Low-vibration miniaturized dilution refrigerating machine

Abstract

The utility model relates to the technical field of low temperature and extremely low temperature, and provides a low-vibration miniaturized dilution refrigerator which comprises a pre-cooling module, a dilution module, a hot connection component and a dilution refrigeration cycle working medium module. Wherein the pre-cooling module comprises a two-stage Stirling pulse tube refrigerator and a throttling refrigerator; the two-stage Stirling pulse tube refrigerator provides precooling for the throttling refrigerator, and the throttling refrigerator provides precooling for the refrigeration cycle working medium dilution module; the hot connecting part is used for connecting the pre-cooling module and the refrigeration cycle working medium diluting module; the refrigeration cycle working medium dilution module provides a refrigeration cycle working medium for the dilution module. The precooling module comprises two stages of Stirling pulse tube refrigerators coupled with the throttling refrigerator for precooling, and each of the Stirling pulse tube refrigerators and the throttling refrigerator is only provided with one moving part of the linear compressor, so that the vibration and the size of the dilution refrigerator are reduced from the source; and application occasions with strict requirements on vibration and service life are met.

Description

Technical Field

[0001] The utility model relates to the technical field of cryogenic and ultra - low temperature technology, in particular to a low - vibration miniaturized dilution refrigerator. Background Art

[0002] The dilution refrigerator is a key device in the fields of quantum computing, condensed matter physics and detectors. The core components in these fields must work in an ultra - low temperature environment as low as 10 - 100 mK to maintain their special properties. Due to its characteristics of no electromagnetic interference and large cooling capacity, the dilution refrigerator is currently an ultra - low temperature technology applied in the fields such as quantum computing.

[0003] In the existing technology, the dilution refrigerator mainly uses a G - M refrigerator or a G - M type pulse tube refrigerator for precooling. It has a large cooling capacity, but also has large power consumption and volume. Moreover, this mechanical refrigerator is often accompanied by large vibrations and is not suitable for applications that require low vibration and miniaturization.

[0004] Therefore, how to provide a low - vibration miniaturized dilution refrigerator is a technical problem that those skilled in the art urgently need to solve. Summary of the Utility Model

[0005] The utility model provides a low - vibration miniaturized dilution refrigerator to solve the defect that the existing dilution refrigerator is not suitable for low - vibration miniaturization, and realizes reducing the vibration and volume of the dilution refrigerator from the source, meeting some application occasions with strict requirements for vibration and volume.

[0006] The utility model provides a low - vibration miniaturized dilution refrigerator, which includes a precooling module, a dilution module, a thermal connection component and a dilution refrigeration cycle working medium module;

[0007] Among them, the precooling module includes a two - stage Stirling - type pulse tube refrigerator and a throttle refrigerator; the two - stage Stirling - type pulse tube refrigerator provides precooling for the throttle refrigerator, and the throttle refrigerator provides precooling for the dilution refrigeration cycle working medium module;

[0008] The thermal connection component is used to connect the precooling module and the dilution refrigeration cycle working medium module; the dilution refrigeration cycle working medium module provides a refrigeration cycle working medium for the dilution module.

[0009] According to the low - vibration miniaturized dilution refrigerator provided by the utility model, the two - stage Stirling - type pulse tube refrigerator includes a first - stage Stirling - type pulse tube refrigerator and a second - stage Stirling - type pulse tube refrigerator, and the thermal connection component includes a first - stage flange; the cold end of the first - stage Stirling - type pulse tube refrigerator is thermally connected to the hot end of the second - stage Stirling - type pulse tube refrigerator through the first - stage flange.

[0010] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the thermal connection component further includes a secondary flange, and the secondary flange is used to connect the secondary Stirling-type pulse tube refrigerator and the throttle refrigerator, and the throttle refrigerator is precooled by the cold head of the secondary Stirling-type pulse tube refrigerator through the secondary flange.

[0011] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the thermal connection component further includes a tertiary flange, and the tertiary flange is used to connect the throttle refrigerator and the dilution refrigeration cycle working fluid module, and the dilution refrigeration cycle working fluid module is precooled by the cold head of the throttle refrigerator through the tertiary flange.

[0012] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the primary Stirling-type pulse tube refrigerator includes:

[0013] A gas reservoir;

[0014] An inertia tube, one end of which is communicated with the gas reservoir, and the inertia tube is used for phase modulation of the refrigerant;

[0015] A primary pulse tube, which is communicated with the other end of the inertia tube, and the primary pulse tube is connected to the primary flange;

[0016] A primary Stirling-type pulse tube compressor, which is communicated with the primary pulse tube, and the primary Stirling-type pulse tube compressor is used for compressing and transporting the refrigerant.

[0017] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the secondary Stirling-type pulse tube refrigerator includes:

[0018] A secondary pulse tube, which is communicated with the primary pulse tube; and the hot end of the secondary pulse tube is connected to the cold end of the primary pulse tube through the primary flange; the cold end of the secondary pulse tube is connected to the secondary flange;

[0019] A secondary Stirling-type pulse tube compressor, which is communicated with the secondary pulse tube.

[0020] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the throttle refrigerator includes a throttle evaporator, a throttle element, a throttle heat exchanger and a throttle multi-stage compressor. The throttle evaporator and the throttle multi-stage compressor form a throttle refrigeration cycle. The throttle element is arranged on the throttle intake pipeline, and the throttle heat exchanger is arranged on the throttle intake pipeline and the throttle outlet pipeline; and both the throttle intake pipeline and the throttle outlet pipeline are in contact with the primary flange and the secondary flange; the throttle evaporator is connected to the tertiary flange.

[0021] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the dilution module includes a mixing chamber, an extremely low-temperature heat exchanger, and a dilution evaporator, and the dilution refrigeration cycle working fluid module, the dilution evaporator, the extremely low-temperature heat exchanger, and the mixing chamber form a dilution refrigeration cycle loop; wherein, the dilution refrigeration cycle working fluid module is gradually cooled at the first-stage flange, the second-stage flange, and the third-stage flange.

[0022] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the dilution refrigeration cycle working fluid module includes 3 a He inlet pipe, 3 a He extraction pipe, 3 a He heat exchanger, and 3 a He circulation device. The 3 He inlet pipe and 3 the He extraction pipe are both provided with the 3 He heat exchanger; the 3 He circulation device, the 3 He inlet pipe, the dilution module, and the 3 He extraction pipe form a dilution refrigeration cycle.

[0023] According to a low-vibration miniaturized dilution refrigerator provided by the present utility model, the dilution refrigeration cycle working fluid module further includes a pressure gauge, and the 3 He inlet pipe and 3 the He extraction pipe are both provided with the pressure gauge.

[0024] For the low-vibration miniaturized dilution refrigerator provided by the present utility model, pre-cooling is performed by a pre-cooling module including a two-stage Stirling-type pulse tube refrigerator coupled with a throttle refrigerator. There is only one moving part, i.e., a linear compressor, in both the Stirling-type pulse tube refrigerator and the throttle refrigerator, and the linear compressor has the advantages of small volume vibration and long service life, thereby reducing the vibration and volume of the dilution refrigerator from the source and meeting some application scenarios with strict requirements for vibration and service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 It is a structural schematic diagram of the low-vibration miniaturized dilution refrigerator provided by the present utility model.

[0027] Reference numerals:

[0028] 1. Pre-cooling module; 2. Dilution module; 3. Thermal connection component; 4. Dilution refrigeration cycle working fluid module; 11. First-stage Stirling-type pulse tube refrigerator; 12. Second-stage Stirling-type pulse tube refrigerator; 13. Throttle refrigerator; 111. Gas storage; 112. Inertia tube; 113. First-stage pulse tube; 114. First-stage Stirling-type pulse tube compressor; 121. Second-stage pulse tube; 122. Second-stage Stirling-type pulse tube compressor; 131. Throttle evaporator; 132. Throttle element; 133. Throttle heat exchanger; 134. Throttle multi-stage compressor; 135. Throttle inlet pipe; 136. Throttle outlet pipe; 31. First-stage flange; 32. Second-stage flange; 33. Third-stage flange; 21. Mixing chamber; 22. Ultra-low temperature heat exchanger; 23. Dilution evaporator; 41. 3 He inlet pipe; 42. 3 He extraction pipe; 43. 3 He heat exchanger; 44. Pressure gauge; 45. 3 He circulation equipment. Specific implementation manners

[0029] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions in the present utility model will be clearly and completely described below with reference to the accompanying drawings in the present utility model. Obviously, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without making creative efforts belong to the scope of protection of the present utility model.

[0030] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be construed as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0031] The following combines Figure 1 to describe the low-vibration miniaturized dilution refrigerator of the present utility model.

[0032] An embodiment of the first aspect of the present utility model lies in providing a low-vibration miniaturized dilution refrigerator, including a pre-cooling module 1, a dilution module 2, a thermal connection component 3, and a dilution refrigeration cycle working fluid module 4.

[0033] Among them, the precooling module 1 includes a two-stage Stirling-type pulse tube refrigerator and a throttle refrigerator 13; the two-stage Stirling-type pulse tube refrigerator provides precooling for the throttle refrigerator 13. The Stirling-type pulse tube refrigerator is known for its high efficiency, reliability and low vibration. The two-stage design can further improve the refrigeration efficiency, especially in the low-temperature field.

[0034] The throttle refrigerator 13 is used to provide precooling for the dilution refrigeration cycle working fluid module. The throttle refrigerator 13 utilizes the throttling effect to achieve further cooling at low temperatures. Since the throttle refrigerator 13 is located downstream of the two-stage Stirling-type pulse tube refrigerator, the throttle refrigerator 13 can operate at a lower initial temperature, thus more effectively providing precooling for the dilution refrigeration cycle working fluid module 4.

[0035] The thermal connection component 3 is used to connect the precooling module 1 and the dilution refrigeration cycle working fluid module 4 to achieve heat transfer between the precooling module 1 and the dilution refrigeration cycle working fluid module 4. The thermal connection component 3 efficiently transfers the cold generated by the precooling module 1 to the dilution refrigeration cycle working fluid module 4.

[0036] The dilution refrigeration cycle working fluid module 4 provides the refrigeration cycle working fluid for the dilution module 2. Dilution refrigeration is an extremely low-temperature refrigeration technology based on 3 He- 4 the dilution effect of the He-He mixed gas and can operate at temperatures close to absolute zero. The dilution refrigeration cycle working fluid module 4 utilizes the cold provided by the precooling module 1 and, through the dilution refrigeration cycle, provides the required refrigeration cycle working fluid for the dilution module 2.

[0037] The low-vibration miniaturized dilution refrigerator provided by the present utility model, by adopting a two-stage Stirling-type pulse tube refrigerator coupled with a throttle refrigerator 13 for precooling, the Stirling-type pulse tube refrigerator and the throttle refrigerator 13 are small in volume and low in vibration. Both have only one moving part, namely the linear compressor, and the linear compressor has the advantages of small volume vibration and long service life, which can reduce the vibration and volume of the dilution refrigerator from the source and meet some application occasions with strict requirements for vibration and service life.

[0038] In a feasible embodiment of the present utility model, the two-stage Stirling-type pulse tube refrigerator includes a first-stage Stirling-type pulse tube refrigerator 11 and a second-stage Stirling-type pulse tube refrigerator 12, and the thermal connection component 3 includes a first-stage flange 31; the cold end of the first-stage Stirling-type pulse tube refrigerator 11 is thermally connected to the hot end of the second-stage Stirling-type pulse tube refrigerator 12 through the first-stage flange 31.

[0039] The first-stage Stirling-type pulse tube refrigerator 11, as the first stage of the pre-cooling module 1, starts working first, discharges the heat at the ambient temperature, and produces a preliminary cooling effect. Its cold end is the key starting point for the subsequent cooling process. The second-stage Stirling-type pulse tube refrigerator 12, as the second stage, receives the cold quantity from the first-stage Stirling-type pulse tube refrigerator 11 and further reduces the temperature on this basis. The hot end (i.e., the relatively higher-temperature end) of the second-stage Stirling-type pulse tube refrigerator 12 is connected to the cold end of the first-stage Stirling-type pulse tube refrigerator 11, and the effective transfer of heat is achieved through the heat connection component 3.

[0040] Generally speaking, the temperature of the first-stage Stirling-type pulse tube refrigerator 11 is about 30 - 70K, the temperature of the second-stage Stirling-type pulse tube refrigerator 12 is about 10 - 20K, and the second-stage Stirling-type pulse tube refrigerator 12 is pre-cooled by the cold head of the first-stage Stirling-type pulse tube refrigerator 11 through the first-stage flange 31. Through the first-stage flange 31, the cold quantity generated by the first-stage Stirling-type pulse tube refrigerator 11 can be efficiently transferred to the second-stage Stirling-type pulse tube refrigerator 12, thereby starting the next-stage refrigeration process.

[0041] In a feasible embodiment of the present utility model, the heat connection component 3 further includes a second-stage flange 32. The second-stage flange 32 is used to connect the second-stage Stirling-type pulse tube refrigerator 12 and the throttle refrigerator 13. The second-stage flange 32 mainly provides the mechanical connection and heat connection between the two.

[0042] In the pre-cooling module 1, the first-stage Stirling-type pulse tube refrigerator 11 starts working first and produces a preliminary cooling effect. Subsequently, the second-stage Stirling-type pulse tube refrigerator 12 receives the cold quantity from the first-stage Stirling-type pulse tube refrigerator 11 and further reduces the temperature on this basis. Finally, through the second-stage flange 32, the throttle refrigerator 13 is pre-cooled by the cold end of the second-stage Stirling-type pulse tube refrigerator 12, providing a lower-temperature refrigeration environment for the subsequent dilution refrigeration cycle working fluid module 4.

[0043] It should be noted that in the throttle refrigeration cycle in the throttle refrigerator 13, the temperature is about 2 - 4K, and the throttle refrigerator 13 is pre-cooled by the cold end of the second-stage Stirling-type pulse tube refrigerator 12 through the second-stage flange 32. The cold end of the second-stage Stirling-type pulse tube refrigerator 12 is closely connected to the hot end of the throttle refrigerator 13.

[0044] In a feasible embodiment of the present utility model, the heat connection component 3 further includes a third-stage flange 33. The third-stage flange 33 is used to connect the throttle refrigerator 13 and the dilution refrigeration cycle working fluid module 4. The dilution refrigeration cycle working fluid module 4 is pre-cooled by the cold head of the throttle refrigerator 13 through the third-stage flange 33, ensuring that the cold quantity can be quickly and effectively transferred from the throttle refrigerator 13 to the dilution refrigeration cycle working fluid module 4.

[0045] In the precooling module 1, after the initial and further cooling by the two-stage Stirling-type pulse tube refrigerator, the throttle refrigerator 13 receives the cold energy from the second-stage Stirling-type pulse tube refrigerator 12 and reaches a lower temperature on this basis. Subsequently, through the three-stage flange 33, the dilution refrigeration cycle working fluid module 4 is deeply precooled by the cold head of the throttle refrigerator 13 to provide the required cryogenic refrigeration cycle working fluid for the dilution module 2.

[0046] In a feasible embodiment of the present utility model, the first-stage Stirling-type pulse tube refrigerator 11 includes an air reservoir 111, an inertia tube 112, a first-stage pulse tube 113, and a first-stage Stirling-type pulse tube compressor 114. Among them, the air reservoir 111 is a phase-adjusting air bag and is the air reservoir of the inertia tube 112. One end of the inertia tube 112 is connected to the air reservoir 111, and the inertia tube 112 is used for phase adjustment of the refrigerant. The first-stage pulse tube 113 is connected to the other end of the inertia tube 112, and the first-stage pulse tube 113 is connected to the first-stage flange 31. The first-stage Stirling-type pulse tube compressor 114 is connected to the first-stage pulse tube 113, and the first-stage Stirling-type pulse tube compressor 114 is used for compressing and transporting the refrigerant.

[0047] The first-stage Stirling-type pulse tube refrigerator 11 realizes the refrigeration effect through the coordinated operation of components such as the air reservoir 111, the inertia tube 112, the first-stage pulse tube 113, and the first-stage Stirling-type pulse tube compressor 114.

[0048] In a feasible embodiment of the present utility model, the second-stage Stirling-type pulse tube refrigerator 12 includes a second-stage pulse tube 121 and a second-stage Stirling-type pulse tube compressor 122. The second-stage pulse tube 121 is connected to the first-stage pulse tube 113, receives the refrigerant that has been initially cooled by the first-stage pulse tube 113, and continues to cool it to reach a lower temperature. The hot end of the second-stage pulse tube 121 is connected to the cold end of the first-stage pulse tube 113 through the first-stage flange 31, which ensures that the refrigerant can smoothly transition from the first-stage refrigeration cycle to the second-stage refrigeration cycle. The cold end of the second-stage pulse tube 121 is connected to the second-stage flange 32 to provide a cold source for subsequent refrigeration processes (such as the dilution refrigeration cycle). The second-stage Stirling-type pulse tube compressor 122 is connected to the second-stage pulse tube 121. The second-stage Stirling-type pulse tube compressor 122 is the power source in the second-stage refrigeration cycle, and it is responsible for compressing and transporting the refrigerant. In the second-stage refrigeration cycle, the second-stage Stirling-type pulse tube compressor 122 sucks in the low-temperature and low-pressure refrigerant and compresses it into a high-temperature and high-pressure refrigerant, and then transports it to the second-stage pulse tube 121 for expansion refrigeration.

[0049] During the refrigeration process, the first-stage Stirling-type pulse tube refrigerator 11 first cools the refrigerant to a certain temperature through its internal refrigeration cycle. Subsequently, the refrigerant enters the second-stage pulse tube 121 of the second-stage Stirling-type pulse tube refrigerator 12 and is further cooled in the second-stage refrigeration cycle. During this process, the second-stage Stirling-type pulse tube compressor 122 continuously compresses and transports the refrigerant to provide power for the refrigeration process.

[0050] Among them, the first-stage Stirling-type pulse tube compressor 114 and the second-stage Stirling-type pulse tube compressor 122 can adopt an oil-free and valve-free linear compressor.

[0051] In a feasible embodiment of the present invention, the throttle refrigerator 13 includes a throttle evaporator 131, a throttle element 132, a throttle heat exchanger 133, and a throttle multi-stage compressor 134. The throttle evaporator 131 and the throttle multi-stage compressor 134 form a throttle refrigeration cycle. The throttle element 132 is arranged on the throttle intake pipeline 135, and the throttle heat exchanger 133 is arranged on the throttle intake pipeline 135 and the throttle outlet pipeline 136; and both the throttle intake pipeline 135 and the throttle outlet pipeline 136 are in contact with the first-stage flange 31 and the second-stage flange 32; the throttle evaporator 131 is connected to the third-stage flange 33.

[0052] During the working process, the working medium of the throttle refrigerator 13 is cooled to below 20K by the first-stage flange 31 and the second-stage flange 32, and then undergoes a throttling effect through the throttle element 132 and is reduced to below 4K.

[0053] Among them, the throttle multi-stage compressor 134 can adopt an oil-free and valve linear compressor.

[0054] In a feasible embodiment of the present invention, the dilution module 2 includes a mixing chamber 21, an ultra-low temperature heat exchanger 22, and a dilution evaporator 23. The mixing chamber 21 is the place where different working media are mixed in the dilution refrigeration cycle. During the dilution refrigeration process, two working media with different boiling points (usually 3 He and 4 a mixture of He) are mixed in the mixing chamber in a certain proportion to utilize the difference in their thermodynamic properties to achieve refrigeration.

[0055] The ultra-low temperature heat exchanger 22 transfers the heat of the refrigerant to an external cold source (such as the cold head of the throttle refrigerator 13). Through an efficient heat exchange process, the ultra-low temperature heat exchanger 22 can significantly reduce the temperature of the refrigerant and provide the necessary cooling capacity for the subsequent dilution evaporation process.

[0056] The dilution evaporator 23 is the core component for achieving the refrigeration effect in the dilution refrigeration cycle. In the evaporator, the high-boiling-point working medium (such as 4 He) is evaporated and absorbs the low-boiling-point working medium (such as 3The heat of vaporization of He) is used to further lower the temperature of the system.

[0057] The dilution refrigeration cycle working fluid module 4, the dilution evaporator 23, the cryogenic heat exchanger 22, and the mixing chamber 21 form a dilution refrigeration cycle loop; in this loop, the refrigerant undergoes a series of cooling, mixing, evaporation, and heat exchange processes to ultimately achieve an extremely low temperature refrigeration effect.

[0058] Among them, the dilution refrigeration cycle working fluid module 4 is gradually cooled at the first-stage flange 31, the second-stage flange 32, and the third-stage flange 33, and finally enters the dilution refrigeration cycle loop. The dilution refrigeration cycle of the dilution module 2 has a temperature of about 10 - 100 mK and is precooled by the cold head of the throttle refrigerator 13 through the third-stage flange 33. The cold head of the throttle refrigerator 13 preliminarily cools the refrigerant through the third-stage flange 33, providing the necessary cold quantity basis for the subsequent dilution refrigeration process.

[0059] In a feasible embodiment of the present invention, the dilution refrigeration cycle working fluid module 4 includes 3 He inlet pipe 41, 3 He extraction pipe 42, 3 He heat exchanger 43, pressure gauge 44, and 3 He circulation device 45, 3 Both the He inlet pipe 41 and 3 the He extraction pipe 42 are provided with 3 the He heat exchanger 43 and the pressure gauge 44; 3 the He circulation device 45, 3 the He inlet pipe 41, the dilution module 2, and 3 the He extraction pipe 42 form a dilution refrigeration cycle.

[0060] Among them, 3 the He circulation device 45 includes a molecular pump, a fore pump, and an oil-free valveless linear compressor.

[0061] It should be noted that the first-stage Stirling-type pulse tube compressor 114, the second-stage Stirling-type pulse tube compressor 122, and the throttle multistage compressor 134 are connected to the pipeline by flexible connections. In addition, all the flanges are connected to the cold heads of the refrigerators (pulse tube, throttle), including forms such as direct connection or connection using a metal heat conduction belt.

[0062] The low-vibration miniaturized dilution refrigerator provided by the present invention uses a two-stage Stirling-type pulse tube refrigerator with a relatively small volume and low vibration to couple with a throttle refrigerator for precooling, reducing the vibration of the dilution refrigerator from the source.

[0063] The present invention provides a working method for a low-vibration miniaturized dilution refrigerator, including:

[0064] Start the two - stage Stirling - type pulse tube refrigerator to provide precooling for the throttle refrigerator 13;

[0065] When the throttle refrigerator 13 is cooled below 20K, start the throttle refrigeration cycle;

[0066] After the throttle refrigeration cycle drops below 4K and the dilution module 2 is cooled below 20K, start the dilution refrigeration cycle.

[0067] Specifically, the operation steps are as follows:

[0068] S1. Start the first - stage Stirling - type pulse tube refrigerator 11, and the first - stage flange 31 starts to cool down;

[0069] S2. Start the second - stage Stirling - type pulse tube refrigerator 12, and the second - stage flange 32 starts to cool down;

[0070] S3. When the whole throttle refrigerator 13 drops below 20K, start the throttle multi - stage compressor 134 and start the throttle refrigeration cycle;

[0071] S4. Due to heat conduction, the temperature of the dilution module 2 continuously drops;

[0072] S5. After the dilution module 2 drops below 20K, start the dilution refrigeration cycle.

[0073] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0074] In the description of this specification, the descriptions with reference to terms such as "one embodiment", "some embodiments", "mode", "specific mode", or "some modes" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or mode are included in at least one embodiment or mode of the embodiments of the present utility model. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or mode. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or modes. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or modes described in this specification and the features of different embodiments or modes.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A low-vibration miniaturized dilution refrigerator, characterized in that, It includes a precooling module (1), a dilution module (2), a thermal connection component (3), and a dilution refrigeration cycle working fluid module (4); Among them, the precooling module (1) includes a two-stage Stirling-type pulse tube refrigerator and a throttle refrigerator (13); the two-stage Stirling-type pulse tube refrigerator provides precooling for the throttle refrigerator (13), and the throttle refrigerator (13) provides precooling for the dilution refrigeration cycle working fluid module; The thermal connection component (3) is used to connect the precooling module (1) and the dilution refrigeration cycle working fluid module (4); the dilution refrigeration cycle working fluid module (4) provides a refrigeration cycle working fluid for the dilution module (2).

2. The low-vibration miniaturized dilution refrigerator according to claim 1, wherein The two-stage Stirling-type pulse tube refrigerator includes a first-stage Stirling-type pulse tube refrigerator (11) and a second-stage Stirling-type pulse tube refrigerator (12), and the thermal connection component (3) includes a first-stage flange (31); the cold end of the first-stage Stirling-type pulse tube refrigerator (11) is thermally connected to the hot end of the second-stage Stirling-type pulse tube refrigerator (12) through the first-stage flange (31).

3. The low-vibration miniaturized dilution refrigerator according to claim 2, wherein, The thermal connection component (3) further includes a second-stage flange (32), and the second-stage flange (32) is used to connect the second-stage Stirling-type pulse tube refrigerator (12) and the throttle refrigerator (13), and the throttle refrigerator (13) is precooled by the cold head of the second-stage Stirling-type pulse tube refrigerator (12) through the second-stage flange (32).

4. The low-vibration miniaturized dilution refrigerator according to claim 3, characterized in that The thermal connection component (3) further includes a third-stage flange (33), and the third-stage flange (33) is used to connect the throttle refrigerator (13) and the dilution refrigeration cycle working fluid module (4), and the dilution refrigeration cycle working fluid module (4) is precooled by the cold head of the throttle refrigerator (13) through the third-stage flange (33).

5. The low-vibration miniaturized dilution refrigerator according to claim 4, wherein The first-stage Stirling-type pulse tube refrigerator (11) includes: A gas reservoir (111); An inertia tube (112) with one end communicating with the gas reservoir (111), and the inertia tube (112) is used for phase modulation of the refrigerant; A first-stage pulse tube (113) communicating with the other end of the inertia tube (112), and the first-stage pulse tube (113) is connected to the first-stage flange (31); A first-stage Stirling-type pulse tube compressor (114) communicating with the first-stage pulse tube (113), and the first-stage Stirling-type pulse tube compressor (114) is used for compressing and transporting the refrigerant.

6. The low-vibration miniaturized dilution refrigerator according to claim 5, characterized in that, The second-stage Stirling-type pulse tube refrigerator (12) includes: A second-stage pulse tube (121) communicating with the first-stage pulse tube (113); and the hot end of the second-stage pulse tube (121) is connected to the cold end of the first-stage pulse tube (113) through the first-stage flange (31); the cold end of the second-stage pulse tube (121) is connected to the second-stage flange (32); A second-stage Stirling-type pulse tube compressor (122) communicating with the second-stage pulse tube (121).

7. The low-vibration miniaturized dilution refrigerator according to claim 4, characterized in that, The throttle refrigerator (13) includes a throttle evaporator (131), a throttle element (132), a throttle heat exchanger (133) and a throttle multistage compressor (134). The throttle evaporator (131) and the throttle multistage compressor (134) form a throttle refrigeration cycle. The throttle element (132) is arranged on a throttle intake pipeline (135), and the throttle heat exchanger (133) is arranged on the throttle intake pipeline (135) and a throttle outlet pipeline (136); and both the throttle intake pipeline (135) and the throttle outlet pipeline (136) are in contact with the first-stage flange (31) and the second-stage flange (32); the throttle evaporator (131) is connected to the third-stage flange (33).

8. The low-vibration miniaturized dilution refrigerator according to claim 7, wherein The dilution module (2) includes a mixing chamber (21), an extremely low-temperature heat exchanger (22) and a dilution evaporator (23). The dilution refrigeration cycle working medium module (4), the dilution evaporator (23), the extremely low-temperature heat exchanger (22) and the mixing chamber (21) form a dilution refrigeration cycle loop; wherein, the dilution refrigeration cycle working medium module (4) is gradually cooled at the first-stage flange (31), the second-stage flange (32) and the third-stage flange (33).

9. The low-vibration miniaturized dilution refrigerator according to claim 8, characterized in that, The dilution refrigeration cycle working fluid module (4) includes 3 a He inlet pipe (41), 3 a He extraction pipe (42), 3 a He heat exchanger (43) and 3 a He circulation device (45). The 3 He inlet pipe (41) and 3 the He extraction pipe (42) are both provided with the 3 He heat exchanger (43); the 3 He circulation device (45), the 3 He inlet pipe (41), the dilution module (2) and the 3 He extraction pipe (42) form a dilution refrigeration cycle.

10. The low-vibration miniaturized dilution refrigerator according to claim 9, wherein, The dilution refrigeration cycle working fluid module (4) further includes a pressure gauge (44), and the 3 He inlet pipe (41) and 3 the pressure gauge (44) is provided on both the He extraction pipe (42).

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