Ceramic support for calcining boron nitride substrate

Abstract

The utility model provides a ceramic support for calcining a boron nitride substrate, which comprises a plurality of layers of bearing plates, and the adjacent bearing plates are connected through adjustable support columns. Wherein the bearing plate is of a boron nitride ceramic flat plate structure, and a first sinking groove is formed in the upper surface of the bearing plate and used for bearing a boron nitride substrate; a first through hole and a second through hole are formed in the first sinking groove, and a first blind hole and a second blind hole are further formed in the upper surface of the bearing plate and used for being connected with the adjustable supporting column. The secondary calcining and stacking device is simple in structure and low in cost, efficient secondary calcining and stacking of the boron nitride substrates are achieved through the multi-layer homogeneous supporting structure, and exogenous pollution is reduced; through the design of the through holes, good flowing of heat is guaranteed, workpieces are evenly heated, residues of internal stress are reduced, and the production quality is improved; and by combining the design of the adjustable supporting columns, the device can be suitable for boron nitride substrates of various sizes and types.

Description

Technical Field

[0001] The utility model relates to the technical field of boron nitride calcination, and particularly relates to a ceramic bracket for calcining boron nitride substrates. Background Art

[0002] Boron nitride substrates are high-performance ceramic products with broad application prospects. They are prepared from boron nitride powder through a series of complex processes. Specifically, the boron nitride powder needs to undergo cold isostatic pressing; in this process, the powder is compacted under high pressure to give it a certain initial shape and density. Then hot press sintering is carried out, and through the combined action of high temperature and high pressure, the boron nitride particles are tightly bonded to form a solid ceramic structure. In the processing and forming stage, according to specific usage requirements, the sintered ceramic is cut, ground, etc. to obtain the required size and shape. After the processing and forming are completed, finished product multi-layer support and stacking are carried out to prepare for subsequent processes.

[0003] However, during the hot pressing and processing of boron nitride ceramic substrates, the problem of uneven release of internal stress often occurs. This will cause the substrate to warp easily during subsequent use, especially when the temperature changes. This warping will not only affect the performance and service life of the substrate, but may also damage the equipment using the boron nitride substrate.

[0004] To solve this problem, usually after the boron nitride ceramic substrate is processed and formed, the substrate itself is placed in an atmosphere furnace for secondary high-temperature calcination. The secondary high-temperature calcination has two main purposes: one is to release internal stress so that the substrate can maintain a stable shape at different temperatures; the other is to remove impurities, removing impurities that may be mixed in during the processing to improve the purity and performance of the substrate.

[0005] In the prior art, when performing secondary calcination, a bracket is generally required to support the boron nitride substrate. The role of this bracket is crucial. It must ensure that the substrate is evenly heated in the atmosphere furnace to avoid deformation or damage caused by local overheating or uneven stress; at the same time, it must also facilitate the loading and unloading of the substrate to improve production efficiency.

[0006] However, there are some problems with the existing brackets for boron nitride ceramic substrates. For example, the structural design of the bracket is unreasonable, and it may not be able to well adapt to boron nitride substrates of different sizes and shapes, resulting in unstable support; or the material selection of the bracket is inappropriate, and it is prone to react with the boron nitride substrate at high temperatures, affecting the quality of the substrate; there is also poor heat flow inside the bracket, resulting in the quality of secondary calcination not meeting the requirements.

[0007] In summary, in order to improve the quality and performance of boron nitride substrates and meet the high requirements of the market, it is necessary to develop a new type of bracket for the secondary calcination of calcined boron nitride substrates. This bracket should have a reasonable structural design, appropriate material selection, and fine manufacturing process, and be able to effectively support the boron nitride substrate for secondary high-temperature calcination, solve the problems of uneven internal stress release and impurities, and provide a strong guarantee for the wide application of boron nitride substrates. Utility Model Content

[0008] Aiming at the problems existing in the prior art, the present utility model provides a ceramic bracket with a simple structure, low cost, and applicable to the secondary calcination of boron nitride substrates.

[0009] To achieve the above object, the technical solution adopted by the present utility model is as follows:

[0010] A ceramic bracket for calcining boron nitride substrates mainly includes multiple layers of bearing plates, and adjacent bearing plates are connected by adjustable support columns;

[0011] The bearing plate is a boron nitride ceramic flat plate structure, and the upper surface is provided with a first sinking groove for supporting the boron nitride substrate;

[0012] The bottom surface of the first sinking groove is provided with a plurality of first through holes that penetrate up and down; the peripheral side surface of the sinking groove is provided with a plurality of second through holes that penetrate horizontally

[0013] The upper surface of the bearing plate is also provided with at least one first blind hole for connecting the adjustable support column of the upper layer; the lower surface of the bearing plate is provided with at least one second blind hole for connecting the adjustable support column of the lower layer.

[0014] Optionally, the bearing plates are stacked, and the adjustable support columns are inserted into the bearing plates.

[0015] Optionally, it further includes an upper cover plate placed on the top surface of the multiple layers of bearing plates;

[0016] The upper cover plate is a flat plate structure, and the surface is provided with a plurality of third through holes that penetrate up and down;

[0017] The horizontal dimension of the upper cover plate is at least larger than the horizontal dimension of the first sinking groove.

[0018] Optionally, the lower surface of the upper cover plate is provided with a second sinking groove, and the bottom surface of the second sinking groove is provided with the third through holes;

[0019] The peripheral side surface of the second sinking groove is provided with a plurality of fourth through holes that penetrate horizontally.

[0020] Optionally, the plurality of second through holes on the bearing plate are distributed in a double row along the circumferential direction; the plurality of fourth through holes on the upper cover plate are distributed in a single row along the circumferential direction;

[0021] The aperture diameter of the fourth through hole is less than or equal to the aperture diameter of the second through hole; the number of the fourth through holes is less than or equal to the number of the second through holes on any one of the carrier plates.

[0022] Optionally, the aperture diameter of the third through hole is less than or equal to the aperture diameter of the first through hole;

[0023] the number of the third through holes is less than or equal to the number of the first through holes on any one of the carrier plates.

[0024] Optionally, the upper cover plate is a boron nitride ceramic cover plate.

[0025] Optionally, a first blind hole is provided at each corner of the upper surface of each carrier plate; a second blind hole is provided at each corner of the lower surface of each carrier plate;

[0026] The depths of the first blind hole and the second blind hole are both greater than or equal to 5 mm.

[0027] Optionally, the adjustable support column is a boron nitride ceramic bolt assembly, including a cylindrical nut and an internal hexagonal bolt;

[0028] The cylindrical nut is provided with a threaded blind hole and is in threaded cooperation with the internal hexagonal bolt;

[0029] The outer diameter of the bolt head of the internal hexagonal bolt is the same as the outer diameter of the cylindrical nut.

[0030] Optionally, the aperture diameters of the first blind hole and the second blind hole are both greater than the outer diameter of the adjustable support column, and the difference range is 0.1 mm - 0.5 mm.

[0031] Compared with the prior art, the utility model has the following beneficial effects:

[0032] The utility model has a simple structure and low cost, realizes the efficient secondary calcination stacking of boron nitride substrates through a multi-layer homogeneous supporting structure, and reduces exogenous pollution; the through hole design is combined to ensure good heat flow, so that the workpieces are uniformly heated, reduce the residual internal stress, and improve the production quality; combined with the design of the adjustable support column, it can be applicable to boron nitride substrates of multiple size types. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0034] Figure 1This is the three-dimensional view of the present utility model;

[0035] Figure 2 This is the exploded view of the stacked carrier plates in a specific embodiment of the present utility model;

[0036] Figure 3 This is the upper three-dimensional view of the carrier plate in a specific embodiment of the present utility model;

[0037] Figure 4 This is the lower three-dimensional view of the carrier plate in a specific embodiment of the present utility model;

[0038] Figure 5 This is the three-dimensional view of the adjustable support column in a specific embodiment of the present utility model;

[0039] Figure 6 This is the upper three-dimensional view of the upper cover plate in a specific embodiment of the present utility model;

[0040] Figure 7 This is the lower three-dimensional view of the upper cover plate in a specific embodiment of the present utility model.

[0041] In the figure: 1. Carrier plate, 2. Adjustable support column, 3. Upper cover plate, 101. Boron nitride ceramic flat structure, 102. First sink, 103. First through hole, 104. First blind hole, 105. Second through hole, 106. Second blind hole, 201. Cylindrical nut, 202. Hexagon socket head bolt, 301. Flat structure, 302. Second sink, 303. Third through hole, 304. Fourth through hole. Detailed implementation manners

[0042] To make the purpose, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0043] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0044] In the description of the present utility model, "a plurality of" means two or more, unless otherwise specifically defined.

[0045] In the present utility model, unless otherwise clearly specified and defined, terms such as "installation" and "connection" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0046] It is worth noting that, unless otherwise specified, the methods used in the present utility model are all conventional methods; the raw materials and devices used, unless otherwise specified, are all conventional commercially available products, and their sources are not specifically limited.

[0047] As Figure 1 shown, this embodiment provides a ceramic bracket for calcining a boron nitride substrate, which mainly includes multiple layers of bearing plates 1. In this embodiment, a three-layer structure is specifically taken as an example for illustration, and the actual stacking number of layers can be set according to requirements. The bearing plates 1 are placed in a stacked manner from top to bottom, specifically as Figure 2 shown, and are connected by adjustable support columns 2 between two adjacent bearing plates 1 up and down. The adjustable support columns 2 and the bearing plates 1 are specifically connected in a plug-in manner.

[0048] Among them, as shown in Figure 3 and Figure 4 , the bearing plate 1 is a boron nitride ceramic flat plate structure 101, and a first sunk groove 102 is provided on the upper surface for supporting the boron nitride substrate. The first sunk groove 102 is a square groove structure, and a plurality of first through holes 103 penetrating up and down are provided on its bottom surface. The first through holes 103 are densely arranged in an array form on the bottom surface of the first sunk groove 102.

[0049] In order to increase the lateral heat circulation, a laterally penetrating second through hole 105 is also machined on the circumferential side surface of the first sunk groove 102, which also adopts an array form, specifically a double-row array distribution along the circumferential direction.

[0050] On the upper surface of the bearing plate 1 of this embodiment, 4 first blind holes 104 are also provided for connecting the adjustable support columns 2 of the upper layer. Optionally, the first blind holes 104 are arranged at the four corners to avoid blocking the workpiece picking and placing space and are beneficial to the stacking stability of the bearing plate 1. The depth of the first blind holes 104 is greater than or equal to 5 mm, and 5 mm is preferably selected in this embodiment.

[0051] Correspondingly, 4 second blind holes 106 are provided on the lower surface of the bearing plate 1 for connecting the adjustable support columns 2 of the lower layer. Optionally, in order to be able to place them in alignment, it is designed that the second blind holes 106 are also located at the four corners, and the lateral positions are the same as those of the first blind holes 104. The depth of the second blind holes 106 is greater than or equal to 5 mm, and 5 mm is preferably selected in this embodiment.

[0052] Thus, the upper and lower adjacent carrier plates 1 can be stacked by inserting 4 adjustable support columns 2.

[0053] Optionally, as Figure 5 shown, the adjustable support column 2 of this embodiment is a boron nitride ceramic bolt assembly. This design can avoid the introduction of impurities, thereby ensuring the purity of the workpiece. The adjustable support column 2 includes a cylindrical nut 201 and an internal hexagonal bolt 202. Among them, the cylindrical nut 201 is provided with a threaded blind hole and is threadedly matched with the internal hexagonal bolt 202 to form a columnar structure. Further, the outer diameter of the bolt head of the internal hexagonal bolt 202 is designed to be the same as the outer diameter of the cylindrical nut 201. This can simplify the size types of the first and second blind holes and also avoid complex connection operations. Thus, the apertures of the aforementioned first blind hole and the second blind hole are the same and larger than the outer diameter of the adjustable support column 2, and the difference range is 0.1 mm - 0.5 mm. Preferably, in this embodiment, the apertures of the first and second blind holes are 0.2 mm larger than the outer diameter of the adjustable support column 2. This design can adjust the height of the adjustable support column 2 through simple screwing operations, thereby adjusting the distance between adjacent carrier plates 1 to adapt to boron nitride substrates of different sizes. Even different size types of boron nitride substrates can be placed in a single secondary calcination.

[0054] Optionally, the ceramic bracket of this embodiment further includes an upper cover plate 3, as Figure 1 shown, which is placed on the top surface of the multi-layer stacked carrier plates 1. The horizontal dimension of the upper cover plate 3 is at least larger than the horizontal dimension of the first sink 102, that is, the upper cover plate 3 can at least completely cover the opening formed by the first sink 102.

[0055] Combined with Figure 6 shown, the upper cover plate 3 is a boron nitride ceramic cover plate, which can also avoid the introduction of impurities. The main body adopts a flat plate structure 301, and a plurality of third through holes 303 penetrating up and down are provided on the surface. Optionally, combined with Figure 7As shown in the figure, a second sunk groove 302 is provided on the lower surface of the upper cover plate 3, and the third through holes 303 are distributed on the bottom surface of the second sunk groove 302 in an array manner. Similarly, a plurality of laterally penetrating fourth through holes 304 are also provided on the circumferential side surface of the second sunk groove 302. Further, in order to control the heat flow and balance the temperature, in this embodiment, the fourth through holes 304 on the upper cover plate 3 are distributed in a single row along the circumferential direction, and the aperture of the fourth through holes 304 is less than or equal to the aperture of the second through holes 105, and the number of the fourth through holes 304 is less than or equal to the number of the second through holes 105 on any one of the bearing plates 1. Furthermore, in this embodiment, the aperture of the third through holes 303 is less than or equal to the aperture of the first through holes 103; the number of the third through holes 303 is less than or equal to the number of the first through holes 103 on any one of the bearing plates 1. Thus, by adjusting the heat flow through the upper cover plate 3, some common temperature control problems in the secondary calcination can be avoided, and the size can be changed within the above range according to the scene requirements to obtain a better calcination effect.

[0056] Finally, it should be noted that the above content is only used to illustrate the technical solution of the present invention, rather than to limit the protection scope of the present invention. Any simple modification or equivalent replacement made by those of ordinary skill in the art to the technical solution of the present invention shall not depart from the essence and scope of the technical solution of the present invention.

Claims

1. A ceramic bracket for a calcined boron nitride substrate, characterized in that: It includes multiple layers of bearing plates, and adjacent bearing plates are connected by adjustable support columns; The bearing plate is a boron nitride ceramic flat plate structure, and its upper surface is provided with a first sinking groove for supporting a boron nitride substrate; The bottom surface of the first sinking groove is provided with a plurality of first through holes penetrating up and down; the circumferential side surface of the sinking groove is provided with a plurality of second through holes penetrating horizontally The upper surface of the bearing plate is further provided with at least one first blind hole for connecting the adjustable support column of the upper layer; the lower surface of the bearing plate is provided with at least one second blind hole for connecting the adjustable support column of the lower layer.

2. The ceramic bracket for the calcined boron nitride substrate according to claim 1, wherein: The bearing plates are stacked, and the adjustable support columns are inserted into the bearing plates.

3. The ceramic bracket for the calcined boron nitride substrate according to claim 1, characterized in that: It further includes an upper cover plate placed on the top surface of the multiple layers of bearing plates; The upper cover plate is a flat plate structure, and its surface is provided with a plurality of third through holes penetrating up and down; The horizontal dimension of the upper cover plate is at least larger than the horizontal dimension of the first sinking groove.

4. The ceramic bracket for a calcined boron nitride substrate according to claim 3, characterized in that: The lower surface of the upper cover plate is provided with a second sinking groove, and the bottom surface of the second sinking groove is provided with the third through holes; The circumferential side surface of the second sinking groove is provided with a plurality of fourth through holes penetrating horizontally.

5. The ceramic bracket for the calcined boron nitride substrate according to claim 4, characterized in that: The multiple second through holes on the bearing plate are distributed in a double row along the circumference; the multiple fourth through holes on the upper cover plate are distributed in a single row along the circumference; The aperture of the fourth through hole is less than or equal to the aperture of the second through hole; the number of the fourth through holes is less than or equal to the number of the second through holes on any bearing plate.

6. The ceramic bracket for the calcined boron nitride substrate according to claim 4, characterized in that: The aperture of the third through hole is less than or equal to the aperture of the first through hole; The number of the third through holes is less than or equal to the number of the first through holes on any bearing plate.

7. The ceramic bracket for a calcined boron nitride substrate according to any one of claims 3-6, characterized in that: The upper cover plate is a boron nitride ceramic cover plate.

8. The ceramic bracket for a calcined boron nitride substrate according to claim 1, wherein: One first blind hole is provided at each corner of the upper surface of each bearing plate; one second blind hole is provided at each corner of the lower surface of each bearing plate; The depths of the first blind hole and the second blind hole are both greater than or equal to 5mm.

9. The ceramic bracket for the calcined boron nitride substrate according to claim 8, wherein: The adjustable support column is a boron nitride ceramic bolt assembly, including a cylindrical nut and an internal hexagonal bolt; The cylindrical nut is provided with a threaded blind hole and is in threaded cooperation with the internal hexagonal bolt; The outer diameter of the bolt head of the internal hexagonal bolt is the same as the outer diameter of the cylindrical nut.

10. The ceramic bracket for a calcined boron nitride substrate according to claim 9, characterized in that: The apertures of the first blind hole and the second blind hole are both larger than the outer diameter of the adjustable support column, and the difference range is 0.1mm - 0.5mm.

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