Vacuumizing sample fixing device

Abstract

The utility model relates to the technical field of nondestructive testing equipment, and provides a vacuumizing sample fixing device which comprises a base, a sample platform, a first vacuum frame and a second vacuum frame, the sample platform is arranged above the base; the sample platform is provided with a first platform and a second platform; the second platform is located on the inner side of the first platform, and the second platform is lower than the first platform; a first air groove is formed in the first platform, and a second air groove is formed in the second platform; a first air hole and a second air hole are formed in the sample platform, the first air hole is communicated with the first air groove, and the second air hole is communicated with the second air groove; the first vacuum frame is mounted on the first platform; and the second vacuum frame is mounted on the second platform. According to the utility model, samples are adsorbed by vacuumizing, the surfaces of the samples can be protected, the samples can be quickly replaced, and the device is suitable for fixing circular samples with different sizes.

Description

Technical Field

[0001] This utility model relates to the field of nondestructive testing equipment technology, and in particular to a vacuum sample fixing device. Background Technology

[0002] In the optical inspection process, samples need to be fixed. However, if ordinary mechanical clamping mechanisms are used for samples such as wafers and solar cells, the surface may be damaged. Moreover, ordinary mechanical clamping mechanisms require the sample to be removed and reinstalled when changing samples, which cannot be done quickly. The sample change speed is slow and the stability is poor.

[0003] In addition, each size of sample requires a different clamping mechanism, and the clamping mechanism cannot adapt to different sizes of samples, resulting in low detection efficiency and high detection cost. Utility Model Content

[0004] This invention primarily addresses the technical problems of existing clamping mechanisms, such as potential damage to sample surfaces, inability to quickly replace samples, and inability to adapt to samples of different sizes. It proposes a vacuum sample fixing device that uses vacuum suction to adsorb samples, thereby protecting the sample surface, enabling rapid sample replacement, and is suitable for fixing circular samples of different sizes.

[0005] This utility model provides a vacuum sample fixing device, including: a base, a sample platform, a first vacuum frame and a second vacuum frame;

[0006] The base has a central hole, and the sample platform, the first vacuum frame, and the second vacuum frame are all annular.

[0007] The sample platform is positioned above the base;

[0008] The sample platform has a first platform and a second platform; the second platform is located inside the first platform, and the height of the second platform is lower than that of the first platform;

[0009] A first air tank is provided on the first platform, and a second air tank is provided on the second platform;

[0010] The sample platform is provided with a first air hole and a second air hole, the first air hole being connected to a first air groove, and the second air hole being connected to a second air groove;

[0011] The first vacuum frame is mounted on a first platform; the interior of the first vacuum frame has a downward-facing third air groove; the third air groove is connected to the first air groove; the first vacuum frame is provided with a plurality of first air groove holes that communicate with the third air groove.

[0012] The second vacuum frame is mounted on the second platform; the interior of the second vacuum frame has a downward-facing fourth air groove; the fourth air groove is connected to the second air groove; the second vacuum frame is provided with a plurality of second air groove holes that communicate with the fourth air groove.

[0013] Preferably, the first vacuum frame has a third platform and a fourth platform located inside the third platform;

[0014] A first protrusion exists between the third platform and the fourth platform;

[0015] The first protrusion has a downward-facing third air groove inside; the first protrusion is provided with a plurality of first air groove holes that communicate with the third air groove.

[0016] Preferably, the second vacuum frame has a fifth platform and a sixth platform located inside the fifth platform;

[0017] A second protrusion exists between the fifth and sixth platforms;

[0018] The second protrusion has a downward-facing fourth air groove inside; the second protrusion is provided with a plurality of second air groove holes that communicate with the fourth air groove.

[0019] Preferably, pads are provided at both ends of the bottom surface of the base.

[0020] Preferably, the sample platform does not contact the base.

[0021] Preferably, the sample platform is provided with a plurality of fine-threaded bolts; the fine-threaded bolts abut against the base;

[0022] Multiple springs are installed between the sample platform and the base.

[0023] Preferably, a knob is provided on the top of the fine-threaded bolt.

[0024] This utility model provides a vacuum sample fixing device with a simple structure, saving space, convenient operation, and high reliability. Multiple fine-threaded bolts in the sample platform allow for manual adjustment of the spring tension, enabling level adjustment between the sample platform and the base. This ensures the device's levelness and stability under vacuum conditions, preventing sample displacement during testing. Precise adjustment is achieved through a knob design, facilitating operation. Each air groove can be sealed with sealant to prevent air leakage, ensuring airtightness, improving vacuum levels, and extending service life. Vacuum adsorption protects the sample surface; connecting the vacuum environment allows for rapid sample fixing, and disconnecting allows for quick sample removal, enabling rapid sample replacement. This simple operation also improves testing stability. The first and second vacuum frames can be selected according to actual needs, suitable for fixing circular samples of different sizes, improving the device's versatility and expandability. The vacuum frame surfaces undergo special treatment to enhance adsorption force, ensuring sample stability and safety. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the vacuum sample fixing device provided by this utility model;

[0026] Figure 2 This is a top view of the vacuum sample fixing device provided by this utility model;

[0027] Figure 3 This is a schematic diagram showing the disassembled vacuum sample fixing device provided by this utility model;

[0028] Figure 4 This is a schematic diagram of the sample platform provided by this utility model;

[0029] Figure 5 This is a schematic diagram of the bottom surface of the sample platform provided by this utility model;

[0030] Figure 6 This is a schematic diagram of the structure of the first vacuum frame provided by this utility model;

[0031] Figure 7 This is a schematic diagram of the bottom surface of the first vacuum frame provided by this utility model;

[0032] Figure 8 This is a schematic diagram of the structure of the second vacuum frame provided by this utility model;

[0033] Figure 9 This is a schematic diagram of the bottom surface of the second vacuum frame provided by this utility model.

[0034] Reference numerals: 1. Pad; 2. Base; 3. Sample platform; 4. First vacuum frame; 5. Second vacuum frame; 6. Fine thread bolt; 7. Spring; 301. First platform; 302. First air groove; 303. Second platform; 304. Second air groove; 401. Third platform; 402. Fourth platform; 403. First protrusion; 404. First air groove hole; 405. Third air groove; 501. Fifth platform; 502. Sixth platform; 503. Second protrusion; 504. Second air groove hole; 505. Fourth air groove. Detailed Implementation

[0035] To make the technical problems solved by this utility model, the technical solutions adopted, and the technical effects achieved clearer, this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.

[0036] like Figure 1-3 As shown in the figure, the present invention provides a vacuum sample fixing device, which includes: a base 2, a sample platform 3, a first vacuum frame 4, and a second vacuum frame 5.

[0037] The base 2 has a central hole, and pads 1 are respectively provided at both ends of the bottom surface of the base 2. The pads 1 provide fixation and support for the entire device. The base 2 provides a stable foundation.

[0038] The sample platform 3, the first vacuum rack 4, and the second vacuum rack 5 are all ring-shaped. Each of the base 2, sample platform 3, first vacuum rack 4, and second vacuum rack 5 has an opening on one side for easy sample placement and removal.

[0039] The sample platform 3 is positioned above the base 2 and is used to mount the first vacuum frame 4 and the second vacuum frame 5. Its surface is flat for easy operation. The sample platform 3 does not contact the base 2. Specifically, the sample platform 3 has multiple fine-threaded bolts 6; these bolts abut against the base 2; each bolt has a knob on its top; and multiple springs 7 are installed between the sample platform 3 and the base 2. Specifically, the bottom of each spring 7 is fixed to the base 2, and the top of each spring 7 is fixed to a spring hole in the sample platform 3. A crossbar is located in the spring hole to fix the spring 7, thus connecting the sample platform 3 to the base 2. The springs 7 are made of high-strength spring steel, possessing good elasticity and durability.

[0040] The extension degree of the fine-threaded bolt 6 can be adjusted by rotating the knob and the fine-threaded bolt 6. Specifically, three fine-threaded bolts 6 can be set and distributed at different positions on the sample platform 3. By adjusting the three fine-threaded bolts 6, the tension of the spring 7 changes adaptively, realizing manual adjustment of the tension of the spring 7. This allows adjustment of the distance between different adjustment points between the sample platform 3 and the base 2, thereby realizing the levelness adjustment between the sample platform 3 and the base 2, ensuring the levelness and stability of the device.

[0041] like Figure 4-5 As shown, the sample platform 3 has a first platform 301 and a second platform 303; the second platform 303 is located inside the first platform 301, and the height of the second platform 303 is lower than that of the first platform 301; a first air groove 302 is formed on the first platform 301, and a second air groove 304 is formed on the second platform 303. The first platform 301 is used to install a first vacuum frame 4, and the second platform 303 is used to install a second vacuum frame 5. The sample platform 3 is provided with a first air hole and a second air hole, the first air hole communicating with the first air groove 302, and the second air hole communicating with the second air groove 304. The first air hole and the second air hole are used to connect a negative pressure pump to provide vacuum conditions.

[0042] like Figure 6-7 As shown, the first vacuum frame 4 is mounted on the first platform 301; the interior of the first vacuum frame 4 has a downward-facing third air groove 405; the third air groove 405 is connected to the first air groove 302; the first vacuum frame 4 is provided with a plurality of first air groove holes 404 communicating with the third air groove 405.

[0043] Specifically, the first vacuum frame 4 has a third platform 401 and a fourth platform 402 located inside the third platform 401; a first protrusion 403 is located between the third platform 401 and the fourth platform 402; the first protrusion 403 has a downward-facing third air groove 405 inside; and a plurality of first air groove holes 404 communicating with the third air groove 405 are provided on the first protrusion 403.

[0044] The third air groove 405 of the first vacuum frame 4 is connected to the first air groove 302 of the sample platform 3 to form a sealed space; the sample is placed on the first air groove hole 404; the first air hole is connected to a negative pressure pump, and the negative pressure pump draws air to form a near-vacuum environment, adsorbing the sample on the first air groove hole 404.

[0045] like Figure 8-9 As shown, the second vacuum frame 5 is mounted on the second platform 303; the interior of the second vacuum frame 5 has a downward-facing fourth air groove 505; the fourth air groove 505 is connected to the second air groove 304; the second vacuum frame 5 is provided with a plurality of second air groove holes 504 that communicate with the fourth air groove 505.

[0046] Specifically, the second vacuum frame 5 has a fifth platform 501 and a sixth platform 502 located inside the fifth platform 501; a second protrusion 503 is located between the fifth platform 501 and the sixth platform 502; the interior of the second protrusion 503 has a downward-facing fourth air groove 505; and the second protrusion 503 is provided with a plurality of second air groove holes 504 communicating with the fourth air groove 505.

[0047] The fourth gas groove 505 of the second vacuum frame 5 is connected to the second gas groove 304 of the sample platform 3 to form a sealed space; the sample is placed on the second gas groove hole 504; the second gas hole is connected to a negative pressure pump, and the negative pressure pump draws air to form a near-vacuum environment, adsorbing the sample on the second gas groove hole 504.

[0048] In this invention, the first vacuum rack 4 and the second vacuum rack 5 are of different sizes. For example, the first vacuum rack 4 is an 8-inch vacuum rack, and the second vacuum rack 5 is a 6-inch vacuum rack. The appropriate size of the first vacuum rack 4 and the second vacuum rack 5 can be selected according to actual needs, suitable for circular samples of different sizes. The vacuum system adsorbs the sample by drawing a vacuum, protecting the sample surface. By connecting the vacuum environment, the sample can be quickly fixed; by disconnecting the vacuum environment, the sample can be quickly removed, enabling rapid sample replacement and simple operation. The vacuum rack has a compact design, occupies little space, and is easy to operate and maintain. The surface of the vacuum rack undergoes special treatment to improve adsorption force, ensuring the stability and safety of the sample.

[0049] The base 2 is made of a high-strength, corrosion-resistant material that will not deform over long-term use. The sample platform 3 is made of high-strength stainless steel, a corrosion-resistant material that will not deform over long-term use. It undergoes fine grinding and polishing to reduce surface roughness and improve sample placement stability. The first vacuum holder 4 and the second vacuum holder 5 are made of aluminum alloy, which is lightweight and high-strength. The spring 7 is made of high-strength spring steel, offering good elasticity and durability. The knob is made of high-strength plastic, which is wear-resistant and comfortable to the touch. Each air groove in this invention can be sealed with sealant to prevent air leakage and ensure a vacuum effect. The air grooves are designed in a circular shape to increase adsorption and better fix the sample.

[0050] This utility model discloses a vacuum sample fixing device. Multiple fine-threaded bolts 6 are installed in the sample platform 3 to manually adjust the tension of the spring 7, thereby adjusting the levelness between the sample platform 3 and the base 2. This ensures the levelness and stability of the device under vacuum conditions, preventing sample displacement during testing. Precise adjustment is achieved through a knob design, making operation convenient. Each air groove can be sealed with sealant to prevent air leakage, ensuring airtightness, improving vacuum levels, and extending service life. The first vacuum frame 4 and the second vacuum frame 5 can be selected according to actual needs, suitable for fixing circular samples of different sizes, improving the versatility and expandability of the equipment. Vacuum adsorption protects the sample surface. The surface of the vacuum frame undergoes special treatment to enhance adsorption force, ensuring sample stability and safety.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it; although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications to the technical solutions described in the foregoing embodiments, or equivalent substitutions for some or all of the technical features, do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A vacuum sample fixing device, characterized in that, include: Base (2), sample platform (3), first vacuum rack (4), and second vacuum rack (5); The base (2) has a central hole, and the sample platform (3), the first vacuum frame (4), and the second vacuum frame (5) are respectively annular; The sample platform (3) is positioned above the base (2); The sample platform (3) has a first platform (301) and a second platform (303); the second platform (303) is located inside the first platform (301), and the height of the second platform (303) is lower than that of the first platform (301); A first air duct (302) is provided on the first platform (301), and a second air duct (304) is provided on the second platform (303); The sample platform (3) is provided with a first air hole and a second air hole. The first air hole is connected to the first air groove (302), and the second air hole is connected to the second air groove (304). The first vacuum frame (4) is mounted on the first platform (301); the interior of the first vacuum frame (4) has a downward-facing third air groove (405); the third air groove (405) is connected to the first air groove (302); the first vacuum frame (4) is provided with a plurality of first air groove holes (404) communicating with the third air groove (405); The second vacuum frame (5) is mounted on the second platform (303); the interior of the second vacuum frame (5) has a downward-facing fourth air groove (505); the fourth air groove (505) is connected to the second air groove (304); the second vacuum frame (5) is provided with a plurality of second air groove holes (504) communicating with the fourth air groove (505).

2. The vacuum sample fixing device according to claim 1, characterized in that, The first vacuum frame (4) has a third platform (401) and a fourth platform (402) located inside the third platform (401); A first protrusion (403) is present between the third platform (401) and the fourth platform (402); The first protrusion (403) has a downward-facing third air groove (405) inside; the first protrusion (403) is provided with a plurality of first air groove holes (404) communicating with the third air groove (405).

3. The vacuum sample fixing device according to claim 2, characterized in that, The second vacuum frame (5) has a fifth platform (501) and a sixth platform (502) located inside the fifth platform (501); A second protrusion (503) is present between the fifth platform (501) and the sixth platform (502); The second protrusion (503) has a downward-facing fourth air groove (505) inside; the second protrusion (503) is provided with a plurality of second air groove holes (504) communicating with the fourth air groove (505).

4. The vacuum sample fixing device according to claim 1, characterized in that, Pads (1) are respectively provided at both ends of the bottom surface of the base (2).

5. The vacuum sample fixing device according to claim 1, characterized in that, The sample platform (3) does not contact the base (2).

6. The vacuum sample fixing device according to claim 5, characterized in that, The sample platform (3) is provided with a plurality of fine thread bolts (6); the fine thread bolts (6) abut against the base (2); Multiple springs (7) are provided between the sample platform (3) and the base (2).

7. The vacuum sample fixing device according to claim 6, characterized in that, A knob is provided on the top of the fine-threaded bolt (6).

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