A method for thermal bonding of YAG crystal in ultra-high vacuum environment

By using a thermal bonding method under ultra-vacuum conditions, the problem of poor bonding quality in large-size YAG crystals was solved, and a bonding interface with high thermal stability and mechanical strength was achieved, thereby improving the performance of the laser.

CN122401665APending Publication Date: 2026-07-17QILU ZHONGKE INST OF OPTICAL PHYSICS & ENG TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
QILU ZHONGKE INST OF OPTICAL PHYSICS & ENG TECH
Filing Date
2026-04-28
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies for bonding YAG crystals with large size and high performance requirements suffer from poor bonding quality, high process difficulty, and challenges in scaling up, especially in high-power lasers where thermal effects severely affect laser performance.

Method used

A thermal bonding method under ultra-vacuum conditions is adopted, including directional cutting, multi-pass grinding and polishing, ultrasonic cleaning and vacuum tungsten filament furnace thermal bonding, combined with annealing treatment, to form an excellent bonding interface, avoiding repeated heating and pressurization and wet etching processes.

Benefits of technology

It achieves excellent bonding interfaces for large-size YAG crystals, improves thermal stability and mechanical strength, mitigates thermal lensing effect, and enhances laser output efficiency, making it suitable for high-power lasers.

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Abstract

本发明涉及固体激光材料加工技术领域,具体地涉及一种超真空环境YAG晶体热键合方法,通过对YAG晶体进行定向切割,使键合面与<111>面的垂直度控制在1′以内;随后经过多道研磨与抛光工艺,使键合面平面度优于λ / 10,光洁度达到原子级,在范德华力的作用下完成光学接触,最后在超高真空环境下进行热处理引发界面原子相互扩散以形成强化学键,成功实现最大键合尺寸横截面为120*20mm的Yb:YAG晶体键合。本发明键合过程无需反复升温加压、湿法刻蚀等复杂工序,实现了在增大键合尺寸的同时获得质量优异、热稳定性高的键合界面。
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