Transfer module and substrate processing apparatus comprising the same

Abstract

Embodiments of the present invention provide a transfer module and a substrate processing apparatus including the same. The transfer module includes: a housing; a first transfer section for transferring a substrate and rotatably connected to the housing in a first rotational direction; a second transfer section for transferring a storage container containing the substrate, arranged vertically spaced from the first transfer section and rotatably connected to the housing in a direction different from the first rotational direction; a drive section connected to the first transfer section via a connecting member to provide power for rotating the first transfer section; and a transmission unit connecting the first transfer section and the second transfer section and transmitting the power to the second transfer section.

Description

Technical Field

[0001] The present invention relates to a transfer module and a substrate processing apparatus including the thereof. Background Technology

[0002] To manufacture semiconductor devices, predetermined patterns need to be formed on a substrate such as a wafer. When forming predetermined patterns on the substrate, processes such as deposition, lithography, and etching can be performed sequentially.

[0003] The aforementioned processes are performed within chambers, and transfer robots, including robotic arms, are typically used to move substrates between chambers or from buffers temporarily storing substrates to chambers. However, in substrate handling apparatuses, where there are two types of transfer objects—substrate handling and containers holding substrates (e.g., FOUP, FOSB)—at least two or more transfer robots are configured to operate separately, depending on the type and number of transfer objects. This presents problems not only in terms of occupying significant space in the semiconductor manufacturing line but also in terms of equipment investment, operating costs, and process optimization.

[0004] Existing technical documents

[0005] Patent documents

[0006] (Patent Document 0001) Korean Patent No. 10-2611093 (December 4, 2023) Summary of the Invention

[0007] Technical issues

[0008] The object of the present invention is to provide a transfer module and a substrate processing apparatus thereof that improve the space efficiency of a semiconductor manufacturing line equipped with a substrate processing apparatus, reduce equipment investment and operating costs, and enable process optimization when handling two types of transfer objects, in order to solve the above-mentioned problems.

[0009] Solution

[0010] To achieve the above objectives, a transfer module according to an embodiment of the present invention may include: a housing; a first transfer section for transferring a substrate and rotatably connected to the housing in a first rotation direction; a second transfer section for transferring a storage container containing the substrate, and arranged vertically spaced from the first transfer section and rotatably connected to the housing in a direction different from the first rotation direction; a drive section connected to the first transfer section via a connecting member to provide power for rotating the first transfer section; and a transmission unit connecting the first transfer section and the second transfer section and transmitting the power to the second transfer section.

[0011] A substrate processing apparatus according to an embodiment of the present invention may include: a storage module including a first storage section storing a substrate and a second storage section storing a storage container; a transfer module disposed on one side of the first storage section and / or the second storage section, and including a housing, a first transfer section for transferring the substrate and rotatably connected to the housing in a first rotation direction, a second transfer section for transferring the storage container containing the substrate and disposed vertically spaced from the first transfer section and rotatably connected to the housing in a direction different from the first rotation direction, a drive section connected to the first transfer section by a connecting member to provide power for rotation of the first transfer section, and a transfer unit connecting the first transfer section and the second transfer section and transmitting the power to the second transfer section; and a control section for controlling the transfer module to transfer the substrate or the storage container.

[0012] A substrate processing apparatus according to another embodiment of the present invention may include: a process chamber for performing substrate processing processes inside; a buffer module including a plurality of buffers for temporarily storing substrates; a storage module spaced apart from the buffer module and the process chamber, and including a first storage portion storing the substrate and a second storage portion storing a storage container; a transfer module disposed on one side of the first storage portion and / or the second storage portion, and including a housing including a receiving space formed inside and an opening communicating the receiving space with the outside; a first transfer portion for transferring the substrate and rotatably connected to the housing in a first rotational direction; and a transfer portion for transferring the substrate containing the substrate. The system comprises: a storage container at the bottom and a second transfer portion arranged vertically and spaced apart from the first transfer portion and rotatably connected to the housing in a direction different from the first rotation direction; a drive portion connected to the first transfer portion via a connecting member to provide power for the rotation of the first transfer portion; a transfer unit connecting the first transfer portion and the second transfer portion and transmitting the power to the second transfer portion; and a control unit controlling the transfer module to transfer the substrate and the storage container to the process chamber or the buffer module, wherein the transfer unit includes: a first rotating member connected to the connecting member and rotating in the first rotation direction. The housing further includes: a second rotating member that engages with the first rotating member and converts the first rotation direction to a second rotation direction; and a third rotating member that engages with the second rotating member and rotates in a third rotation direction; a second transfer portion that engages with the third rotating member and rotates in the third rotation direction, which is the opposite direction to the first rotation direction, when the first transfer portion rotates in the first rotation direction; the first transfer portion and the second transfer portion rotate simultaneously; the housing further includes: a partition portion disposed between the first transfer portion and the second transfer portion, which divides the opening into a first region and a second region; the first transfer portion rotates in the first rotation direction with one end fixedly connected to the connecting member and the other end protruding outward through the first region; the second transfer portion is disposed below the first transfer portion and rotates in the third rotation direction with one end fixedly connected to the transfer unit and the other end protruding outward through the second region; the storage container includes: an electronic tag including information about the substrate contained inside the storage container; the second transfer portion includes: a detection portion that identifies the electronic tag to detect information about the substrate contained inside the storage container when the storage container is moved.

[0013] Invention Effects

[0014] According to embodiments of the present invention, a transfer module and a substrate processing apparatus including the present invention can be used to transfer two types of transport objects, such as substrates and storage containers, using a single transfer module. Therefore, it is not necessary to configure multiple transfer modules according to the type or number of transport objects, and thus, since the size and installation space of the substrate processing apparatus can be reduced, limited space can be effectively utilized in substrate processing processes for semiconductor manufacturing.

[0015] Furthermore, not only does the use of a transfer module reduce the number of constituent elements of the substrate processing device, thereby reducing equipment investment and maintenance costs, but the use of a control system (control unit) to control the substrate processing device also reduces operating costs.

[0016] Furthermore, since the transfer module operates and controls automatically according to two types of transfer objects, there is no need to construct additional interface devices, and processes utilizing storage containers and substrates such as FOUP or FOSB can be combined, thereby potentially optimizing the substrate processing system. Attached Figure Description

[0017] Figure 1 This is a perspective view showing a transfer module according to an embodiment of the present invention.

[0018] Figure 2 This shows a side view. Figure 1 A side view of what the transfer module looks like.

[0019] Figure 3 This shows the observation in the I-I' direction. Figure 1 A cross-sectional view of the transfer module.

[0020] Figure 4 This is a perspective view showing a transmission unit according to an embodiment of the present invention.

[0021] Figure 5 An example of the operation of the first and second transfer units according to an embodiment of the present invention is shown schematically from above.

[0022] Figure 6 Another example of the operational state of the first and second transfer units according to an embodiment of the present invention is shown schematically from above.

[0023] Figure 7 The diagram schematically illustrates the appearance of a substrate processing apparatus including a transfer module according to an embodiment of the present invention, viewed from above.

[0024] Figure 8 This is a perspective view showing the transfer module according to the present invention in a state of being on a transfer substrate.

[0025] Figure 9 This is a perspective view showing the transfer module according to the invention in another state of the transfer substrate.

[0026] Figure 10 This is a perspective view showing the transfer module according to the present invention in a state of transfer storage container.

[0027] Figure 11 This is a perspective view showing the transfer module according to the invention in another state of the transfer storage container.

[0028] Explanation of reference numerals in the attached figures

[0029] 1: Substrate processing device

[0030] 100: Transfer Module

[0031] 110: Shell

[0032] 120: First Transfer Unit

[0033] 130: Second Transfer Section

[0034] 140: Drive Unit

[0035] 150: Transfer Unit

[0036] 160: Support platform

[0037] 200: Storage Module

[0038] 210: First Storage Department

[0039] 220: Second Storage Department

[0040] P: Storage container

[0041] W: Substrate Detailed Implementation

[0042] In the following detailed description, preferred embodiments are given with reference to the accompanying drawings, enabling those skilled in the art to readily implement the invention. However, in describing preferred embodiments in detail, detailed descriptions of related known functions or configurations are omitted where it is determined that such specific descriptions may unnecessarily obscure the essential points of the invention. Furthermore, throughout the drawings, the same reference numerals are used for parts that perform similar functions or roles. Additionally, in this specification, terms such as "upper," "above," "upper end," "lower," "below," and "lower end" are based on the accompanying drawings, and terms such as "inner" and "outer" are based on the outer edge of the corresponding constituent element, and may actually vary depending on the orientation of the elements or constituent elements.

[0043] Furthermore, throughout the specification, unless otherwise stated to the contrary, “include” a constituent element means that other constituent elements may also be included, rather than excluding other constituent elements.

[0044] Figure 1 This is a perspective view showing a transfer module according to an embodiment of the present invention. Figure 2 This shows a side view. Figure 1 A side view of what the transfer module looks like. Figure 3 This shows the observation in the I-I' direction. Figure 1 A cross-sectional view of the transfer module. Figure 4 This is a perspective view showing a transmission unit according to an embodiment of the present invention.

[0045] refer to Figures 1 to 4 The transfer module 100 can transfer the transfer objects W and P. As an example, the transfer module 100 can transport the transfer objects W and P between process chambers (not shown) disposed in the substrate processing apparatus 1. As another example, the transfer module 100 can transfer the transfer objects W and P stored in the storage module 200 of the substrate processing apparatus 1 (see reference 1). Figure 7 The substrate is then transported to the process chamber. At this point, the transported objects W and P can be substrate W or storage container P. Storage container P can hold multiple substrates W internally. For example, storage container P can be FOUP (Front Opening Unified Pod) or FOSB (Front Opening Shipping Box).

[0046] The transfer module 100 may include a housing 110, a first transfer part 120, a second transfer part 130, a drive part 140, and a transfer unit 150.

[0047] Other components of the transfer module 100 may be arranged in the housing 110. The housing 110 may be provided in various forms. As an example, as shown in the accompanying drawings, the housing 110 may be a regular hexahedron or a similar shape, but is not limited thereto.

[0048] The housing 110 may include a receiving space 111 and an opening 112. The receiving space 111 may be formed inside the housing 110. As an example, the opening 112 may be formed on a side surface of the housing 110. The receiving space 111 may communicate with the outside through the opening 112.

[0049] The housing 110 may also include a partition 113. The partition 113 can divide the opening 112 into a first region 112a and a second region 112b. As an example, the partition 113 may be in the form of a plate extending in the horizontal direction (e.g., the XY plane direction). Through the partition 113, the opening 112 can be divided into a first region 112a, which is the upper region of the partition 113, and a second region 112b, which is the lower region of the partition 113.

[0050] The housing 110 can be disposed on the support platform 160. The support platform 160 can be of various shapes. As an example, as shown in the accompanying drawings, the support platform 160 can be provided in the form of a plate with a regular hexahedral shape, but is not limited thereto.

[0051] The housing 110 can be rotatably attached to the upper end of the support 160. The housing 110 can be provided to be rotatable about a virtual first rotation axis C1 when connected to the support 160. Here, the first rotation axis C1 can be a virtual center line that passes through the center of the housing 110 and extends parallel to the vertical direction Z, which is the height direction of the housing 110.

[0052] The first transfer unit 120 can transfer the substrate W. For example, the first transfer unit 120 can transfer the substrate W between process chambers (not shown). As another example, the first transfer unit 120 can transfer the substrate W between the first storage unit 210 (see reference 1). Figure 7 The substrate W is transferred between the process chamber and the process chamber.

[0053] The first transfer section 120 can be provided in various forms. As an example, the first transfer section 120 can be in the form of a plate including a pair of support rods facing each other. The pair of support rods can be arranged to protrude forward from the first transfer section 120. In this case, if the substrate W is placed on the first transfer section 120, the first transfer section 120 can transfer the substrate W while lifting and supporting it. The first transfer section 120 can be provided with a plurality of adsorption sections 121. The second transfer section 130 can transfer the substrate W while the bottom surface of the substrate W is adsorbed and fixed by the adsorption sections 121.

[0054] The second transfer unit 130 can transfer the storage container P. The storage container P may contain at least one substrate W. For example, the second transfer unit 130 can transfer the storage container P between process chambers (not shown). As another example, the second transfer unit 130 can transfer the storage container P between the second storage unit 220 (see reference 220). Figure 7 Transfer storage container P between the process chamber and the process chamber.

[0055] The second transfer section 130 can be provided in various forms. As an example, the second transfer section 130 can be provided in the form of a plate to perform transfer while supporting the storage container P. In this case, if the storage container P is placed on the second transfer section 130, the second transfer section 130 can be transported while lifting and supporting the storage container P. In order to transfer the storage container P, the second transfer section 130 can be configured to have a larger size than the first transfer section 120. For example, in order to withstand the load of the storage container P, which is larger than the substrate W, when transferring the storage container P, the second transfer section 130 can have a thickness greater than the first transfer section 120.

[0056] The first transfer unit 120 and the second transfer unit 130 described above can be rotatably arranged in the housing 110. The specific operation of the first transfer unit 120 and the second transfer unit 130 in this case will be described later.

[0057] The drive unit 140 can provide power for rotating the first transfer unit 120 and the second transfer unit 130. As an example, the drive unit 140 may be configured to include an electric motor, but is not limited thereto.

[0058] The drive unit 140 may be disposed on the housing 110. More specifically, the drive unit 140 may be disposed at the upper end of the housing 110. In this case, the housing 110 may include a through hole formed through the upper surface of the housing 110. The through hole may communicate with the receiving space 111. The drive unit 140 may be fixedly coupled to the housing 110 in a state of being inserted through the through hole.

[0059] The drive unit 140 may include a connecting member 141. The connecting member 141 may be arranged to protrude downward from the lower end of the drive unit 140. The connecting member 141 may be rotated in a first rotational direction R1 using the power generated in the drive unit 140.

[0060] The transmission unit 150 can transmit the power generated from the drive unit 140 to the first transfer unit 120 and the second transfer unit 130. The transmission unit 150 can be of various forms. For example, the transmission unit 150 can be provided in the form of incorporating multiple rotating members. As an example, the rotating members can be gears. As an example, the transmission unit 150 can be a bevel gear formed by the meshing of multiple gears.

[0061] As one implementation method, such as Figure 3 and Figure 4 As shown, the transmission unit 150 can be configured such that the first rotating member 151, the second rotating member 152, and the third rotating member 153 are combined with each other. In this case, the first connecting portion C10 can be connected to the first rotating member 151.

[0062] The first connecting portion C10 can be fixedly engaged in a state where it is inserted through a through hole formed in the center of the first rotating member 151. The connecting member 141 can be fixedly engaged to the upper end of the first connecting portion C10, and the first transfer portion 120 can be fixedly engaged to the lower end of the first connecting portion C10.

[0063] The first rotating member 151 can rotate in the first rotation direction R1 by receiving power via the connecting member 141 and the first connecting portion C10. If the first rotating member 151 rotates, the first connecting portion C10 and the first transfer portion 120 connected thereto can also rotate together in the first rotation direction R1.

[0064] The first rotating member 151 can be engaged with the third rotating member 153 via the second rotating member 152. The third rotating member 153 can be arranged spaced apart from the first rotating member 151, facing the first rotating member 151 in the vertical direction Z. In this case, the first rotating member 151 and the third rotating member 153 can be arranged coaxially around the same virtual first rotation axis C1. In this case, the second connecting part C20 can be connected to the third rotating member 153.

[0065] The second connecting portion C20 can be fixedly engaged when it is inserted through a through hole formed in the center of the third rotating member 153. The second transfer portion 130 can be fixedly engaged to the lower end of the second connecting portion C20.

[0066] The second rotating member 152 may be arranged between the first rotating member 151 and the third rotating member 153. The second rotating member 152 may connect the first rotating member 151 and the third rotating member 153. More specifically, one end of the second rotating member 152 may engage with the first rotating member 151, and the other end of the second rotating member 152 may engage with the third rotating member 153.

[0067] In the above scenario, if the first rotating member 151 rotates in the first rotation direction R1, the second rotating member 152, which meshes with it, can rotate in the second rotation direction R2 with a virtual second rotation axis C2 perpendicular to the first rotation axis C1 as its center. Simultaneously, the third rotating member 153, which meshes with the second rotating member 152, can rotate in the third rotation direction R3 with the first rotation axis C1 as its center. The third rotation direction R3 can be the opposite direction of the first rotation direction R1. If the third rotating member 153 rotates, the second connecting portion C20 and the second transfer portion 130, which are connected to it, can also rotate together in the third rotation direction R3.

[0068] As described above, if the first rotating member 151 rotates in the first rotation direction R1, the third rotating member 153 can rotate in the third rotation direction R3 because the rotation direction is changed by the second rotating member 152. Therefore, if the first transfer unit 120 rotates in the first rotation direction R1, the second transfer unit 130 can simultaneously rotate in the third rotation direction R3. As a result, through the transfer unit 150, the first transfer unit 120 and the second transfer unit 130 can rotate simultaneously in opposite directions.

[0069] Figure 5 An example illustrating the operational state of the first and second transfer units according to an embodiment of the present invention, viewed from above, is shown schematically. Furthermore, Figure 6 Another example is schematically shown, viewed from above, of the operational state of the first and second transfer units according to an embodiment of the present invention.

[0070] refer to Figure 5 and Figure 6 The first transfer unit 120 and the second transfer unit 130 can switch between a 'waiting position' and a 'transfer position'. The transfer position can be the position where the first transfer unit 120 or the second transfer unit 130 rotates toward the substrate W or the storage container P. The waiting position can be the position before the first transfer unit 120 or the second transfer unit 130 rotates toward the substrate W or the storage container P. For example, the waiting position can be above the support stage 160.

[0071] If either the first transfer unit 120 or the second transfer unit 130 moves to the transfer position, the remaining one of the first transfer unit 120 and the second transfer unit 130 can move to the waiting position.

[0072] As an example, such as Figure 5 As shown, in order to transfer the substrate W, the first transfer unit 120 can be moved to the transfer position. In this case, the first transfer unit 120 can rotate and move about the first rotation axis C1 along the first rotation direction R1 toward the first storage unit 210 where the substrate W is stored. If the first transfer unit 120 rotates, the second transfer unit 130 can simultaneously rotate about the first rotation axis C1 in the third rotation direction R3. Therefore, when the first transfer unit 120 is arranged in the transfer position, the second transfer unit 130 can be arranged in the waiting position.

[0073] As another example, such as Figure 6As shown, in order to transfer the storage container P, the second transfer unit 130 can be moved to the transfer position. In this case, the second transfer unit 130 can rotate and move about the first rotation axis C1 along the third rotation direction R3 toward the second storage unit 220 containing the storage container P. Thus, if the second transfer unit 130 rotates, the first transfer unit 120 can simultaneously rotate about the first rotation axis C1 in the first rotation direction R1. Therefore, when the second transfer unit 130 is arranged in the transfer position, the first transfer unit 120 can be arranged in the waiting position.

[0074] In the above case, the first transfer section 120 and the second transfer section 130 can be arranged to be separated from each other by the partition 113. More specifically, one of the first transfer section 120 and one of the second transfer section 130 can be arranged in the first region 112a and the second region 112b of the opening 112.

[0075] As an example, as shown in the accompanying drawings, the first transfer part 120 can be arranged in the first region 112a, and the second transfer part 130 can be arranged in the second region 112b. In this case, the first transfer part 120 can be connected to the first connecting part C10 at one end, and the other end can extend outward from the housing 110 through the first region 112a. In this arrangement, the first transfer part 120 can rotate and move in the first rotation direction R1 or its opposite direction R1'. The second transfer part 130 can be connected to the second connecting part C20 at one end, and the other end can extend outward from the housing 110 through the second region 112b. In this arrangement, the second transfer part 130 can rotate and move in the third rotation direction R3 or its opposite direction R3'.

[0076] Thus, since the first transfer section 120 and the second transfer section 130 are respectively arranged in regions 112a and 112b that are separated in the vertical direction Z by the partition section 113, it is possible to prevent collisions and other interferences from occurring during the rotation of the transfer sections 120 and 130 together.

[0077] Furthermore, although only the embodiment with the transfer position on the left side of the housing 110 is shown in the accompanying drawings, the present invention is not limited thereto. The transfer position may also be located on the right side of the housing 110. In this case, after the housing 110 rotates about the first rotation axis C1 in the third rotation direction R3, the first transfer unit 120 or the second transfer unit 130 may rotate and move toward the transfer position as described above.

[0078] Figure 7 The illustration schematically shows what a substrate processing apparatus including a transfer module looks like from above, according to an embodiment of the present invention. Figure 8This is a perspective view showing the transfer module according to the present invention in a state of being on a transfer substrate. Figure 9 This is a perspective view showing the transfer module according to the invention in another state of the transfer substrate. Figure 10 This is a perspective view showing the transfer module according to the invention in a state of being in a transfer storage container. Figure 11 This is a perspective view showing the transfer module according to the invention in another state of the transfer storage container.

[0079] refer to Figures 7 to 11 The substrate processing apparatus 1 may include a transfer module 100 and a storage module 200. The storage module 200 may include a first storage section 210 where the substrate W is stored and a second storage section 220 where the storage container P is stored. In addition, the substrate processing apparatus 1 may also include at least one process chamber (not shown) and a buffer module (not shown).

[0080] The first storage section 210 may be a placement stage (not shown) or a loading port (not shown) where multiple substrates W are placed. As an example, the substrates W may be arranged to be housed within a wafer cassette (not shown). The second storage section 220 may be a placement stage (not shown) or a loading port (not shown) where multiple storage containers P are placed. The interior of the storage container P may house multiple substrates W.

[0081] The transfer module 100 can be arranged on one side of the storage module 200 to transfer the substrate W or the storage container P. For example, the transfer module 100 can be arranged on one side of the first storage section 210 and / or the second storage section 220.

[0082] For example, the transfer module 100 can transport the substrate W or storage container P temporarily stored in the first storage section 210 or the second storage section 220 to the process chamber. The substrate W can be removed from the wafer cassette or storage container P before being transferred into the process chamber. In the process chamber, processing techniques (hereinafter, substrate processing techniques) can be performed on the substrate W. For example, substrate processing techniques may include deposition processes, lithography processes, and etching processes.

[0083] As another example, the transfer module 100 can transport the substrate W or storage container P temporarily stored in the first storage section 210 or the second storage section 220 to a buffer module (not shown) that serves as additional storage space. The buffer module may include multiple buffers for temporarily storing the substrate W.

[0084] Refer again Figure 7Multiple first storage units 210 can be configured and arranged in a row along a direction Y (hereinafter, the arrangement direction). Multiple second storage units 220 can also be configured and arranged in a row along the aforementioned arrangement direction Y. Therefore, the first storage units 210 and the second storage units 220 can be arranged parallel to each other along the arrangement direction Y. However, the present invention is not limited to this, and the first storage units 210 and the second storage units 220 can be arranged in other configurations.

[0085] For ease of explanation, the following description will focus on an embodiment where the first storage section 210 and the second storage section 220 are arranged parallel to each other along the arrangement direction Y. In this case, a guide rail G extending along the arrangement direction Y can be arranged between the first storage section 210 and the second storage section 220. The transfer module 100 can be provided to be connected to the guide rail G and capable of horizontal movement along the arrangement direction Y. For this purpose, the transfer module 100 may include a drive motor (not shown).

[0086] Alternatively, as another example, a separate transfer device (not shown) for transporting the transfer module 100 can be arranged between the first storage section 210 and the second storage section 220. The transfer device can hold the transfer module 100 and move it along the arrangement direction Y, or move it to the process chamber or buffer module. For example, the transfer device can be a crane.

[0087] The substrate processing apparatus 1 may also include a control unit (not shown). The control unit can control the operation of the first transfer unit 120 and the second transfer unit 130. For example, the control unit may be implemented as a circuit board mounted in a control computer of the substrate processing apparatus 1, a computer chip mounted on the circuit board, or software embedded in the computer chip or embedded in the control computer.

[0088] More specifically, as described above, the control unit can control the transfer module 100 to move horizontally back and forth along the arrangement direction Y. Furthermore, if the transfer module 100 moves to a position facing any one of the plurality of first storage units 210 and the plurality of second storage units 220, the control unit can control the first transfer unit 120 or the second transfer unit 130 to rotate and move to the transfer position.

[0089] For example, when the transfer module 100 is handling a single substrate W, the control unit can move the transfer module 100 to a position facing either of the first storage units 210. Once the transfer module 100 has completed moving to the corresponding position, then... Figure 5 As shown, the control unit can operate the drive unit 140, causing the first transfer unit 120 to rotate along the first rotation direction R1 to be positioned at the transfer position. If the first transfer unit 120 reaches the transfer position, then... Figure 8 As shown, the substrate W can be placed on the upper surface of the first transfer section 120.

[0090] After the substrate W is placed on the first transfer unit 120, the control unit can control the drive unit 140 to cause the first transfer unit 120 supporting the substrate W to rotate and move in the opposite direction R1' (i.e., the third rotation direction R3) to the first rotation direction R1. Therefore, as Figure 9 As shown, the substrate W can be ejected from the first storage unit 210 via the first transfer unit 120. As an example, the substrate W can be moved to a waiting position while supported by the first transfer unit 120.

[0091] As another example, when the transfer module 100 transports a storage container P containing multiple substrates W, the control unit can move the transfer module 100 to a position facing any of the second storage units 220. Once the transfer module 100 has completed moving to the corresponding position, then... Figure 6 As shown, the control unit can operate the drive unit 140 to rotate the first transfer unit 120 in the opposite direction R1' of the first rotation direction R1. Therefore, the second transfer unit 130 can rotate and move in the third rotation direction R3 to be positioned at the transfer position. If the second transfer unit 130 reaches the transfer position, then... Figure 10 As shown, the storage container P can be placed on the upper surface of the second transfer unit 130.

[0092] After the storage container P is placed on the second transfer unit 130, the control unit can control the first transfer unit 120 to rotate again in the first rotation direction R1. Therefore, the second transfer unit 130 supporting the storage container P can rotate and move in the third rotation direction R3. Thus, as... Figure 11 As shown, the storage container P can be ejected from the second storage unit 220 via the second transfer unit 130. As an example, the storage container P can be moved to a waiting position while supported by the second transfer unit 130.

[0093] If the substrate W or storage container P is removed from the storage module 200 as described above, the control unit can control the transfer module 100 to move toward the process chamber or buffer module. Afterwards, the substrate W or storage container P can be transported to the buffer module via the transfer module 100 for re-storage in the buffer, or, after being transported to the process chamber, a processing procedure for the substrate W can be performed within the process chamber.

[0094] In addition, when the second transfer unit 130 transports the storage container P, the control unit can identify the type of the storage container P that is being transported or the substrate W contained in the storage container P.

[0095] Refer again Figure 5 and Figure 6 The storage container P may include an electronic tag (not shown). The electronic tag is used to identify the type of substrate W contained within the storage container P, and may be provided as RFID, barcode, or QR code, etc. The electronic tag may be disposed on the lower surface of the storage container P. As an example, the electronic tag may be displayed in the central portion of the lower surface of the storage container P, but is not limited thereto.

[0096] The second transfer unit 130 may include a detection unit 131. The detection unit 131 may be a reader for identifying information about the substrate W from the aforementioned electronic tag. The detection unit 131 may be arranged on the upper surface of the second transfer unit 130. More specifically, the detection unit 131 may be arranged at a position corresponding to the position of the electronic tag. Thus, if the storage container P is placed on the second transfer unit 130 and the lower surface of the storage container P contacts the upper surface of the protruding end of the second transfer unit 130, the detection unit 131 and the electronic tag may be arranged overlapping each other.

[0097] The detection unit 131 can identify substrate information, such as type, of the substrate W contained in the corresponding storage container P from the electronic tag on the storage container P during transfer. The detection unit 131 can transmit the identified substrate information to the control unit. The control unit can move the transfer module 100 to the location where the corresponding substrate W should be transported (e.g., a process chamber or buffer module) based on the received substrate information.

[0098] Thus, the type of storage container P and the substrate W contained in the storage container P can be identified by the detection unit 131, and the transfer module 100 is automatically controlled based on this to transfer to the required position of the corresponding storage container P.

[0099] According to the embodiments of the present invention described above, the transfer module 100 and the substrate processing apparatus 1 including it can be used to transfer two types of transport objects, such as a substrate W and a storage container P, using only one transfer module 100. Therefore, it is not necessary to configure multiple transfer modules 100 according to the type or number of transport objects, and thus, since the size and installation space of the substrate processing apparatus 1 can be reduced, limited space can be effectively utilized in substrate processing processes for semiconductor manufacturing.

[0100] Furthermore, not only does the use of a transfer module 100 reduce the number of components constituting the substrate processing apparatus 1, thereby reducing equipment investment and maintenance costs, but the use of a control system (control unit) to control the substrate processing apparatus 1 also reduces operating costs.

[0101] Furthermore, since the transfer module 100 operates and controls automatically according to two types of transfer objects, there is no need to construct an additional interface device, and the processes utilizing storage containers P such as FOUP or FOSB and substrate W can be combined, thereby aiming to optimize the substrate processing system.

[0102] Although the above embodiments have described the substrate processing apparatus of the present invention as applicable to photolithography processes, the present invention is not limited thereto, and it will be apparent to those skilled in the art that the present invention is also applicable to various processes such as substrate etching, testing, and packaging, and these also fall within the scope of the present invention.

Claims

1. A transfer module, comprising: case; A first transfer section, a transfer substrate, and rotatably connected to the housing in a first rotational direction; The second transfer section transfers the storage container containing the substrate, is arranged vertically spaced from the first transfer section, and is rotatably connected to the housing in a direction different from the first rotation direction; The drive unit is connected to the first transfer unit via a connecting member to provide power for the rotation of the first transfer unit; as well as The transmission unit connects the first transfer unit and the second transfer unit, and transmits the power to the second transfer unit.

2. The transfer module according to claim 1, wherein, The transmission unit includes: A first rotating member is connected to the connecting member and rotates in the first rotation direction; The second rotating member engages with the first rotating member and converts the first rotation direction into the second rotation direction; and The third rotating member engages with the second rotating member and rotates in the third rotating direction.

3. The transfer module according to claim 2, wherein, The second transfer part is combined with the third rotating member, and rotates in the third rotating direction, which is the opposite direction to the first rotating direction, when the first transfer part rotates in the first rotating direction.

4. The transfer module according to claim 3, wherein, The first transfer unit and the second transfer unit rotate simultaneously.

5. The transfer module according to claim 1, wherein, The housing includes an internal receiving space and an opening disposed on the side surface of the housing and communicating the receiving space with the outside.

6. The transfer module according to claim 5, wherein, One end of the first transfer portion is fixedly connected to the connecting member, and the other end extends outward from the opening into the housing. The second transfer part is arranged below the first transfer part, with one end fixedly connected to the transfer unit and the other end protruding outward from the housing through the opening.

7. The transfer module according to claim 6, wherein, The housing also includes: A partition is arranged between the first transfer section and the second transfer section, and divides the opening into a first region and a second region.

8. The transfer module according to claim 7, wherein, With the other end of the first transfer section protruding outward from the opening through the first region, the first transfer section rotates in the first rotational direction. With the other end of the second transfer portion protruding outward from the opening through the second region, the second transfer portion rotates in a third rotation direction that is the opposite of the first rotation direction.

9. A substrate processing apparatus, comprising: The storage module includes a first storage section storing a substrate and a second storage section storing a storage container; A transfer module, disposed on one side of the first storage section and / or the second storage section, includes: a housing; a first transfer section for transferring the substrate and rotatably connected to the housing in a first rotation direction; a second transfer section for transferring the storage container containing the substrate, disposed vertically spaced from the first transfer section and rotatably connected to the housing in a direction different from the first rotation direction; a drive section connected to the first transfer section via a connecting member to provide power for rotation of the first transfer section; and a transmission unit connecting the first transfer section and the second transfer section and transmitting the power to the second transfer section; and The control unit controls the transfer module to transfer the substrate or the storage container.

10. The substrate processing apparatus according to claim 9, wherein, The transmission unit includes: A first rotating member is connected to the connecting member and rotates in the first rotation direction; The second rotating member engages with the first rotating member and converts the first rotation direction into the second rotation direction; and The third rotating member engages with the second rotating member and rotates in the third rotating direction.

11. The substrate processing apparatus according to claim 10, wherein, The second transfer part is combined with the third rotating member, and rotates in the third rotating direction, which is the opposite direction to the first rotating direction, when the first transfer part rotates in the first rotating direction.

12. The substrate processing apparatus according to claim 11, wherein, The first transfer unit and the second transfer unit rotate simultaneously.

13. The substrate processing apparatus according to claim 9, wherein, The housing includes an internal receiving space and an opening disposed on the side surface of the housing and communicating the receiving space with the outside.

14. The substrate processing apparatus according to claim 13, wherein, One end of the first transfer portion is fixedly connected to the connecting member, and the other end extends outward from the opening into the housing. The second transfer part is arranged below the first transfer part, with one end fixedly connected to the transfer unit and the other end protruding outward from the housing through the opening.

15. The substrate processing apparatus according to claim 14, wherein, The housing also includes: A partition is arranged between the first transfer section and the second transfer section, and divides the opening into a first region and a second region.

16. The substrate processing apparatus according to claim 15, wherein, With the other end of the first transfer section protruding outward from the opening through the first region, the first transfer section rotates in the first rotational direction. With the other end of the second transfer portion protruding outward from the opening through the second region, the second transfer portion rotates in a third rotation direction that is the opposite of the first rotation direction.

17. The substrate processing apparatus according to claim 9, wherein, The storage container includes: Electronic tags, including information about the substrate housed inside the storage container, The second transfer unit includes: The detection unit identifies the electronic tag when the storage container is being moved to detect information about the substrate contained in the storage container.

18. The substrate processing apparatus according to claim 17, wherein, The control unit controls the movement and rotation of the transfer module based on information about the substrate detected by the detection unit.

19. A substrate processing apparatus, comprising: The process chamber is where substrate processing processes are performed. The cache module includes multiple caches for temporary storage substrates; The storage module is arranged separately from the buffer module and the process chamber, and includes a first storage section storing a substrate and a second storage section storing a storage container; A transfer module, disposed on one side of the first storage section and / or the second storage section, includes: a housing, including an internal receiving space and an opening communicating the receiving space with the outside; a first transfer section for transferring the substrate and rotatably connected to the housing in a first rotation direction; a second transfer section for transferring the storage container containing the substrate, disposed vertically spaced from the first transfer section and rotatably connected to the housing in a direction different from the first rotation direction; a drive section connected to the first transfer section via a connecting member and providing power for rotation of the first transfer section; and a transmission unit connecting the first transfer section and the second transfer section and transmitting the power to the second transfer section; and The control unit controls the transfer module to transfer the substrate and the storage container to the process chamber or the buffer module. The transmission unit includes: a first rotating member connected to the connecting member and rotating in the first rotation direction; a second rotating member engaged with the first rotating member and converting the first rotation direction to a second rotation direction; and a third rotating member engaged with the second rotating member and rotating in the third rotation direction. The second transfer part is combined with the third rotating member, and when the first transfer part rotates in the first rotating direction, it rotates in the third rotating direction, which is the opposite direction to the first rotating direction. The first transfer part and the second transfer part rotate simultaneously. The housing further includes a partition, disposed between the first transfer portion and the second transfer portion, which divides the opening into a first region and a second region. The first transfer portion rotates in the first rotational direction with one end fixedly connected to the connecting member and the other end protruding outward from the housing through the first region. The second transfer part is arranged below the first transfer part, and rotates in the third rotational direction with one end fixedly connected to the transfer unit and the other end protruding outward from the housing through the second region. The storage container includes: an electronic tag containing information about the substrate housed inside the storage container. The second transfer unit includes a detection unit that identifies the electronic tag when the storage container is being moved, in order to detect information about the substrate contained within the storage container.

20. The substrate processing apparatus according to claim 19, wherein, The control unit controls the movement and rotation of the transfer module based on information about the substrate detected by the detection unit.

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