A sample stage structure for a variable temperature thermoelectric parameter testing system

Abstract

The utility model discloses a sample stage structure for variable temperature thermoelectric parameter test system, including sample fixed frame, the bottom of sample fixed frame is equipped with variable temperature platform subassembly, the top of variable temperature platform subassembly is equipped with insulating plate, the top of insulating plate is equipped with seebeck coefficient probe subassembly, the top of seebeck coefficient probe subassembly is equipped with sample, the top of sample is equipped with sample clamp, the utility model discloses through the cooperation of silver table, liquid nitrogen pipeline and heating rod, place sample on silver table, can conveniently realize variable temperature measurement, and gold washer installs independently, is convenient to replace, and through the cooperation of sample fixed frame, sample clamp, seebeck coefficient probe subassembly, insulating plate, variable temperature platform subassembly, insulating washer, resistivity probe subassembly and mounting screw, sample sample is pressed on seebeck coefficient probe subassembly and resistivity probe subassembly, ensures good thermal contact, and keeps the temperature consistency of sample.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, specifically a sample stage structure for a variable-temperature thermoelectric parameter testing system. Background Technology

[0002] Semiconductor cooling chips made of thermoelectric materials have been widely used in daily life. The research on thermoelectric materials mainly focuses on three physical quantities: resistivity, SEEEBECK coefficient, and thermal conductivity. In order to test the performance, it is necessary to use a sample platform for testing.

[0003] A semiconductor variable-temperature sample stage, with existing patent publication number "CN214749925U", has a cavity inside its vacuum chamber housing. A top cover is screwed to the top of the vacuum chamber housing to form a chamber, and a sample stage assembly is disposed within the chamber. The sample stage assembly includes a sample stage base, a semiconductor cooling chip mounted on the sample stage base, and a sample stage mounted on the semiconductor cooling chip. The side of the vacuum chamber housing has a gas path interface for adjusting the chamber environment, multiple BNC interfaces for testing the sample, and a cooling water interface I for cooling the vacuum chamber housing. A sample stage support is also screwed to the side of the vacuum chamber housing, and the sample stage support has an RS-232 interface and a cooling water interface II. This invention uses a semiconductor cooling chip as the temperature changing element, which is small in size, oscillating, and provides continuous and stable temperature changes. It eliminates the need for temperature compensation using heating elements, thus improving the reliability of the test results.

[0004] However, during the testing process, there are many samples to be tested, and the way these samples are placed is quite cumbersome. Changing samples takes a long time, which reduces the efficiency of the test. Utility Model Content

[0005] The purpose of this invention is to provide a sample stage structure for a variable-temperature thermoelectric parameter testing system, so as to solve the existing problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a sample stage structure for a variable-temperature thermoelectric parameter testing system, comprising a sample holder, a variable-temperature stage assembly at the bottom of the sample holder, an insulating plate at the top of the variable-temperature stage assembly, a Seebeck coefficient probe assembly at the top of the insulating plate, a sample at the top of the Seebeck coefficient probe assembly, a sample clamp at the top of the sample, the sample clamp being connected to the sample holder, a resistivity probe assembly at the bottom of the variable-temperature stage assembly, mounting screws at the four corners of the bottom of the variable-temperature stage assembly, and insulating washers on the outer side of the mounting screws.

[0007] Preferably, the Seebeck coefficient probe assembly includes a gold gasket, a fastening screw, a thermocouple, a heat-conducting block, and a miniature heating rod. The heat-conducting block is located inside an insulating plate, the bottom of the heat-conducting block is provided with a miniature heating rod, the inside of the heat-conducting block is provided with a thermocouple, the top of the heat-conducting block is provided with a gold gasket, and the top of the gold gasket is provided with a fastening screw, which enables variable temperature testing of the sample.

[0008] Preferably, the variable temperature stage assembly includes a silver stage, liquid nitrogen pipelines, and a heating rod. The silver stage is located at the bottom of the insulating plate, and liquid nitrogen pipelines are symmetrically arranged on both sides of one end of the silver stage. A heating rod is provided on one side of the silver stage to measure the temperature change of the sample.

[0009] Preferably, the resistivity probe assembly includes a resistivity probe, a spring, an insulating retainer, and nuts. The insulating retainer is located at the bottom of the temperature-varying stage assembly. Resistivity probes are symmetrically arranged at both ends of the top of the insulating retainer. Springs are arranged on the outer sides of the resistivity probes. Nuts are symmetrically arranged on both sides of the bottom of the insulating retainer for testing resistance.

[0010] Preferably, the top of the insulating retainer is provided with symmetrical mounting holes on both sides, and the bottom of the resistivity probe is located inside the mounting holes for easy installation.

[0011] Preferably, the top of the insulating plate is provided with a placement hole, and the miniature heating rod is located inside the placement hole for easy connection.

[0012] Preferably, threaded holes are provided at the four corners of the bottom of the silver platform and the insulating plate, and the mounting screws are located inside the threaded holes to fix the positions of the Seebeck coefficient probe assembly, the insulating plate and the temperature platform assembly.

[0013] Compared with the prior art, the beneficial effects of this utility model are: the sample stage structure for a variable temperature thermoelectric parameter testing system;

[0014] With the cooperation of the silver stage, liquid nitrogen pipeline and heating rod, the sample is placed on the silver stage, which can easily realize variable temperature measurement. The gold gasket is installed independently and is easy to replace. With the cooperation of the sample holder, sample clamp, Seebeck coefficient probe assembly, insulating plate, variable temperature stage assembly, insulating gasket, resistivity probe assembly and mounting screws, the sample is pressed on the Seebeck coefficient probe assembly and resistivity probe assembly to ensure good thermal contact and maintain the temperature consistency of the sample. Attached Figure Description

[0015] Figure 1 This is an exploded view of the present invention;

[0016] Figure 2 This is a side view of the present invention;

[0017] Figure 3 This is a perspective view of the Seebeck coefficient probe assembly of this utility model;

[0018] Figure 4 This is a perspective view of the variable temperature platform assembly of this utility model;

[0019] Figure 5 This is a perspective view of the resistivity probe assembly of this utility model.

[0020] In the figure: 1. Sample holder; 2. Sample clamp; 3. Sample; 4. Seebeck coefficient probe assembly; 41. Gold gasket; 42. Fastening screw; 43. Thermocouple; 44. Heat-conducting block; 45. Miniature heating rod; 5. Insulating plate; 6. Variable temperature stage assembly; 61. Silver stage; 62. Liquid nitrogen pipeline; 63. Heating rod; 7. Insulating washer; 8. Resistivity probe assembly; 81. Resistivity probe; 82. Spring; 83. Insulating retainer; 84. Nut; 9. Mounting screw. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1-5 The present invention provides an embodiment of a sample stage structure for a variable temperature thermoelectric parameter testing system, comprising a sample holder 1, a variable temperature stage assembly 6 at the bottom of the sample holder 1, the variable temperature stage assembly 6 comprising a silver stage 61, a liquid nitrogen pipeline 62 and a heating rod 63, the silver stage 61 being located at the bottom of an insulating plate 5, the liquid nitrogen pipeline 62 being symmetrically arranged on both sides of one end of the silver stage 61, and the heating rod 63 being arranged on one side of the silver stage 61 to measure the temperature change of the sample.

[0023] The variable temperature stage assembly 6 has an insulating plate 5 on top, and a Seebeck coefficient probe assembly 4 on top of the insulating plate 5. Threaded holes are provided at the four corners of the bottom of the silver stage 61 and the insulating plate 5. The mounting screws 9 are located inside the threaded holes to fix the positions of the Seebeck coefficient probe assembly 4, the insulating plate 5, and the variable temperature stage assembly 6. The Seebeck coefficient probe assembly 4 includes a gold gasket 41, a fastening screw 42, a thermocouple 43, a heat-conducting block 44, and a miniature heating rod 45. The heat-conducting block 44 is located inside the insulating plate 5. The miniature heating rod 45 is located at the bottom of the heat-conducting block 44. The insulating plate 5 has a placement hole, and the miniature heating rod 45 is located inside the placement hole for easy connection. The thermocouple 43 is located inside the heat-conducting block 44. The gold gasket 41 is located on the top of the heat-conducting block 44. The fastening screw 42 is located on the top of the gold gasket 41, which enables variable temperature testing of the sample.

[0024] The Seebeck coefficient probe assembly 4 has a sample 3 on its top, and a sample clamp 2 on its top. The sample clamp 2 is connected to the sample holder 1. The temperature stage assembly 6 has a resistivity probe assembly 8 at its bottom. The resistivity probe assembly 8 includes a resistivity probe 81, a spring 82, an insulating retainer 83, and a nut 84. The insulating retainer 83 is located at the bottom of the temperature stage assembly 6. The top two ends of the insulating retainer 83 are symmetrically equipped with resistivity probes 81. The top two sides of the insulating retainer 83 are symmetrically equipped with mounting holes. The bottom of the resistivity probe 81 is located inside the mounting holes for easy installation. The outside of the resistivity probe 81 is equipped with a spring 82. The bottom two sides of the insulating retainer 83 are symmetrically equipped with nuts 84 for resistance testing. The four corners of the bottom of the temperature stage assembly 6 are equipped with mounting screws 9, and the outside of the mounting screws 9 is equipped with insulating washers 7.

[0025] Working principle: Through PID control, the silver plate 61 is kept at the set temperature and maintained at that temperature.

[0026] First, a resistivity test is performed. Current is passed through the heat-conducting blocks 44 on both sides, allowing the current to flow through the sample. The voltage between the probes is collected using the resistivity probe assembly 8 in the middle, and the resistivity of the sample is calculated based on the magnitude of the current and voltage.

[0027] Next, the Seebeck coefficient test is performed. A voltage is applied to the miniature heating rod 45 in the Seebeck coefficient probe assembly 4, causing the heat-conducting block 44 on one side to drive one end of the sample 3 to heat up. During the heating process, the temperature values ​​of the thermocouples 43 representing the temperatures at both ends of the sample in the heat-conducting blocks on both sides are recorded, and the thermoelectric potential between the heat-conducting blocks 44 on both sides is measured. According to the Seebeck coefficient formula, the Seebeck coefficient value of the material can be calculated.

[0028] Record the resistivity and Seebeck coefficient of the sample at the current temperature, and bring the silver plate 61 to the next set temperature and continue the measurement.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0030] In the description of this utility model, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front end," "rear end," "head," "tail," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In addition, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

Claims

1. A sample stage structure for a variable-temperature thermoelectric parameter testing system, comprising a sample holder (1), characterized in that: The sample holder (1) is provided with a variable temperature stage assembly (6) at the bottom, an insulating plate (5) at the top of the variable temperature stage assembly (6), a Seebeck coefficient probe assembly (4) at the top of the insulating plate (5), a sample (3) at the top of the Seebeck coefficient probe assembly (4), a sample clamp (2) at the top of the sample (3), and the sample clamp (2) is connected to the sample holder (1). The variable temperature stage assembly (6) is provided with a resistivity probe assembly (8) at the bottom, and mounting screws (9) are provided at the four corners of the bottom of the variable temperature stage assembly (6). An insulating washer (7) is provided on the outside of the mounting screws (9).

2. The sample stage structure for a variable-temperature thermoelectric parameter testing system according to claim 1, characterized in that: The Seebeck coefficient probe assembly (4) includes a gold gasket (41), a fastening screw (42), a thermocouple (43), a heat-conducting block (44), and a miniature heating rod (45). The heat-conducting block (44) is located inside the insulating plate (5). The miniature heating rod (45) is provided at the bottom of the heat-conducting block (44). The thermocouple (43) is provided inside the heat-conducting block (44). The gold gasket (41) is provided at the top of the heat-conducting block (44). The fastening screw (42) is provided at the top of the gold gasket (41).

3. The sample stage structure for a variable-temperature thermoelectric parameter testing system according to claim 1, characterized in that: The variable temperature stage assembly (6) includes a silver stage (61), liquid nitrogen pipelines (62) and heating rods (63). The silver stage (61) is located at the bottom of the insulating plate (5). Liquid nitrogen pipelines (62) are symmetrically arranged on both sides of one end of the silver stage (61), and heating rods (63) are arranged on one side of the silver stage (61).

4. The sample stage structure for a variable-temperature thermoelectric parameter testing system according to claim 1, characterized in that: The resistivity probe assembly (8) includes a resistivity probe (81), a spring (82), an insulating retainer (83), and a nut (84). The insulating retainer (83) is located at the bottom of the temperature-changing stage assembly (6). The resistivity probes (81) are symmetrically arranged at both ends of the top of the insulating retainer (83). The spring (82) is arranged on the outside of the resistivity probe (81). The nuts (84) are symmetrically arranged on both sides of the bottom of the insulating retainer (83).

5. The sample stage structure for a variable-temperature thermoelectric parameter testing system according to claim 4, characterized in that: The insulating retainer (83) has symmetrical mounting holes on both sides of its top, and the bottom of the resistivity probe (81) is located inside the mounting holes.

6. The sample stage structure for a variable-temperature thermoelectric parameter testing system according to claim 2, characterized in that: The top of the insulating plate (5) is provided with a placement hole, and the miniature heating rod (45) is located inside the placement hole.

7. The sample stage structure for a variable-temperature thermoelectric parameter testing system according to claim 3, characterized in that: The silver platform (61) and the insulating plate (5) are provided with threaded holes at the four corners of the bottom, and the mounting screws (9) are located inside the threaded holes.

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