validity of the host computer control commands by using independent command reception, parsing, and dual verification through the communication module, thus avoiding system control anomalies caused by invalid or erroneous commands. At the same time, the command parsing function is completed by an independent communication module, which does not occupy the computing resources of the main control module, ensuring the real-time control operation of the main control module and balancing the flexibility of remote control with the security of system operation.

[0169] In some embodiments, acquiring the current pressure information of a preset cavity acquired by the air pressure acquisition module includes: acquiring an analog signal acquired by the air pressure acquisition module; preprocessing the analog signal to acquire the current pressure information; wherein, the preprocessing includes at least filtering.

[0170] Based on the core control method described above, this embodiment refines and optimizes the pressure information acquisition process in step S101. Through multi-level preprocessing of analog signals, interference noise in the acquisition process is eliminated, improving the accuracy and stability of pressure acquisition and ensuring the accuracy of subsequent control decisions.

[0171] First, the main control module triggers the internal ADC circuit to enter continuous sampling mode according to the preset sampling frequency. The single sampling conversion time is less than 1μs, and 16 continuous samples are completed in each sampling cycle to ensure the continuity and integrity of the sampled data.

[0172] The high-precision air pressure sensor of the air pressure acquisition module collects the air pressure value of the preset cavity in real time, converts the air pressure physical quantity into a standard analog voltage signal such as 0-10V, and transmits it to the ADC acquisition input terminal of the main control module through shielded twisted pair cable. The analog signal transmission process adopts a dual-end differential input method to effectively suppress common-mode interference in the industrial field.

[0173] The ADC circuit of the main control module continuously samples the input analog voltage signal, converts the analog sample values ​​in each sampling cycle (e.g., 16 times) into corresponding digital raw data, and stores them in the FIFO buffer unit of the ADC to complete the acquisition of analog signals.

[0174] Secondly, the main control module reads 16 sets of raw digital data from the FIFO buffer unit of the ADC during the current sampling period. First, the raw data is subjected to amplitude limiting preprocessing to remove abnormal data that exceeds the preset range. The preset range corresponds to the 0-10V output voltage of the sensor. Data that exceeds the range is judged as interference abnormal values ​​and is directly removed to avoid abnormal data affecting the acquisition accuracy.

[0175] The main control module performs median filtering on the effective data after amplitude limiting. This includes: sorting the effective data in ascending order of numerical value, removing the maximum and minimum values, and taking the arithmetic mean of the remaining effective data to obtain the preliminary filtered data for this sampling. Median filtering can effectively eliminate pulse interference and spike noise during the sampling process, such as electromagnetic pulses and transient interference caused by relay operation in industrial settings.

[0176] Simultaneously, the main control module performs moving average filtering on the median-filtered data. This includes: combining the initial filtered data from the current sampling with filtered data from the previous nine sampling periods to form a moving window of length 10; then performing a weighted average calculation on the data within the moving window, with data closer to the current sampling period receiving a higher weight, ultimately yielding smoothed digital pressure data. Moving average filtering effectively eliminates random white noise from the sensor and minor fluctuations in cavity pressure, significantly improving the stability of the pressure data.

[0177] Finally, the main control module converts the smoothed digital pressure data into the corresponding actual pressure value through the factory-calibrated voltage-pressure calibration curve, thereby obtaining the current pressure information of the preset cavity. At the same time, the current pressure information is stored in the historical data cache of the main control module for subsequent control calculations and trend analysis.

[0178] This embodiment effectively eliminates electromagnetic interference, impulse noise, and random white noise during the sampling process through multi-level preprocessing, including amplitude limiting preprocessing, median filtering, and moving average filtering. This improves the signal-to-noise ratio of pressure acquisition and reduces the fluctuation amplitude of pressure acquisition data, significantly enhancing the accuracy and stability of pressure acquisition. This provides accurate input data for subsequent control algorithm calculations, fundamentally improving the system's pressure control accuracy.

[0179] In some embodiments, obtaining the opening adjustment information corresponding to the target valve plate in the preset cavity based on the preset target pressure information and the current pressure information includes: obtaining the deviation information between the target pressure information and the current pressure information; and generating the opening adjustment information based on the deviation information and the preset valve plate control algorithm.

[0180] Based on the core control method described above, this embodiment further refines the process of generating opening adjustment information in step S102. By accurately calculating the pressure deviation and performing calculations using the adaptive valve plate control algorithm, the accurate generation of opening adjustment information is achieved, ensuring rapid and stable control of the cavity pressure and avoiding control overshoot and oscillation.

[0181] Step S102 obtains the opening adjustment information corresponding to the target valve plate in the preset cavity based on the preset target pressure information and the current pressure information. First, the preset target pressure information is read from the non-volatile storage unit through the main control module. The target pressure information is the desired stable pressure value of the cavity set by the user locally or remotely, in Pa. At the same time, the current pressure information of the preset cavity obtained in step S101 is read.

[0182] The main control module calculates the real-time deviation between the target pressure information and the current pressure information. The deviation information includes the absolute deviation value and the relative deviation rate, wherein: Absolute deviation value e(k) = target pressure value r(k) - current pressure value y(k), where k is the sequence number of the current control cycle; relative deviation rate = absolute deviation value e(k) / target pressure value r(k) × 100%.

[0183] The main control module performs dead-zone processing on the calculated absolute deviation value. The preset dead-zone threshold is ±0.2% of the target pressure value. When the absolute deviation value is within the dead-zone threshold range, it is determined that the current pressure has reached the target value, and the deviation value is set to 0. This avoids frequent valve adjustments caused by small pressure fluctuations, extending the service life of the valve plate and motor. The main control module then limits the deviation value after dead-zone processing, with the limiting range being ± the full-range pressure value. This prevents excessive deviation values ​​caused by sudden pressure changes, which could lead to control overshoot.

[0184] Secondly, the main control module inputs the calculated current cycle deviation value e(k), the previous cycle deviation value e(k-1), and the deviation value e(k-2) from the previous two cycles into the preset incremental PID valve plate control algorithm. The core formula of the algorithm is: Δu(k) = Kp × [e(k) - e(k-1)] + Ki × e(k) + Kd × [e(k) - 2e(k-1) + e(k-2)]; where Δu(k) is the control increment of the current cycle, Kp is the proportional coefficient, Ki is the integral coefficient, and Kd is the derivative coefficient. The three coefficients can be adjusted through local configuration or remote distribution, and parameter self-tuning function is also supported.

[0185] Accordingly, the main control module adaptively adjusts the PID parameters based on the dynamic pressure characteristics and deviation values ​​of the cavity. The corresponding adjustment logic includes, but is not limited to: 1. When the absolute deviation is large, increase the proportional coefficient Kp, decrease the integral coefficient Ki, turn off the derivative action, improve the system's response speed, quickly reduce the pressure deviation, and avoid integral saturation.

[0186] 2. When the absolute deviation value is in the middle range, adjust the proportional coefficient Kp to a moderate value, increase the integral coefficient Ki, and add an appropriate derivative coefficient Kd to eliminate static deviation and suppress overshoot.

[0187] 3. When the absolute deviation value is within the dead zone, reduce the proportional coefficient Kp, turn off the integral action, maintain the current opening adjustment information, and avoid frequent valve plate operation.

[0188] Meanwhile, the main control module calculates the control increment Δu(k) of the current cycle through the PID algorithm, adds the control increment to the output control quantity u(k-1) of the previous cycle, and obtains the output control quantity u(k) of the current cycle, i.e. u(k) = u(k-1) + Δu(k).

[0189] Finally, the main control module performs amplitude limiting on the output control quantity u(k). The amplitude limiting range corresponds to the valve plate opening degree, such as 0-100%. The amplitude-limited control quantity is converted into the corresponding valve plate opening degree percentage, generating the opening degree adjustment information corresponding to the target valve plate, which is stored in the cache unit of the main control module for subsequent sending to the drive module for execution.

[0190] This embodiment achieves accurate generation of valve opening adjustment information through precise calculation of deviation information and adaptive incremental PID control algorithm, shortens the system pressure response time, controls the control overshoot within a preset range such as 5%, and avoids frequent valve adjustment through dead zone processing, thus balancing system response speed, control accuracy and equipment lifespan, and can adapt to the control requirements of vacuum cavities with different volumes and pumping speeds.

[0191] In some embodiments, the control drive module adjusts the opening of the target valve plate according to the target opening information, including: obtaining the current valve position information corresponding to the target valve plate; and the control drive module adjusting the opening of the target valve plate according to the opening adjustment information and the current valve position information.

[0192] Based on the aforementioned core control method, this embodiment further refines the valve plate opening adjustment process in step S103. By introducing closed-loop feedback of the current valve position information, precise control of the valve plate opening is achieved, ensuring that the valve plate accurately reaches the target opening and improving the accuracy of pressure control. First, before sending the opening adjustment information to the drive module, the main control module sends a valve position reading command to the drive module, triggering the drive module to collect the current valve position information of the target valve plate.

[0193] After receiving the valve position reading command through the drive module, the real-time pulse signal of the rotary encoder coaxially mounted on the motor output shaft is read through the encoder isolation circuit. In this embodiment, the rotary encoder is, for example, a 1000-line incremental photoelectric encoder. For each rotation of the motor, it outputs, for example, 1000 orthogonal pulse signals, corresponding to the full stroke of the valve plate from 0° to 90°. The valve position resolution can reach 0.09°, and the corresponding opening resolution can reach, for example, 0.1%.

[0194] The drive module counts the pulse signals of the encoder and determines the rotation direction to calculate the real-time rotation angle of the motor. Then, based on the transmission ratio of the reducer between the motor and the valve plate, it is converted into the real-time rotation angle of the valve plate, and finally converted into the corresponding valve plate opening percentage to obtain the current valve position information of the target valve plate.

[0195] Meanwhile, the drive module uploads the current valve position information to the main control module via the SPI bus. After receiving and verifying the data, the main control module obtains the current valve position information corresponding to the target valve plate, and compares the current valve position information with the target opening information to calculate the initial opening deviation.

[0196] Secondly, the main control module encapsulates the opening adjustment information (target opening), current valve position information, and preset motion control parameters into a control command, which is then sent to the drive module via the SPI high-speed bus. The motion control parameters include the motor's maximum speed, acceleration / deceleration time, and opening limit threshold, which can be configured according to the valve plate's diameter and rated torque. After receiving the control command, the drive module parses the target opening, current valve position information, and motion control parameters, calculates the opening deviation between the target opening and the current valve position, and determines the motor's rotation direction, total rotation angle, and running trajectory based on the magnitude and direction of the opening deviation.

[0197] Meanwhile, the drive module generates a speed planning curve for the motor through a built-in S-shaped acceleration and deceleration motion control algorithm to avoid mechanical shock and vibration during motor start-up and shutdown. At the same time, through a position closed-loop PID control algorithm, it compares the real-time valve position information collected by the encoder with the target opening degree in real time, and dynamically adjusts the duty cycle and frequency of the PWM drive signal to control the motor to run smoothly. The motor drives the valve plate to rotate toward the target opening degree through the reducer and drive shaft.

[0198] Throughout the opening adjustment process, the drive module collects the motor's operating current in real time and performs current limiting protection. When the current exceeds the preset threshold, the motor speed is automatically reduced to prevent the motor from stalling and burning out. At the same time, the valve position changes are monitored in real time. When the valve plate reaches the preset mechanical limit position, the motor stops running immediately to prevent the valve plate from overtraveling and damaging the valve body seals.

[0199] Finally, when the drive module detects that the real-time valve position of the valve plate has reached the dead zone of the target opening degree (such as ±0.2% opening degree preset), it immediately locks the motor drive output, maintains the current opening degree of the valve plate, and sends a feedback signal to the main control module indicating that the opening degree adjustment is complete. The main control module confirms that the valve plate has been adjusted to the target opening degree and completes the opening degree adjustment action.

[0200] This embodiment achieves precise adjustment of the valve opening by introducing dual closed-loop position control based on the current valve position information of the valve plate, significantly improving the opening control accuracy. At the same time, the S-shaped acceleration and deceleration control avoids mechanical impact between the motor and the valve plate, extends the service life of the equipment, and ensures the accuracy and stability of the cavity pressure control.

[0201] Please see Figure 7 As shown, Figure 7 This is a schematic diagram of the structure of the control device 200 for a vacuum butterfly valve provided in this application embodiment. The control device 200 is used to execute the steps of the control methods shown in the above embodiments. The control device 200 can be a single server or a server cluster, or it can be a terminal, such as a handheld terminal, a laptop computer, a wearable device, or a robot.

[0202] like Figure 7 As shown, the control device 200 for the vacuum butterfly valve includes: The pressure acquisition unit 201 is used to acquire the current pressure information of the preset cavity collected by the air pressure acquisition module.

[0203] The opening degree acquisition unit 202 is used to acquire the opening degree adjustment information corresponding to the target valve plate in the preset cavity based on the preset target pressure information and the current pressure information.

[0204] The opening adjustment unit 203 is used to control the drive module to adjust the opening of the target valve plate according to the target opening information.

[0205] The opening adjustment unit 204 is used to acquire the operating parameters and status information of the target valve plate collected by the drive module; adjust the opening adjustment information according to the operating parameters and status information; the operating parameters include at least one or more of the following: motor operating current, speed, valve plate rotation speed, and adjustment stroke; the status information includes at least one or more of the following: actual valve plate opening, motor operating status, drive module power supply status, encoder connection status, and power circuit temperature; adjusting the opening adjustment information according to the operating parameters and status information includes: performing multi-dimensional analysis on the operating parameters and status information, the multi-dimensional analysis including at least one or more of the following: calculating opening deviation, judging valve plate jamming, judging adjustment stability, and judging drive module overheating risk; executing a preset adaptive adjustment strategy on the opening adjustment information according to the analysis results corresponding to the multi-dimensional analysis, the adaptive adjustment strategy including at least one of the following: eliminating static deviation and suppressing overshoot oscillation; and sending the adjusted opening adjustment information to the drive module, the drive module correcting the opening of the target valve plate according to the adjusted opening adjustment information.

[0206] It should be noted that those skilled in the art will understand that, for the sake of convenience and brevity, the specific working process of the control device and each module of the vacuum butterfly valve described above can be referred to the corresponding content in the various embodiments of the control method described above, and will not be repeated here.

[0207] The above-described control method can be implemented as a computer program, which can be used in, for example... Figure 7 It runs on the device shown.

[0208] Please see Figure 8 , Figure 8 This is a schematic block diagram of the main control module provided in an embodiment of this application. The main control module includes a processor, a memory, and a network interface connected via a device bus, wherein the memory may include a storage medium and internal memory.

[0209] The storage medium may store operating devices and computer programs. The computer program includes program instructions, which, when executed, cause the processor to perform any control method.

[0210] The processor provides computing and control capabilities to support the operation of the entire main control module.

[0211] Internal memory provides an environment for the execution of computer programs stored in non-volatile storage media. When these computer programs are executed by a processor, the processor can perform any control method.

[0212] This network interface is used for network communication, such as sending assigned tasks. Those skilled in the art will understand that... Figure 8The structure shown is merely a block diagram of a portion of the structure related to the solution of this application and does not constitute a limitation on the terminal to which the solution of this application is applied. The specific main control module may include more or fewer components than shown in the figure, or combine certain components, or have different component arrangements.

[0213] It should be understood that the processor can be a Central Processing Unit (CPU), but it can also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. Among these, a general-purpose processor can be a microprocessor or any conventional processor.

[0214] In one embodiment, the processor is configured to run a computer program stored in memory to perform the following steps: The air pressure acquisition module collects the current pressure information of the preset cavity; Based on the preset target pressure information and the current pressure information, obtain the opening adjustment information corresponding to the target valve plate in the preset cavity; The control drive module adjusts the opening degree of the target valve plate according to the target opening degree information; The system acquires the operating parameters and status information of the target valve plate from the drive module; adjusts the opening adjustment information based on the operating parameters and status information; the operating parameters include at least one or more of the following: motor operating current, speed, valve plate rotation speed, and adjustment stroke; the status information includes at least one or more of the following: actual valve plate opening, motor operating status, drive module power supply status, encoder connection status, and power circuit temperature; adjusting the opening adjustment information based on the operating parameters and status information includes: performing multi-dimensional analysis on the operating parameters and status information, the multi-dimensional analysis including at least one or more of the following: calculating opening deviation, judging valve plate jamming, judging adjustment stability, and judging drive module overheating risk; executing a preset adaptive adjustment strategy on the opening adjustment information based on the analysis results corresponding to the multi-dimensional analysis, the adaptive adjustment strategy including at least one of the following: eliminating static deviation and suppressing overshoot oscillation; and sending the adjusted opening adjustment information to the drive module, the drive module correcting the opening of the target valve plate based on the adjusted opening adjustment information.

[0215] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, causes the processor to perform the steps of the control method provided in any embodiment of this application.

[0216] The computer-readable storage medium can be an internal storage unit of the main control module as described in the foregoing embodiments, such as the hard disk or memory of the main control module. Alternatively, the computer-readable storage medium can be an external storage device of the main control module, such as a plug-in hard disk, Smart Media Card (SMC), Secure Digital (SD) card, or Flash Card equipped on the main control module.

[0217] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A control method for a vacuum butterfly valve, applied to the main control module of a control system for the vacuum butterfly valve, wherein the control system for the vacuum butterfly valve is disposed in a preset cavity, and the control system for the vacuum butterfly valve further includes a drive module and a pressure acquisition module; characterized in that, include: The air pressure acquisition module acquires the current pressure information of the preset cavity; Based on the preset target pressure information and the current pressure information, obtain the opening adjustment information corresponding to the target valve plate in the preset cavity; The drive module is controlled to adjust the opening of the target valve plate according to the opening adjustment information; The drive module acquires the operating parameters and status information of the target valve plate, and adjusts the opening adjustment information based on the operating parameters and status information. The operating parameters include at least one or more of the following: motor operating current, speed, valve plate rotation speed, and adjustment stroke. The status information includes at least one or more of the following: actual valve plate opening, motor operating status, drive module power supply status, encoder connection status, and power circuit temperature. Adjusting the opening adjustment information based on the operating parameters and status information includes: performing multi-dimensional analysis of the operating parameters and status information, whereby the multi-dimensional analysis includes at least calculating the opening. The system considers one or more of the following: deviation, valve plate jamming / blocking, adjustment stability, and drive module overheating risk. Based on the analysis results corresponding to the multi-dimensional analysis, a preset adaptive adjustment strategy is executed on the opening adjustment information. The adaptive adjustment strategy includes at least one of eliminating static deviation and suppressing overshoot oscillation. The adjusted opening adjustment information is sent to the drive module, which corrects the opening of the target valve plate according to the adjusted opening adjustment information. The control system of the vacuum butterfly valve also includes a communication module. After the opening degree is determined, the process further includes: acquiring the status information and fault information of the control system of the vacuum butterfly valve; sending the status information and fault information to a preset terminal device through the communication module; after acquiring the status information and fault information of the control system of the vacuum butterfly valve, the process further includes: if it is determined that any one of the drive module, the air pressure acquisition module, and the communication module has failed based on the status information and fault information, the module that has not failed is identified as the normal operating module; controlling the normal operating module to execute a preset safety strategy; the module that has failed is identified as the faulty operating module; controlling the normal operating module to execute the preset safety strategy includes: disconnecting the signal interaction link between the normal operating module and the faulty operating module; generating fault alarm information corresponding to the faulty operating module; the fault alarm information includes the unique identifier information and fault type information of the faulty operating module; sending the fault alarm information to the terminal device through the communication module; upon receiving the faulty module replacement instruction sent by the terminal device in response to the fault alarm information, responding to the faulty module replacement instruction to complete the replacement of the faulty operating module; and restoring the signal interaction link after the faulty operating module has been replaced.

2. The method according to claim 1, characterized in that, The control system of the vacuum butterfly valve also includes a communication module; before acquiring the current pressure information of the preset cavity from the pressure acquisition module, it further includes: The communication module receives control commands sent by an external host computer, performs protocol parsing and verification on the control commands, and obtains the current pressure information collected by the air pressure acquisition module after the control command verification is successful.

3. The method according to claim 1, characterized in that, The step of obtaining the opening adjustment information corresponding to the target valve plate in the preset cavity based on the preset target pressure information and the current pressure information includes: Obtain the deviation information between the target pressure information and the current pressure information; The opening adjustment information is generated based on the deviation information and the preset valve plate control algorithm.

4. The method according to claim 1, characterized in that, The control of the drive module to adjust the opening of the target valve plate according to the opening adjustment information includes: Obtain the current valve position information corresponding to the target valve plate; The drive module is controlled to adjust the opening of the target valve plate according to the opening adjustment information and the current valve position information.

5. The method according to claim 1, characterized in that, Before acquiring the current pressure information of the preset cavity from the air pressure acquisition module, the method further includes: After the control system of the vacuum butterfly valve is powered on, the main control module and the drive module perform power-on self-tests respectively. After the power-on self-test is completed, a communication connection is established with the driver module according to the preset inter-board bus.

6. A control system for a vacuum butterfly valve, disposed in a preset cavity, characterized in that, It includes a main control module, a drive module, and a barometric pressure acquisition module; The main control module includes a memory and a processor; the memory is used to store a computer program; the processor is used to execute the computer program and implement the method as described in any one of claims 1 to 5 when executing the computer program.

7. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, causes the processor to implement the method as described in any one of claims 1 to 5.

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