Silicon wafer conveying device

Abstract

The utility model discloses a silicon wafer conveying device. The starting end and the tail end of the silicon wafer conveying device each comprise a transmission wheel set. The transmission wheel set comprises a transmission wheel and a driven wheel, and the transmission wheel and the driven wheel are spaced in the third direction. The transmission belt is arranged on the outer sides of the transmission wheels and the driven wheels in a sleeving mode and extends to the transmission wheel set at the tail end from the transmission wheel set at the initial end. The transmission wheel is connected with the transmission wheel shaft through the transmission bearing, in the third direction, the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing are not overlapped, the first direction is the direction from the starting end to the tail end, the transmission wheel shaft extends in the second direction, and the third direction intersects with the second direction and the first direction. In the third direction, the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing are not overlapped, so that the quality problem of silicon wafers caused by pollution of the transmission belt by oil discharged from the transmission bearing when the motor drives the transmission wheel on the transmission wheel shaft to rotate the transmission belt is prevented, frequent replacement of the bearing by personnel is not needed, and the maintenance time is shortened.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, and more specifically, to a silicon wafer conveying device. Background Art

[0002] Monocrystalline silicon solar cells are solar cells made of high-purity monocrystalline silicon rods, and are currently the fastest-developed type of solar cells. Monocrystalline silicon rods are cut into silicon wafers, and the raw silicon wafers are polished, cleaned, sorted, and made into silicon wafers to be processed. After being tested and graded by a sorting machine, the silicon wafers are conveyed to each grade box by a conveyor belt.

[0003] The existing silicon wafer conveying device uses a knurled pulley, and the silicon wafer conveying method is: motor-synchronous wheel-synchronous belt-knurled pulley-flat belt-upper and lower rollers-knurled driven wheel-silicon wafer movement. The knurled pulley contains a bearing in the middle. After running for a period of time, the belt wears quickly and the bearing is prone to oil flowing onto the flat belt. The belt and bearing need to be replaced from time to time, which affects product quality and reduces the service life of accessories.

[0004] Therefore, there is an urgent need to provide a silicon wafer conveying device that can prevent bearing oil from contaminating the belt. Utility Model Content

[0005] In view of this, the utility model provides a silicon wafer conveying device, wherein the starting end and the end of the silicon wafer conveying device both include a transmission wheel group; the transmission wheel group includes a transmission wheel and a driven wheel, and there is a gap between the transmission wheel and the driven wheel along the third direction; a transmission belt is sleeved on the outer sides of the transmission wheel and the driven wheel, and the transmission belt extends from the transmission wheel group at the starting end to the transmission wheel group at the end;

[0006] The transmission wheel is connected to the transmission wheel shaft through a transmission bearing. Along the third direction, the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing do not overlap. The first direction is the direction from the starting end to the end. The transmission wheel shaft extends along the second direction, and the third direction intersects with the second direction and the first direction.

[0007] Optionally, along the second direction, a bearing cover plate is further provided between the transmission wheel and the transmission bearing, and a side of the bearing cover plate close to the transmission bearing is in contact with the transmission bearing, and a side of the bearing cover plate close to the transmission wheel is in contact with the transmission wheel.

[0008] Optionally, the driven wheel is connected to the driven wheel shaft via a driven bearing, and along the third direction, the orthographic projection of the driven wheel and the orthographic projection of the driven bearing do not overlap.

[0009] Optionally, a plurality of supporting wheel groups are provided between the transmission wheel group at the starting end and the transmission wheel group at the end end;

[0010] The supporting wheel group includes at least one upper supporting wheel, and the side of the upper supporting wheel away from the ground is in contact with the conveyor belt; along the third direction, the height of the driven wheel is D1, the height of the upper supporting wheel is D2, and D2=D1;

[0011] The support wheel group also includes at least one lower support wheel, and the side of the lower support wheel away from the ground is in contact with the transmission belt; the transmission wheel group also includes an auxiliary support wheel, and the auxiliary support wheel is arranged close to the support wheel group, and the transmission belt sequentially connects the auxiliary support wheel, the transmission wheel and the driven wheel; along the third direction, the height of the auxiliary support wheel is D3, and the height of the lower support wheel is D4, and D4=D3.

[0012] Optionally, the transmission wheel assembly further includes an adjusting wheel located between the transmission wheel and the driven wheel, and the transmission belt sequentially connects the transmission wheel, the adjusting wheel and the driven wheel.

[0013] Optionally, the silicon wafer conveying device further includes a first bracket supporting the transmission wheel group, the first bracket is provided with an adjustment block, the adjustment block includes a plurality of mounting holes arranged along the first direction, and the adjustment wheel shaft is connected to the adjustment wheel through the mounting holes.

[0014] Optionally, the silicon wafer conveying device further comprises a second bracket supporting the supporting wheel assembly, and along the third direction, a height of the second bracket is equal to a height of the first bracket.

[0015] Optionally, the silicon wafer conveying device includes a plurality of support plates spaced apart along the first direction, wherein the support plates connect the first support and the second support, or the support plates connect two adjacent second supports.

[0016] Optionally, the support plate is made of stainless steel.

[0017] Optionally, the transmission wheel is connected to the motor via a motor shaft.

[0018] Compared with the prior art, the silicon wafer conveying device provided by the utility model achieves at least the following beneficial effects:

[0019] The silicon wafer conveying device provided by the utility model includes a transmission wheel group at the beginning and the end; the transmission wheel group includes a transmission wheel and a driven wheel, and there is a gap between the transmission wheel and the driven wheel along the third direction; the transmission belt is sleeved on the outside of the transmission wheel and the driven wheel, and the transmission belt extends from the transmission wheel group at the beginning to the transmission wheel group at the end; the transmission wheel is connected to the transmission wheel shaft through a transmission bearing, and along the third direction, the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing do not overlap, the first direction is the direction from the beginning to the end, the transmission wheel shaft extends along the second direction, and the third direction intersects with the second direction and the first direction. By making the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing do not overlap along the third direction, it is prevented that when the motor drives the transmission wheel on the transmission wheel shaft to rotate the transmission belt, the transmission bearing is prevented from leaking oil and contaminating the transmission belt, causing quality problems of the silicon wafer, and there is no need for personnel to frequently replace bearings, thereby reducing maintenance time.

[0020] Of course, any product implementing the present utility model does not necessarily need to achieve all of the above-mentioned technical effects at the same time.

[0021] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0023] Figure 1 This is a schematic diagram of the silicon wafer conveying device provided by the utility model;

[0024] Figure 2 It is a partial exploded schematic diagram of the silicon wafer conveying device provided by the utility model;

[0025] Figure 3 This is another schematic diagram of the silicon wafer conveying device provided by the utility model;

[0026] Figure 4 yes Figure 3 An enlarged schematic diagram of area A in the middle. DETAILED DESCRIPTION

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0028] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0029] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0030] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0031] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0032] Reference Figure 1 , Figure 2 The utility model provides a silicon wafer conveying device, wherein the starting end 100 and the end 200 of the silicon wafer conveying device both include a transmission wheel group 1; the transmission wheel group 1 includes a transmission wheel 11 and a driven wheel 12, and there is a gap between the transmission wheel 11 and the driven wheel 12 along the third direction Z; a transmission belt 2 is sleeved on the outer sides of the transmission wheel 11 and the driven wheel 12, and the transmission belt 2 extends from the transmission wheel group 1 at the starting end 100 to the transmission wheel group 1 at the end 200;

[0033] The transmission wheel 11 is connected to the transmission wheel shaft 112 through the transmission bearing 111. Along the third direction Z, the orthographic projection of the transmission wheel 11 and the orthographic projection of the transmission bearing 111 do not overlap. The first direction X is the direction from the starting end 100 to the end 200. The transmission wheel shaft 112 extends along the second direction Y. The third direction Z intersects with the second direction Y and the first direction X.

[0034] It should be noted that in the prior art, the transmission wheel is a knurled pulley, the knurled pulley contains a bearing in the middle, and the transmission belt is sleeved on the outside of the knurled pulley. In this transmission mode, the belt wears quickly, the bearing easily leaks oil and flows onto the flat belt, and the belt becomes loose and the transmission is unstable. The transmission wheel 11 provided in this embodiment is a waist-drum-shaped transmission wheel. Along the third direction Z, the orthographic projection of the transmission wheel 11 and the orthographic projection of the transmission bearing 111 do not overlap, so as to avoid oil leakage from the transmission bearing 111 and contaminating the transmission belt 2; the transmission wheel 11 adopts a waist-drum-shaped design, and the overall surface of the waist-drum-shaped wheel forms an arc with the center as the reference, which can play a role in suppressing the deviation of the transmission belt 2.

[0035] Specifically, the conveyor belt 2 can be a flat belt made of seamless rubber material. The belt body is thin and powerful, soft and has strong tension. It has good elasticity, wear resistance and bending fatigue resistance. It is light in texture and low in noise. It can run very evenly and quietly, facilitating the smooth transmission of silicon wafers.

[0036] It can be understood that the starting end 100 and the end 200 of the silicon wafer conveying device provided in this embodiment both include a transmission wheel group 1, and the transmission wheel groups 1 of the starting end 100 and the end 200 are symmetrically arranged with the third direction Z as the axis; the transmission wheel group 1 includes a transmission wheel 11 and a driven wheel 12, and the transmission wheel 11 and the driven wheel 12 are spaced apart along the third direction Z; the transmission belt 2 is sleeved on the outer sides of the transmission wheel 11 and the driven wheel 12, and the transmission belt 2 extends from the transmission wheel group 1 of the starting end 100 to the transmission wheel group 1 of the end 200; the transmission wheel 11 is connected to the transmission wheel shaft 112 through a transmission bearing 111, and along the third direction Z, the orthographic projection of the transmission wheel 11 does not overlap with the orthographic projection of the transmission bearing 111, the first direction X is the direction from the starting end 100 to the end 200, the transmission wheel shaft 112 extends along the second direction Y, and the third direction Z intersects with the second direction Y and the first direction X. By ensuring that the orthographic projection of the transmission wheel 11 and the orthographic projection of the transmission bearing 111 do not overlap along the third direction Z, it is prevented that when the motor 7 drives the transmission wheel 11 to rotate the transmission belt 2, the transmission bearing 111 will not leak oil and contaminate the transmission belt 2, causing quality problems for the silicon wafer. There is no need for personnel to frequently replace bearings, thus reducing maintenance time.

[0037] In some optional embodiments, continue to refer to Figure 1 , Figure 2 Along the second direction Y, a bearing cover plate is further provided between the transmission wheel 11 and the transmission bearing 111 , and a side of the bearing cover plate close to the transmission bearing 111 is in contact with the transmission bearing 111 , and a side of the bearing cover plate close to the transmission wheel 11 is in contact with the transmission wheel 11 .

[0038] It can be understood that the bearing cover plate (not shown in the figure) is also mounted on the transmission wheel shaft 112. By adding a bearing cover plate between the transmission wheel 11 and the transmission bearing 111, the transmission wheel 11 and the transmission bearing 111 are further isolated, thereby preventing oil from the transmission bearing 111 from contaminating the transmission belt 2 mounted on the transmission wheel 11.

[0039] In some optional embodiments, the driven wheel 12 is connected to the driven wheel shaft 122 via a driven bearing 121 , and along the third direction Z, the orthographic projection of the driven wheel 12 has no overlap with the orthographic projection of the driven bearing 121 .

[0040] It should be noted that in the prior art, the driven wheel is also a knurled pulley, which contains a bearing in the middle and the transmission belt is arranged on the outside of the knurled pulley. In this transmission method, the belt wears quickly, the bearing easily leaks oil onto the flat belt, and the belt becomes loose and the transmission is unstable.

[0041] It can be understood that the driven wheel 12 provided in this embodiment is also a waist-drum-shaped driven wheel 12. Along the third direction Z, the orthographic projection of the driven wheel 12 does not overlap with the orthographic projection of the driven bearing 121, so as to avoid oil from the driven bearing 121 to contaminate the transmission belt 2. The driven wheel 12 adopts a waist-drum-shaped design, and the overall surface of the waist-drum shape forms an arc with the center as the reference, which can play a role in suppressing the deviation of the transmission belt 2. Specifically, along the second direction Y, a cover plate 123 is also provided between the driven wheel 12 and the driven bearing 121. The side of the cover plate 123 close to the driven bearing 121 is in contact with the driven bearing 121, and the side of the cover plate 123 close to the driven wheel 12 is in contact with the driven wheel 12. The cover plate 123 further isolates the driven wheel 12 and the driven bearing 121, so as to avoid oil from the driven bearing 121 to contaminate the transmission belt 2 sleeved outside the driven wheel 12, resulting in quality problems of the transmitted silicon wafers.

[0042] In some optional embodiments, referring to Figure 1 , Figure 4 , a plurality of supporting wheel groups 3 are provided between the transmission wheel group 1 at the starting end 100 and the transmission wheel group 1 at the end 200;

[0043] The supporting wheel group 3 includes at least one upper supporting wheel 31, and the side of the upper supporting wheel 31 away from the ground is in contact with the conveyor belt 2; along the third direction Z, the height of the driven wheel 12 is D1, the height of the upper supporting wheel 31 is D2, and D2=D1;

[0044] The support wheel group 3 also includes at least one lower support wheel 32, and the side of the lower support wheel 32 away from the ground is in contact with the transmission belt 2; the transmission wheel group 1 also includes an auxiliary support wheel 13, the auxiliary support wheel 13 is arranged close to the support wheel group 3, and the transmission belt 2 is connected to the auxiliary support wheel 13, the transmission wheel 11 and the driven wheel 12 in sequence; along the third direction Z, the height of the auxiliary support wheel 13 is D3, and the height of the lower support wheel 32 is D4, and D4=D3.

[0045] It should be noted that a plurality of supporting wheel groups 3 are provided between the transmission wheel group 1 at the starting end 100 and the transmission wheel group 1 at the end 200, and the structures of the supporting wheel groups 3 are the same to prevent the transmission belt 2 from collapsing due to insufficient support force of the transmission line being too long. When the height of the transmission wheel 11 is too low, an auxiliary supporting wheel 13 is provided between the driven wheel 12 and the transmission wheel 11 and on one side close to the supporting wheel group 3 to support the transmission belt 2.

[0046] Specifically, D2=D1, the height of the upper support wheel 31 is equal to the height of the driven wheel 12, that is, the height of the upper support wheel 31 is consistent with the driven wheel 12, ensuring horizontal transmission of silicon wafers, reducing running resistance, and ensuring the stability of transmission of the conveyor belt 2; D4=D3, the height of the lower support wheel 32 is equal to the height of the auxiliary support wheel 13, that is, the height of the lower support wheel 32 is consistent with the auxiliary support wheel 13, and the conveyor belt 2 transmits smoothly along the shortest path.

[0047] In some optional embodiments, continue to refer to Figure 1 The transmission wheel assembly 1 further includes an adjusting wheel 14 located between the transmission wheel 11 and the driven wheel 12, and the transmission belt 2 connects the transmission wheel 11, the adjusting wheel 14 and the driven wheel 12 in sequence.

[0048] It should be noted that the transmission wheel group 1 also includes an adjusting wheel 14 located between the transmission wheel 11 and the driven wheel 12. The side of the adjusting wheel 14 close to the supporting wheel group 3 is in contact with the transmission belt 2. When the adjusting wheel 14 is installed, the position of the adjusting wheel 14 along the first direction X can be changed to adjust the tightness of the transmission belt 2. The closer the adjusting wheel 14 is to the supporting wheel group 3, the tighter the transmission belt 2 is, and the farther the adjusting wheel 14 is from the supporting wheel group 3, the looser the transmission belt 2 is.

[0049] It can be understood that the adjusting wheel 14 is provided to adjust the tightness of the conveyor belt 2 to avoid unstable transmission of silicon wafers due to the shaking of the conveyor belt 2 when the conveyor belt 2 is too loose.

[0050] In some optional embodiments, continue to refer to Figure 1 , Figure 4 The silicon wafer conveying device also includes a first bracket 4 supporting the transmission wheel group 1. The first bracket 4 is provided with an adjustment block 41. The adjustment block 41 includes a plurality of mounting holes 411 arranged along the first direction X. The adjustment wheel shaft 141 is connected to the adjustment wheel 14 through the mounting holes.

[0051] It should be noted that the first bracket 4 supports the transmission wheel group 1: the transmission wheel 11 is connected to the transmission wheel shaft 112 through the transmission bearing 111, and the transmission wheel shaft 112 is embedded in the first bracket 4. Specifically, the transmission bearing 111 is also hidden in the first bracket 4 and does not contact the transmission wheel 11, so as to avoid oil leakage from the transmission bearing 111 and contamination of the transmission belt 2 sleeved on the transmission wheel 11; the driven wheel 12 is connected to the driven wheel shaft 122 through the driven bearing 121, and the driven wheel shaft 122 is embedded in the first bracket 4. Specifically, the driven bearing 121 is also hidden in the first bracket 4 and does not contact the driven wheel 12, so as to avoid oil leakage from the driven bearing 121 and contamination of the transmission belt 2 sleeved on the transmission wheel 11; similarly; the auxiliary support wheel shaft (not shown in the figure) connected to the auxiliary support wheel 13 is also embedded in the first bracket 4.

[0052] It is understandable that after the device has been running for a period of time, when the conveyor belt 2 becomes loose, the conveyor belt 2 will shake, resulting in unstable transmission of silicon wafers, and the conveyor belt 2 needs to be replaced. In this embodiment, by providing an adjustment block 41, the adjustment block 41 includes a plurality of mounting holes 411 arranged along the first direction X. Without replacing the conveyor belt 2, the position of the adjustment wheel 14 can be adjusted by moving the adjustment block 41 along the first direction X, thereby adjusting the tightness of the conveyor belt 2, and avoiding unstable transmission of silicon wafers due to the shaking of the conveyor belt 2 when the conveyor belt 2 is too loose.

[0053] In some optional embodiments, continue to refer to Figure 1 The silicon wafer conveying device also includes a second bracket 5 supporting the supporting wheel group 3. Along the third direction Z, the height of the second bracket 5 is equal to the height of the first bracket 4.

[0054] It can be understood that the support wheel group 3 also includes a support wheel and a support wheel shaft (not shown in the figure) connected to the support wheel, and the support wheel shaft is embedded in the second bracket 5, and the second bracket 5 supports the support wheel group 3. The height of the second bracket 5 is equal to the height of the first bracket 4, which is convenient for setting the height of the upper support wheel 31 supported by the second bracket 5 to be equal to the height of the driven wheel 12 supported by the first bracket 4, reducing the running resistance and ensuring the stability of the transmission of the conveyor belt 2.

[0055] In some optional embodiments, continue to refer to Figure 3 The silicon wafer conveying device includes a plurality of support plates 6 arranged at intervals along a first direction X, wherein the support plates 6 connect the first bracket 4 and the second bracket 5 , or the support plates 6 connect two adjacent second brackets 5 .

[0056] It should be noted that after the silicon wafers are tested and graded by the sorting machine, they are then transported to each grade box by the conveyor belt of the silicon wafer conveying device. The silicon wafer conveying device includes a plurality of support plates 6 arranged at intervals along the first direction X. Figure 3 For example, the silicon wafer conveying device includes the first to sixth second brackets 5 from the starting end 100 to the end 200 between the starting end 100 and the end 200, the first bracket 4-1 of the starting end 100 is connected to the first second bracket 5-1 by a support plate 6, the first second bracket 5-1 and the second second bracket 5-2 are hollowed out, the second second bracket 5-2 and the third second bracket 5-3 are connected by a support plate 6, the third second bracket 5-3 and the fourth second bracket 5-4 are hollowed out, and the fourth second bracket 5-4 is hollowed out. It is connected to the 5th second bracket 5-5 through a support plate 6, there is a hollow area between the 5th second bracket 5-5 and the 6th second bracket 5-6, and the 6th second bracket 5-6 is connected to the first bracket 4-2 of the end 200 through a support plate 6; a lifting device (not shown in the figure) is also provided in the hollow area, and the lifting device rotates the silicon wafer 90 degrees after identifying the grade of the silicon wafer and transfers it to the corresponding grade box outside the silicon wafer conveying device. The lifting device can be any device in the prior art that can achieve lifting and rotation, and is not specifically limited here.

[0057] It can be understood that the support plate 6 is installed on the bracket and is located under the conveyor belt 2. When the silicon wafer flows from the conveyor belt 2 into the grading box, it can ensure that the silicon wafer fits the conveyor belt 2, and prevent the silicon wafer from being scratched due to stress concentration caused by the small contact surface with the conveyor belt 2 during the process of changing the displacement direction of the silicon wafer by 90 degrees when entering the grading box.

[0058] In some optional embodiments, continue to refer to Figure 1 , the support plate 6 is made of stainless steel.

[0059] It is understandable that the support plate 6 is a mirror stainless steel support plate, and the stainless steel plate has good corrosion resistance and wear resistance, a long service life, and does not require frequent replacement and maintenance, saving maintenance and replacement costs, and reducing downtime and maintenance workload during the production process.

[0060] In some optional embodiments, continue to refer to Figure 1 , Figure 2 The transmission wheel 11 is connected to the motor 7 through the motor shaft 71.

[0061] It can be understood that the driving device of the silicon wafer conveying device in this embodiment is a motor 7, and the motor 7 is connected to the transmission wheel 11 through a motor shaft 71 to provide power for the silicon wafer conveying device. When there is a height difference between the motor 7 and the transmission wheel 11, a motor bracket 72 is added, and the motor 7 is mounted on the motor bracket 72 to improve the concentricity of the motor 7 and the transmission wheel 11, provide stable power for the silicon wafer conveying device, and improve the transmission stability of the conveyor belt 2.

[0062] It can be seen from the above embodiments that the silicon wafer conveying device provided by the utility model achieves at least the following beneficial effects:

[0063] The utility model discloses a silicon wafer conveying device, which includes a transmission wheel group at both the beginning and the end of the silicon wafer conveying device; the transmission wheel group includes a transmission wheel and a driven wheel, and the transmission wheel and the driven wheel are spaced apart along a third direction; a transmission belt is sleeved on the outside of the transmission wheel and the driven wheel, and the transmission belt extends from the transmission wheel group at the beginning to the transmission wheel group at the end; the transmission wheel is connected to the transmission wheel shaft through a transmission bearing, and along the third direction, the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing do not overlap, the first direction is the direction from the beginning to the end, the transmission wheel shaft extends along the second direction, and the third direction intersects with the second direction and the first direction. By making the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing do not overlap along the third direction, it is prevented that when the motor drives the transmission wheel on the transmission wheel shaft to rotate the transmission belt, the transmission bearing is prevented from leaking oil and contaminating the transmission belt, causing quality problems of the silicon wafer, and there is no need for personnel to frequently replace bearings, thereby reducing maintenance time.

[0064] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A silicon wafer conveying device, characterized in that: The silicon wafer conveying device comprises a transmission wheel set at both the beginning and the end; the transmission wheel set comprises a transmission wheel and a driven wheel, and there is a gap between the transmission wheel and the driven wheel along the third direction; a transmission belt is sleeved on the outer sides of the transmission wheel and the driven wheel, and the transmission belt extends from the transmission wheel set at the beginning to the transmission wheel set at the end; The transmission wheel is connected to the transmission wheel shaft through a transmission bearing. Along the third direction, the orthographic projection of the transmission wheel and the orthographic projection of the transmission bearing do not overlap. The first direction is the direction from the starting end to the end. The transmission wheel shaft extends along the second direction, and the third direction intersects with the second direction and the first direction.

2. The silicon wafer conveying device according to claim 1, characterized in that: Along the second direction, a bearing cover plate is further provided between the transmission wheel and the transmission bearing, and a side of the bearing cover plate close to the transmission bearing is in contact with the transmission bearing, and a side of the bearing cover plate close to the transmission wheel is in contact with the transmission wheel.

3. The silicon wafer conveying device according to claim 1, characterized in that: The driven wheel is connected to the driven wheel shaft via a driven bearing, and along the third direction, the orthographic projection of the driven wheel and the orthographic projection of the driven bearing do not overlap.

4. The silicon wafer conveying device according to claim 1, characterized in that: A plurality of supporting wheel groups are also provided between the transmission wheel group at the starting end and the transmission wheel group at the end end; The supporting wheel group includes at least one upper supporting wheel, and the side of the upper supporting wheel away from the ground is in contact with the conveyor belt; along the third direction, the height of the driven wheel is D1, the height of the upper supporting wheel is D2, and D2=D1; The support wheel group also includes at least one lower support wheel, and the side of the lower support wheel away from the ground is in contact with the transmission belt; the transmission wheel group also includes an auxiliary support wheel, and the auxiliary support wheel is arranged close to the support wheel group, and the transmission belt sequentially connects the auxiliary support wheel, the transmission wheel and the driven wheel; along the third direction, the height of the auxiliary support wheel is D3, and the height of the lower support wheel is D4, and D4=D3.

5. The silicon wafer conveying device according to claim 4, characterized in that: The transmission wheel set also includes an adjusting wheel located between the transmission wheel and the driven wheel, and the transmission belt sequentially connects the transmission wheel, the adjusting wheel and the driven wheel.

6. The silicon wafer conveying device according to claim 5, characterized in that: The silicon wafer conveying device also includes a first bracket supporting the transmission wheel group, the first bracket is provided with an adjustment block, the adjustment block includes a plurality of mounting holes arranged along the first direction, and the adjustment wheel shaft is connected to the adjustment wheel through the mounting holes.

7. The silicon wafer conveying device according to claim 6, characterized in that: The silicon wafer conveying device further comprises a second bracket supporting the supporting wheel set, and along the third direction, the height of the second bracket is equal to the height of the first bracket.

8. The silicon wafer conveying device according to claim 7, characterized in that: The silicon wafer conveying device includes a plurality of support plates spaced apart along a first direction, wherein the support plates connect the first support and the second support, or the support plates connect two adjacent second supports.

9. The silicon wafer conveying device according to claim 8, characterized in that: The support plate is made of stainless steel.

10. The silicon wafer conveying device according to claim 1, characterized in that: The transmission wheel is connected to the motor through the motor shaft.

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