Guide ring for sight glass of reduction furnace

Abstract

The utility model discloses a reduction furnace sight glass flow guide ring, which relates to the technical field of sight glass flow guide rings, and comprises a reduction furnace sight glass flow guide ring body and a reduction furnace sight hole body, the reduction furnace sight glass flow guide ring body is divided into a flow guide ring outer ring and a flow guide ring inner ring, the flow guide ring outer ring is arranged on the outer side of the flow guide ring inner ring, and the flow guide ring outer ring is arranged on the outer side of the flow guide ring inner ring. According to the flow guide ring for the sight glass of the reduction furnace, purging hydrogen and a mixer in the reduction furnace are subjected to collision reverse blowing isolation at the necking-down position of the inner ring of the flow guide ring, and mixed gas (such as chlorosilane, hydrogen and hydrogen chloride in the CVD reduction furnace) on the outer side of the inner ring of the flow guide ring is purged; then the sight glass is used for purging hydrogen to reversely blow the mixed gas into the reduction furnace, and finally, as the mixed gas cannot be in direct contact with the sight glass, silicone oil can be prevented from being generated on a quartz lens of the sight glass, and the quartz lens of the sight glass is ensured to be clean and clear.

Description

Technical Field

[0001] The utility model relates to the technical field of peephole flow guide rings, in particular to a reduction furnace peephole flow guide ring. Background Technique

[0002] At present, in the polysilicon industry, there are mainly two design schemes for the peepholes of polysilicon CVD reduction furnaces, namely, the flared or straight-shaped designs. The purpose of designing the peephole in the CVD reduction furnace is to facilitate better observation of the growth of silicon rods in the CVD reduction furnace during the operation of the CVD reduction furnace and to be able to take control measures in a timely manner to reduce the occurrence of abnormalities.

[0003] However, during the operation of the CVD reduction furnace, due to the purging of hydrogen gas through the peephole, this area is a low-temperature area compared with the temperature of the silicon rods, the gas field temperature, the furnace barrel, and the chassis in the CVD reduction furnace. The mixed gas (such as silane, hydrogen, hydrogen chloride, etc.) in the CVD reduction furnace will generate silicon powder in the low-temperature area, which will roll along the wall of the peephole and adhere to the peephole to produce silicone oil. As a result, the peephole of the CVD reduction furnace will turn black in the middle and later stages of operation, making it impossible to observe the operation inside the furnace. Abnormal phenomena such as silicon rod inclination, atomization, discharge, ignition, long burrs, and bark will occur inside the furnace. If the inspection personnel cannot discover and adjust in a timely manner, phase loss and an increase in the proportion of abnormal materials will occur inside the furnace, resulting in the abnormal operation of the CVD reduction furnace, reducing the quality of polysilicon products, increasing the production cost of polysilicon, and the atomization and unclear vision of the peephole of the CVD reduction furnace are a major pain point and bottleneck in the polysilicon industry, seriously restricting the large-throughput production of the current CVD reduction furnace. Content of the Utility Model

[0004] The purpose of the utility model is to provide a reduction furnace peephole flow guide ring to solve the problems raised in the prior art.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A reduction furnace peephole flow guide ring includes a reduction furnace peephole flow guide ring body and a reduction furnace peephole body. The reduction furnace peephole flow guide ring body is divided into a flow guide ring outer ring and a flow guide ring inner ring. The flow guide ring outer ring is arranged outside the flow guide ring inner ring. The flow guide ring outer ring and the flow guide ring inner ring are integrally formed. One side of the reduction furnace peephole body is provided with a reduction furnace peephole structure. The reduction furnace peephole structure includes two peephole purging hydrogen channels, four in-furnace peepholes of the reduction furnace, two out-of-furnace peepholes of the reduction furnace, an inner peephole pressure ring, an outer peephole pressure ring, eight peephole pressure ring fastening bolts, and eight peephole pressure ring fastening nuts. The two peephole purging hydrogen channels are respectively opened on the upper and lower sides of the reduction furnace peephole body.

[0006] Preferably, four flow guide ring threaded notches are formed on one side of the outer ring of the flow guide ring. Threaded connection is made inside each of the four flow guide ring threaded notches with a flow guide ring fixing bolt. The outer ring of the flow guide ring and the reduction furnace peephole body are fixedly connected through the four flow guide ring fixing bolts.

[0007] Preferably, two of the inner peep mirrors of the reduction furnace are respectively arranged on the upper and lower sides of one of the outer peep mirrors of the reduction furnace. The two inner peep mirrors of the reduction furnace are respectively fixedly connected with one of the outer peep mirrors of the reduction furnace through two first peep mirror sealing gaskets and two second peep mirror sealing gaskets.

[0008] Preferably, the other two inner peep mirrors of the reduction furnace are respectively arranged on the upper and lower sides of the other outer peep mirror of the reduction furnace. The other two inner peep mirrors of the reduction furnace are respectively fixedly connected with the other outer peep mirror of the reduction furnace through two third peep mirror sealing gaskets and two fourth peep mirror sealing gaskets.

[0009] Preferably, eight first threaded notches are formed on the reduction furnace peephole body, the inner pressure ring of the peep mirror and the outer pressure ring of the peep mirror. The eight peep mirror pressure ring fastening bolts are respectively arranged inside the eight first threaded notches and are respectively in threaded connection with the reduction furnace peephole body, the inner pressure ring of the peep mirror and the outer pressure ring of the peep mirror. The eight peep mirror pressure ring fastening nuts are respectively threadedly installed at positions close to one end on the outer layers of the eight peep mirror pressure ring fastening bolts.

[0010] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0011] In this application, the purge hydrogen and the mixer inside the reduction furnace collide and blow back and isolate at the constriction of the inner ring of the flow guide ring to purge the mixed gas (gases such as chlorosilane, hydrogen, and hydrogen chloride inside the CVD reduction furnace) on the outer side of the inner ring of the flow guide ring, and then use the purge hydrogen of the peep mirror to blow back the mixed gas into the reduction furnace. Finally, since the mixed gas and the peep mirror cannot be in direct contact, it can prevent the generation of silicone oil on the quartz lens of the peep mirror, ensuring that the quartz lens of the peep mirror is clean and clear. Description of the Drawings

[0012] Figure 1 It is a schematic diagram of the T-shaped cylindrical structure model of a reduction furnace peep mirror flow guide ring of the present utility model;

[0013] Figure 2 It is a schematic diagram of the T-shaped conical structure model of a reduction furnace peep mirror flow guide ring of the present utility model.

[0014] Reference numerals in the figure: 1. Reduction furnace peephole deflector ring body; 2. Reduction furnace peephole body; 3. Deflector ring outer ring; 4. Deflector ring inner ring; 5. Deflector ring thread groove; 6. Peephole purging hydrogen channel; 7. First peephole sealing gasket; 8. Second peephole sealing gasket; 9. Third peephole sealing gasket; 10. Fourth peephole sealing gasket; 11. Reduction furnace inner peephole; 12. Reduction furnace outer peephole; 13. Peephole inner pressure ring; 14. Peephole outer pressure ring; 15. Peephole pressure ring fastening bolt; 16. Peephole pressure ring fastening nut. Detailed implementation manners

[0015] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0016] Embodiment: As Figure 1 - Figure 2 shown, the present invention provides a technical solution for a reduction furnace peephole deflector ring, including a reduction furnace peephole deflector ring body 1 and a reduction furnace peephole body 2. The reduction furnace peephole deflector ring body 1 is divided into a deflector ring outer ring 3 and a deflector ring inner ring 4. The deflector ring outer ring 3 is arranged outside the deflector ring inner ring 4, and the deflector ring outer ring 3 and the deflector ring inner ring 4 are integrally formed. One side of the reduction furnace peephole body 2 is provided with a reduction furnace peephole structure, which includes two peephole purging hydrogen channels 6, four reduction furnace inner peepholes 11, two reduction furnace outer peepholes 12, a peephole inner pressure ring 13, a peephole outer pressure ring 14, eight peephole pressure ring fastening bolts 15 and eight peephole pressure ring fastening nuts 16. The two peephole purging hydrogen channels 6 are respectively opened on the upper and lower sides of the reduction furnace peephole body 2.

[0017] One side of the deflector ring outer ring 3 is provided with four deflector ring thread grooves 5, and the inner sides of the four deflector ring thread grooves 5 are all threadedly connected with deflector ring fixing bolts. The deflector ring outer ring 3 and the reduction furnace peephole body 2 are fixedly connected by four deflector ring fixing bolts.

[0018] Two of the reduction furnace inner peepholes 11 are respectively arranged on the upper and lower sides of one of the reduction furnace outer peepholes 12, and two of the reduction furnace inner peepholes 11 are respectively fixedly connected with one of the reduction furnace outer peepholes 12 through two first peephole sealing gaskets 7 and two second peephole sealing gaskets 8.

[0019] The other two internal reduction furnace peepholes 11 are respectively arranged on the upper and lower sides of another external reduction furnace peephole 12, and the other two internal reduction furnace peepholes 11 are respectively fixedly connected to another external reduction furnace peephole 12 through two No. 3 peephole sealing gaskets 9 and two No. 4 peephole sealing gaskets 10.

[0020] The reduction furnace peephole body 2, the internal peephole pressure ring 13 and the external peephole pressure ring 14 are all provided with eight first threaded notches. Eight peephole pressure ring fastening bolts 15 are respectively arranged inside the eight first threaded notches and are respectively threadedly connected to the reduction furnace peephole body 2, the internal peephole pressure ring 13 and the external peephole pressure ring 14. Eight peephole pressure ring fastening nuts 16 are respectively threadedly installed at positions near one end of the outer layers of the eight peephole pressure ring fastening bolts 15.

[0021] It should be noted that the present utility model is a reduction furnace peephole flow guiding ring. When in use, the reduction furnace peephole flow guiding ring body 1 is added to the reduction furnace peephole body 2, so that the hydrogen blown by the peephole through the peephole purging hydrogen channel 6 is collected after reaching the quartz peephole lens, and the peephole purging hydrogen is guided from the peephole of the peephole to the constriction of the inner ring 4 of the flow guiding ring through the outer ring 3 of the flow guiding ring, improving the purging hydrogen flow rate in the peephole. The purging hydrogen and the mixer in the reduction furnace collide and are blown back and isolated at the constriction of the inner ring 4 of the flow guiding ring, and the mixed gas such as chlorosilane, hydrogen, and hydrogen chloride in the CVD reduction furnace on the outer side of the inner ring 4 of the flow guiding ring is purged, and then the mixed gas is blown back into the reduction furnace by the peephole purging hydrogen. Finally, since the mixed gas and the peephole cannot be in direct contact, the generation of silicone oil on the quartz lens of the peephole can be prevented, ensuring that the quartz lens of the peephole is clean and clear.

[0022] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present utility model. Any reference signs in the claims should not be regarded as limiting the claimed rights.

Claims

1. A diversion ring for a reduction furnace peephole, characterized in that: It includes a reduction furnace peephole deflector ring body (1) and a reduction furnace peephole body (2). The reduction furnace peephole deflector ring body (1) is divided into a deflector ring outer ring (3) and a deflector ring inner ring (4). The deflector ring outer ring (3) is arranged outside the deflector ring inner ring (4). The deflector ring outer ring (3) and the deflector ring inner ring (4) are integrally formed. One side of the reduction furnace peephole body (2) is provided with a reduction furnace peephole structure. The reduction furnace peephole structure includes two peephole purge hydrogen channels (6), four reduction furnace inner peepholes (11), two reduction furnace outer peepholes (12), a peephole inner pressure ring (13), a peephole outer pressure ring (14), eight peephole pressure ring fastening bolts (15) and eight peephole pressure ring fastening nuts (16). The two peephole purge hydrogen channels (6) are respectively opened on the upper and lower sides of the reduction furnace peephole body (2).

2. The diversion ring of the reduction furnace peephole according to claim 1, characterized in that: Four deflector ring threaded notches (5) are opened on one side of the deflector ring outer ring (3). Deflector ring fixing bolts are threadedly connected to the inner sides of the four deflector ring threaded notches (5). The deflector ring outer ring (3) and the reduction furnace peephole body (2) are fixedly connected by four deflector ring fixing bolts.

3. A diversion ring of a reduction furnace peephole according to claim 1, characterized in that: Two of the reduction furnace inner peepholes (11) are respectively arranged on the upper and lower sides of one of the reduction furnace outer peepholes (12). The two reduction furnace inner peepholes (11) are respectively fixedly connected to one of the reduction furnace outer peepholes (12) through two first peephole sealing gaskets (7) and two second peephole sealing gaskets (8).

4. A diversion ring for a reduction furnace peephole according to claim 1, characterized in that: The other two reduction furnace inner peepholes (11) are respectively arranged on the upper and lower sides of the other reduction furnace outer peephole (12). The other two reduction furnace inner peepholes (11) are respectively fixedly connected to the other reduction furnace outer peephole (12) through two third peephole sealing gaskets (9) and two fourth peephole sealing gaskets (10).

5. The diversion ring of the reduction furnace peephole according to claim 1, characterized in that: Eight first threaded notches are opened on the reduction furnace peephole body (2), the peephole inner pressure ring (13) and the peephole outer pressure ring (14). The eight peephole pressure ring fastening bolts (15) are respectively arranged inside the eight first threaded notches and are threadedly connected to the reduction furnace peephole body (2), the peephole inner pressure ring (13) and the peephole outer pressure ring (14). The eight peephole pressure ring fastening nuts (16) are respectively threadedly installed at positions near one end of the outer layers of the eight peephole pressure ring fastening bolts (15).

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