Automatic gas distribution device containing phosphorane and silane

Abstract

The utility model discloses an automatic gas distribution device containing phosphorane and silane, which relates to the technical field of automatic gas distribution and comprises a PLC (programmable logic controller) self-control touch screen control cabinet, a high-cleanliness automatic gas distribution valve group, a fully-sealed stainless steel vertical cabinet, a mixed gas carrying bottle, an all-steel high-precision weighing platform and an automatic control system. The PLC self-control touch screen control cabinet is provided with a high-definition touch display screen, a mechanical control button and a buzzing alarm device, one-button automatic gas distribution is really realized through the PLC self-control touch screen control cabinet according to the set proportion formula, and after the one-button automatic gas distribution is completed, the one-button automatic gas distribution is automatically stopped and a signal is sent out; the equipment has the functions of automatic control, data monitoring, alarm, recording, storage and statistics, and is in butt joint with carried upper computer control software to facilitate background management of managers; the circuit connection in the equipment is explosion-proof, safe and reliable; the equipment adopts an integrated design and is matched with a negative-pressure air inducing system, so that the safety, reliability, attractiveness and durability are really realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to automatic gas distribution technical field, concretely is a kind of automatic gas distribution device containing phosphine, silane. BACKGROUND

[0002] The automatic gas distribution device in prior art often needs manual intervention when carrying out gas distribution, greatly reduces gas distribution efficiency and accuracy, increases work flow, and improves human error. INVENTION CONTENTS

[0003] Therefore, in order to solve the above problems, the utility model provides an automatic gas distribution device containing phosphine and silane.

[0004] The utility model is realized, construct a kind of automatic gas distribution device containing phosphine and silane, the device includes PLC self-control touch screen control cabinet, high clean automatic gas distribution valve group, full-sealed stainless steel vertical cabinet, mixed gas carrier gas bottle, full-steel high-precision scale table and automatic control system;The high-definition touch display screen, mechanical control button and buzzer alarm device are equipped on the PLC self-control touch screen control cabinet;The high clean automatic gas distribution valve group is controlled by PLC self-control touch screen control cabinet, and the mixed gas carrier gas bottle is placed on the full-steel high-precision scale table to carry out automatic gas distribution;The full-steel high-precision scale table is connected with PLC self-control touch screen control cabinet by weighing sensor, and real-time transmission data and feedback.

[0005] Preferably, the high clean automatic gas distribution valve group is communicated with the mixed gas carrier gas bottle.

[0006] Preferably, the full-sealed stainless steel vertical cabinet is provided with a gas leakage detector, nitrogen gas filled inside, a negative pressure induced draft system and a layer explosion-proof electrical junction box.

[0007] The utility model has the following advantages: the utility model provides an automatic gas distribution device containing phosphine and silane by improvement, compared with the same type of equipment, has the following improvements:

[0008] The automatic gas distribution device containing phosphine and silane has the following advantages: the PLC self-control touch screen control cabinet realizes one-key automatic gas distribution according to the above-mentioned proportion formula, and stops automatically after completion and sends a signal;The device has automatic control, data monitoring, alarm, recording, saving and statistical functions, and is connected with the upper computer control software to facilitate the background management of management personnel;The circuit connection in the device is explosion-proof, safe and reliable;The device is designed in an integrated manner and is equipped with a negative pressure induced draft system, so that safety, reliability, beauty and durability are realized. BRIEF DESCRIPTION OF DRAWINGS

[0009] Figure 1 It is the three-dimensional structure schematic diagram of the utility model.

[0010] Including: PLC automatic touch screen control cabinet-1, high-clean automatic gas distribution valve group-2, fully sealed stainless steel vertical cabinet-3, mixed gas carrier bottle-4, all-steel high-precision weighing platform-5. DETAILED DESCRIPTION

[0011] The following will be combined with the Figure 1 The present invention is described in detail, and the technical solutions in the embodiments of the present invention are clearly explained. Although the embodiments described are complete, it is obvious that the embodiments described are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0012] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a central component. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a central component. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0013] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0014] See also Figure 1 The utility model is an automatic gas distribution device containing phosphine and silane, which includes a PLC automatic touch screen control cabinet 1, a high-clean automatic gas distribution valve group 2, a fully sealed stainless steel vertical cabinet 3, a mixed gas carrier bottle 4, an all-steel high-precision weighing platform 5, and an automatic control system.

[0015] Specifically, the PLC automatic touch screen control cabinet 1 is provided with a high-definition touch display screen, mechanical control buttons and a buzzer alarm device; the high-clean automatic gas distribution valve group 2 is provided with a pneumatic control valve, a high-precision pressure sensor, a flow meter, a safety valve, etc.; the fully sealed stainless steel vertical cabinet 3 is provided with a gas leak detector, an internal protective nitrogen, a negative pressure ventilation system, and a compartment explosion-proof electrical junction box; the mixed gas carrier bottle 4 is placed on an all-steel high-precision weighing platform 5 for automatic gas distribution; the all-steel high-precision weighing platform 5 is connected to the PLC automatic touch screen control cabinet 1 through a weighing sensor to transmit data and feedback in real time.

[0016] Specifically, after the automatic gas distribution is completed, the PLC automatic touch screen control cabinet 1 will feedback a signal, generate and save data; the upper computer control software carried out statistics on the obtained data to facilitate background management by management personnel.

[0017] Specifically, the high-cleanliness automatic gas distribution valve group 2 is controlled by a PLC automatic touch screen control cabinet 1. The mixed gas distribution ratio formula is input on the high-definition touch screen, and the pneumatic control valve is automatically opened through the automatic control program and automatically operates according to the set ratio formula.

[0018] Specifically, the all-steel high-precision weighing platform 5 is controlled by a PLC automatic touch screen control cabinet 1. When the mixed gas carrier bottle 4 is placed on the all-steel high-precision weighing platform 5 for gas distribution, the weighing sensor in the weighing platform transmits data, and the automatic control program feeds back the data in real time to the high-clean automatic gas distribution valve group 2 to control the opening and closing of the valve, thereby controlling the accuracy of the gas distribution according to the above-mentioned proportional formula.

[0019] Specifically, the automatic control system installed in the PLC automatic touch screen control cabinet 1, all equipment and instruments of this device are connected to the automatic control system, and are equipped with host computer control software for remote control and monitoring, and the gas distribution records can be fed back, recorded and saved through the system, which is convenient for management personnel to conduct data statistics and management.

[0020] The utility model provides an improved automatic gas distribution device containing phosphine and silane, and its working principle is as follows:

[0021] When in use, the operator first checks whether the various indicator data in the PLC automatic touch screen control cabinet 1 are normal; when the raw gas and various instruments are normal, push the mixed gas carrier bottle 4 to the all-steel high-precision weighing platform 5, and then connect the gas distribution pipeline in the high-clean automatic gas distribution valve group 2 to the mixed gas carrier bottle 4. At this time, check the weighing value in the PLC automatic touch screen control cabinet 1. If the weighing value is not at zero, it needs to be reset to zero, and close the fully sealed stainless steel vertical cabinet 3 to ensure its sealing; after the above preparations are completed, the required gas distribution accuracy and content can be preset in the proportional formula setting function of the PLC automatic touch screen control cabinet 1; after completing the above steps, the automatic control system will complete the automatic gas distribution process according to the formula; during this process, the PLC automatic touch screen control cabinet 1 monitors the temperature, pressure, and leakage in real time, and the automatic gas distribution device is equipped with an online distribution.

[0022] The above shows and describes the basic principles, main features and advantages of the present invention, and the standard parts used in the present invention can be purchased from the market, and special-shaped parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0023] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An automated gas distribution device containing phosphine and silane, including a PLC automatic touch screen control cabinet, a high-cleanliness automatic gas distribution valve group, a fully sealed stainless steel vertical cabinet, a mixed gas carrier bottle, an all-steel high-precision weighing platform, and an automated control system; Its characteristics are: The PLC automatic touch screen control cabinet is equipped with a high-definition touch screen display, mechanical control buttons and a buzzer alarm device; The high-cleanliness automatic gas distribution valve group is controlled by a PLC automatic touch screen control cabinet, and the mixed gas carrier cylinder is placed on an all-steel high-precision weighing platform for automatic gas distribution; the all-steel high-precision weighing platform is connected to the PLC automatic touch screen control cabinet through a weighing sensor to transmit data and provide feedback in real time.

2. The automatic gas distribution device containing phosphine and silane according to claim 1, characterized in that: The high-cleanliness automatic gas distribution valve group is communicated with the mixed gas carrier bottle.

3. The automatic gas distribution device containing phosphine and silane according to claim 2, characterized in that: The fully sealed stainless steel vertical cabinet is provided with a gas leak detector, internally filled with protective nitrogen, a negative pressure ventilation system, and an interlayer explosion-proof electrical junction box.

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