Data updating method of radio frequency power supply, radio frequency power supply and radio frequency plasma power supply system

Abstract

This application discloses a data update method for radio frequency (RF) power supplies, an RF power supply, and an RF plasma power supply system. The data update method is used to update the data of multiple RF power supplies and includes the following steps: acquiring the same data to be updated synchronously by multiple RF power supplies; establishing a connection between a server and multiple RF power supplies, and simultaneously transmitting the same data to be updated to the memory of multiple RF power supplies using a fast transfer port; each RF power supply, based on the data to be updated, synchronously updating the same data of multiple RF power supplies. This application achieves synchronous updates of the same data of multiple RF power supplies by acquiring the same data to be updated synchronously by multiple RF power supplies, establishing a connection between a server and multiple RF power supplies, and simultaneously transmitting the same data to be updated to the memory of multiple RF power supplies using a fast transfer port. This eliminates the need for repetitive operations when multiple RF power supplies need to update the same data.

Description

Technical Field

[0001] This application relates to the field of radio frequency power supply technology, and in particular to a data update method for radio frequency power supply, radio frequency power supply and radio frequency plasma power supply system. Background Technology

[0002] Radio frequency (RF) power supplies, as power electronic devices that convert AC mains power into high-frequency AC power, are widely used in semiconductor manufacturing, plasma processing, medical equipment, communications, and many other fields. Their operational stability and functional versatility directly affect the performance and product quality of downstream equipment. As the application scenarios for RF power supplies continue to expand, user requirements for their functionality are becoming increasingly complex, necessitating regular data updates to optimize functions, fix vulnerabilities, and adapt to new application scenarios.

[0003] Currently, common RF power supply version updates use firmware to completely overwrite all data. However, the actual amount of data that needs to be updated in an RF power supply version update is limited. As a result, the RF power supply not only updates the required data but also updates duplicate data during the version update process, wasting resources and causing the RF power supply to take a long time to update, which affects the operation of the RF power supply. Furthermore, overwriting all data is done using an external computer connected through a regular network port. When multiple RF power supplies need to update the same data, the operation needs to be repeated multiple times. Summary of the Invention

[0004] The purpose of this application is to provide a data update method for radio frequency (RF) power supplies, an RF power supply, and an RF plasma power supply system, which can achieve selective data updates, improve the update efficiency of RF power supplies, save resources, and eliminate the need for repetitive operations when multiple RF power supplies need to update the same data.

[0005] This application discloses a data update method for an RF power supply, used to update the data of various functional components of the RF power supply. The data update method includes the following steps: Step S1: Obtain the same data to be updated from multiple RF power supplies that need to be updated synchronously; Step S2: Establish a connection between the server and multiple RF power supplies, and use the fast transfer port to simultaneously transmit the same data to be updated to the memory of multiple RF power supplies; Step S3: Each RF power supply rewrites the original data in its own functional component to be updated according to the data to be updated; and / or, according to the data to be updated, adds the data to be updated corresponding to the functional component to be updated of the RF power supply, so as to realize the synchronous update of the same data of multiple RF power supplies. The data to be updated refers only to the functional component data of the RF power supply, and does not modify the core data or user settings of the RF power supply.

[0006] Optionally, the data update method further includes an instruction triggering step: after the server obtains the data update instruction from the user terminal, it performs the operation of synchronously sending the same data to be updated to multiple radio frequency power supplies. The data update instruction is used to specify the functional component to be updated and the content of the data to be updated.

[0007] Optionally, in step S1, duplicate data to be updated stored on external devices is deduplicated to remove redundant data; at the same time, a checksum is added to the data to be updated. The checksum is used to verify the validity of the data to be updated in step S2. If the checksum does not match, the data to be updated is determined to be invalid, and subsequent update operations are refused.

[0008] Optionally, the data update method further includes a supplementary update step: when it is necessary to update specific functional components of a single or partial RF power supply individually, an external computer is connected to the corresponding RF power supply through a regular network port, the data to be updated is obtained using the regular network port, and the data of the specific functional components of the RF power supply is rewritten and / or added. The data transmission volume of the regular network port is greater than that of the fast transfer port.

[0009] Optionally, the data update method further includes the following steps: Each RF power supply executes update result feedback logic, generates update result data, and feeds it back to the external device through a regular network port. The external device executes result aggregation and processing logic to complete the statistics and anomaly handling of all RF power supply update statuses. The specific exception handling logic includes: the external device summarizes the update results of all RF power supplies and filters out the RF power supplies that failed to update; for the RF power supplies that failed to update, the pre-processed data to be updated is resent, triggering the repeated execution of the processing logic of steps S2 to S3 until all RF power supplies are updated; if the repeated update times exceed the preset threshold and still fail, the abnormal device is marked and feedback is sent to the user.

[0010] Optionally, the fast transfer port is connected between the sensor and the FPGA, the sensor is connected to the FPGA, and the fast transfer port transmits the raw data detected by the sensor that has not been processed by the FPGA; at the same time, the fast transfer port is directly connected to the memory, and the data to be updated is directly transmitted to the memory through the fast transfer port. Each RF power supply's processor first rewrites the corresponding software data of the FPGA in its own memory, then executes the data synchronization processing logic to synchronize the rewritten software data to the FPGA's own attached memory. After synchronization is completed, the data consistency between the two memories is verified to ensure that the FPGA functions normally.

[0011] This application discloses a data update method for an RF power supply. The RF power supply includes a processor, a memory, a standard network port, and a fast transfer port. The processor, the standard network port, and the fast transfer port are all electrically connected to the memory. Both the standard network port and the fast transfer port are capable of transmitting data, but their data transmission capabilities differ. The data update method includes: Step S011: During the RF power-on process, the processor obtains a data update instruction; Step S002: The processor determines the correspondence between the data update instruction and the ordinary network port and the fast transfer port based on the data update instruction; Step S0031: If the processor determines that the data update instruction corresponds to both the ordinary network port and the ordinary network port, the processor obtains the data to be updated from the external device connected to the ordinary network port; Step S0032: If the processor determines that the data update instruction corresponds to the fast transfer port, the processor obtains the data to be updated from the server connected to the fast transfer port; Step S0033: If the processor determines that the data update instruction corresponds to both the ordinary network port and the fast transfer port, the processor first obtains a part of the data to be updated from the server connected to the fast transfer port, and then obtains the other part of the data to be updated from the external device connected to the ordinary network port. Step S004: The processor writes the data to be updated into the memory or changes the data originally stored in the memory according to the data to be updated.

[0012] Optionally, the fast transfer port is directly connected to the memory, or the fast transfer port is connected to the memory via the FPGA.

[0013] This application also discloses an RF power supply, which includes a memory, a processor, a fast transfer port, and multiple functional components. The processor is configured to execute the data update method of the RF power supply as described above. The fast transfer port is used to connect to a server to receive batches of data to be updated. At least one of the functional components is connected to the RF power supply motherboard via a cold-plug method. The memory stores the original data, user-defined data, initial setting data, and data to be updated corresponding to each functional component.

[0014] Optionally, the RF power supply also includes a standard network port, an FPGA, and a sensor. The standard network port is used to connect to an external computer to receive individually updated data. The FPGA is used to implement sampling, data processing, and analog-to-digital conversion functions. The sensor is directly connected to the FPGA to detect the operating signal of the RF power supply and transmit it to the FPGA. The fast transfer port is connected between the sensor and the FPGA to transmit the sensor's raw data, and the fast transfer port is directly connected to the memory to realize the direct transmission of the data to be updated.

[0015] This application also discloses a radio frequency plasma power supply system, which includes a radio frequency power supply, a matching unit, and a plasma chamber as described above; the power signal of the radio frequency power supply is output to the matching unit, and the matching unit performs impedance matching on the power signal and then transfers the power signal to the load of the plasma chamber.

[0016] Compared to existing methods that rely on external computers to completely rewrite data for RF power supply version updates, this application obtains the same update data that needs to be updated synchronously for multiple RF power supplies; establishes a connection between a server and multiple RF power supplies, and simultaneously transmits the same update data to the memory of multiple RF power supplies using a fast transfer port; each RF power supply rewrites the original data in its own update-related functional components based on the update data; and / or, based on the update data, adds update data corresponding to the update-related functional components of the RF power supply, thereby achieving synchronous updates of the same data for multiple RF power supplies. This not only enables selective data updates, improving the update efficiency of RF power supplies and saving resources, but also eliminates the need for repetitive operations when multiple RF power supplies need to update the same data, saving update time. Attached Figure Description

[0017] The accompanying drawings, which form part of the specification, are used to provide a further understanding of the embodiments of this application and illustrate the implementation methods of this application, together with the textual description, to explain the principles of this application. Obviously, the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any creative effort. In the drawings: Figure 1 This is a schematic flowchart of the data update method according to the first embodiment of this application; Figure 2 This is a schematic diagram of the radio frequency power supply module according to the second embodiment of this application; Figure 3 This is a schematic flowchart of the data update method according to the second embodiment of this application; Figure 4 This is a schematic flowchart of the data update method according to the third embodiment of this application; Figure 5 This is a schematic diagram of the radio frequency power supply module according to the fourth embodiment of this application; Figure 6 This is a schematic diagram of the radio frequency power supply module according to the fifth embodiment of this application; Figure 7 This is a schematic diagram of another radio frequency power supply module according to the fifth embodiment of this application; Figure 8 This is a schematic diagram of the radio frequency plasma power supply system according to the sixth embodiment of this application.

[0018] Among them, 100 is the radio frequency power supply; 110 is the memory; 120 is the processor; 130 is the functional component; 131 is the first functional component; 132 is the second functional component; 133 is the FPGA; 140 is the interface; 141 is the fast transfer port; 142 is the ordinary network port; 150 is the sensor; 200 is the external device; 210 is the server; 300 is the radio frequency plasma power supply system; 310 is the matching unit; and 320 is the plasma chamber. Detailed Implementation

[0019] It should be understood that the terminology, specific structural and functional details used herein are merely for describing particular embodiments and are representative. However, this application may be implemented in many alternative forms and should not be construed as being limited to the embodiments set forth herein.

[0020] The present application will now be described in detail with reference to the accompanying drawings and optional embodiments.

[0021] like Figure 1 As shown, as an embodiment of this application, a data update method for an RF power supply is disclosed, referring to... Figure 1 and Figure 2 As shown, the data update method is used to update the data of multiple radio frequency power supplies, and the data update method includes the following steps: Step S1: Obtain the same data to be updated from multiple RF power supplies that need to be updated synchronously; Step S2: Establish a connection between the server and multiple RF power supplies, and use the fast transfer port to simultaneously transmit the same data to be updated to the memory of multiple RF power supplies; Step S3: Each RF power supply rewrites the original data in its own functional component to be updated according to the data to be updated; and / or, according to the data to be updated, adds the data to be updated corresponding to the functional component to be updated of the RF power supply, so as to realize the synchronous update of the same data of multiple RF power supplies. In this embodiment, before updating multiple RF power supplies, one or more functional components in the RF power supply that need data updates are first identified. Then, the update data corresponding to the one or more update components is obtained, thus acquiring the same update data that needs to be updated synchronously across multiple RF power supplies. A server establishes a communication connection with the fast transfer ports of multiple RF power supplies via a dedicated connector. The server initiates a data transmission program, using the fast transfer ports to simultaneously transmit the organized, identical update data to the memory of multiple RF power supplies. This eliminates the need to connect each RF power supply to an external computer via a standard network port, avoiding repetitive operations. The processor of each RF power supply reads the update data received in its memory, compares it with the original operating parameters of its own power amplifier module, and if a difference is found between the original data and the update data, it rewrites the original data of its own power amplifier module. If multiple RF power supplies have added a power adjustment submodule (an update component), the processor simultaneously adds the corresponding operating data of that submodule to the memory based on the update data, ultimately achieving synchronous updates of the same data across all RF power supplies. Compared to the traditional method of updating one by one via a standard network port, the update efficiency is significantly improved, greatly reducing the repetitive workload of staff.

[0022] The data to be updated only refers to the functional component data of the RF power supply. The same FPGA functional data is updated in batches without changing the core data and user settings of the RF power supply. This avoids the device malfunction caused by accidental modification of core data in the existing firmware full rewrite method. At the same time, it reduces the transmission and writing of redundant data, saves storage resources and transmission bandwidth, and reduces device energy consumption.

[0023] As a second embodiment of this application, it is a further refinement and improvement of the first embodiment described above, with reference to... Figures 2 to 3 As shown, the RF power supply includes a processor, a memory, a standard Ethernet port, and a fast transfer port. The processor, standard Ethernet port, and fast transfer port are all electrically connected to the memory. Both the standard Ethernet port and the fast transfer port can transmit data, but their data transmission capabilities differ. The data update method includes: Step S011: During the RF power-on process, the processor obtains a data update instruction; Step S002: The processor determines the correspondence between the data update instruction and the ordinary network port and the fast transfer port based on the data update instruction; Step S0031: If the processor determines that the data update instruction corresponds to both the ordinary network port and the ordinary network port, the processor obtains the data to be updated from the external device connected to the ordinary network port; Step S0032: If the processor determines that the data update instruction corresponds to the fast transfer port, the processor obtains the data to be updated from the server connected to the fast transfer port; Step S0033: If the processor determines that the data update instruction corresponds to both the ordinary network port and the fast transfer port, the processor first obtains a part of the data to be updated from the server connected to the fast transfer port, and then obtains the other part of the data to be updated from the external device connected to the ordinary network port. Step S004: The processor writes the data to be updated into the memory or changes the data originally stored in the memory according to the data to be updated.

[0024] Generally, the fast transfer port is directly connected to the memory, or the fast transfer port is connected to the memory through the FPGA. In step S011, when the data volume is large, it is transmitted through the ordinary network port; when the data volume is small, it is transmitted through the fast transfer port. If multiple RF power supplies need to be updated and the data volume is small, it is transmitted through the fast transfer port. In step S0033, as the action execution subject is the RF power supply, the premise for each data update is one. The server can transmit multiple data to different RF power supplies at the same time. However, for a single RF power supply, it only obtains the data it needs, which is still a single data supply.

[0025] Furthermore, during the RF power-on process, an RF power data update instruction is obtained. This instruction includes a first type instruction and a second type instruction. According to the first type instruction, first update data is obtained from the network port, rewriting and / or updating the data in the memory. According to the second type instruction, second update data is obtained from the fast port, rewriting and / or updating the data in the memory. In this embodiment, data transmission is achieved through port switching. The server first executes the batch update operation corresponding to the second type instruction: a connection is established with the fast transfer ports of multiple RF power supplies through a connector, and the same FPGA data to be updated is simultaneously transmitted to the memory 110 of the multiple RF power supplies using the fast transfer port 141. Simultaneously, after another RF power supply requiring separate updates is powered on, its processor 120 obtains the first update data. One type of instruction automatically connects to the ordinary network port 142, and the server 210 transmits the data to be updated from the fault diagnosis module to the memory 110 of the RF power supply through the ordinary network port 142. For the remaining multiple RF power supplies that do not require updating, the processor 120 does not receive the update instruction and does not initiate any port communication connection, maintaining normal operation. This port switching logic achieves flexible adaptation between batch updates and individual updates without the need for manual port switching. The processor 120 automatically switches between the ordinary network port 142 and the fast transfer port 141 according to the instruction, which not only ensures the efficiency of batch updates but also meets the needs of individual updates for single / partial RF power supplies. This solves the problem of the existing technology where the port function is limited and cannot accommodate both update scenarios, improving operational flexibility.

[0026] like Figure 4As shown, the third embodiment of this application is a further improvement on the first embodiment described above. In step S1, the same data to be updated stored on the external device is deduplicated to remove redundant data. At the same time, a verification code is added to the data to be updated. The verification code is used to verify the validity of the data to be updated in step S2. If the verification code does not match, the data to be updated is determined to be invalid, and the subsequent update operation is refused.

[0027] Suppose that staff are organizing sensor data (identical data to be updated) from 30 RF power supplies that need to be updated synchronously on the server. The server initiates a data preprocessing program to deduplicate the data stored on external devices, removing redundant data and reducing data transmission volume. Simultaneously, a unique checksum (e.g., using CRC32) is added to each set of data to be updated, with each checksum corresponding to a specific data point for subsequent data validity verification. The server then establishes a connection with the fast transfer port 141 of the 30 RF power supplies via a connector, and simultaneously transmits the preprocessed identical data (including the checksum) to the storage locations of the 30 RF power supplies using fast transfer port 141. The processor 120 of each RF power supply receives data, extracts the checksum, and compares it with the checksum generated by its own preset checksum algorithm. If the checksums match, the data to be updated is deemed valid, and subsequent update operations are performed. However, two RF power supplies experienced packet loss during data transmission, resulting in a checksum mismatch. These were deemed invalid, and subsequent update operations were refused, with the data marked as abnormal. This reduces data transmission volume and memory usage, improving data transmission efficiency. The checksum verification mechanism effectively identifies invalid data (packet loss, tampering, format errors), preventing device malfunctions caused by invalid data writing, reducing data update error rates, and improving the accuracy and security of data updates.

[0028] The data update method further includes the following steps: Step S4: Each RF power supply executes the update result feedback logic, generates update result data, and feeds it back to the external device through the ordinary network port 142. The external device executes the result summary processing logic to complete the statistics and anomaly handling of the update status of all RF power supplies. The specific exception handling logic includes: the external device summarizes the update results of all RF power supplies and filters out the RF power supplies that failed to update; for the RF power supplies that failed to update, the pre-processed data to be updated is resent, triggering the repeated execution of the processing logic of steps S2 to S3 until all RF power supplies are updated; if the repeated update times exceed the preset threshold and still fail, the abnormal device is marked and feedback is sent to the user.

[0029] After each RF power supply is updated, the processor 120 executes the update result feedback logic, generating update success / failure result data (including device number, update time, and verification result), and sends it back to the server (external device) via the ordinary network port 142. The server executes the result aggregation processing logic, aggregating the update results of 30 RF power supplies and filtering out 2 RF power supplies that failed to update (invalid data). The server re-issues the pre-processed data to be updated, triggering the 2 RF power supplies to repeat the processing logic of steps S2 to S3. After the first re-issuance, one RF power supply passes the verification and updates successfully, while the other fails the verification. The server re-issues the data again, and the RF power supply still fails the verification. If an update fails, and the number of repeated updates (2 times) reaches the preset threshold (2 times), the server marks the device as an abnormal device and feeds back the abnormal information (device number, reason for abnormality) to the user terminal, reminding staff to troubleshoot the device. The update result feedback logic enables real-time monitoring of the update status of all RF power supplies, allowing staff to quickly grasp the update status of each device. The abnormality handling logic can automatically handle devices that have failed to update, reducing manual intervention by re-issuing data. At the same time, it marks and feeds back devices that have failed to update multiple times, making it easier for staff to troubleshoot the fault in a timely manner and avoiding the impact of individual device update failures on the overall production progress, thus improving the reliability and fault tolerance of batch updates.

[0030] like Figure 5 As shown, as the fourth embodiment of this application, it is a further improvement and refinement of the first embodiment described above. The data update method further includes a supplementary update step: when it is necessary to update a specific functional component of a single or part of the RF power supply individually, an external computer is connected to the corresponding RF power supply through a common network port 142, the data to be updated is obtained through the common network port 142, and the data of the specific functional component of the RF power supply is rewritten and / or added. The amount of data transmitted through the common network port 142 is greater than that of the fast transfer port 141.

[0031] Generally, after the batch update is completed, the staff establishes a connection between the external computer and multiple RF power supplies that need to be updated individually through the ordinary network port 142. Using the ordinary network port 142 (which transmits more data than the fast transfer port 141), the staff obtains the data to be updated for the temperature control module and adds data to the temperature control module of multiple RF power supplies to complete the supplementary update. The remaining multiple RF power supplies that are not connected do not need to be updated and continue to operate normally. In this embodiment, the supplementary update step realizes the individual update of a single / part of the RF power supplies through the ordinary network port 142. The ordinary network port 142 transmits more data than the fast transfer port 141, which is suitable for the needs of updating large amounts of data for newly added functional components (temperature control modules). This solves the problem that the fast transfer port 141 has limited data transmission capacity and cannot meet the needs of updating large amounts of data individually. At the same time, it takes into account the flexibility of batch updates and individual updates and improves the adaptability of the method.

[0032] The fast transfer port 141 is connected between the sensor and the FPGA. The sensor is connected to the FPGA. The fast transfer port 141 only transmits the raw data detected by the sensor that has not been processed by the FPGA. At the same time, the fast transfer port 141 is directly connected to the memory, and the data to be updated is directly transmitted to the memory through the fast transfer port 141. Each RF power supply's processor 120 first rewrites the software data corresponding to the FPGA in its own memory, then executes the data synchronization processing logic to synchronize the rewritten software data to the FPGA's own attached memory. After synchronization is completed, the data consistency between the two memories is verified to ensure that the FPGA functions normally.

[0033] For example, suppose there are 15 RF power supplies that need to be updated with the same FPGA software data simultaneously (batch update). Two of the RF power supplies need to have their temperature control module data updated separately due to function upgrades (supplementary update). At the same time, it is required to ensure the stable operation of the FPGA function. The fast transfer port 141 takes into account both data transmission and update functions.

[0034] Specifically, the fast transfer ports 141 of the 15 RF power supplies are all connected between the sensor and the FPGA. The sensor and the FPGA are directly connected. The fast transfer ports 141 are used to transmit raw data detected by the sensor that has not been processed by the FPGA (such as raw current and voltage sampling data). During batch updates, the fast transfer ports 141 are directly connected to the memory. The server transmits the data to be updated from the FPGA to the memory of the 15 RF power supplies through the fast transfer ports 141, without the need for FPGA processing.

[0035] Furthermore, the processors 120 of the 15 RF power supplies read the FPGA data to be updated received in the memory, first rewrite the corresponding software data of the FPGA in their own memory, and then execute the data synchronization processing logic to synchronize the rewritten software data to the FPGA's own attached memory. After synchronization is completed, the processors 120 verify the data consistency between the memory and the FPGA's attached memory to ensure that the two data are completely matched and to avoid FPGA malfunction due to data asynchrony. After the verification is passed, the batch update of FPGA data is completed.

[0036] This embodiment optimizes the connection method of the fast transfer port 141 to achieve the dual functions of "daily data transmission + batch update" without the need for additional ports, thus saving hardware costs. The FPGA data synchronization processing logic and consistency verification ensure that the data in the memory and the FPGA's attached memory are consistent, avoiding problems such as signal processing abnormalities and sampling errors caused by data asynchrony in the FPGA. This improves the stability and reliability of the FPGA function, thereby ensuring the overall operating accuracy of the RF power supply.

[0037] It should be noted that the fast transfer port 141 connects between the FPGA and the sensor, transmitting only raw data, i.e., data not processed by the FPGA. Of course, the fast transfer port 141 also connects directly to the memory, enabling direct transmission of updated data to the memory without going through the FPGA. A new multi-task scheduling module has been added to the fast transfer port 141 to dynamically schedule daily raw data transmission and batch update data transmission. When performing batch updates, bandwidth is prioritized for the data transmission to be updated. After the update is completed, it automatically switches back to the daily raw data transmission mode to avoid conflicts. Simultaneously, the FPGA data synchronization logic can be extended to real-time synchronization. The processor 120 monitors the data status of the memory and the FPGA's attached memory in real time. If a data deviation occurs, synchronization adjustment is immediately initiated, further improving the stability of the FPGA function. The supplementary update steps can be extended to remote control. Operators can connect to a regular network port 142 via a remote terminal to remotely update individual or partial RF power supplies without on-site operation, further reducing labor costs.

[0038] As a fifth embodiment of this application, this application discloses a radio frequency power supply 100, such as Figure 6 and Figure 7 As shown, the RF power supply 100 adopts the data update method of the RF power supply 100 as described in any of the above embodiments, which can achieve efficient, accurate and stable data updates, and improve the operational stability and maintainability of the equipment.

[0039] Specifically, the RF power supply 100 includes a memory 110, a processor 120, a fast transfer port 141, and multiple functional components 130. The memory 110 is used to store the original data, data to be updated, user setting data, and initial setting data corresponding to each functional component 130. The fast transfer port is used to connect to a server to receive batch data to be updated. The memory 110 has a dedicated storage area for storing data from different functional components 130 to avoid data confusion. At the same time, it has a dedicated storage area for user setting data and initial setting data to ensure that these data are not rewritten during the update process, thus ensuring the stability of user habits and initial device parameters. The processor 120 establishes a stable communication connection with the memory 110, each functional component 130, and the interface 140, enabling fast reading and writing of data and control of the operation and data update process of each functional component 130.

[0040] The multiple functional components 130 include, but are not limited to, FPGA, sensors, power amplification modules, control modules, fault diagnosis modules, etc. Each functional component 130 is used to implement different functions of the RF power supply 100, such as signal processing, data detection, power amplification, operation control, fault diagnosis, etc.

[0041] Furthermore, at least one of the functional components 130 is connected to the mainboard of the RF power supply 100 via a cold-plug method. The cold-plug method means that the functional component 130 can be replaced without disassembling the entire device while the RF power supply 100 is running normally or powered off. This method is characterized by its ease of operation and lack of impact on the overall operation of the device. Functional components 130 connected via the cold-plug method can be flexibly replaced and upgraded according to actual application needs. It allows for rapid addition of data to new functional components 130 and optimization of existing functional components 130, enhancing the expandability and maintainability of the RF power supply 100 and extending the device's lifespan.

[0042] For example, the sensor module of the RF power supply 100 is connected to the motherboard by a cold plug-in method. When it is necessary to replace the sensor with a more accurate one, the original sensor can be directly unplugged and the new sensor can be inserted. Then, the data update method of any of the above embodiments can be used to obtain the data to be updated corresponding to the new sensor. The relevant data can be added or rewritten in the memory 110 to complete the replacement and update of the sensor. There is no need to disassemble the entire RF power supply 100. The operation is simple and efficient.

[0043] Furthermore, such as Figure 6 As shown, the RF power supply also includes a standard network port 142, an FPGA, and a sensor. The standard network port 142 is used to connect to an external computer to receive individually updated data. The FPGA is used to implement sampling, data processing, and analog-to-digital conversion functions. The sensor is directly connected to the FPGA and is used to detect the operating signal of the RF power supply and transmit it to the FPGA. The fast transfer port is connected between the sensor and the FPGA and is used to transmit the sensor's raw data. The fast transfer port is also directly connected to the memory to realize the direct transmission of the data to be updated.

[0044] like Figure 8 As shown, as the sixth embodiment of this application, a radio frequency plasma power supply system 300 is disclosed. The system includes a radio frequency power supply 100, a matching unit 310 and a plasma chamber 320 as described in the above embodiments, which can achieve stable power output and improve the system's operational stability and working efficiency.

[0045] Specifically, the RF power supply 100 described in the above embodiment can achieve efficient, accurate, and stable data updates for each functional component 130, ensuring the stable operation of the RF power supply 100 and providing a stable power signal for the entire system. The matching unit 310 is used to perform impedance matching on the power signal output by the RF power supply 100. Since there may be a mismatch between the output impedance of the RF power supply 100 and the input impedance of the plasma chamber 320 load, it can cause power signal reflection, affecting power transmission efficiency and system stability. The matching unit 310 adjusts its own impedance parameters to match the output impedance of the RF power supply 100 with the input impedance of the plasma chamber 320 load, reducing power reflection, improving power transmission efficiency, and ensuring that the power signal can be stably transmitted to the plasma chamber 320 load.

[0046] It should be noted that the inventive concept of this application can form many embodiments, but due to the limited space of the application documents, they cannot all be listed. Therefore, without conflict, the embodiments described above or the technical features can be arbitrarily combined to form new embodiments. After the embodiments or technical features are combined, the original technical effect will be enhanced.

[0047] The above description, in conjunction with specific optional embodiments, provides a further detailed explanation of this application and should not be construed as limiting the specific implementation of this application to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of this application, and all such modifications or substitutions should be considered within the scope of protection of this application.

Claims

1. A data update method for radio frequency (RF) power supplies, used to update the data of the plurality of RF power supplies, characterized in that, The data update method includes the following steps: Step S1: Obtain the same data to be updated from multiple RF power supplies that need to be updated synchronously; Step S2: Establish a connection between the server and multiple RF power supplies, and use the fast transfer port to simultaneously transmit the same data to be updated to the memory of multiple RF power supplies; Step S3: Each RF power supply rewrites the original data in its own functional component to be updated according to the data to be updated; and / or, according to the data to be updated, adds the data to be updated corresponding to the functional component to be updated of the RF power supply, so as to realize the synchronous update of the same data of multiple RF power supplies. The data to be updated refers only to the functional component data of the RF power supply, and does not modify the core data or user settings of the RF power supply.

2. The data update method for radio frequency power supply as described in any one of claims 1, characterized in that, The data update method further includes an instruction triggering step: after the server obtains the data update instruction from the user terminal, it performs the operation of synchronously sending the same data to be updated to multiple radio frequency power supplies. The data update instruction is used to specify the functional component to be updated and the content of the data to be updated.

3. The data update method for radio frequency power supply as described in claim 1, characterized in that, In step S1, duplicate data to be updated stored on external devices is deduplicated to remove redundant data; at the same time, a checksum is added to the data to be updated. The checksum is used to verify the validity of the data to be updated in step S2. If the checksum does not match, the data to be updated is determined to be invalid and subsequent update operations are refused.

4. The data update method for radio frequency power supply as described in claim 1, characterized in that, The data update method further includes a supplementary update step: when it is necessary to update specific functional components of a single or partial RF power supply individually, an external computer is connected to the corresponding RF power supply through a regular network port, the data to be updated is obtained through the regular network port, and the data of the specific functional components of the RF power supply is rewritten and / or added. The data transmission volume of the regular network port is greater than that of the fast transfer port.

5. The data update method for radio frequency power supply as described in claim 1, characterized in that, The data update method further includes the following steps: Each RF power supply executes update result feedback logic, generates update result data, and feeds it back to the external device through a regular network port. The external device executes result aggregation and processing logic to complete the statistics and anomaly handling of all RF power supply update statuses. The specific exception handling logic includes: the external device summarizes the update results of all RF power supplies and filters out the RF power supplies that failed to update; for the RF power supplies that failed to update, the pre-processed data to be updated is resent, triggering the repeated execution of the processing logic of steps S2 to S3 until all RF power supplies are updated; if the repeated update times exceed the preset threshold and still fail, the abnormal device is marked and feedback is sent to the user.

6. The data update method for radio frequency power supply as described in claim 1, characterized in that, The fast transfer port is connected between the sensor and the FPGA. The sensor is connected to the FPGA. The fast transfer port transmits the raw data detected by the sensor that has not been processed by the FPGA. At the same time, the fast transfer port is directly connected to the memory. The data to be updated is directly transmitted to the memory through the fast transfer port. Each RF power supply's processor first rewrites the corresponding software data of the FPGA in its own memory, then executes the data synchronization processing logic to synchronize the rewritten software data to the FPGA's own attached memory. After synchronization is completed, the data consistency between the two memories is verified to ensure that the FPGA functions normally.

7. A data update method for an radio frequency power supply, characterized in that, The radio frequency power supply includes a processor, a memory, a standard network port, and a fast transfer port. The processor, standard network port, and fast transfer port are all electrically connected to the memory. Both the standard network port and the fast transfer port can transmit data, but their data transmission capabilities differ. The data update method includes: Step S011: During the RF power-on process, the processor obtains a data update instruction; Step S002: The processor determines the correspondence between the data update instruction and the ordinary network port and the fast transfer port based on the data update instruction; Step S0031: If the processor determines that the data update instruction corresponds to both the ordinary network port and the ordinary network port, the processor obtains the data to be updated from the external device connected to the ordinary network port; Step S0032: If the processor determines that the data update instruction corresponds to the fast transfer port, the processor obtains the data to be updated from the server connected to the fast transfer port; Step S0033: If the processor determines that the data update instruction corresponds to both the ordinary network port and the fast transfer port, the processor first obtains a part of the data to be updated from the server connected to the fast transfer port, and then obtains the other part of the data to be updated from the external device connected to the ordinary network port. Step S004: The processor writes the data to be updated into the memory or changes the data originally stored in the memory according to the data to be updated.

8. The method as described in claim 7, characterized in that, The fast transfer port is directly connected to the memory, or the fast transfer port is connected to the memory via the FPGA.

9. A radio frequency power supply, characterized in that, The device includes a memory, a processor, a fast transfer port, and multiple functional components. The processor is configured to execute the data update method for the RF power supply according to any one of claims 1 to 8. The fast transfer port is used to connect to a server to receive batches of data to be updated. At least one of the functional components is connected to the RF power supply motherboard via a cold-plug method. The memory stores the original data, user-defined data, initial setting data, and data to be updated corresponding to each functional component.

10. The radio frequency power supply as described in claim 9, characterized in that, The RF power supply also includes a standard network port, an FPGA, and a sensor. The standard network port is used to connect to an external computer to receive individually updated data. The FPGA is used to implement sampling, data processing, and analog-to-digital conversion functions. The sensor is directly connected to the FPGA to detect the operating signal of the RF power supply and transmit it to the FPGA. The fast transfer port is connected between the sensor and the FPGA to transmit the sensor's raw data, and the fast transfer port is directly connected to the memory to realize the direct transmission of the data to be updated.

11. A radio frequency plasma power supply system, characterized in that, It includes the radio frequency power supply, matching unit, and plasma chamber as described in claim 9 or 10; the power signal of the radio frequency power supply is output to the matching unit, and the matching unit performs impedance matching on the power signal and then transmits the power signal to the load of the plasma chamber.

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