Novel water tank for washing equipment

Abstract

The utility model discloses a novel water tank for washing equipment, which comprises a tank body, a first tank cavity and a second tank cavity which are independent from each other are arranged in the tank body, and the first tank cavity and the second tank cavity are used for storing spray water and are respectively communicated with an airflow channel for tail gas to circulate. Spraying water in the first box cavity can be supplied to the spraying head under the action of the first water pump, and spraying water in the second box cavity can be supplied to the spraying head under the action of the second water pump. The device is reasonable in structure, beneficial to continuous production and reliable in operation.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor tail gas treatment, in particular to a novel water tank for water washing equipment. Background Art

[0002] In the semiconductor manufacturing industry, some harmful exhaust gases need to go through specific treatment processes to reduce their harm to the environment and personnel. Water washing or spraying is a commonly used exhaust gas treatment method, especially suitable for treating pollutants that are soluble in water or can be removed by water chemical reactions, such as acidic, alkaline, organic and other harmful exhaust gases. This method is simple and effective and can treat most of the harmful gases that are soluble in water.

[0003] In order to circulate the spray water, the air flow channel in the water washing equipment is usually connected downward to the water tank for storing and supplying spray water. In production practice, a water tank is usually configured. Due to sedimentation or adsorption, the spray water needs to be replaced regularly to ensure a good spray water washing effect. At this time, the water washing equipment needs to be shut down to facilitate the replacement of the spray water. In addition, when the water pump of the water tank fails or other parts fail to supply spray water, it is also necessary to stop the machine for inspection, which is not conducive to continuous production. Utility Model Content

[0004] The utility model discloses a novel water tank for water washing equipment, which solves the technical problem that the water tank structure of water washing equipment in the prior art is simple and not conducive to continuous production, and has the technical effects of reasonable structure, being conducive to continuous production and reliable operation. The technical scheme adopted is as follows:

[0005] A new type of water tank for water washing equipment includes a tank body, wherein a first tank chamber and a second tank chamber are independently provided in the tank body, wherein the first tank chamber and the second tank chamber are used to store spray water and are respectively connected to air flow channels for exhaust gas circulation, wherein the spray water in the first tank chamber can be supplied to a spray head under the action of a first water pump, and the spray water in the second tank chamber can be supplied to the spray head under the action of a second water pump.

[0006] On the basis of the above technical solution, the spray head connected to the first water pump and the spray head connected to the second water pump are arranged at intervals.

[0007] On the basis of the above technical solution, a plurality of transversely extending water pipes are provided in the air flow channel, a plurality of the spray heads are arranged on the plurality of water pipes, and the plurality of the spray heads have different directions to improve spraying uniformity.

[0008] Based on the above technical solution, a vertically arranged first partition is provided in the first box cavity, and the first partition divides the first box cavity into two connected chambers. A vertically arranged second partition is provided in the second box cavity, and the second partition divides the second box cavity into two connected chambers to reduce the flow of deposited impurities.

[0009] Based on the above technical solution, the height of the first partition covers the depth of the first box cavity and connects the two chambers in the middle, and the height of the second partition covers the depth of the second box cavity and connects the two chambers in the middle.

[0010] On the basis of the above technical solution, the airflow channel includes an upstream channel and a downstream channel, and the upstream channel and the downstream channel are connected at an upper portion away from the box body.

[0011] On the basis of the above technical solution, a filter cotton net is provided at the connecting part of the upstream channel and the downstream channel, and the filter cotton net includes a plurality of densely distributed micro-filtration holes for reducing the amount of water vapor discharged.

[0012] On the basis of the above technical solution, a transparent window is provided on the box body for viewing the situation inside the box body.

[0013] On the basis of the above technical solution, it also includes a PH sensor, which is arranged in the box body to monitor the pH value of the spray water and is electrically connected to the external controller to send a signal to the external controller.

[0014] On the basis of the above technical solution, the first chamber and the second chamber of the box body are provided with openable or closed feeding ports on their side walls, through which the reagents can enter the first chamber and the second chamber to adjust the acidity and alkalinity of the spray water.

[0015] Beneficial Effects

[0016] The utility model has a reasonable structure. The box body includes a first box cavity and a second box cavity which are independent of each other. The first box cavity and the second box cavity supply water to the spray head through a first water pump and a second water pump respectively. In this way, when a water pump fails or the spray water in a box cavity is replaced, the water washing equipment connected to the box body can still work, avoiding shutdown, which is conducive to ensuring continuous production. In addition, the number of box cavities can be three or more, and a partition is provided in the box cavity. The partition is provided with a through hole to connect the two chambers in the box cavity, so that the impurities deposited at the bottom of the box cavity can be prevented from flowing.

[0017] In the utility model, the air flow channel includes an upstream channel and a downstream channel, and the upstream channel and the downstream channel are connected at the upper part away from the box body, so that water vapor can be prevented from flowing in the first box cavity and the second box cavity, and the spray water volume in the first box cavity and the second box cavity is basically stable, which is conducive to the stable operation of the water washing equipment. In addition, a PH sensor and a feeding port are provided, so that the pH value of the spray water can be automatically monitored and the pH value of the spray water can be conveniently adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0019] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0020] Figure 2 : A schematic diagram of the structure of the utility model after being assembled with the washing equipment;

[0021] Figure 3 : Schematic diagram of the structure of the filter cotton net;

[0022] Figure 4 : Schematic diagram of the three-dimensional structure of the water pipe and the sprinkler head; DETAILED DESCRIPTION

[0023] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0024] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0025] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0026] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0027] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0028] like Figures 1 to 4A new type of water tank for washing equipment shown in FIG. 1 includes a tank body 1, as shown in FIG. Figure 1 As shown, a first box cavity 11 and a second box cavity 12 are independently provided in the box body 1. The first box cavity 11 and the second box cavity 12 are used to store spray water and are respectively connected to the air flow channel for exhaust gas circulation. In other embodiments of the utility model, there may be multiple box cavities, which are set according to the length of the air flow channel, and the multiple box cavities cover the length of the air flow channel.

[0029] The spray water in the first box cavity 11 can be supplied to the spray head 2 under the action of the first water pump, and the spray water in the second box cavity 12 can be supplied to the spray head 2 under the action of the second water pump. Specifically, a first filter is provided at the inlet of the first water pump, and the outlet of the first water pump supplies water to a plurality of spray heads 2. A second filter is provided at the inlet of the second water pump, and the outlet of the second water pump supplies water to a plurality of spray heads 2. The first filter and the second filter adopt physical filtration to filter out large particles in the spray water. The filter is a prior art and will not be described here.

[0030] In this embodiment, the spray head 2 connected to the first water pump and the spray head 2 connected to the second water pump are arranged at intervals, so that even if one of the water pumps fails and stops, the exhaust gas passing through the air flow channel can still be washed and sprayed relatively evenly.

[0031] like Figure 2 As shown, a plurality of transversely extending water pipes 3 are provided in the air flow channel, a plurality of spray heads 2 are disposed on the plurality of water pipes 3, and the plurality of spray heads 2 have different directions to improve spraying uniformity.

[0032] like Figure 2 As shown, the airflow channel includes an upstream channel 7 and a downstream channel 8, and the upstream channel 7 and the downstream channel 8 are connected at the upper part away from the box body 1. A filter cotton net 6 is provided at the connection point between the upstream channel 7 and the downstream channel 8. The filter cotton net 6 includes a plurality of densely distributed micro-filter holes. When the exhaust gas mixed with water vapor passes through the filter cotton net 6, the water vapor can be partially intercepted to reduce the flow of water vapor in the first box cavity 11 and the second box cavity 12. The filter cotton net 6 includes a filter cotton 61 and a filter net 62 arranged in layers. The filter cotton 61 adopts any one or more of non-woven filter cotton, glass fiber filter cotton or activated carbon filter cotton. The filter cotton 61 includes a plurality of densely distributed micro-filter holes, which can intercept most of the water vapor. Among them, along the airflow direction, the aperture of the micro-filter holes in the filter cotton 61 gradually decreases to achieve step-by-step filtration; the filter net 62 adopts a mesh cloth made of plastic material as a supporting skeleton of the filter cotton 61 net to prevent the filter cotton 61 from collapsing after absorbing water.

[0033] like Figure 1 and 2As shown, a vertically arranged first partition 4 is provided in the first box cavity 11, and the first partition 4 divides the first box cavity 11 into two interconnected chambers, and the height of the first partition 4 covers the depth of the first box cavity 11 and connects the two chambers in the middle; a vertically arranged second partition 5 is provided in the second box cavity 12, and the second partition 5 divides the second box cavity 12 into two interconnected chambers, and the height of the second partition 5 covers the depth of the second box cavity 12 and connects the two chambers in the middle, so that even if the spray water in the box cavity is greatly disturbed, the flow of deposited impurities can be effectively reduced.

[0034] like Figure 1 and 2 As shown, a transparent window 9 is provided on the box body 1 for viewing the situation inside the box body 1. A PH sensor is also included. The PH sensor is provided in the box body 1 for monitoring the pH value of the spray water and is electrically connected to the external controller to send a signal to the external controller. The PH sensor is a prior art and can be selected by a person skilled in the art according to the needs.

[0035] In addition, the side walls of the first chamber 11 and the second chamber 12 of the box body 1 are provided with openable or closable feeding ports, through which the medicine can enter the first chamber 11 and the second chamber 12 to adjust the acidity and alkalinity of the spray water, which is convenient to use.

[0036] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A new type of water tank for water washing equipment, characterized in that: The invention comprises a box body (1), wherein a first box chamber (11) and a second box chamber (12) are independently provided in the box body (1), wherein the first box chamber (11) and the second box chamber (12) are used to store spray water and are respectively connected to an air flow channel for exhaust gas circulation, wherein the spray water in the first box chamber (11) can be supplied to a spray head (2) under the action of a first water pump, and the spray water in the second box chamber (12) can be supplied to the spray head (2) under the action of a second water pump.

2. The new water tank for water washing equipment according to claim 1 is characterized in that: The spray head (2) connected to the first water pump and the spray head (2) connected to the second water pump are arranged at intervals.

3. The new water tank for water washing equipment according to claim 2 is characterized in that: A plurality of transversely extending water pipes (3) are provided in the air flow channel, a plurality of the spray heads (2) are arranged on the plurality of water pipes (3), and the plurality of the spray heads (2) have different orientations to improve spraying uniformity.

4. The novel water tank for water washing equipment according to any one of claims 1 to 3, characterized in that: A vertically arranged first partition (4) is provided in the first chamber (11), and the first partition (4) divides the first chamber (11) into two interconnected chambers. A vertically arranged second partition (5) is provided in the second chamber (12), and the second partition (5) divides the second chamber (12) into two interconnected chambers, so as to reduce the flow of deposited impurities.

5. The new water tank for water washing equipment according to claim 4 is characterized in that: The height of the first partition plate (4) covers the depth of the first chamber (11) and connects the two chambers at the middle position, and the height of the second partition plate (5) covers the depth of the second chamber (12) and connects the two chambers at the middle position.

6. The new water tank for water washing equipment according to claim 4 is characterized in that: The air flow channel comprises an upstream channel (7) and a downstream channel (8), and the upstream channel (7) and the downstream channel (8) are connected at an upper portion away from the box body (1).

7. The new water tank for water washing equipment according to claim 6 is characterized in that: A filter cotton net (6) is provided at the connecting portion between the upstream channel (7) and the downstream channel (8), wherein the filter cotton net (6) comprises a plurality of densely distributed micro-filtration holes for reducing the amount of water vapor discharged.

8. The novel water tank for water washing equipment according to any one of claims 5 to 7, characterized in that: The box body (1) is provided with a transparent window for viewing the situation inside the box body (1).

9. The novel water tank for water washing equipment according to claim 8 is characterized in that: It also includes a pH sensor, which is arranged in the box body (1) and is used to monitor the pH value of the spray water and is electrically connected to the external controller to send a signal to the external controller.

10. The novel water tank for water washing equipment according to claim 9 is characterized in that: The side walls of the first chamber (11) and the second chamber (12) of the chamber body (1) are also provided with feed openings that can be opened or closed, and the medicine can enter the first chamber (11) and the second chamber (12) through the feed openings to adjust the acidity and alkalinity of the spray water.

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