Waste gas treatment equipment

Abstract

The utility model relates to the technical field of gas purification equipment, in particular to waste gas treatment equipment which comprises a collecting tank, a first partition plate and a gas guide hole, a first water solution is pre-stored in the collecting tank; the first partition plate is fixedly arranged on the top wall of an inner cavity of the collecting tank in the height direction of the collecting tank and divides the inner cavity of the collecting tank into a first collecting chamber and a second collecting chamber, the top of the inner cavity of the first collecting chamber is communicated with the air inlet end of the collecting tank, and the upper portion of the inner cavity of the second collecting chamber is communicated with the air outlet end of the collecting tank. The air guide hole is formed in the first partition plate, located in the bottom of the inner cavity of the collecting tank and communicated with the first collecting chamber and the second collecting chamber. According to the utility model, the first partition plate provided with the gas guide hole is arranged in the first collection chamber of the collection tank, and particulate matters mixed in waste gas can be effectively captured by utilizing the first aqueous solution stored in the collection tank, so that the defect of poor capturing effect on powder mixed in toxic waste gas in the prior art is overcome.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas purification equipment technical field, especially a kind of waste gas treatment equipment. BACKGROUND

[0002] In the semiconductor production process, toxic waste gas with explosive and corrosive will be generated, which will not only pollute the environment, but also harm the human body if it is directly discharged into the environment. Therefore, the toxic waste gas should be purified before being discharged.

[0003] In the prior art, Korean patent KR19990075098A discloses a gas scrubber system for purifying the above-mentioned toxic waste gas. In the process of purifying the toxic waste gas in the device, the toxic waste gas is processed by a cyclone dust collector and then enters the first collection chamber of the collection tank. Then, through the channel formed by the first partition, it enters the second collection chamber and finally flows out of the inner cavity of the second collection chamber through the air pipe connected to the upper part of the inner cavity of the second collection chamber, so that the powder mixed in the toxic waste gas can be captured by the first collection chamber and the second collection chamber.

[0004] However, since the powder mixed in the toxic waste gas generally has the properties of small size and light texture, it is not easy to settle in the first collection chamber and the second collection chamber of the collection tank. Therefore, there is a problem of poor capture effect of the collection tank on the powder mixed in the toxic waste gas. SUMMARY

[0005] In view of the technical problem of poor capture effect of the collection tank of the gas scrubber system in the prior art on the powder mixed in the toxic waste gas, the utility model embodiment provides a waste gas treatment device, which comprises a collection tank, a first partition and a gas guide hole.

[0006] The first water solution is pre-stored in the inside of the collection tank.

[0007] The first partition is fixedly arranged on the inner cavity top of the collection tank, and the first partition is arranged along the height direction of the collection tank. The first partition divides the inner cavity of the collection tank into a first collection chamber and a second collection chamber. The inner cavity top of the first collection chamber is communicated with the gas inlet end of the collection tank, and the inner cavity upper part of the second collection chamber is communicated with the gas outlet end of the collection tank.

[0008] The gas guide hole is arranged on the first partition, and the gas guide hole is located at the inner cavity bottom of the collection tank. The two ends of the gas guide hole are communicated with the first collection chamber and the second collection chamber respectively.

[0009] Further, it further comprises a plurality of first porous plates, a plurality of first porous plates are movably arranged in the inner cavity of the first collection chamber, a plurality of first porous plates are sequentially arranged along the axial direction of the first collection chamber, and any first porous plate is matched with the radial cross-sectional shape of the first collection chamber.

[0010] Further, the density of any one of the first porous plates is less than the density of the first aqueous solution, and the top surface and the bottom surface of the first porous plate are both irregular curved surfaces.

[0011] Further, the first collecting chamber further comprises a plurality of sponge blocks, wherein one of the sponge blocks is movably arranged between the bottom layer of the first porous plate and the inner cavity bottom wall of the collecting tank, and the remaining sponge blocks are movably arranged in the gaps between the plurality of first porous plates, and any one of the sponge blocks matches the radial cross-sectional shape of the first collecting chamber.

[0012] Further, the first collecting chamber further comprises a receiving cavity, a baffle, a plurality of guide holes, a plurality of connecting members, and a second porous plate.

[0013] The receiving cavity is arranged in the first partition plate, and the bottom port of the receiving cavity is exposed to the inner cavity top wall surface of the air guide hole.

[0014] The plurality of guide holes are arranged on the outer wall of the first partition plate, and any one of the guide holes communicates with the receiving cavity through the outer wall of the first partition plate, and any one of the guide holes is guided along the height direction of the collecting tank.

[0015] The baffle is movably arranged in the receiving cavity.

[0016] The second porous plate is movably arranged in the second collecting chamber, and the density of the second porous plate is less than the density of the first aqueous solution.

[0017] The plurality of connecting members are fixedly arranged on the second porous plate, and the plurality of connecting members are fixedly connected with the baffle through the plurality of guide holes, respectively, for driving the baffle and the second porous plate to synchronously ascend and descend.

[0018] Further, the first collecting chamber further comprises a cooling device and a cooling pipe.

[0019] The cooling pipe is embedded in the inner cavity bottom wall of the collecting tank, and is used for transmitting a condensing medium.

[0020] The cooling device is arranged on the collecting tank, an output end of the cooling device is connected with one end of the cooling pipe, and an input end of the cooling device is connected with the other end of the cooling pipe.

[0021] Further, the first collecting chamber further comprises a cyclone dust collector, a high-temperature treatment module, and a gas washing module.

[0022] The cyclone dust collector is fixedly arranged on the outside of the collecting tank, and an output end of the cyclone dust collector is in communication with an air inlet end of the collecting tank.

[0023] The high-temperature treatment module is fixedly arranged on the outside of the cyclone dust collector, and an output end of the high-temperature treatment module is in communication with an input end of the cyclone dust collector.

[0024] The gas washing module is fixedly arranged outside the collecting tank, and an input end of the gas washing module is in communication with the gas outlet end of the collecting tank.

[0025] Further, the high-temperature treatment module comprises a combustion chamber, a heat insulation shell, a plurality of air inlet pipes, an air supply assembly, a combustion-supporting gas supply assembly, and an ignition assembly.

[0026] The combustion chamber is arranged inside the heat insulation shell, and an output end of the combustion chamber is in communication with an input end of the cyclone dust collector.

[0027] The plurality of air inlet pipes are fixedly arranged on the heat insulation shell, and output ends of the plurality of air inlet pipes are in communication with an inner cavity of the combustion chamber, for transmitting the toxic waste gas.

[0028] The air supply assembly is fixedly arranged outside the heat insulation shell, and the air supply assembly is in communication with the inner cavity of the combustion chamber, for supplying air.

[0029] The combustion-supporting gas supply assembly is fixedly arranged outside the heat insulation shell, and the combustion-supporting gas supply assembly is in communication with the inner cavity of the combustion chamber, for supplying combustion-supporting gas.

[0030] The ignition assembly is arranged inside the combustion chamber, for igniting the mixed gas input into the combustion chamber.

[0031] Further, the gas washing module comprises a washing tank, a plurality of second partitions, a plurality of third partitions, a plurality of adsorption filter cartridges, and a spray washing assembly.

[0032] The inner cavity of the washing tank pre-stores a second aqueous solution, an input end of the washing tank and an output end of the washing tank are both in communication with an upper part of the inner cavity of the washing tank, and the input end of the washing tank is in communication with the output end of the collecting tank.

[0033] The plurality of second partitions are fixedly arranged on the inner wall of the washing tank, any second partition is arranged along the height direction of the washing tank, the top end of each of the plurality of second partitions is fixedly connected with the inner cavity top wall of the washing tank, and the bottom end of each of the plurality of second partitions is located on the upper side of the liquid surface of the second aqueous solution.

[0034] The plurality of third partitions are fixedly arranged on the inner wall of the washing tank, any third partition is arranged along the height direction of the washing tank, any third partition is located between any two adjacent second partitions, the gap between the top end of any third partition and the inner cavity top wall of the washing tank is greater than zero, the bottom end of any third partition is located on the lower side of the liquid surface of the second aqueous solution, the plurality of third partitions and the plurality of second partitions divide the cavity between the inner cavity top wall of the washing tank and the second aqueous solution to form a serpentine-shaped air flow channel, one end of the air flow channel is in communication with the input end of the washing tank, and the other end of the air flow channel is in communication with the output end of the washing tank.

[0035] A plurality of adsorption filter elements are fixedly arranged on the inner wall of the cleaning tank, and a plurality of adsorption filter elements are located in the air flow channel and used for filtering the gas flowing through the air flow channel.

[0036] A spray washing assembly is arranged on the cleaning tank and used for spraying the second water solution into the air flow channel.

[0037] Further, the spray washing assembly comprises a water supply pipeline, a plurality of nozzles, a water circulation pipeline and a plurality of first water level sensors.

[0038] The water supply pipeline is fixedly arranged on the upper portion of the inner cavity of the cleaning tank and used for transmitting the second water solution.

[0039] The plurality of nozzles are fixedly arranged on the water supply pipeline, any nozzle is in communication with the water supply pipeline, the plurality of nozzles are located in the air flow channel and used for spraying the second water solution.

[0040] The water circulation pipeline is arranged on the cleaning tank, the water circulation pipeline is in communication with the bottom of the inner cavity of the cleaning tank and the water supply pipeline, and is used for transmitting the second water solution.

[0041] The plurality of first water level sensors are fixedly arranged on the inner wall of the cleaning tank, and the plurality of first water level sensors are sequentially arranged along the height direction of the cleaning tank and used for detecting the liquid surface position of the second water solution.

[0042] The waste gas treatment equipment according to the embodiment of the utility model has the following beneficial effects:

[0043] 1. The equipment sets the first baffle with the air guide hole in the first collecting chamber of the collecting tank, so that the waste gas flowing into the collecting tank through the air inlet end of the collecting tank needs to flow through the first collecting chamber, the air guide hole and the second collecting chamber in sequence, and then flows out through the air outlet end. In this process, the first water solution stored in the collecting tank can effectively capture the particulate matter mixed in the waste gas, solving the defect of poor powder capture effect in the toxic waste gas in the collecting tank of the gas scrubber system in the prior art.

[0044] 2. The equipment sets a plurality of first porous plates and a plurality of sponge blocks in the first collecting chamber, so as to disperse the waste gas flowing through the plurality of first porous plates and sponge blocks into a plurality of air flows, thereby further enhancing the capture effect of the first water solution on the particulate matter mixed in the waste gas.

[0045] It is to be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further explanation of the subject technology. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 The assembly diagram according to the embodiment of the utility model;

[0047] Figure 2 Fig. 1 is a schematic diagram of an internal structure of a collecting tank according to an embodiment of the present application;

[0048] Figure 3 Fig. 2 is a schematic diagram of an assembly of a combustion chamber and a heat-insulating shell according to an embodiment of the present application;

[0049] Figure 4 Fig. 3 is a schematic diagram of an air supply assembly according to an embodiment of the present application;

[0050] Figure 5 Fig. 4 is a schematic diagram of a combustion-supporting gas supply assembly according to an embodiment of the present application;

[0051] Figure 6 Fig. 5 is a schematic diagram of a structure of an electrode group according to an embodiment of the present application;

[0052] Figure 7 Fig. 6 is a schematic diagram of a gas washing module according to an embodiment of the present application.

[0053] Brief Description of the Drawings:

[0054] 1-collecting tank, 11-first collecting chamber, 12-second collecting chamber, 2-first partition plate, 21-guide hole, 22-receiving cavity, 23-baffle, 3-first porous plate, 4-sponge block, 5-second porous plate, 6-cooling pipe, 7-cyclone dust collector, 8-high-temperature treatment module, 81-combustion chamber, 82-heat-insulating shell, 83-air inlet pipe, 841-air guide pipe, 842-air compressor, 843-first electromagnetic valve, 844-first flow meter, 845-flow sensor, 851-electrolysis tank, 852-second water level sensor, 853-water supply pipe, 854-second electromagnetic valve, 855-gas supply pipe, 856-pressure regulator, 857-pressure gauge, 858-anti-backfire device, 859-check valve, i860-needle valve, 861-second flow meter, 862-third electromagnetic valve, 863-water inlet pipe, 864-gas inlet pipe, 865-electrolysis device, 8651-power supply, 8652-electrode group, 86521-plate electrode, 86522-insulating gasket, 86523-annular shielding layer, 86524-water inlet hole, 86525-gas inlet hole, 871-flame igniter, 9-gas washing module, 91-washing box, 911-air flow channel, 92-second partition plate, 93-third partition plate, 94-adsorption filter element, 951-water supply pipeline, 952-nozzle, 953-first water level sensor, 9541-main drain pump, 9542-vice drain pump, 9543-circulation pipe, 9544-water receiving pipe, 9545-fifth electromagnetic valve, 9546-hand valve, 9547-drain pipe, 9548-connection pipe, 9549-sixth electromagnetic valve, 9550-fourth electromagnetic valve. DETAILED DESCRIPTION

[0055] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.

[0056] The foregoing and other technical contents, features, and effects of this utility model will be clearly presented in the following detailed description of the embodiments with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the directions in the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the present utility model. Furthermore, in all embodiments, the same reference numerals denote the same elements.

[0057] First, combine Figures 1-7 The waste gas treatment equipment described in this utility model is used to purify toxic waste gas and has a wide range of applications.

[0058] like Figure 1 , 2 As shown, the waste gas treatment device of this utility model embodiment includes: a collection tank 1, a first partition 2 and a gas guide hole (not shown in the figure).

[0059] Specifically, such as Figure 1 , 2 As shown, the inside of the collection tank 1 is pre-stored with a first aqueous solution; the first partition 2 is fixedly installed on the top wall of the inner cavity of the collection tank 1, and the first partition 2 is set along the height direction of the collection tank 1. The first partition 2 divides the inner cavity of the collection tank 1 into a first collection chamber 11 and a second collection chamber 12. The top of the inner cavity of the first collection chamber 11 is connected to the air inlet end of the collection tank 1, and the upper part of the inner cavity of the second collection chamber 12 is connected to the air outlet end of the collection tank 1; the air guide hole is opened on the first partition 2, and the air guide hole is located at the bottom of the inner cavity of the collection tank 1. The two ends of the air guide hole are connected to the first collection chamber 11 and the second collection chamber 12 respectively.

[0060] Furthermore, such as Figure 2 As shown, the device also includes: a plurality of first porous plates 3, which are movably arranged in the inner cavity of the first collection chamber 11. The plurality of first porous plates 3 are arranged sequentially along the axial direction of the first collection chamber 11. Any one of the first porous plates 3 matches the radial cross-sectional shape of the first collection chamber 11. By setting multiple porous plates in the first collection chamber 11, the device disperses the gas entering the second collection chamber 12 from the first collection chamber 11 through the air guide hole into multiple small airflows, thereby increasing the capture effect of the first aqueous solution on the particulate matter mixed in the gas.

[0061] Furthermore, such as Figure 2As shown, the density of any one of the first porous plates 3 is less than the density of the first aqueous solution, and the top surface and the bottom surface of the first porous plate 3 are both irregular curved surfaces. In this embodiment, by designing the top surface and the bottom surface of the first porous plate 3 as irregular curved surfaces, when the first porous plates 3 are attached to each other, the gas can also overflow through the gaps between the porous plates, avoiding the situation that when the liquid level in the first collection chamber 11 is too low, the first porous plates 3 are tightly attached to each other, thereby blocking the gas guide holes. In addition, when the first porous plates 3 are tightly attached to each other, the top surface and the bottom surface of the adjacent two first porous plates 3 form a plurality of gas overflow channels after being attached, which disperses the gas entering the second collection chamber 12 from the first collection chamber 11 through the gas guide holes into a plurality of small gas streams, further increasing the capturing effect of the first aqueous solution on the particulate matter mixed in the gas.

[0062] Further, as shown in Figure 2 The device also comprises a plurality of sponge blocks 4, which are arranged inside the first collection chamber 11. One of the sponge blocks 4 is movably arranged between the first porous plate 3 at the bottom layer and the inner cavity bottom wall of the collection tank 1, and the remaining sponge blocks 4 are movably arranged in the gaps between the plurality of first porous plates 3. Any one of the sponge blocks 4 matches the radial cross-sectional shape of the first collection chamber 11. In this embodiment, by arranging the plurality of sponge blocks 4 between the plurality of first porous plates 3, the pores inside the sponge blocks 4 are used to disperse the gas entering the second collection chamber 12 from the first collection chamber 11 through the gas guide holes into a plurality of small gas streams, further increasing the capturing effect of the first aqueous solution on the particulate matter mixed in the gas. When the water level in the first collection chamber 11 decreases, the sponge blocks 4 will also be deformed due to the gravity of the first porous plates 3, causing the pores inside the sponge blocks 4 to shrink, reducing the efficiency of the gas passing through the sponge blocks 4, and enhancing the capturing effect on the particulate matter mixed in the gas.

[0063] Further, as shown in Figure 2As shown, this device also includes: a receiving cavity 22, a baffle 23, several guide holes 21, several connectors (not shown in the figure), and a second porous plate 5; the receiving cavity 22 is located inside the first partition 2, and the bottom port of the receiving cavity 22 is exposed on the inner wall surface of the air guide hole; several guide holes 21 are located on the outer wall of the first partition 2, and any one guide hole 21 penetrates through the outer wall of the first partition 2 and communicates with the receiving cavity 22, and any one guide hole 21 guides along the height direction of the collecting tank 1; the baffle 23 is movably disposed in the receiving cavity 22; the second porous plate 5 is movably disposed inside the second collecting chamber 12, and the density of the second porous plate 5 is less than the density of the first aqueous solution; several connectors are fixedly disposed on the second porous plate 5, and the several connectors pass through several... The guide hole 21 is fixedly connected to the baffle 23, which is used to drive the baffle 23 and the second perforated plate 5 to rise and fall synchronously. In this embodiment, the device adds a receiving cavity 22, a baffle 23, several guide holes 21, several connecting parts and the second perforated plate 5, so that the buoyancy of the second perforated plate 5 drives the baffle 23 to rise and fall with the liquid level in the second collection chamber 12. Thus, when the gas flow rate input into the first collection chamber 11 increases, the gas pressure above the liquid level in the cavity of the first collection chamber 11 increases, the liquid level in the first collection chamber 11 drops and the liquid level in the second collection chamber 12 rises, so that the second perforated plate 5 drives the baffle 23 to rise synchronously with the liquid level in the second collection chamber 12, reducing the area of ​​the baffle 23 blocking the air guide hole and increasing the flow rate of the air guide hole.

[0064] Furthermore, such as Figure 2 As shown, this device also includes: a cooling device (not shown in the figure) and a cooling pipe 6; the cooling pipe 6 is embedded in the bottom wall of the inner cavity of the collection tank 1 for transporting the condensate medium; the cooling device is installed on the collection tank 1, the output end of the cooling device is connected to one end of the cooling pipe 6, and the input end of the cooling device is connected to the other end of the cooling pipe 6; this device cools the inner environment of the collection tank 1 by installing the cooling device and the cooling pipe 6 in the bottom wall of the inner cavity of the collection tank 1, thereby enhancing the capture effect of the first aqueous solution stored in the collection tank 1 on the water-soluble gases and vapors mixed in the toxic waste gas.

[0065] Furthermore, such as Figure 1 As shown, this equipment also includes: a cyclone dust collector 7, a high-temperature treatment module 8, and a gas scrubbing module 9; the cyclone dust collector 7 is fixedly installed on the outside of the collection tank 1, and the output end of the cyclone dust collector 7 is connected to the air inlet end of the collection tank 1; the high-temperature treatment module 8 is fixedly installed on the outside of the cyclone dust collector 7, and the output end of the high-temperature treatment module 8 is connected to the input end of the cyclone dust collector 7; the gas scrubbing module 9 is fixedly installed on the outside of the collection tank 1, and the input end of the gas scrubbing module 9 is connected to the air outlet end of the collection tank 1.

[0066] Furthermore, such as Figure 1 ,3 As shown in Figure 4, the high-temperature treatment module 8 includes: a combustion chamber 81, a heat insulation shell 82, several air inlet pipes 83, an air supply assembly, a combustion-supporting gas supply assembly, and an ignition assembly; the combustion chamber 81 is located inside the heat insulation shell 82, and the output end of the combustion chamber 81 is connected to the input end of the cyclone dust collector 7; several air inlet pipes 83 are fixedly installed on the heat insulation shell 82, and the output ends of the several air inlet pipes 83 are connected to the inner cavity of the combustion chamber 81 for transmitting toxic waste gas; the air supply assembly is fixedly installed on the outside of the heat insulation shell 82, and the air supply assembly is connected to the inner cavity of the combustion chamber 81 for supplying air; the combustion-supporting gas supply assembly is fixedly installed on the outside of the heat insulation shell 82, and the combustion-supporting gas supply assembly is connected to the inner cavity of the combustion chamber 81 for supplying combustion-supporting gas; the ignition assembly is located inside the combustion chamber 81 for igniting the mixed gas input into the combustion chamber 81.

[0067] Preferred, such as Figure 1 , 3 As shown in Figure 4, the air supply assembly includes: an air guide pipe 841, an air compressor 842, a first solenoid valve 843, a first flow meter 844, and a flow sensor 845. The air guide pipe 841 is located outside the combustion chamber 81, with one end connected to the inner cavity of the combustion chamber 81 for transmitting air. The air compressor 842 is located outside the combustion chamber 81, with its output end connected to the other end of the air guide pipe 841 for inputting air into the air guide pipe 841. The first solenoid valve 843 is located on the air guide pipe 841 for controlling the opening and closing of the air guide pipe 841. The first flow meter 844 is located on the air guide pipe 841 for detecting the flow rate of air flowing through the air guide pipe 841. The flow sensor 845 is located on the air guide pipe 841 and is electrically connected to the first solenoid valve 843 for controlling the opening and closing of the first solenoid valve 843.

[0068] Preferred, such as Figure 1 , 4As shown in FIG. 5, the combustion-supporting gas supply assembly comprises an electrolytic tank 851, a plurality of second water level sensors 852, a water supply pipe 853, a second electromagnetic valve 854, a gas supply pipe 855, a pressure regulator 856, a pressure gauge 857, an anti-backfire device 858, a check valve 859, a needle valve 860, a second flow meter 861, a third electromagnetic valve 862, an electrolysis device 865, a pair of water inlet pipes 863 and a pair of gas inlet pipes 864. The electrolytic tank 851 is fixedly arranged outside the combustion chamber 81, and the inner cavity of the electrolytic tank 851 is pre-stored with electrolyte. The plurality of second water level sensors 852 are arranged on the inner wall of the electrolytic tank 851 in sequence from top to bottom along the height direction of the electrolytic tank 851, for detecting the liquid level of the electrolyte stored in the electrolytic tank 851. The water supply pipe 853 is fixedly arranged outside the combustion chamber 81, one end of the water supply pipe 853 is in communication with the inner cavity of the electrolytic tank 851, and the other end of the water supply pipe 853 is in communication with an external electrolyte storage device, for transmitting electrolyte to the inside of the electrolytic tank 851. The second electromagnetic valve 854 is arranged on the water supply pipe 853, for controlling the opening and closing of the water supply pipe 853. The gas supply pipe 855 is fixedly arranged outside the combustion chamber 81, one end of the gas supply pipe 855 is in communication with the inner cavity of the combustion chamber 81, for transmitting combustion-supporting gas to the inner cavity of the combustion chamber 81. The pressure regulator 856 is arranged on the gas supply pipe 855, for adjusting the internal gas pressure of the gas supply pipe 855. The pressure gauge 857 is arranged on the gas supply pipe 855, for detecting the internal gas pressure of the gas supply pipe 855. The anti-backfire device 858 is arranged on the gas supply pipe 855, for preventing the flame from backfiring from the combustion chamber 81 to the gas supply pipe 855. The check valve 859 is arranged on the gas supply pipe 855, for preventing the backflow of combustion-supporting gas. The needle valve 860 is arranged on the gas supply pipe 855, for adjusting the flow of the gas supply pipe 855. The second flow meter 861 is arranged on the gas supply pipe 855, for detecting the flow of the gas supply pipe 855. The third electromagnetic valve 862 is arranged on the gas supply pipe 855, for controlling the opening and closing of the gas supply pipe 855. The electrolysis device 865 is fixedly arranged outside the electrolytic tank 851. The input ends of the pair of water inlet pipes 863 are respectively in communication with the bottom of the inner cavity of the electrolytic tank 851, and the output ends of the pair of water inlet pipes 863 are in communication with the electrolysis device 865, for transmitting electrolyte. The output ends of the pair of gas inlet pipes 864 are respectively in communication with the bottom of the inner cavity of the electrolytic tank 851, and the input ends of the pair of gas inlet pipes 864 are respectively in communication with the inner cavity of the electrolytic tank 851, for transmitting combustion-supporting gas.

[0069] Preferably, as shown in FIG. 5, the electrolysis device 865 comprises a power supply 8651 and an electrode group 8652. The power supply 8651 is electrically connected with the electrode group 8652. The electrode group 8652 is in communication with the pair of water inlet pipes 863 and the pair of gas inlet pipes 864. Figure 5

[0070] Further, as shown in FIG. 5, the electrolysis device 865 comprises a power supply 8651 and an electrode group 8652. The power supply 8651 is electrically connected with the electrode group 8652. The electrode group 8652 is in communication with the pair of water inlet pipes 863 and the pair of gas inlet pipes 864. Figure 6 ​As shown, the electrode comprises: a plurality of plate electrodes 86521, a plurality of insulating pads 86522 and a plurality of annular shielding layers 86523; the plurality of plate electrodes 86521 are arranged in parallel and fixedly connected with each other by screw nuts, and the plate electrodes 86521 at both ends of the motor group are electrically connected with the positive and negative poles of the power supply 8651 respectively; the plurality of insulating pads 86522 are arranged in the gaps between the plurality of plate electrodes 86521 respectively; each plate electrode 86521 is provided with a water inlet hole 86524 and an air inlet hole 86525, the positions of the water inlet holes of the plurality of plate electrodes 86521 are matched, the positions of the air inlet holes 86525 of the plurality of plate electrodes 86521 are matched, the water inlet hole of the plate electrode 86521 at the end is communicated with the output end of the water inlet pipe 863, and the air inlet hole 86525 of the plate electrode 86521 at the end is communicated with the input end of the air inlet pipe 864, so that the electrolyte flows into the gaps between the plurality of plate electrodes 86521 through the water inlet hole; the plurality of annular shielding layers 86523 are arranged in the gaps between the plurality of plate electrodes 86521 respectively, the positions of the water inlet hole and the air inlet hole 86525 provided on the plate electrode 86521 correspond to the inner cavity of the annular shielding layer 86523, so as to prevent leakage; when the plate electrodes 86521 at both ends of the motor group are electrified, the plate electrodes 86521 electrolyze the electrolyte flowing into the gaps between the plurality of plate electrodes 86521, and the combustion-supporting gas (i.e. hydrogen and oxygen) generated by the electrolyte is sequentially flowed into the electrolytic tank 851 through the air inlet hole 86525 and the air inlet pipe 864, and then flowed into the inner cavity of the combustion chamber 81 through the gas supply pipe 855, and finally mixed with the air and the toxic waste gas in the combustion chamber 81.

[0071] Preferably, as Figure 4 As shown, the ignition assembly comprises: a plurality of flame igniters 871 and a temperature sensor (not shown in the figure); the plurality of igniters are fixedly arranged on the inner wall of the combustion chamber 81, and are used for igniting the mixed gas of the toxic waste gas, the combustion-supporting gas and the air in the inner cavity of the combustion chamber 81; the temperature sensor is fixedly arranged in the combustion chamber 81, and is used for detecting the temperature of the inner cavity of the combustion chamber 81.

[0072] Further, as Figure 1 , 7As shown, the gas washing module 9 comprises a washing tank 91, a plurality of second partitions 92, a plurality of third partitions 93, a plurality of adsorption filter elements 94, and a spray washing assembly; the inner cavity of the washing tank 91 is pre-stored with the second aqueous solution, the input end of the washing tank 91 and the output end of the washing tank 91 are both in communication with the upper part of the inner cavity of the washing tank 91, and the input end of the washing tank 91 is in communication with the output end of the collecting tank 1; the plurality of second partitions 92 are fixedly arranged on the inner wall of the washing tank 91, any second partition 92 is arranged along the height direction of the washing tank 91, the top end of each of the plurality of second partitions 92 is fixedly connected with the top wall of the inner cavity of the washing tank 91, and the bottom end of each of the plurality of second partitions 92 is located above the liquid level of the second aqueous solution; the plurality of third partitions 93 are fixedly arranged on the inner wall of the washing tank 91, any third partition 93 is arranged along the height direction of the washing tank 91, any third partition 93 is located between any two adjacent second partitions 92, the gap between the top end of any third partition 93 and the top wall of the inner cavity of the washing tank 91 has a width greater than zero, the bottom end of any third partition 93 is located below the liquid level of the second aqueous solution, and the plurality of third partitions 93 and the plurality of second partitions 92 divide the cavity between the top wall of the inner cavity of the washing tank 91 and the second aqueous solution to form a serpentine air flow channel 911, one end of the air flow channel 911 is in communication with the input end of the washing tank 91, and the other end of the air flow channel 911 is in communication with the output end of the washing tank 91; the plurality of adsorption filter elements 94 are fixedly arranged on the inner wall of the washing tank 91, and the plurality of adsorption filter elements 94 are located in the air flow channel 911 and used for filtering the gas flowing through the air flow channel 911; and the spray washing assembly is arranged on the washing tank 91 and used for spraying the second aqueous solution into the air flow channel 911.

[0073] Further, as shown in the figure, Figure 7 the spray washing assembly comprises a water supply pipeline 951, a plurality of nozzles 952, a water circulation pipeline 9543, and a plurality of first water level sensors 953; the water supply pipeline 951 is fixedly arranged on the upper part of the inner cavity of the washing tank 91 and used for transmitting the second aqueous solution; the plurality of nozzles 952 are fixedly arranged on the water supply pipeline 951, any nozzle 952 is in communication with the water supply pipeline 951, the plurality of nozzles 952 are located in the air flow channel 911 and used for spraying the second aqueous solution, and the water mist of the sprayed second aqueous solution is used for capturing the particulate matter mixed in the toxic waste gas and the water-soluble gas; the water circulation pipeline 9543 is arranged on the washing tank 91 and in communication with the bottom of the inner cavity of the washing tank 91 and the water supply pipeline 951, and used for transmitting the second aqueous solution; and the plurality of first water level sensors 953 are fixedly arranged on the inner wall of the washing tank 91 and sequentially arranged along the height direction of the washing tank 91, and used for detecting the liquid level position of the second aqueous solution.

[0074] Preferably, as shown in the figure, Figure 7As shown, the water circulation pipe 9543 comprises: a main drainage pump 9541, a secondary drainage pump 9542, a circulation pipe 9543, a water inlet pipe 9544, a fifth electromagnetic valve 9545, a manual valve 9546, a drainage pipe 9547, a connecting pipe 9548 and a sixth electromagnetic valve 9549; the output end of the circulation pipe 9543 is communicated with the water supply pipe 951; the input end of the main drainage pump 9541 is communicated with the bottom of the inner cavity of the cleaning tank 91, the output end of the main drainage pump 9541 is communicated with the input end of the circulation pipe 9543, and the input end and the output end of the main drainage pump 9541 are respectively provided with a fourth electromagnetic valve 9550, which is used for pumping the second water solution stored in the cleaning tank 91 into the water supply pipe 951 through the circulation pipe 9543; the input end of the secondary drainage pump 9542 is communicated with the bottom of the inner cavity of the cleaning tank 91, the output end of the secondary drainage pump 9542 is communicated with the input end of the circulation pipe 9543, and the input end and the output end of the secondary drainage pump 9542 are respectively provided with a fourth electromagnetic valve 9550, which is used for pumping the second water solution stored in the cleaning tank 91 into the water supply pipe 951 through the circulation pipe 9543; the two ends of the water inlet pipe 9544 are respectively communicated with the water supply pipe 951 and an external water source, which is used for supplying water to the water supply pipe 951 so as to input the water solution into the cleaning tank 91; the fifth electromagnetic valve 9545 and the manual valve 9546 are both arranged on the water supply pipe, which are used for controlling the on-off and flow of the water inlet pipe 9544; the input end of the drainage pipe 9547 is communicated with the inner cavity of the cleaning tank 91, which is used for discharging the second water solution stored in the cleaning tank 91; one end of the connecting pipe 9548 is communicated with the bottom of the inner cavity of the cleaning tank 91, and the other end of the connecting pipe 9548 is communicated with the drainage pipe 9547; the sixth electromagnetic valve 9549 is arranged on the drainage pipe 9547, which is used for adjusting the flow of the drainage pipe 9547.

[0075] The above, with reference to Figures 1-7 The waste gas treatment equipment according to the embodiments of the present application is described, which has the following beneficial effects:

[0076] 1, the equipment through the first collecting chamber 11 in the collecting tank 1 set up and open the first baffle 2 with the gas guide hole, make through the collecting tank 1 inlet into the collecting tank 1 of waste gas need to flow through first collecting chamber 11, gas guide hole and second collecting chamber 12, can flow out through the gas outlet, in this process, the first water solution stored in the collecting tank 1 inside the waste gas mixed with particulate matter can be effectively captured, solved the existing technology in the gas scrubber system collecting tank 1 there is the defect of poor powder capture effect in the toxic waste gas mixed with.

[0077] 2, the equipment through the first collecting chamber 11 set up multiple first porous plate 3 and multiple sponge block 4, thereby utilizing its through multiple first porous plate 3 and sponge block 4 of waste gas dispersion into multiple gas flow, thereby further enhance the first water solution to the waste gas mixed with particulate matter capture effect.

[0078] It should be noted that in this specification, the terms "comprising", "comprising" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent in such a process, method, article or apparatus. Without more limitations, the elements defined by the statement "comprising" do not exclude the presence of other identical elements in the process, method, article or apparatus including the elements.

[0079] Although the content of the present application has been described in detail by the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the present application. After reading the above content, various modifications and alternatives of the present application will be obvious to those skilled in the art. Therefore, the protection scope of the present application should be defined by the appended claims.

Claims

1. An exhaust gas treatment device, characterized by, It comprises a collecting tank, a first partition plate and a gas guide hole. The inside of the collecting tank is pre-stored with a first water solution. The first partition plate is fixedly arranged on the inner cavity top wall of the collecting tank, and is arranged along the height direction of the collecting tank. The first partition plate divides the inner cavity of the collecting tank into a first collecting chamber and a second collecting chamber. The inner cavity top of the first collecting chamber is communicated with the gas inlet end of the collecting tank, and the inner cavity upper portion of the second collecting chamber is communicated with the gas outlet end of the collecting tank. The gas guide hole is arranged on the first partition plate, and the gas guide hole is located at the inner cavity bottom of the collecting tank. The two ends of the gas guide hole are respectively communicated with the first collecting chamber and the second collecting chamber.

2. The exhaust treatment device of claim 1, wherein, It further comprises a plurality of first porous plates. The plurality of first porous plates are movably arranged in the inner cavity of the first collecting chamber, and are sequentially arranged along the axial direction of the first collecting chamber. The radial cross-sectional shape of any one of the first porous plates matches that of the first collecting chamber.

3. The exhaust treatment device of claim 2, wherein, The density of any one of the first porous plates is less than that of the first water solution. The top surface and the bottom surface of the first porous plate are both irregular curved surfaces.

4. The exhaust treatment device of claim 2, wherein, It further comprises a plurality of sponge blocks. The plurality of sponge blocks are arranged in the first collecting chamber. One of the sponge blocks is movably arranged between the first porous plate at the bottom layer and the inner cavity bottom wall of the collecting tank, and the remaining sponge blocks are movably arranged in the gaps between the plurality of first porous plates. The radial cross-sectional shape of any one of the sponge blocks matches that of the first collecting chamber.

5. The exhaust treatment device of claim 2, wherein, It further comprises a containing cavity, a baffle, a plurality of guide holes, a plurality of connecting members and a second porous plate. The containing cavity is arranged in the inside of the first partition plate, and the bottom port of the containing cavity is exposed to the inner cavity top wall surface of the gas guide hole. The plurality of guide holes are arranged on the outer wall of the first partition plate. Any one of the guide holes is communicated with the containing cavity through the outer wall of the first partition plate. Any one of the guide holes is guided along the height direction of the collecting tank. The baffle is movably arranged in the containing cavity. The second porous plate is movably arranged in the inside of the second collecting chamber, and the density of the second porous plate is less than that of the first water solution. The plurality of connecting members are fixedly arranged on the second porous plate, and are fixedly connected with the baffle through the plurality of guide holes, so as to drive the baffle and the second porous plate to synchronously ascend and descend.

6. The exhaust treatment device of claim 1, wherein, It further comprises a cooling device and a cooling pipe. The cooling pipe is embedded in the inner cavity bottom wall of the collecting tank, and is used for transmitting a condensing medium. The cooling device is arranged on the collecting tank. The output end of the cooling device is connected with one end of the cooling pipe, and the input end of the cooling device is connected with the other end of the cooling pipe.

7. The exhaust treatment device of claim 1, wherein, It further comprises a cyclone dust collector, a high-temperature treatment module and a gas washing module. The cyclone dust collector is fixedly arranged on the outside of the collecting tank, and the output end of the cyclone dust collector is communicated with the gas inlet end of the collecting tank. The high-temperature treatment module is fixedly arranged outside the cyclone dust collector, and an output end of the high-temperature treatment module is communicated with an input end of the cyclone dust collector; The gas washing module is fixedly arranged outside the collecting tank, and an input end of the gas washing module is communicated with an air outlet end of the collecting tank.

8. The exhaust treatment device of claim 7, wherein the first and second exhaust treatment devices are arranged in series. The high-temperature treatment module comprises a combustion chamber, a heat insulation shell, a plurality of air inlet pipes, an air supply assembly, a combustion-supporting gas supply assembly and an ignition assembly; The combustion chamber is arranged in the interior of the heat insulation shell, and an output end of the combustion chamber is communicated with an input end of the cyclone dust collector; The plurality of air inlet pipes are fixedly arranged on the heat insulation shell, and output ends of the plurality of air inlet pipes are communicated with an inner cavity of the combustion chamber, for transmitting the toxic waste gas; The air supply assembly is fixedly arranged outside the heat insulation shell, and the air supply assembly is communicated with the inner cavity of the combustion chamber, for supplying air; The combustion-supporting gas supply assembly is fixedly arranged outside the heat insulation shell, and the combustion-supporting gas supply assembly is communicated with the inner cavity of the combustion chamber, for supplying combustion-supporting gas; The ignition assembly is arranged in the interior of the combustion chamber, for igniting the mixed gas input into the interior of the combustion chamber.

9. The exhaust treatment device of claim 7, wherein the first and second exhaust treatment devices are arranged in series. The gas washing module comprises a washing box, a plurality of second partitions, a plurality of third partitions, a plurality of adsorption filter elements and a spray washing assembly; The inner cavity of the washing box is pre-stored with a second aqueous solution, input and output ends of the washing box are both communicated with an upper portion of the inner cavity of the washing box, and the input end of the washing box is communicated with the output end of the collecting tank; The plurality of second partitions are fixedly arranged on the inner wall of the washing box, and each of the second partitions is arranged along the height direction of the washing box, the top end of each of the second partitions is fixedly connected with the top wall of the inner cavity of the washing box, and the bottom end of each of the second partitions is located on the upper side of the liquid surface of the second aqueous solution; The plurality of third partitions are fixedly arranged on the inner wall of the washing box, and each of the third partitions is arranged along the height direction of the washing box, each of the third partitions is located between any two adjacent second partitions, the gap between the top end of each of the third partitions and the top wall of the inner cavity of the washing box is greater than zero, the bottom end of each of the third partitions is located on the lower side of the liquid surface of the second aqueous solution, the plurality of third partitions and the plurality of second partitions divide the cavity between the top wall of the inner cavity of the washing box and the second aqueous solution to form a serpentine air flow channel, one end of the air flow channel is communicated with the input end of the washing box, and the other end of the air flow channel is communicated with the output end of the washing box; The plurality of adsorption filter elements are fixedly arranged on the inner wall of the washing box, and the plurality of adsorption filter elements are located in the air flow channel, for filtering the gas flowing through the air flow channel; The spray washing assembly is arranged on the washing box, for spraying the second aqueous solution into the air flow channel.

10. The exhaust treatment device of claim 9, wherein, The spray washing assembly comprises a water supply pipeline, a plurality of nozzles, a water circulation pipeline and a plurality of first water level sensors. The water supply pipeline is fixedly arranged on the upper portion of the inner cavity of the cleaning box and is used for conveying the second water solution; The plurality of nozzles are fixedly arranged on the water supply pipeline, any one of the nozzles is communicated with the water supply pipeline, the plurality of nozzles are located in the air flow channel, and the plurality of nozzles are used for spraying the second water solution; The water circulation pipeline is arranged on the cleaning box, the water circulation pipeline is communicated with the bottom of the inner cavity of the cleaning box and the water supply pipeline, and is used for conveying the second water solution; The plurality of first water level sensors are fixedly arranged on the inner wall of the cleaning box, the plurality of first water level sensors are sequentially arranged along the height direction of the cleaning box, and are used for detecting the liquid surface position of the second water solution.

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